U.S. patent number RE33,947 [Application Number 07/608,397] was granted by the patent office on 1992-06-02 for laser scribing method.
This patent grant is currently assigned to Semiconductor Energy Laboratory Co., Ltd.. Invention is credited to Hisato Shinohara.
United States Patent |
RE33,947 |
Shinohara |
June 2, 1992 |
Laser scribing method
Abstract
A laser scribing system and method is described. In the system,
a film formed on a substrate is irradiated with laser beam which is
focused on a limited portion of the film in order to remove the
portion and produce a groove. Laser beam used for eliminating the
portion of film formed on a substrate is deprived of its border
portion in advance of the focusing. Sperical aberration is
suppressed due to this elimination.
Inventors: |
Shinohara; Hisato (Sagamihara,
JP) |
Assignee: |
Semiconductor Energy Laboratory
Co., Ltd. (Kanagawa, JP)
|
Family
ID: |
16889196 |
Appl.
No.: |
07/608,397 |
Filed: |
November 2, 1990 |
Related U.S. Patent Documents
|
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
|
97190 |
Sep 16, 1987 |
4861964 |
|
|
Reissue of: |
188766 |
May 3, 1988 |
04865686 |
Sep 12, 1989 |
|
|
Foreign Application Priority Data
|
|
|
|
|
Sep 26, 1986 [JP] |
|
|
61-229252 |
|
Current U.S.
Class: |
216/65;
219/121.69; 219/121.85; 216/75 |
Current CPC
Class: |
B23K
26/40 (20130101); B23K 26/0738 (20130101); B23K
26/364 (20151001); B23K 26/066 (20151001); H01L
39/2467 (20130101); H01L 21/268 (20130101); H01L
21/2026 (20130101); H05K 1/0306 (20130101); H05K
3/38 (20130101); H05K 3/027 (20130101); B23K
2103/172 (20180801) |
Current International
Class: |
B23K
26/00 (20060101); B23K 26/36 (20060101); B23K
26/073 (20060101); B23K 26/06 (20060101); H01L
39/24 (20060101); H01L 21/20 (20060101); H01L
21/02 (20060101); H01L 21/268 (20060101); H05K
3/38 (20060101); H05K 1/03 (20060101); H05K
3/02 (20060101); B44C 001/22 (); C03C 015/00 ();
C03C 025/06 () |
Field of
Search: |
;156/643,654,655,656,657,662,666,901,345 ;204/192.24
;427/53.1,62,63 ;505/728,816,820
;219/121.65,121.68,121.69,121.75,121.85 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Primary Examiner: Powell; William A.
Attorney, Agent or Firm: Sixbey, Friedman, Leedom &
Ferguson
Parent Case Text
This is .Iadd.a reissue of application Ser. No. 07/188,766, filed
May 3, 1988, now U.S. Pat. No. 4,865,686 which is .Iaddend.a
divisional application of Ser. No. 097,190, filed Sep. 16,
1987.Iadd., now U.S. Pat. No. 4,861,964.Iaddend..
Claims
I claim:
1. A method for scribing a film formed on a substrate
comprising:
expanding a laser beam from an eximer laser;
eliminating a border portion from the expanded laser beam;
focusing the laser beam shaped by the elimination on said substrate
and removing the irradiated portion of said film.
2. The method of claim 1 wherein said eximer laser emitted from
said eximer laser has less than 400 namo meters in wavelength.
3. The method of claim 2 wherein said film is severed into a
plurality of separated parts by grooves which are formed by
removing corresponding portions of said film.
4. The method of claim 2 wherein the expanding step is carried out
only in one direction.
5. The method of claim 4 wherein the expanded laser beam is focused
with respect to the direction perpendicular to the expanding
direction.
6. The method of claim 5 wherein the focusing step is carried out
repeatedly on said substrate while said substrate is shifted to the
focusing direction, so that a plurality of grooves are formed on
said substrate.
7. The method of claim 1 wherein said laser beam is pulsed.
8. The method of claim 7 wherein the pulse width of the pulsed
laser beam is less than 50 namo seconds.
9. The method of claim 1 where said expanding step is mainly
implemented with respect to one direction and the laser beam
deprived of the border portion becomes a flat beam having a line in
cross section.
10. The method of claim 1 further comprising a step of eliminating
the edge portions of said laser beam having a line in cross
section.
Description
BACKGROUND OF THE INVENTION
This invention relates to laser scribing system and method.
Besides photolithography, laser processing is well-known to process
transparent conductive film which are used for liquid crystal
device. YAG lasers have been used as laser beam sources in such a
laser processing, the wave length being 1.06 microns for example.
In such a laser processing, a groove is formed by continuously
irradiation of a sequence of spot-shaped laser beams in the form of
a line prescribed in a substrate to be processed. Because of this,
the process condition, such as the energy density of a laser beam,
the scanning speed, and so forth must be controlled in accordance
with the characteristics of the transparent conductive film to be
processed such as thermal conductivity. For this reason, it is
difficult to improve the yield of product, when commercialized in
mass-production, without compromising the specification of the
product. Further, the laser energy 1.23 eV per photon which
corresponds to the wavelength of 1.06 microns, is very small as
compared with 3 to 4 eV which represents an energy gap range of a
usual transparent conductive film, such as tin oxide, indium oxide,
indium tin oxide, zinc oxide, or the like. Still further, in a
laser processing using Q-switching operation, laser beams have to
scan at 30 to 60 cm/min with 0.5 to 1 W per spot of laser beam
which has 50 microns in sectional diameter, 40 mm in focal
distance, 3 KHz in pulse frequency and 60 namo seconds in pulse
width. Due to such a high energy, cracking may cause on an
underlying layer on which the transparent conductive layer has been
formed and make the device defective. The damage of the underlying
surface is caused in the shapes of scales.
In addition, with a prior art laser processing, a number of fine
grooves can not be formed with 10 to 50 microns in interval, and
etching must be implemented after laser processing because the
imperfect formation of grooves. Further, the lasing condition must
be monitored for each process to comply with the fluctuation of the
output of the laser, especially the fluctuation at an initial
output power. This invention is an improvement of Japanese Patent
Application No. Sho 59-211,769.
SUMMARY OF THE INVENTION
It is therefore an object of the invention to provide a laser
scribing system and a laser scribing method capable of removing a
portion of a film completely on a substrate without damaging the
underlying surface.
It is therefore an object of the invention to provide a laser
scribing system and a laser scribing method in which spherical
aberration is suppressed.
In order to accomplish the above objects, a laser scribing system
makes use of a flat-shaped laser beam with its cross section having
20 to 200 microns, e.g., 150 microns in width and 10 to 60 cm,
e.g., 30 cm in length, with which a line on a substrate to be
processed is simultaneously irradiated and scribed. Preferably, the
laser beam has less than 400 nm in wavelength and is pulsed with a
pulse width less than 50 namo meters. By means of such a pulsed
laser beam, optical energy absorption efficiency is enhanced by a
factor of more than 100 and, eventually the process time is
shortened by a factor of more than 10, as compared with prior
art.
Further, in accordance with the invention, a border portion of the
laser beam is taken away so that the effect of spherical aberration
is limited. Because of this, the edge of a processed portion on the
substrate becomes clear and a sharp boundary can be obtained, even
if a groove is desired to be formed on a substrate with 30 cm in
length and 10 to 30 microns, e.g., 20 microns in width.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a cross section view of a laser scribing system in
accordance with the present invention.
FIGS. 2(A) to 2(D) are explanatory views showing the cross sections
of laser beam.
FIGS. 3(A) and 3(B) are a plan view and a side view of a substrate
processed in accordance with the invention.
FIGS. 4(A) and 4(B) are plan and section view showing another
embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring to FIG. 1, a laser processing system is illustrated. In
the figure, the system comprises a substrate holder and a laser
radiating system. The laser radiating system consists of an eximer
laser 1 (KrF) distributed by Questec Inc. (wavelength=248 nm;
energy gap=5.0 eV), an expander 2, a slit 3 and a cylindrical lense
4. A laser beam 20 emitted from the laser 1 having a cross section
of 16 mm.times.20 mm with a power density of 5.6.times.10.sup.-2
mJ/mm.sup.2 (FIG. 2(A)) is expanded by the expander 2 with respect
to the direction perpendicular to the drawing sheet of FIG. 1. The
expanded laser beam 21 having a cross section of 16 mm.times.300 mm
(FIG. 2(B)) is deprived of its periphery (border) by means of the
slit 3. The deprived laser beam 22 having a cross section of 2
mm.times.300 mm (FIG. 2(C)) is focused on a transparent conductive
film 11, such as a tin oxide film (energy gap=3.5 eV) formed on a
substrate 10 which is mounted on a base 25. The width of the laser
beam on the film 11 is 20 microns. The base 25 can be moved in X
and Y directions so that the laser beam can be focused on the
desired position.
The width of the slit 3 is determined in accordance with the case.
However, the width must be chosen so that the laser beam can
focused to the width in which spherical aberration can be
neglected. Namely the performance of the lense indirectly
determines the width of focused laser beam. The pulse width of the
laser beam is less than 50 namo second, e.g., 20 namo seconds and
the repetition frequency is 1-100 Hz, e.g., 10 Hz. According to
experimental, a perfect groove was formed on a fifth-layered
transparent film by laser scribing with pulsed laser beams at 10
Hz/pulse, and a plurality of separated parts of the film were
produced with 20 microns in width and 15 mm in interval only within
the process time of 0.8 minute. After ultrasonic-cleaning, the
underlying surface was not damaged. It took only 5 to 10 minutes to
complete the whole process.
The formation of groove can be repeatedly carried out while a
substrate to be processed is periodically moved in the direction
perpendicular to the groove. By this method, a plurality of grooves
are formed in parallel with 30 cm in length and 20 microns in width
at the interval of 400 micron respectively, as shown in FIG. 3.
Namely, the substrate is shifted to the perpendicular direction by
15 mm after each irradiation of one pulse of laser beam. Of course,
by selectively shifting the substrate on which adjacent irradiation
portions are arranged with no interval, a plurality of strips with
20 microns in width at 400 microns interval in between can be
formed.
By the similar process to the above experiment, a non-single
crystalline semiconductor film doped with hydrogen or fluorine was
formed with 1000 .ANG. in thickness on a substrate. The film was
severed into a plurality of parts by laser scribing with pulsed
laser beams having a wavelength of less than 400 nm with 10 namo
seconds in pulse width and 2.3 mJ/mm.sup.2 in average output power.
The underlying surface was not damaged.
Referring to FIGS. 4(A) and 4(B), another embodiment is
illustrated. In this embodiment, a superconducting coil is
manufactured. On the (100) plane of a substrate 31 made of
magnesium oxide (MgO), a superconducting film with the (001) plane
is formed. The superconducting film is made of a ceramic generally
expressed by a molecular formula; ABCu.sub.3 O.sub.6-8, where A
stands for one or more rare earth element and B stands for one or
more alkali earth metal, e.g., YBa.sub.2 Cu.sub.3 O.sub.6-8. By the
similar process as explained in the description of the preceding
embodiment, a number of grooves 1-1, 1-2, 1-3, r-1, r-2, r-3, t-1,
t-2, t-3, b-1, b-2 and b-3 are formed. In so doing, obturating
means such as a pair of screens to change the length of the laser
beam in cross section by eliminating the ends thereof has to be
provided between the laser 1 and the expander 2, or between the
expander 2 and the slit 3. Namely, after forming the groove l-1,
the length of the laser beam is shortened by the elimination and
scribes the groove l-2. And, by the same manner, remaining grooves
aligned in the same direction are formed in sequence. Then the
substrate 31 is turned by 90.degree., and the grooves t-1 to b-3
are scribed. As a result, a superconducting coil is manufactured in
the form of a spiral coil.
The invention should not be limited to the above particular
embodiments and many modifications and variations may cause to
those skilled in the art. For example, there may be provided,
between the beam expander and the surface to be processed, an
integrater, a condensing lense, a projection lense and so forth in
order to make the optical system more precise.
* * * * *