U.S. patent number RE40,531 [Application Number 10/890,437] was granted by the patent office on 2008-10-07 for ultrabarrier substrates. This patent grant is currently assigned to Battelle Memorial Institute. Invention is credited to Gordon Lee Graff, Mark Edward Gross, Michael Gene Hall, Peter Maclyn Martin, Eric Sidney Mast, Ming Kun Shi.
United States Patent | RE40,531 |
Graff , et al. | October 7, 2008 |
A barrier assembly. The barrier assembly includes at least one barrier stack having at least one barrier layer and at least one polymer layer. The barrier stack has an oxygen transmission rate of less than 0.005 cc/m.sup.2/day at 23.degree. C. and 0% relative humidity, and an oxygen transmission rate of less than 0.005 cc/m.sup.2/day at 38.degree. C. and 90% relative humidity. The barrier stack also has a water vapor transmission rate of less than 0.005 g/m.sup.2/day at 38.degree. C. and 100% relative humidity. A method for making a barrier assembly is also disclosed.
Inventors: | Graff; Gordon Lee (West Richland, WA), Gross; Mark Edward (Pasco, WA), Shi; Ming Kun (Pleasanton, CA), Hall; Michael Gene (West Richland, WA), Martin; Peter Maclyn (Kennewick, WA), Mast; Eric Sidney (Richland, WA) |
---|---|
Assignee: | Battelle Memorial Institute
(Columbus, OH) |
Family ID: | 24208461 |
Appl. No.: | 10/890,437 |
Filed: | July 12, 2004 |
Application Number | Filing Date | Patent Number | Issue Date | ||
---|---|---|---|---|---|
09427138 | Feb 18, 2003 | 6522067 | |||
Reissue of: | 09553188 | Apr 20, 2000 | 06413645 | Jul 2, 2002 | |
Current U.S. Class: | 428/446; 426/126; 428/411.1; 428/457; 428/469; 428/500; 428/688; 428/690 |
Current CPC Class: | B32B 27/00 (20130101); C23C 14/08 (20130101); H01L 51/5256 (20130101); G02F 2201/50 (20130101); Y10T 428/31504 (20150401); Y10T 428/31678 (20150401); Y10T 428/31855 (20150401) |
Current International Class: | B32B 15/04 (20060101) |
Field of Search: | ;428/446,457,469,688,500,690,411.1 ;426/126 |
2382432 | August 1945 | McManus et al. |
2384500 | September 1945 | Stoll |
3475307 | October 1969 | Teumer et al. |
3607365 | September 1971 | Lindlof |
3941630 | March 1976 | Larrabee |
4061835 | December 1977 | Poppe et al. |
4098965 | July 1978 | Kinsman |
4266223 | May 1981 | Frame |
4283482 | August 1981 | Hattori et al. |
4313254 | February 1982 | Feldman et al. |
4426275 | January 1984 | Meckel et al. |
4521458 | June 1985 | Nelson |
4537814 | August 1985 | Itoh et al. |
4555274 | November 1985 | Kitajima et al. |
4557978 | December 1985 | Mason |
4572842 | February 1986 | Dietrich et al. |
4581337 | April 1986 | Frey et al. |
4624867 | November 1986 | Iijima et al. |
4695618 | September 1987 | Mowrer |
4710426 | December 1987 | Stephens |
4722515 | February 1988 | Ham |
4768666 | September 1988 | Kessler |
4842893 | June 1989 | Yializis et al. |
4843036 | June 1989 | Schmidt et al. |
4855186 | August 1989 | Grolig et al. |
4889609 | December 1989 | Cannella |
4913090 | April 1990 | Harada et al. |
4931158 | June 1990 | Bunshah et al. |
4934315 | June 1990 | Linnebach et al. |
4954371 | September 1990 | Yializis |
4977013 | December 1990 | Ritchie et al. |
5032461 | July 1991 | Shaw et al. |
5036249 | July 1991 | Pike-Biegunski et al. |
5047131 | September 1991 | Wolfe et al. |
5059861 | October 1991 | Littman et al. |
5124204 | June 1992 | Yamashita et al. |
5189405 | February 1993 | Yamashita et al. |
5203898 | April 1993 | Carpenter et al. |
5204314 | April 1993 | Kirlin et al. |
5237439 | August 1993 | Misono et al. |
5260095 | November 1993 | Affinito |
5336324 | August 1994 | Stall et al. |
5354497 | October 1994 | Fukuchi et al. |
5356947 | October 1994 | Ali et al. |
5393607 | February 1995 | Kawasaki et al. |
5395644 | March 1995 | Affinito |
5402314 | March 1995 | Amago et al. |
5427638 | June 1995 | Goetz et al. |
5440446 | August 1995 | Shaw et al. |
5451449 | September 1995 | Shetty et al. |
5461545 | October 1995 | Leroy et al. |
5464667 | November 1995 | Kohler et al. |
5510173 | April 1996 | Pass et al. |
5512320 | April 1996 | Turner et al. |
5536323 | July 1996 | Kirlin et al. |
5547508 | August 1996 | Affinito |
5554220 | September 1996 | Forrest et al. |
5576101 | November 1996 | Saitoh et al. |
5578141 | November 1996 | Mori et al. |
5607789 | March 1997 | Treger et al. |
5620524 | April 1997 | Fan et al. |
5629389 | May 1997 | Roitman et al. |
5652192 | July 1997 | Matson et al. |
5654084 | August 1997 | Egert |
5660961 | August 1997 | Yu |
5665280 | September 1997 | Tropsha |
5681615 | October 1997 | Affinito et al. |
5681666 | October 1997 | Treger et al. |
5684084 | November 1997 | Lewin et al. |
5686360 | November 1997 | Harvey et al. |
5693956 | December 1997 | Shi et al. |
5695564 | December 1997 | Imahashi |
5711816 | January 1998 | Kirlin et al. |
5725909 | March 1998 | Shaw et al. |
5731661 | March 1998 | So et al. |
5736207 | April 1998 | Walther et al. |
5747182 | May 1998 | Friend et al. |
5757126 | May 1998 | Harvey et al. |
5759329 | June 1998 | Krause et al. |
5771177 | June 1998 | Tada et al. |
5771562 | June 1998 | Harvey, III et al. |
5782355 | July 1998 | Katagiri et al. |
5792550 | August 1998 | Phillips et al. |
5795399 | August 1998 | Hasegawa et al. |
5811177 | September 1998 | Shi et al. |
5811183 | September 1998 | Shaw et al. |
5821692 | October 1998 | Rogers et al. |
5844363 | December 1998 | Gu et al. |
5869791 | February 1999 | Young |
5872355 | February 1999 | Hueschen |
5891554 | April 1999 | Hosokawa et al. |
5895228 | April 1999 | Biebuyck et al. |
5902641 | May 1999 | Affinito et al. |
5902688 | May 1999 | Antoniadis et al. |
5904958 | May 1999 | Dick et al. |
5912069 | June 1999 | Yializis et al. |
5919328 | July 1999 | Tropsha et al. |
5920080 | July 1999 | Jones |
5922161 | July 1999 | Wu et al. |
5929562 | July 1999 | Pichler |
5934856 | August 1999 | Asakawa et al. |
5945174 | August 1999 | Shaw et al. |
5948552 | September 1999 | Antoniadis et al. |
5952778 | September 1999 | Haskal et al. |
5955161 | September 1999 | Tropsha |
5965907 | October 1999 | Huang et al. |
5968620 | October 1999 | Harvey et al. |
5994174 | November 1999 | Carey et al. |
5996498 | December 1999 | Lewis |
6013337 | January 2000 | Knors |
6040017 | March 2000 | Mikhael et al. |
6045864 | April 2000 | Lyons et al. |
6066826 | May 2000 | Yializis |
6083313 | July 2000 | Venkatraman et al. |
6083628 | July 2000 | Yializis |
6084702 | July 2000 | Byker et al. |
6087007 | July 2000 | Fujii et al. |
6092269 | July 2000 | Yializis et al. |
6106627 | August 2000 | Yializis et al. |
6117266 | September 2000 | Horzel et al. |
6118218 | September 2000 | Yializis et al. |
6137221 | October 2000 | Roitman et al. |
6146225 | November 2000 | Sheets et al. |
6146462 | November 2000 | Yializis et al. |
6150187 | November 2000 | Zyung et al. |
6165566 | December 2000 | Tropsha |
6178082 | January 2001 | Farooq et al. |
6195142 | February 2001 | Gyotoku et al. |
6198217 | March 2001 | Suzuki et al. |
6198220 | March 2001 | Jones et al. |
6203898 | March 2001 | Kohler et al. |
6207238 | March 2001 | Affinito |
6207239 | March 2001 | Affinito |
6214422 | April 2001 | Yializis |
6217947 | April 2001 | Affinito |
6224948 | May 2001 | Affinito |
6228434 | May 2001 | Affinito |
6228436 | May 2001 | Affinito |
6231939 | May 2001 | Shaw et al. |
6264747 | July 2001 | Shaw et al. |
6268695 | July 2001 | Affinito |
6274204 | August 2001 | Affinito |
6322860 | November 2001 | Stein et al. |
6333065 | December 2001 | Arai et al. |
6348237 | February 2002 | Kohler et al. |
6350034 | February 2002 | Fleming et al. |
6352777 | March 2002 | Bulovic et al. |
6358570 | March 2002 | Affinito |
6361885 | March 2002 | Chou |
6387732 | May 2002 | Akram |
6397776 | June 2002 | Yang et al. |
6413645 | July 2002 | Graff et al. |
6416872 | July 2002 | Maschwitz |
6420003 | July 2002 | Shaw et al. |
6436544 | August 2002 | Veyrat et al. |
6460369 | October 2002 | Hosokawa |
6465953 | October 2002 | Duggal |
6468595 | October 2002 | Mikhael et al. |
6469437 | October 2002 | Parthasarathy et al. |
6492026 | December 2002 | Graff et al. |
6497598 | December 2002 | Affinito |
6497924 | December 2002 | Affinito et al. |
6509065 | January 2003 | Affinito |
6512561 | January 2003 | Terashita et al. |
6522067 | February 2003 | Graff et al. |
6537688 | March 2003 | Silvernail et al. |
6544600 | April 2003 | Affinito et al. |
6548912 | April 2003 | Graff et al. |
6569515 | May 2003 | Hebrink et al. |
6570325 | May 2003 | Graff et al. |
6573652 | June 2003 | Graff et al. |
6576351 | June 2003 | Silvernail |
6592969 | July 2003 | Burroughes et al. |
6597111 | July 2003 | Silvernail et al. |
6613395 | September 2003 | Affinito et al. |
6614057 | September 2003 | Silvernail et al. |
6624568 | September 2003 | Silvernail |
6627267 | September 2003 | Affinito |
6628071 | September 2003 | Su |
6653780 | November 2003 | Sugimoto et al. |
6656537 | December 2003 | Affinito et al. |
6664137 | December 2003 | Weaver |
6681716 | January 2004 | Schaepkens |
6720203 | April 2004 | Carcia et al. |
6734625 | May 2004 | Vong et al. |
6743524 | June 2004 | Schaepkens |
6749940 | June 2004 | Terasaki et al. |
6765351 | July 2004 | Forrest et al. |
6811829 | November 2004 | Affinito et al. |
6815887 | November 2004 | Lee et al. |
6818291 | November 2004 | Funkenbusch et al. |
6835950 | December 2004 | Brown et al. |
6836070 | December 2004 | Chung et al. |
6837950 | January 2005 | Berard |
6864629 | March 2005 | Miyaguchi et al. |
6866901 | March 2005 | Burrows et al. |
6867539 | March 2005 | McCormick et al. |
6872114 | March 2005 | Chung et al. |
6872248 | March 2005 | Mizutani et al. |
6872428 | March 2005 | Yang et al. |
6878467 | April 2005 | Chung et al. |
6888305 | May 2005 | Weaver |
6888307 | May 2005 | Silvernail et al. |
6891330 | May 2005 | Duggal et al. |
6897474 | May 2005 | Brown et al. |
6897607 | May 2005 | Sugimoto et al. |
6905769 | June 2005 | Komada |
6923702 | August 2005 | Graff et al. |
6936131 | August 2005 | McCormick et al. |
6975067 | December 2005 | McCormick et al. |
6994933 | February 2006 | Bates |
6998648 | February 2006 | Silvernail |
7002294 | February 2006 | Forrest et al. |
7012363 | March 2006 | Weaver et al. |
7015640 | March 2006 | Schaepkens et al. |
7018713 | March 2006 | Padiyath et al. |
7029765 | April 2006 | Kwong et al. |
7033850 | April 2006 | Tyan et al. |
7056584 | June 2006 | Iacovangelo |
7086918 | August 2006 | Hsiao et al. |
7156942 | January 2007 | McCormick et al. |
7183197 | February 2007 | Won et al. |
2001/0015074 | August 2001 | Hosokawa |
2001/0015620 | August 2001 | Affinito |
2002/0022156 | February 2002 | Bright |
2002/0025444 | February 2002 | Hebgrink et al. |
2002/0068143 | June 2002 | Silvernail |
2002/0069826 | June 2002 | Hunt et al. |
2002/0102363 | August 2002 | Affinitio et al. |
2002/0102818 | August 2002 | Sandhu et al. |
2002/0125822 | September 2002 | Graff et al. |
2002/0139303 | October 2002 | Yamazaki et al. |
2002/0140347 | October 2002 | Weaver |
2003/0038590 | February 2003 | Silvernail et al. |
2003/0085652 | May 2003 | Weaver |
2003/0098647 | May 2003 | Silvernail et al. |
2003/0124392 | July 2003 | Bright |
2003/0127973 | July 2003 | Weaver et al. |
2003/0184222 | October 2003 | Nilsson |
2003/0197197 | October 2003 | Brown et al. |
2003/0218422 | November 2003 | Park et al. |
2003/0235648 | December 2003 | Affinito et al. |
2004/0029334 | February 2004 | Bijker et al. |
2004/0046497 | March 2004 | Schaepkens et al. |
2004/0071971 | April 2004 | Lacovangelo |
2004/0113542 | June 2004 | Hsiao et al. |
2004/0115402 | June 2004 | Schaepkens |
2004/0115859 | June 2004 | Murayama et al. |
2004/0119028 | June 2004 | McCormick et al. |
2004/0175512 | September 2004 | Schaepkens |
2004/0175580 | September 2004 | Schaepkens |
2004/0209090 | October 2004 | Iwanaga |
2004/0219380 | November 2004 | Naruse et al. |
2004/0229051 | November 2004 | Schaepkens et al. |
2004/0241454 | December 2004 | Shaw et al. |
2004/0263038 | December 2004 | Ribolzi et al. |
2005/0003098 | January 2005 | Kohler et al. |
2005/0006786 | January 2005 | Sawada |
2005/0051094 | March 2005 | Schaepkens et al. |
2005/0079295 | April 2005 | Schaepkens |
2005/0079380 | April 2005 | Iwanaga |
2005/0093001 | May 2005 | Liu et al. |
2005/0093437 | May 2005 | Ouyang |
2005/0094394 | May 2005 | Padiyath et al. |
2005/0095736 | May 2005 | Padiyath et al. |
2005/0112378 | May 2005 | Naruse et al. |
2005/0122039 | June 2005 | Satani |
2005/0129841 | June 2005 | McCormick et al. |
2005/0133781 | June 2005 | Yan et al. |
2005/0140291 | June 2005 | Hirakata et al. |
2005/0146267 | July 2005 | Lee et al. |
2005/0174045 | August 2005 | Lee et al. |
2005/0212419 | September 2005 | Vazan et al. |
2005/0238846 | October 2005 | Arakatsu et al. |
2006/0003474 | January 2006 | Tyan et al. |
2006/0028128 | February 2006 | Ohkubo |
2006/0061272 | March 2006 | McCormick et al. |
2006/0062937 | March 2006 | Padiyath et al. |
2006/0063015 | March 2006 | McCormick et al. |
2006/0246811 | November 2006 | Winters et al. |
2006/0250084 | November 2006 | Cok et al. |
2007/0009674 | January 2007 | Okubo et al. |
704297 | Feb 1968 | BE | |||
704 297 | Feb 1968 | BE | |||
2353506 | May 2000 | CA | |||
196 03 746 | Apr 1997 | DE | |||
19603746 | Apr 1997 | DE | |||
696 15 510 | May 2002 | DE | |||
0 147 696 | Jul 1985 | EP | |||
0 299 753 | Jan 1989 | EP | |||
0 299 753 | Jan 1989 | EP | |||
0 340 935 | Nov 1989 | EP | |||
0 340 935 | Nov 1989 | EP | |||
0 390 540 | Mar 1990 | EP | |||
0 390 540 | Oct 1990 | EP | |||
0 468 440 | Jan 1992 | EP | |||
0 547 550 | Jun 1993 | EP | |||
0 547 550 | Jun 1993 | EP | |||
0 590 467 | Apr 1994 | EP | |||
0 590 467 | Apr 1994 | EP | |||
0 722 787 | Jul 1996 | EP | |||
0 722 787 | Jul 1996 | EP | |||
0 777 280 | Jun 1997 | EP | |||
0 777 280 | Jun 1997 | EP | |||
0 777 281 | Jun 1997 | EP | |||
0 787 824 | Aug 1997 | EP | |||
0 787 826 | Aug 1997 | EP | |||
0 787 826 | Aug 1997 | EP | |||
0 915 105 | May 1999 | EP | |||
0 916 394 | May 1999 | EP | |||
0 916 394 | May 1999 | EP | |||
0 931 850 | Jul 1999 | EP | |||
0 931 850 | Jul 1999 | EP | |||
0 977 469 | Feb 2000 | EP | |||
0 977 469 | Feb 2000 | EP | |||
1 021 070 | Jul 2000 | EP | |||
1127 381 | Aug 2001 | EP | |||
1 130 420 | Sep 2001 | EP | |||
1 278 244 | Jan 2003 | EP | |||
1 514 317 | Mar 2005 | EP | |||
S63-96895 | Apr 1988 | JP | |||
63136316 | Jun 1988 | JP | |||
63136316 | Aug 1988 | JP | |||
64-18441 | Jan 1989 | JP | |||
S64-41192 | Feb 1989 | JP | |||
2-183230 | Jul 1990 | JP | |||
3-290375 | Dec 1991 | JP | |||
4-48515 | Feb 1992 | JP | |||
4-14440 | Apr 1992 | JP | |||
H4-267097 | Sep 1992 | JP | |||
H5-182759 | Jul 1993 | JP | |||
06-136159 | May 1994 | JP | |||
06158305 | Jun 1994 | JP | |||
61-79644 | Jun 1994 | JP | |||
6-234186 | Aug 1994 | JP | |||
07-074378 | Mar 1995 | JP | |||
H07-147189 | Jun 1995 | JP | |||
H7-192866 | Jul 1995 | JP | |||
8-72188 | Mar 1996 | JP | |||
H8-171988 | Jul 1996 | JP | |||
8-179292 | Jul 1996 | JP | |||
08325713 | Oct 1996 | JP | |||
08325713 | Dec 1996 | JP | |||
09059763 | Apr 1997 | JP | |||
H9-132774 | May 1997 | JP | |||
09-161967 | Jun 1997 | JP | |||
09-232553 | Sep 1997 | JP | |||
10-013083 | Jan 1998 | JP | |||
H10-41067 | Feb 1998 | JP | |||
11-017106 | Jan 1999 | JP | |||
11-040344 | Feb 1999 | JP | |||
11-255928 | Sep 1999 | JP | |||
2000-058258 | Feb 2000 | JP | |||
2002/505969 | Feb 2002 | JP | |||
10312883 | Mar 2002 | JP | |||
3579556 | Oct 2004 | JP | |||
2006-294780 | Oct 2006 | JP | |||
WO 87/07848 | Dec 1987 | WO | |||
WO 98/00337 | Jan 1989 | WO | |||
WO 95/10117 | Apr 1995 | WO | |||
WO 96/23217 | Aug 1996 | WO | |||
WO 97/04885 | Feb 1997 | WO | |||
WO 97/16053 | May 1997 | WO | |||
WO 97/22631 | Jun 1997 | WO | |||
WO 98/10116 | Mar 1998 | WO | |||
WO 98/18852 | May 1998 | WO | |||
WO 99/16557 | Apr 1999 | WO | |||
WO 99/16931 | Apr 1999 | WO | |||
WO 99/46120 | Sep 1999 | WO | |||
WO 00/26973 | May 2000 | WO | |||
WO 00/35603 | Jun 2000 | WO | |||
WO 00/35604 | Jun 2000 | WO | |||
WO 00/35993 | Jun 2000 | WO | |||
WO 00/36661 | Jun 2000 | WO | |||
WO 00/36665 | Jun 2000 | WO | |||
WO 01/68360 | Sep 2001 | WO | |||
WO 01/81649 | Nov 2001 | WO | |||
WO 01/82336 | Nov 2001 | WO | |||
WO 01/82389 | Nov 2001 | WO | |||
WO 01/87825 | Nov 2001 | WO | |||
WO 01/89006 | Nov 2001 | WO | |||
WO 02/26978 | Apr 2002 | WO | |||
WO 03/016589 | Feb 2003 | WO | |||
WO 03/098716 | Nov 2003 | WO | |||
WO 2004/006199 | Jan 2004 | WO | |||
WO 2004/016992 | Feb 2004 | WO | |||
WO 2004/070840 | Aug 2004 | WO | |||
WO 2004/089620 | Oct 2004 | WO | |||
WO 2005/015655 | Feb 2005 | WO | |||
WO 2005/045947 | May 2005 | WO | |||
WO 2005/048368 | May 2005 | WO | |||
WO 2006/036492 | Apr 2006 | WO | |||
Inoue et al., Proc. Jpn. Congr. Mater. Res., vol. 33, p. 177-9, 1990. cited by examiner . Affinito, J.F., et al., "Vacuum Deposition of Polymer Electrolytes On Flexible Substrates", "Proceedings of the Ninth International Conference on Vacuum Web Coating", Nov. 1995 ed R. Bakish, Bakish Press 1995, pp. 20-36. cited by examiner . Penning, F.M., Electrical Discharges in Gasses, Gordon and Breach Science Publishers, 1965, Chapters 5-6, pp. 19-35, and Chapter 8, pp. 41-50. cited by examiner . Akedo et al., "LP-5: Lake-News Poster: Plasma-CVD SiNx/Plasma-Polymerized CNx:H Multi-layer Passivation Films for Organic Light Emmitting Diods", SID 03 Digest. cited by other . Chwang et al., "Thin Film encapsulated flexible organic electroluminescent displays", American Institute of Physics, 2003. cited by other . Wong, C.P., "Recent Advances in IC Passivation and Encapsulation: Process Techniques and Materials," Polymers for Electronic and Photonic Applications, AT&T Bell Laboratories, 1993, pp. 167-209. cited by other . De Gryse, R. et al., "Sputtered Transparent Barrier Layers," Tenth International Conference on Vacuum Web Coating, Nov. 1996, pp. 190-198. cited by other . Shi, M.K., et al., Plasma treatment of PET and acrylic coating surfaces-I, In situ XPS measurements, Journal of Adhesion Science and Technology, Mar. 2000, 14(12), pp. 1-28. cited by other . Affinito, J.D. et al., "Vacuum Deposition of Polymer Electrolytes on Flexible Susbtrates" The Ninth International Conference on Vacuum Web Coating, 1995, pp. 0-16. cited by other . Affinito, J.D., Vacuum Deposited Conductive Polymer Films; The Eleventh International Conference on Vacuum Web Coatings, Nov. 9-11, 1997, pp. 1-13. cited by other . Affinito, J.D. et al, Ultra High Rate, Wide Area, Plasma Polymerized Films from High Molecular Weight/Low Vapor Pressure Liquid or Solid Monomer Precursors; 45.sup.th International Symposium of the American Vacuum Society; Nov. 2-6, 1998, pp. 0-26. cited by other . Norenberg, H. et al., Comparative Study of Oxygen Permeation Through Polymers and Gas Barrier Films, Denver, Apr. 15-20, 2000; pp. 347-351; Society of Vacuum Coaters. cited by other . Yializis, A. et al., Ultra High Barrier Films; Denver, Apr. 15-20, 2000, pp. 404-407; Society of Vacuum Coaters. cited by other . Henry, B.M. et al., Microstructural and Gas Barrier Properties of Transparent Aluminum Oxide and Indium Tin Oxide Films; Denver, Apr. 15-20, 2000; pp. 373-378; Society of Vacuum Coaters. cited by other . Tropsha et al., Combinatorial Barrier Effect of the Multilayer SiOx Coatings on Polymer Substrates; 1997 Society of Vacuum Coaters, 40.sup.th Annual Technical Conferences Proceedings; Apr. 12-17, 1997; pp. 64-69. cited by other . Tropsha et al., Activated Rate Theory Treatment of Oxygen and Water Transport through Silicon Oxide/Poly(ethylene terphthalate) Composite Barrier Structures; J. Phys. Chem B Mar. 1997; pp. 2259-2266. cited by other . Affinito, J.D. et al., PML/Oxide/PML Barrier Layer Performance Differences Arising From Use Of UV Or Electron Beam Polymerization Of The PML Layers, SVC 40.sup.th Annual Technical Conference, Apr. 12-17, 1997, 4 pages only. cited by other . Affinito, J.D. et al., Vacuum Deposited Polymer/metal Multilayer Films for Optical Applications; Paper No. C1.13; International Conference on Metallurgical Coatings; Apr. 15-21, 1995, pp. 1-14. cited by other . Felts, J.T., Transparent Barrier Coatings Update: Flexible Substrates; Society of Vacuum Coaters; 36.sup.th Annual Technical Conference Proceedings; Apr. 25-30, 1993; pp. 324-331. cited by other . Affinito, J.D. et al., Molecularly Doped Polymer Composite Films for Light Emitting Polymer Application Fabricated by the PML Process; 41.sup.st Technical Conference of the Society of Vacuum Coaters; Apr. 1998; pp. 220-225. cited by other . Affinito, J.D. et al., Polymer/polymer, Polymer/Oxide, and Polymer/Metal Vacuum Deposited Interference Filters; Tenth International Vacuum Web Coating Conference; Nov. 1996; pp. 0-14. cited by other . Mahon, J.K. et al, Requirements of Flexible Substrates for Organic Light Emitting Devices in Flat Panel Display Applications, Society of Vacuum Coaters, 42.sup.nd Annual Technical Conference Proceedings, Apr. 1999, pp. 456-459. cited by other . Kukla, R. et al., Transparent Barrier Coatings with EB-Evaporation, an Update; Section Five; Transparent Barrier Coating Papers; Thirteenth International Conference on Vacuum Web Coating; Oct. 17-19, 1999 pp. 222-233. cited by other . Hibino, N. et al., Transparent Barrier Al.sub.20.sub.3 Coating By Activated Reactive Evaporation; Thirteenth International Conference on Vacuum Web Coating; Oct. 17-19, 1999; pp. 234-246. cited by other . Bright, Clark I., Transparent Barrier Coatings Based on ITO for Flexible Plastic Displays; Thirteenth International Conference on Vacuum Web Coating; Oct. 17-19, 1999; pp. 247-255. cited by other . Henry, B.M. et al., Microstructural Studies of Transparent Gas Barrier Coatings on Polymer Substrates; Thirteenth International Conference on Vacuum Web Coating; Oct. 17-19, 1999; pp. 265-273. cited by other . Affinito, J.D. et al.; Ultra High Rate, Wide Area, Plasma Polymerized Films from High Molecular Weight/Low Vapor Pressure Liquid or Liquid/Solid Suspension Monomer Precursors; MRS Conference; Nov. 29-Dec. 3, 1998; Paper No. Y12.1. cited by other . Affinito, J. D. et al., "Vacuum Deposited Conductive Polymer Films" The Eleventh International Conference on Vacuum Web Coating, no earlier than Feb. 1998, pp. 200-212. cited by other . Affinito, J. D. et al., "Molecularly Doped Polymer Composite Films for Light Emitting Polymer Applications Fabricated by the PML Process" 41st Technical Conference of Society of Vacuum Coaters, Apr. 1998, pp. 1-6. cited by other . Bunshah, R. F. et al., "Deposition Technologies for Films and Coatings" Noyes Publications, Park Ridge, New Jersey, 1982, p. 339. cited by other . Affinito, J. D., Energy Res. Abstr. 18(6), #17171, 1993. cited by other . Graupner, W. et al.; "High Resolution Color Organic Light Emitting Diode Microdisplay Fabrication Method", SPIE Proceedings; Nov. 6, 2000; pp. 1-9. cited by other . Czeremuszkin, G. et al.; Permeation Through Defects in Transparent Barrier Coated Plastic Films; 43rd Annual Technical Conference Proceedings; Apr. 15, 2000; pp. 408-413. cited by other . Vossen, J.L. et al.; Thin Film Processes; Academic Press, 1978, Part II, Chapter II-1, Glow Discharge Sputter Deposition, pp. 12-63; Part IV, Chapter IV-1 Plasma Deposition of Inorganic Compounds and Chapter IV-2 Glow Discharge Polymerization, pp. 335-397. cited by other . G. Gustafason, et al.; Flexible light-emitting diodes made from soluble conducting polymers; Letters to Nature; vol. 357; Jun. 11, 1992; pp. 477-479. cited by other . F.M. Penning; Electrical Discharges in Gases; 1965; pp. 1-51; Gordon and Breach, Science Publishers, New York-London-Paris. cited by other . Affinito, J.D., et al.; High Rate Vacuum Deposition of Polymer Electrolytes: Journal Vacuum Science Technology A 14(3), May/Jun. 1996. cited by other . Affinito, J.D. et al.; Vacuum Deposition of Polymer Electrolytes On Flexible Substrates, The Ninth International Conference on Vacuum Web Coating; pp. 20-37. cited by other . Affinito, J.D. et al.; Ultrahigh Rate, Wide Area, Plasma Polymerized Films from High Molecular Weight/Low Vapor Pressure Liquid or Solid Monomer Precursors; Journal Vacuum Science Technology A 17(4); Jul./Aug. 1999; pp. 1974-1981; American Vacuum Society. cited by other . Shi, M.K. et al.; In situ and real-time monitoring of plasma-induced etching PET and acrylic films, Plasmas and Polymers; Dec. 1999, 494); pp. 1-25. cited by other . Affinito, J.D. et al.; Molecularly Doped Polymer Composit Films for Light Emitting Polymer Application Fabricated by the PML Process; 41st Technical Conference of the Society of Vacuum Coaters; 1998; pp. 220-225. cited by other . Affinito, J.D. et al.; Vacuum Deposited Polymer/Metal Multilayer Films for Optical Application; Thin Solid Films 270, 1995; pp. 43-48. cited by other . Felts, J.T.; Transparent Barrier Coatings Update: Flexible Substrates; pp. 324-331. cited by other . Phillips, R.W.; Evaporated Dielectric Colorless Films on PET and Opp Exhibiting High Barriers Toward Moisture and Oxygen; Society of Vacuum Coaters; 36th Annual Technical Conference Proceedings; 1993; pp. 293-300. cited by other . Yamada, Y. et al.; The Properties of a New Transparent and Colorless Barrier Film; 1995; pp. 28-31; Society of Vacuum Coaters. cited by other . Chahroudi, D.; Transparent Glass Barrier Coatings for Flexible Film Packaging; 1991; pp. 130-133; Society of Vacuum Coaters. cited by other . Krug, T. et al.; New Developments in Transparent Barrier Coatings; 1993; pp. 302-305; Society Vacuum Coaters. cited by other . Affinito, J.D. et al.; PML/Oxide/PML Barrier Layer Performance Differences Arising From Use Of UV or Electron Beam Polymerization of the PML Layers; Thin Solid Films; Elsevier Science S.A.; vol. 308-309; Oct. 31, 1997; pp. 19-25. cited by other . Affinito, J.D. et al.; A new method for fabricating transparent barrier layers, Thin Solid Films 290-291; 1996; pp. 63-67. cited by other . Affinito, J.D. et al.; Polymer-Oxide Transparent Barrier Layers; SVC 39th Annual Technical Conference; Vacuum Web Coating Session; 1996; pp. 392-397. cited by other . Hoffmann, G. et al.; Transparent Barrier Coatings by Reactive Evaporation; 1994; pp. 155-160; Society of Vacuum Coaters. cited by other . Klemberg-Sapieha, J.E. et al.; Transparent Gas Barrier Coatings Produced by Dual-Frequency PECVD; 1993; pp. 445-449; Society of Vacuum Coaters. cited by other . Finson, E. et al.; Transparent SiO2 Barrier Coatings: Conversion and Production Status; 1994; pp. 139-143; Society of Vacuum Coaters. cited by other . Yializis, A. et al.; High Oxygen Barrier Polypropylene Films Using Transparent Acrylate-A2O3 and Opaque Al-Acrylate Coatings; 1995; pp. 95-102; Society of Vacuum Coaters. cited by other . Shaw, D.G. et al.; Use of Vapor Deposited Acrylate Coatings to Improve the Barrier Properties of Metallized Film; 1994; pp. 240-244; Society of Vacuum Coaters. cited by other . Clark I. Bright, et al., Transparent Barrier Coatings Based on ITO for Flexible Plastic Displays, Oct. 17-19, 1999, pp. 247-264, Tucson, Arizona. cited by other . Notification of Transmittal of the International Search Report Or The Declaration, Mar. 3, 2000, PCT/US99/29853. cited by examiner. |
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