Patent | Date |
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Precision Capacitor App 20210202688 - Fernandes; Poornika ;   et al. | 2021-07-01 |
Precision capacitor Grant 10,964,778 - Fernandes , et al. March 30, 2 | 2021-03-30 |
Precision Capacitor App 20200219969 - Fernandes; Poornika ;   et al. | 2020-07-09 |
Precision capacitor Grant 10,644,098 - Fernandes , et al. | 2020-05-05 |
Ic With 3d Metal-insulator-metal Capacitor App 20200006471 - FERNANDES; POORNIKA ;   et al. | 2020-01-02 |
Precision Capacitor App 20190259826 - Fernandes; Poornika ;   et al. | 2019-08-22 |
Precision Capacitor App 20190259827 - Fernandes; Poornika ;   et al. | 2019-08-22 |
Capacitor with improved voltage coefficients Grant 10,157,915 - Srinivasan , et al. Dec | 2018-12-18 |
System and method for mitigating oxide growth in a gate dielectric Grant 10,068,771 - Bevan , et al. September 4, 2 | 2018-09-04 |
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20180130662 - Bevan; Malcolm J. ;   et al. | 2018-05-10 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,892,927 - Bevan , et al. February 13, 2 | 2018-02-13 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,779,946 - Bevan , et al. October 3, 2 | 2017-10-03 |
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20170170022 - Bevan; Malcolm J. ;   et al. | 2017-06-15 |
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20170133228 - Bevan; Malcolm J. ;   et al. | 2017-05-11 |
Process to enable ferroelectric layers on large area substrates Grant 9,583,336 - Srinivasan , et al. February 28, 2 | 2017-02-28 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,576,804 - Bevan , et al. February 21, 2 | 2017-02-21 |
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20160300722 - Bevan; Malcolm J. ;   et al. | 2016-10-13 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,396,951 - Bevan , et al. July 19, 2 | 2016-07-19 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,368,355 - Bevan , et al. June 14, 2 | 2016-06-14 |
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160155641 - Bevan; Malcolm J. ;   et al. | 2016-06-02 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,337,046 - Bevan , et al. May 10, 2 | 2016-05-10 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,337,044 - Bevan , et al. May 10, 2 | 2016-05-10 |
Adhesion of ferroelectric material to underlying conductive capacitor plate Grant 9,305,998 - Srinivasan , et al. April 5, 2 | 2016-04-05 |
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160013082 - Bevan; Malcolm J. ;   et al. | 2016-01-14 |
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160013083 - Bevan; Malcolm J. ;   et al. | 2016-01-14 |
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160013061 - Bevan; Malcolm J. ;   et al. | 2016-01-14 |
System and method for mitigating oxide growth in a gate dielectric Grant 9,177,806 - Bevan , et al. November 3, 2 | 2015-11-03 |
Multi-step deposition of ferroelectric dielectric material Grant 8,962,350 - Srinivasan , et al. February 24, 2 | 2015-02-24 |
Hydrogen-blocking film for ferroelectric capacitors Grant 8,822,236 - Lin , et al. September 2, 2 | 2014-09-02 |
High performance CMOS transistors using PMD liner stress Grant 8,809,141 - Bu , et al. August 19, 2 | 2014-08-19 |
Multi-Step Deposition of Ferroelectric Dielectric Material App 20140225226 - Srinivasan; Bhaskar ;   et al. | 2014-08-14 |
Adhesion of Ferroelectric Material to Underlying Conductive Capacitor Plate App 20140227805 - Srinivasan; Bhaskar ;   et al. | 2014-08-14 |
Hydrogen-blocking Film For Ferroelectric Capacitors App 20130309783 - Lin; Bo-Yang ;   et al. | 2013-11-21 |
Nickel silicide formation for semiconductor components Grant 8,546,259 - DeLoach , et al. October 1, 2 | 2013-10-01 |
In-situ carbon doped e-SiGeCB stack for MOS transistor Grant 8,471,307 - Khamankar , et al. June 25, 2 | 2013-06-25 |
Hydrogen-Blocking Film for Ferroelectric Capacitors App 20130056811 - Lin; Bo-Yang ;   et al. | 2013-03-07 |
Laminated stress overlayer using In-situ multiple plasma treatments for transistor improvement Grant 8,114,784 - Bu , et al. February 14, 2 | 2012-02-14 |
Stress memorization dielectric optimized for NMOS and PMOS Grant 8,101,476 - Garg , et al. January 24, 2 | 2012-01-24 |
Nitrogen based implants for defect reduction in strained silicon Grant 8,084,312 - Chakravarthi , et al. December 27, 2 | 2011-12-27 |
PMD liner nitride films and fabrication methods for improved NMOS performance Grant 8,084,787 - Bu , et al. December 27, 2 | 2011-12-27 |
Capacitor formed on a recrystallized polysilicon layer Grant 8,053,296 - Lu , et al. November 8, 2 | 2011-11-08 |
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20110120374 - Bevan; Malcolm J. ;   et al. | 2011-05-26 |
Systems and methods that selectively modify liner induced stress Grant 7,939,400 - Tsui , et al. May 10, 2 | 2011-05-10 |
Methodology of improving the manufacturability of laser anneal Grant 7,932,139 - Bu , et al. April 26, 2 | 2011-04-26 |
System and method for mitigating oxide growth in a gate dielectric Grant 7,906,441 - Bevan , et al. March 15, 2 | 2011-03-15 |
Method for forming a metal silicide Grant 7,897,513 - Bu , et al. March 1, 2 | 2011-03-01 |
Laminated Stress Overlayer Using In-SITU Multiple Plasma Treatments for Transistor Improvement App 20110027953 - Bu; Haowen ;   et al. | 2011-02-03 |
Border region defect reduction in hybrid orientation technology (HOT) direct silicon bonded (DSB) substrates Grant 7,855,111 - Bu , et al. December 21, 2 | 2010-12-21 |
Methods, systems and structures for forming semiconductor structures incorporating high-temperature processing steps Grant 7,847,401 - Chidambaram , et al. December 7, 2 | 2010-12-07 |
Antimony ion implantation for semiconductor components Grant 7,795,122 - Bu , et al. September 14, 2 | 2010-09-14 |
Gate sidewall spacer and method of manufacture therefor Grant 7,790,561 - Rouse , et al. September 7, 2 | 2010-09-07 |
Stress Memorization Dielectric Optimized For Nmos And Pmos App 20100210081 - GARG; Kanan ;   et al. | 2010-08-19 |
Capacitor Formed On A Recrystallized Polysilicon Layer App 20100159665 - Lu; Jiong-Ping ;   et al. | 2010-06-24 |
Nitrogen Based Implants for Defect Reduction in Strained Silicon App 20100120215 - CHAKRAVARTHI; Srinivasan ;   et al. | 2010-05-13 |
Methodology of implementing ultra high temperature (UHT) anneal in fabricating devices that contain sige Grant 7,700,467 - Bu , et al. April 20, 2 | 2010-04-20 |
Nitrogen based implants for defect reduction in strained silicon Grant 7,670,892 - Chakravarthi , et al. March 2, 2 | 2010-03-02 |
Using oxynitride spacer to reduce parasitic capacitance in CMOS devices Grant 7,667,275 - Chen , et al. February 23, 2 | 2010-02-23 |
Ic Formed With Densified Chemical Oxide Layer App 20100032813 - Riley; Deborah J. ;   et al. | 2010-02-11 |
Border Region Defect Reduction In Hybrid Orientation Technology (hot) Direct Silicon Bonded (dsb) Substrates App 20100032727 - Bu; Haowen ;   et al. | 2010-02-11 |
IN-SITU CARBON DOPED e-SiGeCB STACK FOR MOS TRANSISTOR App 20090309140 - Khamankar; Rajesh B. ;   et al. | 2009-12-17 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance Grant 7,601,575 - Bu , et al. October 13, 2 | 2009-10-13 |
Methods, Systems and Structures for Forming Semiconductor Structures Incorporating High-Temperature Processing Steps App 20090224296 - Chidambaram; PR ;   et al. | 2009-09-10 |
Semiconductor doping with improved activation Grant 7,572,716 - Bu , et al. August 11, 2 | 2009-08-11 |
Annealing Method For Sige Process App 20090170256 - Chakravarthi; Srinivasan ;   et al. | 2009-07-02 |
Methods, systems and structures for forming semiconductor structures incorporating high-temperature processing steps Grant 7,553,718 - Chidambaram , et al. June 30, 2 | 2009-06-30 |
Laminated Stress Overlayer Using In-SITU Multiple Plasma Treatments for Transistor Improvement App 20090152639 - Bu; Haowen ;   et al. | 2009-06-18 |
Methodology Of Implementing Ultra High Temperature (uht) Anneal In Fabricating Devices That Contain Sige App 20090098665 - BU; Haowen ;   et al. | 2009-04-16 |
Method of manufacturing gate sidewalls that avoids recessing Grant 7,514,331 - Yoon , et al. April 7, 2 | 2009-04-07 |
Nickel Silicide Formation For Semiconductor Components App 20090079010 - DeLoach; Juanita ;   et al. | 2009-03-26 |
Systems And Methods That Selectively Modify Liner Induced Stress App 20090017588 - Tsui; Ting Y. ;   et al. | 2009-01-15 |
Method For Forming A Metal Silicide App 20090004853 - Bu; Haowen ;   et al. | 2009-01-01 |
Methodology Of Improving The Manufacturability Of Laser Anneal App 20080272097 - Bu; Haowen ;   et al. | 2008-11-06 |
Semiconductor Doping With Improved Activation App 20080268623 - Bu; Haowen ;   et al. | 2008-10-30 |
Systems and methods that selectively modify liner induced stress Grant 7,442,597 - Tsui , et al. October 28, 2 | 2008-10-28 |
PMD Liner Nitride Films and Fabrication Methods for Improved NMOS Performance App 20080251850 - Bu; Haowen ;   et al. | 2008-10-16 |
CMOS transistor using high stress liner layer Grant 7,429,517 - Wu , et al. September 30, 2 | 2008-09-30 |
Method of incorporating stress into a transistor channel by use of a backside layer Grant 7,402,535 - Nandakumar , et al. July 22, 2 | 2008-07-22 |
Method for manufacturing a silicided gate electrode using a buffer layer Grant 7,341,933 - Yu , et al. March 11, 2 | 2008-03-11 |
Method for manufacturing a semiconductor device having a silicided gate electrode and a method for manufacturing an integrated circuit including the same Grant 7,338,888 - Lu , et al. March 4, 2 | 2008-03-04 |
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20080050882 - Bevan; Malcolm J. ;   et al. | 2008-02-28 |
A Method Of Manufacturing Gate Sidewalls That Avoids Recessing App 20070287258 - Yoon; Jong Shik ;   et al. | 2007-12-13 |
Reduced hydrogen sidewall spacer oxide Grant 7,306,995 - Bu , et al. December 11, 2 | 2007-12-11 |
Antimony ion implantation for semiconductor components App 20070218662 - Bu; Haowen ;   et al. | 2007-09-20 |
Semiconductor device fabricated using a carbon-containing film as a contact etch stop layer App 20070210421 - Bu; Haowen ;   et al. | 2007-09-13 |
Method for fabricating dual work function metal gates Grant 7,253,049 - Lu , et al. August 7, 2 | 2007-08-07 |
Drive current improvement from recessed SiGe incorporation close to gate Grant 7,244,654 - Chidambaram , et al. July 17, 2 | 2007-07-17 |
High performance CMOS transistors using PMD liner stress App 20070128806 - Bu; Haowen ;   et al. | 2007-06-07 |
PMD liner nitride films and fabrication methods for improved NMOS performance Grant 7,226,834 - Bu , et al. June 5, 2 | 2007-06-05 |
Transistor fabrication methods using dual sidewall spacers Grant 7,217,626 - Bu , et al. May 15, 2 | 2007-05-15 |
Nitrogen based implants for defect reduction in strained silicon App 20070105294 - Chakravarthi; Srinivasan ;   et al. | 2007-05-10 |
Method of fabricating a microelectronic device using electron beam treatment to induce stress App 20070105368 - Tsui; Ting Y. ;   et al. | 2007-05-10 |
Interface improvement by stress application during oxide growth through use of backside films Grant 7,208,380 - Krishnan , et al. April 24, 2 | 2007-04-24 |
Method for fabricating transistor gate structures and gate dielectrics thereof App 20070072364 - Visokay; Mark R. ;   et al. | 2007-03-29 |
Method for fabricating transistor gate structures and gate dielectrics thereof App 20070072363 - Visokay; Mark R. ;   et al. | 2007-03-29 |
Semiconductor Device Having a Fully Silicided Gate Electrode and Method of Manufacture Therefor App 20070063294 - Bu; Haowen ;   et al. | 2007-03-22 |
High performance CMOS transistors using PMD liner stress Grant 7,192,894 - Bu , et al. March 20, 2 | 2007-03-20 |
Reduced hydrogen sidewall spacer oxide Grant 7,173,296 - Bu , et al. February 6, 2 | 2007-02-06 |
Novel gate sidewall spacer and method of manufacture therefor App 20070004156 - Rouse; Richard P. ;   et al. | 2007-01-04 |
Method for using a wet etch to manufacturing a semiconductor device having a silicided gate electrode and a method for manufacturing an integrated circuit including the same Grant 7,157,358 - Hall , et al. January 2, 2 | 2007-01-02 |
Semiconductor device having a fully silicided gate electrode and method of manufacture therefor Grant 7,148,143 - Bu , et al. December 12, 2 | 2006-12-12 |
Method for fabricating transistor gate structures and gate dielectrics thereof Grant 7,135,361 - Visokay , et al. November 14, 2 | 2006-11-14 |
Integration scheme to improve NMOS with poly cap while mitigating PMOS degradation Grant 7,129,127 - Chidambaram , et al. October 31, 2 | 2006-10-31 |
Methods, systems and structures for forming improved transistors Grant 7,122,435 - Chidambaram , et al. October 17, 2 | 2006-10-17 |
Using Oxynitride Spacer to Reduce Parasitic Capacitance in CMOS Devices App 20060216882 - Chen; Yuanning ;   et al. | 2006-09-28 |
Methods, systems and structures for forming semiconductor structures incorporating high-temperature processing steps App 20060172502 - Chidambaram; PR ;   et al. | 2006-08-03 |
Systems and methods that selectively modify liner induced stress App 20060172481 - Tsui; Ting Y. ;   et al. | 2006-08-03 |
Method of making transistors and non-silicided polysilicon resistors for mixed signal circuits App 20060166457 - Liu; Sarah X. ;   et al. | 2006-07-27 |
CMOS transistors and methods of forming same App 20060154411 - Bu; Haowen ;   et al. | 2006-07-13 |
Method for fabricating dual work function metal gates App 20060134844 - Lu; Jiong-Ping ;   et al. | 2006-06-22 |
Forming a retrograde well in a transistor to enhance performance of the transistor Grant 7,061,058 - Chakravarthi , et al. June 13, 2 | 2006-06-13 |
Increased drive current by isotropic recess etch Grant 7,060,579 - Chidambaram , et al. June 13, 2 | 2006-06-13 |
Method for manufacturing a silicided gate electrode using a buffer layer App 20060121713 - Yu; Shaofeng ;   et al. | 2006-06-08 |
Method for integrating high-k dielectrics in transistor devices Grant 7,045,431 - Rotondaro , et al. May 16, 2 | 2006-05-16 |
Integration scheme to improve NMOS with poly cap while mitigating PMOS degradation App 20060068541 - Chidambaram; PR ;   et al. | 2006-03-30 |
Using oxynitride spacer to reduce parasitic capacitance in CMOS devices App 20060054934 - Chen; Yuanning ;   et al. | 2006-03-16 |
Transistor fabrication methods using reduced width sidewall spacers Grant 7,012,028 - Bu , et al. March 14, 2 | 2006-03-14 |
Method of incorporating stress into a transistor channel by use of a backside layer App 20060024873 - Nandakumar; Mahalingam ;   et al. | 2006-02-02 |
Increased drive current by isotropic recess etch App 20060024898 - Chidambaram; PR ;   et al. | 2006-02-02 |
Methods, systems and structures for forming improved transistors App 20060024876 - Chidambaram; PR ;   et al. | 2006-02-02 |
Transistor fabrication methods using reduced width sidewall spacers App 20060019455 - Bu; Haowen ;   et al. | 2006-01-26 |
Transistor fabrication methods using dual sidewall spacers App 20060019456 - Bu; Haowen ;   et al. | 2006-01-26 |
CMOS transistor using high stress liner layer App 20050255659 - Wu, Zhiqiang ;   et al. | 2005-11-17 |
High performance CMOS transistors using PMD linear stress App 20050245012 - Bu, Haowen ;   et al. | 2005-11-03 |
PMD liner nitride films and fabrication methods for improved NMOS performance App 20050233514 - Bu, Haowen ;   et al. | 2005-10-20 |
Forming a retrograde well in a transistor to enhance performance of the transistor App 20050224874 - Chakravarthi, Srinivasan ;   et al. | 2005-10-13 |
System and method for mitigating oxide growth in a gate dielectric App 20050221564 - Bevan, Malcolm J. ;   et al. | 2005-10-06 |
Method for manufacturing a semiconductor device having a silicided gate electrode and a method for manufacturing an integrated circuit including the same App 20050215037 - Lu, Jiong-Ping ;   et al. | 2005-09-29 |
Semiconductor device having a fully silicided gate electrode and method of manufacture therefor App 20050215055 - Bu, Haowen ;   et al. | 2005-09-29 |
Method for using a wet etch to manufacturing a semiconductor device having a silicided gate electrode and a method for manufacturing an integrated circuit including the same App 20050215038 - Hall, Lindsey ;   et al. | 2005-09-29 |
Interface improvement by stress application during oxide growth through use of backside films App 20050208776 - Krishnan, Anand T. ;   et al. | 2005-09-22 |
Source drain and extension dopant concentration App 20050189660 - Bu, Haowen ;   et al. | 2005-09-01 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance Grant 6,930,007 - Bu , et al. August 16, 2 | 2005-08-16 |
Forming a retrograde well in a transistor to enhance performance of the transistor Grant 6,927,137 - Chakravarthi , et al. August 9, 2 | 2005-08-09 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance App 20050164431 - Bu, Haowen ;   et al. | 2005-07-28 |
System and method for mitigating oxide growth in a gate dielectric Grant 6,921,703 - Bevan , et al. July 26, 2 | 2005-07-26 |
Drive current improvement from recessed SiGe incorporation close to gate App 20050139872 - Chidambaram, Pr ;   et al. | 2005-06-30 |
Reduced hydrogen sidewall spacer oxide App 20050133835 - Bu, Haowen ;   et al. | 2005-06-23 |
Reduced hydrogen sidewall spacer oxide App 20050133876 - Bu, Haowen ;   et al. | 2005-06-23 |
Method for integrating high-k dielectrics in transistor devices App 20050136589 - Rotondaro, Antonio L.P. ;   et al. | 2005-06-23 |
Method for fabricating transistor gate structures and gate dielectrics thereof App 20050130442 - Visokay, Mark R. ;   et al. | 2005-06-16 |
Method for introducing hydrogen into a channel region of a metal oxide semiconductor (MOS) device App 20050118770 - Nandakumar, Mahalingam ;   et al. | 2005-06-02 |
Forming a retrograde well in a transistor to enhance performance of the transistor App 20050118792 - Chakravarthi, Srinivasan ;   et al. | 2005-06-02 |
Capacitor formed on a recrystallized polysilicon layer and a method of manufacture therefor App 20050110114 - Lu, Jiong-Ping ;   et al. | 2005-05-26 |
CMOS transistors and methods of forming same App 20050059260 - Bu, Haowen ;   et al. | 2005-03-17 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance App 20050059228 - Bu, Haowen ;   et al. | 2005-03-17 |
System and method for depositing a graded carbon layer to enhance critical layer stability App 20040248354 - Chidambaram, Pr ;   et al. | 2004-12-09 |
System and method for depositing a graded carbon layer to enhance critical layer stability App 20040235228 - Chidambaram, PR. ;   et al. | 2004-11-25 |
System and method for mitigating oxide growth in a gate dielectric App 20040229475 - Bevan, Malcolm J. ;   et al. | 2004-11-18 |
Source drain and extension dopant concentration Grant 6,812,073 - Bu , et al. November 2, 2 | 2004-11-02 |
Sidewall processes using alkylsilane precursors for MOS transistor fabrication Grant 6,806,149 - Bu , et al. October 19, 2 | 2004-10-19 |
Source Drain And Extension Dopant Concentration App 20040110352 - Bu, Haowen ;   et al. | 2004-06-10 |
Transistor with improved source/drain extension dopant concentration Grant 6,743,705 - Mehrotra , et al. June 1, 2 | 2004-06-01 |
Reduction of seed layer roughness for use in forming SiGe gate electrode App 20040067631 - Bu, Haowen ;   et al. | 2004-04-08 |
Sidewall processes using alkylsilane precursors for MOS transistor fabrication App 20040063260 - Bu, Haowen ;   et al. | 2004-04-01 |
Method of fabricating thermal CVD oxynitride and BTBAS nitride sidewall spacer for metal oxide semiconductor transistors Grant 6,677,201 - Bu , et al. January 13, 2 | 2004-01-13 |
Transistor with improved source/drain extension dopant concentration App 20030109105 - Mehrotra, Manoj ;   et al. | 2003-06-12 |