U.S. patent number RE36,986 [Application Number 08/061,917] was granted by the patent office on 2000-12-12 for apparatus and methods for measuring permeability and conductivity in materials using multiple wavenumber magnetic interrogations.
This patent grant is currently assigned to Massachusetts Institute of Technology. Invention is credited to James R. Melcher, deceased.
United States Patent |
RE36,986 |
Melcher, deceased |
December 12, 2000 |
Apparatus and methods for measuring permeability and conductivity
in materials using multiple wavenumber magnetic interrogations
Abstract
Devices and analytical techniques are disclosed for measuring
spatial profiles of complex permeability and conductivity of a
material by multiple wavenumber interrogations. Coil array
structures are disclosed which define a number of different
fundamental wavelengths (or wavenumbers). Spatially periodic
interrogation signals (of temporal frequency ".omega.") from the
coil array structures are attenuated by varying degrees in the
material undergoing analysis, depending on the wavenumber ("k"),
thereby permitting the derivation of composite complex
permeability/conductivity profile.
Inventors: |
Melcher, deceased; James R.
(late of Lexington, MA) |
Assignee: |
Massachusetts Institute of
Technology (Cambridge, MA)
|
Family
ID: |
46254234 |
Appl.
No.: |
08/061,917 |
Filed: |
May 14, 1993 |
Related U.S. Patent Documents
|
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
|
104179 |
Oct 2, 1987 |
4814690 |
Mar 21, 1989 |
|
Reissue of: |
325695 |
Mar 20, 1989 |
05015951 |
May 14, 1991 |
|
|
Current U.S.
Class: |
324/232; 324/239;
324/243 |
Current CPC
Class: |
G01N
27/72 (20130101); G01R 27/2635 (20130101) |
Current International
Class: |
G01N
27/72 (20060101); G01R 27/26 (20060101); G01N
027/72 (); G01R 033/12 () |
Field of
Search: |
;324/222,223,228,232,233,234,239,240,241,242,243,244 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
|
|
|
|
|
|
|
0894547 |
|
Dec 1981 |
|
SU |
|
1095101 |
|
May 1984 |
|
SU |
|
Other References
Krampfner, Yehuda D. and Johnson, Duane D., "Flexible Substrate
Eddy Current Coil Arrays," Review of Progress in Quantitative
Nondestructive Evaluation, vol. 7A, pp. 471-478, 1988. .
Zaretsky et al., LEES Technical Report, pp. 1-43, Jul.,
1986..
|
Primary Examiner: Snow; Walter E.
Attorney, Agent or Firm: Hamilton, Brook, Smith &
Reynolds, P.C.
Parent Case Text
REFERENCE TO RELATED APPLICATION
This application is a continuation-in-part of U.S. patent
application Ser. No. 104,179 filed Oct. 2, 1987 now U.S. Pat. No.
4,814,690 issued Mar. 21, 1989.
Claims
What is claimed is:
1. An apparatus for measuring a property of a material, the
apparatus comprising:
an array of electromagnetic elements capable of imposing a magnetic
field in a material and sensing a resulting electromagnetic
response;
a wavenumber controller connected to said array for applying a
current to subsets of said electromagnetic elements and thereby
defining fundamental wavenumbers associated with said imposed
magnetic field in the material; and
an analyzer connected to said wavenumber controller, including
means for comparing the resulting responses sensed by said
electromagnetic array at different wavenumbers to predictions in
order to derive a spatial profile of complex permeability or
conductivity in the material.
2. The apparatus of claim 1 wherein the electromagnetic array
comprises a plurality of electrically-driven layered coils.
3. The apparatus of claim 1 wherein the electromagnetic array
comprises a plurality of layered coil arrays having conduction
paths distributed so as to approximate a sinusoidal
distribution.
4. The apparatus of claim 1 wherein the electromagnetic array
further comprises a plurality of driver coil arrays and at least
one sensor coil array, the driver coil arrays each having a
different wavelength and each disposed at a different location on
the surface of the material.
5. The apparatus of claim 4 wherein the sensing array of coils
comprises a plurality of layered coil arrays capable of sensing the
flux induced at the surface of the material at a plurality of
wavelengths.
6. The apparatus of claim 4 wherein the electromagnetic array
further comprises a plurality of coil elements formed as
intermeandering conductors.
7. The apparatus of claim 4 wherein the wavenumber controller
further comprises electronic switches for applying one current to
the appropriate driver coil array.
8. The apparatus of claim 4 wherein the wavenumber controller
further comprises means for connecting the terminals of the sensor
coil array or arrays so that a signal is detected at the wavelength
that is the same as that of a corresponding .[.the.]. driver coil
array.
9. The apparatus of claim 1 wherein the permeability/conductivity
analyzer is a microcomputer programmed to measure the
permeability/conductivity of the material at multiple wavelengths
based upon a parametric model of the material and further includes
means for performing interactive analyses to obtain a refined
spatial profile.
10. A method for measuring the properties of a material, the method
comprising:
disposing an array of electromagnetic elements in proximity to a
material, the electromagnetic elements being adapted to impose a
magnetic field in the material and sense a resulting
electromagnetic response;
interrogating the material with a magnetic field at multiple
wavelengths .[.defines.]. .Iadd.defined .Iaddend.by subsets of said
electromagnetic elements;
sensing the resulting electromagnetic response at multiple
wavelengths; and
deriving a spatial profile of at least one property of the material
from said electromagnetic response.
11. The method of claim 10 wherein the step of interrogating the
material further includes sequentially interrogating the material
at multiple wavelengths.
12. The method of claim 10 wherein the step of interrogating the
material further includes simultaneously interrogating the material
at multiple wavelengths.
13. A method for measuring the properties of a material, the method
comprising:
disposing an array of electromagnetic elements in proximity to a
material, the electromagnetic elements being adapted to impose a
magnetic field in the material and sense a resulting
electromagnetic response;
interrogating the material with a magnetic field at multiple
wavelengths defined by subsets of said electromagnetic
elements;
sensing the resulting electromagnetic response at multiple
wavelengths to derive a spatial profile of at least one property of
the material;
measuring the gain at the shortest wavelength to derive a profile
estimation for a first material layer; and
measuring the gain with at least one longer wavelength to derive a
profile estimation for a subsequent material layer.
14. The method of claim 13 wherein the method further includes
employing a parametric model to obtain said estimations for the
first and subsequent material layers.
15. The method of claim 13 wherein a linear model is employed to
represent the layers.
16. The method of claim 13 wherein an exponential model is employed
to represent the layers.
17. The method of claim 13 wherein a continuous model is employed
to represent the layers.
18. The method of claim 13 wherein a step function model is
employed to represent the layers.
19. The method of claim 13 wherein the method further includes
refining the estimate of each layer based on a prior estimation of
all the layers other than the one being refined.
20. The method of claim 18 wherein the step of refining the
estimate is iteratively repeated for each layer until a best fit to
a parametric model is obtained. .Iadd.
21. An apparatus for measuring a property of a material, the
apparatus comprising:
an array of electromagnetic elements which impose a magnetic field
with a dominant spatial wavenumber, and approximating a sinusoidal
distribution in the material to be measured and sense a resulting
electromagnetic response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the array of electromagnetic elements to
sense the resulting electromagnetic response of the material to the
imposed magnetic field..Iaddend..Iadd.22. An apparatus for
measuring a property of a material, the apparatus comprising:
an array of electromagnetic elements capable of imposing a magnetic
field with a dominant spatial wavenumber, the electromagnetic array
having conduction paths distributed so as to approximate a
sinusoidal distribution and sensing a resulting electromagnetic
response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the array of electromagnetic elements to
sense the resulting electromagnetic response of the material to the
imposed magnetic field..Iaddend..Iadd.23. The apparatus of claim 22
wherein the electromagnetic array comprises a driver conductor and
at least one sensor coil array..Iaddend..Iadd.24. The apparatus of
claim 23 comprising at least two sensor coil arrays on opposite
sides of a driver coil array in a
common plane therewith..Iaddend..Iadd.25. The apparatus of claim 23
wherein the electromagnetic array further comprises a plurality of
coil elements formed as meandering conductors with current flow in
alternating directions..Iaddend..Iadd.26. An apparatus for
measuring a property of a material, the apparatus comprising:
an array of electromagnetic elements capable of imposing a magnetic
field with a dominant spatial wavenumber, and sensing a resulting
electromagnetic response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material;
an analyzer connected to the array of electromagnetic elements to
sense the resulting electromagnetic response of the material to the
imposed magnetic field; and
the analyzer derives complex permeability or conductivity of the
material based upon a parametric model of the
material..Iaddend..Iadd.27. A method for measuring the properties
of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber and additional
spatial shorter wavenumbers; and
sensing a resulting electromagnetic response of the material to
both dominant and shorter wavenumbers of the imposed magnetic
field..Iaddend..Iadd.28. The method of claim 27 wherein the step of
sensing is performed by a sensor coil array..Iaddend..Iadd.29. A
method for measuring the properties of a material, the method
comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber and sensing the
electromagnetic response of the material with a sensor coil array
of elements disposed on opposite sides of and with the same spatial
wavenumber as the electromagnetic elements adapted to impose the
magnetic field..Iaddend..Iadd.30. The method of claim 27 wherein
the measured properties of the material are complex permeability or
conductivity of the material in a layer defined by the spatial
wavenumber..Iaddend..Iadd.31. The method of claim 27 wherein the
method further includes employing a parametric model to obtain an
estimation of the material property from the electromagnetic
response of the material..Iaddend..Iadd.32. The method of claim 27
wherein a linear model is employed to represent the electromagnetic
response in layers..Iaddend..Iadd.33. The method of claim 27
wherein an exponential model is employed to represent the
electromagnetic response in layers..Iaddend..Iadd.34. The method of
claim 27 wherein a continuous model is employed to represent the
electromagnetic
response in layers..Iaddend..Iadd.35. The method of claim 27
wherein a step function model is employed to represent the
electromagnetic response in layers..Iaddend..Iadd.36. The method of
claim 27 wherein in the electromagnetic response is sensed by a
sensor coil array of elements disposed parallel to the
electromagnetic elements imposing the magnetic
field..Iaddend..Iadd.37. The method of claim 36 wherein the
elements of the sensor coil array are of the same spatial
wavenumber as the array of electromagnetic elements imposing the
magnetic field..Iaddend..Iadd.38. The method of claim 36 wherein
the sensor coil array and the electromagnetic elements imposing the
magnetic field are disposed in a common plane..Iaddend..Iadd.39.
The method of claim 36 wherein the sensor coil array and the
electromagnetic elements imposing the magnetic field are disposed
in parallel but offset planes..Iaddend..Iadd.40. The method of
claim 27 wherein the electromagnetic elements are formed as
meandering conductors with current flow in alternating
directions..Iaddend..Iadd.41. The apparatus of claim 21 wherein the
analyzer comprises a sensor coil array parallel to the array of
electromagnetic elements capable of
imposing the magnetic field..Iaddend..Iadd.42. The apparatus of
claim 41 wherein the sensor coil array is of the same spatial
wavenumber as the array of electromagnetic elements capable of
imposing the magnetic field..Iaddend..Iadd.43. The apparatus of
claim 41 wherein the sensor coil array and the electromagnetic
elements imposing the magnetic field are disposed in a common
plane..Iaddend..Iadd.44. The apparatus of claim 41 wherein the
sensor coil array and the electromagnetic elements imposing the
magnetic field are disposed in parallel but offset
planes..Iaddend..Iadd.45. An apparatus for measuring a property of
a material, the apparatus comprising:
electromagnetic elements comprising a driver coil and a separate
sensor coil, both driver and sensor coils to be positioned to only
one side of a material to be measured, which impose a magnetic
field with a dominant spatial wavenumber and shorter spatial
wavenumber in the material to be measured and sense a resulting
electromagnetic response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the electromagnetic elements to sense the
resulting electromagnetic response of the material to the imposed
magnetic field..Iaddend..Iadd.46. The apparatus of claim 45
comprising at least two sensor coil elements on opposite sides of a
driver coil element in a common plane therewith..Iaddend..Iadd.47.
An apparatus for measuring a property of a material, the apparatus
comprising:
electromagnetic elements comprising a driver coil formed as
meandering conductors with current flow in alternating directions
and a separate sensor coil, both driver and sensor coils to be
positioned to only one side of a material to be measured, capable
of imposing a magnetic field with a dominant spatial wavenumber in
the material to be measured and sensing a resulting electromagnetic
response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the electromagnetic elements to sense the
resulting electromagnetic response of the material to the imposed
magnetic field..Iaddend..Iadd.48. A method for measuring the
properties of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field by a sensor coil positioned to only a side
of the material in common with the electromagnetic elements
imposing the magnetic field..Iaddend..Iadd.49. A method for
measuring the properties of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field by a sensor coil positioned to only a side
of the material in common with the electromagnetic elements
imposing the magnetic field, and
the sensor coil elements disposed on opposite sides of and with the
same spatial wavelength as the electromagnetic elements imposing
the magnetic field..Iaddend..Iadd.50. An apparatus for measuring a
property of a material, the apparatus comprising:
electromagnetic elements capable of imposing a magnetic field with
a dominant spatial wavenumber in the material to be measured and
sensing a resulting electromagnetic response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the electromagnetic elements to sense the
resulting electromagnetic response of the material to the imposed
magnetic field, wherein the analyzer derives complex permeability
or conductivity of the material based upon a parametric model of
the material..Iaddend..Iadd.51. An apparatus for measuring a
property of a material, the apparatus comprising:
electromagnetic elements capable of imposing a magnetic field with
a dominant spatial wavenumber in the material to be measured and
sensing a resulting electromagnetic response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the electromagnetic elements to sense the
resulting electromagnetic response of the material to the imposed
magnetic field;
wherein the electromagnetic elements comprise a sensing coil
elements of the same spatial wavenumber as driver electromagnetic
elements capable of imposing the magnetic field..Iaddend..Iadd.52.
An apparatus for measuring a property of a material, the apparatus
comprising:
electromagnetic elements capable of imposing a magnetic field with
a dominant spatial wavenumber in the material to be measured and
sensing a resulting electromagnetic response;
a signal source for applying an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the electromagnetic elements to sense the
resulting electromagnetic response of the material to the imposed
magnetic field;
wherein the electromagnetic elements comprise driver coil elements
and parallel sensor coil elements, the driver coil and the sensor
coil elements being disposed in parallel but offset
planes..Iaddend..Iadd.53. A method for measuring the properties of
a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field;
wherein the electromagnetic response is sensed by sensor coil
elements disposed on opposite sides of and with the same spatial
wavelength as the electromagnetic elements adapted to impose the
magnetic field..Iaddend..Iadd.54. A method for measuring the
properties of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field;
wherein the measured properties of the material are complex
permeability or conductivity of the material in a layer defined by
the spatial wavenumber..Iaddend..Iadd.55. A method for measuring
the properties of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber;
sensing a resulting electromagnetic response of the material to the
imposed magnetic field; and
employing a parametric model to obtain an estimation of the
material property from the electromagnetic response of the
material..Iaddend..Iadd. 6. The method of claim 55 wherein a linear
model is employed to represent the electromagnetic response in
layers..Iaddend..Iadd.57. The method of claim 55 wherein an
exponential model is employed to represent the electromagnetic
response in layers..Iaddend..Iadd.58. The method of claim 55
wherein a continuous model is employed to represent the
electromagnetic response in layers..Iaddend..Iadd.59. The method of
claim 55 wherein a step function model is employed to represent the
electromagnetic response in layers..Iaddend..Iadd.60. A method for
measuring the properties of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field;
wherein the electromagnetic response is sensed by sensor coil
elements disposed parallel to the electromagnet elements imposing
the magnetic field and the sensor coil elements are of the same
spatial wavenumber as the electromagnetic elements imposing the
magnetic field..Iaddend..Iadd.61. A method for measuring the
properties of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field;
wherein the electromagnetic response is sensed by sensor coil
elements disposed parallel to the electromagnetic elements imposing
the magnetic field and the sensor coil elements and the
electromagnetic elements imposing the magnetic field are disposed
in a common
plane..Iaddend..Iadd. 2. A method for measuring the properties of a
material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field;
wherein the electromagnetic response is sensed by sensor coil
elements disposed parallel to the electromagnetic elements imposing
the magnetic field and the sensor coil elements and the
electromagnetic elements imposing the magnetic field are disposed
in parallel but offset planes..Iaddend..Iadd.63. A method for
measuring the properties of a material, the method comprising:
disposing electromagnetic elements in proximity to the
material;
through the electromagnetic elements imposing a magnetic field in
the material with a dominant spatial wavenumber; and
sensing a resulting electromagnetic response of the material to the
imposed magnetic field;
wherein the electromagnetic elements are formed as meandering
conductors
with current flow in alternating directions..Iaddend..Iadd.64. The
apparatus of claim 21 wherein the electromagnetic elements comprise
a driver coil and at least one separate sensor coil, both to be
positioned to only one side of the material to be
measured..Iaddend..Iadd.65. A method as claimed in claim 27 wherein
the resulting electromagnetic response is sensed by a sensor coil
positioned to only a side of the
material in common with the electromagnetic
elements..Iaddend..Iadd.66. An apparatus for measuring a property
of a material, the apparatus comprising:
an array of electromagnetic elements capable of imposing a magnetic
field using a continuous meandering drive winding conductor with a
dominant spatial wavenumber in the material to be measured and
sensing a resulting electromagnetic response;
a signal source which applies an electromagnetic signal to the
electromagnetic elements to impose a magnetic field in the
material; and
an analyzer connected to the array of electromagnetic elements to
sense the resulting electromagnetic response of the material to the
imposed magnetic field..Iaddend.
Description
BACKGROUND OF THE INVENTION
The technical field of this invention is magnetometry and, in
particular, the spatial interrogation of materials to deduce their
physical properties from measurements of complex permeability and
conductivity.
Magnetometers or arrays of coils have been used for noninvasive
measurement of kinematic and physical properties of conducting
materials. For example, eddy current sensors have been used to
measure the thickness of conducting strips, as disclosed in Soviet
Patents 573,609 and 502,205. Another use of such eddy current
sensors has been in flaw detection, as disclosed in U.S. Pat. No.
3,939,404. However, the utility of these sensors typically is
limited by their inability to provide enough information to resolve
distributions of parameters.
There exists a need for better permeability/conductivity measuring
devices and methods. In particular, there exists a need for better
devices and methods for conducting non-destructive interrogations
of materials to determine their physical properties across a
spatial profile.
SUMMARY OF THE INVENTION
Devices and analytical techniques are disclosed for measuring the
spatial profile of complex permeability and conductivity of a
material by multiple wavenumber interrogations. Coil structures are
disclosed which define a number of different fundamental
wavelengths (or wavenumbers, k). Spatially periodic interrogation
signals (of temporal frequency .omega.) from the windings of a
driver structure are attenuated to varying degrees in the material
undergoing analysis. The degree of attenuation depends upon the
wavenumber, k, thereby permitting the derivation of a composite
profile of complex permeability and conductivity.
The techniques described herein are referred to as an "imposed
.omega.-k" approach to magnetometry. A spatially periodic field is
imposed upon the material via a coil structure under the control of
a wavenumber controller. The coil structure can be near the
material surface or embedded. The properties of the material are
reflected in the measurement of the current or voltage induced in
the sensing coils in response to this field. By varying the
wavenumber, k, a spatial distribution of complex permeability and
conductivity is deduced as a function of the temporal frequency,
.omega., when the property depends only on the coordinate distance,
x, perpendicular to the coil structure.
Sensors, according to the present invention, are useful not only in
the noninvasive monitoring of the magnetization and conduction
properties of materials during manufacturing, but also for
measurement of the properties of thin magnetizable films, such as
are used for magnetic memories, or for measurement of proximity
and/or layer thickness parameters in magnetizable or conductive
media.
In one illustrated embodiment, the coil structure consists of an
array of superimposed driver windings, designed so that a spatially
periodic magnetic field can be imposed on the material over a range
of spatial wavelengths, and an array of sensing windings that
detect the material response to the fields induced by the driving
windings. In another illustrated embodiment, the coil structure is
formed from a plurality of different-sized and, hence, different
wavelength arrays of meandering driver and sensor coils. In either
case, a permeability/conductivity analyzer compares the resulting
response sensed by the sensor coil array at different wavenumbers
to predictions based on a postulated model in order to derive a
spatial profile of the permeability and conductivity of the
material.
The invention will next be described in connection with certain
illustrated embodiments; however, it should be appreciated that
various modifications, additions and subtractions can be made by
those skilled in the art without departing from the spirit or scope
of the invention. For example, in one illustrated embodiment, the
conductor comprising an individual driver coil is distributed so
that the current will take on an essentially sinusoidal
distribution in space and the capability for multiple wavelength
excitation obtained by superimposing these coils in adjacent layers
near the surface of the material. These same types of driver coils
could be use in an array with coils of different wavelengths at
different locations on the surface of the material, as in the
second embodiment illustrated. Other types of electromagnetic
elements capable of imposing a magnetic field upon a material and
sensing a resulting electromagnetic response can also be employed.
Yet another modification would be to use the impedance of the
driving coils as the sensing variable and dispense with the sensing
coils. Moreover, various refinements to the estimation algorithms
described below can be incorporated.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is an overall schematic diagram of a
permeability/conductivity analyzing apparatus according to the
present invention.
FIG. 2 is a partially cut-away, perspective view of a layer of
material having a non-uniform distribution of permeability and/or
conductivity in the x direction showing an embodiment of the
invention employing superimposed driver and sensor coil
windings.
FIG. 3 is a schematic side view of a further apparatus according to
the invention illustrating two sensor winding arrays, and four
driver winding arrays.
FIG. 4 is a top view of a uniform thickness layer of copper which
can be used to make a driver winding array to impose a distribution
of current that is approximately sinusoidal in spatial
distribution.
FIG. 5 is a top view of the (a) sensor and (b) sensor winding
arrays shown in FIG. 3.
FIG. 6 is a partially cut-away, perspective view of a layer of
material having a non-uniform distribution of
permeability/conductivity in the x direction showing another
embodiment of the invention in which meandering sensor and driver
coil arrays are disposed at different positions on the lower
surface of the material.
FIG. 7 is a top view illustrating three meandering sensor and
driver coil arrays disposed at different positions on the surface
of the material.
FIG. 8 is a flow diagram of a permeability/conductivity analyzer
according to the present invention.
DETAILED DESCRIPTION
In conventional magnetometry, the temporal frequency response is
used to study the magnetic and electrical attributes of the
materials, such as can be discerned through the effect on the
fields of molecular and domain-level magnetization and ionic and
electronic conduction. In the conventional measurement of complex
permeability, a toroid of the material would typically be used. An
N turn winding wrapped around the toroid is then driven by a
current, i.sub.1, and the complex permeability of the material is
reflected in the flux linkage, .lambda..sub.1. This toroid should
have a major radius that is large enough compared to the minor
cross-sectional dimensions of the toroid that the fields induced in
the material are essentially uniform over the cross-sectional area,
A, of the toroid. The response to a sinusoidal drive having the
frequency .omega. can be defined as the complex inductance ##EQU1##
where .lambda..sub.1 and i.sub.1 are the complex amplitudes of the
flux linkage and current, respectively.
In complex notation, the magnetoquasistatic fields in the material
satisfy the magnetic flux continuity law
where .mu.=.mu.(x).
The toroid is often used to make the magnetic field permeating the
material as uniform as possible. However, the complex permeability,
.mu., can actually vary with the axial position, x, in the toroid.
The effect of the non-uniform permeability is evident in the
measured temporal frequency response. Provided that the material is
sufficiently insulating that the field due to currents induced in
the material are negligible, Ampere's law requires that ##EQU2##
where N is the total number of turns and the contour integral is
taken in the x direction, around the axis of the toroid.
It follows from Eq. 2 that the product of the magnetic flux density
and the cross-sectional area is the same at a location, x, around
this closed contour so that .lambda..sub.1 =NA.mu.H.sub.x is
independent of x Thus, Eq. 3 can be combined with Eq. 1 to give
##EQU3## and it follows that the measured complex inductance is
related to the distribution of complex permeability by ##EQU4##
Measurement of L(.omega.) at a single temporal frequency therefore
gives at best a spatial average of the complex permeability. With
assumptions concerning the frequency dependence of the local
complex permeability, it is possible to use the full temporal
frequency response to distinguish between certain attributes of the
non-uniformity. However, the necessity for making assumptions of
this type strongly limits what additional information can be
obtained concerning the physical mechanisms underlying the complex
permeability (such as domain scale dynamics).
Moreover, even with these assumptions, there is no unique
relationship between the actual spatial distribution of complex
permeability and the temporal frequency response. This follows from
Eq. 5 which makes it evident that at a given frequency there are
many different distributions giving rise to the same complex
inductance. Contributions to the integral coming from the
neighborhood at x=a can be interchanged with those at x=b (where a
and b are any pair of values), and the integral will be the same.
Hence, there can be no unique inference of the spatial distribution
from the temporal frequency response alone.
In the present invention, devices and methods are disclosed for
using the spatial frequency response (the response as a function of
the dominant wavenumber k) to deduce the spatial distribution of
complex permeability and/or conductivity (as a function of temporal
frequency, .omega.) when that property depends only on the
coordinate, x, perpendicular to the coil-array structure.
This approach exploits a property of magnetoquasistatic fields. If
the fields are made to be periodic in one direction, y (the
direction of periodicity in the plane of a coil array), they decay
in the perpendicular direction, x. If the material is not
significantly conducting, this decay in the perpendicular
direction, x, is at a rate that is inversely proportional to the
wavelength, .lambda.=2.pi./k. If the effect of conductivity is
important, they decay even more rapidly.
Thus, if a spatially periodic array of coils is used to impose a
current and sense the resulting magnetic flux linkage induced in
the sensing coil array, the response to the short wavelengths will
reflect the permeability and conductivity of the material in the
immediate vicinity of the coil-array. The longer-wave coil arrays
will not only sample the properties of the immediately adjacent
material but those further into the material as well. As the
wavelength is further increased, the permeability and conductivity
at an increasing range from the sensing surface will influence the
measurement. In the case where the material is highly conducting,
the depth of penetration and hence of sensitivity will be limited
to approximately the skin depth d=.sqroot.2/.omega..mu..sigma.
where .sigma. is the electrical conductivity. Disclosed in the
following is apparatus and method for efficiently reconstructing
the permeability/conductivity profile from measurements made as a
function of wavenumber (wavelength).
In one "imposed .omega.-k" magnetometry apparatus 10 shown in FIG.
1, a spatially periodic field is imposed on a material 12 by means
of an array of coils 14 at the surface of the material. The coil
array can be formed on layers of insulating material initially
coated by conducting material with the conducting path fabricated
by etching away the undesired conductor. The sample 12, which in
general is non-uniform in the direction, x, perpendicular to the
array is shown just above the coil array. In the apparatus shown, a
subset of the coils is driven with the temporally sinusoidally
varying current, i.sub.1 by wavenumber controller 16 while another
subset is connected to high-impedance electronics of the
permeability/conductivity analyzer 18 that measures the voltage
v.sub.2, at the terminals of the sensing coil arrays. For example
the analyzer 18 can be a microcomputer programmed to measure the
permeability/conductivity of the material at multiple wavelengths
based upon a parametric model of the material and perform
interactive analyses to obtain a refined spatial profile.
A coil array system which can be conventionally constructed from
layers of arrays, each fabricated with conductors on a single
surface of an insulator and in which the wavelength is varied by
terminal connections that shift the excitation current from one
driving array to another is shown in FIG. 2. An edge view of the
sensing and driving coil arrays is shown in FIG. 3. It should be
noted that the sensor arrays (a) and (b) of FIG. 3 are illustrated
as separate layers stacked one upon the other, however, it should
be clear that this arrangement is the equivalent of the coplanar
array configurations shown in FIGS. 2 and 5 and can be used
interchangeably therewith. In this example, there are two sensing
coil arrays, respectively designated as the (a) and (b) sensor
windings, and four driver coil windings. Top views of one of the
driving arrays and of the sensor array are respectively shown in
FIG. 4 and FIG. 5.
The manner in which these arrays can be layered, with the windings
insulated from each other by the insulation that serves as a
backing of the array just above, is illustrated by FIG. 2, where
the two sensor windings and one of the four driver windings is
shown. In some applications, it will be preferable to have the
short-wavelength driver coil be the driver coil closest to the
material although, provided the array layers are thin compared to
the shortest wavelength, the shortest wavelength driver coil array
could be the furthest from the material, as shown in FIG. 3. In
this six layer system, there are four wavelengths that can be
obtained by appropriate connection of the driver coil array
terminals to the driving current, i.sub.1. The (a) and (b) sensor
coils are respectively arrayed in series, but with relative
polarities such that the signal induced in the (a) array terminals
reinforces that induced in the (b) array terminals. From the
magnetic axes excited by the driving coils arrays, indicated by the
vertical arrows in FIG. 3, it follows that the relative polarity of
the series connection of the sensor arrays must be reversed with
each increase in the wavelength. At the expense of halving the
output voltage, this switching of the output terminal connections
can be avoided by eliminating either the (a) or the (b) sensor coil
array. With a further reduction in sensor voltage, the single
sensor array could be replaced by a smaller number of coils, with
the minimum being one.
An alternative embodiment is shown in FIG. 6 and FIG. 7, where the
coil array consists of a set of different-sized meandering coil
arrays. Illustrated in FIG. 7 is an array having three different
wavelengths. Provided the sample facing the coil array has the same
permeability/conductivity profile, measurements taken from each can
be consistently combined to provide the desired profile.
Measurements of the response of the coil array define the gain G,
which in general is a complex quantity reflecting both the
magnitude and phase of the response. In the case shown in FIG. 1,
the gain might be defined as v.sub.2 /i.sub.1. The data to be used
in determining the distribution of complex
permeability/conductivity consists of a set of gains, G=G.sub.m,
measured at the dominant wavenumber k.sub.j, j=1 . . . N.
The dominant wavenumbers are related to the wavelength or
periodicity length, .lambda..sub.j, by
The wavelength is illustrated by FIG. 3. In the following, the data
designated by the subscript, j, is taken as being in the order of
increasing wavelength and, hence, decreasing wavenumber.
Various representations of the complex permeability/conductivity
distributions can be used. For example, the distributions can be
represented by layers, each having uniform properties.
Alternatively, each layer can have an exponential distribution.
Included in each representation is the possibility of having
complex surface properties and conductivity at one or more of the
interfaces. Without the complex surface properties, the
representations approximate the distribution by "stair-step" and
piece-wise continuous functions, respectively.
The "direct problem" is the basis for inferring the distribution
from the data. Here, the object is to predict the gain, given the
distribution of permeability/conductivity. To prevent errors in
deducing the distribution that are associated with the geometry of
the coil array, it is desirable to have a method of solving the
direct problem that takes the finite width and spacing of the coil
conductors, as well as the properties of their substrate, into
account. This is especially true if, as to be described next, the
inversion procedure "marches" from short to long-wave lengths.
Although finite difference and finite element numerical methods can
be used to take into account the effects of geometry, a collocation
technique based on a spatial Fourier decomposition of the fields
has been shown to be well suited to the direct problem. At very low
frequencies where the current density is uniformly distributed in
the driver and sensor conductors, the Fourier decomposition can be
carried out without requiring the collocation technique.
Using the Fourier decomposition approach at higher frequencies, the
mixed boundary value problem posed where the coil array interfaces
the media is solved by representing the distribution of the surface
current density within the coil conductors, or alternatively the
vectors potential distribution within and between the coil
conductors by a piece-wise continuous surface current density and
vector potential having collocation values K.sub.j and A.sub.j,
where the distributions are respectively pieced together.
Given the distribution of material properties, the specific surface
inductance density, L.sub.n can be predicted. This is the complex
normal magnetic flux density response of the media (at the plane of
its interface with the coil array structure) to a complex magnetic
scalar potential in that plane having a purely sinusoidal spatial
distribution with wavenumber k.sub.n and purely sinusoidal time
variation, with angular frequency .omega.. The fields above the
coil array and at the interface between the coil conductors are
also represented by their spatial Fourier components. These fields
are then made self-consistent with those in the media by a
numerical evaluation of the collocation surface, current densities,
K.sub.j, and vector potentials, A.sub.j, making it possible to
evaluate the admittances in the circuit. These admittances
represent the response with arbitrary types of termination.
For the particular case where the gain is defined as the complex
ratio of the output voltage to driving current, where Y.sub.11,
Y.sub.12, Y.sub.21, and Y.sub.22 are the admittances of a standard
two-port network representing the combination of coil array and
media subject to measurement, ##EQU5## The same circuit elements
can be used to predict the driven impedance or the sensor response
when the sensing coils are terminated in an arbitrary
impedance.
Inversion methods build on having the capability for solving a
family of direct problems. Inversion methods must deduce the
discrete properties needed to complete the representation from the
available discrete gain measurements made over an appropriate range
of imposed dominant wavelengths. These are the gain measurement
summarized by Eq. 6. In general, N gains are measured ranging over
wavelengths short enough to resolve the distribution close to the
array and ending at a wavelength long enough to make the field
extend far enough into the material to reflect material properties
to the desired depth. With properly designed coils and material
properties that do not suffer extreme variations, profiles are
sensed to a depth that is approximately a quarter wavelength. In
general, the inversion method then provides for an identification
of N parameters describing the permeability/conductivity
distribution from these N measurements. In the case of a stair-step
approximation, the distribution of complex
permeability/conductivity would be represented by the N complex
permeabilities/conductivities of the steps. In the case where
(perhaps exponential) functions are pieced together in a continuous
manner, the N identified permeabilities/conductivities could be
those at the locations where the smooth distribution is pieced
together. In any case, the introduction of complex surface
permeabilities/conductivities imposes a requirement for additional
data. Thus, with N measurements over an appropriate range of
wavelengths, it would be possible to deduce N-S bulk parameters
describing either the stair-step or the piece-wise distributions
and S complex surface permeabilities/conductivities.
It is important to note that the inversion process can be carried
out using measurements taken at the same frequency. Thus, the
permeability/conductivity distributions can be deduced at each
frequency. The information inherent to the temporal frequency
response is therefore preserved and can be exploited for further
parameter identification purposes.
The estimation of parameters from experimental data can be
formalized by defining an error that is the difference between the
measured gains and those predicted by the direct method
Here, .theta. is a list or one or more parameters to be estimated
and e is a column vector of errors associated with the different
gains.
If, as in the illustration used here, there are as many measured
gains as parameters to be determined, the estimation process then
amounts to finding those values of .theta. that make
If there are more measurements than parameters so that the
identification problem is overspecified, the estimation process can
be represented as a minimization of a quadratic norm based on these
errors and possibly a weighting function.
As shown in FIG. 8, in one algorithm, the estimation problem can be
reduced to a sequence of single parameter estimations (or perhaps
two parameter estimations) by again exploiting the properties of
quasistatic fields. For example, suppose the inhomogeneity is
smooth. Then, the gain G.sub.m (k.sub.1) measured at the shortest
wavelength is used in conjunction with a single layer model to
deduce the complex permeability/conductivity of the material
nearest to the coil arrays. With this in hand, the complex
permeability/conductivity of the material somewhat further out is
determined from the gain G.sub.m (k.sub.2) measured at the next
longer wavelength. Like the first step, this one amounts to a
single parameter estimation of the complex
permeability/conductivity of the second layer in a two-layer model
for the media. Following this procedure, the measured gain G.sub.m
(k.sub.j) is used in conjunction with a model representing the
complex permeability/conductivity by j parameters, the last of
which is associated with the layer furthest from the coil array
(and about a quarter wavelength from the coil array, based on the
wavenumber of that measurement) to make a single parameter
estimation. Once the first pass has been made through the data,
working from short to long wavelengths and, hence, performing a
sequence of single parameter estimations of the profile working
outward from the coil arrays the parameters can be refined by
passing through the data, again from short to long wavelengths. In
these subsequent iterations, the parameters of layers other than
the one being estimated are taken as being their values on the last
estimation.
An optimal parameter estimation scheme takes advantage of all a
priori knowledge of the complex permeability/conductivity
distribution. For example, if it is known that the material
actually consists of one or more discrete layers across the
boundaries of which it is expected that the complex
permeability/conductivity suffers an abrupt change, then a model
can be used in which one or more of the layers represent the
boundaries between actual physical layers. If the locations of such
abrupt changes are not known, the parameter estimation scheme can
then be one in which the location of such a boundary is one of the
parameters being estimated. In some instances, the inversion can
best be reduced to one or perhaps a sequence of multiple parameter
estimations. For one skilled in the art, the single parameter
estimation techniques described herein are readily generalized to
the simultaneous estimation of multiple parameters.
* * * * *