Electrostatic chuck

Description

The patent or application file contains at least one drawing executed in color. Copies of this patent or patent application publication with color drawing(s) will be provided by the Office upon request and payment of the necessary fee.

FIG. 1 is a perspective view of an electrostatic chuck.

FIG. 2 is a top plan view of the electrostatic chuck of FIG. 1.

FIG. 3 is a front side view of the electrostatic chuck of FIG. 1, the other sides being identical.

FIG. 4 is a bottom plan view of the electrostatic chuck of FIG. 1.

FIG. 5 is a cross-sectional view of the electrostatic chuck of FIG. 1 taken along section line 5-5 of FIG. 4.

FIG. 6 is an enlarged partial view of FIG. 5.

FIG. 7 is an enlarged partial view of FIG. 1.

FIG. 8 is a color photograph illustrating the electrostatic chuck of FIG. 2 from a top view; and,

FIG. 9 is color photograph illustrating the electrostatic chuck of FIG. 1 from a perspective view.

The broken lines in the figures form no part of the claimed design.

The drawings are lined for color. The pattern on the surface of the claimed design represents the color copper.

Claims

CLAIM The ornamental design for an electrostatic chuck, as shown and described.

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Inventors:	Martin; Daniel (Cupertino, CA), Agarwal; Monika (Fremont, CA)
Applicant:	Name City State Country Type Martin; Daniel Agarwal; Monika Cupertino Fremont CA CA US US
Assignee:	Applied Materials, Inc. (Santa Clara, CA)
Appl. No.:	D/407,085
Filed:	November 22, 2011

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Current U.S. Class:	D15/140
Current International Class:	1509
Field of Search:	;D13/140 ;D15/140

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References Cited [Referenced By]

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U.S. Patent Documents

4724510	February 1988	Wicker et al.
5055964	October 1991	Logan et al.
5213349	May 1993	Elliott
5350479	September 1994	Collins et al.
5382311	January 1995	Ishikawa et al.
5530616	June 1996	Kitabayashi et al.
5539609	July 1996	Collins et al.
5671117	September 1997	Sherstinsky et al.
5822171	October 1998	Shamouilian et al.
5883778	March 1999	Sherstinsky et al.
6028762	February 2000	Kamitani
6215642	April 2001	Sogard
6583980	June 2003	Wang et al.
D490827	June 2004	Okugawa
D497171	October 2004	Okugawa
D534135	December 2006	Monique
D561206	February 2008	Kitabayashi
2003/0198004	October 2003	Hiramatsu et al.
2004/0233609	November 2004	Yoshida et al.
2006/0221539	October 2006	Morita et al.

Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Patterson & Sheridan, LLP