Fang; Haoquan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fang; Haoquan.The latest application filed is for "systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead".

Company Profile

1.8.12

Fang; Haoquan - Sunnyvale CA
Fang; Haoquan - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system Grant 10,267,728 - Yang , et al.	2019-04-23
Systems And Methods For Metastable Activated Radical Selective Strip And Etch Using Dual Plenum Showerhead App 20180174870 - Yang; Dengliang ; et al.	2018-06-21
Systems And Methods For Detecting Oxygen In-situ In A Substrate Area Of A Substrate Processing System App 20180088031 - Yang; Dengliang ; et al.	2018-03-29
Ultra low silicon loss high dose implant strip Grant 9,564,344 - Cheung , et al. February 7, 2	2017-02-07
Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper Grant 9,397,011 - Fang , et al. July 19, 2	2016-07-19
Ultra Low Silicon Loss High Dose Implant Strip App 20150332933 - Cheung; David ; et al.	2015-11-19
Enhanced passivation process to protect silicon prior to high dose implant strip Grant 8,721,797 - Cheung , et al. May 13, 2	2014-05-13
Single wafer dryer and drying methods Grant 7,980,255 - Achkire , et al. July 19, 2	2011-07-19
Enhanced Passivation Process To Protect Silicon Prior To High Dose Implant Strip App 20110139175 - Cheung; David ; et al.	2011-06-16
Ultra Low Silicon Loss High Dose Implant Strip App 20110143548 - Cheung; David ; et al.	2011-06-16
Partial Contact Wafer Retaining Ring Apparatus App 20100120335 - Fang; Haoquan ; et al.	2010-05-13
Single Wafer Dryer And Drying Methods App 20090241996 - Achkire; Younes ; et al.	2009-10-01
Single wafer dryer and drying methods Grant 7,513,062 - Achkire , et al. April 7, 2	2009-04-07
Single Wafer Dryer And Drying Methods App 20070295371 - Achkire; Younes ; et al.	2007-12-27
Single wafer dryer and drying methods App 20060174921 - Achkire; Younes ; et al.	2006-08-10
Single wafer dryer and drying methods App 20050241684 - Achkire, Younes ; et al.	2005-11-03
Single wafer dryer and drying methods App 20050229426 - Achkire, Younes ; et al.	2005-10-20
Single wafer dryer and drying methods Grant 6,955,516 - Achkire , et al. October 18, 2	2005-10-18
Single wafer dryer and drying methods App 20030121170 - Achkire, Younes ; et al.	2003-07-03

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