Chen; Xinglong

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chen; Xinglong.The latest application filed is for "method and apparatus for oil production by increasing resistance of borehole wall with improved energy utilization rae of injection gas".

Company Profile

21.55.61

Chen; Xinglong - Beijing CN
Chen; Xinglong - San Jose CA
Chen; Xinglong - Beijing City CN
CHEN; Xinglong - Urumqi CN
Chen; Xinglong - Seongnam-si KR
Chen; Xinglong - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Borehole wall resistance increasing apparatus for improving energy utilization rate of injection gas Grant 11,428,065 - Chen , et al. August 30, 2	2022-08-30
Gasflow distribution device, gas distributor, pipe string and method for separate-layer gas injection Grant 11,377,941 - Chen , et al. July 5, 2	2022-07-05
Ultrasonic microbubble generation method, apparatus and system Grant 11,344,824 - Chen , et al. May 31, 2	2022-05-31
Chemical control features in wafer process equipment Grant 11,264,213 - Liang , et al. March 1, 2	2022-03-01
Microbubble generation device and equipment Grant 11,179,683 - Chen , et al. November 23, 2	2021-11-23
System and method of performing oil displacement by water-gas dispersion system Grant 11,098,569 - Chen , et al. August 24, 2	2021-08-24
Semiconductor processing systems having multiple plasma configurations Grant 11,024,486 - Lubomirsky , et al. June 1, 2	2021-06-01
Method And Apparatus For Oil Production By Increasing Resistance Of Borehole Wall With Improved Energy Utilization Rae Of Injection Gas App 20210040827 - Chen; Xinglong ; et al.	2021-02-11
Gasflow Distribution Device, Gas Distributor, Pipe String And Method For Separate-layer Gas Injection App 20210010356 - CHEN; Xinglong ; et al.	2021-01-14
Calcium Metaborate Birefringent Crystal, Preparation Method And Use Thereof App 20200216976 - PAN; Shilie ; et al.	2020-07-09
Flow Control Features Of Cvd Chambers App 20200149166 - CHUC; Kien N. ; et al.	2020-05-14
Microbubble Generation Device And Equipment App 20200122098 - Chen; Xinglong ; et al.	2020-04-23
Lithium metaborate crystal, preparation method and use thereof Grant 10,604,863 - Pan , et al.	2020-03-31
Ultrasonic Microbubble Generation Method, Apparatus And System App 20200070067 - Chen; Xinglong ; et al.	2020-03-05
System And Method Of Performing Oil Displacement By Water-gas Dispersion System App 20200072031 - Chen; Xinglong ; et al.	2020-03-05
Flow control features of CVD chambers Grant 10,550,472 - Chuc , et al. Fe	2020-02-04
Methods of manufacturing a semiconductor device Grant 10,529,618 - Lu , et al. J	2020-01-07
Chemical Control Features In Wafer Process Equipment App 20190385823 - Liang; Qiwei ; et al.	2019-12-19
Particle generation suppresor by DC bias modulation Grant 10,504,697 - Baek , et al. Dec	2019-12-10
Lithium Metaborate Crystal, Preparation Method and Use Thereof App 20190345633 - PAN; Shilie ; et al.	2019-11-14
Enhanced etching processes using remote plasma sources Grant 10,424,485 - Ingle , et al. Sept	2019-09-24
Chemical control features in wafer process equipment Grant 10,354,843 - Liang , et al. July 16, 2	2019-07-16
Insulated Semiconductor Faceplate Designs App 20190139743 - Chen; Xinglong ; et al.	2019-05-09
Semiconductor processing system and methods using capacitively coupled plasma Grant 10,283,321 - Yang , et al.	2019-05-07
Semiconductor processing systems having multiple plasma configurations Grant 10,256,079 - Lubomirsky , et al.	2019-04-09
Insulated semiconductor faceplate designs Grant 10,170,282 - Chen , et al. J	2019-01-01
Methods Of Manufacturing A Semiconductor Device App 20180358262 - LU; Siqing ; et al.	2018-12-13
Pedestal with multi-zone temperature control and multiple purge capabilities Grant 10,062,587 - Chen , et al. August 28, 2	2018-08-28
RPS assisted RF plasma source for semiconductor processing Grant 10,056,233 - Chen , et al. August 21, 2	2018-08-21
Semiconductor processing with DC assisted RF power for improved control Grant 10,032,606 - Yang , et al. July 24, 2	2018-07-24
Processing systems and methods for halide scavenging Grant 9,991,134 - Wang , et al. June 5, 2	2018-06-05
Chemical control features in wafer process equipment Grant 9,978,564 - Liang , et al. May 22, 2	2018-05-22
Particle generation suppresor by DC bias modulation Grant 9,892,888 - Baek , et al. February 13, 2	2018-02-13
Etching method using plasma, and method of fabricating semiconductor device including the etching method Grant 9,865,474 - Kim , et al. January 9, 2	2018-01-09
Rps Assisted Rf Plasma Source For Semiconductor Processing App 20170301517 - CHEN; Xinglong ; et al.	2017-10-19
Wafer clamping apparatus Grant 9,768,051 - Chen , et al. September 19, 2	2017-09-19
RPS assisted RF plasma source for semiconductor processing Grant 9,741,545 - Chen , et al. August 22, 2	2017-08-22
Chemical Control Features In Wafer Process Equipment App 20170236691 - Liang; Qiwei ; et al.	2017-08-17
Particle Generation Suppresor By Dc Bias Modulation App 20170236689 - BAEK; Jonghoon ; et al.	2017-08-17
Semiconductor Processing Systems Having Multiple Plasma Configurations App 20170229289 - Lubomirsky; Dmitry ; et al.	2017-08-10
Processing systems and methods for halide scavenging Grant 9,704,723 - Wang , et al. July 11, 2	2017-07-11
Particle Generation Suppresor By Dc Bias Modulation App 20170148611 - BAEK; Jonghoon ; et al.	2017-05-25
Processing systems and methods for halide scavenging Grant 9,659,792 - Wang , et al. May 23, 2	2017-05-23
Rps Assisted Rf Plasma Source For Semiconductor Processing App 20170125220 - CHEN; Xinglong ; et al.	2017-05-04
Particle generation suppressor by DC bias modulation Grant 9,593,421 - Baek , et al. March 14, 2	2017-03-14
Etching Method Using Plasma, And Method Of Fabricating Semiconductor Device Including The Etching Method App 20170062235 - Kim; Gon-Jun ; et al.	2017-03-02
Wafer Clamping Apparatus App 20170018451 - CHEN; Xinglong ; et al.	2017-01-19
Processing systems and apparatus adapted to process substrates in electronic device manufacturing Grant 9,524,889 - Hongkham , et al. December 20, 2	2016-12-20
Etching method using plasma, and method of fabricating semiconductor device including the etching method Grant 9,520,301 - Kim , et al. December 13, 2	2016-12-13
RPS assisted RF plasma source for semiconductor processing Grant 9,502,218 - Chen , et al. November 22, 2	2016-11-22
Semiconductor Processing With Dc Assisted Rf Power For Improved Control App 20160300694 - Yang; Jang-Gyoo ; et al.	2016-10-13
Enhanced Etching Processes Using Remote Plasma Sources App 20160284556 - Ingle; Nitin K. ; et al.	2016-09-29
Processing systems and methods for halide scavenging Grant 9,449,850 - Wang , et al. September 20, 2	2016-09-20
Dry-etch selectivity Grant 9,384,997 - Ren , et al. July 5, 2	2016-07-05
Semiconductor processing with DC assisted RF power for improved control Grant 9,373,517 - Yang , et al. June 21, 2	2016-06-21
Enhanced etching processes using remote plasma sources Grant 9,362,130 - Ingle , et al. June 7, 2	2016-06-07
Pedestal With Multi-zone Temperature Control And Multiple Purge Capabilities App 20160126118 - Chen; Xinglong ; et al.	2016-05-05
Etching Method Using Plasma, And Method Of Fabricating Semiconductor Device Including The Etching Method App 20160111298 - Kim; Go-jun ; et al.	2016-04-21
Processing Systems And Methods For Halide Scavenging App 20160064233 - Wang; Anchuan ; et al.	2016-03-03
Pedestal with multi-zone temperature control and multiple purge capabilities Grant 9,267,739 - Chen , et al. February 23, 2	2016-02-23
Processing Systems And Methods For Halide Scavenging App 20160027673 - Wang; Anchuan ; et al.	2016-01-28
Chemical Control Features In Wafer Process Equipment App 20160005572 - Liang; Qiwei ; et al.	2016-01-07
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing Grant 9,202,736 - Narendrnath , et al. December 1, 2	2015-12-01
Processing Systems And Methods For Halide Scavenging App 20150332930 - Wang; Anchuan ; et al.	2015-11-19
Processing systems and methods for halide scavenging Grant 9,184,055 - Wang , et al. November 10, 2	2015-11-10
Processing systems and methods for halide scavenging Grant 9,153,442 - Wang , et al. October 6, 2	2015-10-06
Semiconductor processing system and methods using capacitively coupled plasma Grant 9,144,147 - Yang , et al. September 22, 2	2015-09-22
Chemical control features in wafer process equipment Grant 9,132,436 - Liang , et al. September 15, 2	2015-09-15
Processing Systems And Methods For Halide Scavenging App 20150235865 - Wang; Anchuan ; et al.	2015-08-20
Rps Assisted Rf Plasma Source For Semiconductor Processing App 20150221479 - CHEN; Xinglong ; et al.	2015-08-06
Processing systems and methods for halide scavenging Grant 9,093,371 - Wang , et al. July 28, 2	2015-07-28
Dry-etch Selectivity App 20150132968 - Ren; He ; et al.	2015-05-14
Particle Generation Suppresspr By Dc Bias Modulation App 20150123541 - BAEK; Jonghoon ; et al.	2015-05-07
Processing systems and methods for halide scavenging Grant 9,023,732 - Wang , et al. May 5, 2	2015-05-05
Dry-etch selectivity Grant 8,969,212 - Ren , et al. March 3, 2	2015-03-03
Flow Control Features Of Cvd Chambers App 20150013793 - CHUC; Kien N. ; et al.	2015-01-15
Flow control features of CVD chambers Grant 8,894,767 - Chuc , et al. November 25, 2	2014-11-25
Processing Systems And Methods For Halide Scavenging App 20140273488 - Wang; Anchuan ; et al.	2014-09-18
Processing Systems And Methods For Halide Scavenging App 20140273481 - Wang; Anchuan ; et al.	2014-09-18
Processing Systems And Methods For Halide Scavenging App 20140273489 - Wang; Anchuan ; et al.	2014-09-18
Processing Systems And Methods For Halide Scavenging App 20140271097 - WANG; Anchuan ; et al.	2014-09-18
Processing Systems And Methods For Halide Scavenging App 20140273406 - Wang; Anchuan ; et al.	2014-09-18
Processing Systems And Methods For Halide Scavenging App 20140262038 - Wang; Anchuan ; et al.	2014-09-18
Processing Systems, Apparatus, And Methods Adapted To Process Substrates In Electronic Device Manufacturing App 20140263165 - Hongkham; Steve S. ; et al.	2014-09-18
Insulated Semiconductor Faceplate Designs App 20140252134 - Chen; Xinglong ; et al.	2014-09-11
Enhanced Etching Processes Using Remote Plasma Sources App 20140248780 - Ingle; Nitin K. ; et al.	2014-09-04
Semiconductor Processing Systems Having Multiple Plasma Configurations App 20140227881 - Lubomirsky; Dmitry ; et al.	2014-08-14
Dry-etch Selectivity App 20140141621 - Ren; He ; et al.	2014-05-22
Radical Chemistry Modulation And Control Using Multiple Flow Pathways App 20140099794 - Ingle; Nitin K. ; et al.	2014-04-10
Chemical Control Features In Wafer Process Equipment App 20140097270 - Liang; Qiwei ; et al.	2014-04-10
Semiconductor Processing With Dc Assisted Rf Power For Improved Control App 20140057447 - Yang; Jang-Gyoo ; et al.	2014-02-27
Pedestal With Multi-zone Temperature Control And Multiple Purge Capabilities App 20140021673 - Chen; Xinglong ; et al.	2014-01-23
Semiconductor Processing System And Methods Using Capacitively Coupled Plasma App 20130153148 - Yang; Jang-Gyoo ; et al.	2013-06-20
Semiconductor Processing System And Methods Using Capacitively Coupled Plasma App 20130082197 - Yang; Jang-Gyoo ; et al.	2013-04-04
Low profile process kit Grant 8,409,355 - Rasheed , et al. April 2, 2	2013-04-02
Semiconductor Processing System And Methods Using Capacitively Coupled Plasma App 20120180954 - Yang; Jang-Gyoo ; et al.	2012-07-19
Method of making an electrostatic chuck with reduced plasma penetration and arcing Grant 8,108,981 - Lubomirsky , et al. February 7, 2	2012-02-07
Flow Control Features Of Cvd Chambers App 20110011338 - Chuc; Kien N. ; et al.	2011-01-20
Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing Grant 7,848,076 - Narendranath , et al. December 7, 2	2010-12-07
Internal balanced coil for inductively coupled high density plasma processing chamber Grant 7,789,993 - Chen , et al. September 7, 2	2010-09-07
Plasma Source For Chamber Cleaning And Process App 20100098882 - Lubomirsky; Dmitry ; et al.	2010-04-22
Low Profile Process Kit App 20090266299 - RASHEED; MUHAMMAD M. ; et al.	2009-10-29
Internal balanced coil for inductively coupled high density plasma processing chamber Grant 7,572,647 - Chen , et al. August 11, 2	2009-08-11
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing App 20090034149 - Lubomirsky; Dmitry ; et al.	2009-02-05
Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing App 20090034147 - Narendrnath; Kadthala Ramaya ; et al.	2009-02-05
Method of making an electrostatic chuck with reduced plasma penetration and arcing App 20090034148 - Lubomirsky; Dmitry ; et al.	2009-02-05
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber App 20080185284 - Chen; Robert ; et al.	2008-08-07
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber App 20080188087 - CHEN; ROBERT ; et al.	2008-08-07
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber App 20080188090 - Chen; Robert ; et al.	2008-08-07

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