loadpatents
Patent applications and USPTO patent grants for Bae; Jeong-Yong.The latest application filed is for "substrate processing apparatus and substrate processing system including the same".
Patent | Date |
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Substrate processing apparatus and substrate processing system including the same Grant 11,361,960 - Jang , et al. June 14, 2 | 2022-06-14 |
Substrate Processing Apparatus And Substrate Processing System Including The Same App 20200303182 - JANG; Won-Ho ;   et al. | 2020-09-24 |
Substrate processing apparatus and substrate processing system including the same Grant 10,707,071 - Jang , et al. | 2020-07-07 |
Substrate Processing Apparatus And Substrate Processing System Including The Same App 20180190485 - JANG; Won-Ho ;   et al. | 2018-07-05 |
Method for processing a substrate and apparatus for performing the same Grant 9,529,267 - Rho , et al. December 27, 2 | 2016-12-27 |
Oil-spraying Device App 20140323992 - Bae; Jeong-Yong | 2014-10-30 |
Apparatus And Method For Drying Substrates App 20140298669 - Jeong; Young-Ju ;   et al. | 2014-10-09 |
Juicer App 20140290503 - Bae; Jeong-Yong | 2014-10-02 |
Apparatus and method for drying substrates Grant 8,793,898 - Jeong , et al. August 5, 2 | 2014-08-05 |
Spin head, apparatus for treating substrate, and method for treating substrate Grant 8,714,169 - Lee , et al. May 6, 2 | 2014-05-06 |
Substrate processing apparatus and method for transferring substrate for the apparatus Grant 8,702,365 - Park , et al. April 22, 2 | 2014-04-22 |
Method For Processing A Substrate And Apparatus For Performing The Same App 20130284212 - RHO; Eun-Su ;   et al. | 2013-10-31 |
Apparatus and method for plating substrate Grant 8,540,854 - Kim , et al. September 24, 2 | 2013-09-24 |
Apparatus And Method For Treating Substrate App 20130081658 - SONG; Gil Hun ;   et al. | 2013-04-04 |
Apparatus And Method For Drying Substrates App 20130074359 - JEONG; Young-Ju ;   et al. | 2013-03-28 |
Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head Grant 8,257,549 - Lee , et al. September 4, 2 | 2012-09-04 |
Method For Processing A Substrate And Apparatus For Performing The Same App 20100326476 - Rho; Eun-Su ;   et al. | 2010-12-30 |
Apparatus and method for plating substrate App 20100200397 - Kim; Yijung ;   et al. | 2010-08-12 |
Apparatus And Method For Drying Substrates App 20100146813 - Jeong; Young-Ju ;   et al. | 2010-06-17 |
Spin Head, Apparatus For Treating Substrate, And Method For Treating Substrate App 20100126539 - LEE; Taek Youb ;   et al. | 2010-05-27 |
Substrate Processing Apparatus And Method For Transferring Substrate For The Apparatus App 20100047045 - Park; Sun Yong ;   et al. | 2010-02-25 |
System and method for supplying functional water Grant 7,617,836 - Kim , et al. November 17, 2 | 2009-11-17 |
Ozonated water mixture supply apparatus and method, and substrate treating facility with the apparatus App 20090145463 - Oh; Rae-Taek ;   et al. | 2009-06-11 |
Spin Chuck App 20090108545 - Kwon; Oh-Jin ;   et al. | 2009-04-30 |
Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head App 20090093123 - Lee; Woo-Seok ;   et al. | 2009-04-09 |
Method and apparatus for cleaning and driving wafers App 20080308131 - Kim; One-Vai ;   et al. | 2008-12-18 |
Apparatus for treating substrate Grant 7,323,080 - Kim , et al. January 29, 2 | 2008-01-29 |
Spin etcher with thickness measuring system Grant 7,154,611 - Kim , et al. December 26, 2 | 2006-12-26 |
System and method for supplying functional water App 20060207777 - Kim; Ju-Won ;   et al. | 2006-09-21 |
Method and apparatus for cleaning and drying wafers App 20060081269 - Kim; One-Vai ;   et al. | 2006-04-20 |
Apparatus and method for treating substrate App 20050247667 - Kim, In-Jun ;   et al. | 2005-11-10 |
Chemical supply apparatus Grant 6,918,406 - Bae , et al. July 19, 2 | 2005-07-19 |
Wafer drying method Grant 6,784,106 - Bae , et al. August 31, 2 | 2004-08-31 |
Wafer drying apparatus Grant 6,757,989 - Bae , et al. July 6, 2 | 2004-07-06 |
Spin etcher with thickness measuring system App 20040004724 - Kim, Chung-Sik ;   et al. | 2004-01-08 |
Chemical supply apparatus App 20030227821 - Bae, Jeong-yong ;   et al. | 2003-12-11 |
Wafer drying apparatus App 20030121173 - Bae, Jeong Yong ;   et al. | 2003-07-03 |
Wafer drying method App 20030124878 - Bae, Jeong-Yong ;   et al. | 2003-07-03 |
Accumulator for rotary compressor Grant 5,873,261 - Bae February 23, 1 | 1999-02-23 |
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