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SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material Grant 11,011,371 - Gadre , et al. May 18, 2 | 2021-05-18 |
Ultra-high modulus and etch selectivity boron carbon hardmask films Grant 10,971,364 - Kulshreshtha , et al. April 6, 2 | 2021-04-06 |
Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films Grant 10,930,475 - Kulshreshtha , et al. February 23, 2 | 2021-02-23 |
Geometric control of bottom-up pillars for patterning applications Grant 10,930,503 - Duan , et al. February 23, 2 | 2021-02-23 |
Methods For Gapfill In High Aspect Ratio Structures App 20210028055 - Manna; Pramit ;   et al. | 2021-01-28 |
Methods of Forming Tungsten Pillars App 20210013038 - Mallick; Abhijit Basu ;   et al. | 2021-01-14 |
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Methods of forming self-aligned vias and air gaps Grant 10,840,186 - Roy , et al. November 17, 2 | 2020-11-17 |
Methods for gapfill in high aspect ratio structures Grant 10,811,303 - Manna , et al. October 20, 2 | 2020-10-20 |
Methods of forming tungsten pillars Grant 10,784,107 - Mallick , et al. Sept | 2020-09-22 |
Critical dimension control for self-aligned contact patterning Grant 10,770,349 - Mallick , et al. Sep | 2020-09-08 |
Methods for Wordline Separation in 3D-NAND Devices App 20200243382 - Chen; Yihong ;   et al. | 2020-07-30 |
Deposition and treatment of films for patterning Grant 10,699,952 - Basu , et al. | 2020-06-30 |
Selective deposition for simplified process flow of pillar formation Grant 10,636,659 - Chen , et al. | 2020-04-28 |
Methods for wordline separation in 3D-NAND devices Grant 10,622,251 - Chen , et al. | 2020-04-14 |
Seamless tungsten fill by tungsten oxidation-reduction Grant 10,559,497 - Wu , et al. Feb | 2020-02-11 |
Methods Of Forming Self-Aligned Vias App 20190385849 - Thompson; David ;   et al. | 2019-12-19 |
Method for enabling self-aligned lithography on metal contacts and selective deposition using free-standing vertical carbon structures Grant 10,490,411 - Leschkies , et al. Nov | 2019-11-26 |
Methods Of Forming Self-Aligned Vias And Air Gaps App 20190348368 - Roy; Susmit Singha ;   et al. | 2019-11-14 |
Methods For Wordline Separation In 3d-nand Devices App 20190333810 - Chen; Yihong ;   et al. | 2019-10-31 |
Sibn Film For Conformal Hermetic Dielectric Encapsulation Without Direct Rf Exposure To Underlying Structure Material App 20190326110 - GADRE; Milind ;   et al. | 2019-10-24 |
Ultra-high modulus and etch selectivity boron-carbon hardmask films Grant 10,418,243 - Kulshreshtha , et al. Sept | 2019-09-17 |
Methods of forming self-aligned vias Grant 10,410,865 - Thompson , et al. Sept | 2019-09-10 |
Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application Grant 10,410,872 - Cheng , et al. Sept | 2019-09-10 |
Methods of forming self-aligned vias and air gaps Grant 10,403,542 - Roy , et al. Sep | 2019-09-03 |
Graded In-situ Charge Trapping Layers To Enable Electrostatic Chucking And Excellent Particle Performance For Boron-doped Carbon App 20190252158 - KULSHRESHTHA; Prashant Kumar ;   et al. | 2019-08-15 |
Deposition And Treatment Of Films For Patterning App 20190252252 - Basu; Atashi ;   et al. | 2019-08-15 |
Methods For Self-Aligned Patterning App 20190252206 - Duan; Ziqing ;   et al. | 2019-08-15 |
Geometric Control Of Bottom-Up Pillars For Patterning Applications App 20190252188 - Duan; Ziqing ;   et al. | 2019-08-15 |
Gas flow profile modulated control of overlay in plasma CVD films Grant 10,373,822 - Kulshreshtha , et al. | 2019-08-06 |
Methods for wordline separation in 3D-NAND devices Grant 10,354,916 - Chen , et al. July 16, 2 | 2019-07-16 |
Deposition and treatment of films for patterning Grant 10,319,636 - Basu , et al. | 2019-06-11 |
Methods for self-aligned patterning Grant 10,319,604 - Duan , et al. | 2019-06-11 |
Geometric control of bottom-up pillars for patterning applications Grant 10,319,591 - Duan , et al. | 2019-06-11 |
Methods For Gapfill In High Aspect Ratio Structures App 20190157134 - Manna; Pramit ;   et al. | 2019-05-23 |
Ultra-high Modulus And Etch Selectivity Boron-carbon Hardmask Films App 20190122889 - KULSHRESHTHA; Prashant Kumar ;   et al. | 2019-04-25 |
Methods for gapfill in high aspect ratio structures Grant 10,192,775 - Manna , et al. Ja | 2019-01-29 |
Methods Of Forming Self-Aligned Vias App 20190013202 - Thompson; David ;   et al. | 2019-01-10 |
Methods Of Forming Self-Aligned Vias And Air Gaps App 20180358260 - Roy; Susmit Singha ;   et al. | 2018-12-13 |
Seamless Tungsten Fill By Tungsten Oxidation-Reduction App 20180358264 - Wu; Yong ;   et al. | 2018-12-13 |
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Methods Of Lowering Wordline Resistance App 20180350606 - Chen; Yihong ;   et al. | 2018-12-06 |
Method For Enabling Self-aligned Lithography On Metal Contacts And Selective Deposition Using Free-standing Vertical Carbon Structures App 20180337061 - LESCHKIES; Kurtis ;   et al. | 2018-11-22 |
Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films Grant 10,128,088 - Kulshreshtha , et al. November 13, 2 | 2018-11-13 |
Methods of Forming Tungsten Pillars App 20180323068 - Mallick; Abhijit Basu ;   et al. | 2018-11-08 |
Edge hump reduction faceplate by plasma modulation Grant 10,100,408 - Ha , et al. October 16, 2 | 2018-10-16 |
Methods of forming self-aligned vias Grant 10,083,834 - Thompson , et al. September 25, 2 | 2018-09-25 |
Critical Dimension Control For Self-Aligned Contact Patterning App 20180240706 - Mallick; Abhijit Basu ;   et al. | 2018-08-23 |
Deposition And Treatment Of Films For Patterning App 20180144980 - Basu; Atashi ;   et al. | 2018-05-24 |
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Methods For Self-Aligned Patterning App 20180130671 - Duan; Ziqing ;   et al. | 2018-05-10 |
Methods Of Forming Self-Aligned Vias App 20180096847 - Thompson; David ;   et al. | 2018-04-05 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films App 20180096843 - Kulshreshtha; Prashant Kumar ;   et al. | 2018-04-05 |
Borane Mediated Dehydrogenation Process From Silane And Alkylsilane Species For Spacer And Hardmask Application App 20180076042 - CHENG; Rui ;   et al. | 2018-03-15 |
Gas flow profile modulated control of overlay in plasma CVD films Grant 9,837,265 - Kulshreshtha , et al. December 5, 2 | 2017-12-05 |
Methods For Gapfill In High Aspect Ratio Structures App 20170271196 - Manna; Pramit ;   et al. | 2017-09-21 |
Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system Grant 9,711,360 - Duan , et al. July 18, 2 | 2017-07-18 |
Uniform Wafer Temperature Achievement In Unsymmetric Chamber Environment App 20170178758 - HA; Sungwon ;   et al. | 2017-06-22 |
Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks App 20170162417 - YE; Zheng John ;   et al. | 2017-06-08 |
Ultra-high Modulus And Etch Selectivity Boron-carbon Hardmask Films App 20170103893 - KULSHRESHTHA; Prashant Kumar ;   et al. | 2017-04-13 |
Methods To Improve In-film Particle Performance Of Amorphous Boron-carbon Hardmask Process In Pecvd System App 20170062218 - DUAN; Ziqing ;   et al. | 2017-03-02 |
Graded In-situ Charge Trapping Layers To Enable Electrostatic Chucking And Excellent Particle Performance For Boron-doped Carbon Films App 20160358804 - KULSHRESHTHA; Prashant Kumar ;   et al. | 2016-12-08 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films App 20160307752 - KULSHRESHTHA; Prashant Kumar ;   et al. | 2016-10-20 |
Gas flow profile modulated control of overlay in plasma CVD films Grant 9,390,910 - Kulshreshtha , et al. July 12, 2 | 2016-07-12 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films App 20160099147 - KULSHRESHTHA; Prashant Kumar ;   et al. | 2016-04-07 |
Edge Hump Reduction Faceplate By Plasma Modulation App 20150247237 - HA; Sungwon ;   et al. | 2015-09-03 |