Patent | Date |
---|
Microfeature Workpieces And Methods For Forming Interconnects In Microfeature Workpieces App 20210005514 - Hiatt; William M. ;   et al. | 2021-01-07 |
Microfeature Workpieces And Methods For Forming Interconnects In Microfeature Workpieces App 20170323828 - Hiatt; William M. ;   et al. | 2017-11-09 |
Semiconductor structures and die assemblies including conductive vias and thermally conductive elements and methods of forming such structures Grant 9,653,381 - Dando May 16, 2 | 2017-05-16 |
Semiconductor Structures And Die Assemblies Including Conductive Vias And Thermally Conductive Elements And Methods Of Forming Such Structures App 20150364400 - Dando; Ross S. | 2015-12-17 |
Methods For Depositing Material Onto Microfeature Workpieces In Reaction Chambers And Systems For Depositing Materials Onto Microfeature Workpieces App 20150247236 - Dando; Ross S. ;   et al. | 2015-09-03 |
Apparatuses Facilitating Fluid Flow Into Via Holes, Vents, And Other Openings Communicating With Surfaces Of Substrates Of Semiconductor Device Components App 20150140817 - Dando; Ross S. | 2015-05-21 |
Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces Grant 9,023,436 - Dando , et al. May 5, 2 | 2015-05-05 |
Apparatuses facilitating fluid flow into via holes, vents, and other openings communicating with surfaces of substrates of semiconductor device components Grant 8,956,498 - Dando February 17, 2 | 2015-02-17 |
Method for electronic tracking of units associated with a batch Grant RE44,409 - Dando , et al. August 6, 2 | 2013-08-06 |
Methods For Depositing Material Onto Microfeature Workpieces In Reaction Chambers And Systems For Depositing Materials Onto Microfeature Workpieces App 20120171389 - Dando; Ross S. ;   et al. | 2012-07-05 |
Methods And Apparatuses Facilitating Fluid Flow Into Via Holes, Vents, And Other Openings Communicating With Surfaces Of Substrates Of Semiconductor Device Components App 20120070988 - Dando; Ross S. | 2012-03-22 |
Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces Grant 8,133,554 - Dando , et al. March 13, 2 | 2012-03-13 |
Methods for causing fluid to flow through or into via holes, vents and other openings or recesses that communicate with surfaces of substrates of semiconductor device components Grant 8,076,244 - Dando December 13, 2 | 2011-12-13 |
Microfeature Workpieces And Methods For Forming Interconnects In Microfeature Workpieces App 20110079900 - Hiatt; William M. ;   et al. | 2011-04-07 |
Microfeature workpieces and methods for forming interconnects in microfeature workpieces Grant 7,863,187 - Hiatt , et al. January 4, 2 | 2011-01-04 |
Systems and methods for depositing conductive material into openings in microfeature workpieces Grant 7,845,540 - Lake , et al. December 7, 2 | 2010-12-07 |
System and method for electronic tracking of units associated with a batch Grant RE41,815 - Dando , et al. October 12, 2 | 2010-10-12 |
System and method for electronic tracking of units associated with a batch Grant RE41,562 - Dando , et al. August 24, 2 | 2010-08-24 |
Microelectronic workpieces and methods and systems for forming interconnects in microelectronic workpieces Grant 7,749,899 - Clark , et al. July 6, 2 | 2010-07-06 |
Methods for assessing alignments of substrates within deposition apparatuses; and methods for assessing thicknesses of deposited layers within deposition apparatuses Grant 7,662,649 - Blomiley , et al. February 16, 2 | 2010-02-16 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 7,588,804 - Dando September 15, 2 | 2009-09-15 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon Grant 7,585,371 - Blomiley , et al. September 8, 2 | 2009-09-08 |
Methods for selectively filling apertures in a substrate to form conductive vias with a liquid using a vacuum Grant 7,560,371 - Dando , et al. July 14, 2 | 2009-07-14 |
Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces Grant 7,481,887 - Carpenter , et al. January 27, 2 | 2009-01-27 |
Methods of operating a liquid vaporizer Grant 7,431,225 - Dando , et al. October 7, 2 | 2008-10-07 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 7,427,425 - Carpenter , et al. September 23, 2 | 2008-09-23 |
Deposition methods utilizing microwave excitation Grant 7,422,986 - Carpenter , et al. September 9, 2 | 2008-09-09 |
Apparatus and method for depositing materials onto microelectronic workpieces Grant 7,387,685 - Carpenter , et al. June 17, 2 | 2008-06-17 |
Chemical vapor deposition methods Grant 7,378,127 - Carpenter , et al. May 27, 2 | 2008-05-27 |
Methods and systems for selectively filling apertures in a substrate to form conductive vias with a liquid using a vacuum App 20080057691 - Dando; Ross S. ;   et al. | 2008-03-06 |
Laser assisted material deposition Grant 7,311,947 - Dando , et al. December 25, 2 | 2007-12-25 |
Microelectronic workpieces and methods and systems for forming interconnects in microelectronic workpieces App 20070281473 - Clark; Douglas ;   et al. | 2007-12-06 |
Chemical vapor deposition apparatus Grant 7,270,715 - Dando , et al. September 18, 2 | 2007-09-18 |
Methods, apparatus, and systems for causing fluid to flow through or into via holes, vents, and other openings or recesses that communicate with surfaces of substrates of semiconductor device components App 20070190785 - Dando; Ross S. | 2007-08-16 |
Semiconductor substrate deposition processor chamber liner apparatus Grant 7,234,412 - Carpenter , et al. June 26, 2 | 2007-06-26 |
Substrate susceptor for receiving semiconductor substrates to be deposited upon App 20070087576 - Blomiley; Eric R. ;   et al. | 2007-04-19 |
Methods of operating a liquid vaporizer App 20070062465 - Dando; Ross S. ;   et al. | 2007-03-22 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure Grant 7,192,487 - Carpenter , et al. March 20, 2 | 2007-03-20 |
Systems and methods for depositing conductive material into openings in microfeature workpieces App 20070057028 - Lake; Rick C. ;   et al. | 2007-03-15 |
Chemically sensitive warning apparatus and method Grant 7,185,601 - Carpenter , et al. March 6, 2 | 2007-03-06 |
Microfeature workpieces and methods for forming interconnects in microfeature workpieces App 20070049016 - Hiatt; William M. ;   et al. | 2007-03-01 |
Deposition methods utilizing microwave excitation App 20070036895 - Carpenter; Craig M. ;   et al. | 2007-02-15 |
Methods and apparatus for vapor processing of micro-device workpieces App 20070020394 - Carpenter; Craig M. ;   et al. | 2007-01-25 |
Methods of assessing the temperature of semiconductor wafer substrates within deposition apparatuses App 20070012241 - Blomiley; Eric R. ;   et al. | 2007-01-18 |
Laser Assisted Material Deposition App 20060289969 - Dando; Ross S. ;   et al. | 2006-12-28 |
Laser Assisted Material Deposition App 20060288937 - Dando; Ross S. ;   et al. | 2006-12-28 |
Manifold assembly for feeding reactive precursors to substrate processing chambers App 20060249253 - Dando; Ross S. ;   et al. | 2006-11-09 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon App 20060243208 - Blomiley; Eric R. ;   et al. | 2006-11-02 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon App 20060243209 - Blomiley; Eric R. ;   et al. | 2006-11-02 |
Deposition apparatuses App 20060231016 - Blomiley; Eric R. ;   et al. | 2006-10-19 |
Methods and apparatus for vapor processing of micro-device workpieces Grant 7,118,783 - Carpenter , et al. October 10, 2 | 2006-10-10 |
Methods of operating a liquid vaporizer Grant 7,114,669 - Dando , et al. October 3, 2 | 2006-10-03 |
Deposition apparatuses App 20060213445 - Blomiley; Eric R. ;   et al. | 2006-09-28 |
Methods for assessing alignments of substrates within deposition apparatuses; and methods for assessing thicknesses of deposited layers within deposition apparatuses App 20060216840 - Blomiley; Eric R. ;   et al. | 2006-09-28 |
Methods of depositing materials over semiconductor substrates App 20060216945 - Blomiley; Eric R. ;   et al. | 2006-09-28 |
Methods and processes utilizing microwave excitation Grant 7,105,208 - Carpenter , et al. September 12, 2 | 2006-09-12 |
Substrate susceptor for receiving a substrate to be deposited upon App 20060191483 - Blomiley; Eric R. ;   et al. | 2006-08-31 |
Substrate susceptor for receiving a substrate to be deposited upon App 20060180087 - Blomiley; Eric R. ;   et al. | 2006-08-17 |
Substrate susceptor for receiving a substrate to be deposited upon App 20060180084 - Blomiley; Eric R. ;   et al. | 2006-08-17 |
Wireless communication devices and methods of forming and operating the same App 20060097849 - Dando; Ross S. | 2006-05-11 |
Deposition chamber surface enhancement and resulting deposition chambers App 20060065635 - Derderian; Garo J. ;   et al. | 2006-03-30 |
Valve assemblies for use with a reactive precursor in semiconductor processing Grant 7,000,636 - Dando , et al. February 21, 2 | 2006-02-21 |
Liquid vaporizer with positive liquid shut-off Grant 6,997,403 - Dando , et al. February 14, 2 | 2006-02-14 |
Semiconductor substrate processing chamber and substrate transfer chamber interfacial structure App 20060027326 - Carpenter; Craig M. ;   et al. | 2006-02-09 |
Wireless communication devices and methods of forming and operating the same Grant 6,980,085 - Dando December 27, 2 | 2005-12-27 |
Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces App 20050249887 - Dando, Ross S. ;   et al. | 2005-11-10 |
Chemical vapor deposition apparatuses and deposition methods App 20050241581 - Carpenter, Craig M. ;   et al. | 2005-11-03 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 6,955,725 - Dando October 18, 2 | 2005-10-18 |
Deposition apparatuses, methods of assessing the temperature of semiconductor wafer substrates within deposition apparatuses, and methods for deposition of epitaxial semiconductive material App 20050223985 - Blomiley, Eric R. ;   et al. | 2005-10-13 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon and methods of depositing materials over semiconductor substrates App 20050223994 - Blomiley, Eric R. ;   et al. | 2005-10-13 |
Deposition apparatuses; methods for assessing alignments of substrates within deposition apparatuses; and methods for assessing thicknesses of deposited layers within deposition apparatuses App 20050223993 - Blomiley, Eric R. ;   et al. | 2005-10-13 |
Substrate susceptor for receiving a substrate to be deposited upon App 20050217585 - Blomiley, Eric R. ;   et al. | 2005-10-06 |
Semiconductor processing reactive precursor valve assembly Grant 6,935,372 - Dando , et al. August 30, 2 | 2005-08-30 |
Gas delivery system for deposition processes, and methods of using same Grant 6,936,547 - Li , et al. August 30, 2 | 2005-08-30 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 6,926,775 - Carpenter , et al. August 9, 2 | 2005-08-09 |
Chemical vapor deposition methods App 20050142291 - Dando, Ross S. ;   et al. | 2005-06-30 |
Apparatus and method for depositing materials onto microelectronic workpieces App 20050133161 - Carpenter, Craig M. ;   et al. | 2005-06-23 |
Semiconductor processing reactive precursor valve assembly App 20050121088 - Dando, Ross S. ;   et al. | 2005-06-09 |
Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces App 20050120954 - Carpenter, Craig M. ;   et al. | 2005-06-09 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate App 20050112890 - Campbell, Philip H. ;   et al. | 2005-05-26 |
Laser assisted material deposition App 20050078462 - Dando, Ross S. ;   et al. | 2005-04-14 |
Chemical vapor deposition methods Grant 6,858,264 - Dando , et al. February 22, 2 | 2005-02-22 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20050028734 - Carpenter, Craig M. ;   et al. | 2005-02-10 |
Apparatus and method for depositing materials onto microelectronic workpieces App 20050022739 - Carpenter, Craig M. ;   et al. | 2005-02-03 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate Grant 6,849,133 - Campbell , et al. February 1, 2 | 2005-02-01 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20050016984 - Dando, Ross S. | 2005-01-27 |
Deposition apparatuses configured for utilizing phased microwave radiation Grant 6,845,734 - Carpenter , et al. January 25, 2 | 2005-01-25 |
Gas delivery system for deposition processes, and methods of using same App 20050011449 - Li, Weimin ;   et al. | 2005-01-20 |
Methods of operating a liquid vaporizer App 20050011974 - Dando, Ross S. ;   et al. | 2005-01-20 |
Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces Grant 6,838,114 - Carpenter , et al. January 4, 2 | 2005-01-04 |
Method and apparatus for delivering precursors App 20040255859 - Dando, Ross S. ;   et al. | 2004-12-23 |
Magnetically-actuatable throttle valve App 20040237895 - Carpenter, Craig M. ;   et al. | 2004-12-02 |
Apparatus and method for depositing materials onto microelectronic workpieces Grant 6,821,347 - Carpenter , et al. November 23, 2 | 2004-11-23 |
Chemical vapor deposition apparatus Grant 6,814,813 - Dando , et al. November 9, 2 | 2004-11-09 |
Chemical vapor deposition apparatuses App 20040216671 - Carpenter, Craig M. ;   et al. | 2004-11-04 |
Chemical vapor deposition methods and atomic layer deposition methods Grant 6,800,134 - Dando , et al. October 5, 2 | 2004-10-05 |
Interfacial Structure For Semiconductor Substrate Processing Chambers And Substrate Transfer Chambers And For Semiconductor Substrate Processing Chambers And Accessory Attachments, And Semiconductor Substrate Processor Grant 6,800,172 - Carpenter , et al. October 5, 2 | 2004-10-05 |
Method for delivering precursors Grant 6,797,337 - Dando , et al. September 28, 2 | 2004-09-28 |
Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates Grant 6,787,373 - Dando , et al. September 7, 2 | 2004-09-07 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20040154538 - Carpenter, Craig M. ;   et al. | 2004-08-12 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure App 20040144315 - Carpenter, Craig M. ;   et al. | 2004-07-29 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate App 20040144310 - Campbell, Philip H. ;   et al. | 2004-07-29 |
Liquid Vaporizer With Positive Liquid Shut-off App 20040135271 - Dando, Ross S. ;   et al. | 2004-07-15 |
Deposition chamber surface enhancement and resulting deposition chambers App 20040134427 - Derderian, Garo J. ;   et al. | 2004-07-15 |
Chemical vapor deposition apparatus App 20040089240 - Dando, Ross S. ;   et al. | 2004-05-13 |
Deposition methods utilizing microwave excitation App 20040089233 - Carpenter, Craig M. ;   et al. | 2004-05-13 |
Chemical vapor deposition apparatuses and deposition methods App 20040083959 - Carpenter, Craig M. ;   et al. | 2004-05-06 |
Gas delivery system for deposition processes, and methods of using same App 20040083972 - Li, Weimin ;   et al. | 2004-05-06 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20040083960 - Dando, Ross S. | 2004-05-06 |
Valve assemblies for use with a reactive precursor in semiconductor processing App 20040084147 - Dando, Ross S. ;   et al. | 2004-05-06 |
Method and apparatus for delivering precursors App 20040083963 - Dando, Ross S. ;   et al. | 2004-05-06 |
Methods of fixturing flexible substrates and methods of processing flexible substrates Grant 6,687,969 - Dando February 10, 2 | 2004-02-10 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate Grant 6,677,250 - Campbell , et al. January 13, 2 | 2004-01-13 |
Apparatus and method for depositing materials onto microelectronic workpieces App 20040003777 - Carpenter, Craig M. ;   et al. | 2004-01-08 |
Methods and apparatus for vapor processing of micro-device workpieces App 20040000270 - Carpenter, Craig M. ;   et al. | 2004-01-01 |
Magnetically-actuatable throttle valve App 20030221616 - Carpenter, Craig M. ;   et al. | 2003-12-04 |
Apparatus and methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces App 20030219528 - Carpenter, Craig M. ;   et al. | 2003-11-27 |
Chemical vapor deposition apparatus App 20030200926 - Dando, Ross S. ;   et al. | 2003-10-30 |
Chemical vapor deposition methods App 20030203109 - Dando, Ross S. ;   et al. | 2003-10-30 |
Deposition methods utilizing microwave excitation, and deposition apparatuses App 20030194508 - Carpenter, Craig M. ;   et al. | 2003-10-16 |
Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates App 20030192477 - Dando, Ross S. ;   et al. | 2003-10-16 |
Semiconductor substrate deposition processor chamber liner apparatus App 20030194829 - Carpenter, Craig M. ;   et al. | 2003-10-16 |
Chemical vapor deposition methods, atomic layer deposition methods, and valve assemblies for use with a reactive precursor in semiconductor processing App 20030183156 - Dando, Ross S. ;   et al. | 2003-10-02 |
Engagement mechanism for semiconductor substrate deposition process kit hardware Grant 6,620,253 - Dando , et al. September 16, 2 | 2003-09-16 |
Method of replacing at least a portion of a semiconductor substrate deposition chamber liner Grant 6,613,587 - Carpenter , et al. September 2, 2 | 2003-09-02 |
Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor App 20030159780 - Carpenter, Craig M. ;   et al. | 2003-08-28 |
Manifold assembly for feeding reactive precursors to substrate processing chambers App 20030159653 - Dando, Ross S. ;   et al. | 2003-08-28 |
Methods for electronic tracking of units originating from a common source, and assemblies comprising transponders attached to meat spikes Grant 6,545,604 - Dando , et al. April 8, 2 | 2003-04-08 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate App 20030033980 - Campbell, Philip H. ;   et al. | 2003-02-20 |
Chemical vapor deposition apparatuses and deposition methods App 20020129768 - Carpenter, Craig M. ;   et al. | 2002-09-19 |
Chemically sensitive warning apparatus and method App 20020121235 - Carpenter, Craig M. ;   et al. | 2002-09-05 |
Devices for sensing changes in environments proximate the devices, devices for sensing termites, and methods for sensing termites Grant 6,373,391 - Lake , et al. April 16, 2 | 2002-04-16 |
Apparatuses for electronic identification of a plurality of passing units and methods of electronic identification of a plurality of passing units Grant 6,166,637 - Cyr , et al. December 26, 2 | 2000-12-26 |
Battery mounting apparatuses, electronic devices, and methods of forming electrical connections Grant 6,161,281 - Dando , et al. December 19, 2 | 2000-12-19 |
Method of processing semiconductor material wafers and method of forming flip chips and semiconductor chips Grant 6,074,896 - Dando June 13, 2 | 2000-06-13 |
Semiconductor chip Grant 6,051,875 - Dando April 18, 2 | 2000-04-18 |
Method of processing semiconductive material wafers and method of forming flip chips and semiconductor chips Grant 5,863,813 - Dando January 26, 1 | 1999-01-26 |