U.S. patent number D666,979 [Application Number D/393,934] was granted by the patent office on 2012-09-11 for substrate holder.
This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Norifumi Sato, Akihiro Teramoto.
United States Patent |
D666,979 |
Teramoto , et al. |
September 11, 2012 |
Substrate holder
Claims
CLAIM What is claimed is the ornamental design for a substrate
holder, as shown and described.
Inventors: |
Teramoto; Akihiro (Kumamoto,
JP), Sato; Norifumi (Kumamoto, JP) |
Assignee: |
Tokyo Electron Limited (Tokyo,
JP)
|
Appl.
No.: |
D/393,934 |
Filed: |
June 10, 2011 |
Foreign Application Priority Data
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Dec 14, 2010 [JP] |
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2010-029766 |
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Current U.S.
Class: |
D13/199 |
Current International
Class: |
1399 |
Field of
Search: |
;D13/199,101,118,120,121,133,182,184 ;294/901,902,907 ;361/230,234
;414/941 ;438/106,113,121,125,126,455,456 ;D15/199
;118/500,506 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Holland; Derrick
Attorney, Agent or Firm: Posz Law Goup, PLC
Description
FIG. 1 is a top perspective view of a substrate holder showing our
new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof, the right side being a mirror
image;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is an enlarged cross-sectional view taken along line 7-7 of
FIG. 5 thereof.
The article is a substrate holder exchangeably attached to a
substrate transfer arm holding and transferring a circular
substrate, for example, a semiconductor wafer or the like.
* * * * *