Patent | Date |
---|
Semiconductor devices including cobalt alloys and fabrication methods thereof Grant 11,380,619 - Koike , et al. July 5, 2 | 2022-07-05 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 11,011,379 - Arghavani , et al. May 18, 2 | 2021-05-18 |
Semiconductor Devices Including Cobalt Alloys And Fabrication Methods Thereof App 20200365192 - KOIKE; Junichi ;   et al. | 2020-11-19 |
Semiconductor devices including a first cobalt alloy in a first barrier layer and a second cobalt alloy in a second barrier layer Grant 10,796,995 - Koike , et al. October 6, 2 | 2020-10-06 |
Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Grant 10,741,405 - Peter , et al. A | 2020-08-11 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 10,559,468 - Arghavani , et al. Feb | 2020-02-11 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20190385850 - Arghavani; Reza ;   et al. | 2019-12-19 |
Semiconductor Devices Including Cobalt Alloys And Fabrication Methods Thereof App 20190164896 - KOIKE; Junichi ;   et al. | 2019-05-30 |
Selective Self-aligned Patterning Of Silicon Germanium, Germanium And Type Iii/v Materials Using A Sulfur-containing Mask App 20180342399 - Peter; Daniel ;   et al. | 2018-11-29 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20180269061 - Arghavani; Reza ;   et al. | 2018-09-20 |
Rare earth metal surface-activated plasma doping on semiconductor substrates Grant 10,068,981 - Kim , et al. September 4, 2 | 2018-09-04 |
Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Grant 10,043,672 - Peter , et al. August 7, 2 | 2018-08-07 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 9,997,357 - Arghavani , et al. June 12, 2 | 2018-06-12 |
Transistor with threshold voltage set notch and method of fabrication thereof Grant 9,922,977 - Arghavani , et al. March 20, 2 | 2018-03-20 |
Selective Self-aligned Patterning Of Silicon Germanium, Germanium And Type Iii/v Materials Using A Sulfur-containing Mask App 20170287724 - Peter; Daniel ;   et al. | 2017-10-05 |
Rare Earth Metal Surface-activated Plasma Doping On Semiconductor Substrates App 20170256622 - Kim; Yunsang ;   et al. | 2017-09-07 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20160379826 - Arghavani; Reza ;   et al. | 2016-12-29 |
Transistor with Threshold Voltage Set Notch and Method of Fabrication Thereof App 20160336318 - Arghavani; Reza ;   et al. | 2016-11-17 |
Method to tune TiO.sub.x stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiO.sub.x/Ti based MIS contact scheme for CMOS Grant 9,478,411 - Thombare , et al. October 25, 2 | 2016-10-25 |
Transistor with threshold voltage set notch and method of fabrication thereof Grant 9,418,987 - Arghavani , et al. August 16, 2 | 2016-08-16 |
Integrated etch/clean for dielectric etch applications Grant 9,396,961 - Arghavani , et al. July 19, 2 | 2016-07-19 |
Integrated Etch/clean For Dielectric Etch Applications App 20160181117 - Arghavani; Reza ;   et al. | 2016-06-23 |
Method To Tune Tiox Stoichiometry Using Atomic Layer Deposited Ti Film To Minimize Contact Resistance For Tiox/ti Based Mis Contact Scheme For Cmos App 20160056037 - Thombare; Shruti Vivek ;   et al. | 2016-02-25 |
CVD based metal/semiconductor OHMIC contact for high volume manufacturing applications Grant 9,153,486 - Arghavani , et al. October 6, 2 | 2015-10-06 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20150249013 - Arghavani; Reza ;   et al. | 2015-09-03 |
Cvd Based Metal/semiconductor Ohmic Contact For High Volume Manufacturing Applications App 20140308812 - Arghavani; Reza ;   et al. | 2014-10-16 |
Transistor With Threshold Voltage Set Notch And Method Of Fabrication Thereof App 20140284722 - Arghavani; Reza ;   et al. | 2014-09-25 |
Transistor with threshold voltage set notch and method of fabrication thereof Grant 8,759,872 - Arghavani , et al. June 24, 2 | 2014-06-24 |
Method of forming flash memory with ultraviolet treatment Grant 8,501,568 - Balseanu , et al. August 6, 2 | 2013-08-06 |
Method of forming a non-volatile memory having a silicon nitride charge trap layer Grant 8,252,653 - Balseanu , et al. August 28, 2 | 2012-08-28 |
Semiconductor on insulator Grant 8,173,495 - Jin , et al. May 8, 2 | 2012-05-08 |
Mixing Energized and Non-Energized Gases for Silicon Nitride Deposition App 20120009803 - Jung; Kee Bum ;   et al. | 2012-01-12 |
Transistor With Threshold Voltage Set Notch And Method Of Fabrication Thereof App 20110309447 - Arghavani; Reza ;   et al. | 2011-12-22 |
Oxide etch with NH4-NF3 chemistry Grant 7,955,510 - Arghavani , et al. June 7, 2 | 2011-06-07 |
Semiconductor on Insulator App 20110039377 - Jin; Been-Yih ;   et al. | 2011-02-17 |
Method For Fabrication Of A Semiconductor Device And Structure App 20110031997 - Or-Bach; Zvi ;   et al. | 2011-02-10 |
Semiconductor on insulator apparatus Grant 7,875,932 - Jin , et al. January 25, 2 | 2011-01-25 |
Low temperature conformal oxide formation and applications Grant 7,851,385 - Spuller , et al. December 14, 2 | 2010-12-14 |
Method of forming non-volatile memory having charge trap layer with compositional gradient Grant 7,816,205 - Balseanu , et al. October 19, 2 | 2010-10-19 |
Non-volatile Memory Having Charge Trap Layer With Compositional Gradient App 20100096688 - Balseanu; Mihaela ;   et al. | 2010-04-22 |
Non-volatile Memory Having Silicon Nitride Charge Trap Layer App 20100096687 - BALSEANU; Mihaela ;   et al. | 2010-04-22 |
Flash Memory With Treated Charge Trap Layer App 20100099247 - Balseanu; Mihaela ;   et al. | 2010-04-22 |
Oxide Etch With Nh4-nf3 Chemistry App 20100093151 - Arghavani; Reza ;   et al. | 2010-04-15 |
Memory cell having stressed layers Grant 7,678,662 - Arghavani , et al. March 16, 2 | 2010-03-16 |
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill Grant 7,674,727 - Yuan , et al. March 9, 2 | 2010-03-09 |
Semiconductor on insulator apparatus Grant 7,671,414 - Jin , et al. March 2, 2 | 2010-03-02 |
Semiconductor on Insulator Apparatus App 20100038717 - Jin; Been-Yih ;   et al. | 2010-02-18 |
Apparatus And Method For Reaction Of Materials Using Electromagnetic Resonators App 20090295509 - Master; Neel S. ;   et al. | 2009-12-03 |
Substrate having silicon germanium material and stressed silicon nitride layer Grant 7,563,680 - Arghavani July 21, 2 | 2009-07-21 |
Method of inducing stresses in the channel region of a transistor Grant 7,528,051 - Arghavani , et al. May 5, 2 | 2009-05-05 |
Low Temperature Conformal Oxide Formation And Applications App 20090087977 - SPULLER; MATTHEW ;   et al. | 2009-04-02 |
Semiconductor On Insulator Apparatus App 20080303116 - Jin; Been-Yih ;   et al. | 2008-12-11 |
Semiconductor on insulator apparatus and method Grant 7,427,538 - Jin , et al. September 23, 2 | 2008-09-23 |
Uv Curing Of Pecvd-deposited Sacrificial Polymer Films For Air-gap Ild App 20080182403 - NOORI; ATIF ;   et al. | 2008-07-31 |
Substrate Having Silicon Germanium Material and Stressed Silicon Nitride Layer App 20080096356 - Arghavani; Reza | 2008-04-24 |
Metal layer inducing strain in silicon App 20080061285 - Arghavani; Reza ;   et al. | 2008-03-13 |
Substrate having silicon germanium material and stressed silicon nitride layer Grant 7,323,391 - Arghavani January 29, 2 | 2008-01-29 |
Method and apparatus to prevent lateral oxidation in a transistor utilizing an ultra thin oxygen-diffusion barrier App 20080014730 - Arghavani; Reza ;   et al. | 2008-01-17 |
Low-k spacer integration into CMOS transistors App 20070202640 - Al-Bayati; Amir ;   et al. | 2007-08-30 |
Method for producing gate stack sidewall spacers Grant 7,253,123 - Arghavani , et al. August 7, 2 | 2007-08-07 |
Memory Cell Having Stressed Layers App 20070132054 - Arghavani; Reza ;   et al. | 2007-06-14 |
Oxide Etch With Nh4-nf3 Chemistry App 20070123051 - Arghavani; Reza ;   et al. | 2007-05-31 |
Nitrous Oxide Anneal Of Teos/ozone Cvd For Improved Gapfill App 20070059896 - Yuan; Zheng ;   et al. | 2007-03-15 |
Method for making a semiconductor device having a high-k gate dielectric Grant 7,166,505 - Chau , et al. January 23, 2 | 2007-01-23 |
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill Grant 7,141,483 - Yuan , et al. November 28, 2 | 2006-11-28 |
Low-thermal-budget gapfill process Grant 7,087,497 - Yuan , et al. August 8, 2 | 2006-08-08 |
Mixing energized and non-energized gases for silicon nitride deposition App 20060162661 - Jung; Kee Bum ;   et al. | 2006-07-27 |
Substrate having silicon germanium material and stressed silicon nitride layer App 20060160314 - Arghavani; Reza | 2006-07-20 |
Method for producing gate stack sidewall spacers App 20060154493 - Arghavani; Reza ;   et al. | 2006-07-13 |
Method for forming a low thermal budget spacer Grant 7,049,200 - Arghavani , et al. May 23, 2 | 2006-05-23 |
Pre-etch implantation damage for the removal of thin film layers Grant 7,045,073 - Hareland , et al. May 16, 2 | 2006-05-16 |
Post treatment of low k dielectric films Grant 7,018,941 - Cui , et al. March 28, 2 | 2006-03-28 |
Method For Forming A Low Thermal Budget Spacer App 20050266622 - Arghavani, Reza ;   et al. | 2005-12-01 |
Method of inducing stresses in the channel region of a transistor App 20050255667 - Arghavani, Reza ;   et al. | 2005-11-17 |
Post Treatment Of Low K Dielectric Films App 20050239293 - Cui, Zhenjiang ;   et al. | 2005-10-27 |
Low-thermal-budget gapfill process App 20050196929 - Yuan, Zheng ;   et al. | 2005-09-08 |
Stress-tuned, single-layer silicon nitride film App 20050170104 - Jung, KeeBum ;   et al. | 2005-08-04 |
Non-silicon semiconductor and high-k gate dielectric metal oxide semiconductor field effect transistors App 20050124125 - Jin, Been-Yih ;   et al. | 2005-06-09 |
Non-silicon semiconductor and high-k gate dielectric metal oxide semiconductor field effect transistors Grant 6,900,481 - Jin , et al. May 31, 2 | 2005-05-31 |
Method for making a semiconductor device having a high-k gate dielectric App 20050032318 - Chau, Robert ;   et al. | 2005-02-10 |
Interfacial layer for gate electrode and high-k dielectric layer and methods of fabrication Grant 6,809,017 - Arghavani , et al. October 26, 2 | 2004-10-26 |
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill App 20040161903 - Yuan, Zheng ;   et al. | 2004-08-19 |
Pre-etch implantation damage for the removal of thin film layers App 20040118805 - Hareland, Scott A. ;   et al. | 2004-06-24 |
Method for making a semiconductor device having a high-k gate dielectric App 20040106287 - Chau, Robert ;   et al. | 2004-06-03 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,713,358 - Chau , et al. March 30, 2 | 2004-03-30 |
Field effect transistor Grant 6,707,120 - Aminzadeh , et al. March 16, 2 | 2004-03-16 |
Thin dielectric layers and non-thermal formation thereof App 20040036123 - Keating, Steven J. ;   et al. | 2004-02-26 |
Method and apparatus to prevent lateral oxidation in a transistor utilizing an ultra thin oxygen-diffusion barrier App 20040033678 - Arghavani, Reza ;   et al. | 2004-02-19 |
Method and apparatus to prevent lateral oxidation in a transistor utilizing an ultra thin oxygen-diffusion barrier App 20040033677 - Arghavani, Reza ;   et al. | 2004-02-19 |
Semiconductor on insulator apparatus and method App 20040031990 - Jin, Been-Yih ;   et al. | 2004-02-19 |
Thin dielectric layers and non-thermal formation thereof Grant 6,667,232 - Keating , et al. December 23, 2 | 2003-12-23 |
Plasma nitridation for reduced leakage gate dielectric layers Grant 6,667,251 - McFadden , et al. December 23, 2 | 2003-12-23 |
Plasma Nitridation For Reduced Leakage Gate Dielectric Layers App 20030216059 - McFadden, Robert ;   et al. | 2003-11-20 |
Interfacial layer for gate electrode and high-k dielectric layer and methods of fabrication Grant 6,620,713 - Arghavani , et al. September 16, 2 | 2003-09-16 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,617,209 - Chau , et al. September 9, 2 | 2003-09-09 |
Method for making a semiconductor device having a high-k gate dielectric Grant 6,617,210 - Chau , et al. September 9, 2 | 2003-09-09 |
Method For Making A Semiconductor Device Having A High-k Gate Dielectric App 20030162377 - Chau, Robert ;   et al. | 2003-08-28 |
Plasma nitridation for reduced leakage gate dielectric layers Grant 6,610,615 - McFadden , et al. August 26, 2 | 2003-08-26 |
Integrated circuit with multiple gate dielectric structures Grant 6,597,046 - Chau , et al. July 22, 2 | 2003-07-22 |
Interfacial layer for gate electrode and high-k dielectric layer and methods of fabrication App 20030124871 - Arghavani, Reza ;   et al. | 2003-07-03 |
Method and apparatus for dry/catalytic-wet steam oxidation of silicon App 20030075108 - Arghavani, Reza ;   et al. | 2003-04-24 |
Method and apparatus for dry/catalytic-wet steam oxidation of silicon Grant 6,514,879 - Arghavani , et al. February 4, 2 | 2003-02-04 |
Non-silicon semiconductor and high-k gate dielectric metal oxide semiconductor field effect transistors App 20020168826 - Jin, Been-Yih ;   et al. | 2002-11-14 |
Method And Apparatus For Dry/catalytic-wet Steam Oxidation Of Silicon App 20020052123 - ARGHAVANI, REZA ;   et al. | 2002-05-02 |
Method Of Forming A Thin Gate Dielectric Layers App 20020003258 - KEATING, STEVEN J. ;   et al. | 2002-01-10 |
N2O Nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress Grant 6,261,925 - Arghavani , et al. July 17, 2 | 2001-07-17 |
Advanced trench sidewall oxide for shallow trench technology Grant 6,153,480 - Arghavani , et al. November 28, 2 | 2000-11-28 |
Method of forming gate oxide having dual thickness by oxidation process Grant 6,124,171 - Arghavani , et al. September 26, 2 | 2000-09-26 |
Integrated circuit with multiple gate dielectric structures Grant 6,087,236 - Chau , et al. July 11, 2 | 2000-07-11 |
Method for fabricating a transistor with increased hot carrier resistance by nitridizing and annealing the sidewall oxide of the gate electrode Grant 5,827,769 - Aminzadeh , et al. October 27, 1 | 1998-10-27 |
N.sub.2 O nitrided-oxide trench sidewalls and method of making isolation structure Grant 5,780,346 - Arghavani , et al. July 14, 1 | 1998-07-14 |