Epple; Alexander

Patent Applications and Registrations

Patent applications and USPTO patent grants for Epple; Alexander.The latest application filed is for "immersion objective".

Company Profile

5.94.110

Epple; Alexander - Aalen DE
Epple; Alexander - 73431 DE
Epple; Alexander - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Projection lens, projection exposure apparatus and projection exposure method Grant 10,969,694 - Epple , et al. April 6, 2	2021-04-06
Immersion Objective App 20210026124 - Epple; Alexander	2021-01-28
Projection Lens, Projection Exposure Apparatus And Projection Exposure Method App 20200026199 - Epple; Alexander ; et al.	2020-01-23
Optical imaging device and imaging method for microscopy Grant 10,422,985 - Epple , et al. Sept	2019-09-24
Microlithography projection objective Grant 10,281,824 - Feldmann , et al.	2019-05-07
Catadioptric Projection Objective App 20180373006 - Epple; Alexander ; et al.	2018-12-27
Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit Grant 10,139,734 - Epple , et al. Nov	2018-11-27
Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same Grant 10,101,668 - Epple , et al. October 16, 2	2018-10-16
Catadioptric projection objective Grant 10,042,146 - Epple , et al. August 7, 2	2018-08-07
Catadioptric Projection Objective App 20180095258 - Epple; Alexander ; et al.	2018-04-05
Catadioptric Projection Objective With Parallel, Offset Optical Axes App 20180031815 - Shafer; David ; et al.	2018-02-01
Catadioptric Projection Objective With Intermediate Images App 20170363963 - Dodoc; Aurelian ; et al.	2017-12-21
Catadioptric projection objective with parallel, offset optical axes Grant 9,772,478 - Shafer , et al. September 26, 2	2017-09-26
Catadioptric projection objective with intermediate images Grant 9,726,979 - Dodoc , et al. August 8, 2	2017-08-08
Catadioptric projection objective Grant 9,726,870 - Epple , et al. August 8, 2	2017-08-08
Microlithography Projection Objective App 20170192362 - Feldmann; Heiko ; et al.	2017-07-06
Imaging optical system and projection exposure installation for microlithography including same Grant 9,541,841 - Mann , et al. January 10, 2	2017-01-10
Catadioptric Projection Objective App 20160274343 - Shafer; David R. ; et al.	2016-09-22
Catadioptric Projection Objective App 20160231546 - Epple; Alexander ; et al.	2016-08-11
Method of manufacturing a projection objective and projection objective Grant 9,360,775 - Feldmann , et al. June 7, 2	2016-06-07
Catadioptric projection objective Grant 9,279,969 - Epple , et al. March 8, 2	2016-03-08
Projection exposure apparatus for projection lithography Grant 9,235,136 - Epple January 12, 2	2016-01-12
Projection lens system of a microlithographic projection exposure installation Grant 9,164,396 - Beierl , et al. October 20, 2	2015-10-20
Imaging Optical Unit And Projection Exposure Apparatus For Projection Lithography, Having Such Imaging Optical Unit App 20150293457 - Epple; Alexander ; et al.	2015-10-15
Catadioptric projection objective with intermediate images Grant 9,134,618 - Dodoc , et al. September 15, 2	2015-09-15
Catadioptric Projection Objective With Parallel, Offset Optical Axes App 20150226948 - Shafer; David ; et al.	2015-08-13
Optical imaging device and imaging method for microscopy Grant 9,104,026 - Epple , et al. August 11, 2	2015-08-11
Microlithography projection objective Grant 9,097,984 - Feldmann , et al. August 4, 2	2015-08-04
Catadioptric Projection Objective With Intermediate Images App 20150205084 - Dodoc; Aurelian ; et al.	2015-07-23
Optical arrangement in a projection objective of a microlithographic projection exposure apparatus Grant 9,086,561 - Rostalski , et al. July 21, 2	2015-07-21
Microlithographic projection exposure apparatus Grant 9,046,787 - Gruner , et al. June 2, 2	2015-06-02
Optical Imaging Device And Imaging Method For Microscopy App 20150124075 - Epple; Alexander ; et al.	2015-05-07
Catadioptric projection objective with intermediate images Grant 9,019,596 - Dodoc , et al. April 28, 2	2015-04-28
Projection Exposure Apparatus For Projection Lithography App 20150070677 - Epple; Alexander	2015-03-12
Catadioptric Projection Objective App 20150055214 - Shafer; David R. ; et al.	2015-02-26
Catadioptric Projection Objective App 20150055212 - Epple; Alexander ; et al.	2015-02-26
Catadioptric Projection Objective With Two Intermediate Images And No More Than Four Lenses Between The Aperture Stop And Image Plane App 20140376086 - Shafer; David ; et al.	2014-12-25
Catadioptric projection objective with intermediate images Grant 8,913,316 - Dodoc , et al. December 16, 2	2014-12-16
Immersion catadioptric projection objective having two intermediate images Grant 8,908,269 - Shafer , et al. December 9, 2	2014-12-09
Microlithography Projection Objective App 20140333913 - Feldmann; Heiko ; et al.	2014-11-13
Catadioptric projection objective Grant 8,873,137 - Epple , et al. October 28, 2	2014-10-28
Microlithography Projection Objective App 20140293256 - Feldmann; Heiko ; et al.	2014-10-02
Catadioptric projection objective including an aspherized plate Grant 8,804,234 - Shafer , et al. August 12, 2	2014-08-12
Catadioptric projection objective Grant 8,730,572 - Shafer , et al. May 20, 2	2014-05-20
Catadioptric Projection Objective With Intermediate Images App 20140118713 - Dodoc; Aurelian ; et al.	2014-05-01
Catadioptric Projection Objective App 20140111787 - Shafer; David R. ; et al.	2014-04-24
Catadioptric Projection Objective With Intermediate Images App 20140111786 - Dodoc; Aurelian ; et al.	2014-04-24
Catadioptric Projection Objective With Intermediate Images App 20140078483 - Dodoc; Aurelian ; et al.	2014-03-20
Catadioptric Projection Objective App 20130242279 - EPPLE; Alexander ; et al.	2013-09-19
Chromatically Corrected Objective With Specifically Structured And Arranged Dioptric Optical Elements And Projection Exposure Apparatus Including The Same App 20130201464 - EPPLE; Alexander ; et al.	2013-08-08
Catadioptric projection objective Grant 8,446,665 - Epple , et al. May 21, 2	2013-05-21
Catadioptric Projection Objective With Mirror Group App 20130120728 - Epple; Alexander ; et al.	2013-05-16
Imaging Optical System And Projection Exposure Installation For Microlithography Including Same App 20130088701 - Mann; Hans-Juergen ; et al.	2013-04-11
Catadioptric projection objective Grant 8,416,490 - Shafer , et al. April 9, 2	2013-04-09
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20130070224 - Beierl; Helmut ; et al.	2013-03-21
Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure method Grant 8,390,784 - Epple March 5, 2	2013-03-05
Catadioptric projection objective with mirror group Grant 8,363,315 - Epple , et al. January 29, 2	2013-01-29
Catadioptric projection objective Grant 8,355,201 - Shafer , et al. January 15, 2	2013-01-15
High transmission, high aperture catadioptric projection objective and projection exposure apparatus Grant 8,345,222 - Kraehmer , et al. January 1, 2	2013-01-01
Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same Grant 8,345,350 - Epple , et al. January 1, 2	2013-01-01
Catadioptric projection objective Grant 8,339,701 - Shafer , et al. December 25, 2	2012-12-25
Projection lens system of a microlithographic projection exposure installation Grant 8,319,944 - Beierl , et al. November 27, 2	2012-11-27
Method of manufacturing a projection objective and projection objective Grant 8,310,752 - Feldmann , et al. November 13, 2	2012-11-13
Catadioptric Projection Objective App 20120274919 - Shafer; David ; et al.	2012-11-01
Catadioptric Projection Objective App 20120274918 - Shafer; David ; et al.	2012-11-01
Catadioptric projection objective Grant 8,300,211 - Epple , et al. October 30, 2	2012-10-30
Catadioptric projection objective Grant 8,289,619 - Shafer , et al. October 16, 2	2012-10-16
Catadioptric Projection Objective App 20120250147 - Shafer; David ; et al.	2012-10-04
Catadioptric Projection Objective With Intermediate Images App 20120162625 - DODOC; Aurelian ; et al.	2012-06-28
Catadioptric projection objective Grant 8,208,199 - Shafer , et al. June 26, 2	2012-06-26
Catadioptric projection objective Grant 8,208,198 - Shafer , et al. June 26, 2	2012-06-26
Catadioptric projection objective Grant 8,199,400 - Shafer , et al. June 12, 2	2012-06-12
Method Of Manufacturing A Projection Objective And Projection Objective App 20120134016 - Feldmann; Heiko ; et al.	2012-05-31
Optical Arrangement In A Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20120075602 - Rostalski; Hans-Juergen ; et al.	2012-03-29
Catadioptric projection objective with intermediate images Grant 8,107,162 - Dodoc , et al. January 31, 2	2012-01-31
Projection objective for lithography Grant 8,068,276 - Feldmann , et al. November 29, 2	2011-11-29
Projection objective, projection exposure apparatus and reflective reticle for microlithography Grant 8,064,040 - Dodoc , et al. November 22, 2	2011-11-22
Catadioptric Projection Objective With Mirror Group App 20110261444 - Epple; Alexander ; et al.	2011-10-27
Catadioptric Projection Objective App 20110235167 - Shafer; David ; et al.	2011-09-29
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20110228246 - Kneer; Bernhard ; et al.	2011-09-22
Catadioptric Projection Objective App 20110211252 - Shafer; David ; et al.	2011-09-01
Chromatically corrected catadioptric objective and projection exposure apparatus including the same Grant 8,004,756 - Epple August 23, 2	2011-08-23
Microlithographic Projection Exposure Apparatus App 20110134403 - Feldmann; Heiko ; et al.	2011-06-09
Microlithographic Projection Exposure Apparatus App 20110109893 - Gruner; Toralf ; et al.	2011-05-12
Catadioptric Projection Objective App 20110075121 - Epple; Alexander ; et al.	2011-03-31
Catadioptric Projection Objective App 20110038061 - EPPLE; Alexander ; et al.	2011-02-17
Projection Objective For Lithography App 20110026110 - Feldmann; Heiko ; et al.	2011-02-03
Chromatically Corrected Catadioptric Objective And Projection Exposure Apparatus Including The Same App 20110007387 - EPPLE; Alexander	2011-01-13
Catadioptric projection objective Grant 7,869,122 - Shafer , et al. January 11, 2	2011-01-11
Projection objective for lithography Grant 7,835,073 - Feldmann , et al. November 16, 2	2010-11-16
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20100265478 - Beierl; Helmut ; et al.	2010-10-21
Catadioptric Projection Objective App 20100265572 - Shafer; David ; et al.	2010-10-21
Catadioptric Projection Objective App 20100253999 - Shafer; David ; et al.	2010-10-07
Projection lens system of a microlithographic projection exposure installation Grant 7,782,440 - Beierl , et al. August 24, 2	2010-08-24
Optical imaging device and imaging method for microscopy App 20100188738 - Epple; Alexander ; et al.	2010-07-29
Chromatically corrected catadioptric objective and projection exposure apparatus including the same Grant 7,760,425 - Epple July 20, 2	2010-07-20
Chromatically Corrected Objective And Projection Exposure Apparatus Including The Same App 20100128240 - Epple; Alexander ; et al.	2010-05-27
Imaging system for a microlithographical projection light system Grant 7,719,658 - Dorsel , et al. May 18, 2	2010-05-18
Imaging system with mirror group Grant 7,712,905 - Shafer , et al. May 11, 2	2010-05-11
High Transmission, High Aperture Catadioptric Projection Objective And Projection Exposure Apparatus App 20100097592 - Kraehmer; Daniel ; et al.	2010-04-22
Catadioptric projection objective Grant 7,697,198 - Shafer , et al. April 13, 2	2010-04-13
Catadioptric projection objective Grant 7,679,821 - Shafer , et al. March 16, 2	2010-03-16
Catadioptric projection objective Grant 7,672,047 - Shafer , et al. March 2, 2	2010-03-02
Catadioptric Projection Objective App 20100014153 - Shafer; David ; et al.	2010-01-21
Chromatically Corrected Objective And Projection Exposure Apparatus Including The Same App 20090316256 - EPPLE; Alexander ; et al.	2009-12-24
Method Of Manufacturing A Projection Objective And Projection Objective App 20090207487 - Feldmann; Heiko ; et al.	2009-08-20
Catadioptric Projection Objective App 20090190208 - Shafer; David ; et al.	2009-07-30
Catadioptric Projection Objective With Pupil Mirror, Projection Exposure Apparatus And Projection Exposure Method App 20090185153 - Epple; Alexander	2009-07-23
Lithography lens system and projection exposure system provided with at least one lithography lens system of this type Grant 7,551,361 - Rostalski , et al. June 23, 2	2009-06-23
Microlithography projection objective App 20090115986 - Feldmann; Heiko ; et al.	2009-05-07
Compact High Aperture Folded Catadioptric Projection Objective App 20090091728 - EPPLE; Alexander	2009-04-09
High Aperture Folded Catadioptric Projection Objective App 20090086338 - EPPLE; Alexander	2009-04-02
Refractive optical imaging system, in particular projection objective for microlithography Grant 7,511,890 - Ulrich , et al. March 31, 2	2009-03-31
Chromatically corrected catadioptric objective and projection exposure apparatus including the same App 20090059358 - Epple; Alexander	2009-03-05
Projection optical system Grant 7,492,509 - Rostalski , et al. February 17, 2	2009-02-17
Catadioptric projection objective with intermediate images App 20090034061 - Dodoc; Aurelian ; et al.	2009-02-05
Catadioptric Projection Objective With Geometric Beam Splitting App 20080316456 - Shafer; David R. ; et al.	2008-12-25
Catadioptric Projection Objective App 20080310014 - Shafer; David ; et al.	2008-12-18
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20080304033 - Kneer; Bernhard ; et al.	2008-12-11
Projection exposure apparatus Grant 7,463,422 - Kamenow , et al. December 9, 2	2008-12-09
Catadioptric Projection Objective App 20080297889 - Shafer; David ; et al.	2008-12-04
Catadioptric Projection Objective App 20080285121 - Shafer; David ; et al.	2008-11-20
Catadioptric projection objective Grant 7,446,952 - Epple November 4, 2	2008-11-04
Projection Objective For Microlithography App 20080259308 - Epple; Alexander	2008-10-23
Catadioptric projection objective with geometric beam splitting Grant 7,426,082 - Shafer , et al. September 16, 2	2008-09-16
Imaging System With Mirror Group App 20080213703 - Shafer; David ; et al.	2008-09-04
Catadioptric Projection Objective App 20080212170 - Shafer; David ; et al.	2008-09-04
Projection Objective, Projection Exposure Apparatus and Reflective Reticle For Microlithography App 20080198353 - Dodoc; Aurelian ; et al.	2008-08-21
Microlithographic Projection Exposure Apparatus App 20080192224 - Gruner; Toralf ; et al.	2008-08-14
Catadioptric Projection Objective App 20080186567 - Shafer; David ; et al.	2008-08-07
Refractive projection objective for immersion lithography Grant 7,408,716 - Rostalski , et al. August 5, 2	2008-08-05
Projection Objective For Lithography App 20080174858 - Feldmann; Heiko ; et al.	2008-07-24
Catadioptric Projection Objective App 20080151365 - Shafer; David ; et al.	2008-06-26
Catadioptric Projection Objective App 20080151364 - Shafer; David ; et al.	2008-06-26
Catadioptric projection objective Grant 7,385,756 - Shafer , et al. June 10, 2	2008-06-10
Reticle-masking objective with aspherical lenses Grant 7,372,634 - Wangler , et al. May 13, 2	2008-05-13
Projection Lens System of a Microlithographic Projection Exposure Installation App 20080106711 - Beierl; Helmut ; et al.	2008-05-08
Catadioptric Projection Objective App 20080037111 - Shafer; David ; et al.	2008-02-14
Catadioptric Projection Objective App 20080002265 - Epple; Alexander	2008-01-03
Projection objective, especially for microlithography, and method for adjusting a projection objective Grant 7,310,187 - Epple , et al. December 18, 2	2007-12-18
Imaging System for a Microlithographical Projection Light System App 20070285637 - Dorsel; Andreas ; et al.	2007-12-13
Lithography Lens System And Projection Exposure System Provided With At Least One Lithography Lens System Of This Type App 20070258134 - Rostalski; Hans-Juergen ; et al.	2007-11-08
Projection Optical System App 20070258152 - Rostalski; Hans-Juergen ; et al.	2007-11-08
Lithographic objective having a first lens group including only lenses having a positive refractive power Grant 7,289,279 - Schuster , et al. October 30, 2	2007-10-30
Catadioptric projection objective App 20070236674 - Shafer; David ; et al.	2007-10-11
Method of determining lens materials for a projection exposure apparatus App 20070195423 - Kamenov; Vladimir ; et al.	2007-08-23
Projection objective, especially for microlithography, and method for adjusting a projection objective App 20070188881 - Epple; Alexander ; et al.	2007-08-16
Optical system for ultraviolet light Grant 7,256,932 - Epple , et al. August 14, 2	2007-08-14
Projection objective for a microlithographic projection exposure apparatus App 20070165198 - Kneer; Bernhard ; et al.	2007-07-19
Refractive projection objective for immersion lithography App 20070109659 - Rostalski; Hans-Juergen ; et al.	2007-05-17
Projection objective, especially for microlithography, and method for adjusting a projection objective Grant 7,209,292 - Epple , et al. April 24, 2	2007-04-24
Catadioptric projection objective Grant 7,203,010 - Epple , et al. April 10, 2	2007-04-10
Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 Grant 7,190,530 - Mann , et al. March 13, 2	2007-03-13
Refractive projection objective for immersion lithography Grant 7,187,503 - Rostalski , et al. March 6, 2	2007-03-06
Reticle-masking Objective With Aspherical Lenses App 20070014028 - Wangler; Johannes ; et al.	2007-01-18
Catadioptric reduction lens Grant 7,136,220 - Ulrich , et al. November 14, 2	2006-11-14
Reticle-masking objective with aspherical lenses Grant 7,130,129 - Schultz , et al. October 31, 2	2006-10-31
Refractive optical imaging system, in particular projection objective for microlithography App 20060198028 - Ulrich; Wilhelm ; et al.	2006-09-07
Lithographic objective having a first lens group including only lenses having a positive refractive power App 20060176573 - Schuster; Karl-Heinz ; et al.	2006-08-10
Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 App 20060171040 - Mann; Hans-Juergen ; et al.	2006-08-03
Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 Grant 7,085,075 - Mann , et al. August 1, 2	2006-08-01
Catadioptric projection objective App 20060132931 - Epple; Alexander ; et al.	2006-06-22
Optical system for ultraviolet light App 20060119750 - Epple; Alexander ; et al.	2006-06-08
Catadioptric reductions lens Grant 7,046,459 - Shafer , et al. May 16, 2	2006-05-16
Catadioptric projection objective with an in-line, single-axis configuration App 20060082905 - Shafer; David R. ; et al.	2006-04-20
Catadioptric projection objective with geometric beam splitting App 20060077366 - Shafer; David R. ; et al.	2006-04-13
Lithographic objective having a first lens group including only lenses having a positive refractive power Grant 7,023,627 - Schuster , et al. April 4, 2	2006-04-04
Catadioptric reduction lens Grant 7,006,304 - Epple , et al. February 28, 2	2006-02-28
Catadioptric projection objective with geometric beam splitting Grant 6,995,930 - Shafer , et al. February 7, 2	2006-02-07
Catadioptric projection objective App 20050207029 - Epple, Alexander ; et al.	2005-09-22
Catadioptric projection objective App 20050190435 - Shafer, David ; et al.	2005-09-01
Refractive projection objective for immersion lithography App 20050190455 - Rostalski, Hans-Juergen ; et al.	2005-09-01
Catadioptric projection objective with geometric beam splitting App 20050185269 - Epple, Alexander ; et al.	2005-08-25
Catadioptric projection objective with geometric beam splitting App 20050117224 - Shafer, David R. ; et al.	2005-06-02
Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 App 20050036213 - Mann, Hans-Jurgen ; et al.	2005-02-17
Catadioptric reduction lens App 20040263955 - Ulrich, Wilhelm ; et al.	2004-12-30
Objective with at least one aspheric lens Grant 6,831,794 - Schuster , et al. December 14, 2	2004-12-14
Lithographic objective having a first lens group including only lenses having a positive refractive power App 20040228001 - Schuster, Karl-Heinz ; et al.	2004-11-18
Objective With At Least One Aspheric Lens App 20040212899 - Schuster, Karl-Heinz ; et al.	2004-10-28
Reticle-masking objective with aspherical lenses App 20040207928 - Schultz, Jorg ; et al.	2004-10-21
Projection exposure system Grant 6,806,942 - Schuster , et al. October 19, 2	2004-10-19
Lithographic objective having a first lens group including only lenses having a positive refractive power Grant 6,788,387 - Schuster , et al. September 7, 2	2004-09-07
Catadioptric reduction lens App 20040160677 - Epple, Alexander ; et al.	2004-08-19
Catadioptric reduction lens Grant 6,765,729 - Perrin , et al. July 20, 2	2004-07-20
Projection objective, especially for microlithography, and method for adjusting a projection objective App 20040109237 - Epple, Alexander ; et al.	2004-06-10
Catadioptric reduction objective App 20040075894 - Shafer, David R. ; et al.	2004-04-22
Catadioptric reduction lens Grant 6,717,746 - Epple , et al. April 6, 2	2004-04-06
Projection exposure system App 20040017554 - Schuster, Karl-Heinz ; et al.	2004-01-29
Partial objective in an illuminating systems Grant 6,680,803 - Schultz , et al. January 20, 2	2004-01-20
Catadioptric reduction lens App 20030021040 - Epple, Alexander ; et al.	2003-01-30
Catadioptric reduction lens App 20020167737 - Perrin, Jean Claude ; et al.	2002-11-14
Lithographic objective having a first lens group including only lenses having a positive refractive power App 20020122164 - Schuster, Karl-Heinz ; et al.	2002-09-05