U.S. patent number RE39,296 [Application Number 09/659,375] was granted by the patent office on 2006-09-19 for catadioptric projection systems.
This patent grant is currently assigned to Nikon Corporation. Invention is credited to Tomowaki Takahashi.
United States Patent |
RE39,296 |
Takahashi |
September 19, 2006 |
**Please see images for:
( Certificate of Correction ) ** |
Catadioptric projection systems
Abstract
Catadioptric projection systems are disclosed for projecting an
illuminated region of a reticle onto a corresponding region on a
substrate. The systems are preferably used with ultraviolet light
sources (e.g., 193 nm). The systems comprise a first imaging
system, a concave mirror, and a second imaging system. The first
imaging system comprises a single-pass lens group and a double-pass
lens group. The single-pass lens group comprises a first negative
subgroup, a positive subgroup, and a second negative subgroup.
Light from the illuminated region of the reticle passes through the
single-pass lens group and the double-pass lens group, and reflects
from the concave mirror to pass back through the double-pass lens
group to form an intermediate image of the illuminated region of
the reticle. The light is then directed to the second imaging
system that re-images the illuminated region of the reticle on the
substrate. Alternatively, light from the single-pass lens group is
reflected by a turning mirror to the double-pass lens group,
wherein the light returning through the double-pass lens group
continues directly to the second imaging system.
Inventors: |
Takahashi; Tomowaki (Yokohama,
JP) |
Assignee: |
Nikon Corporation (Tokyo,
JP)
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Family
ID: |
15485129 |
Appl.
No.: |
09/659,375 |
Filed: |
September 8, 2000 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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08628165 |
Apr 25, 1996 |
5689377 |
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08552453 |
Nov 3, 1995 |
5691802 |
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08515631 |
Aug 16, 1995 |
5861997 |
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08429970 |
Apr 27, 1995 |
5808805 |
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|
08212639 |
Mar 10, 1994 |
5636066 |
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Reissue of: |
08858560 |
May 19, 1997 |
05805334 |
Sep 8, 1998 |
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Foreign Application Priority Data
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Mar 12, 1993 [JP] |
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5-051718 |
Jun 8, 1993 [JP] |
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5-137641 |
Apr 18, 1994 [JP] |
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06-090837 |
Aug 23, 1994 [JP] |
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06-198350 |
Nov 7, 1994 [JP] |
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06-271631 |
Mar 7, 1995 [JP] |
|
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07-047142 |
Apr 7, 1995 [JP] |
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07-082380 |
Jul 14, 1995 [JP] |
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07-17785 |
Feb 19, 1996 [JP] |
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08-030978 |
May 20, 1996 [JP] |
|
|
8-149903 |
|
Current U.S.
Class: |
359/364; 359/784;
359/732; 359/727 |
Current CPC
Class: |
G02B
17/0892 (20130101); G03F 7/70241 (20130101); G03F
7/70225 (20130101); G03F 7/70358 (20130101); G02B
17/08 (20130101); G03F 7/70275 (20130101) |
Current International
Class: |
G02B
17/08 (20060101); G03B 27/42 (20060101) |
Field of
Search: |
;359/364,365,366,727,728,732,784 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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19726058 |
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Jan 1998 |
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DE |
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0712019 |
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May 1996 |
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EP |
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0717299 |
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Jun 1996 |
|
EP |
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0736789 |
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Oct 1996 |
|
EP |
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0770895 |
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May 1997 |
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EP |
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0243950 |
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Nov 1997 |
|
EP |
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47-35017 |
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Sep 1972 |
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JP |
|
58-04112 |
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Jan 1983 |
|
JP |
|
58-078115 |
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May 1983 |
|
JP |
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61-156737 |
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Jul 1986 |
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JP |
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63-163319 |
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Jul 1988 |
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JP |
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2-66510 |
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Mar 1990 |
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JP |
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3-282527 |
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Dec 1991 |
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JP |
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4-42208 |
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Feb 1992 |
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JP |
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4-157412 |
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May 1992 |
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JP |
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4-234722 |
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Aug 1992 |
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JP |
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5-72478 |
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JP |
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5-173065 |
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JP |
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05-173065 |
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Jul 1993 |
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JP |
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6-313845 |
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Nov 1994 |
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JP |
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07140384 |
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Jun 1995 |
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JP |
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07140385 |
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Jun 1995 |
|
JP |
|
93/04391 |
|
Mar 1993 |
|
WO |
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Other References
US. Appl. No. 09/659,376, filed Sep. 8, 2000, Toshihiro Sasaya, et
al., Nikon Corporation, Japan. cited by other .
U.S. Appl. No. 09/665,184, filed Sep. 5, 2000, Tomowaki Takahashi,
Nikon Corporation, Japan. cited by other .
U.S. Appl. No. 09/766,486, filed Jan. 19, 2001, Tomowaki Takahashi,
Nikon Corporation, Japan. cited by other .
U.S. Appl. No. 09/764,157, filed Jan. 19, 2001, Tomowaki Takahashi,
Nikon Corporation, Japan. cited by other .
U.S. Appl. No. 09/709,518, filed Nov. 13, 2000, Hitoshi Matsuzawa,
et al., Nikon Corporation, Japan. cited by other .
Abstract for Japanese Publication No. 63-118115 filed Jun. 11,
1986. cited by other.
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Primary Examiner: Robinson; Mark A.
Assistant Examiner: Fineman; Lee
Parent Case Text
.Iadd.This application claims the benefit of Japanese patent
application no. 8-149903, filed May 20, 1996, and is a continuation
in part of U.S. patent application Ser. No. 08/212,639, filed Mar.
10, 1994 and which issued as U.S. Pat. No. 5,636,066, U.S. patent
application Ser. No. 08/628,165, filed Apr. 25, 1996 and which
issued as U.S. Pat. No. 5,689,377, U.S. patent application Ser. No.
08/552,453, filed Nov. 3, 1995 and which issued as U.S. Pat. No.
5,691,802, U.S. patent application Ser. No. 08/429,970, filed Apr.
27, 1995 and which issued as U.S. Pat. No. 5,808,805 and is
currently pending as U.S. reissue application Ser. No. 09/764,157,
U.S. patent application Ser. No. 08/515,631, filed Aug. 16, 1995
and which issued as U.S. Pat. No. 5,861,997 and is currently
pending as U.S. reissue application Ser. No. 09/766,486, which
correspondingly claim priority under 35 U.S.C. Section 119(a)-(d)
to Japanese patent application no. 5-051718, filed Mar. 12, 1993,
Japanese patent application no. 5-137641, filed Jun. 8, 1993,
Japanese patent application no. 7-082380, filed Apr. 7, 1995,
Japanese patent application no. 8-030978, filed Feb. 19, 1996,
Japanese patent application no. 6-271631, filed Nov. 7, 1994,
Japanese patent application no. 7-047142, filed Mar. 7, 1995,
Japanese patent application no. 7-177858, filed Jul. 14, 1995,
Japanese patent application no. 6-090837, filed Apr. 28, 1994, and
Japanese patent application no. 6-198350, filed Aug. 23,
1994..Iaddend.
Claims
What is claimed is:
1. A catadioptric projection system for receiving light from a
reticle and projecting a pattern from the reticle onto a substrate,
the catadioptric projection system comprising: a first imaging
system that forms an intermediate image of an illuminated region of
the reticle, the first imaging system comprising in order from the
reticle and along an optical axis of the first imaging system, (a)
a single-pass lens group comprising a first negative subgroup, a
positive subgroup, and a second negative subgroup, and (b) a
double-pass lens group comprising a concave mirror, wherein light
from the illuminated region of the reticle passes through the
single-pass lens group and the double-pass lens group, reflects
from the concave mirror, and returns through the double-pass
optical group; a first turning mirror placed near the intermediate
image that receives the light reflected by the concave mirror
.[.to.]. and returned through the double-pass optical group; and a
second imaging system that receives the light reflected by the
first turning mirror and that re-images the intermediate image to
form a final image of the illuminated region of the reticle on the
substrate.
2. The catadioptric projection system of claim 1, wherein the first
negative subgroup of the single-pass lens group comprises a lens
element with a concave surface facing the reticle.
3. The catadioptric projection system of claim 1, wherein the
second negative subgroup of the single-pass lens group comprises a
lens element with a concave surface facing the double-pass lens
group.
4. The catadioptric projection system of claim 2, wherein the
second negative subgroup of the single-pass lens group comprises a
lens .[.clement.]. .Iadd.element .Iaddend.with a concave surface
facing the double-pass lens group.
5. The catadioptric projection system of claim 1, wherein either
the first imaging system or the second imaging system produces a
magnification of less than one.
6. The catadioptric projection system of claim 1, wherein the
second imaging system comprises a first lens group and a second
lens group, the system further comprising a second turning mirror
placed between the first lens group and the second lens group and
that receives light from the first lens group and directs the light
to the second lens group.
7. The catadioptric projection system of claim 1, further
comprising a third turning mirror placed between the
single.Iadd.-.Iaddend.pass lens group and the double-pass lens
group and that receives light from the single-pass lens group and
directs the light to the double-pass lens group.
8. The catadioptric projection system of claim 7, wherein the third
turning mirror and the first turning mirror are arranged so that
the light incident to the single-pass optical group and exiting the
second lens group of the second imaging system propagate along
substantially parallel axes.
9. The catadioptric projection system of claim 8, wherein the first
axis and the second axis are colinear.
10. A catadioptric projection system for receiving light .[.so.].
from a reticle and projecting a pattern from the reticle onto a
substrate, the catadioptric projection system comprising: a first
imaging system that forms an intermediate image of an illuminated
region of the reticle, the first imaging system comprising from
objectwise to .[.imagewisc.]. .Iadd.imagewise.Iaddend., (a) a
single-pass lens group comprising a first negative subgroup, a
positive subgroup, and a second negative subgroup, and (b) a
double-pass lens group comprising a concave mirror, wherein light
from the illuminated region of the reticle passes through the
single-pass lens group and the double-pass lens group, reflects
from the concave mirror, and returns through the double-pass lens
group; a first turning mirror placed near the intermediate image,
the first turning mirror separating the light propagating from the
double-pass lens group from the light propagating to the
double-pass lens group; and a second imaging system that receives
the light reflected by the concave mirror and reflected back
through the double-pass lens group and that re-images the
intermediate image to form a final image of the illuminated region
of the reticle on the substrate.
11. The catadioptric projection system of claim 10, wherein the
first negative subgroup of the single-pass lens group comprises a
lens element with a concave surface facing the reticle.
12. The catadioptric projection system of claim 10, wherein the
second negative subgroup of the single-pass lens group comprises a
lens element with a concave surface facing the first turning
mirror.
13. The catadioptric projection system of claim 11, wherein the
second negative subgroup of the single-pass lens group comprises a
lens element with a concave surface facing the first turning
mirror.
14. The catadioptric projection system of claim 10, wherein either
the first imaging system or the second imaging system produces a
magnification of less than one.
15. The catadioptric projection system of claim 10, wherein the
second imaging system comprises a first lens group and a second
lens group, the system further comprising a second turning mirror
placed between the first lens group and the second lens group and
that receives light from the first lens group and directs the light
to the second lens group.
16. The catadioptric projection system of claim 14, wherein the
first turning mirror and the second turning mirror are arranged so
that light entering the single-pass lens group propagates along a
first axis and light reflected by the second turning mirror
propagates along a second axis substantially parallel to the first
axis.
17. In a method for projecting a pattern on a reticle onto a
substrate in which a first imaging system receives light from the
reticle and transmits the light through a single-pass lens group of
the first imaging system and a double-pass lens group of the first
imaging system, the double-pass lens group comprising a concave
mirror, and reflecting the light from the concave mirror and
returning the light through the double-pass optical group, and
separating the light propagating from the double-pass lens group
and the light propagating to the double-pass lens group, and
directing the light propagating from the double-pass lens group to
a second imaging system, an improvement comprising: (a) providing
within the single-pass lens group, from objectwise to imagewise, a
first negative subgroup, a positive subgroup, and a second negative
subgroup; (b) forming an intermediate image with the first imaging
system between the first imaging system and the second imaging
system; and (c) locating the intermediate image in proximity to a
turning mirror that separates the light propagating from the
double-pass lens group from the light propagating to the
double-pass lens group.
18. A method for projecting a pattern from a reticle onto a
substrate, comprising the steps of: (a) providing a first imaging
system comprising a single-pass lens group including from
objectwise to imagewise, a first negative lens subgroup, a positive
lens subgroup, and a second negative lens subgroup; and a
double.Iadd.-.Iaddend.pass lens group comprising a concave mirror;
(b) transmitting light from the reticle through the
single-.Iaddend.pass lens group and the double-pass lens group to
the concave mirror, and returning the light reflected from the
concave mirror back through the double-pass lens group toward the
single-pass lens group; (c) separating the light propagating
through the double.Iadd.-.Iaddend.pass lens group to the concave
mirror from the light propagating through the double-pass lens
group from the concave mirror; (d) with the first imaging system,
forming an intermediate image of the pattern between the first
imaging system and the second imaging system; (e) directing the
light propagating from the concave mirror through the second
imaging system; and (f) forming an image of the reticle on the
substrate with the second imaging system.
19. The method of claim 18, further comprising directing light from
the single-pass lens group to the double-pass lens group using a
first turning mirror.
20. The method of claim 19, further comprising directing the light,
reflected by the concave mirror and returning through the
double-pass lens group, to the second imaging system using a second
turning mirror.
21. The method of claim 20, further comprising orienting the first
turning mirror and the second turning mirror so that the light
incident to the first turning mirror and the light reflected by the
second turning mirror propagate along substantially parallel
axes.
22. The method of claim 21, further comprising orienting the first
turning mirror and the second turning mirror so that the light
incident to the first turning mirror and the light reflected by the
second turning mirror propagate along substantially the same
axis.
23. The method of claim 18, further comprising: providing a first
turning mirror placed between the single.Iadd.-.Iaddend.pass lens
group and the double-pass lens group; and directing light,
returning through the double-pass lens group from the concave
mirror, to the second imaging system using the first turning
mirror.
24. The method of claim 23, further comprising: providing the
second imaging system with a first lens group and a second lens
group; providing a second turning mirror between the first lens
group and the second lens group; and directing light from the first
lens group to the second lens group using the second turning
mirror.
25. The method of claim 24, further comprising: arranging the first
turning mirror and the second turning mirror so that the light
incident to the first turning mirror and the light reflected by the
second turning mirror propagate along substantially parallel
axes.
26. An exposure system for projecting patterns on a reticle onto a
substrate, the system comprising: (a) a catadioptric projection
system that receives an illumination flux from an illuminated
region on the reticle and forms an image of the illuminated region
on the reticle on a corresponding region on the substrate; (b) the
catadioptric projection system comprising a first imaging system
and a second imaging system, the first imaging system forming an
intermediate image of the illuminated region of the reticle, and
the second imaging system serving to re-image the intermediate
image to form an image of the illuminated region of the reticle on
the corresponding region of the substrate; (c) the first imaging
system comprising from objectwise to imagewise, (i) a single-pass
lens group comprising a first negative subgroup, a positive
subgroup, and a second negative subgroup; and (ii) a double-pass
lens group comprising a concave mirror, wherein light from the
illuminated region of the reticle passes through the single-pass
lens group and the double-pass lens group, reflects from the
concave mirror, and returns through the double-pass lens group; (d)
a first turning mirror situated near the intermediate image, the
first turning mirror separating the light propagating from the
double-pass lens group from the light propagating to the
double-pass lens group; and (e) a reticle scanner and a substrate
scanner for respectively scanning the reticle and substrate
synchronously to allow the .[.caladioptric.]. .Iadd.catadioptric
.Iaddend.projection system to project the patterns on the reticle
onto the substrate.
.Iadd.27. A catadioptric imaging optical system in a projection
exposure apparatus that transfers a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, the system comprising: a catadioptric imaging optical
sub-system comprising an optical group to form an image of the
pattern, the optical group comprising a concave mirror with a first
optical axis; and a dioptric imaging sub-system arranged in an
optical path between the catadioptric imaging optical sub-system
and the second plane to re-image the image formed by the
catadioptric imaging optical sub-system, the dioptric imaging
sub-system comprising a second optical axis, wherein the first
optical axis and the second optical axis are not parallel to each
other, the first plane and the second plane are arranged to be
parallel to each other, the optical group of said catadioptric
imaging optical sub-system comprises a first optical subgroup
comprising a third optical axis, and a second optical subgroup
comprising the concave mirror and the first optical axis, and the
second and third axes form a straight optical axis.Iaddend..
.Iadd.28. A catadioptric imaging optical system according to claim
27, wherein the third optical axis and the second optical axis are
parallel to each other.
.Iadd.29. A catadioptric imaging optical system according to claim
27, wherein the second optical subgroup comprises a negative lens
and a positive lens..Iaddend.
.Iadd.30. A catadioptric imaging optical system according to claim
27, wherein said dioptric imaging optical sub-system further
comprises an aperture stop..Iaddend.
.Iadd.31. A projection exposure apparatus that transfers a pattern
on a reticle onto a substrate, comprising: an illumination optical
system to illuminate the pattern on the reticle; and a catadioptric
imaging optical system according to claim 30 to image the pattern
onto the substrate, wherein a .sigma. can be varied, .sigma. being
a ratio of a numerical aperture of said catadioptric imaging
optical system to a numerical aperture of said illumination optical
system..Iaddend.
.Iadd.32. A catadioptric imaging optical system according to claim
27, wherein the image formed by said catadioptric imaging optical
sub-system is a primary image of the pattern on the
reticle..Iaddend.
.Iadd.33. A catadioptric imaging optical system according to claim
27, further comprising a first turning mirror arranged in an
optical path between the concave mirror and said dioptric imaging
optical sub-system..Iaddend.
.Iadd.34. A catadioptric imaging optical system according to claim
33, further comprising a second turning mirror arranged in an
optical path between the concave mirror and the first
plane..Iaddend.
.Iadd.35. A catadioptric imaging optical system according to claim
34, wherein the third optical axis and the second optical axis
intersect..Iaddend.
.Iadd.36. A projection exposure apparatus that transfers a pattern
on a reticle onto a substrate, comprising: a catadioptric imaging
optical system according to claim 27, said catadioptric imaging
optical system forms an exposure region on the substrate that is
off of the second optical axis..Iaddend.
.Iadd.37. A projection exposure apparatus according to claim 36,
wherein the reticle and the substrate are scanned at different
speeds corresponding to the magnification of said catadioptric
imaging optical system..Iaddend.
.Iadd.38. A method of imaging a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, comprising: forming an intermediate image of the
pattern on the reticle using a catadioptric imaging optical
sub-system, wherein the catadioptric imaging optical sub-system
comprises an optical group comprising a concave mirror with a first
optical axis; and re-imaging the intermediate image formed by the
catadioptric imaging optical sub-system onto the substrate using a
dioptric imaging sub-system arranged in an optical path between the
catadioptric imaging optical sub-system and the second plane,
wherein the dioptric imaging sub-system comprises a second optical
axis, wherein the first optical axis and the second optical axis
intersect, the first plane and the second plane are arranged to be
parallel to each other, the optical group of said catadioptric
imaging optical sub-system comprises a first optical subgroup
comprising a third optical axis, and a second optical subgroup
comprising the concave mirror and the first optical axis, and the
second and third optical axes form a straight optical
axis..Iaddend.
.Iadd.39. A catadioptric imaging optical system used in a
projection exposure apparatus that transfers a pattern on a reticle
which is arranged in a first plane onto a substrate which is
arranged in a second plane, comprising: a catadioptric imaging
optical sub-system in an optical path between the first plane and
the second plane, the catadioptric imaging optical sub-system
comprising a first optical group with a lens with a first optical
axis, and a second optical group with a concave mirror with a
second optical axis; and a dioptric imaging sub-system with a third
optical axis arranged in an optical path between said catadioptric
imaging optical sub-system and said substrate, wherein the first
optical axis and second optical axis intersect, the second optical
axis and the third optical axis intersect, and the first and third
optical axes form a straight optical axis..Iaddend.
.Iadd.40. A projection exposure apparatus that transfers a pattern
on a reticle onto a substrate, comprising: a catadioptric imaging
optical sub-system according to claim 39, wherein said catadioptric
imaging optical system forms the pattern on the reticle that is off
of the first optical axis onto an exposure region on the substrate
that is off of the third optical axis..Iaddend.
.Iadd.41. A projection exposure apparatus according to claim 40,
wherein the reticle and the substrate are scanned at different
speeds corresponding to the magnification of said catadioptric
imaging optical sub-system..Iaddend.
.Iadd.42. A catadioptric imaging optical system according to claim
39, wherein the first and third optical axes are parallel to each
other..Iaddend.
.Iadd.43. A method of imaging a pattern on a reticle onto a
substrate, comprising: passing a light from the reticle through a
first optical group comprising a lens with a first optical axis;
forming an intermediate image by a light passing through the first
optical group and a second optical group, the second optical group
comprising a concave mirror with a second optical axis; and guiding
a light having passes through the second optical group to the
substrate by passing the light through a dioptric imaging optical
sub-system with a third optical axis, wherein the first optical
axis and the second optical axis intersect, the second optical axis
and the third optical axis intersect, and the first and third
optical axes form a straight optical axis..Iaddend.
.Iadd.44. A method according to claim 43, wherein in said forming
comprises forming a primary image of the reticle..Iaddend.
.Iadd.45. A method according to claim 43, wherein the first and
third optical axes are parallel to each other..Iaddend.
.Iadd.46. A catadioptric imaging optical system used in a
projection exposure apparatus that transfers a pattern on a reticle
which is arranged in a first plane onto a substrate which is
arranged in a second plane, comprising: a first turning mirror
arranged in an optical path between the first plane and the second
plane; a concave mirror arranged in an optical path between the
first turning mirror and the second plane; a second turning mirror
arranged in an optical path between the concave mirror and the
second plane; and a dioptric imaging optical sub-system arranged in
an optical path between the second turning mirror and the second
plane and comprising an optical axis, wherein the first plane and
the second plane are arranged to be parallel to each other, and a
first reflection surface of the first turning mirror and a second
reflection surface of the second turning mirror are arranged to be
non-parallel with each other..Iaddend.
.Iadd.47. A projection exposure apparatus that transfers a pattern
on a reticle onto a substrate, comprising a catadioptric imaging
optical system according to claim 46, wherein said catadioptric
imaging optical system forms the pattern on the reticle off of the
optical axis onto an exposure region on the substrate off of the
optical axis..Iaddend.
.Iadd.48. A projection exposure apparatus according to claim 47,
wherein the reticle and the substrate are scanned at different
speeds corresponding to the magnification of said catadioptric
imaging optical system..Iaddend.
.Iadd.49. A catadioptric imaging optical system according to 46,
wherein the optical axis of said dioptric imaging optical
sub-system forms a straight line..Iaddend.
.Iadd.50. A method of imaging a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, comprising: reflecting a light from the reticle with
a first reflection surface of a first turning mirror; reflecting
the light from the first turning mirror with a concave mirror;
reflecting the light from the concave mirror using a second
reflection surface of a second turning mirror; passing the light
from the second turning mirror to the substrate through a dioptric
imaging optical sub-system having an optical axis; forming an
intermediate image of the pattern in an optical path between the
concave mirror and the dioptric imaging optical sub-system; and
forming an image of the intermediate image on the substrate by the
dioptric imaging optical sub-system, wherein the first plane and
the second plane are arranged in parallel to each other, and the
first and second reflection surfaces are arranged to be
non-parallel with each other..Iaddend.
.Iadd.51. A method according to claim 50, wherein said intermediate
image is a primary image of the reticle..Iaddend.
.Iadd.52. A method according to claim 50, wherein the dioptric
imaging optical sub-system comprises an optical axis along a
straight line..Iaddend.
.Iadd.53. A catadioptric imaging optical system used in a
projection exposure apparatus that transfers a pattern on a reticle
which is arranged in a first plane onto a substrate which is
arranged in a second plane, comprising: a catadioptric imaging
optical sub-system in an optical path between the first plane and
the second plane, the catadioptric imaging optical sub-system
comprising a first optical group with a lens with a first optical
axis, and a second optical group with a concave mirror with a
second optical axis; and a dioptric imaging sub-system with a third
optical axis arranged in an optical path between the catadioptric
imaging optical sub-system and the second plane, wherein the first
optical axis and second optical axis intersect, and the second
optical axis and the third optical axis intersect the first and
third optical axes are parallel to each other, and the first and
third optical axes form a straight optical axis..Iaddend.
.Iadd.54. A method of imaging a pattern on a reticle onto a
substrate, comprising: passing a light from the reticle through a
first optical group comprising a lens with a first optical axis;
forming an intermediate image by a light passing through the first
optical group and a second optical group, the second optical group
comprising a concave mirror with a second optical axis; and guiding
a light having passes through the second optical group to the
substrate by passing the light through a dioptric imaging optical
sub-system with a third optical axis, wherein the first optical
axis and the second optical axis intersect, and the second optical
axis and the third optical axis intersect, the first and third
optical axes are parallel to each other, and the first and third
optical axes form a straight optical axis..Iaddend.
.Iadd.55. A method for projecting a pattern from a reticle onto a
substrate, comprising: transmitting light from the reticle through
a first imaging system, where the transmitted light pass through a
single-pass lens group and a double-pass lens group to a concave
mirror, and the light is reflected from the concave mirror back
through the double-pass lens group toward the single-pass lens
group; separating the light propagating through the double-pass
lens group to the concave mirror from the light propagating through
the double-pass lens group from the concave mirror; with the first
imaging system, forming an intermediate image of the pattern
between the first imaging system and a second imaging system;
directing the light propagating from the concave mirror through the
second imaging system; and forming an image of the reticle on the
substrate with the second imaging system, wherein the single-pass
lens group includes from objectwise to imagewise, a first negative
lens subgroup, a positive lens subgroup, and a second negative lens
subgroup, and the double-pass lens group includes the concave
mirror..Iaddend.
.Iadd.56. A catadioptric imaging optical system in a projection
exposure apparatus that transfers a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, the system comprising: a catadioptric imaging optical
sub-system comprising an optical group to form an image of the
pattern, the optical group comprising a concave mirror with a first
optical axis; and a dioptric imaging sub-system arranged in an
optical path between the catadioptric imaging optical sub-system
and the second plane to re-image the image formed by the
catadioptric imaging optical sub-system, the dioptric imaging
sub-system comprising a second optical axis, wherein the first
optical axis and the second optical axis are not parallel to each
other, the first plane and the second plane are arranged to be
parallel to each other, and the dioptric imaging optical sub-system
further comprises an aperture stop..Iaddend.
.Iadd.57. A catadioptric imaging optical system in a projection
exposure apparatus that transfers a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, the system comprising: a catadioptric imaging optical
sub-system comprising an optical group to form an image of the
pattern, the optical group comprising a concave mirror with a first
optical axis; and a dioptric imaging sub-system arranged in an
optical path between the catadioptric imaging optical sub-system
and the second plane to re-image the image formed by the
catadioptric imaging optical sub-system, the dioptric imaging
sub-system comprising a second optical axis; wherein the first
optical axis and the second optical axis are not parallel to each
other, the first plane and the second plane are arranged to be
parallel to each other, the optical group of said catadioptric
imaging optical sub-system comprises: a first subgroup comprising a
third optical axis, and a second subgroup comprising the concave
mirror and the first optical axis, and the third optical axis and
the second optical axis intersect..Iaddend.
.Iadd.58. A method of imaging a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, comprising: forming an intermediate image of the
pattern on the reticle using a catadioptric imaging optical
sub-system, the catadioptric imaging optical sub-system comprising
an optical group comprising a concave mirror and a first optical
axis; and re-imaging the intermediate image formed by the
catadioptric imaging optical sub-system onto the substrate using a
dioptric imaging sub-system arranged in an optical path between the
catadioptric imaging optical sub-system and the second plane, the
dioptric imaging sub-system comprising a second optical axis,
wherein the first optical axis and the second optical axis
intersect, the first plane and the second plane are arranged to be
parallel with each other, and the dioptric imaging sub-system
comprises an aperture stop..Iaddend.
.Iadd.59. A method of imaging a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, comprising: forming an intermediate image of the
pattern of the reticle using a catadioptric imaging optical
sub-system, the catadioptric imaging optical sub-system comprising
an optical group comprising a concave mirror and a first optical
axis; and re-imaging the intermediate image formed by the
catadioptric imaging optical sub-system onto the substrate using a
dioptric imaging sub-system arranged in an optical path between the
catadioptric imaging optical sub-system and the second plane, the
dioptric imaging sub-system comprising a second optical axis,
wherein the first optical axis and the second optical axis
intersect, the first plane and the second plane are arranged to be
parallel with each other, and the optical group of the catadioptric
imaging optical sub-system comprises a first subgroup comprising a
third optical axis, and a second subgroup comprising the concave
mirror and the first optical axis, and the third optical axis and
the second optical axis intersect..Iaddend.
.Iadd.60. A catadioptric imaging optical system in a projection
exposure apparatus that transfers a pattern on a reticle which is
arranged in a first plane onto a substrate which is arranged in a
second plane, the system comprising: a catadioptric imaging optical
sub-system comprising an optical group to form an image of the
pattern, the optical group comprising a concave mirror with a first
optical axis; a dioptric imaging sub-system arranged in an optical
path between the catadioptric imaging optical sub-system and the
second plane to re-image the image formed by the catadioptric
imaging optical sub-system, the dioptric imaging sub-system
comprising a second optical axis; a first turning mirror arranged
in an optical path between the concave mirror and the dioptric
imaging optical sub-system; and a second turning mirror arranged in
an optical path between the concave mirror and the first plane,
wherein the first optical axis and the second optical axis are not
parallel to each other, the reticle and the substrate are arranged
to be parallel to each other, the optical group of said
catadioptric imaging optical sub-system comprises: a first subgroup
comprising a third optical axis, and a second subgroup comprising
the concave mirror and the first optical axis; and the third
optical axis and the second optical axis intersect..Iaddend.
Description
FIELD OF THE INVENTION
This invention pertains to catadioptric projection systems suitable
for use with ultraviolet light sources and applicable to steppers
and microlithography systems for the manufacture of semiconductors
and liquid crystal display panels.
BACKGROUND OF THE INVENTION
Semiconductor device geometries continue to grow smaller. Because
the manufacture of semiconductor devices requires the transfer of
high-resolution circuit patterns be transferred to semiconductor
wafers, the microlithography systems that project these circuit
patterns onto semiconductor wafers must form high-resolution
images.
The resolution of microlithography systems has been improved in
several ways. For example, high-resolution microlithography systems
use ultraviolet light instead of visible light and have high
numerical aperture optical systems.
Various types of high-resolution optical projection systems have
been considered for high-resolution microlithography systems.
Purely refractive projection systems are inadequate .[.al.].
.Iadd.at .Iaddend.ultraviolet wavelengths. For wavelengths below
300 nm, only a few optical materials are transmissive and
refractive optical elements generally must be made of either
synthetic fused quartz or fluorite. Unfortunately, combining
optical elements of synthetic fused quartz and fluorite is
ineffective in eliminating chromatic aberration because the Abbe
numbers of synthetic quartz and fluorite are not sufficiently
different. Therefore, refractive optical systems for wavelengths
less than about 300 nm suffer from unacceptable levels of chromatic
aberration.
Fluorite itself suffers from several disadvantages. The refractive
index of fluorite changes relatively rapidly with temperature and
fluorite polishes poorly. Therefore, most ultraviolet optical
systems do not use fluorite, and thus exhibit uncorrected chromatic
aberration.
Purely reflective projection systems avoid these difficulties, but
a reflective projection system typically requires a large diameter
mirror; frequently, the mirror must be aspheric. Because the
manufacture of precision aspheric surfaces is extremely difficult,
a reflective projection system using an aspheric mirror is
prohibitively expensive.
Catadioptric projection systems have also been used. A catadioptric
projection system is a projection system that uses both reflective
elements (mirrors) and refractive elements (lenses). Many
catadioptric projection systems for microlithography systems form
at least one intermediate image within the optical system. Examples
include the catadioptric projection systems of Japanese laid-open
patent documents 5-25170 (1993), 63-163319 (1988), and 4-234722
(1992), and U.S. Pat. No. 4,779,966.
Japanese laid-open patent document 4-234722 (1992) and U.S. Pat.
No. 4,779,966 describe catadioptric projection systems comprising a
concave mirror and double-pass lens groups having negative power.
In these systems, an incident light beam propagates through the
double-pass lens group in a first direction, strikes the concave
mirror, and then propagates as a reflected light beam through the
double-pass lens group in a second direction opposite to the first
direction. In these prior-art systems, the double-pass lens groups
have negative power. For this reason, light incident to the concave
mirror is divergent and the diameter of the concave mirror must be
large.
The double-pass optical system of Japanese laid-open patent
document 4-234722 (1992) is symmetric; aberrations in this optical
system are extremely low, simplifying aberration correction in the
subsequent refractive optical system. However, because it is
symmetric, the optical system has a short working distance. In
addition, because it is difficult with this system to separate the
incident light beam and the reflected light beam, a beamsplitter is
required. The preferable location for the beamsplitter in such a
projection system is near the concave mirror. Consequently, the
beamsplitter is large, heavy, and expensive.
The optical system of U.S. Pat. No. 4,779,966 comprises a concave
mirror in a second imaging system. In this system, diverging light
enters the concave mirror and the concave mirror must have a large
diameter.
Optical systems comprising more than one mirror can use fewer
lenses than a purely refractive optical system, but other problems
arise. In order to increase resolution and depth of focus,
phase-shift masks are frequently used. In order to effectively use
a phase-shift mask, the ratio .[.a.]. .Iadd..sigma. .Iaddend.of the
numerical aperture of the irradiation optical system and the
numerical aperture of the projection system should be variable.
While an adjustable aperture is easily located in the irradiation
optical system, a catadioptric projection system usually has no
suitable location for a corresponding aperture, adjustable or
not.
In a catadioptric projection system in which a double-pass lens
group is placed within a demagnifying portion of the optical
system, the demagnification reduces the distance between the
reflecting elements and the semiconductor wafer. This limits the
number of lens elements that can be inserted in the optical path,
and thus limits the numerical aperture of the projection system and
the total optical power available to expose the wafer. Even if a
high numerical aperture is possible the working distance (i.e., the
distance between the wafer and the most imagewise surface of the
optical system) is short.
Prior-art catadioptric projection systems have optical elements
arranged along more than one axis, using prisms or mirrors to fold
the optical pathway. The alignment of optical elements in a system
with more than one axis is expensive and difficult, especially when
high resolution is required. Prior-art catadioptric projection
systems are also difficult to miniaturize while simultaneously
maintaining image quality. In addition, in a miniaturized prior-art
catadioptric projection system, the beam-separation mirror that
separates the incident light beam from the reflected light beam is
likely to obstruct one of these beams.
Increasing the magnification of the intermediate image and moving
the beam-separation mirror away from the optical axis have been
considered as solutions to this problem. However, changing the
magnification of the intermediate image requires changes to the
remainder of the optical system to maintain an appropriate
magnification on the wafer. This causes loss of image quality.
Moving the beam-separation mirror away from the optical axis
without changing the magnification of the intermediate image can be
accomplished by using light beams propagating farther off-axis and
increasing the diameter of the projection system. Both of these
changes are undesirable, leading to a larger, heavier projection
system with less resolution.
Some prior-art catadioptric projection systems are used in
full-field exposure systems in which patterns from an entire
reticle are projected onto the wafer in a single exposure. Examples
include the catadioptric projection systems of Japanese laid-open
patent documents 2-66510 (1990), 3-282527 (1991), and 5-72478
(1993), and U.S. Pat. No. 5,089,913. These systems have a
beamsplitter (or a partially reflecting mirror) placed near a
concave mirror. The beamsplitter directs light to the concave
mirror and to the wafer. Because the light is divergent near the
concave mirror, the beamsplitter must be large. Large beamsplitters
made of prisms are expensive and difficult to manufacture;
plate-type beamsplitters are difficult to keep precisely planar.
Large prisms have other disadvantages, including their weight and
the difficulty of obtaining suitable raw material for their
manufacture. A large beamsplitter tends to degrade image quality
because of non-uniform reflectance, phase change, and absorption.
For ultraviolet projection systems, a prism beamsplitter tends to
have low transmittance.
In view of the foregoing, improved catadioptric projection systems
for microlithography systems are needed.
SUMMARY OF THE INVENTION
This invention provides catadioptric projection systems that are
readily miniaturized while maintaining image quality. A
catadioptric projection system according to this invention
comprises a first imaging system and a second imaging system. The
first imaging system comprises a single-pass lens group and a
double-pass lens group including a concave mirror. Light from an
illuminated region of the reticle returns through the single-pass
lens group and then enters the double-pass lens group. Light
propagates through the double-pass lens group in a first direction,
strikes the concave mirror, and then returns through the
double-pass lens group in a second direction opposite the first
direction. A turning mirror is provided between the single-pass
lens group and the double-pass lens group. In some embodiments of
the invention, the turning mirror directs the light from the first
imaging system (after reflection by the concave mirror and back
through the double-pass lens group) to the second imaging system.
In alternative embodiments of the invention, the turning mirror
directs light exiting the single-pass lens group to the double-pass
lens group. The first imaging system forms an intermediate image of
the illuminated region of the reticle near the turning mirror; the
second imaging system re-images the intermediate image and forms an
image of the illuminated region of the reticle on a substrate,
typically a semiconductor wafer.
In such catadioptric projection systems, the diameter of the
concave mirror can be kept small, the ratio of the
imaging-optical-system numerical aperture and the
illumination-optical-system numerical aperture .sigma. can be
variable, and an appropriate location is available for an aperture
if phase-shift masks are used. In addition, such catadioptric
projection systems have high numerical apertures and hence provide
sufficient irradiation to the wafer as well as conveniently long
working distances.
The second imaging system comprises a first lens group and a second
lens group.
The single-pass lens group comprises, in order starting at the
reticle, a first negative subgroup, a positive subgroup, and a
second negative subgroup. Single-pass optical groups with this
configuration are compact, producing high-resolution images, and
permit separation of incident and reflected light beams. The
magnification of the first imaging system can be selected as
appropriate while still maintaining excellent optical performance.
Thus, the magnification of the intermediate image can be varied.
Preferably, either the first imaging system or the second imaging
system demagnifies the reticle. Obtaining a demagnification using
the first imaging system simplifies the second imaging system.
The first negative subgroup preferably comprises a lens with a
concave surface facing the reticle. The second negative subgroup
preferably comprises a lens element with a concave surface facing
the double-pass lens group.
In one example embodiment, the first imaging system further
comprises another turning mirror that receives light transmitted by
the single-pass lens group and directs the light along an axis of
the double-pass lens group. This embodiment permits the reticle and
the wafer to be on substantially the same optical axis.
In another example embodiment, the second imaging system comprises
further comprises a turning mirror placed between the first lens
group and the second lens group. This turning mirror receives light
from the first lens group and directs the light along an axis of
the second lens group. This embodiment permits the reticle and
wafer to be in parallel planes.
Embodiments of the invention in which the reticle and wafer are in
parallel planes or are along the same axis simplify wafer exposure
in scanning systems. It will be readily apparent that the invention
includes other arrangements of turning mirrors.
The foregoing and other objects, features, and advantages of the
invention will become more apparent from the following detailed
description which proceeds with reference to the accompanying
drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a general schematic representation of an optical system
according to the invention.
FIG. 2 shows a catadioptric projection system according to a first
example embodiment of the invention.
FIG. 3 is a detailed drawing of the first example embodiment of
FIG. 2 with the catadioptric projection system unfolded for
simplicity.
FIG. 4 contains graphs of transverse aberrations of the optical
system of the first example embodiment at various image
heights.
FIG. 5 shows a catadioptric projection system according to a second
example embodiment of the invention.
FIG. 6 shows a catadioptric projection system according to a third
example embodiment of the invention.
FIG. 7 is a general schematic representation of a prior-art optical
system.
DETAILED DESCRIPTION
For purposes of describing the invention, a "lens element" is a
single lens (i.e., a single piece of "glass"); a lens "group" or
"subgroup" comprises one or more lens elements. A positive lens,
lens group, or subgroup has a positive focal length; a negative
lens, lens group, or subgroup has a negative focal length. An
"optical axis" is a straight line through centers of curvature of
surfaces of optical elements. As will be apparent, an optical
system can have more than one optical axis. Distances from an
off-axis point to an optical axis are measured along a line through
the point and perpendicular to the optical axis.
In order to describe the invention, a representation of a prior-art
optical system is first described with reference to FIG. 7. A ray
102 from a location on a reticle R a distance d from an optical
axis 100 is incident on a lens group A.sub.1. The lens group
A.sub.1 comprises, in order from the reticle R and along the
optical axis 100, a positive subgroup A.sub.12 and a negative
subgroup A.sub.13. The lens group A.sub.1 bends the ray 102 toward
the optical axis 100 so that the height b of the ray 102 as it
exits the negative subgroup A.sub.13 is reduced. For this reason,
the optical path of the ray 102 is easily blocked by a mirror
M.sub.2 placed after the negative subgroup A.sub.13.
The present invention avoids this problem. With reference to FIG.
1, a ray 202 from a location on a reticle R a distance d from an
optical axis 200 is incident to a lens group A.sub.1 comprising, in
order from the reticle R, a first negative subgroup A.sub.11, a
positive subgroup A.sub.12, and a second negative subgroup
A.sub.13. The first negative subgroup A.sub.11, bends the ray 202
away from the optical axis 200. The positive subgroup A.sub.12 then
bends the ray 202 towards the optical axis 200. The height a of the
ray 202 exiting the second negative subgroup A.sub.13 is thus
increased in comparison with the prior-art system of FIG. 7,
thereby reducing the likelihood of obstruction of the ray 202 by a
mirror M.sub.2.
Because rays from the reticle R are more distant from the optical
axis 200, the lens group A.sub.1 of FIG. 1 reduces the possibility
of obstruction of rays from the reticle R by the mirror M.sub.2.
Optical systems using such lens groups can be more compact and
provide enhanced image quality in comparison with prior-art optical
systems.
FIG. 2 shows a first example embodiment of the invention. The first
example embodiment provides a catadioptric projection system that
projects a demagnified image of a circuit pattern from an
illuminated region 221 (FIG. 2(a)) of a reticle R onto a
semiconductor wafer W. The illumination region 221 is illuminated
by an illumination optical system, not shown in FIG. 2. Such a
projection system can project a pattern onto other substrates as
well, such as a glass panel for a liquid crystal display, and it is
apparent that the invention is not limited to systems for
projecting circuit patterns onto semiconductor wafers. (Thus, it
will be understood that "wafer" as used herein encompasses any of
various appropriate substrates onto which an image, defined by the
reticle R, can be projected.) In the example embodiments presented
herein, the optical projection systems are intended for use at
wavelengths around 193 nm but it will be apparent that the
invention is also applicable to other wavelengths.
The optical projection system (FIG. 2(b)) of the first example
embodiment comprises a first imaging system A that receives light
from the illuminated region 221 of the reticle R and forms an
intermediate image of the illuminated region. The optical
projection system further comprises a turning mirror M.sub.2 placed
near the intermediate image and a second imaging system B that
receives light reflected by the turning mirror M.sub.2. The second
imaging system B re-images the intermediate image onto a
corresponding region 231 on the wafer W (FIG. 2(c)).
The first imaging system A comprises a single-pass lens group
A.sub.1 and a double-pass lens group A.sub.2. In order from the
reticle R and along an optical axis 210, the single-pass lens group
A.sub.1 comprises a first negative subgroup A.sub.11 comprising a
negative lens with a concave surface facing toward the reticle R
and a positive lens. Continuing along the optical axis 210 from the
first negative subgroup A.sub.11, the single-pass lens group
A.sub.1 further comprises a positive subgroup A.sub.12 comprising
preferably a single positive lens element, and a second negative
subgroup A.sub.13 comprising a negative lens element with a concave
surface facing the double-pass lens group A.sub.2. The second
negative subgroup A.sub.13 is the closest of the subgroups of the
single-pass lens group A.sub.1 to the double-pass lens group
A.sub.2.
The double-pass lens group A.sub.2 is placed along the optical axis
210 and receives light from the single-pass lens group A.sub.1 and
directs light to a concave mirror M.sub.1 of the double-pass
optical group A.sub.2, placed on the optical axis 210. The concave
mirror M.sub.1 reflects light back through the double-pass lens
group A.sub.2. After passing through the double-pass lens group
A.sub.2, the light forms an image near the turning mirror M.sub.2.
The turning mirror M.sub.2 reflects light from the first imaging
system A to the second imaging system B. The turning mirror M.sub.2
directs light propagating along the optical axis 210 to propagate
along an optical axis 211 of the second imaging system.
The second imaging system B comprises, beginning near the turning
mirror M.sub.2 and proceeding along the optical axis 211, a first
lens group B.sub.1 and a second lens group B.sub.2. An aperture S
is placed between the first lens group B.sub.1 and the second lens
group B.sub.2.
FIG. 3 shows the optical system of the first embodiment in detail.
For clarity, the folded optical path caused by the concave mirror
M.sub.1 and the turning mirror M.sub.2 has been unfolded by
inserting virtual flat mirrors immediately behind the concave
mirrors M.sub.1 and the turning mirror M.sub.2. These virtual
mirrors are not actually part of the first example embodiment but
serve to simplify FIG. 3. Such an unfolded representation of a
catadioptric optical system will be readily understood by persons
of ordinary skill in the art.
Table 1 contains specifications for the first example embodiment.
In Table 1, the first column lists surface numbers, numbered from
the reticle R to the wafer W. Surface numbers relevant to this
discussion are specifically denoted in FIG. 3. The second, third,
and fourth columns of Table 1 list the radii of curvature of the
optical surfaces ("r"), surface separations ("d") along the optical
axis, and the lens material, respectively. The fifth column
indicates the group number for each of the optical elements.
Distances are in mm. Some of the surfaces of Table 1 represent
plane mirrors and other planar surfaces used to simplify FIG. 3;
such surfaces do not represent actual optical elements.
Table 1 lists the elements of the double-pass lens group A.sub.2
twice. Surfaces indicated as part of the lens group A.sub.2 are
surfaces through which pass light propagates immediately after
propagating through the single-pass lens group A.sub.1; the same
surfaces through which the light propagates immediately after
reflection from the concave mirror M.sub.1 are indicated as
belonging to the lens group A.sub.2*. As will be apparent, the
concave mirror M.sub.1 is included only once.
The lenses of the first embodiment are made of synthetic fused
quartz (SiO.sub.2) and fluorite (CaF.sub.2). Axial chromatic
aberration and chromatic difference of magnification (lateral
color) are corrected for a wavelength range of .+-.0.1 nm about a
wavelength of 193 nm for use with an ultraviolet excimer laser
emitting at a wavelength of 193 nm. The Abbe numbers .nu..sub.193
given are for fluorite and synthetic fused quartz at wavelengths of
193 nm .+-.0.1 nm instead of the customary visible wavelengths; the
refractive indices n are for a wavelength of 193 nm.
As specified in Table 1, the optical projection system of the first
example embodiment provides a demagnification of the reticle R on
the wafer W of 1/4, a wafer-side numerical aperture of 0.6, and
covers a span of 76 mm of the reticle R.
TABLE-US-00001 TABLE 1 (First Example Embodiment) Lens Material
Properties Index of Refraction Abbe Number Material (n)
.nu..sub.193 Fused Quartz 1.56019 1780 (SiO.sub.2) Fluorite 1.50138
2550 (CaF.sub.2) Optical System Specifications Surf. No. r d
Material Group 0 -- 70.000000 R 1 -497.01528 15.000000 CaF.sub.2
A.sub.11 2 -2089.03221 0.100000 3 4955.40172 35.000000 SiO.sub.2
A.sub.11 4 -684.52303 0.100000 5 373.53254 40.000000 SiO.sub.2
A.sub.12 6 -458.84391 32.494228 7 -384.75862 15.000000 SiO.sub.2
A.sub.13 8 399.06352 11.499839 9 .infin. 0 10 .infin. 15.000000 11
.infin. 0 12 .infin. 30.000000 13 .infin. 0 14 .infin. 15.805933 15
360.53651 60.00000 CaF.sub.2 A.sub.2 16 -357.18478 1.00000 17
-410.75622 15.00000 SiO.sub.2 A.sub.2 18 272.78252 3.000000 19
264.76319 55.000000 CaF.sub.2 A.sub.2 20 -403.51844 8.000000 21
-313.01237 15.000000 SiO.sub.2 A.sub.2 22 -536.13663 141.754498 23
753.93969 16.200000 SiO.sub.2 A.sub.2 24 350.20343 24.941513 25
502.28185 22.5000000 SiO.sub.2 A.sub.2 26 1917.58499 72.939269 27
696.45818 25.920000 CaF.sub.2 A.sub.2 28 422.44154 45.000000 29
-165.29930 15.000000 SiO.sub.2 A.sub.2 30 -247.15361 7.435835 31
447.76970 40.000000 SiO.sub.2 A.sub.2 32 -650.53438 176.819005 33
-207.03257 15.000000 SiO.sub.2 A.sub.2 34 3807.25755 27.000000 35
.infin. 0 36 316.26451 27.000000 (M.sub.1) A.sub.2 37 -3807.25755
15.000000 SiO.sub.2 A.sub.2* 38 207.03257 176.819005 39 650.53438
45.000000 SiO.sub.2 A.sub.2* 40 -447.76970 7.435035 41 247.15361
15.000000 SiO.sub.2 A.sub.2* 42 165.29930 45.000000 43 -422.44154
25.920000 CaF.sub.2 A.sub.2* 44 -696.45818 72.939269 45 -1917.58499
22.500000 SiO.sub.2 A.sub.2* 46 -502.28185 24.941513 47 -350.20343
16.20000 SiO.sub.2 A.sub.2* 48 -753.93969 141.754498 49 536.13663
15.000000 SiO.sub.2 A.sub.2* 50 313.01237 8.000000 51 403.51844
55.000000 CaF.sub.2 A.sub.2* 52 -264.76319 3.000000 53 -272.78252
15.000000 SiO.sub.2 A.sub.2* 54 410.75622 1.000000 55 357.18478
60.000000 CaF.sub.2 A.sub.2* 56 -360.53651 15.805933 57 .infin. 0
58 .infin. 30.000000 59 .infin. 0 60 .infin. 130.000000 M.sub.2 61
408.08942 20.000000 SiO.sub.2 B.sub.1 62 203.49020 3.000000 63
207.52684 30.000000 CaF.sub.2 B.sub.1 64 19354.35793 0.1000000 65
429.85442 35.000000 SiO.sub.2 B.sub.1 66 -403.83438 14.478952 67
-353.07980 15.000000 SiO.sub.2 B.sub.1 68 261.24968 31.363884 69
-219.57807 23.000000 SiO.sub.2 B.sub.1 70 -348.23898 1.990938 71
502.56605 40.000000 CaF.sub.2 B.sub.1 72 -747.25197 421.724019 73
638.73572 29.16000 SiO.sub.2 B.sub.1 74 -809.39570 0.079197 75
316.55680 32.805000 SiO.sub.2 B.sub.1 76 309.57052 15.000000 77 --
54.627545 S 78 213.28576 51.714104 CaF.sub.2 B.sub.2 79 -7409.32571
13.778100 80 -616.12401 39.000000 SiO.sub.2 B.sub.2 81 -1209.66082
0.373771 82 472.08983 39.000000 SiO.sub.2 B.sub.2 83 1043.43948
0.267894 84 103.01598 49.409891 SiO.sub.2 B.sub.2 85 77.85822
9.349712 86 81.54405 32.465682 CaF.sub.1 B.sub.2 87 6656.48506
3.061800 88 -400.35184 13.094819 SiO.sub.2 B.sub.2 89 -922.72813
1.399628 90 1101.31959 16.951746 SiO.sub.2 B.sub.2 91 -554.93213
1.641793 92 1392.34272 16.702978 SiO.sub.2 B.sub.2 93 3939.24661
15.000000 94 .infin. W
FIG. 4 provides graphs of transverse aberrations of the first
example embodiment for several values of image height Y at three
wavelengths. As is apparent from FIG. 4, the transverse aberrations
are well-corrected even at the full numerical aperture.
In the first example embodiment, the optical projection system does
not project the entire reticle R onto the wafer W in a single
exposure. Rather, as shown in FIG. 2(a), an illuminated region 221
of the reticle R is projected onto a corresponding exposure region
231 on the wafer W (FIG. 2(c)). In the first embodiment, the
illuminated region 221 is rectangular, 120 mm long and 24 mm wide.
The length of the illuminated region 221 is symmetrically placed
with respect to a line 222 perpendicular to the optical axis 210.
The width of the illuminated region 221 is such that the
illuminated region 221 extends from 52 mm to 76 mm from a line 223
perpendicular to the optical axis 210.
The pattern from the entire reticle R is transferred to the wafer W
by synchronously scanning both the reticle R and the wafer W during
exposure of the wafer W. Arrows 241, 242 indicate the scan
directions for the reticle R and the wafer W, respectively. It will
be apparent that other shapes and sizes of the illuminated region
can be used.
In the first example embodiment, the turning mirror M.sub.2
.[.so.]. receives light reflected by the concave mirror M.sub.1 and
directs the light to the second imaging system B. The invention
also provides an alternative arrangement in which the turning
mirror M.sub.2 receives light from the single-pass lens group and
directs the light to the double-pass lens group and the concave
mirror M.sub.1. Light reflected by the concave mirror M.sub.2 then
propagates directly to the second imaging system without reflection
by the turning mirror M.sub.1. In the first example embodiment and
in such a modification of the first example embodiment, the turning
mirror M.sub.1 thus separates light propagating from the
double-pass optical group A.sub.2 and light propagating to the
double-pass optical group A.sub.2.
A second example embodiment of the invention is shown in FIG. 5.
The optical projection system of FIG. 5 is similar to that of the
embodiment of FIG. 2. Light from an illuminated region 321 (FIG.
3(a)) of a reticle R is directed to, beginning nearest the reticle
R and along an optical axis 310, a single-pass lens group A.sub.1
comprising a first negative subgroup A.sub.11, a positive subgroup
A.sub.12 and a second negative subgroup A.sub.13. After the second
negative subgroup A.sub.13, a turning mirror .[.MO.]. .Iadd.M.sub.0
.Iaddend.reflects the light along an optical axis 311 of a
double-pass lens group A.sub.2 including a concave mirror .[.Ml.].
.Iadd.M.sub.1.Iaddend.. Light is transmitted by the double-pass
lens group A.sub.2 and is reflected by the concave mirror M.sub.1
back through the double-pass lens group A.sub.2 to a turning mirror
M.sub.2. An intermediate image of the illuminated region 321 is
formed near the turning mirror M.sub.2.
The turning mirror M.sub.2 directs the light from the
.[.illumi-nated.]. .Iadd.illuminated .Iaddend.region of the reticle
R along the optical axis 310 which is an optical axis of the second
imaging system B as well as of the single-pass lens group A.sub.1.
The second imaging system B receives light from the turning mirror
M.sub.2 and re-images the intermediate image onto a corresponding
region 331 on the wafer W. As will be apparent, the second
embodiment differs from the first embodiment in that the turning
mirror M.sub.0 is placed between the single-pass lens group A.sub.1
and the double-pass lens group A.sub.2. The turning mirror M.sub.0
permits the reticle R and the wafer W to be in parallel planes. As
shown in FIG. 5, the reticle R and the wafer W are along the same
optical axis 312.
With reference to FIG. 6, an optical system according to a third
example embodiment of the invention differs from the first
embodiment in that a turning mirror M.sub.3 is placed between the
first lens group B.sub.1 and the second lens group B.sub.2 of the
second imaging system B. As a result of the reflection by the
turning mirror M.sub.3, the optical system of the third example
embodiment transfers a pattern from an illuminated region 421 of
the reticle R (FIG. 6(a)) to the wafer W wherein the reticle R and
the wafer W are in parallel planes. Unlike the second example
embodiment, the wafer W and the reticle R of the third example
embodiment are on separate optical axes 401, 402 of the first
imaging system A and the second lens group B.sub.2 of the second
imaging system B, respectively.
In the third example embodiment, the turning mirror M.sub.2
receives light reflected by the concave mirror M.sub.1 and directs
the light to the second imaging system B. The invention also
provides an alternative arrangement in which the turning mirror
M.sub.2 receives light from the single-pass lens group and directs
the light to the double-pass lens group and the concave mirror
M.sub.1. Light reflected by the concave mirror M.sub.2 then
propagates directly to the second imaging system without reflection
by the turning mirror M.sub.1.
The first, second, and third example embodiments are similar to
each other, but differing in respect to the number and placement of
turning mirrors. Therefore, these example embodiments provide the
same image quality.
In each of the example embodiments described above, the single-pass
lens group A.sub.1 comprises a first negative subgroup, a positive
subgroup, and a second negative subgroup. The catadioptric
projection systems of this invention are readily miniaturized with
no loss of image quality. While FIGS. 2, 5, and 6 show a scanning
exposure of the wafer W, the catadioptric projection systems of
this invention can also be used for full-field exposure.
The catadioptric projection systems of the present invention
include several other favorable characteristics. First, a turning
mirror (or a beamsplitter) can be placed near the intermediate
image, thereby reducing the size of the turning mirror. Second,
unlike conventional catadioptric projection systems that allow
light reflected by a mirror to overlap with the incident light
(which makes placement of the aperture S difficult), the
catadioptric projection systems of the present invention allow the
aperture S to be placed in the second imaging system B so that the
ratio of the numerical apertures of an irradiation optical system
to the catadioptric projection system .sigma. can be easily varied.
Third, by increasing the number of lens elements in the second
imaging system B, the numerical aperture of the catadioptric
projection system according to the invention can be increased.
Fourth, re-imaging the intermediate image by the second imaging
system B provides a long working distance. Fifth, the catadioptric
projection systems of the invention are compact. Finally, because
light reflected from the concave mirror M.sub.1 is returned near
the focused image, off-axis lens aberrations are reduced.
With the additional turning mirrors of the second and third example
embodiments, the relative orientations of the reticle R and the
wafer W can be adjusted. I.e., the second example embodiment, the
reticle R and wafer W are parallel to each other and on the same
optical axis. In the third example embodiment, the reticle R and
the wafer W are parallel to each other but are situated on offset
but parallel optical axes. Thus, the present invention permits
orienting the reticle R and the wafer W in a way allowing
simplification of the scanning systems.
The catadioptric projection systems of the example embodiments also
permit the turning mirrors to closely approach the respective
optical axes. Therefore, light reflected by the concave mirror
M.sub.1 back through the double-pass lens group A.sub.2 is easily
separated from the light propagating from the single-pass lens
group A.sub.1 to the double-pass lens group A.sub.2. Because the
turning mirror or mirrors are situated close to the respective
optical axes, light need not propagate at large angles with respect
to the optical axes and off-axis aberrations are reduced. Prior-art
systems often require angles of 20.degree. or more while the
catadioptric projection systems of this invention use angles no
greater than about 10.degree..
Some prior-art scanning projection systems expose an annulus of the
wafer from a corresponding annular illuminated region of the
reticle. The reticle and wafer are scanned at different speeds
corresponding to the magnification of the optical projection
system. Because such scanning exposure systems expose only small
areas of the wafer W at any give instant, complete exposure of the
wafer W requires many incremental exposures. If the light from a
radiation source is used inefficiently, exposure times will be
long. Because the catadioptric projection systems of this invention
do not require large angles for separating light incident to and
exiting from the concave mirror, the catadioptric projection
systems can have high numerical apertures, thereby reducing
exposure times.
Because the first imaging system A and the second imaging system B
are independent of each other, manufacture and alignment are
simple.
Having illustrated and demonstrated the principles of the invention
in a example embodiments, it should be apparent to those skilled in
the art that the example embodiments can be modified in arrangement
and detail without departing from such principles. I claim as the
invention all that comes within the scope of these claims.
* * * * *