Pressing member for substrate polishing apparatus

Description

FIG. 1 is a first perspective view, observed from a front of a pressing member for a substrate polishing apparatus showing our new design;

FIG. 2 is a second perspective view, observed from a rear thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a rear view thereof;

FIG. 5 is a top view thereof;

FIG. 6 is a bottom view thereof; and,

FIG. 7 is a right-side view thereof, a left-side view being a mirror image thereof.

Claims

CLAIM The ornamental design for a pressing member for a substrate polishing apparatus, as shown and described.

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Inventors:	Kamimura; Kenji (Tokyo, JP), Nakanishi; Masayuki (Tokyo, JP), Yamamoto; Satoru (Tokyo, JP), Miyasawa; Yasuyuki (Tokyo, JP), Kodera; Kenji (Tokyo, JP)
Applicant:	Name City State Country Type EBARA CORPORATION Tokyo N/A JP
Assignee:	EBARA CORPORATION (Tokyo, JP)
Appl. No.:	D/659,970
Filed:	August 14, 2018

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Related U.S. Patent Documents

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	Application Number	Filing Date	Patent Number	Issue Date
	29592889	Feb 3, 2017	D834075

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Foreign Application Priority Data

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Aug 5, 2016 [JP]			2016-016852
Aug 5, 2016 [JP]			2016-016853
Aug 5, 2016 [JP]			2016-016854
Aug 5, 2016 [JP]			2016-016855

Current U.S. Class:	D15/126
Current International Class:	1509
Field of Search:	;D8/70,71 ;D15/126,138

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References Cited [Referenced By]

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U.S. Patent Documents

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Primary Examiner: Palasik; Patricia A
Attorney, Agent or Firm: Pearne & Gordon LLP

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