U.S. patent number RE32,931 [Application Number 07/148,168] was granted by the patent office on 1989-05-30 for vibratory angular rate sensor system.
This patent grant is currently assigned to Piezoelectric Technology Investors, Inc.. Invention is credited to Juergen H. Staudte.
United States Patent |
RE32,931 |
Staudte |
May 30, 1989 |
Vibratory angular rate sensor system
Abstract
.[.A vibratory angular rate sensor system preferably consists of
a Z-cut quartz plate forming a mounting frame with a rectangular
opening. Within the opening are mounted two pairs of tines. Each
pair of tines is parallel to each other, one pair forming the drive
tines and the other pair the output tines. Each corresponding set
of two tines is disposed along the same axis having a common stem
or base. The tines are secured by four bridges integral with the
frame and connected to the stem. The arrangement is such that the
pair of input tines vibrates in opposition to each other, while the
pair of output tines vibrates with one tine going up while the
other moves downwardly. As a result, the angular rate sensors drive
frequency and the structural torque frequency are unequal.
Therefore large displacements of the stem are unnecessary..].
.Iadd.An angular rate sensor having a support structure and first
and second forks each lying in a plane each having an axis of
symmetry with each fork having first and second spaced apart tines.
The first and second forks are mechanically coupled to each other
to provide a dual fork structure. A mount is provided for mounting
the dual fork structure on the support structure. Energy is coupled
into the first fork of the dual fork structure to cause vibratory
motion of the tines of that fork in the plane of the fork.
Vibratory motion of the tines of the other fork in a direction
normal to the plane of the other fork is sensed to provide a
angular rate about the measure axis of symmetry of the first fork.
The mounting serves to isolate the dual fork structure from the
support structure..Iaddend.
Inventors: |
Staudte; Juergen H. (Anaheim,
CA) |
Assignee: |
Piezoelectric Technology Investors,
Inc. (Laguna Hills, CA)
|
Family
ID: |
27386648 |
Appl.
No.: |
07/148,168 |
Filed: |
January 22, 1988 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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859476 |
May 2, 1986 |
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Reissue of: |
572783 |
Jan 23, 1984 |
04524619 |
Jun 25, 1985 |
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Current U.S.
Class: |
73/504.16;
310/329; 310/370 |
Current CPC
Class: |
G01C
19/5607 (20130101) |
Current International
Class: |
G01C
19/56 (20060101); G01P 009/04 () |
Field of
Search: |
;73/505
;310/323,329,331,367,370 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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21679 |
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Feb 1980 |
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JP |
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611011 |
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Oct 1948 |
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GB |
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861436 |
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Feb 1961 |
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GB |
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Primary Examiner: Chapman; John
Attorney, Agent or Firm: Flehr, Hohbach, Test, Albritton
& Herbert
Parent Case Text
CROSS-REFERENCE TO RELATED APPLICATIONS
.Iadd.This is a continuation of application Ser. No. 859,476, filed
May 2, 1986, abandoned. .Iaddend.
Claims
What is claimed is:
1. A vibratory angular rate sensor system comprising:
(a) a mounting, .[.frame of substantially rectangular configuration
having a substantially rectangular opening.]. said .[.frame.].
.Iadd.mounting .Iaddend.consisting of a piezoelectric material
.[.of Z-cut crystalline quartz.].;
(b) a first pair and a second pair of tines .Iadd.forming a tine
structure.Iaddend., .[.disposed in said opening.]. said first pair
forming vibrating drive tines.[.,.]. vibrating toward and away from
each other .Iadd.in a plane of motion .Iaddend.and said second pair
of tines forming vibrating output tines.[.,.]. vibrating in
.Iadd.directions perpendicular to said plane of motion .[.opposite
directions up and down.].;
(c) .[.a stem.]. .Iadd.interconnecting means
.Iaddend.interconnecting said first and second .[.pair.].
.Iadd.pairs .Iaddend.of tines .Iadd.to effect an interdependency
between the first and second pairs of tines whereby motion in one
pair of tines is transferred to the other pair of tines.Iaddend.,
the tines of each pair being disposed parallel to each other and
corresponding tines of .[.both pairs.]. .Iadd.each pair
.Iaddend.being disposed along a common axis;
(d) means including .[.two pairs of.]. input electrodes in contact
with the first pair of tines for exciting said tines substantially
at the resonant frequency thereof, .[.said input electrodes being
in the X-Y and Y-Z planes of said wafer.].;
(e) means including .[.two pairs of.]. output electrodes
.[.disposed.]. in contact with the second pair of tines .[.in the
Y-Z plane.]. for deriving an output signal representative of the
angular rate experienced by said system, the flexural
.Iadd.resonant .Iaddend.frequency of said first pair of tines being
.[.lower than.]. .Iadd.different from .Iaddend.that of said second
pair of tines and
(f) .[.a plurality of bridges,.]. .Iadd.bridge means
.Iaddend.integral with said .[.frame.]. .Iadd.mounting .Iaddend.and
connected to said .[.stem.]. .Iadd.means interconnecting said first
and second pairs of tines for supporting said first and second
pairs of tines on said mounting.Iaddend..
2. A system as defined in claim 1 wherein the flexural
.[.frequency.]. stiffness of said .].bridges is substantially equal
to the flexual frequency of said tines.]. .Iadd.bridge means
isolates vibration of the tine structure from the
mounting.Iaddend.. .Iadd.
3. A system as defined in claim 2 wherein the bridge means in
combination with the tine structure has a resonant frequency which
is substantially equal to the resonant frequency of the first pair
of tines. .Iaddend. .Iadd.4. A system as defined in claim 1 wherein
the interconnecting means is positioned relative to the first and
second pairs of tines so that the interconnecting means has an
extremely small displacement relative to the
first and second tines. .Iaddend. .Iadd.5. A system as defined in
claim 4 wherein said bridge means is disposed intermediate the
first and second pairs of tines. .Iaddend. .Iadd.6. A system as
defined in claim 1 wherein the resonant frequency of said first
pair of tines is lower than that of
the second pair of tines. .Iaddend. .Iadd.7. An angular rate sensor
comprising a support structure, first and second forks each lying
in a plane and each having an axis of symmetry, each fork having
first and second spaced apart tines, means mechanically coupling
the first and second forks to each other to provide a dual fork
structure to effect an interdependency between the first and second
forks whereby motion in one fork is transferred to the other fork,
mounting means including isolation means for mounting the dual fork
structure on the support structure, means for coupling energy into
said first fork of the dual fork structure to cause vibratory
motion of the tines of said first fork in the plane of said first
fork to provide a drive fork, said isolation means serving to
isolate said vibratory motion of the dual fork structure from
vibratory motion of the support structure, and means for sensing
vibratory motion of the tines of said second fork independent of
relative motion between the support structure and the dual fork
structure in a direction normal to the plane of said second fork to
provide a sense fork separate from the drive fork to give a measure
of the input angular rate applied to the dual fork structure about
the major axis of symmetry of said first fork. .Iaddend. .Iadd.8. A
rate sensor as in claim 7 wherein the resonant frequency of said
vibratory motion of the tines of said drive fork is different from
the resonant frequency of said vibratory motion of the tines of
said sense
fork. .Iaddend. .Iadd.9. A rate sensor as in claim 7 wherein said
dual
fork structure is formed of a piezoelectric material. .Iaddend.
.Iadd.10. A rate sensor as in claim 9 wherein said mounting means
is formed of a piezoelectric material. .Iaddend. .Iadd.11. A rate
sensor as in claim 7 wherein said dual fork structure and said
mounting means are formed of a single sheet of single crystal
piezoelectric material. .Iaddend. .Iadd.12. A rate sensor as in
claim 7 wherein said mounting means supports the dual fork
structure in a region intermediate the first and second forks.
.Iaddend. .Iadd.13. A rate sensor as in claim 12 wherein said
mounting means in combination with the dual fork structure has a
resonant frequency which is substantially the same frequency as
said vibratory motion of the
tines of the first fork. .Iaddend. .Iadd.14. A rate sensor as in
claim 7 wherein the first and second forks have a common axis of
symmetry. .Iaddend. .Iadd.15. A rate sensor as in claim 14 wherein
the first and second forks lie in a common plane. .Iaddend.
.Iadd.16. A rate sensor as in claim 7 wherein at least a portion of
the mounting means is constructed so that it has an extremely small
displacement relative to the displacement of the first and second
forks. .Iaddend.
Description
The present application may be considered to be an improvement and
an extension of the principles of a prior application entitled,
"Angular Rate Sensor System," to Alsenz, et al., Ser. No.
06/321,964, filed on Nov. 16, 1981. The present application is
assigned to the same assignee as is the prior copending
application.
The present invention is also related to a copending application to
Juptner, et al., entitled, "A Vibratory Angular Rate Sensing
System," filed concurrently with the present application. The
present application discloses a different configuration which
substantially cancels all undesirable first and second harmonics of
the output frequencies which represent noise.
BACKGROUND OF THE INVENTION
The angular rate of motion of a craft is an essential input for all
navigational and inertial guidance systems. Such systems are used
conventionally for aircraft, spacecraft, ships, or missiles. The
sensing of the angular rate of motion is presently accomplished by
means of a gyroscope.
Gyroscopes, however, have various disadvantages. They must be built
to extremely high accuracies and may have drift rates of fractions
of a degree per hour. Due to the expense of building them, they are
very costly; they are physically large and heavy. They must be
frequently and precisely maintained, for the reason that critical
movable elements, such as bearings, may change with time. They may
also be damaged by even low levels of shock and vibration. This, in
turn, may cause an increase of unknown size in the drift rate,
occurring at unknown times.
Because gyroscopes are sensitive to the effects of shock and
vibration, they frequently have heavy mounting configurations to
protect them, which also are expensive.
SUMMARY OF THE INVENTION
It will accordingly be obvious that it is desirable to replace a
gyroscope by some other device which is less expensive and which is
capable of measuring angular rates, thereby measuring the attitude
of a vehicle or craft. In accordance with the present invention,
this is accomplished by a balanced resonant sensor. Such a sensor
is represented, in accordance with the present invention, by a
tuning fork. The tuning fork should be substantially mechanically
temperaturestable, having low internal friction and following
Hook's Law. According to Hook's Law, the strain set up with an
elastic body is proportional to the stress to which the body is
subjected by the applied load (the strain, however, must be within
the elastic limit of the body), and the body will return to its
original shape when the stress is removed.
Preferably, but not necessarily, the tuning fork consists of
quartz. However, other piezoelectric materials may be used, such as
synthetic crystals, for example, ethylene diamine tartrate (EDT),
dipotassium tartrate (DKT) or ammonium dihydrogen phosphate (ADP).
Non-piezoelectric materials may by used with an electromagnetic
drive.
In accordance with the present invention there is provided a wafer
of piezoelectric materials, preferably of Z-cut quartz. The wafer
is cut to provide a frame having an opening within which are
provided two pairs of tines. The two tines in each pair are
parallel with each other and are interconnected by a stem. This
vibratory structure is secured to the frame by a pair of suspension
bridges disposed close to each other, integral with the frame and
extending to the stem.
The first pair of tines is excited by a drive oscillator in such a
manner that the two tines will move toward each other and, after an
instant, away from each other. The other pair of tines represent
the output tines, and they will vibrate due to an applied external
force in such a manner that while one tine moves up, the other
moves down, and vice versa.
The novel features that are considered characteristic of this
invention are set forth with particularity in the appended claims.
The invention itself, however, both as to its organization and
method of operation, as well as additional objects and advantages
thereof, will best be understood from the following description
when read in connection with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a top plan view of a vibratory angular rate sensor system
embodying the present invention;
FIG. 2 illustrates the trigonal crystalline orientation of a Z-cut
quartz wafer;
FIG. 3 is a cross-sectional view taken along lines 3--3 of one of
the first pair of tines and showing the drive electrodes as well as
the drive oscillator;
FIG. 4 is a schematic view of the pair of electrodes of FIG. 3 and
a drive oscillator;
FIG. 5 is a similar cross-sectional view to that of FIG. 3 but
taken along lines 5--5 through one of the tines of the second pair
of tines and showing two pairs of output electrodes; and
FIG. 6 is a schematic view of the pair of electrodes of FIG. 5 and
an output circuit.
DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring now to the drawing and particularly to FIG. 1, there is
illustrated a vibratory angular rate sensor embodying the present
invention. The sensor system includes a wafer 10 forming a mounting
frame which preferably is a piece of Z-cut quartz. The crystalline
orientation of the quartz is shown in FIG. 2. The mounting frame 10
is of rectangular configuration and has a rectangular central
opening 11. The orientation of the wafer is shown adjacent to FIG.
1, illustrating the X, Y, and Z axes. Disposed within the opening
11 is a first pair of tines 12 and 13, arranged substantially
parallel to each other. These tines 12, 13 represent the input or
drive tines. A second pair of tines 14 and 15 are the output tines
and are also disposed parallel to each other and have common axes
with the respective tines 12, 13. The two pairs of tines 12, 13 and
14, 15 are interconnected by a stem or base 16.
The resonant system of the two pairs of tines 12, 13 and 14, 15
(the former being the input tines and the latter pair forming the
output tines) is secured to the frame by four suspension bridges
17,18. The suspension bridges 17, 18 are integral with the frame 10
and are secured to the stem of base 16.
By way of example, the side of the frame 10 may have a length of
0.400 inch (in the X direction), the long side may have a length of
1.050 inch (in the Y direction) and the thickness (in the Z
direction) may amount to 0.020 inch. However, it will be understood
that other dimensions may be used for different materials or other
purposes.
The tines 12, 13 may be energized by a pair of electrodes
illustrated in FIG. 3. Thus, there are two pairs of electrodes 20,
21 and 22, 23. Each pair 20, 21 and 22, 23 is connected together
and across a drive oscillator 25. (See FIG. 4). The electrodes 20,
21 extend in the Y direction, while the electrodes 22, 23 extend in
the Z direction.
As illustrated in FIGS. 5 and 6, the output signal is derived at
both the output tines 14, 15 by means of a first pair of output
electrodes 26, 27 and a second pair of electrodes 28, 30. The
output signals from both output tines 14 and 15 are connected in
parellel. For convenience, only the output electrodes and output
leads of one of the output tines have been illustrated. All of the
output electrodes extend in the Y-Z direction. The output
electrodes 26 and 30 are connected together, while the other
electrodes 27 and 28 are also connected together and across an
output circuit 32. This may be any conventional output circuit as
well known in the art.
The structure of FIG. 1 may be chemically etched by means of
photolithography from a suitable quartz wafer, or else it may be
machined by a laser beam, ultrasonic machining, or other methods
well known in the semiconductor art. The electrodes 20 to 23 and 26
to 30 may be obtained by gold-plating the respective tines and by
removing unnecessary portions of the gold film, for example by a
laser beam or by chemical etching.
The tines 12 and 13 resonate in the fundamental flexural mode in
the X-Y plane. This is shown by arrows 35 in FIG. 1. The frequency
in the X-Y plane is substantially lower than that in the Y-Z plane;
that is, the plane in which the tines 14 and 15 vibrate. Hence the
tines 14, 15 vibrate in opposite directions, up and down.
When the entire structure rotates about the Y axis and in the X-Y
plane, the X-Y flexure plane vibration is conserved and therefore a
flexure in the Y-Z plane is initiated. This motion is represented
by the arrows .[.35.]. .Iadd.36 .Iaddend.in FIG. 1. The rotation in
the X-Y plane may be caused by the angular motion of the vehicle
carrying the system. As a result, the stem 16 is twisted due to the
Coriolis force which acts normal to the plane of vibration of tines
12 and 13. This, in turn, causes an up-and-down motion of the
output thines 14, 15 in opposition directions.
It should be noted that the Y-Z flexural frequency is higher than
the X-Y flexural frequency. Stated another way, a torque is felt by
the stem 16. This, in turn, initiates or drives an Y-Z flexure in
output tines 14, 15. This is so because the frequency is
substantially similar to that of the tuning fork consisting of
tines 12, 13. The X-Y flexure in tines 12 and 13 is
piezoelectrically driven by the input electrodes 20 to 23 of FIG.
3. On the other hand, the Y-Z flexure caused by a rotation about
the axis Y in tines 14, 15 is picked up piezoelectrically by the
output electrodes 26 to 30 of FIG. 5.
The bridges 17, 18 have an X-Z flexural frequency which is
substantially that of the flexural frequency of the tines 12,
13.
The electrodes and shielding connections for the input and output
circuits are preferably made from the bridges 17, 18. It should be
noted that the frequency and balance of the two pairs of tines 12,
13 and 14, 15 are adjusted by adding or removing material, such as
a gold film, at the free ends of the tines on the appropriate
sides. This may be effected by chemical etching or by a laser
beam.
The rate sensors of the prior art depend on the flexural frequency
of the drive tines being substantially the same as the torsional
frequency of the entire system. According to the present invention,
the drive frequency of the angular rate sensor and the structural
torisonal frequency are not the same. Therefore, large
displacements of the stem 16 are not necessary. The displacement of
the stem 16 is extremely small relative to that of the pickup or
output tines 14, 15. This is due to the Q multiplication of the
displacement of the tines with respect to the entire structure. It
will now be understood that the vibration of the angular rate
sensor is easily isolated from the mounting frame 10 and hence from
the environment.
* * * * *