Patent | Date |
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Normal incidence rotating compensator ellipsometer Grant 7,355,708 - Aspnes April 8, 2 | 2008-04-08 |
Normal incidence rotating compensator ellipsometer App 20070091311 - Aspnes; David E. | 2007-04-26 |
Normal incidence rotating compensator ellipsometer Grant 7,173,700 - Aspnes February 6, 2 | 2007-02-06 |
Normal incidence rotating compensator ellipsometer App 20050248763 - Aspnes, David E. | 2005-11-10 |
Broadband spectroscopic rotating compensator ellipsometer Grant 6,831,743 - Aspnes , et al. December 14, 2 | 2004-12-14 |
Broadband spectroscopic rotating compensator ellipsometer App 20040042009 - Aspnes, David E. ;   et al. | 2004-03-04 |
Broadband spectroscopic rotating compensator ellipsometer Grant 6,650,415 - Aspnes , et al. November 18, 2 | 2003-11-18 |
Broadband spectroscopic rotating compensator ellipsometer App 20020191186 - Aspnes, David E. ;   et al. | 2002-12-19 |
Broadband spectroscopic rotating compensator ellipsometer Grant 6,449,043 - Aspnes , et al. September 10, 2 | 2002-09-10 |
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,411,385 - Aspnes , et al. June 25, 2 | 2002-06-25 |
Broadband spectroscopic rotating compensator ellipsometer App 20020018205 - Aspnes, David E. ;   et al. | 2002-02-14 |
Thin film optical measurement system and method with calibrating ellipsometer App 20010046049 - Aspnes, David E. ;   et al. | 2001-11-29 |
Broadband spectroscopic rotating compensator ellipsometer Grant 6,320,657 - Aspnes , et al. November 20, 2 | 2001-11-20 |
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,304,326 - Aspnes , et al. October 16, 2 | 2001-10-16 |
Broadband spectroscopic rotating compensator ellipsometer Grant 6,134,012 - Aspnes , et al. October 17, 2 | 2000-10-17 |
Broadband spectroscopic rotating compensator ellipsometer Grant 5,973,787 - Aspnes , et al. October 26, 1 | 1999-10-26 |
Thin film optical measurement system and method with calibrating ellipsometer Grant 5,900,939 - Aspnes , et al. May 4, 1 | 1999-05-04 |
Broadband spectroscopic rotating compensator ellipsometer Grant 5,877,859 - Aspnes , et al. March 2, 1 | 1999-03-02 |
Thin film optical measurement system and method with calibrating ellipsometer Grant 5,798,837 - Aspnes , et al. August 25, 1 | 1998-08-25 |
Extraction of spatially varying dielectric function from ellipsometric data Grant 5,277,747 - Aspnes January 11, 1 | 1994-01-11 |
Ellipsometric control of material growth Grant 5,091,320 - Aspnes , et al. February 25, 1 | 1992-02-25 |
Optical control of deposition of crystal monolayers Grant 4,931,132 - Aspnes , et al. June 5, 1 | 1990-06-05 |
Cylindrical grating monochromator for synchrotron radiation Grant 4,492,466 - Aspnes January 8, 1 | 1985-01-08 |
Method of preparing semiconductor surfaces Grant 4,380,490 - Aspnes , et al. April 19, 1 | 1983-04-19 |
Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique Grant 4,357,179 - Adams , et al. November 2, 1 | 1982-11-02 |
Method for optical monitoring in materials fabrication Grant 4,332,833 - Aspnes , et al. June 1, 1 | 1982-06-01 |