Patent | Date |
---|
Abnormality Detection Method And Processing Apparatus App 20220270940 - HISHIYA; Shingo ;   et al. | 2022-08-25 |
Support method, design support apparatus, and a non-transitory recording medium storing a design support program Grant 11,361,125 - Koyama , et al. June 14, 2 | 2022-06-14 |
Substrate processing apparatus, substrate loading method, and substrate processing method Grant 10,934,618 - Nagata March 2, 2 | 2021-03-02 |
Design Support Method, Design Support Apparatus, And A Non-transitory Recording Medium Storing A Design Support Program App 20200184126 - KOYAMA; Hiroyuki ;   et al. | 2020-06-11 |
Substrate processing apparatus Grant 10,636,627 - Kaneko , et al. | 2020-04-28 |
Substrate Processing Apparatus, Substrate Loading Method, And Substrate Processing Method App 20200115796 - NAGATA; Tomoyuki | 2020-04-16 |
Injector And Substrate Processing Appartatus Using The Same, And Substrate Processing Method App 20200102652 - NAGATA; Tomoyuki | 2020-04-02 |
Control logic diagram analysis device and control logic diagram analysis method Grant 10,359,757 - Nagata , et al. | 2019-07-23 |
Control logic diagram creation support apparatus Grant 10,347,024 - Nagata , et al. July 9, 2 | 2019-07-09 |
Control Logic Diagram Creation Support Apparatus App 20190043230 - NAGATA; Tomoyuki ;   et al. | 2019-02-07 |
Wafer boat support table and heat treatment apparatus using the same Grant 10,014,199 - Nagata , et al. July 3, 2 | 2018-07-03 |
Control Logic Diagram Analysis Device And Control Logic Diagram Analysis Method App 20180143605 - NAGATA; Tomoyuki ;   et al. | 2018-05-24 |
Reactor tube for semiconductor production devices Grant D800,080 - Nagata October 17, 2 | 2017-10-17 |
Device embedded substrate and manufacturing method of device embedded substrate Grant 9,756,732 - Seki , et al. September 5, 2 | 2017-09-05 |
Wafer Boat Support Table And Heat Treatment Apparatus Using The Same App 20170140964 - NAGATA; Tomoyuki ;   et al. | 2017-05-18 |
Substrate Processing Apparatus App 20160276206 - KANEKO; Hirofumi ;   et al. | 2016-09-22 |
Method of forming silicon film Grant 9,293,323 - Obu , et al. March 22, 2 | 2016-03-22 |
Method of forming seed layer, method of forming silicon film, and film forming apparatus Grant 9,263,256 - Obu , et al. February 16, 2 | 2016-02-16 |
Message sequence generation method and message sequence generation device Grant 9,208,016 - Nagata , et al. December 8, 2 | 2015-12-08 |
Device Embedded Substrate and Manufacturing Method of Device Embedded Substrate App 20150327369 - Seki; Yasuaki ;   et al. | 2015-11-12 |
Method Of Forming Silicon Film And Film Forming Apparatus App 20140187025 - OBU; Tomoyuki ;   et al. | 2014-07-03 |
Method Of Forming Seed Layer, Method Of Forming Silicon Film, And Film Forming Apparatus App 20140187024 - OBU; Tomoyuki ;   et al. | 2014-07-03 |
Message Sequence Generation Method And Message Sequence Generation Device App 20140032963 - Nagata; Tomoyuki ;   et al. | 2014-01-30 |
Joint Member, Joint, Substrate Processing Apparatus And Limit Member App 20130328306 - SATO; Izumi ;   et al. | 2013-12-12 |