U.S. patent number RE33,992 [Application Number 07/520,946] was granted by the patent office on 1992-07-14 for pulsed x-ray lithography.
This patent grant is currently assigned to The United States of America as represented by the Secretary of the Navy. Invention is credited to David J. Nagel, Martin C. Peckerar.
United States Patent |
RE33,992 |
Nagel , et al. |
July 14, 1992 |
Pulsed X-ray lithography
Abstract
A method and means for x-ray lithography which utilizes means
for producing in a vacuum system a high-temperature plasma from
which soft x-rays are emitted. The x-rays pass through a mask
exposing an x-ray resist on a substrate to produce the desired
pattern on the substrate. The x-ray spectrum has a significant
energy in the 1-5 keV range. These x-rays pass through the support
layer of the mask, stop in the pattern material (gold) of the mask
or, where the pattern material is lacking, are absorbed adequately
by the x-ray resist. Since there is very little energy above 5 keV,
there is little if any substrate damage due to the x-rays.
Inventors: |
Nagel; David J. (Falls Church,
VA), Peckerar; Martin C. (Silver Spring, MD) |
Assignee: |
The United States of America as
represented by the Secretary of the Navy (Washington,
DC)
|
Family
ID: |
27060320 |
Appl.
No.: |
07/520,946 |
Filed: |
May 9, 1990 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
Reissue of: |
933928 |
Aug 15, 1978 |
04184078 |
Jan 15, 1980 |
|
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Current U.S.
Class: |
378/34;
250/492.1; 378/119 |
Current CPC
Class: |
B82Y
10/00 (20130101); G03F 7/70033 (20130101); H05G
2/001 (20130101) |
Current International
Class: |
G03F
7/20 (20060101); H05G 2/00 (20060101); G21K
005/04 () |
Field of
Search: |
;378/34,35
;250/492.2,492.1 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Spiller et al., "Application of Synchrotron Radiation to x-ray
Lithograph Journal of Applied Physics, vol. 47, No. 12, Dec. 1976.
.
X-Ray Laser Applications Study, Semiannual Technical Report, dated
Nov., 1976 (S. Jorna ed.). .
X-Ray Applications Study, Final Report, dated Jul., 1977 (S. Jorna
ed.). .
J. H. McCoy-et al, Progress In X-Ray Lithography pp. 3 to 22
Presented at the: Electron and Ion Beam Science and Technology,
Sixth Internation Conference. .
Henry I. Smith, Fabrication Techniques for Surface-Acoustic-Wave
and Thin-Film Optical Devices; Proceedings of the IEE vol. 62, No.
10, Oct. 1974, pp. 1361 to 1387..
|
Primary Examiner: Westin; Edward P.
Assistant Examiner: Porta; David P.
Attorney, Agent or Firm: McDonnell; Thomas E. Miles; Edward
F.
Claims
What is claimed and desired to be secured by letters patent of the
United States is: .[.
1. A soft x-ray lithographic system which comprises:
a housing;
means for evacuating said housing;
means for producing an x-ray-emitting plasma; and
a mask x-ray-resist substrate combination for replicating a desired
pattern on said substrate..].
2. A soft x-ray lithographic system .[.as claimed in claim 1 in.].
which .Iadd.comprises.Iaddend.:
.Iadd.a housing;
means for evacuating said housing;
means for producing an x-ray emitting plasma that emits x-rays
having an energy from 1-5 keV; and
a mask x-ray resist substrate combination for replicating a desired
pattern on said substrate, and
wherein .Iaddend.said x-rays have an .[.energy of from 1 to 5 keV,
an.]. emission time of less than 1 microsecond, and a source size
of about 1 mm.sup.3. .[.3. A lithographic system as claimed in
claim 1 in which:
said means for producing an x-ray-emitting plasma is a solid metal
target upon which a pulsed laser beam is incident..]. .[.4. A
lithographic system as claimed in claim 1 in which:
said means for producing an x-ray-emitting plasma is a high
electrical energy storage means in combination with a diode within
said housing..]. .[.5. A lithographic system as claimed in claim 1
in which
said means for producing an x-ray-emitting plasma is a laser beam
focused onto a metal target within said housing..]. .[.6. A method
of replicating a pattern on a material which comprises:
placing a mask x-ray absorption pattern relative to an x-ray-resist
substrate combination, placing said substrate combination into a
housing;
evacuating said housing;
producing an x-ray-emitting plasma within said evacuated housing;
and
directing said x-rays onto said substrate combination..]. .[.7. A
method as claimed in claim 6 wherein:
said x-ray-emitting plasma is produced by focusing a pulsed laser
output onto a metal target within said evacuated housing..]. .[.8.
A method as claimed in claim 6 wherein:
said x-ray-emitting plasma is produced by discharging a high
electrical storage means through a diode within said housing..].
.[.9. A soft x-ray lithographic system comprising:
means for producing a hot plasma at a temperature above 1 million
degrees Celsius, the plasma being composed of matter which emits
x-rays at such temperatures; and
means for replicating an image comprising a substrate, a layer of
x-ray sensitive material on said substrate, and masking means
between said sensitive layer and said plasma-producing means, said
masking means containing a representation of the image to be
replicated, said representation of the image being formed by the
proper combination of areas that are opaque and areas that are
transparent to the soft x-rays,
said image being formed on the x-ray-resist by irradiation of the
replicating means by the x-rays from the plasma-producing means..].
.[.10. A system as in claim 9, wherein said plasma-producing source
comprises a laser and a target spaced therefrom, said target being
made from a material which produces a plasma when struck by a laser
beam..]. .Iadd.11. A soft x-ray lithographic system which
comprises:
a housing;
means for evacuating said housing;
means for producing an x-ray emitting plasma; wherein said means
for producing comprises:
a target in said housing;
means for generating a laser beam;
means for focusing said laser beam on said target;
shield means, disposed between said means for focusing and said
target, for protecting said means for focusing from material
evaporated from said target; and
a mask x-ray resist substrate combination for replicating a desired
pattern on said substrate. .Iaddend. .Iadd.12. The system of claim
11, wherein said shield means is a length of rollable material.
.Iaddend. .Iadd.13. A soft x-ray lithographic system which
comprises:
a housing;
means for evacuating said housing;
a mask x-ray resist substrate combination for replicating a desired
pattern on said substrate;
means for producing an x-ray emitting plasma;
wherein said system further comprises a shield means for protecting
said substrate combination from material evaporated by said means
for producing said x-ray emitting plasma. .Iaddend. .Iadd.14. The
system of claim 13, wherein said shield means is a length of
rollable material. .Iaddend. .Iadd.15. A soft x-ray lithographic
system which comprises:
housing;
means for evacuating said housing;
means including a target upon which a laser beam is incident for
producing an x-ray emitting plasma and evaporated target material,
said means for producing including means to inhibit said evaporated
target material from interfering with the focusing of said laser;
and
a mask x-ray resist substrate combination for replicating a desired
pattern
on said substrate. .Iaddend. .Iadd.16. A soft x-ray lithographic
system which comprises:
a housing;
means for evacuating said housing;
means including a target upon which a laser beam is incident for
producing x-rays from an x-ray emitting plasma and evaporated
target material; and
a mask x-ray resist substrate combination for replicating a desired
pattern on said substrate, said system including means to inhibit
said material from interfering with said replicating. .Iaddend.
.Iadd.17. A soft x-ray lithographic system as claimed in claim 16
in which:
said x-rays have an energy of from 1 to 5 keV, an emission time of
less than 1 microsecond and a source size of about 1
mm.sup.3..Iaddend. .Iadd.18. A lithographic system as claimed in
claim 16 in which: .Iadd.said means for producing an x-ray emitting
plasma is a solid metal target upon which a pulsed laser beam is
incident. .Iaddend. .Iadd.19. A lithographic system as claimed in
claim 16 in which:
said means for producing an x-ray emitting plasma is a high
electrical energy storage means in combination with a diode within
said housing. .Iaddend. .Iadd.20. A lithographic system as claimed
in claim 16 in which:
said means for producing an x-ray emitting plasma is a laser beam
focused
on a metal target within said housing. .Iaddend. .Iadd.21. A method
of replicating a pattern on a material which comprises:
placing a mask x-ray absorption pattern relative to an x-ray resist
substrate combination;
placing said substrate combination into a housing;
evacuating said housing;
producing an x-ray emitting plasma and evaporated metal within said
evacuated housing;
directing said x-rays onto said substrate combination; and
inhibiting said evaporated metal from interfering with said mask.
.Iaddend. .Iadd.22. A method as claimed in claim 21 wherein:
said x-ray emitting plasma is produced by focusing a pulsed laser
output onto a target within said evacuated housing. .Iaddend.
.Iadd.23. A method as claimed in claim 21 wherein:
said x-ray emitting plasma is produced by discharging a high
electrical storage means through a diode within said housing.
.Iaddend. .Iadd.24. A soft x-ray lithographic system which
comprises:
a housing;
means for evacuating said housing;
means, including a target upon which a pulsed laser beam is
incident, for producing an x-ray emitting plasma, said target being
renewable by translation; and
a mask x-ray resist substrate combination for replicating a desired
pattern on said substrate. .Iaddend. .Iadd.25. A method of
replicating a pattern on a material which comprises:
placing a mask x-ray absorption pattern relative to an x-ray resist
substrate combination;
placing said substrate combination into a housing;
evacuating said housing;
producing an x-ray emitting plasma within said evacuated housing by
focusing a pulsed laser output onto a target within said evacuated
housing;
directing said x-rays onto said substrate combination; and
renewing said target by translation. .Iaddend. .Iadd.26. A soft
x-ray lithographic system comprising:
means for producing a hot plasma at a temperature above 1 million
degrees Celsius, the plasma being composed of matter which emits
x-rays at such temperature, said plasma-producing source comprises
a laser and a target spaced therefrom, said target being made from
a material which produces a plasma when struck by a laser beam,
said target being renewable by translation; and
means for replicating an image comprising a substrate, a layer of
x-ray sensitive material on said substrate, and masking means
between said sensitive layer and said plasma-producing means, said
masking means containing a representation of the image to be
replicated, said representation of the image being formed by the
proper combination of areas that are opaque and areas that are
transparent to the soft x-rays,
said image being formed on the x-ray resist by irradiation of the
replicating means by the x-rays from the plasma-producing means.
.Iaddend.
.Iadd.27. A soft x-ray lithographic system which comprises:
a housing;
means for evacuating said housing;
means for producing an x-ray emitting plasma; and
a plurality of mask x-ray resist substrate combination for
replicating a desired pattern on said substrate, each positioned in
the path of said emitted x-rays;
wherein said x-rays have an energy of from 1 to 5 kev, an emission
time of less than 1 microsecond and a source size of about 1
mm.sup.3. .Iaddend.
Description
BACKGROUND OF THE INVENTION
This invention relates to lithography and more particularly to soft
x-ray lithography.
Lithography is a process of replicating a pattern on a material.
Heretofore lithograhy has been carried out by the use of electrons,
light, ultraviolet radiation and x-ray radiation from electron
impact and synchrotron sources. In photolithography, light is
passed through a mask containing the pattern of interest to a
substrate sensitive to light. Light suffers diffraction effects
which degrade the replication when fine-scale (about 1 .mu.m)
features are present in the mask. X-rays have wavelengths
sufficiently small that diffraction effects are negligible. In
x-ray lighography, the mask consists of a thin sheet of
x-ray-transparent material such as beryllium, silicon or a
plastic-like substance supporting a pattern of x-ray absorbing
material, usually gold. The substrate is coated with an x-ray
sensitive material called x-ray resist. Electron-impact x-ray
sources used in the prior art generally produce high-energy x-rays
above 5 keV which are not stopped in the thin x-ray resist.
Therefore the substrate is damaged. Synchrotron sources emit softer
x-rays. However, these x-ray devices are expensive and usually very
large and bulky so these are not suitable for routine production of
x-ray lithographic replicas.
SUMMARY OF THE INVENTION
An x-ray lighography process which involves high-temperature
plasma-generated x-rays, and a mask x-ray-resist substrate
combination. The plasma is produced in a vacuum system. Laser or
electrical energy is transmitted directly to a plasma-producing
device and the plasma produced emits intense soft x-rays. The soft
x-rays pass through the mask, exposing the x-ray resist on the
substrate.
Advantages of the present system are: 1. The x-rays are in the 1-5
keV range and thus do not damage the substrate. 2. Plasmas emit
intense short pulses of x-rays. Therefore exposure times are
shorter. 3. The size of the plasma source is relatively small. 4.
The x-ray emission covers a large solid angle. Hence, several mask
resist substrate combinations may be exposed simultaneously. 5. The
system costs less than others not in use for fine-line
lithography.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 illustrates a pulsed high-temperature plasma as an x-ray
source for resist exposure.
FIG. 2 illustrates a laser plasma x-ray source for simultaneous
production of several replicas by x-ray lighography.
DETAILED DESCRIPTION
FIG. 1 illustrates the components of one embodiment involved in
pulsed x-ray lithograpy which uses a high-temperature plasma as a
x-ray source. As shown, the energy from an energy storage device 10
such as a large capacitor bank is transmitted directly to a
plasma-producing device 12 such as an exploded wire diode or a gas
injection diode which produces a plasma 15 with a vacuum system 14.
The temperature of the plasma 15 exceeds one million degrees and
the plasma emits intense soft x-rays 16. The intense soft x-rays
are incident on the image-replicating structure 18. The
image-replicating structure includes a substrate 20 such as
silicon, a layer of x-ray sensitive material called x-ray resist 22
on the substrate and a mask over the x-ray resist. The mask
includes a supporting layer 24, such as beryllium which supports
the pattern 26 which may be formed from a material such as gold.
The soft x-rays incident on the support layer of the mask are
stopped by the pattern material and pass through those areas
lacking the pattern material. The x-rays that pass through are
incident on and absorbed by the x-ray resist, thereby exposing the
x-ray resist areas on the substrate. The mask is removed leaving
the x-ray-exposed resist. The resist is chemically washed to remove
the x-ray-exposed areas of the substrate resist (for positive
resists) leaving the unexposed areas of the substrate protruding
from the substrate, or the unexposed areas (for negative resists)
leaving the exposed areas in place.
FIG. 2 illustrates a laser-plasma x-ray source for simultaneous
production of several replicas by soft x-ray lithography. A laser
30, such as a pulsed neodymium (Nd) laser, directs its output beam
onto a 45-degree, fully reflective mirror 32 which reflects the
laser beam through a focusing lens 34 onto a target 36 at or near
normal incidence. The target is of a suitable material such as
copper which produces a plasma 38 due to the intense heat of the
laser beam. The plasma emits soft x-rays 39 which are directed on
to a plurality of mask x-ray resist substrate combinations 40 such
as set forth above. The pattern is formed on the substrate as
described above for the system shown in FIG. 1. The elements set
forth in FIG. 2 are housed within a vacuum chamber 42 which is
evacuated to a pressure of less than 100 microns prior to operation
thereof.
The target may be a flat piece of material renewed by replacement
or translation, or a wire, or rod, fed into place prior to each
operation for forming patterns on the substrates. The focusing lens
may be protected from the evaporated target material by use of a
rolled piece of Mylar 44 or similar material which is between the
lens and the target. Also the masks can be similarly protected as
shown at 46.
The system set forth and shown above in FIGS. 1 and 2 illustrate
the use of plasma-generated x-rays for lithographic forming
patterns on a substrate. The use of x-rays permit one to form
small-scale patterns useful for microelectronics, bubble computer
memory and optoelectronics applications. Plasma sources as set
forth above have x-ray-spectra energy from 1-5 keV with emission
times less than one microsecond, and a source size less than 1
mm.sup.3. Since the x-ray energy is from 1-5 keV range, the
radiation incident on the gold pattern is stopped by the gold layer
with the rest of the x-ray beam passing through the mask to the
x-ray resist. The x-rays incident on the x-ray resist are absorbed
by the x-ray resist without any damage to the underlying
substrate.
It has been determined that plasma emits intense, short pulses of
x-rays. Therefore, exposure times shorter than one microsecond are
possible with presently known x-ray-resist materials.
Other means for producing plasmas useful in the present invention
are high-temperature electrical sources, vacuum spark devices,
electron-beam generators, as well as other types of plasma focus
and implosive devices.
Obviously many modifications and variations of the present
invention are possible in light of the above teachings. It is
therefore to be understood that within the scope of the appended
claims the invention may be practiced otherwise than as
specifically described.
* * * * *