Angelov; Ivelin A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Angelov; Ivelin A..The latest application filed is for "apparatus for achieving ultra-high selectivity while etching silicon nitride".

Company Profile

0.4.5

Angelov; Ivelin A. - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus For Achieving Ultra-high Selectivity While Etching Silicon Nitride App 20180158692 - Zhu; Helen H. ; et al.	2018-06-07
Method for achieving ultra-high selectivity while etching silicon nitride Grant 9,911,620 - Zhu , et al. March 6, 2	2018-03-06
Method For Achieving Ultra-high Selectivity While Etching Silicon Nitride App 20160247688 - Zhu; Helen H. ; et al.	2016-08-25
Showerhead Configurations For Plasma Reactors App 20120108072 - Angelov; Ivelin A. ; et al.	2012-05-03
Plasma reactor showerhead face plate having concentric ridge pattern Grant D641,829 - Angelov , et al. July 19, 2	2011-07-19
Heated chuck for laser thermal processing Grant 7,731,798 - Shareef , et al. June 8, 2	2010-06-08
Laser thermal processing chuck with a thermal compensating heater module Grant 7,326,877 - Shareef , et al. February 5, 2	2008-02-05
Laser thermal processing chuck with a thermal compensating heater module App 20070004232 - Shareef; Iqbal A. ; et al.	2007-01-04
Heated chuck for laser thermal processing App 20060113290 - Shareef; Iqbal A. ; et al.	2006-06-01

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