| Patent | Date |
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Pathogen Capture Using Active Surface Modification
App 20220249885 - HATAMI; Farzin ; et al. | 2022-08-11 |
Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
Grant 10,900,123 - Kobrin , et al. January 26, 2 | 2021-01-26 |
Apparatus And Method For Controlled Application Of Reactive Vapors To Produce Thin Films And Coatings
App 20170335455 - Kobrin; Boris ; et al. | 2017-11-23 |
Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
Grant 9,725,805 - Kobrin , et al. August 8, 2 | 2017-08-08 |
Durable Conformal Wear-resistant Carbon-doped Metal Oxide-comprising Coating
App 20150140215 - Kobrin; Boris ; et al. | 2015-05-21 |
Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures
Grant 8,987,029 - Chinn , et al. March 24, 2 | 2015-03-24 |
Durable conformal wear-resistant carbon-doped metal oxide-comprising coating
Grant 8,900,695 - Kobrin , et al. December 2, 2 | 2014-12-02 |
Controlled vapor deposition of multilayered coatings adhered by an oxide layer
Grant 8,545,972 - Kobrin , et al. October 1, 2 | 2013-10-01 |
Controlled vapor deposition of biocompatible coatings for medical devices
Grant 8,323,723 - Lowery , et al. December 4, 2 | 2012-12-04 |
Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers
Grant 8,298,614 - Kobrin , et al. October 30, 2 | 2012-10-30 |
Controlled deposition of silicon-containing coatings adhered by an oxide layer
Grant 8,178,162 - Kobrin , et al. May 15, 2 | 2012-05-15 |
Surface coating process
Grant 8,071,160 - Chinn , et al. December 6, 2 | 2011-12-06 |
Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures
Grant 8,067,258 - Chinn , et al. November 29, 2 | 2011-11-29 |
Method Of Depositing A Multilayer Coating With A Variety Of Oxide Adhesion Layers And Organic Layers
App 20110052808 - Kobrin; Boris ; et al. | 2011-03-03 |
High aspect ratio performance coatings for biological microfluidics
Grant 7,879,396 - Kobrin , et al. February 1, 2 | 2011-02-01 |
Controlled vapor deposition of multilayered coatings adhered by an oxide layer
App 20100304132 - Kobrin; Boris ; et al. | 2010-12-02 |
Controlled vapor deposition of multilayered coatings adhered by an oxide layer
Grant 7,776,396 - Kobrin , et al. August 17, 2 | 2010-08-17 |
Controlled vapor deposition of biocompatible coatings over surface-treated substrates
Grant 7,695,775 - Kobrin , et al. April 13, 2 | 2010-04-13 |
Surface Coating
App 20100080957 - CHINN; Jeffrey D. ; et al. | 2010-04-01 |
Method of in-line purification of CVD reactive precursor materials
Grant 7,687,110 - Kobrin , et al. March 30, 2 | 2010-03-30 |
Controlled deposition of silicon-containing coatings adhered by an oxide layer
App 20100075034 - Kobrin; Boris ; et al. | 2010-03-25 |
Wear-resistant, carbon-doped metal oxide coatings for MEMS and nanoimprint lithography
App 20100068489 - Kobrin; Boris ; et al. | 2010-03-18 |
Controlled deposition of silicon-containing coatings adhered by an oxide layer
Grant 7,638,167 - Kobrin , et al. December 29, 2 | 2009-12-29 |
Silicon-containing structure with deep etched features, and method of manufacture
Grant 7,618,548 - Chinn , et al. November 17, 2 | 2009-11-17 |
Vapor-deposited biocompatible coatings which adhere to various plastics and metal
App 20080312356 - Kobrin; Boris ; et al. | 2008-12-18 |
Vapor deposited functional organic coatings deposited on a halogen-containing substrate
App 20080274281 - Kobrin; Boris ; et al. | 2008-11-06 |
Durable conformal wear-resistant carbon-doped metal oxide-comprising coating
App 20080206539 - Kobrin; Boris ; et al. | 2008-08-28 |
Method for controlled application of reactive vapors to produce thin films and coatings
Grant 7,413,774 - Kobrin , et al. August 19, 2 | 2008-08-19 |
Method of in-line purification of CVD reactive precursor materials
App 20080083329 - Kobrin; Boris ; et al. | 2008-04-10 |
Vapor deposited nanometer functional coating adhered by an oxide layer
App 20080081151 - Kobrin; Boris ; et al. | 2008-04-03 |
Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers
App 20080026146 - Kobrin; Boris ; et al. | 2008-01-31 |
Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures
App 20070281492 - Chinn; Jeffrey D. ; et al. | 2007-12-06 |
Exterior coatings for golf balls
App 20070213143 - Chinn; Jeffrey D. ; et al. | 2007-09-13 |
Functional organic based vapor deposited coatings adhered by an oxide layer
App 20070020392 - Kobrin; Boris ; et al. | 2007-01-25 |
Controlled vapor deposition of biocompatible coatings for medical devices
App 20060251795 - Kobrin; Boris ; et al. | 2006-11-09 |
Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
App 20060213441 - Kobrin; Boris ; et al. | 2006-09-28 |
Precursor preparation for controlled deposition coatings
App 20060201425 - Kobrin; Boris ; et al. | 2006-09-14 |
Silicon-containing structure with deep etched features, and method of manufacture
App 20060205238 - Chinn; Jeffrey D. ; et al. | 2006-09-14 |
Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system
Grant 7,074,723 - Chinn , et al. July 11, 2 | 2006-07-11 |
Method for measuring etch rates during a release process
Grant 7,052,622 - Chinn , et al. May 30, 2 | 2006-05-30 |
Method for chemical-mechanical jet etching of semiconductor structures
Grant 7,037,854 - Bachrach , et al. May 2, 2 | 2006-05-02 |
Controlled vapor deposition of biocompatible coatings over surface-treated substrates
App 20060088666 - Kobrin; Boris ; et al. | 2006-04-27 |
Vapor deposited functional organic coatings
App 20060029732 - Kobrin; Boris ; et al. | 2006-02-09 |
High aspect ratio performance coatings for biological microfluidics
App 20050271810 - Kobrin, Boris ; et al. | 2005-12-08 |
Controlled deposition of silicon-containing coatings adhered by an oxide layer
App 20050271809 - Kobrin, Boris ; et al. | 2005-12-08 |
Controlled vapor deposition of multilayered coatings adhered by an oxide layer
App 20050271900 - Kobrin, Boris ; et al. | 2005-12-08 |
Controlled vapor deposition of multilayered coatings adhered by an oxide layer
App 20050271893 - Kobrin, Boris ; et al. | 2005-12-08 |
Substrate carrier for processing substrates
App 20050241771 - Rattner, Michael B. ; et al. | 2005-11-03 |
Etch process for etching microstructures
Grant 6,936,183 - Chinn , et al. August 30, 2 | 2005-08-30 |
Integrated method for release and passivation of MEMS structures
Grant 6,902,947 - Chinn , et al. June 7, 2 | 2005-06-07 |
Method of etching variable depth features in a crystalline substrate
Grant 6,900,133 - Chinn , et al. May 31, 2 | 2005-05-31 |
Method for controlled application of reactive vapors to produce thin films and coatings
App 20050109277 - Kobrin, Boris ; et al. | 2005-05-26 |
Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device
Grant 6,887,732 - Gopal , et al. May 3, 2 | 2005-05-03 |
Method of etching a deep trench having a tapered profile in silicon
Grant 6,849,554 - Rattner , et al. February 1, 2 | 2005-02-01 |
Method of smoothing a trench sidewall after a deep trench silicon etch process
Grant 6,846,746 - Rattner , et al. January 25, 2 | 2005-01-25 |
Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
App 20040261703 - Kobrin, Boris ; et al. | 2004-12-30 |
Integrated method for release and passivation of MEMS structures
Grant 6,830,950 - Chinn , et al. December 14, 2 | 2004-12-14 |
Apparatus for performing self cleaning method of forming deep trenches in silicon substrates
Grant 6,802,933 - Khan , et al. October 12, 2 | 2004-10-12 |
Disposable barrier technique for through wafer etching in MEMS
App 20040087054 - Chinn, Jeffrey D. ; et al. | 2004-05-06 |
Method for chemical-mechanical jet etching of semiconductor structures
App 20040060906 - Bachrach, Robert Z. ; et al. | 2004-04-01 |
Method of etching variable depth features in a crystalline substrate
App 20040053505 - Chinn, Jeffrey D. ; et al. | 2004-03-18 |
Method and apparatus for chemical-mechanical jet etching of semiconductor structures
Grant 6,699,356 - Bachrach , et al. March 2, 2 | 2004-03-02 |
Integrated method for release and passivation of MEMS structures
App 20040033639 - Chinn, Jeffrey D. ; et al. | 2004-02-19 |
Method Of Plasma Etching A Deeply Recessed Feature In A Substrate Using A Plasma Source Gas Modulated Etchant System
App 20040023508 - Chinn, Jeffrey D. ; et al. | 2004-02-05 |
Dry etch release of MEMS structures
Grant 6,666,979 - Chinn , et al. December 23, 2 | 2003-12-23 |
Substrate support assembly having an edge protector
App 20030217693 - Rattner, Michael B. ; et al. | 2003-11-27 |
Substrate carrier for processing substrates
App 20030219986 - Rattner, Michael B. ; et al. | 2003-11-27 |
High resist-selectivity etch for silicon trench etch applications
Grant 6,653,237 - Deshmukh , et al. November 25, 2 | 2003-11-25 |
Method of smoothing a trench sidewall after a deep trench silicon etch process
App 20030211752 - Rattner, Michael ; et al. | 2003-11-13 |
Method of etching a deep trench having a tapered profile in silicon
App 20030207579 - Rattner, Michael ; et al. | 2003-11-06 |
Method of detecting an endpoint during etching of a material within a recess
Grant 6,635,573 - Pau , et al. October 21, 2 | 2003-10-21 |
Method of reducing micromasking during plasma etching of a silicon-comprising substrate
App 20030190814 - Kumar, Ajay ; et al. | 2003-10-09 |
Construction of built-up structures on the surface of patterned masking used for polysilicon etch
Grant 6,620,575 - Kim , et al. September 16, 2 | 2003-09-16 |
Integrated method for release and passivation of MEMS structures
App 20030166342 - Chinn, Jeffrey D. ; et al. | 2003-09-04 |
Use of integrated polygen deposition and RTP for microelectromechanical systems
Grant 6,605,319 - Chinn , et al. August 12, 2 | 2003-08-12 |
Method for rounding corners and removing damaged outer surfaces of a trench
Grant 6,599,842 - Chao , et al. July 29, 2 | 2003-07-29 |
Method of etching organic antireflection coating (ARC) layers
Grant 6,599,437 - Yauw , et al. July 29, 2 | 2003-07-29 |
Method for measuring etch rates during a release process
App 20030124848 - Chinn, Jeffrey D. ; et al. | 2003-07-03 |
Methods of forming microstructure devices
Grant 6,576,489 - Leung , et al. June 10, 2 | 2003-06-10 |
Dry etch release of MEMS structures
App 20030080082 - Chinn, Jeffrey D. ; et al. | 2003-05-01 |
Method of detecting an endpoint during etching of a material within a recess
App 20030082919 - Pau, Wilfred ; et al. | 2003-05-01 |
Etch process for etching microstructures
App 20030071015 - Chinn, Jeffrey D. ; et al. | 2003-04-17 |
Method and apparatus for chemical-mechanical jet etching of semiconductor structures
App 20030038110 - Bachrach, Robert Z. ; et al. | 2003-02-27 |
Method of etching organic antireflection coating (ARC) layers
App 20030029835 - Yauw, Oranna ; et al. | 2003-02-13 |
Plasma reactor with dry clean apparatus and method
Grant 6,518,190 - Lill , et al. February 11, 2 | 2003-02-11 |
High resist-selectivity etch for silicon trench etch applications
App 20030003752 - Deshmukh, Shashank ; et al. | 2003-01-02 |
Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device
App 20020163051 - Gopal, Vidyut ; et al. | 2002-11-07 |
Methods of forming microstructure devices
App 20020164879 - Leung, Toi Yue Becky ; et al. | 2002-11-07 |
Method Of Forming A Notched Silicon-containing Gate Structure
App 20020151183 - Yang, Chan-syun David ; et al. | 2002-10-17 |
Method For Rounding Corners And Removing Damaged Outer Surfaces Of A Trench
App 20020106845 - CHAO, JOHN ; et al. | 2002-08-08 |
Plasma etching of silicon using a chlorine chemistry augmented with sulfur dioxide
Grant 6,415,198 - Nallan , et al. July 2, 2 | 2002-07-02 |
Method of etching organic ARCs in patterns having variable spacings
Grant 6,383,941 - Shen , et al. May 7, 2 | 2002-05-07 |
Two etchant etch method
App 20020052113 - Khan, Anisul ; et al. | 2002-05-02 |
Two etchant etch method
App 20020016080 - Khan, Anisul ; et al. | 2002-02-07 |
Method of etching silicon nitride
App 20020003126 - Kumar, Ajay ; et al. | 2002-01-10 |
Self cleaning method of forming deep trenches in silicon substrates
App 20010051439 - Khan, Anisul ; et al. | 2001-12-13 |
Self cleaning method of forming deep trenches in silicon substrates
Grant 6,318,384 - Khan , et al. November 20, 2 | 2001-11-20 |
Construction of built-up structures on the surface of patterned masking used for polysilicon etch
App 20010041309 - Kim, Nam-Hun ; et al. | 2001-11-15 |
Apparatus for performing self cleaning method of forming deep trenches in silicon substrates
App 20010020516 - Khan, Anisul ; et al. | 2001-09-13 |
High etch rate method for plasma etching silicon nitride
App 20010019897 - Kumar, Ajay ; et al. | 2001-09-06 |
Method for plasma etching at a high etch rate
Grant 6,270,634 - Kumar , et al. August 7, 2 | 2001-08-07 |
Method of obtaining a rounded top trench corner for semiconductor trench etch applications
Grant 6,245,684 - Zhao , et al. June 12, 2 | 2001-06-12 |
In situ Etching of inorganic dielectric anti-reflective coating from a substrate
Grant 6,103,632 - Kumar , et al. August 15, 2 | 2000-08-15 |
Surface particle sampling head having a rotatable probe
Grant 5,939,647 - Chinn , et al. August 17, 1 | 1999-08-17 |
High performance interconnect system for an integrated circuit
Grant 5,117,276 - Thomas , et al. May 26, 1 | 1992-05-26 |
Method of fabricating a high performance interconnect system for an integrated circuit
Grant 5,000,818 - Thomas , et al. March 19, 1 | 1991-03-19 |
High performance interconnect system for an integrated circuit
Grant 4,933,743 - Thomas , et al. June 12, 1 | 1990-06-12 |
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