U.S. patent number RE39,020 [Application Number 09/478,370] was granted by the patent office on 2006-03-21 for plasma process apparatus.
This patent grant is currently assigned to Tokyo Electron, Ltd.. Invention is credited to Kiichi Hama, Jiro Hata, Toshiaki Hongoh.
United States Patent |
RE39,020 |
Hama , et al. |
March 21, 2006 |
Plasma process apparatus
Abstract
A plasma CVD apparatus for forming a silicon film on an LCD
substrate includes a container which is divided into process and
upper chambers by a quartz partition plate. A work table on which
the substrate is mounted is arranged in the process chamber and a
lower electrode to which a high frequency potential is applied is
arranged in the work table. First lower and second upper supply
heads are arranged between the partition plate and the work table
in the process chamber. SiH.sub.4 and H.sub.2 gas and He gases are
supplied through the first and second supply heads. He gas is
transformed into plasma while SiH.sub.4 and H.sub.2 gas is excited
and decomposed by the plasma thus formed. Two coils are arranged in
the upper chamber and high frequency voltages are applied to the
coils to generate electromagnetic field to induce the transforming
of He gas into plasma. High frequency voltages applied to the coils
are the same in phase and directions of current flowing through
adjacent portions of the coils are the same.
Inventors: |
Hama; Kiichi (Chino,
JP), Hata; Jiro (Yamanashi-ken, JP),
Hongoh; Toshiaki (Yamanashi-ken, JP) |
Assignee: |
Tokyo Electron, Ltd. (Tokyo,
JP)
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Family
ID: |
27302230 |
Appl.
No.: |
09/478,370 |
Filed: |
February 16, 2000 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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08357423 |
Dec 16, 1994 |
5525159 |
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Reissue of: |
08624102 |
Mar 29, 1996 |
05792261 |
Aug 11, 1998 |
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Foreign Application Priority Data
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Dec 17, 1993 [JP] |
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5-343871 |
Mar 23, 1994 [JP] |
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6-076717 |
Mar 23, 1994 [JP] |
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6-076727 |
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Current U.S.
Class: |
156/345.48;
118/723AN; 156/345.29; 156/345.37; 156/345.26; 118/723R; 118/723I;
118/715 |
Current CPC
Class: |
C23C
16/45563 (20130101); C23C 16/455 (20130101); H01J
37/3244 (20130101); C23C 16/45565 (20130101); C23C
16/5096 (20130101); H01J 37/32449 (20130101); C23C
16/50 (20130101); C23C 16/4586 (20130101); C23C
16/466 (20130101); H01J 37/3211 (20130101); C23C
16/4404 (20130101); C23C 16/505 (20130101) |
Current International
Class: |
H01L
21/00 (20060101); C23C 16/00 (20060101) |
Field of
Search: |
;118/723I,723IR,723AN,723R,723E,723ER,715,723MW,723ME,723MR,723MA
;156/345,345.48,345.49,345.41,345.47 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Alejandro-Mulero; Luz
Attorney, Agent or Firm: Finnegan, Henderson, Farabow,
Garrett & Dunner, LLP
Parent Case Text
This is a continuation of application Ser. No. 08/357,423, filed on
Dec. 16, 1994, now U.S. Pat. No. 5,525,159.
Claims
What is claimed is:
.[.1. An apparatus for processing a process region of a substrate;
using a plasma, comprising: a container substantially formed of a
conductive material; a partition plate dividing said container into
an air-tight process chamber and an air-tight auxiliary chamber,
and having a window plate made of dielectric; a main pump exhaust
for exhausting and setting said process chamber to a vacuum; a work
table arranged in said process chamber and having a support face
facing said window plate, said substrate being mounted on said
support face, with said process region facing said window plate; a
main supply for supplying a process gas between said window plate
and said substrate mounted on said support face, at least part of
said process gas being transformed into said plasma; an induction
electrode, for generating electromagnetic field between (1) said
wondow plate and (2) said substrate mounted on said support face,
to induce generation of said plasma, and including a coil arranged
in said auxiliary chamber and facing said window plate; a power
supply section for applying a high frequency voltage to said coil;
an auxiliary exhaust pump for exhausting and setting said auxiliary
chamber to a vacuum; and a pressure controller connected to said
auxiliary exhaust pump for keeping a pressure difference between
pressures in said process and auxiliary chambers at a minimum
value..].
.[.2. The apparatus according to claim 1, further comprising
grounding means for grounding said container..].
.[.3. The apparatus according to claim 1, wherein said pressure
controller is connected to said main exhaust pump..].
.[.4. The apparatus according to claim 1, further comprising a
cooler for cooling said coil..].
.[.5. The apparatus according to claim 1, further comprising an
auxiliary supply for supplying an inactive gas into said auxiliary
chamber..].
.[.6. The apparatus according to claim 5, wherein said inactive gas
supplied into said auxiliary chamber is a coolant, by which said
coil is cooled..].
.[.7. The apparatus according to claim 6, wherein said auxiliary
supply comprises a shower head arranged above said coil and having
a plurality of gas supply holes facing said coil..].
.[.8. The apparatus according to claim 1, further comprising a seat
arranged on said window plate and supporting said coil..].
9. .[.The.]. .Iadd.An .Iaddend.apparatus .[.according to claim 8.].
.Iadd.for processing a process region of a substrate using a plasma
comprising: a container substantially formed of a conductive
material; a partition plate dividing said container into an
air-tight process chamber and an air-tight auxiliary chamber, and
having a window plate made of dielectric; a main exhaust pump for
exhausting and setting said process chamber to a vacuum; a work
table arranged in said process chamber and having a support face
facing said window plate, said substrate being mounted on said
support face, with said process region facing said window plate; a
main supply for supplying a process gas between said window plate
and said substrate mounted on said support face, at least part of
said process gas being transformed into said plasma; an induction
electrode, for generating electromagnetic field between (1) said
window plate and (2) said substrate mounted on said support face,
to induce generation of said plasma, and including a coil arranged
in said auxiliary chamber and facing said window plate; a power
supply section for applying a high frequency voltage to said coil;
an auxiliary exhaust pump for exhausting and setting said auxiliary
chamber to a vacuum; a pressure controller connected to said
auxiliary exhaust pump for keeping a pressure difference between
pressures in said process and auxiliary chambers at a minimum
value; and a seat arranged on said window plate and supporting said
coil;.Iaddend. wherein a passage through which coolant is
circulated is formed in said seat.
.[.10. The apparatus according to claim 1, further comprising a
lower electrode arranged in said work table and a power supply for
applying a high frequency potential to said lower electrode..].
.[.11. The apparatus according to claim 10, wherein said apparatus
is a plasma CVD apparatus to form a film on said process region of
said substrate, said process gas is decomposed to provide a
material of said film..].
.[.12. The apparatus according to claim 11, wherein said process
gas comprises first and second gases, and said main supply
comprises first and second supply members respectively supplying
said first and second gases, and wherein said second gas is
transformed into said plasma while said first gas is excited and
decomposed by said plasma..].
.[.13. The apparatus according to claim 12, wherein said first
supply member includes a supply port arranged between said window
plate and said support face, and said second supply member includes
a supply port arranged between said window plate and said supply
port of said first supply member..].
.[.14. The apparatus according to claim 13, wherein said first
supply member comprises a first supply head arranged between said
window plate and said support face and made of dielectric, and said
supply port of said first supply member comprises a plurality of
supply holes formed on said first supply member and arranged to
uniformly cover the whole of said process region of said substrate
mounted on said support face..].
.[.15. The apparatus according to claim 14, wherein said first
supply head comprises a lattice formed of a combination of pipe
elements through which said first gas flows..].
.[.16. The apparatus according to claim 15, wherein said second
supply member comprises a second supply head arranged between said
window plate and said first supply head, made of dielectric, and
comprising continuous frame formed of a combination of pipe
elements through which said second gas flows, and said supply port
of said second supply member comprises a plurality of supply holes
formed on said second supply member..].
.Iadd.17. An apparatus for processing a process region of a
substrate, using a plasma, comprising: a container substantially
formed of a conductive material; a partition plate supported by
said container and defining an air-tight process container portion
and an air-tight auxiliary portion, and having a window plate made
of dielectric; a main exhaust pump for exhausting and setting said
process container portion to a vacuum; a work table arranged in
said process container portion and having a support face facing
said window plate, the substrate being mountable on said support
face with the process region facing said window plate; a main
supply for supplying a process gas between said window plate and
the substrate mounted on said support face, at least part of the
process gas being transformable into the plasma; a planar spiral
coil for generating an electromagnetic field between said window
plate and the substrate mounted on said support face to induce
generation of the plasma, arranged in said auxiliary container
portion and facing said window plate; a power supply section for
applying a high frequency voltage to said planar spiral coil; an
auxiliary exhaust pump for exhausting and setting said auxiliary
container portion to a vacuum; a pressure controller connected to
said auxiliary exhaust pump for keeping a pressure difference
between pressures in said process and auxiliary container portions
at a minimum value; and a seat arranged in window plate and
supporting said planar spiral coil; wherein a passage through which
coolant is circulated is formed in said seat. .Iaddend.
.Iadd.18. An apparatus for processing with a plasma a process
region of a substrate, comprising: a container; a dielectric window
supported by said container and defining a first container portion
and a second container portion separated by said dielectric window;
a table for supporting the substrate in said first container
portion to face said window; a first exhaust means connected to
said first container portion for drawing a vacuum in said first
container portion; a first supply for supplying a process gas to
said first container portion; a planar spiral coil for generating
an electromagnetic field between said window and the substrate
supported on said table to induce generation of the plasma, said
planar spiral coil being provided in said second container portion
proximate said window; a power supply for supplying a voltage to
said coil; a second exhaust means connected to said second
container portion for drawing a vacuum in said second container
portion; and a second supply connected to said second container
portion, comprising a gas supply pipe and a gas source for
supplying an auxiliary gas to said second container portion;
wherein at least one of said first and second exhaust means are
controllable to control a pressure differential across said window
at a minimum value. .Iaddend.
.Iadd.19. The apparatus according to claim 18, further comprising a
controller for controlling said first exhaust means to control the
pressure differential. .Iaddend.
.Iadd.20. The apparatus according to claim 18, further comprising a
controller for controlling the second exhaust means to control the
pressure differential. .Iaddend.
.Iadd.21. The apparatus according to claim 18, wherein said second
exhaust means is controllable according to an amount of the
auxiliary gas supplied by said second supply to control the
pressure differential across said window at the minimum value.
.Iaddend.
.Iadd.22. The apparatus according to claim 18, wherein said second
exhaust means includes an exhaust pump controllable to control the
pressure differential across said window at the minimum value.
.Iaddend.
.Iadd.23. The apparatus according to claim 22, further comprising a
controller for controlling said exhaust pump. .Iaddend.
.Iadd.24. The apparatus according to claim 18, further comprising a
controller for controlling the second exhaust means according to
the supply of the auxiliary gas through said second supply, to
control the pressure differential across said window as the minimum
value. .Iaddend.
.Iadd.25. The apparatus according to claim 18, wherein said second
exhaust means is controllable according to a pressure in said first
container portion. .Iaddend.
.Iadd.26. The apparatus according to claim 18, wherein said first
exhaust means includes an exhaust pump. .Iaddend.
.Iadd.27. The apparatus according to claim 26, further comprising a
controller connected to said exhaust pump. .Iaddend.
.Iadd.28. The apparatus according to claim 18, wherein said
container is substantially formed of a conductive material.
.Iaddend.
.Iadd.29. The apparatus according to claim 18, wherein said
dielectric window is supported on an inner surface of said
container. .Iaddend.
.Iadd.30. The apparatus according to claim 18, further comprising
grounding means for grounding said container. .Iaddend.
.Iadd.31. The apparatus according to claim 18, further comprising a
cooler for cooling said planar spiral coil. .Iaddend.
.Iadd.32. The apparatus according to claim 18, wherein said
auxiliary gas is a coolant by which said planar spiral coil is
cooled. .Iaddend.
.Iadd.33. The apparatus according to claim 18, wherein said second
supply comprises a shower head arranged above said planar spiral
coil and having a plurality of gas supply holes facing said planar
spiral coil. .Iaddend.
.Iadd.34. The apparatus according to claim 18, further comprising a
seat arranged on said window and supporting said planar spiral
coil. .Iaddend.
.Iadd.35. The apparatus according to claim 34, wherein a passage
through which a coolant is circulated is formed on said seat.
.Iaddend.
.Iadd.36. The apparatus according to claim 18, further comprising a
lower electrode arranged in said work table and a power supply for
applying a high frequency potential to said lower electrode.
.Iaddend.
.Iadd.37. The apparatus according to claim 18, wherein said
apparatus is a plasma CVD apparatus to form a film on the process
region of the substrate, the process gas being decomposable to
provide a material of the film. .Iaddend.
.Iadd.38. The apparatus according to claim 18, wherein the process
gas comprises first and second gases, and the first supply
comprises first and second supply members respectively for
supplying the first and second gases, and wherein the second gas is
transformable into the plasma when the first gas is excited and
decomposed by said plasma. .Iaddend.
.Iadd.39. The apparatus according to claim 38, wherein said first
supply member includes a supply port arranged between said window
and said table, and said second supply member includes a supply
port arranged between said window and said supply port of said
first supply member. .Iaddend.
.Iadd.40. The apparatus according to claim 39, wherein said first
supply member comprises a first supply head arranged between said
window and said table and is made of dielectric, and said supply
port of said first supply member comprises a plurality of supply
holes formed on said first supply member and arranged to uniformly
cover the whole of the process region of the substrate mounted on
said table. .Iaddend.
.Iadd.41. The apparatus according to claim 40, wherein said first
supply head comprises a lattice formed of a combination of pipe
elements through which the first gas flows. .Iaddend.
.Iadd.42. The apparatus according to claim 41, wherein said second
supply member comprises a second supply head arranged between said
window and said first supply head, made of dielectric, and
comprising a continuous frame formed of a combination of pipe
elements through which the second gas flows, and said supply port
of said second supply member comprises a plurality of supply holes
formed on said second supply member. .Iaddend.
.Iadd.43. The apparatus according to claim 18, wherein the pressure
differential across said window is controlled to be in a
preselected range. .Iaddend.
.Iadd.44. The apparatus according to claim 18, wherein said
dielectric window has a thickness in a preselected range.
.Iaddend.
.Iadd.45. An apparatus for processing a substrate in a plasma
comprising: a container; a dielectric window supported by said
container and dividing said container into a first container
portion and a second container portion; first vacuum means for
creating a first vacuum in said first container portion; second
vacuum means for creating a second vacuum in said second container
portion; a controller for controlling at least one of said first
and second vacuum means in order to control a differential pressure
across said window at a minimum value; a table arranged in said
first container portion for supporting the substrate; a first
supply for supplying a process gas to said first container portion;
an planar spiral coil arranged in said second container portion; a
voltage supply to said planar spiral coil for generating an
electromagnetic field whereby generation of the plasma is induced
in said first container portion; and a seat arranged in the said
window and supporting said planar spiral coil; wherein a passage
through which coolant is circulated is formed in said seat.
.Iaddend.
.Iadd.46. An apparatus for processing a process region of a
substrate, using a plasma, comprising: a container substantially
formed of a conductive material; a partition plate supported by
said container and defining an air-tight process container portion
and an air-tight auxiliary container portion, and having a window
plate made of dielectric; a work table arranged in said process
container portion and having a support face facing said window
plate, the substrate being mountable on said support face with the
process region facing said window plate; a main supply for
supplying a process gas between said window plate and the substrate
mounted on said support face, at least part of the process gas
being transformable into the plasma; a planar spiral coil having a
quadrilateral outer configuration for generating an electromagnetic
field between said window plate and the substrate mounted on said
support face to induce generation of the plasma, arranged in said
auxiliary container portion and facing said window plate; a power
supply section for applying a high frequency voltage to said
antenna; a pressure controller controlling a pressure difference
between a pressure in said process container portion and a pressure
in said auxiliary container portion lower than a predetermined
value; and a seat arranged on said window plate supporting said
planar spiral coil, said seat having a passage therethrough for
circulating a coolant. .Iaddend.
.Iadd.47. The apparatus according to claim 46, further comprising
an exhaust pump connected to at least one of the container
portions, wherein the pressure controller controls operation of
said exhaust pump to control the pressure difference. .Iaddend.
.Iadd.48. The apparatus according to claim 46, further comprising
grounding means for grounding said container. .Iaddend.
.Iadd.49. The apparatus according to claim 46, further comprising a
lower electrode arranged in said work table and a power supply for
applying a high frequency potential to said lower electrode.
.Iaddend.
.Iadd.50. The apparatus according to claim 49 wherein said
apparatus is a plasma CVD apparatus to form a film on the process
region of the substrate, the process gas being decomposable to
provide a material of the film. .Iaddend.
.Iadd.51. The apparatus according to claim 50, wherein the process
gas comprises first and second gases, and the main supply comprises
first and second supply members respectively for supplying the
first and second gases, and wherein the second gas is transformable
into the plasma when the first gas is excited and decomposed by
said plasma. .Iaddend.
.Iadd.52. The apparatus according to claim 51, wherein said first
supply member includes a supply port arranged between said window
plate and said support face, and said second supply member includes
a supply port arranged between said window plate and said supply
port of said first supply member. .Iaddend.
.Iadd.53. The apparatus according to claim 52, wherein said first
supply member comprises a first supply head arranged between said
window plate and said support face and made of dielectric, and said
supply port of said first supply member comprises a plurality of
supply holes formed on said first supply member and arranged to
uniformly cover the whole of the process region of the substrate
mounted on said support face. .Iaddend.
.Iadd.54. The apparatus according to claim 53, wherein said first
supply head comprises a lattice formed of a combination of pipe
elements through which the first gas flows. .Iaddend.
.Iadd.55. The apparatus according to claim 54, wherein said second
supply member comprises a second supply head arranged between said
window plate and said first supply head, made of dielectric, and
comprising a continuous frame formed of a combination of pipe
elements through which the second gas flows, and said supply port
of said second supply member comprises a plurality of supply holes
formed on said second supply member. .Iaddend.
.Iadd.56. The apparatus according to claim 46, wherein said
partition plate is supported on an inner surface of said container.
.Iaddend.
.Iadd.57. The apparatus according to claims 46 or 58, wherein said
window has a thickness of approximately 30 mm to approximately 50
mm. .Iaddend.
.Iadd.58. An apparatus for processing with a plasma a process
region of a substrate, comprising: a container; a dielectric window
supported by said container and defining a first container portion
and a second container portion separated by said dielectric window,
said first container portion and said second container portion each
having substantially the same diameter; a table for supporting the
substrate in said first container portion to face said window; a
first supply for supplying a process gas to said first container
portion; a planar spiral coil for generating an electromagnetic
field between said window and the substrate supported on said table
to induce generation of the plasma, said planar spiral coil being
provided in said second container portion proximate said window; a
power supply for supplying a voltage to said coil; a second supply
connected to said second container portion, comprising a gas source
and a gas supply pipe for supplying an auxiliary gas to said second
container portion; wherein a pressure difference between a pressure
in said first container portion and a pressure in said second
container portion is controllable below a predetermined value to
reduce a load caused by the pressure difference on said dielectric
window. .Iaddend.
.Iadd.59. The apparatus according to claim 58, further comprising a
controller for controlling the pressure difference. .Iaddend.
.Iadd.60. The apparatus according to claim 59, further comprising
an exhaust pump connected to at least one container portion,
wherein the controller controls operation of said pump.
.Iaddend.
.Iadd.61. The apparatus according to claim 58, wherein said
container is substantially formed of a conductive material.
.Iaddend.
.Iadd.62. The apparatus according to claim 58, wherein said
dielectric window is supported on an inner surface of said
container. .Iaddend.
.Iadd.63. The apparatus according to claim 58, further comprising
grounding means for grounding said container. .Iaddend.
.Iadd.64. The apparatus according to claim 58, further comprising a
cooler for controlling a temperature of said planar spiral coil.
.Iaddend.
.Iadd.65. The apparatus according to claim 58, further comprising a
coolant flow passage including a coolant flow for cooling said
planar spiral coil. .Iaddend.
.Iadd.66. The apparatus according to claim 58, further comprising a
seat arranged on said window and supporting said planar spiral
coil. .Iaddend.
.Iadd.67. The apparatus according to claim 66, wherein a passage
through which a coolant is circulated is formed in said seat.
.Iaddend.
.Iadd.68. The apparatus acording to claim 58, further comprising a
lower electrode arranged in said work table and a power supply for
applying a high frequency potential to said lower electrode.
.Iaddend.
.Iadd.69. The apparatus according to claim 58, wherein said
apparatus is a plasma CVD apparatus to form a film on the process
region of the substrate, the process gas being decomposable to
provide a material of the film. .Iaddend.
.Iadd.70. The apparatus according to claim 58, wherein the process
gas comprises first and second gases, and the first supply
comprises first and second supply members respectively for
supplying the first and second gases, and wherein the second gas is
transformable into the plasma when the first gas is excited and
decomposed by said plasma. .Iaddend.
.Iadd.71. The apparatus according to claim 70, wherein said first
supply member includes a supply port arranged between said window
and said table, and said second supply member includes a supply
port arranged between said window and said supply port of said
first supply member. .Iaddend.
.Iadd.72. The apparatus according to claim 71, wherein said first
supply member comprises a first supply head arranged between said
window and said table and made of dielectric, and said supply port
of said first supply member comprises a plurality of supply holes
formed on said first supply member and arranged to uniformly cover
the whole of the process region of the substrate mounted on said
table. .Iaddend.
.Iadd.73. The apparatus according to claim 72, wherein said first
supply head comprises a lattice formed of a combination of pipe
elements through which the first gas flows. .Iaddend.
.Iadd.74. The apparatus according to claim 73, wherein said second
supply member comprises a second supply head arranged between said
window and said first supply head, made of dielectric, and
comprising a continuous frame formed of a combination of pipe
elements through which the second gas flows, and said supply port
of said second supply member comprises a plurality of supply holes
formed on said second supply member. .Iaddend.
.Iadd.75. The apparatus according to claim 58, wherein said
dielectric window has a thickness in a preselected range.
.Iaddend.
.Iadd.76. The apparatus according to claim 58, wherein the pressure
difference is controlled at a value that is lower than atmospheric
pressure. .Iaddend.
.Iadd.77. An apparatus for processing a process region of a
substrate, using a plasma, comprising: a container substantially
formed of a conductive material; a partition plate supported by
said container and defining an air-tight process container portion
and an air-tight auxiliary container portion, and having a window
plate made of dielectric; an exhaust pump for exhausting and
setting at least one of said container portions to a vacuum; a work
table arranged in said process container portion and having a
support face facing said window plate, the substrate being
mountable on said support face with the process region facing said
window plate; a main supply for supplying a process gas between
said window plate and the substrate mounted on said support face,
at least part of the process gas being transformable into the
plasma; a planar spiral coil for generating an electromagnetic
field between said window plate and the substrate mounted on said
support face to induce generation of the plasma, arranged in said
auxiliary container portion and facing said window plate; a power
supply section for applying a high frequency voltage to said planar
spiral coil; a pressure controller connected to said exhaust pump
for keeping a pressure difference between pressures in said process
and auxiliary container portions at a minimum value; an auxiliary
supply for supplying an inactive gas into said auxiliary container
portion; and a seat arranged on said window plate and supporting
said planar spiral coil; wherein a passage through which coolant is
circulated is formed in said seat. .Iaddend.
.Iadd.78. An apparatus for processing with a plasma a process
region of a substrate, comprising: a container; a dielectric window
supported by said container and defining a first container portion
and a second container portion separated by said dielectric window;
a table for supporting the substrate in said first container
portion to face said window; an exhaust means connected to at least
one of said container portions for drawing a vacuum; a first supply
for supplying a process gas to said first container portion; a
planar spiral coil for generating an electromagnetic field between
said window and the substrate supported on said table to induce
generation of the plasma, said planar spiral coil being provided in
said second container portion proximate said window; a power supply
for supplying a voltage to said planar spiral coil; and a second
supply connected to said second container portion, comprising a gas
source and a gas supply pipe for supplying an auxiliary gas to said
second container portion; wherein said exhaust means is
controllable to control a pressure differential across said window
at a minimum value. .Iaddend.
.Iadd.79. The apparatus according to claim 78, further comprising a
controller for controlling said exhaust means to control the
pressure differential. .Iaddend.
.Iadd.80. The apparatus according to claim 78, wherein said exhaust
means is controllable according to an amount of the auxiliary gas
supplied by said second supply to control the pressure differential
across said window at the at the minimum value. .Iaddend.
.Iadd.81. The apparatus according to claim 78, wherein said exhaust
means includes an exhaust pump controllable to control the pressure
differential across said window at the minimum value. .Iaddend.
.Iadd.82. The apparatus according to claim 81, further comprising a
controller for controlling said exhaust pump. .Iaddend.
.Iadd.83. The apparatus according to claim 78, further comprising a
controller for controlling said exhaust means according to the
supply of the auxiliary gas through said second supply, to control
the pressure differential across said window at the minimum value.
.Iaddend.
.Iadd.84. The apparatus according to claim 78, wherein said exhaust
means is controllable according to a pressure in said first
container portion. .Iaddend.
.Iadd.85. The apparatus according to claim 78, wherein said exhaust
means includes an exhaust pump. .Iaddend.
.Iadd.86. The apparatus according to claim 85, further comprising a
controller connected to said exhaust pump. .Iaddend.
.Iadd.87. The apparatus according to claim 78, wherein said
container is substantially formed of a conductive material.
.Iaddend.
.Iadd.88. The apparatus according to claim 78, wherein said
dielectric window is supported on an inner surface of said
container. .Iaddend.
.Iadd.89. The apparatus according to claim 78, further comprising
grounding means for grounding said container. .Iaddend.
.Iadd.90. The apparatus according to claim 78, further comprising a
cooler for cooling said planar spiral coil. .Iaddend.
.Iadd.91. The apparatus according to claim 78, wherein said
auxiliary gas is a coolant by which said planar spiral coil is
cooled. .Iaddend.
.Iadd.92. The apparatus according to claim 78, wherein said second
supply comprises a shower head arranged above said planar spiral
coil and having a plurality of gas supply holes facing said planar
spiral coil. .Iaddend.
.Iadd.93. The apparatus according to claim 78, further comprising a
seat arranged on said window and supporting said planar spiral
coil. .Iaddend.
.Iadd.94. The apparatus according to claim 93, wherein a passage
through which a coolant is circulated is formed on said seat.
.Iaddend.
.Iadd.95. The apparatus according to claim 78, further comprising a
lower electrode arranged in said table and a power supply for
applying a high frequency potential to said lower electrode.
.Iaddend.
.Iadd.96. The apparatus according to claim 78, wherein said
apparatus is a plasma CVD apparatus to form a film on the process
region of the substrate, the process gas being decomposable to
provide a material of the film. .Iaddend.
.Iadd.97. The apparatus according to claim 78, wherein the process
gas comprises first and second gases, and the first supply
comprises first and second supply members respectively for
supplying the first and second gases, and wherein the second gas is
transformable into the plasma when the first gas is excited and
decomposed by said plasma. .Iaddend.
.Iadd.98. The apparatus according to claim 97, wherein said first
supply member includes a supply port arranged between said window
and said table, and said second supply member includes a supply
port arranged between said window and said supply port of said
first supply member. .Iaddend.
.Iadd.99. The apparatus according to claim 98, wherein said first
supply member comprises a first supply head arranged between said
window and said table and made of dielectric, and said supply port
of said first supply member comprises a plurality of supply holes
formed on said first supply member and arranged to uniformly cover
the whole of the process region of the substrate mounted on said
table. .Iaddend.
.Iadd.100. The apparatus according to claim 99, wherein said first
supply head comprises a lattice formed of a combination of pipe
elements through which the first gas flows. .Iaddend.
.Iadd.101. The apparatus according to claim 100, wherein said
second supply member comprises a second supply head arranged
between said window and said first supply head, made of dielectric,
and comprising a continuous frame formed of a combination of pipe
elements through which the second gas flows, and said supply port
of said second supply member comprises a plurality of supply holes
formed on said second supply member. .Iaddend.
.Iadd.102. The apparatus according to claim 78, wherein the
pressure differential across said window is controlled to be in a
preselected range. .Iaddend.
.Iadd.103. The apparatus according to claim 78, wherein said
dielectric window has a thickness in a preselected range.
.Iaddend.
.Iadd.104. The apparatus according to claim 78, wherein said window
has a thickness of approximately 30 mm to approximately 50 mm.
.Iaddend.
.Iadd.105. An apparatus for processing a process region of a
substrate, using a plasma, comprising: a container substantially
formed of a conductive material; a partition plate supported by
said conainer and defining an air-tight process container portion
and an air-tight auxiliary container portion, and having a window
plate made of dielectric; a work table arranged in said process
container portion and having a support face facing said window
plate, the substrate being mountable on said support face with the
process region facing said window plate; a main supply for
supplying a process gas between said window plate and the substrate
mounted on said support face, at least part of the process gas
being transformable into the plasma; a planar spiral coil having a
quadrilateral outer configuration for generating an electromagnetic
field between said window plate and the substrate mounted on said
support face to induce generation of the plasma, arranged in said
auxiliary container portion and facing said window plate; a power
supply section for applying a high frequency voltage to said planar
spiral coil; a pressure controller controlling a pressure
difference between a pressure in said process container portion and
a pressure in said auxiliary container portion lower than a
predetermined value; a seat arranged on said window plate
supporting said planar spiral coil, said seat having a passage
therethrough for circulating a coolant; and an exhaust pump
connected to the auxiliary container portion and the process
container portion. .Iaddend.
.Iadd.106. An apparatus for processing a process region of a
substrate, using a plasma, comprising: a container substantially
formed of a conductive material; a partition plate supported by
said container and defining an air-tight process container portion
and an air-tight auxiliary container portion, and having a window
plate made of dielectric; an exhaust pump for exhausting and
setting at least one of said container portions to a vacuum; a work
table arranged in said process container portion and having a
support face facing said window plate, the substrate being
mountable on said support face with the process region facing said
window plate; a main supply for supplying a process gas between
said window plate and the substrate mounted on said support face,
at least part of the process gas being transformable into the
plasma; a planar spiral coil for generating an electromagnetic
field between said window plate and the substrate mounted on said
support face to induce generation of the plasma, arranged in said
auxiliary container portion and facing said window plate; a power
supply section for applying a high frequency voltage to said planar
spiral coil; a pressure controller connected to said exhaust pump
for keeping a pressure difference between pressures in said process
container portion and said auxiliary container portions at a
minimum value; and a seat arranged on said window plate supporting
said planar spiral coil, said seat having a passage therethrough
for circulating a coolant. .Iaddend.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a plasma process apparatus and,
more particularly, a plasma CVD apparatus for using plasma to
process substrates such as semiconductor wafers and LCD
substrates.
2. Description of the Related Art
In a plasma process apparatus disclosed in Jpn. Pat. Appln. KOKAI
Publication No. Hei 3-79025, a flat induction coil is arranged
outside a process chamber by an insulating shield, and a radio
frequency power supply is connected to the induction coil. The
induction coil produces induction electromagnetic field to induce
the movement of electrons and develop plasma.
In another plasma process apparatus disclosed in European Patent
Publication No. 0.379.828, radio frequency is added to a vortex or
spiral induction coil to generate plasma in the process chamber.
Plasma is closed in the process chamber by bipolar magnetic
field.
FIG. 11 shows the profile of film thickness of a semiconductor film
formed on a semiconductor wafer by a conventional plasma CVD
apparatus in which an RF induction coil is used. The RF induction
coil 2 has an outer diameter substantially the same as that of the
wafer W and is arranged coaxial to the wafer W. Hatched portion
between the coil 2 and the wafer W in FIG. 11 represents the
profile of film thickness of the film formed.
When the conventional apparatus is used, the film thickness becomes
small at the center and the outer rim portion of the wafer W while
it becomes large between the center and the outer rim portion
thereof, as shown in FIG. 11. This unevenness of film thickness
cannot be ignored as the diameter of the wafer W becomes larger and
larger, to 6, 8 and 12 inches. In a substrate like the LCD (liquid
crystal display) substrate having a large area of 500 mm.times.600
mm or 550 mm..times.650 mm, the unevenness of film thickness of a
formed film provides a problem.
The RF induction coil is arranged adjacent to a quartz-made
dielectric window which is a part of wall for defining the process
chamber. In the case of the plasma process, particularly the film
forming process, by-products easily adhere to the inner face of the
window. When the by-products are conductive, the induction
electromagnetic field generated by the RF induction coil is
disturbed and plasma thus formed becomes sometimes uneven.
SUMMARY OF THE INVENTION
The object of the present invention is therefore to increase or
enhance the uniformity of process applied to a face of the
substrate by the plasma process apparatus in which the RF induction
coil is used.
According to a first aspect of the present invention, there is
provided an apparatus for processing a process region of a
substrate, using a plasma, comprising: a casing for defining an
air-tight process chamber and provided with a window plate made of
dielectric; an exhaust for exhausting and setting the process
chamber to a vacuum; a work table arranged in the process chamber
and having a support face opposed to the window plate, the
substrate being mounted on the support face of the work table,
facing the process region to the window plate; a main supply for
supplying a process gas between the window plate and the substrate
on the support face of the work table, at least a part of the
process gas being transformed into the plasma; an induction
electrode for generating electromagnetic field between the window
plate and the substrate on the support face of the work table to
induce generation of the plasma, and including plural conductive
coils arranged outside the process chamber and opposed to the
window plate; and a power supply section for applying high
frequency voltages to the coils; wherein high frequency voltages
applied to the coils are the same in phase and directions of
current flowing through adjacent portions of the coils are the
same.
According to a second aspect of the present invention, there is
provided an apparatus for processing a process region of a
substrate, using a plasma, comprising: a casing for defining an
air-tight process chamber and provided with a window plate made of
dielectric; an exhaust for exhausting and setting process chamber
to a vacuum; a work table arranged in the process chamber and
having a support face opposed to the window plate, the substrate
being mounted on the support face of the work table, facing the
process region to the window plate; a main supply for supplying a
process gas between the window plate and the substrate on the
support face of the work table, at least a part of the process gas
being transformed into the plasma; an induction electrode for
generating electromagnetic field between the window plate and the
substrate on the support face of the work table to induce
generation of the plasma, and including plural conductive coils
arranged outside the process chamber and opposed to the window
plate; and a power supply section for applying high frequency
voltages to the coils at different phases to enable electromagnetic
field components formed by the coils to less interfere with each
other.
According to a third aspect of the present invention, there is
provided a CVD apparatus for forming a film on a process region of
a substrate, using a plasma, comprising: a casing for defining an
air-tight process chamber and provided with a window plate made of
dielectric; an exhaust for exhausting and setting the process
chamber to a vacuum; a work table arranged in the process chamber
and having a support face opposed to the window plate, the
substrate being mounted on the support face of the work table,
facing the process region to the window plate; a main supply for
supplying a process gas between the window plate and the substrate
on the support face of the work table, and including a first supply
member having a first supply head made of dielectric and arranged
between the window plate and the support face of the work table and
a second supply member arranged between the window plate and the
first supply member, the first supply head including a plurality of
supply holes to uniformly cover the whole of the process region of
the substrate on the support face, the process gas including first
and second gases supplied through the first and second supply
members, respectively, and the second gas being transformed into
the plasma while the first gas being excited and decomposed by the
plasma thus formed to provide a material of the film; an induction
electrode for generating electromagnetic field between the window
plate and the substrate on the support face of the work table to
induce generation of the plasma, and including plural conductive
coils arranged outside the process chamber and opposed to the
window plate; and a power supply section for applying high
frequency voltages to the coils.
Additional objects and advantages of the invention will be set
forth in the description which follows, and in part will be obvious
from the description, or may be learned by practice of the
invention. The objects and advantages of the invention may be
realized and obtained by means of the instrumentalities and
combinations particularly pointed out in the appended claims.
BRIEF DESCRIPTION OF THE DRAWINGS
The accompanying drawings, which are incorporated in and constitute
a part of the specification, illustrate presently preferred
embodiments of the invention, and together with the general
description given above and the detailed description of the
preferred embodiments given below, serve to explain the principles
of the invention.
FIG. 1 is a sectional view showing a plasma CVD apparatus according
to a first embodiment of the present invention;
FIG. 2 is a bottom view showing a first supply head in the plasma
CVD apparatus;
FIG. 3 is a bottom view showing a second supply head in the plasma
CVD apparatus;
FIG. 4 is a sectional view showing an upper chamber in the
apparatus in detail;
FIG. 5 is a perspective view showing how an induction electrode
coil is seated on a seat;
FIG. 6 is a plan view showing the induction electrode in the
apparatus;
FIGS. 7 through 9 are plan views showing variations of the
induction electrode;
FIG. 10 shows the profile of film thickness of a film formed by the
apparatus in FIG. 1;
FIG. 11 shows the profile of film thickness of a film formed by a
conventional apparatus;
FIG. 12 is a bottom view showing a variation of the first supply
head;
FIGS. 13 and 14 are bottom views showing variations of the second
supply head, respectively;
FIGS. 15 through 17 show distributions of quantity of gas fed
through supply holes of the first supply head;
FIG. 18 is a sectional view showing a variation of the upper
chamber;
FIG. 19 is a perspective view showing how the induction electrode
coil is seated on a seat in the upper chamber of FIG. 18;
FIGS. 20 and 21 are sectional views showing plasma CVD apparatuses
according to second and third embodiments of the present invention,
respectively; and
FIG. 22 is a sectional view showing a process system of the cluster
tool type in which a plasma CVD apparatus according to the present
invention is used.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
The plasma CVD apparatus according to a first embodiment of the
present invention shown in FIG. 1 is used to form polysilicon or
amorphous silicon film used for thin film transistors (TFTs) on a
glass substrate in the liquid color display (LCD) manufacturing
course.
The CVD apparatus has an air-tight container 12 made of aluminium.
Inner walls of the container 12 are alumite-processed by anodic
oxidation not to cause any contamination matter from the walls. The
container 12 is divided into process and upper air-tight chambers
16 and 18 by a window or partition plate 14 made of dielectric such
as quartz. The partition plate 14 has an area larger than that of
the substrate which is to be processed. When an LCD glass substrate
having an area of 550 mm.times.650 mm, for example, is to be
processed, the partition plate 14 has an area of 750 mm.times.750
mm and a thickness of 30 mm-50 mm. The process chamber 16 has a
volume of 40-80 liters when the LCD substrate of 550 mm.times.650
mm is to be processed.
A work table 22 is arranged on the bottom of the process chamber
16. It includes a frame 24 mounted on the bottom of the process
chamber 16 and made of insulator, and a lower electrode 26 arranged
in the frame 24. The electrode 26 is fully insulated from the
container 12 by the frame 24. The top of the electrode 26 is the
same in level as that of the frame 24 to thereby form a substrate
support surface parallel to the partition plate 14. The work table
22 has a clamp 28 moved up and down by a drive member (not shown).
The substrate S to be processed is mounted on the work table 22,
seating on tops of the electrode 26 and the frame 24, and fixed on
it by the clamp 28.
A temperature adjuster member 32 is arranged in the electrode 26 to
set the temperature of the substrate S. It heats the substrate S to
350.degree.-450.degree. C., for example, during the silicon film
forming process. A ceramic heater made by coating a plate-like
ceramic with a CVD electric resistor can be used as the temperature
adjuster member 32. In another case where the substrate S is to be
cooled, there may be provided a cooling pipe through which coolant
flows. It is also possible to use a combination of the heater and
the cooling pipe.
A line 42 is formed in the electrode 26 to supply heat transmitting
gas such as helium into a clearance between the top of the work
table 22 and the underside of the substrate S. It is connected to a
gas source 44, which has pressure adjusting function, outside the
container 12. Heat transmitting gas assists heat transmission
between the temperature adjuster member 32 and the substrate S
during the plasma CVD process conducted in a vacuum atmosphere.
Temperature setting for the substrate S adds some influence to the
film forming speed and film quality (better as voids are less and
electric transmission rate is higher). This asks temperature
control to have high accuracy. A temperature measuring member 34
such as the thermocouple, therefore, is arranged in the electrode
26, locating adjacent to the underside of the substrate S. A value
measured by it is transmitted, as voltage output, to a temperature
monitor 36, which compares it with a predetermined reference value
and transmits a difference thus obtained to a temperature
controller 38. Responsive to signal thus applied, the controller 38
controls the temperature adjuster member 32 to set the substrate S
at a predetermined temperature.
Each of the temperature adjuster and measuring members 32 and 34
can be divided into plural elements arranged adjacent to the
underside of the substrate S. The substrate can be thus heated to
same temperature all over it even if it has such a large size of
550 mm.times.650 mm that causes temperature difference between its
center and outer rim portions.
A high frequency power supply 46 is connected to the electrode 26
via a matching circuit 48. High frequency potential ranging from
several hundreds KHz to several tens KHz is applied from the power
supply 46 to the electrode 26. Ions are drawn from process gas
plasma, which is formed in opposite to a surface of the substrate
to be processed, onto the substrate surface by high frequency thus
applied, and the film forming rate can be made higher
accordingly.
The process chamber 16 is provided with an exhaust opening 52, to
which turbo molecular and dry pumps 54 and 56 are connected in
series. The process chamber 16 can be exhausted to a high vacuum of
10.sup.-6-10.sup.-8 for example, by these two pumps 54 and 56
before process gas is introduced into it.
First and second heads 62 and 82 of the shower type are arranged
above the work table 22 in the process chamber 16 for supplying
gases. Each of them has a plurality of gas supply holes 64 or 84
which are arranged in a plane parallel to the top of the substrate
S on the work table 22. They are made of dielectric such as quartz.
They can also be made of semiconductor such as monocrystal,
polycrystal or amorphous silicon. These dielectric and
semiconductor are preferable because they less disturb
electromagnetic field formed in the process chamber 16 as described
later, and because they do not distort the distribution of plasma
thus formed.
The first lower head 62 is led outside the process chamber 16 by a
connection tube 66 which is made of quartz, for example, and formed
integral to the head 62. The connection tube 66 is connected to gas
sources 74a and 74b, which have valves 72a and 72b, via a mass flow
controller 68 for adjusting a flow rate. These gas sources 74a and
74b store gases to be decomposed and provide materials of the CVD
film.
The first head 62 is a pipe lattice 76 as apparent from the bottom
view in FIG. 2. The pipe lattice 76 has an area 10-50% larger than
that region of the substrate S which is to be processed, and thus
it covers all over the processed region of the substrate S. The
connection tube 66 is connected to it at plural or four points, two
of which are opposed to the other remaining two. These connections
of the connection tube 66 to the pipe lattice 76 are simplified for
clarity in FIG. 1.
Each space 78 formed by vertical and horizontal pipes of the pipe
lattice 76, which serves as the first head 62, is the same square.
A supply hole 64, orienting just down, is formed in the underside
of the pipe lattice 76 at each crossed point thereof. The supply
holes 64 are arranged in a plane parallel to the support face of
the work table 22 and the substrate S on it and distributed
uniformly all over the process region of the substrate S. In
addition, gas is introduced into the pipe lattice 76 at two paired
and opposed points thereof through the tube 66. The supply of gas
through the supply holes 64 can be made substantially uniform or
equal.
Each of the pipes by which the pipe lattice 76 is formed has an
outer diameter of 1/4 inches with a wall thickness of 1 mm under
the standard and each of the supply holes 64 has a diameter of 0.1
mm-0.5 mm in this case. These dimensions are selected depending
upon such conditions as kinds and amounts of gases supplied. It is
desirable that each supply hole 64 has a size large enough to
prevent plasma from being generated in the direction of reactive
gas sources.
The second upper head 82 is led outside the process chamber 16 by a
connection tube 86 which is made of quartz and integral to the head
82. The connection tube 86 is connected to gas sources 94a and 94b,
which have valves 92a and 92b, via a mass flow controller 88 for
adjusting a flow rate. One gas source 94a stores therein inactive
gas such as Ar (argon), N.sub.2 (nitrogen), Xe (xenon) and He
(helium) which are transformed into plasma but not used
substantially as material for a film to be formed, or N.sub.2
(nitrogen) and O.sub.2 (oxygen) which are transformed into plasma
and used as material for a film to be formed. The other gas source
94b stores therein such gas as ClF.sub.3 which serves to clean
by-products from the inner walls of the process chamber 16 and the
partition plate 14.
The second head 82 is a pipe frame 96 shaped like a square, as
apparent from the bottom view in FIG. 3. The square pipe frame 96
is made the same as or a little larger than the pipe lattice 76 of
the first head 62. The connection tube 86 is connected to the pipe
frame 96 at plural or two points thereof which are opposed to each
other. These connections of the connection tube 86 to the pipe
frame 96 are simplified for clarity in FIG. 1.
Supply holes 84, each orienting just sidewards and inwards, are
formed in the pipe frame 96 along the inner side thereof at the
same interval. They are arranged in a plane parallel to the support
face of the work table 22 and the substrate S on it and distributed
uniformly along the outer rim of the process region of the
substrate S. Gas is introduced into the pipe frame 96 at paired and
opposed two points thereof through tube 86. The supply of gas
through the supply holes 84 can be thus made substantially uniform
or equal. The supply holes 84 may be formed in the underside of the
pipe frame 96 and oriented just down, or in the top thereof and
oriented right up.
The pipe by which the pipe frame 96 is formed has an outer diameter
of 1/4 inches with a wall thickness of 1 mm under the standard and
each supply hole has a diameter of 0.1 mm-0.5 mm in this case.
These dimensions are selected depending upon such conditions as
kinds and amounts of gases supplied.
An induction electrode or antenna 102 is arranged in the upper
chamber 18 which is air-tightly partitioned from the process
chamber 16 by the partition plate 14. The electrode 102 comprises,
in this case, plural or two coils 106a and 106b each made of
electric conductor such as Al or Cu. The coils 106a and 106b are
seated on plural seats 104 on the partition plate 14. Each seat 104
is made of ceramics which is adiabatic and less disturbs
electromagnetic field. The seats 104 are shown simply in FIG. 1,
but more specifically, each of them comprises a plurality of pieces
104a for supporting the coil 106a or 106b, as shown in FIGS. 4 and
5. These pieces 104a are fixed on the partition plate 14 and the
heat expansion of each coil 106a or 106b is limited by them.
Each of the coils 106a and 106b can be made by stamping or
processing a copper plate of 1 mm-5 mm thick to form a spiral coil
of 5 mm-1 mm wide, or by bending a pipe, made of copper and having
outer and inner diameters of 5 mm and 2 mm, into spiral, or by
bending a solid copper rod, having an outer diameter of 5 mm-10 mm,
into a spiral. Copper is a good electric conductor and it is
excellent in that it can be easily shaped into a spiral. Gold,
silver and aluminium and alloys of copper with them can be cited as
other desirable coil materials.
The coils 106a and 106b are connected to a high frequency power
supply 112 through matching circuits 108. Radio frequency such as
high frequency of 13.56 MHz, for example, is applied from the power
supply 112 to the coils 106a and 106b at a same phase. As shown an
FIG. 6, the coil 106a is spiraled in a direction reverse to that of
the spiral of the coil 106b and directions of current flowing
through them coincide with each other along adjacent portions of
them to thereby prevent electromagnetic fields formed by them from
interfering with each other. They occupy an area 5-50% larger than
the processed region of the substrate to fully cover the whole of
it.
A head 122 of the shower type opposed to the coils 106a and 106b
and having a plurality of gas supply holes is arranged above the
coils 106a and 106b in the upper chamber 18. The coils 106a and
106b cause Joule heat when high frequency is applied to them, and
their temperatures are thus raised. They are therefore cooled by
inactive coolant or gas such as nitrogen supplied from the shower
head 122. The head 122 is led outside the container 12 by a tube
124 and connected to a liquid nitrogen source 134 via valve 126, a
mass flow controller 128 and a temperature adjuster member 132.
Liquid nitrogen in the source 134 is supplied, as gas, to the
temperature adjuster member 132 and set to a predetermined
temperature by it and then supplied to the head 122.
The upper chamber 18 is provided with an exhaust opening 136 to
which an exhaust pump 138 is connected. The upper chamber 18 is
made vacuum by the pump 138. The pump 138 of the upper chamber 18
and those of the process chamber 16 are connected to a pressure
controller 142, which controls the amount of gases exhausted by the
exhaust pump 138 according to the pressure in the process chamber
16 to keep the pressure difference between the chambers 16 and 18
in a predetermined range.
Pressure in the process chamber 16, temperature of the substrate S
set by the temperature adjuster member 32, kinds, flow rates and
temperatures of gases supplied through the heads 62 and 82,
voltages applied to the coils 106a and 106b, and others are
displayed on an operation panel and confirmed and adjusted by the
operator.
Citing a case where polysilicon or amorphous silicon film is formed
on an LCD glass substrate, it will be described how the plasma CVD
apparatus is operated.
The LCD glass substrate S is mounted on the work table 22 and fixed
on it by the clamp 28. Heat transmitting gas is supplied between
the work table 22 and the substrate S and the temperature of the
substrate S is set to 350.degree.-450.degree. C. by the temperature
adjuster member 32. The process chamber 16 is exhausted to a
predetermined pressure of 1.times.10.sup.-7-10.sup.-3 Torr, for
example. Gas to be decomposed such as gas containing silane
(SiH.sub.4) and hydrogen (H.sub.2) is supplied into the process
chamber 16 through the first head 62 while inactive gas such as
helium (He) into it through the second head 82. The pressure in it
becomes 1.times.10.sup.-3-10.sup.-4 because of silane, hydrogen and
helium gases supplied.
When high frequency of 13.56 MHz, for example, is applied to the
coils 106a and 106b under this state, inducted electromagnetic
fields are formed in the process chamber 16 and helium gas is thus
transformed into plasma. Ions or electrons in the plasma pass
through spaces 78 of the first head 62, excite silane and hydrogen
gas and assist its decomposition. Silicon obtained when silane is
decomposed is deposited on the substrate S to form polysilicon or
amorphous silicon film on it.
A part of a by-product film deposited on the partition plate 14 is
decomposed and vaporized by the helium gas plasma and thus removed
from the partition plate 14 during the film forming process. Gas
components thus generated, other gas components not used for film
forming, and by-products are exhausted by the exhaustion, which is
kept running during the film forming process, from the process
chamber 16 through the exhaust opening 52.
Bias potential of high frequency is applied from the power supply
46 to the lower electrode 26 during the film forming process. Ions
or electrons in the helium gas plasma are thus drawn downwards to
more easily pass through spaces 78 of the first head 62. Further,
bias potential applied to the lower electrode 26 is high frequency,
so that it can be prevented that only ions in plasma are drawn into
the electrode to raise the potential of it.
The coils 106a and 106b generate Joule heat because of high
frequency voltage applied. When high frequency voltage of 13.56 MHz
and 200 W is applied to a coil made of Cu and having an outer
diameter of 6 inches, for example, a temperature rise of
180.degree.-250.degree. C. is caused in the coil. When this
temperature is transmitted directly to the partition plate 14 made
of quartz, micro-cracks are caused in the plate 14. The seats 104
for supporting the coils 106a and 106b on them are made of ceramics
which is adiabatic and less disturbs electromagnetic field. They
can, therefore, protect the partition plate 14 from heat without
adding any undesirable effect to the formation of plasma.
Coolant such as nitrogen gas is supplied on the coils 106a and 106b
through the head 122 during the film forming process. However,
pressure difference between in the process and upper chambers 16
and 18 is kept lower than a predetermined value by the controller
142. In short, the controller 142 controls the amount of gases
exhausted by the exhaust pump 138 according to the amount of
nitrogen gas supplied from the head 122. This prevents large load
caused by the pressure difference from being added to the partition
plate 14.
FIG. 10 shows the profile of film thickness of a film thus formed.
A hatched portion between the substrate S and the coils 106a, 106b
in FIG. 10 represents the profile of film thickness of the film
formed. When the apparatus of the present invention as used, the
formed film has a little unevenness and its uniformity of film
thickness can be improved, as compared with the one formed by the
conventional apparatus, as apparent from FIG. 11.
Conditions under which the process of forming thin film transistors
on the LCD glass substrate is carried out will be described.
Table 1 shows the relation between gases to be used and kinds of
films formed by CVD. When amorphous silicon film is to be formed,
silane (SiH.sub.4) and hydrogen (H.sub.2) are supplied through the
first head 62 while helium (He) through the second head 82. Gas
such as argon can be used instead of helium in this case. When
amorphous silicon nitride film is to be formed, silane (SiH.sub.4)
is supplied through the first head 62 while nitrogen (N.sub.2)
through the second head 82. When silicon oxide film is to be
formed, silane (SiH.sub.4) is supplied through the first head 62
while oxygen (O.sub.2) through the second head 82.
TABLE-US-00001 TABLE 1 Kinds of Film Gases used Amorphous Silicon
Film SiH.sub.4 + HeH.sub.2 (a - Si) Amorphous Silicon Nitride Film
SiH.sub.4 + N.sub.2 (a - SiN) Silicon Oxide Film SiH.sub.4 +
O.sub.2 (SiO.sub.2)
Table 2 shows the relation between films to be etched and gases to
be used in the thin film transistor forming process.
TABLE-US-00002 TABLE 2 Film etched Gases used Aluminum (Al)
Cl.sub.2 + BCl.sub.3 Amorphous Silicon CF.sub.4-SF.sub.4+ or (a -
Si) Mixture of Cl.sub.2/SF.sub.4 Silicon Nitride SF.sub.4 (SiN)
FIGS. 7 through 9 show variations of the induction electrode
102.
In the variation shown in FIG. 7, the electrode 102 comprises three
coils 116 arranged side by side. In this case, directions of
current flowing through adjacent portions of these coils 116
coincide with each other to enable electromagnetic fields formed by
adjacent coils not to interfere with each other.
In the variation shown in FIG. 8, three coils 117 are arranged at
vertexes of an equilateral triangle. When arranged in this manner,
it cannot be avoided that directions of current flowing through
adjacent portions of two coils become reverse to each other,
whatever direction current flowing through each coil may be set to
have. In this variation, therefore, the phase of high frequency
applied to each of three coils 117 is shifted from the other by 120
degrees (=360/3) to thereby enable electromagnetic fields formed by
adjacent coils to less interfere with each other. As shown in FIG.
1, a phase shift circuit 114 is arranged between the matching
circuit 108 of each coil and a power supply 112 in this case to
shift the phase of each coil from the other.
In the variation shown in FIG. 9, four coils 118 are arranged at
vertexes of a rectangle. When directions of current flowing through
adjacent portions of coils arranged side by side coincide with each
other in this case, those of current flowing through adjacent
portions of coils arranged on a diagonal line of the rectangle
become reverse to each other. In this variation, therefore, the
phase of high frequency applied to each of four coils 118 is
shifted from the other by 90 degrees (=360/4) to thereby enable
electromagnetic fields formed by coils on the diagonal line to less
interfere with each other. As shown in FIG. 1, the phase shift
circuit 114 is also arranged between the matching circuit 108 of
each coil and the power supply 112 in this case to shift the phase
in each coil from the other.
Although voltage is applied from a single high frequency power
supply to coils in the electrode 102 shown in FIGS. 6 through 9,
every coil may has a power supply. The spiral shape and the turn
number of each coil may be changed according to the film forming
process selected.
FIGS. 12 through 14 show variations of first and second gas supply
heads 62 and 82.
FIG. 12 is a bottom view showing a variation of the first lower
head through which gas to be decomposed is supplied. This head 152
is made of the same material as that of the first head 62 shown in
FIG. 2. It is a pipe lattice 156 comprising an outer pipe frame and
pipes extending in the outer pipe frame in the vertical direction.
The pipe lattice 156 has an area 10-50% larger than the process
region of the substrate S to thereby fully cover the whole of it.
Vertical pipes are arranged in the outer pipe frame of the pipe
lattice 156 at the same interval. Supply holes 154, orienting just
downwards, are formed in the underside of the pipe lattice 156 at
the same interval as that between the vertical pipes in the outer
pipe frame of the pipe lattice 156. They are therefore arranged in
a plane parallel to the support face of the work table 22 and the
substrate S on it to fully and uniformly cover the whole of the
process region of the substrate S. Each pipe of the pipe lattice
156 has an outer diameter of 1/4 inches with a wall thickness of 1
mm under the standard and each supply hole 154 has a diameter of
0.1 mm-0.5 mm.
FIG. 13 is a bottom view showing a variation of the second upper
head through which gas to be transformed into plasma is supplied.
This head 162 is also made of the same material as that of the
above-mentioned second head 82. It is substantially the same in
dimension and structure as the first head 62 shown in FIG. 2. The
connection tube 86 is connected to a pipe lattice 166 at plural or
four points thereof, two of which are paired each other and opposed
to the other remaining two. Supply holes 164, orienting not
sidewards as seen in the head 82 but just downwards, are formed in
the underside of the pipe lattice 166 at crossed pints thereof.
FIG. 14 is a bottom view showing another variation of the second
upper head through which gas to be transformed into plasma is
supplied. This head 172 is made of the same material as that of the
above-mentioned second head 82. It is substantially the same in
dimension and structure as the first head 152 shown in FIG. 12. The
connection tube 86 is connected to a pipe lattice 176 at plural or
four points thereof, two of which are paired each other and opposed
to the remaining two. Supply holes 174 are oriented not sidewards
as seen in the head 82 but just downwards.
The shape of supply heads shown in FIGS. 2, 3 and 12 through 14 can
be changed according to that of objects to be processed. They can
be shaped like a circle when objects to be processed have a shape
of circle like semiconductor wafers.
A test relating to the distribution of flow rates of gas supplied
through the supply holes 64 was carried out, using the head 62 or
pipe lattice 76 of the shower type shown in FIG. 2. Results thus
obtained will be described.
Briefing of Calculations
The head 62 to be calculated comprised combining quartz-made pipes,
each having an outer diameter of 1/4 inches (and an inner diameter
of 4.2 mm), as pipe lattice 76. Supply holes 64 each having a
diameter D were arranged I=7 units in a direction X and J=6 units
in a direction Y and their total became 42 units (=I.times.J).
Gases were supplied to the pipe lattice 76 through the tube 66
which were connected to it at four points thereof.
It was assumed in the calculations that the head 62 was arranged in
the process chamber 16 which had been set to have pressure Pr and
temperature Tr.
A thermal-liquid analysis soft ware "FLUENT" was used in the
analysis, but it was difficult to define the combination of
cylindrical pipes and it was therefore assumed that each pipe was a
square column whose sectional area of flow path had a side of 4 mm.
The sectional area of flow path is 1.15 times larger than in the
practical case. The increase of this sectional area of flow path
must be considered in the result of analysis.
The flow rate of gas flowing into the process chamber could not be
defined as a boundary condition. Therefore, difference
.DELTA.P=Ps-Pr was used as the boundary condition wherein Pr
denoted pressure in the process chamber and Ps pressure at the
point at which the tube 66 was connected to the head 62.
The supply hole 64 is quite small, as compared with the whole of
the head 62, and the number of lattices to be calculated becomes
large accordingly. To reduce the burden of calculations, therefore,
the following modeling was carried out.
i) The head 62 is symmetrical in all directions. Analysis was
therefore conducted about 1/4 of the whole of the head 62.
ii) A porous media model was used at each supply hole 64 of the
head 62 to provide pressure effect in accordance with its hole
diameter.
Conditions used in the calculations are shown in Table 1.
TABLE-US-00003 TABLE 3 D Ps Pr Ti Case (null) (Torr) (Torr)
(.degree. C.) Gas Composition 1 0.5 1.2 0.2 250 20% SiH.sub.4 + 80%
N.sub.2 2 0.3 1.2 0.2 250 20% SiH.sub.4 + 80% N.sub.2 3 0.3 2.2 0.2
250 20% SiH.sub.4 + 80% N.sub.2
Results and Study
Flow rate distributions Gij/Gm obtained under the. condition in
each case are shown in FIGS. 15 through 17 and Total flow rates
obtained and the uniformity of flow rate distributions are shown in
Table 4. Gij represents a flow rate at each supply hole 64 and
Gm=G/I.times.J denotes an average flow rate.
TABLE-US-00004 TABLE 4 Case G (sccm) Unif. (+%) 1 137 25 2 66.5 8.8
3 130 5.8
When case 1 is compared with case 2, it is found that the
uniformity of flow rate distribution becomes better as the diameter
D of each supply hole 64 becomes smaller. When case 2 is compared
with case 3, the uniformity becomes by far better as G is
increased, but it is found that D contributes more to a better
uniformity of flow rate distribution than G does. In short, D may
be made as small as possible to obtain a uniform flow rate
distribution. When D is made small, however, film is deposited on
the substrate to copy positions of supply holes on the substrate. A
measure of increasing the distance between the head 62 and the
substrate S, for example, will be needed in this case.
FIGS. 18 and 19 show a variation of the system for cooling the
coils 106a and 106b. No head 122 of the shower type for supplying
coolant such as nitrogen gas is provided in this variation but a
coolant flow passage 184 is formed instead in a ceramics-made seat
182. A pair of the seats 182 are provided to correspond to the
coils 106a and 106b and they are spiraled extending along their
corresponding coils 106a and 106b. The coolant flow passage 184 is
connected to a coolant source 188 via a temperature adjuster member
186 and coolant supplied from the coolant source 188 is circulated
in the coolant flow passage 184. Gas such as N.sub.2 or liquid
coolant commercially available can be used as coolant. A line 192
is connected to an end of the upper chamber 18 and
temperature-adjusted gas is introduced into the chamber 18 through
the line 192 to adjust pressure in the chamber 18.
FIGS. 20 and 21 are sectional views showing main portions of the
plasma CVD apparatus according to second and third embodiments of
the present invention. These embodiments are the same as the first
apparatus shown in FIG. 1 except the following points. The same
components as those of the first embodiment will be therefore
described only when needed.
In the second apparatus shown in FIG. 20, the second head 82,
through which gas to be transformed into plasma is supplied, is not
provided, but this gas is supplied directly between the partition
plate 14 and the first head 62 through the tube 86.
In the third apparatus shown in FIG. 21, the tube 86 is not
provided, but all of process gases are supplied into the process
chamber 16 through the first head 62. The distance between the
coils 106a, 106b and the first head is made by far smaller than
that in the first and second embodiments. Gases supplied through
the head 62 are transformed directly into plasma by electromagnetic
fields generated by the coils 106a and 106b. In the third
embodiment, a head provided with no spaces 78 can be used instead
of the lattice head 62 having spaces 78. This is because spaces 78
of the lattice head 62 in the first and second embodiments are
intended mainly to enable ions and electrons drawn from plasma,
which is formed above the head 62, to pass through them.
A process system of the cluster tool type provided with a plasma
process apparatus according to the present invention will be
described with reference to FIG. 22.
The system has an air-tight common transfer chamber 210. Pressure
in the common transfer chamber 210 is kept to be in a range of
n.times.10.sup.-3Torr-n.times.10.sup.-2Torr. A first transfer arm
212 for transferring a substrate by an electrostatic chuck (not
shown) is arranged in the common transfer chamber 210.
Air-tight containers 221, 223 and 225 of process apparatus 220, 222
and 224 are connected to three sides of the common transfer chamber
210. Gate valves 214, 216 and 218 are arranged between the transfer
chamber 210 and the containers 221, 223, 225 to selectively
communicate the transfer chamber 210 with one of them. One of the
gate valves 214, 216 and 218 is opened at a time to prevent the
process apparatus 220, 222 and 224 from being influenced by another
through the transfer chamber 210.
At least one of the process apparatus 220, 222 and 224, but all of
them in this system are plasma process apparatuses according to the
present invention. Induction electrodes 226, 228 and 230 each
comprising a pair of flat spiral coils are arranged in centers of
the process apparatus 220, 222 and 224.
An auxiliary vacuum chamber 234 is connected to a fourth side of
the common transfer chamber 210 through a gate valve 232. It is
used to pre-heat the substrate to a predetermined temperature
before the substrate is processed. It is also used to cool the
substrate, which has been heated while being processed, to a
predetermined temperature before the substrate is transferred into
the cassette or mounted on a certain place. The transfer arm 212 in
the common transfer chamber 210 is used to transfer the substrate
between the auxiliary vacuum chamber 234 and one of the process
apparatus 220, 222 and 224.
Pressure in the auxiliary vacuum chamber 234 is kept to be in a
range of n.times.10.sup.-3Torr-n.times.10.sup.-2Torr. A resistance
heater embedded in a table or a lamp for directly heating the
substrate can be used as the pre-heating member. A tube through
which commercially available coolant or liquid nitrogen is
circulated in a table can be used as the cooling member. Heat
transmitting gas such as He is supplied between the substrate and
the table to increase heat transmission in vacuum. When the
pre-heating and cooling members are arranged like steps, plural
substrates can be individually heated and cooled at the same
time.
A second transfer chamber 238 is connected to that side of the
auxiliary vacuum chamber, which is opposed to the common transfer
chamber 210, through a gate valve 236. A second transfer arm 240 is
arranged in the second transfer chamber 238. A cassette chamber 244
is connected to that side of the second transfer chamber 238, which
is opposed to the auxiliary vacuum chamber 234, through a gate
valve 242. At least one cassette 246 in which plural or 25 sheets
of substrates can be horizontally housed is mounted on a stage (not
shown) in the cassette chamber 244. A gate valve 248 is arranged to
that side of the cassette chamber 244, which is opposed to the
second transfer chamber 238, to communicate the cassette chamber
244 with outside the process system.
It will be described how the above-described process system is
operated.
The cassette 246 in which substrates are housed is transferred from
another semiconductor process system to the above-described one by
an auto-transfer unit such as the robot (ACV). It is transferred
into the cassette chamber 244 through the gate valve 248 and placed
at a certain position in the chamber 244.
The gate valve 248 is closed and gas in the cassette chamber 244 is
replaced by inactive gas such as N.sub.2. The gate valve 242 is
then opened and substrates in the cassette 246 are transferred one
by one into the pre-heating section in the auxiliary vacuum chamber
234 by the second transfer arm 240 in the second transfer chamber
238.
The gate valve 236 is closed and the auxiliary vacuum chamber 234
is exhausted to a predetermined pressure. After the pre-heating of
substrates is finished, the gate valve 232 is opened and the
transfer arm 212 receives the substrate in the auxiliary vacuum
chamber 234 and transfers it into the common transfer chamber 210.
The gate valve 232 is then closed.
The substrate is transferred from the common transfer chamber 210
into selected one of the apparatus 220, 222 and 224 by the transfer
arm 212 and processed in it. The substrate to which all of the
processes have been applied is returned reversely on the same
course and finally to the cassette 246 in the cassette chamber 244
and housed in it.
The apparatus 220, 222 and 224 can be used to apply the same
process to plural substrates. They can also be used to successively
apply different processes to one substrate.
The process of manufacturing transistors of the thin film type can
be cited as an example of successively applying different processes
to one substrate. According to this transistor making process,
three layers of a-Si (amorphous silicon), SiNx (silicon nitride)
and n.sup.+ type a-Si films are successively formed on a glass
substrate. When the plasma CVD system intended to carry out the
transistor making process employs the CVD apparatus of the present
invention described with reference to FIGS. 1 through 21, a more
uniform film forming process can be applied to a substrate having a
larger area.
As the process apparatus 220, 222 and 224, parallel plate type
plasma process, heat CVD, ECR type plasma process, sputtering,
ashing and etching apparatuses can be used to meet any process
intended.
The plasma process apparatus according to first through third
embodiments of the present invention have been described as CVD
apparatus, but the present invention can be also applied to the
plasma etching, ashing and sputtering apparatuses. According to the
present invention, plasma generated relative to the substrate can
be made more uniform and the uniformity of process applied to a
face of the substrate can be improved to a greater extent.
In particular, a plasma etching apparatus according to the present
invention, which includes an induction electrode comprising a
plurality of coils and a shower head for supplying an etching gas,
is suitable for etching a transparent electrode made of indium tin
oxide (ITO), which is used as a common electrode of a LCD.
Additional advantages and modifications will readily occur to those
skilled in the art. Therefore, the invention in its broader aspects
is not limited to the specific details, and representative devices,
shown and described herein. Accordingly, various modifications may
be made without departing from the spirit or scope of the general
inventive concept as defined by the appended claims and their
equivalents.
* * * * *