Reactor tube for semiconductor production devices

Description

FIG. 1 is a front view of a reactor tube for semiconductor production devices, showing our new design;

FIG. 2 is an enlarged cross-sectional view, along line 2-2 in FIG. 1;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof; and,

FIG. 7 is a cross-sectional view, along line 7-7 in FIG. 6, shown with additional environment related to use being shown in broken lines.

The broken lines shown in the drawings represent portions of the reactor tube for semiconductor production devices that form no part of the claimed design. The rear view of the reactor tube for semiconductor production devices has been omitted because it does not illustrate the claimed design.

Claims

CLAIM The ornamental design for a reactor tube for semiconductor production devices, as shown and described.

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Inventors:	Nagata; Tomoyuki (Iwate, JP)
Applicant:	Name City State Country Type Tokyo Electron Limited Tokyo N/A JP
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/578,225
Filed:	September 20, 2016

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Foreign Application Priority Data

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Mar 30, 2016 [JP]			2016-006969

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/158-177,179,180,182,199,122,144 ;D10/104.1,108,61,62 ;D11/143,144,152 ;D14/216,240,356,509,210 ;D17/22 ;D23/323,328,333,335,336,337,341,352,357,370,385,386,399,400,499,331,406 ;D12/303,315 ;118/50,722,715,724,733 ;205/118,123 ;D9/500,452,454 ;D15/122,199,138 ;D8/16,19,323,399,45 ;D16/135,219,302 ;D7/367,404,503,523,584,586,624.1,630,340,677 ;D26/24,36,110 ;D19/40 ;D25/100 ;D6/332

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References Cited [Referenced By]

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U.S. Patent Documents

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Primary Examiner: Asch; Jeffrey D
Assistant Examiner: Bell; Tracey J
Attorney, Agent or Firm: Ipusa, PLLC