| Patent | Date |
|---|
Methods and systems for material property profiling of thin films
Grant 10,790,203 - Basol , et al. September 29, 2 | 2020-09-29 |
Methods And Systems For Material Property Profiling Of Thin Films
App 20190148248 - BASOL; Bulent M. ; et al. | 2019-05-16 |
Group Iib-via Compound Solar Cells With Minimum Lattice Mismatch And Reduced Tellurium Content
App 20150357502 - BASOL; Bulent M. | 2015-12-10 |
Reel-to-reel reaction of precursor film to form solar cell absorber
Grant 9,103,033 - Basol August 11, 2 | 2015-08-11 |
High efficiency cadmium telluride solar cell and method of fabrication
Grant 8,916,412 - Basol December 23, 2 | 2014-12-23 |
Use Of A Buffer Layer To Form Back Contact To A Group Iib-via Compound Device
App 20140261676 - BASOL; Bulent M. | 2014-09-18 |
Roll to roll evaporation tool for solar absorber precursor formation
Grant 8,771,419 - Pinarbasi , et al. July 8, 2 | 2014-07-08 |
Method And Apparatus For Electrodeposition Of Group Iib-via Compound Layers
App 20140106501 - BASOL; Bulent M. | 2014-04-17 |
Method of fabricating solar cells with electrodeposited compound interface layers
Grant 8,580,603 - Basol November 12, 2 | 2013-11-12 |
Electroplating methods and chemistries for deposition of group IIIA-group via thin films
Grant 8,444,842 - Wang , et al. May 21, 2 | 2013-05-21 |
Method for forming copper indium gallium chalcogenide layer with shaped gallium profile
Grant 8,415,559 - Basol April 9, 2 | 2013-04-09 |
Apparatus For Forming Copper Indium Gallium Chalcogenide Layers
App 20120325317 - Basol; Bulent M. | 2012-12-27 |
Copper Indium Gallium Chalcogenide Multilayer Structure With Optimized Gallium Content At Its Surface
App 20120318333 - Basol; Bulent M. | 2012-12-20 |
Method and apparatus to form solar cell absorber layers with planar surface
Grant 8,323,735 - Basol December 4, 2 | 2012-12-04 |
Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation
Grant 8,323,408 - Zolla , et al. December 4, 2 | 2012-12-04 |
Solar cell buffer layer having varying composition
Grant 8,318,530 - Basol , et al. November 27, 2 | 2012-11-27 |
Method and apparatus to remove a segment of a thin film solar cell structure for efficiency improvement
Grant 8,318,240 - Zapalac , et al. November 27, 2 | 2012-11-27 |
Method and apparatus for detecting and passivating defects in thin film solar cells
Grant 8,318,239 - Basol , et al. November 27, 2 | 2012-11-27 |
Electroplating Method For Depositing Continuous Thin Layers Of Indium Or Gallium Rich Materials
App 20120288986 - Aksu; Serdar ; et al. | 2012-11-15 |
Method Of Manufacturing Photovoltaic Modules With Improved Reliability
App 20120282727 - Basol; Bulent M. | 2012-11-08 |
Apparatus For Achieving Low Resistance Contact To A Metal Based Thin Film Solar Cell
App 20120279855 - Pinarbasi; Mustafa ; et al. | 2012-11-08 |
Method and apparatus for forming copper indium gallium chalcogenide layers
Grant 8,258,001 - Basol September 4, 2 | 2012-09-04 |
Method for forming copper indium gallium chalcogenide layer with optimized gallium content at its surface
Grant 8,252,621 - Basol August 28, 2 | 2012-08-28 |
Electroplating Methods And Chemistries For Deposition Of Group Iiia-group Via Thin Films
App 20120199490 - Wang; Jiaxiong ; et al. | 2012-08-09 |
Plating methods for low aspect ratio cavities
Grant 8,236,160 - Basol August 7, 2 | 2012-08-07 |
Monolithic Integration Of Super-strate Thin Film Photovoltaic Modules
App 20120192924 - Basol; Bulent M. | 2012-08-02 |
High Efficiency Cadmium Telluride Solar Cell And Method Of Fabrication
App 20120192948 - Basol; Bulent M. | 2012-08-02 |
Apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells
Grant 8,225,742 - Basol July 24, 2 | 2012-07-24 |
Method And Apparatus For Electrodeposition Of Group Iib-via Compound Layers
App 20120175262 - Basol; Bulent M. | 2012-07-12 |
Photovoltaic modules with improved reliability
Grant 8,207,440 - Basol June 26, 2 | 2012-06-26 |
Method and apparatus for achieving low resistance contact to a metal based thin film solar cell
Grant 8,207,012 - Pinarbasi , et al. June 26, 2 | 2012-06-26 |
Method and apparatus for affecting surface composition of CIGS absorbers formed by two-stage process
Grant 8,197,703 - Basol June 12, 2 | 2012-06-12 |
Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication
Grant 8,192,594 - Basol June 5, 2 | 2012-06-05 |
Cadmium Telluride Solar Cell And Method Of Fabricating The Same
App 20120132283 - BASOL; Bulent M. | 2012-05-31 |
Methods of forming thin layers of photovoltaic absorbers
Grant 8,187,904 - Basol May 29, 2 | 2012-05-29 |
Method of forming back contact to a cadmium telluride solar cell
Grant 8,187,963 - Basol May 29, 2 | 2012-05-29 |
Multilayer structure to form absorber layers for solar cells
Grant 8,188,367 - Basol May 29, 2 | 2012-05-29 |
Methods structures and apparatus to provide group VIA and IA materials for solar cell absorber formation
Grant 8,163,090 - Basol April 24, 2 | 2012-04-24 |
Apparatus for simultaneous roll-to-roll wet processing of two workpieces disposed within a single chamber
Grant 8,156,891 - Basol April 17, 2 | 2012-04-17 |
Roll-to-roll integration of thin film solar modules
Grant 8,153,889 - Basol April 10, 2 | 2012-04-10 |
Method And Apparatus For Electrodepositing Large Area Cadmium Telluride Thin Films For Solar Module Manufacturing
App 20120043215 - Basol; Bulent M. | 2012-02-23 |
Electroplating method for depositing continuous thin layers of indium or gallium rich materials
Grant 8,092,667 - Aksu , et al. January 10, 2 | 2012-01-10 |
Finger pattern formation for thin film solar cells
Grant 8,066,840 - Narasimhan , et al. November 29, 2 | 2011-11-29 |
Electrodeposition technique and apparatus to form selenium containing layers
Grant 8,066,863 - Han , et al. November 29, 2 | 2011-11-29 |
Electroplating methods and chemistries for deposition of group IIIA-group via thin films
Grant 8,066,865 - Wang , et al. November 29, 2 | 2011-11-29 |
Method Of Forming Back Contact To A Cadmium Telluride Solar Cell
App 20110284065 - BASOL; Bulent M. | 2011-11-24 |
Method Of Forming Cadmium Telluride Thin Film
App 20110284078 - BASOL; Bulent M. | 2011-11-24 |
Method Of Fabricating Solar Cells With Electrodeposited Compound Interface Layers
App 20110259424 - BASOL; Bulent M. | 2011-10-27 |
Roll-to-roll Manufacturing Of Flexible Thin Film Photovoltaic Modules
App 20110239450 - Basol; Bulent M. ; et al. | 2011-10-06 |
Gallium Electroplating Methods And Electrolytes Employing Mixed Solvents
App 20110226630 - Wang; Jiaxiong ; et al. | 2011-09-22 |
Substrate preparation for thin film solar cell manufacturing
Grant 8,017,861 - Basol September 13, 2 | 2011-09-13 |
Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication
Grant 8,008,113 - Basol August 30, 2 | 2011-08-30 |
Electroplating Methods And Chemistries For Deposition Of Copper-indium-gallium Containing Thin Films
App 20110180414 - Aksu; Serdar ; et al. | 2011-07-28 |
Method of detecting and passivating a defect in a solar cell
Grant 7,979,969 - Basol July 19, 2 | 2011-07-19 |
Gallium electroplating methods and electrolytes employing mixed solvents
Grant 7,951,280 - Wang , et al. May 31, 2 | 2011-05-31 |
Processing Method And Apparatus For Group Ibiiiavia Semiconductor Layer Growth
App 20110108096 - Basol; Bulent M. | 2011-05-12 |
Roll-to-roll processing method and tools for electroless deposition of thin layers
Grant 7,923,281 - Basol , et al. April 12, 2 | 2011-04-12 |
Composition control for photovoltaic thin film manufacturing
Grant 7,897,416 - Basol , et al. March 1, 2 | 2011-03-01 |
Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films
Grant 7,892,413 - Aksu , et al. February 22, 2 | 2011-02-22 |
Method And Apparatus For Deposition Of Graded Or Multi-layer Transparent Films
App 20110039366 - Basol; Bulent M. ; et al. | 2011-02-17 |
Method And Apparatus For Converting Precursor Layers Into Photovoltaic Absorbers
App 20110011340 - Basol; Bulent M. | 2011-01-20 |
Electrochemical Deposition Methods for Fabricating Group IBIIIAVIA Compound Absorber Based Solar Cells
App 20110005586 - AKSU; Serdar ; et al. | 2011-01-13 |
Processing method for group IBIIIAVIA semiconductor layer growth
Grant 7,867,551 - Basol January 11, 2 | 2011-01-11 |
Semitransparent Flexible Thin Film Solar Cells And Modules
App 20100330733 - Basol; Bulent M. | 2010-12-30 |
Method and apparatus for controlling composition profile of copper indium gallium chalcogenide layers
Grant 7,854,963 - Basol December 21, 2 | 2010-12-21 |
Technique And Apparatus For Depositing Layers Of Semiconductors For Solar Cell And Module Fabrication
App 20100317144 - Basol; Bulent M. | 2010-12-16 |
Composition Control For Photovoltaic Thin Film Manufacturing
App 20100317129 - Basol; Bulent M. ; et al. | 2010-12-16 |
Low cost and high throughput deposition methods and apparatus for high density semiconductor film growth
Grant 7,842,882 - Basol November 30, 2 | 2010-11-30 |
Method and apparatus for thin film solar cell manufacturing
Grant 7,833,821 - Basol November 16, 2 | 2010-11-16 |
Thin film solar cell with finger pattern
Grant 7,829,785 - Basol November 9, 2 | 2010-11-09 |
Thin film solar cell manufacturing and integration
Grant 7,825,329 - Basol November 2, 2 | 2010-11-02 |
Method to improve flexible foil substrate for thin film solar cell applications
Grant 7,824,947 - Pinarbasi , et al. November 2, 2 | 2010-11-02 |
Reel-to-reel Plating Of Conductive Grids For Flexible Thin Film Solar Cells
App 20100264035 - Basol; Bulent M. | 2010-10-21 |
Semitransparent Flexible Thin Film Solar Cells And Modules
App 20100248415 - BASOL; Bulent M. | 2010-09-30 |
Technique For Preparing Precursor Films And Compound Layers For Thin Film Solar Cell Fabrication And Apparatus Corresponding Thereto
App 20100229940 - Basol; Bulent M. | 2010-09-16 |
Semitransparent flexible thin film solar cells and modules
Grant 7,795,067 - Basol September 14, 2 | 2010-09-14 |
Plating Methods For Low Aspect Ratio Cavities
App 20100224501 - Basol; Bulent M. | 2010-09-09 |
Roll-to-roll Processing And Tools For Thin Film Solar Cell Manufacturing
App 20100226629 - Basol; Bulent M. ; et al. | 2010-09-09 |
Method and apparatus for reducing the effect of shunting defects on thin film solar cell performance
App 20100210040 - Basol; Bulent M. | 2010-08-19 |
Method And Apparatus To Remove A Segment Of A Thin Film Solar Cell Structure For Efficiency Improvement
App 20100178716 - Zapalac; Geordie ; et al. | 2010-07-15 |
Method for controlling conductor deposition on predetermined portions of a wafer
Grant 7,754,061 - Basol July 13, 2 | 2010-07-13 |
Drum Design For Web Processing
App 20100147677 - Pinarbasi; Mustafa ; et al. | 2010-06-17 |
Thin Film Photovoltaic Module Manufacturing Methods And Structures
App 20100147364 - Gonzalez; Pedro ; et al. | 2010-06-17 |
Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication
Grant 7,736,940 - Basol June 15, 2 | 2010-06-15 |
Composition control for photovoltaic thin film manufacturing
Grant 7,736,913 - Basol , et al. June 15, 2 | 2010-06-15 |
Reactor To Form Solar Cell Absorbers In Roll-to-roll Fashion
App 20100139557 - Basol; Bulent M. | 2010-06-10 |
Method And Apparatus For Forming Contact Layers For Continuous Workpieces
App 20100140078 - Pinarbasi; Mustafa ; et al. | 2010-06-10 |
Plating method and apparatus for controlling deposition on predetermined portions of a workpiece
Grant 7,731,833 - Basol June 8, 2 | 2010-06-08 |
Method And Apparatus For Detecting And Passivating Defects In Thin Film Solar Cells
App 20100124600 - Basol; Bulent M. ; et al. | 2010-05-20 |
Gallium Electroplating Methods And Electrolytes Employing Mixed Solvents
App 20100116678 - Wang; Jiaxiong ; et al. | 2010-05-13 |
Contact layers for thin film solar cells employing group IBIIIAVIA compound absorbers
Grant 7,713,773 - Aksu , et al. May 11, 2 | 2010-05-11 |
Method of forming contact layers on substrates
Grant 7,704,880 - Uzoh , et al. April 27, 2 | 2010-04-27 |
Conductive Grids For Solar Cells
App 20100089447 - Basol; Bulent M. ; et al. | 2010-04-15 |
Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same
Grant 7,670,473 - Uzoh , et al. March 2, 2 | 2010-03-02 |
Structure And Method Of Manufacturing Thin Film Photovoltaic Modules
App 20100031996 - Basol; Bulent M. | 2010-02-11 |
Flexible Thin Film Photovoltaic Modules And Manufacturing The Same
App 20100031997 - Basol; Bulent M. | 2010-02-11 |
Photovoltaic Modules With Improved Reliability
App 20100032006 - Basol; Bulent M. | 2010-02-11 |
Method And Apparatus To Form Thin Layers Of Photovoltaic Absorbers
App 20100015754 - Basol; Bulent M. | 2010-01-21 |
System and method for electrochemical mechanical polishing
Grant 7,648,622 - Basol , et al. January 19, 2 | 2010-01-19 |
Precursor Containing Copper Indium And Gallium For Selenide (sulfide) Compound Formation
App 20090314649 - Basol; Bulent M. | 2009-12-24 |
Electroplating Method For Depositing Continuous Thin Layers Of Indium Or Gallium Rich Materials
App 20090315148 - Aksu; Serdar ; et al. | 2009-12-24 |
Filling deep features with conductors in semiconductor manufacturing
Grant 7,625,814 - Emesh , et al. December 1, 2 | 2009-12-01 |
Electroplating Methods And Chemistries For Deposition Of Copper-indium-gallium Containing Thin Films
App 20090283415 - Aksu; Serdar ; et al. | 2009-11-19 |
Selenium Electroplating Chemistries And Methods
App 20090283411 - Aksu; Serdar ; et al. | 2009-11-19 |
Method Of Making Contact To A Solar Cell Employing A Group Ibiiiavia Compound Absorber Layer
App 20090283140 - Freitag; James ; et al. | 2009-11-19 |
Electroplating Methods And Chemistries For Deposition Of Group Iiib-group Via Thin Films
App 20090283414 - Wang; Jiaxiong ; et al. | 2009-11-19 |
Metallic Foil Substrate And Packaging Technique For Thin Film Solar Cells And Modules
App 20090266399 - Basol; Bulent M. ; et al. | 2009-10-29 |
Method and Apparatus to Form Back Contacts to Flexible CIGS Solar Cells
App 20090266398 - Metin; Burak ; et al. | 2009-10-29 |
Method And Apparatus For Achieving Low Resistance Contact To A Metal Based Thin Film Solar Cell
App 20090269877 - Pinarbasi; Mustafa ; et al. | 2009-10-29 |
Apparatus for Simultaneous Roll-to-Roll Wet Processing of Two Workpieces Disposed Within a Single Chamber
App 20090255461 - Basol; Bulent M. | 2009-10-15 |
Roll-to-roll Processing Method And Tools For Electroless Deposition Of Thin Layers
App 20090246908 - Basol; Bulent M. ; et al. | 2009-10-01 |
Method For Forming Copper Indium Gallium Chalcogenide Layer With Shaped Gallium Profile
App 20090226717 - Basol; Bulent M. | 2009-09-10 |
Apparatus For Continuous Processing Of Buffer Layers For Group Ibiiiavia Solar Cells
App 20090223444 - Basol; Bulent M. | 2009-09-10 |
Method and apparatus to form thin layers of materials on a base
Grant 7,585,547 - Basol , et al. September 8, 2 | 2009-09-08 |
Precursor containing copper indium and gallium for selenide (sulfide) compound formation
Grant 7,582,506 - Basol September 1, 2 | 2009-09-01 |
Electropolishing system and process
Grant 7,578,923 - Basol , et al. August 25, 2 | 2009-08-25 |
Method For Forming Copper Indium Gallium Chalcogenide Layer With Optimized Gallium Content At Its Surface
App 20090199895 - Basol; Bulent M. | 2009-08-13 |
Method To Improve Flexible Foil Substrate For Thin Film Solar Cell Applications
App 20090203165 - Pinarbasi; Mustafa ; et al. | 2009-08-13 |
Indium Electroplating Baths For Thin Layer Deposition
App 20090188808 - Wang; Jiaxiong ; et al. | 2009-07-30 |
Reactor To Form Solar Cell Absorbers
App 20090183675 - Pinarbasi; Mustafa ; et al. | 2009-07-23 |
Efficient Gallium Thin Film Electroplating Methods And Chemistries
App 20090173634 - Aksu; Serdar ; et al. | 2009-07-09 |
Technique And Apparatus For Manufacturing Flexible And Moisture Resistive Photovoltaic Modules
App 20090159119 - Basol; Bulent M. | 2009-06-25 |
Method And Apparatus To Form Solar Cell Absorber Layers With Planar Surface
App 20090162969 - Basol; Bulent M. | 2009-06-25 |
Electrode and pad assembly for processing conductive layers
Grant 7,550,070 - Basol , et al. June 23, 2 | 2009-06-23 |
Methods and Apparatus to Provide Group VIA Materials to Reactors for Group IBIIIAVIA Film Formation
App 20090148598 - Zolla; Howard G. ; et al. | 2009-06-11 |
Methods Structures And Apparatus To Provide Group Via And Ia Materials For Solar Cell Absorber Formation
App 20090148669 - Basol; Bulent M. | 2009-06-11 |
Method and apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells
Grant 7,541,067 - Basol June 2, 2 | 2009-06-02 |
Low temperature nano particle preparation and deposition for phase-controlled compound film formation
Grant 7,537,955 - Basol May 26, 2 | 2009-05-26 |
Method And Apparatus For Forming Copper Indium Gallium Chalcogenide Layers
App 20090117684 - Basol; Bulent M. | 2009-05-07 |
Method of forming semiconductor compound film for fabrication of electronic device and film produced by same using a solid solution
Grant 7,521,344 - Basol April 21, 2 | 2009-04-21 |
Plating method and apparatus for controlling deposition on predetermined portions of a workpiece
Grant 7,517,444 - Basol April 14, 2 | 2009-04-14 |
Roll to Roll Evaporation Tool for Solar Absorber Precursor Formation
App 20090092744 - Pinarbasi; Mustafa ; et al. | 2009-04-09 |
Substrate Preparation For Thin Film Solar Cell Manufacturing
App 20090078313 - Basol; Bulent M. | 2009-03-26 |
Efficient gallium thin film electroplating methods and chemistries
Grant 7,507,321 - Aksu , et al. March 24, 2 | 2009-03-24 |
Apparatus for reduction of defects in wet processed layers
Grant 7,503,830 - Basol , et al. March 17, 2 | 2009-03-17 |
Method And Structures For Controlling The Group Iiia Material Profile Through A Group Ibiiiavia Compound Layer
App 20090050208 - Basol; Bulent M. ; et al. | 2009-02-26 |
Method of making rolling electrical contact to wafer front surface
Grant 7,491,308 - Talieh , et al. February 17, 2 | 2009-02-17 |
Method And Apparatus For Affecting Surface Composition Of Cigs Absorbers Formed By Two-stage Process
App 20090035882 - Basol; Bulent M. | 2009-02-05 |
Filling deep features with conductors in semiconductor manufacturing
Grant 7,485,561 - Basol February 3, 2 | 2009-02-03 |
Method and system for controlled material removal by electrochemical polishing
App 20090020437 - Basol; Bulent M. ; et al. | 2009-01-22 |
Apparatus for processing surface of workpiece with small electrodes and surface contacts
Grant 7,476,304 - Ashjaee , et al. January 13, 2 | 2009-01-13 |
Method for controlling thickness uniformity of electroplated layers
Grant 7,435,323 - Basol , et al. October 14, 2 | 2008-10-14 |
System for electropolishing and electrochemical mechanical polishing
Grant 7,427,337 - Basol , et al. September 23, 2 | 2008-09-23 |
Electrochemical mechanical processing apparatus
Grant 7,425,250 - Basol , et al. September 16, 2 | 2008-09-16 |
Processing Method And Apparatus For Group Ibiiiavia Semiconductor Layer Growth
App 20080210295 - BASOL; BULENT M. | 2008-09-04 |
Thin Film Solar Cell Manufacturing And Integration
App 20080202584 - Basol; Bulent M. | 2008-08-28 |
Method of forming contact layers on substrates
Grant 7,416,975 - Uzoh , et al. August 26, 2 | 2008-08-26 |
Method And Apparatus For Continuous Processing Of Buffer Layers For Group Ibiiiavia Solar Cells
App 20080196659 - Basol; Bulent M. | 2008-08-21 |
Roll-to-roll Integration Of Thin Film Solar Modules
App 20080196756 - Basol; Bulent M. | 2008-08-21 |
Technique And Apparatus For Depositing Thin Layers Of Semiconductors For Solar Cell Fabrication
App 20080190761 - Basol; Bulent M. | 2008-08-14 |
Finger Pattern Formation For Thin Film Solar Cells
App 20080173390 - Narasimhan; Mukundan ; et al. | 2008-07-24 |
Reel-to-reel Reaction Of A Precursor Film To Form Solar Cell Absorber
App 20080175993 - Ashjaee; Jalal ; et al. | 2008-07-24 |
Doping Techniques For Group Ibiiiavia Compound Layers
App 20080169025 - Basol; Bulent M. ; et al. | 2008-07-17 |
Long-life workpiece surface influencing device structure and manufacturing method
Grant 7,399,516 - Basol , et al. July 15, 2 | 2008-07-15 |
Electrodeposition Technique And Apparatus To Form Selenium Containing Layers
App 20080135415 - Han; Yongbong ; et al. | 2008-06-12 |
Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication
Grant 7,374,963 - Basol May 20, 2 | 2008-05-20 |
Electropolishing system and process
App 20080099344 - Basol; Bulent M. ; et al. | 2008-05-01 |
Plating Method And Apparatus For Controlling Deposition On Predetermined Portions Of A Workpiece
App 20080102251 - Basol; Bulent M. | 2008-05-01 |
Reel-to-reel Reaction Of Precursor Film To Form Solar Cell Absorber
App 20080095938 - Basol; Bulent M. | 2008-04-24 |
Method And Apparatus For Controlling Composition Profile Of Copper Indium Gallium Chalcogenide Layers
App 20080096307 - Basol; Bulent M. | 2008-04-24 |
Roll-To-Roll Electroplating for Photovoltaic Film Manufacturing
App 20080093221 - Basol; Bulent M. | 2008-04-24 |
Thin Film Solar Cell With Finger Pattern
App 20080053522 - Basol; Bulent M. | 2008-03-06 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
Grant 7,329,335 - Talieh , et al. February 12, 2 | 2008-02-12 |
Tandem Solar Cell Structures And Methods Of Manufacturing Same
App 20080023059 - Basol; Bulent M. | 2008-01-31 |
Technique For Doping Compound Layers Used In Solar Cell Fabrication
App 20080023336 - Basol; Bulent M. | 2008-01-31 |
Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing
Grant 7,316,602 - Basol , et al. January 8, 2 | 2008-01-08 |
Technique for Manufacturing Photovoltaic Modules
App 20080000518 - Basol; Bulent M. | 2008-01-03 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
Grant 7,311,811 - Talieh , et al. December 25, 2 | 2007-12-25 |
Filling Deep Features With Conductors In Semiconductor Manufacturing
App 20070293040 - Emesh; Ismail ; et al. | 2007-12-20 |
Providing electrical contact to the surface of a semiconductor workpiece during processing
Grant 7,309,413 - Talieh , et al. December 18, 2 | 2007-12-18 |
Efficient Gallium Thin Film Electroplating Methods and Chemistries
App 20070272558 - Aksu; Serdar ; et al. | 2007-11-29 |
Method and Apparatus to Form Thin Layers of Materials on a Base
App 20070243657 - Basol; Bulent M. ; et al. | 2007-10-18 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
Grant 7,282,124 - Talieh , et al. October 16, 2 | 2007-10-16 |
Filling deep features with conductors in semiconductor manufacturing
App 20070238293 - Basol; Bulent M. | 2007-10-11 |
Composition control for roll-to-roll processed photovoltaic films
App 20070227633 - BASOL; BULENT M. | 2007-10-04 |
Composition Control For Photovoltaic Thin Film Manufacturing
App 20070232065 - Basol; Bulent M. | 2007-10-04 |
Efficient wafer processing technology
Grant 7,257,893 - Wang , et al. August 21, 2 | 2007-08-21 |
Electrode and pad assembly for processing conductive layers
App 20070181443 - Basol; Bulent M. ; et al. | 2007-08-09 |
Method of Forming Copper Indium Gallium Containing Precursors And Semiconductor Compound Layers
App 20070178620 - BASOL; BULENT M. | 2007-08-02 |
Method and system for optically enhanced metal planarization
Grant 7,250,104 - Uzoh , et al. July 31, 2 | 2007-07-31 |
Method and apparatus for eliminating defects and improving uniformity in electrochemically processed conductive layers
Grant 7,250,103 - Basol July 31, 2 | 2007-07-31 |
Method and system for electroprocessing conductive layers
Grant 7,247,558 - Basol , et al. July 24, 2 | 2007-07-24 |
Precursor Containing Copper Indium And Gallium For Selenide (Sulfide) Compound Formation
App 20070166964 - Basol; Bulent M. | 2007-07-19 |
Method and system to provide electrical contacts for electrotreating processes
Grant 7,244,347 - Basol , et al. July 17, 2 | 2007-07-17 |
Low-force electrochemical mechanical processing method and apparatus
Grant 7,238,092 - Basol , et al. July 3, 2 | 2007-07-03 |
Contact Layers For Thin Film Solar Cells Employing Group IBIIIAVIA Compound Absorbers
App 20070145507 - Basol; Bulent M. | 2007-06-28 |
Means To Improve Center To Edge Uniformity Of Electrochemical Mechanical Processing Of Workpiece Surface
App 20070131563 - Bogart; Jeffrey ; et al. | 2007-06-14 |
Apparatus for reduction of defects in wet procssed layers
App 20070135022 - Basol; Bulent M. ; et al. | 2007-06-14 |
Fabrication Of Semiconductor Interconnect Structures
App 20070128851 - Basol; Bulent M. ; et al. | 2007-06-07 |
Process for conditioning conductive surfaces after electropolishing
App 20070111523 - Emesh; Ismail ; et al. | 2007-05-17 |
Method and apparatus for converting precursor layers into photovoltaic absorbers
App 20070111367 - Basol; Bulent M. | 2007-05-17 |
Method and system to provide electrical contacts for electrotreating processes
Grant 7,211,186 - Basol , et al. May 1, 2 | 2007-05-01 |
Method and system to provide electrical contacts for electrotreating processes
Grant 7,211,174 - Basol , et al. May 1, 2 | 2007-05-01 |
Method And Apparatus For Thin Film Solar Cell Manufacturing
App 20070093059 - Basol; Bulent M. | 2007-04-26 |
Technique For Preparing Precursor Films And Compound Layers For Thin Film Solar Cell Fabrication And Apparatus Corresponding Thereto
App 20070093006 - Basol; Bulent M. | 2007-04-26 |
Integrated circuit interconnect fabrication systems
Grant 7,204,743 - Basol , et al. April 17, 2 | 2007-04-17 |
Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same
Grant 7,204,917 - Uzoh , et al. April 17, 2 | 2007-04-17 |
Method and apparatus to deposit layers with uniform properties
Grant 7,204,924 - Basol , et al. April 17, 2 | 2007-04-17 |
Mask plate design
Grant 7,201,829 - Basol , et al. April 10, 2 | 2007-04-10 |
Electrode assembly for electrochemical processing of workpiece
Grant 7,195,696 - Uzoh , et al. March 27, 2 | 2007-03-27 |
Method of electroplating copper layers with flat topography
Grant 7,195,700 - Uzoh , et al. March 27, 2 | 2007-03-27 |
Method of forming contact layers on substrates
App 20070066054 - Uzoh; Cyprian E. ; et al. | 2007-03-22 |
Method for reduction of defects in wet processed layers
Grant 7,189,146 - Basol , et al. March 13, 2 | 2007-03-13 |
Efficient wafer processing technology
App 20070050974 - Wang; Hung-Ming ; et al. | 2007-03-08 |
Plating apparatus and method for controlling conductor deposition on predetermined portions of a wafer
App 20070051635 - Basol; Bulent M. | 2007-03-08 |
Fabrication of semiconductor interconnect structures
Grant 7,172,497 - Basol , et al. February 6, 2 | 2007-02-06 |
Solution for electrochemical mechanical polishing
App 20070017818 - Emesh; Ismail ; et al. | 2007-01-25 |
Integrated system for processing semiconductor wafers
App 20070004316 - Ashjaee; Jalal ; et al. | 2007-01-04 |
Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface
Grant 7,141,146 - Bogart , et al. November 28, 2 | 2006-11-28 |
Filling deep and wide openings with defect-free conductor
App 20060252254 - Basol; Bulent M. | 2006-11-09 |
Method and structure to improve reliability of copper interconnects
Grant 7,129,165 - Basol , et al. October 31, 2 | 2006-10-31 |
Edge and bevel cleaning process and system
Grant 7,122,473 - Ashjaee , et al. October 17, 2 | 2006-10-17 |
Conductive materials for low resistance interconnects and methods of forming the same
App 20060228934 - Basol; Bulent M. | 2006-10-12 |
Method for electrochemically processing a workpiece
Grant 7,115,510 - Basol , et al. October 3, 2 | 2006-10-03 |
Electrochemical mechanical processing with advancible sweeper
Grant 7,097,755 - Basol , et al. August 29, 2 | 2006-08-29 |
Advanced chemical mechanical polishing system with smart endpoint detection
Grant 7,097,538 - Talieh , et al. August 29, 2 | 2006-08-29 |
Method of Forming Semiconductor Compound Film For Fabrication of Electronic Device and Film Produced by Same
App 20060189155 - Basol; Bulent M. | 2006-08-24 |
Method for reduction of gap fill defects
App 20060183321 - Basol; Bulent M. | 2006-08-17 |
Method of forming semiconductor compound film for fabrication of electronic device and film produced by same
Grant 7,091,136 - Basol August 15, 2 | 2006-08-15 |
Method of Forming Semiconductor Compound Film for Fabrication of Electronic Device and Film Produced By Same
App 20060178012 - Basol; Bulent M. | 2006-08-10 |
Method of Forming Semiconductor Compound Film For Fabrication of Electronic Device And Film Produced by Same
App 20060165911 - Basol; Bulent M. | 2006-07-27 |
Method of wafer processing with edge seed layer removal
App 20060137994 - Basol; Bulent M. ; et al. | 2006-06-29 |
Means to eliminate bubble entrapment during electrochemical processing of workpiece surface
App 20060131177 - Bogart; Jeffrey ; et al. | 2006-06-22 |
Method and apparatus for localized material removal by electrochemical polishing
Grant 7,064,057 - Basol June 20, 2 | 2006-06-20 |
Integrated system for processing semiconductor wafers
Grant 7,059,944 - Ashjaee , et al. June 13, 2 | 2006-06-13 |
Method and system for electroprocessing conductive layers
App 20060121725 - Basol; Bulent M. ; et al. | 2006-06-08 |
Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication
App 20060121701 - Basol; Bulent M. | 2006-06-08 |
Process to minimize and/or eliminate conductive material coating over the top surface of a patterned substrate
App 20060118425 - Basol; Bulent M. ; et al. | 2006-06-08 |
Process and system for eliminating gas bubbles during electrochemical processing
Grant 7,045,040 - Basol May 16, 2 | 2006-05-16 |
Apparatus for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processing
App 20060096702 - Basol; Bulent M. ; et al. | 2006-05-11 |
Method and apparatus for establishing additive differential on surfaces for preferential plating
App 20060081477 - Basol; Bulent M. | 2006-04-20 |
Electrochemical edge and bevel cleaning process and system
Grant 7,029,567 - Basol April 18, 2 | 2006-04-18 |
Advanced chemical mechanical polishing system with smart endpoint detection
App 20060063469 - Talieh; Homayoun ; et al. | 2006-03-23 |
Multi step electrodeposition process for reducing defects and minimizing film thickness
App 20060011485 - Basol; Bulent M. ; et al. | 2006-01-19 |
Method and apparatus for processing a substrate with minimal edge exclusion
App 20060006060 - Basol; Bulent M. ; et al. | 2006-01-12 |
System and method for electrochemical mechanical polishing
App 20060006073 - Basol; Bulent M. ; et al. | 2006-01-12 |
Defect-free thin and planar film processing
App 20060009033 - Basol; Bulent M. ; et al. | 2006-01-12 |
Article for polishin substrate surface
App 20050287932 - Basol, Bulent M. ; et al. | 2005-12-29 |
Method of making rolling electrical contact to wafer front surface
App 20050269212 - Talieh, Homayoun ; et al. | 2005-12-08 |
Low temperature nano particle preparation and deposition for phase-controlled compound film formation
App 20050266600 - Basol, Bulent M. | 2005-12-01 |
Plating method and apparatus for controlling deposition on predetermined portions of a workpiece
App 20050258046 - Basol, Bulent M. | 2005-11-24 |
Method for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processing
Grant 6,967,166 - Basol , et al. November 22, 2 | 2005-11-22 |
Planar metal electroprocessing
App 20050227483 - Basol, Bulent M. ; et al. | 2005-10-13 |
Multi step electrodeposition process for reducing defects and minimizing film thickness
Grant 6,946,066 - Basol , et al. September 20, 2 | 2005-09-20 |
Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication
App 20050202589 - Basol, Bulent M. | 2005-09-15 |
Method and apparatus for processing a substrate with minimal edge exclusion
Grant 6,942,780 - Basol , et al. September 13, 2 | 2005-09-13 |
Defect-free thin and planar film processing
Grant 6,943,112 - Basol , et al. September 13, 2 | 2005-09-13 |
Low cost and high throughput deposition methods and apparatus for high density semiconductor film growth
App 20050194036 - Basol, Bulent M. | 2005-09-08 |
Method and apparatus of sealing wafer backside for full-face electrochemical plating
Grant 6,939,206 - Ashjaee , et al. September 6, 2 | 2005-09-06 |
Method and apparatus for avoiding particle accumulation in electrodeposition
Grant 6,932,896 - Basol , et al. August 23, 2 | 2005-08-23 |
System for electrochemical mechanical polishing
App 20050173260 - Basol, Bulent M. ; et al. | 2005-08-11 |
System and method for electroless surface conditioning
App 20050170080 - Basol, Bulent M. ; et al. | 2005-08-04 |
Plating method and apparatus for controlling deposition on predetermined portions of a workpiece
Grant 6,921,551 - Basol July 26, 2 | 2005-07-26 |
Chemical mechanical polishing method and apparatus for controlling material removal profile
App 20050159084 - Basol, Bulent M. ; et al. | 2005-07-21 |
Method and system for material removal and planarization
App 20050150777 - Basol, Bulent M. | 2005-07-14 |
Electroetching process and system
App 20050145489 - Basol, Bulent M. ; et al. | 2005-07-07 |
Apparatus for avoiding particle accumulation in electrochemical processing
App 20050145484 - Basol, Bulent M. ; et al. | 2005-07-07 |
System for electropolishing and electrochemical mechanical polishing
App 20050133379 - Basol, Bulent M. ; et al. | 2005-06-23 |
Electroetching methods and systems using chemical and mechanical influence
App 20050133380 - Basol, Bulent M. ; et al. | 2005-06-23 |
Chemical mechanical polishing endpoint detection
Grant 6,908,374 - Wang , et al. June 21, 2 | 2005-06-21 |
Adjustable gap chemical mechanical polishing method and apparatus
App 20050118932 - Talieh, Homayoun ; et al. | 2005-06-02 |
Method and apparatus for localized material removal by electrochemical polishing
App 20050112868 - Basol, Bulent M. | 2005-05-26 |
System and method for applying constant pressure during electroplating and electropolishing
App 20050101138 - Guo, George Xinsheng ; et al. | 2005-05-12 |
System and method for defect free conductor deposition on substrates
App 20050095846 - Basol, Bulent M. | 2005-05-05 |
Methods for depositing high yield and low defect density conductive films in damascene structures
App 20050095854 - Uzoh, Cyprian E. ; et al. | 2005-05-05 |
Edge and bevel cleaning process and system
App 20050079713 - Ashjaee, Jalal ; et al. | 2005-04-14 |
Method and system monitoring and controlling film thickness profile during plating and electroetching
Grant 6,866,763 - Basol , et al. March 15, 2 | 2005-03-15 |
Method for electrochemically processing a workpiece
Grant 6,867,136 - Basol , et al. March 15, 2 | 2005-03-15 |
Method and structure to reduce defects in integrated circuits and substrates
Grant 6,861,354 - Uzoh , et al. March 1, 2 | 2005-03-01 |
Method and system to provide electroplanarization of a workpiece with a conducting material layer
App 20050042873 - Uzoh, Cyprian E. ; et al. | 2005-02-24 |
Advanced chemical mechanical polishing system with smart endpoint detection
Grant 6,857,947 - Wang , et al. February 22, 2 | 2005-02-22 |
Method and apparatus for filling low aspect ratio cavities with conductive material at high rate
Grant 6,858,121 - Basol February 22, 2 | 2005-02-22 |
Method and apparatus for full surface electrotreating of a wafer
App 20050034994 - Ashjaee, Jalal ; et al. | 2005-02-17 |
Reduction of defects in conductive layers during electroplating
App 20050029106 - Baniahmad, Laila ; et al. | 2005-02-10 |
Method and system for optically enhanced metal planarization
App 20050029123 - Uzoh, Cyprian E. ; et al. | 2005-02-10 |
Electroetching process and system
Grant 6,852,630 - Basol , et al. February 8, 2 | 2005-02-08 |
Method and apparatus for full surface electrotreating of a wafer
Grant 6,852,208 - Ashjaee , et al. February 8, 2 | 2005-02-08 |
Electrochemical Mechanical Planarization Process And Apparatus
App 20050016868 - Basol, Bulent M. ; et al. | 2005-01-27 |
Electrode assembly for electrochemical processing of workpiece
App 20050006244 - Uzoh, Cyprian E. ; et al. | 2005-01-13 |
Means to improve center-to edge uniformity of electrochemical mechanical processing of workpiece surface
App 20040266193 - Bogart, Jeffrey ; et al. | 2004-12-30 |
Method of electroplating copper layers with flat topography
App 20040265562 - Uzoh, Cyprian E. ; et al. | 2004-12-30 |
Method of reducing post-CMP defectivity
App 20040259348 - Basol, Bulent M. ; et al. | 2004-12-23 |
Electrochemical edge and bevel cleaning process and system
Grant 6,833,063 - Basol December 21, 2 | 2004-12-21 |
Method and apparatus for controlling thickness uniformity of electroplated layers
App 20040231994 - Basol, Bulent M. ; et al. | 2004-11-25 |
Electroetching methods and systems using chemical and mechanical influence
Grant 6,821,409 - Basol , et al. November 23, 2 | 2004-11-23 |
Process and system for providing electrochemical processing solution with reduced oxygen and gas content
App 20040222100 - Basol, Bulent M. | 2004-11-11 |
Method and structure for thru-mask contact electrodeposition
Grant 6,815,354 - Uzoh , et al. November 9, 2 | 2004-11-09 |
Method of forming semiconductor compound film for fabrication of electronic device and film produced by same
App 20040219730 - Basol, Bulent M. | 2004-11-04 |
Method and structure to improve reliability of copper interconnects
App 20040219779 - Basol, Bulent M. ; et al. | 2004-11-04 |
Method and apparatus for eliminating defects and improving uniformity in electrochemically processed conductive layers
App 20040200732 - Basol, Bulent M. | 2004-10-14 |
Apparatus for controlling thickness uniformity of electroplated and electroetched layers
Grant 6,802,946 - Basol , et al. October 12, 2 | 2004-10-12 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
App 20040195111 - Talieh, Homayoun ; et al. | 2004-10-07 |
Method and apparatus for reduction of defects in wet processed layers
App 20040198190 - Basol, Bulent M. ; et al. | 2004-10-07 |
Process and apparatus for air bubble removal during electrochemical processing
App 20040182715 - Bogart, Jeffrey ; et al. | 2004-09-23 |
Process and system for eliminating gas bubbles during electrochemical processing
App 20040182712 - Basol, Bulent M. | 2004-09-23 |
Method and apparatus to deposit layers with uniform properties
App 20040168926 - Basol, Bulent M. ; et al. | 2004-09-02 |
Electrochemical mechanical processing using low temperature process environment
App 20040170753 - Basol, Bulent M. | 2004-09-02 |
Method of supplying solution for electrochemical processes from double-cavity electrode housing
App 20040163963 - Uzoh, Cyprian E. ; et al. | 2004-08-26 |
Method and system to provide electroplanarization of a workpiece with a conducting material layer
Grant 6,780,772 - Uzoh , et al. August 24, 2 | 2004-08-24 |
Edge and bevel cleaning process and system
Grant 6,777,338 - Ashjaee , et al. August 17, 2 | 2004-08-17 |
Continuous bleed-and-feed process and equipment
App 20040142566 - Frey, Bernard ; et al. | 2004-07-22 |
Edge and bevel cleaning process and system
App 20040140287 - Bogart, Jeffery ; et al. | 2004-07-22 |
Integrated circuit interconnect fabrication systems and methods
App 20040132381 - Basol, Bulent M. ; et al. | 2004-07-08 |
Method and device to remove unwanted material from the edge region of a workpiece
App 20040132295 - Basol, Bulent M. ; et al. | 2004-07-08 |
Plating method and apparatus for controlling deposition on predetermined portions of a workpiece
App 20040124089 - Basol, Bulent M. | 2004-07-01 |
Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing
App 20040112760 - Basol, Bulent M. ; et al. | 2004-06-17 |
Method and system to provide material removal and planarization employing a reactive pad
App 20040102049 - Basol, Bulent M. ; et al. | 2004-05-27 |
Advanced chemical mechanical polishing system with smart endpoint detection
Grant 6,722,946 - Talieh , et al. April 20, 2 | 2004-04-20 |
Carrier head for holding a wafer and allowing processing on a front face thereof to occur
Grant 6,716,084 - Basol , et al. April 6, 2 | 2004-04-06 |
Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs
Grant 6,695,962 - Uzoh , et al. February 24, 2 | 2004-02-24 |
Method and apparatus for integrated chemical mechanical polishing of copper and barrier layers
App 20040023607 - Talieh, Homayoun ; et al. | 2004-02-05 |
Advanced chemical mechanical polishing system with smart endpoint detection
App 20040023606 - Wang, Yuchun ; et al. | 2004-02-05 |
Defect-free thin and planar film processing
App 20040012090 - Basol, Bulent M. ; et al. | 2004-01-22 |
Selective barrier removal slurry
App 20040014399 - Wang, Yuchun ; et al. | 2004-01-22 |
Electroetching system and process
App 20040007478 - Basol, Bulent M. ; et al. | 2004-01-15 |
Method and system monitoring and controlling film thickness profile during plating and electroetching
App 20030230491 - Basol, Bulent M. ; et al. | 2003-12-18 |
Long-life workpiece surface influencing device structure and manufacturing method
App 20030217927 - Basol, Bulent M. ; et al. | 2003-11-27 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
App 20030217932 - Talieh, Homayoun ; et al. | 2003-11-27 |
Method and system to provide material removal and planarization employing a reactive pad
Grant 6,649,523 - Basol , et al. November 18, 2 | 2003-11-18 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
App 20030209445 - Talieh, Homayoun ; et al. | 2003-11-13 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
App 20030209425 - Talieh, Homayoun ; et al. | 2003-11-13 |
Method and apparatus for processing a substrate with minimal edge exclusion
App 20030209429 - Basol, Bulent M. ; et al. | 2003-11-13 |
Method and apparatus for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processing
App 20030194866 - Basol, Bulent M. ; et al. | 2003-10-16 |
Electroetching methods and systems using chemical and mechanical influence
App 20030178319 - Basol, Bulent M. ; et al. | 2003-09-25 |
Integrated system for processing semiconductor wafers
App 20030166382 - Ashjaee, Jalal ; et al. | 2003-09-04 |
Method and structure to reduce defects in integrated circuits and substrates
App 20030160326 - Uzoh, Cyprian E. ; et al. | 2003-08-28 |
Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate
Grant 6,610,190 - Basol , et al. August 26, 2 | 2003-08-26 |
Advanced chemical mechanical polishing system with smart endpoint detection
App 20030153245 - Talieh, Homayoun ; et al. | 2003-08-14 |
Electrochemical edge and bevel cleaning process and system
App 20030141201 - Basol, Bulent M. | 2003-07-31 |
Method and system to provide electroplanarization of a workpiece with a conducting material layer
App 20030139053 - Uzoh, Cyprian E. ; et al. | 2003-07-24 |
Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same
App 20030121774 - Uzoh, Cyprian E. ; et al. | 2003-07-03 |
Device providing electrical contact to the surface of a semiconductor workpiece during metal plating
Grant 6,497,800 - Talieh , et al. December 24, 2 | 2002-12-24 |
Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing
Grant 6,482,307 - Ashjaee , et al. November 19, 2 | 2002-11-19 |
Oxide-based method of making compound semiconductor films and making related electronic devices
Grant 6,127,202 - Kapur , et al. October 3, 2 | 2000-10-03 |
Method of making compound semiconductor films and making related electronic devices
Grant 5,985,691 - Basol , et al. November 16, 1 | 1999-11-16 |
Group I-III-VI.sub.2 semiconductor films for solar cell application
Grant 5,028,274 - Basol , et al. July 2, 1 | 1991-07-02 |
Multilayer ohmic contact for p-type semiconductor and method of making same
Grant 4,680,611 - Basol July 14, 1 | 1987-07-14 |
Stable contact between current collector grid and transparent conductive layer
Grant 4,675,468 - Basol , et al. June 23, 1 | 1987-06-23 |
Method of making multilayer ohmic contact to thin film p-type II-VI semiconductor
Grant 4,666,569 - Basol May 19, 1 | 1987-05-19 |
Method of making current collector grid and materials therefor
Grant 4,595,790 - Basol June 17, 1 | 1986-06-17 |
Method of forming ohmic contacts
Grant 4,456,630 - Basol June 26, 1 | 1984-06-26 |
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