Substrate holder
Teramoto , et al. September 11, 2
U.S. patent number D666,979 [Application Number D/393,934] was granted by the patent office on 2012-09-11 for substrate holder. This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Norifumi Sato, Akihiro Teramoto.
| United States Patent | D666,979 |
| Teramoto , et al. | September 11, 2012 |
Substrate holder
Claims
CLAIM What is claimed is the ornamental design for a substrate holder, as shown and described.
| Inventors: | Teramoto; Akihiro (Kumamoto, JP), Sato; Norifumi (Kumamoto, JP) |
|---|---|
| Assignee: | Tokyo Electron Limited (Tokyo,
JP) |
| Appl. No.: | D/393,934 |
| Filed: | June 10, 2011 |
Foreign Application Priority Data
| Dec 14, 2010 [JP] | 2010-029766 | |||
| Current U.S. Class: | D13/199 |
| Current International Class: | 1399 |
| Field of Search: | ;D13/199,101,118,120,121,133,182,184 ;294/901,902,907 ;361/230,234 ;414/941 ;438/106,113,121,125,126,455,456 ;D15/199 ;118/500,506 |
References Cited [Referenced By]
U.S. Patent Documents
| 6117238 | September 2000 | Begin |
| 6578891 | June 2003 | Suzuki et al. |
| 6874515 | April 2005 | Ishihara et al. |
| D552138 | October 2007 | Kondo et al. |
| D614593 | April 2010 | Lee et al. |
| 2007/0076345 | April 2007 | Bang et al. |
Attorney, Agent or Firm: Posz Law Goup, PLC
Description
FIG. 1 is a top perspective view of a substrate holder showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof, the right side being a mirror image;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is an enlarged cross-sectional view taken along line 7-7 of FIG. 5 thereof.
The article is a substrate holder exchangeably attached to a substrate transfer arm holding and transferring a circular substrate, for example, a semiconductor wafer or the like.
* * * * *
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 