Plasma reactor showerhead face plate having concentric ridge pattern Patent Grant Angelov , et al. July 19, 2 [Novellus Systems, Inc.]

Plasma reactor showerhead face plate having concentric ridge pattern

Angelov , et al. July 19, 2

Patent Grant D641829

U.S. patent number D641,829 [Application Number D/378,161] was granted by the patent office on 2011-07-19 for plasma reactor showerhead face plate having concentric ridge pattern. This patent grant is currently assigned to Novellus Systems, Inc.. Invention is credited to Ivelin A. Angelov, James E. Caron, Ilia Kalinovshi.

United States Patent	D641,829
Angelov , et al.	July 19, 2011

**Please see images for: ( Certificate of Correction ) **

Plasma reactor showerhead face plate having concentric ridge pattern

Claims

CLAIM We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.

Inventors:	Angelov; Ivelin A. (Sunnyvale, CA), Caron; James E. (Tracy, CA), Kalinovshi; Ilia (Berkeley, CA)
Assignee:	Novellus Systems, Inc. (San Jose, CA)
Appl. No.:	D/378,161
Filed:	October 29, 2010

Current U.S. Class:	D23/213
Current International Class:	2301
Field of Search:	;D23/213,229,230 ;239/282,283 ;438/712

References Cited [Referenced By]

U.S. Patent Documents


D459434	June 2002	Fauquet
D459435	June 2002	Fauquet
D466183	November 2002	Tse
D495776	September 2004	Blomstrom
6983898	January 2006	Clark
D593640	June 2009	Schoenherr et al.
D599881	September 2009	Wang et al.
D619202	July 2010	Zhang
D623721	September 2010	Reynoso
D624155	September 2010	Yokoyama et al.

Primary Examiner: Webster; Robin
Attorney, Agent or Firm: Weaver Austin Villeneuve & Sampson LLP

Description

FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,

FIG. 5 is a cross-sectional view thereof, taken generally along line 5--5 in FIG. 3, showing succinctly the surface contours seen in FIGS. 1 and 3.

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