Plasma cassette etcher

Description

FIG. 1 is a front perspective view of a plasma cassette etcher showing our new design;

FIG. 2 is a front elevational view of the plasma cassette etcher shown in FIG. 1;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a left side elevational view thereof, looking toward the left side thereof as it is shown in FIGS. 1 and 2; and

FIG. 7 is a right side elevational view thereof, looking toward the right side thereof as it is shown in FIGS. 1 and 2.

Claims

The ornamental design for a plasma cassette etcher, substantially as shown and described.

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Inventors:	Maher, Jr.; Joseph A. (Hamilton, MA), Zafiropoulo; Arthur W. (Manchester, MA)
Assignee:	Drytek, Inc. (Wilmington, MA)
Appl. No.:	06/337,373
Filed:	January 6, 1982

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Current U.S. Class:	D24/234
Field of Search:	;D24/1.1 ;156/345,643 ;204/192E

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References Cited [Referenced By]

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U.S. Patent Documents

D228455	September 1973	Amar et al.
D228755	October 1973	Amar et al.
4264393	April 1981	Gorin et al.
4341582	July 1982	Kohman et al.
4397708	August 1983	Frantzen

Primary Examiner: Ansher; Bernard
Attorney, Agent or Firm: Weingarten, Schurgin, Gagnebin & Hayes