U.S. patent number 8,382,423 [Application Number 12/168,787] was granted by the patent office on 2013-02-26 for micro-scale and meso-scale hydraulically or pneumatically powered devices capable of rotational motion.
This patent grant is currently assigned to Microfabrica Inc.. The grantee listed for this patent is Adam L. Cohen, Uri Frodis, Michael S. Lockard. Invention is credited to Adam L. Cohen, Uri Frodis, Michael S. Lockard.
United States Patent |
8,382,423 |
Frodis , et al. |
February 26, 2013 |
Micro-scale and meso-scale hydraulically or pneumatically powered
devices capable of rotational motion
Abstract
Embodiments are directed to micro-scale or meso-scale devices
having hydraulic or pneumatic actuation mechanisms incorporating
bearings elements (such as ball bearings, cylindrical bearings,
interference bearings, or hydrostatic bearings. Devices of some
embodiments are turbines. Some devices may function as medical
devices. Other embodiments are directed to multi-layer,
multi-material electrochemical fabrication methods for producing
such devices.
Inventors: |
Frodis; Uri (Los Angeles,
CA), Cohen; Adam L. (Los Angeles, CA), Lockard; Michael
S. (Lake Elizabeth, CA) |
Applicant: |
Name |
City |
State |
Country |
Type |
Frodis; Uri
Cohen; Adam L.
Lockard; Michael S. |
Los Angeles
Los Angeles
Lake Elizabeth |
CA
CA
CA |
US
US
US |
|
|
Assignee: |
Microfabrica Inc. (Van Nuys,
CA)
|
Family
ID: |
47721115 |
Appl.
No.: |
12/168,787 |
Filed: |
July 7, 2008 |
Related U.S. Patent Documents
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Number |
Filing Date |
Patent Number |
Issue Date |
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12139445 |
Jun 13, 2008 |
8241228 |
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10949744 |
Sep 24, 2004 |
7498714 |
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12134188 |
Jun 5, 2008 |
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12138404 |
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12138395 |
Jun 12, 2008 |
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11441578 |
May 26, 2006 |
7674361 |
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11625807 |
Jan 22, 2007 |
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11696722 |
Apr 4, 2007 |
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11598968 |
Nov 14, 2006 |
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11582049 |
Oct 16, 2006 |
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11478934 |
Jun 29, 2006 |
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11444999 |
May 31, 2006 |
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10697598 |
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11582049 |
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10697597 |
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May 7, 2003 |
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60948262 |
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Current U.S.
Class: |
415/83;
415/904 |
Current CPC
Class: |
A61B
17/3201 (20130101); A61B 17/32002 (20130101); A61B
2017/320775 (20130101); A61B 2017/00553 (20130101); A61B
17/22012 (20130101); A61B 2017/00526 (20130101); A61B
2017/00539 (20130101); A61B 2017/00544 (20130101); A61B
2017/00345 (20130101); A61B 17/320758 (20130101) |
Current International
Class: |
F04D
1/08 (20060101) |
Field of
Search: |
;415/904,83,84,85,86,87,903 ;433/131,132,103,120 ;606/180,170 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Cohen, et al., "EFAB: Batch Production of Functional, Fully-Dense
Metal Parts with Micron-Scale Features", Proc. 9th Solid Freeform
Fabrication, The University of Texas at Austin, Aug. 1998, pp. 161.
cited by applicant .
Adam L. Cohen, et al., "EFAB: Rapid, Low-Cost Desktop
Micromachining of High Aspect Ratio True 3-D MEMS", Proc. 12th IEEE
Micro Electro Mechanical Systems Workshop, IEEE, Jan. 17-21, 1999,
pp. 244-251. cited by applicant .
F. Tseng, et al., "EFAB: High Aspect Ratio, Arbitrary 3-D Metal
Microstructures Using a Low-Cost Automated Batch Process", MEMS
Symposium, ASME 1999 International Mechanical Engineering Congress
and Exposition, Nov. 1999. cited by applicant .
Adam L. Cohen, "3-D Micromachining by Electrochemical Fabrication",
Micromachine Devices, Mar. 1999, pp. 6-7. cited by applicant .
Gang Zhang, et al., "EFAB: Rapid Desktop Manufacturing of True 3-D
Microstructures", Proc. 2nd International Conference on Integrated
MicroNanotechnology for Space Applications, The Aerospace Co., Apr.
1999. cited by applicant .
F. Tseng, et al., "EFAB: High Aspect Ratio, Arbitrary 3-D Metal
Microstructures Using a Low-Cost Automated Batch Process", 3rd
International Workshop on High Aspect Ratio Microstructure
Technology (HARMST'99), Jun. 1999. cited by applicant .
Adam L. Cohen, et al., "EFAB: Low-Cost, Automated Electrochemical
Batch Fabrication of Arbitrary 3-D Microstructures", Micromachining
and Microfabrication Process Technology, SPIE 1999 Symposium on
Micromachining and Microfabrication, Sep. 1999. cited by applicant
.
Adam L. Cohen, "Electrochemical Fabrication (EFABTM)", Chapter 19
of the MEMS Handbook, edited by Mohamed Gad-El-Hak, CRC Press,
2002, pp. 19/1-19/23. cited by applicant .
"Microfabrication--Rapid Prototyping's Killer Application", Rapid
Prototyping Report, CAD/CAM Publishing, Inc., Jun. 1999, pp. 1-5.
cited by applicant.
|
Primary Examiner: White; Dwayne J
Attorney, Agent or Firm: Smalley; Dennis R.
Parent Case Text
RELATED APPLICATIONS
This application claims benefit of U.S. Nos. 61/018,255 filed Dec.
31, 2007, 61/018,229 filed Dec. 31, 2007, and 60/948,262 filed Jul.
6, 2007, and is a CIP of application Ser. No. 12/139,445 filed Jun.
13, 2008 now U.S. Pat. No. 8,241,228; the '445 application in turn
is a CIP of 10/949,744 filed Sep. 24, 2004 now U.S. Pat. No.
7,498,714, 12/134,188 filed Jun. 5, 2008 now abandoned, 12/138,404
filed Jun. 12, 2008 now abandoned, 12/138,395 filed Jun. 12, 2008
now abandoned, and 11/441,578 filed May 26, 2006 now U.S. Pat. No.
7,674,361, and claims benefit of App. Nos. 60/968,863 filed Aug.
29, 2007, 60/943,817 filed Jun. 13, 2007, 60/951,711 filed Jul. 24,
2007; 60/968,042 filed Aug. 24, 2007; 61/018,283 filed Dec. 31,
2007; the '744 application claims benefit of 60/506,016 filed Sep.
24, 2003; the '188 application claims benefit of App. Nos.
60/942,200 filed Jun. 5, 2007, 60/943,310 filed Jun. 12, 2007,
60/949,850 filed Jul. 14, 2007, 60/951,711 filed Jul. 24, 2007,
60/968,042 filed Aug. 24, 2007; 61/018,283 filed Dec. 31, 2007,
60/945,570 filed Jun. 21, 2007; 60/951,707 filed Jul. 24, 2007;
60/968,043 filed Aug. 2, 2007; and 61/018,303 filed Dec. 31, 2007,
and is a CIP of application Ser. No. 11/625,807 filed Jan. 22, 2007
now abandoned; the '404 application in turn claims benefit of App.
Nos. 60/943,309 filed Jun. 12, 2007, and 60/968,882 filed Aug. 29,
2007; the '395 application is a CIP of 11/696,722 filed Apr. 4,
2007 now abandoned and claims benefit of U.S. App. No. 60/943,318
filed Jun. 12, 2007; the '578 application claims benefit of App.
No. 60/685,130 filed May 26, 2005; the '807 application claims
benefit of 60/761,401, filed Jan. 20, 2006, and is a CIP of
11/598,968 filed Nov. 14, 2006 now abandoned, 11/582,049 filed Oct.
16, 2006 now U.S. Pat. No. 7,686,770, 11/478,934 filed Jun. 29,
2006 now abandoned, 11/444,999 filed May 31, 2006 now abandoned;
and 10/697,598 filed Oct. 29, 2003 now abandoned; the '722
application claims benefit of App. No. 60/789,378 filed Apr. 4,
2006, and is a CIP of application Ser. No. 11/582,049 filed Oct.
16, 2006 now U.S. Pat. No. 7,686,770; the '049 application claims
benefit of App. No. 60/726,794 filed Oct. 14, 2005; the '968
application claims benefit to 60/736,961 filed Nov. 14, 2005, and
60/761,401 filed Jan. 20, 2006, and is a CIP of application Ser.
No. 11/591,911 filed Nov. 1, 2006 now abandoned; the '934
application claims the benefit to App. No. 60/695,328 filed Jun.
29, 2005, and is also a CIP of application Ser. Nos. 10/697,597
filed on Oct. 29, 2003 now abandoned, 10/841,100 filed May 7, 2004
now U.S. Pat. No. 7,109,118, 11/139,262 filed May 26, 2005 now U.S.
Pat. No. 7,501,328, and 11/029,216 filed Jan. 3, 2005 now
abandoned; the '999 application claims benefit of App. No.
60/686,496 filed May 31, 2005 and is a CIP of application Ser. No.
10/697,598 filed Oct. 29, 2003 now abandoned; the '598 application
claims benefit of App. No. 60/422,007 filed Oct. 29, 2002; the '911
application claims benefit of App. Nos. 60/732,413 filed Nov. 1,
2005; 60/736,961 filed Nov. 14, 2005; and 60/761,401 filed Jan. 20,
2006; the '597 application claims benefit to App. No. 60/422,008
filed Oct. 29, 2002 and to App. No. 60/435,324 filed Dec. 20, 2002;
the '100 application claims benefit of App. 60/468,979 filed May 7,
2003; 60/469,053 filed May 7, 2003; 60/533,891 filed Dec. 31, 2003;
60/468,977 filed May 7, 2003; and 60/534,204 filed Dec. 31, 2003;
the '262 application claims benefit of App. No. 60/574,733 filed
May 26, 2004 and is a CIP of application Ser. No. 10/841,383 filed
May 7, 2004 now U.S. Pat. No. 7,195,989; the '216 application
claims benefit of App. Nos. 60/533,932, 60/534,157, 60/533,891, and
60/574,733, filed on Dec. 31, 2003, Dec. 31, 2003, Dec. 31, 2003,
and May 26, 2004 and is a CIP of application Ser. Nos. 10/841,300
now abandoned, and 10/607,931 now U.S. Pat. No. 7,239,219 filed on
May 7, 2004 and Jun. 27, 2003, respectively; the '383 application
claims benefit to App. 60/468,979 filed May 7, 2003; 60/469,053
filed May 7, 2003; and 60/533,891 filed Dec. 31, 2003; the '300
application claims benefit of App. 60/468,979 filed May 7, 2003;
60/469,053 filed May 7, 2003; and 60/533,891 filed Dec. 31, 2003;
and the '931 application claims benefit of App. Nos. 60/392,531
filed Jun. 27, 2002; 60/415,374 filed Oct. 1, 2002; 60/464,504
filed Apr. 21, 2003; and 60/476,554 filed on Jun. 6, 2003; the '931
application is also a CIP of application Ser. Nos. 10/309,521 filed
on Dec. 3, 2002; and 10/434,497 now U.S. Pat. No. 7,303,663,
10/434,103 now U.S. Pat. No. 7,160,429, 10/434,295 now abandoned,
and 10/434,519 now U.S. Pat. No. 7,252,861, each filed on May 7,
2003; the '521 application in turn claims benefit of App. Nos.
60/338,638 filed on Dec. 3, 2001; 60/340,372 filed on Dec. 6, 2001;
60/379,133 filed on May. 8, 2002; 60/379,182 filed on May 7, 2002;
60/379,184 filed on May 7, 2002; 60/415,374 filed on Oct. 1, 2002;
60/379,130 filed on May 7, 2002 and 60/392,531 filed on Jun. 27,
2002; the '497 application in turn claims benefit of App. Nos.
60/379,184 filed May 7, 2002; and 60/392,531 filed Jun. 27, 2002;
the '103 application in turn claims benefit of App. Nos. 60/379,182
filed May 7, 2002, and 60/430,809 filed Dec. 32, 2002; the '295
application in turn claims benefit of App. No. 60/379,133 filed
May. 8, 2002; and the '519 application in turn claims benefit of
App. No. 60/379,130 filed May 7, 2002. Each of these applications
is incorporated herein by reference as if set forth in full herein.
Claims
We claim:
1. A device capable of converting a flow of a fluid into rotational
mechanical motion, comprising: a. a stator; b. a rotor capable of
rotational motion relative to the stator, wherein the rotational
motion occurs about a rotational axis; c. a plurality of bearing
elements positioned between the rotor and stator to hold the rotor
and the stator in desired relative positions; d. an inlet in said
stator for receiving a fluid and an outlet in said stator for
removing fluid; wherein at least a portion of the stator and the
rotor are formed using a multi-layer, multi-material
electrochemical fabrication process, and wherein at least one
bearing element is located within a slot in the rotor and a slot in
the stator.
2. The device of claim 1 wherein the slot in the rotor faces
radially outward and the slot in the stator faces radially
inward.
3. The device of claim wherein the slot in the rotor faces radially
inward and the slot in the stator faces radially outward.
4. The device of claim 1 wherein the slot in the rotor faces
axially upward and the slot in the stator faces radially
downward.
5. The device of claim 4 wherein at least two rotor slots and at
least two stator slots exist wherein the two rotor slots face in
opposite directions and the two stator slots face in opposite
directions.
6. A method for fabricating a rotary device, comprising: a. forming
at least a portion of a stator and a rotor from a plurality of
adhered layers of material wherein the stator comprises a stator
bearing surface, wherein the rotor comprises a rotor bearing
surface, and wherein the forming of each layer of material
comprises, i. depositing at least a first material; ii. depositing
at least a second material; and iii. planarizing the first and
second materials to a common level; b. removing at least a portion
of the first or second material after formation of the plurality of
layers; c. supplying a plurality of bearing elements; d. inserting
the bearing elements into an opening between the stator bearing
surface and the rotor bearing surface.
7. The method of claim 6 wherein bearing elements are inserted
after formation of the stator and rotor are completed.
8. The method of claim 6 additionally comprising: a. forming at
least one additional layer to complete formation of the stator and
the rotor after inserting the bearing elements, wherein the forming
of the at least one additional layer comprises: i. depositing at
least a first material; ii. depositing at least a second material;
and iii. planarizing the first and second materials to a common
level; and b. removing least a portion of the first or second
material after formation of the at least one additional layer.
9. The method of claim 6 wherein the stator and the rotor are
formed in substantially assembled positions relative to each
other.
10. The method of claim 6 wherein the stator and the rotor are
formed separately from one another and are thereafter inserted into
assembled positions and bearing elements are inserted.
11. The method of claim 6 wherein the forming of the plurality of
adhered layers comprises forming lower portions of the stator and
rotor in assembled positions forming upper portions of the stator
and rotor in assembled positions but laterally spaced from the
lower portions and upside down relative to the lower portions and
wherein the method additionally comprises removing sacrificial
material from inside a gap region on the lower portions intended to
receive bearing elements and a gap region on the upper portions
intended to receiving bearing elements, applying bearing elements
into at least one of the gap region in the lower portion or in the
upper portion and then bring a mating surface of the lower portion
and a mating surface of the upper portion into desired relative
positions and affixing the lower portions and upper portions
together.
12. The method of claim 11 wherein the affixing occurs via a
bonding material.
13. The method of claim 11 wherein the affixing occurs via one or
more catches formed along with one or both of the lower portion and
the upper portion.
14. A method for fabricating a rotary device, comprising: a.
forming at least a portion of a stator, a rotor, and a plurality of
bearing elements from a plurality of adhered layers of material
wherein the stator comprises a stator bearing surface including a
plurality of protrusions separated by indentations, wherein the
rotor comprises a rotor bearing surface including a plurality of
protrusions separated by indentations, and wherein the bearing
elements comprise an outer surface including a plurality of
protrusions separated by indentations, and wherein the forming of
each layer of material comprises: i. depositing at least a first
material; ii. depositing at least a second material; and iii.
planarizing the first and second materials to a common level; b.
removing least a portion of the first or second material after
formation of the plurality of layers; and c. supplying a plurality
of bearing elements, and wherein during formation, at least some
protrusions on the stator bearing surface and on the rotor bearing
surface align with indentations on the outer surface of the bearing
elements and wherein at least some indentations on the rotor
bearing surface and on the stator bearing surface align with
protrusions on the outer surface of the bearing elements, such that
gaps between the bearing elements and the rotor and stator surfaces
on any given layer are larger than a minimum feature size but
wherein on at least some adjacent layers, gaps are substantially
less than the minimum feature size.
Description
FIELD OF THE INVENTION
The present invention relates generally to the field of micro-scale
and meso-scale devices (e.g. medical devices) and to the use of
multi-layer multi-material electrochemical fabrication methods for
producing such devices, particular embodiments relate to hydraulic
and/or pneumatic devices while others relate more specifically to
medical tools that may be useful in medical procedures and in
particular for minimally invasive medical procedures.
BACKGROUND OF THE INVENTION
Electrochemical Fabrication
Electrochemical Fabrication:
An electrochemical fabrication technique for forming
three-dimensional structures from a plurality of adhered layers is
being commercially pursued by Microfabrica.RTM. Inc. (formerly
MEMGen Corporation) of Van Nuys, Calif. under the name
EFAB.RTM..
Various electrochemical fabrication techniques were described in
U.S. Pat. No. 6,027,630, issued on Feb. 22, 2000 to Adam Cohen.
Some embodiments of this electrochemical fabrication technique
allow the selective deposition of a material using a mask that
includes a patterned conformable material on a support structure
that is independent of the substrate onto which plating will occur.
When desiring to perform an electrodeposition using the mask, the
conformable portion of the mask is brought into contact with a
substrate, but not adhered or bonded to the substrate, while in the
presence of a plating solution such that the contact of the
conformable portion of the mask to the substrate inhibits
deposition at selected locations. For convenience, these masks
might be generically called conformable contact masks; the masking
technique may be generically called a conformable contact mask
plating process. More specifically, in the terminology of
Microfabrica Inc. such masks have come to be known as INSTANT
MASKS.TM. and the process known as INSTANT MASKING.TM. or INSTANT
MASK.TM. plating. Selective depositions using conformable contact
mask plating may be used to form single selective deposits of
material or may be used in a process to form multi-layer
structures. The teachings of the '630 patent are hereby
incorporated herein by reference as if set forth in full herein.
Since the filing of the patent application that led to the above
noted patent, various papers about conformable contact mask plating
(i.e. INSTANT MASKING) and electrochemical fabrication have been
published: (1) A. Cohen, G. Zhang, F. Tseng, F. Mansfeld, U. Frodis
and P. Will, "EFAB: Batch production of functional, fully-dense
metal parts with micro-scale features", Proc. 9th Solid Freeform
Fabrication, The University of Texas at Austin, p161, August 1998.
(2) A. Cohen, G. Zhang, F. Tseng, F. Mansfeld, U. Frodis and P.
Will, "EFAB: Rapid, Low-Cost Desktop Micromachining of High Aspect
Ratio True 3-D MEMS", Proc. 12th IEEE Micro Electro Mechanical
Systems Workshop, IEEE, p244, January 1999. (3) A. Cohen, "3-D
Micromachining by Electrochemical Fabrication", Micromachine
Devices, March 1999. (4) G. Zhang, A. Cohen, U. Frodis, F. Tseng,
F. Mansfeld, and P. Will, "EFAB: Rapid Desktop Manufacturing of
True 3-D Microstructures", Proc. 2nd International Conference on
Integrated MicroNanotechnology for Space Applications, The
Aerospace Co., April 1999. (5) F. Tseng, U. Frodis, G. Zhang, A.
Cohen, F. Mansfeld, and P. Will, "EFAB: High Aspect Ratio,
Arbitrary 3-D Metal Microstructures using a Low-Cost Automated
Batch Process", 3rd International Workshop on High Aspect Ratio
MicroStructure Technology (HARMST'99), June 1999. (6) A. Cohen, U.
Frodis, F. Tseng, G. Zhang, F. Mansfeld, and P. Will, "EFAB:
Low-Cost, Automated Electrochemical Batch Fabrication of Arbitrary
3-D Microstructures", Micromachining and Microfabrication Process
Technology, SPIE 1999 Symposium on Micromachining and
Microfabrication, September 1999. (7) F. Tseng, G. Zhang, U.
Frodis, A. Cohen, F. Mansfeld, and P. Will, "EFAB: High Aspect
Ratio, Arbitrary 3-D Metal Microstructures using a Low-Cost
Automated Batch Process", MEMS Symposium, ASME 1999 International
Mechanical Engineering Congress and Exposition, November, 1999. (8)
A. Cohen, "Electrochemical Fabrication (EFABTM)", Chapter 19 of The
MEMS Handbook, edited by Mohamed Gad-El-Hak, CRC Press, 2002. (9)
Microfabrication--Rapid Prototyping's Killer Application", pages
1-5 of the Rapid Prototyping Report, CAD/CAM Publishing, Inc., June
1999.
The disclosures of these nine publications are hereby incorporated
herein by reference as if set forth in full herein.
An electrochemical deposition for forming multilayer structures may
be carried out in a number of different ways as set forth in the
above patent and publications. In one form, this process involves
the execution of three separate operations during the formation of
each layer of the structure that is to be formed: 1. Selectively
depositing at least one material by electrodeposition upon one or
more desired regions of a substrate. Typically this material is
either a structural material or a sacrificial material. 2. Then,
blanket depositing at least one additional material by
electrodeposition so that the additional deposit covers both the
regions that were previously selectively deposited onto, and the
regions of the substrate that did not receive any previously
applied selective depositions. Typically this material is the other
of a structural material or a sacrificial material. 3. Finally,
planarizing the materials deposited during the first and second
operations to produce a smoothed surface of a first layer of
desired thickness having at least one region containing the at
least one material and at least one region containing at least the
one additional material.
After formation of the first layer, one or more additional layers
may be formed adjacent to an immediately preceding layer and
adhered to the smoothed surface of that preceding layer. These
additional layers are formed by repeating the first through third
operations one or more times wherein the formation of each
subsequent layer treats the previously formed layers and the
initial substrate as a new and thickening substrate.
Once the formation of all layers has been completed, at least a
portion of at least one of the materials deposited is generally
removed by an etching process to expose or release the
three-dimensional structure that was intended to be formed. The
removed material is a sacrificial material while the material that
forms part of the desired structure is a structural material.
The preferred method of performing the selective electrodeposition
involved in the first operation is by conformable contact mask
plating. In this type of plating, one or more conformable contact
(CC) masks are first formed. The CC masks include a support
structure onto which a patterned conformable dielectric material is
adhered or formed. The conformable material for each mask is shaped
in accordance with a particular cross-section of material to be
plated (the pattern of conformable material is complementary to the
pattern of material to be deposited). At least one CC mask is used
for each unique cross-sectional pattern that is to be plated.
The support for a CC mask is typically a plate-like structure
formed of a metal that is to be selectively electroplated and from
which material to be plated will be dissolved. In this typical
approach, the support will act as an anode in an electroplating
process. In an alternative approach, the support may instead be a
porous or otherwise perforated material through which deposition
material will pass during an electroplating operation on its way
from a distal anode to a deposition surface. In either approach, it
is possible for multiple CC masks to share a common support, i.e.
the patterns of conformable dielectric material for plating
multiple layers of material may be located in different areas of a
single support structure. When a single support structure contains
multiple plating patterns, the entire structure is referred to as
the CC mask while the individual plating masks may be referred to
as "submasks". In the present application such a distinction will
be made only when relevant to a specific point being made.
In preparation for performing the selective deposition of the first
operation, the conformable portion of the CC mask is placed in
registration with and pressed against a selected portion of (1) the
substrate, (2) a previously formed layer, or (3) a previously
deposited portion of a layer on which deposition is to occur. The
pressing together of the CC mask and relevant substrate occur in
such a way that all openings, in the conformable portions of the CC
mask contain plating solution. The conformable material of the CC
mask that contacts the substrate acts as a barrier to
electrodeposition while the openings in the CC mask that are filled
with electroplating solution act as pathways for transferring
material from an anode (e.g. the CC mask support) to the
non-contacted portions of the substrate (which act as a cathode
during the plating operation) when an appropriate potential and/or
current are supplied.
An example of a CC mask and CC mask plating are shown in FIGS.
1A-1C. FIG. 1A shows a side view of a CC mask 8 consisting of a
conformable or deformable (e.g. elastomeric) insulator 10 patterned
on an anode 12. The anode has two functions. One is as a supporting
material for the patterned insulator 10 to maintain its integrity
and alignment since the pattern may be topologically complex (e.g.,
involving isolated "islands" of insulator material). The other
function is as an anode for the electroplating operation. FIG. 1A
also depicts a substrate 6, separated from mask 8, onto which
material will be deposited during the process of forming a layer.
CC mask plating selectively deposits material 22 onto substrate 6
by simply pressing the insulator against the substrate then
electrodepositing material through apertures 26a and 26b in the
insulator as shown in FIG. 1B. After deposition, the CC mask is
separated, preferably non-destructively, from the substrate 6 as
shown in FIG. 1C.
The CC mask plating process is distinct from a "through-mask"
plating process in that in a through-mask plating process the
separation of the masking material from the substrate would occur
destructively. Furthermore in a through mask plating process,
opening in the masking material are typically formed while the
masking material is in contact with and adhered to the substrate.
As with through-mask plating, CC mask plating deposits material
selectively and simultaneously over the entire layer. The plated
region may consist of one or more isolated plating regions where
these isolated plating regions may belong to a single structure
that is being formed or may belong to multiple structures that are
being formed simultaneously. In CC mask plating as individual masks
are not intentionally destroyed in the removal process, they may be
usable in multiple plating operations.
Another example of a CC mask and CC mask plating is shown in FIGS.
1D-1G. FIG. 1D shows an anode 12' separated from a mask 8' that
includes a patterned conformable material 10' and a support
structure 20. FIG. 1D also depicts substrate 6 separated from the
mask 8'. FIG. 1E illustrates the mask 8' being brought into contact
with the substrate 6. FIG. 1F illustrates the deposit 22' that
results from conducting a current from the anode 12' to the
substrate 6. FIG. 1G illustrates the deposit 22' on substrate 6
after separation from mask 8'. In this example, an appropriate
electrolyte is located between the substrate 6 and the anode 12'
and a current of ions coming from one or both of the solution and
the anode are conducted through the opening in the mask to the
substrate where material is deposited. This type of mask may be
referred to as an anodeless INSTANT MASK.TM. (AIM) or as an
anodeless conformable contact (ACC) mask.
Unlike through-mask plating, CC mask plating allows CC masks to be
formed completely separate from the substrate on which plating is
to occur (e.g. separate from a three-dimensional (3D) structure
that is being formed). CC masks may be formed in a variety of ways,
for example, using a photolithographic process. All masks can be
generated simultaneously, e.g. prior to structure fabrication
rather than during it. This separation makes possible a simple,
low-cost, automated, self-contained, and internally-clean "desktop
factory" that can be installed almost anywhere to fabricate 3D
structures, leaving any required clean room processes, such as
photolithography to be performed by service bureaus or the
like.
An example of the electrochemical fabrication process discussed
above is illustrated in FIGS. 2A-2F. These figures show that the
process involves deposition of a first material 2 which is a
sacrificial material and a second material 4 which is a structural
material. The CC mask 8, in this example, includes a patterned
conformable material (e.g. an elastomeric dielectric material) 10
and a support 12 which is made from deposition material 2. The
conformal portion of the CC mask is pressed against substrate 6
with a plating solution 14 located within the openings 16 in the
conformable material 10. An electric current, from power supply 18,
is then passed through the plating solution 14 via (a) support 12
which doubles as an anode and (b) substrate 6 which doubles as a
cathode. FIG. 2A illustrates that the passing of current causes
material 2 within the plating solution and material 2 from the
anode 12 to be selectively transferred to and plated on the
substrate 6. After electroplating the first deposition material 2
onto the substrate 6 using CC mask 8, the CC mask 8 is removed as
shown in FIG. 2B. FIG. 2C depicts the second deposition material 4
as having been blanket-deposited (i.e. non-selectively deposited)
over the previously deposited first deposition material 2 as well
as over the other portions of the substrate 6. The blanket
deposition occurs by electroplating from an anode (not shown),
composed of the second material, through an appropriate plating
solution (not shown), and to the cathode/substrate 6. The entire
two-material layer is then planarized to achieve precise thickness
and flatness as shown in FIG. 2D. After repetition of this process
for all layers, the multi-layer structure 20 formed of the second
material 4 (i.e. structural material) is embedded in first material
2 (i.e. sacrificial material) as shown in FIG. 2E. The embedded
structure is etched to yield the desired device, i.e. structure 20,
as shown in FIG. 2F.
Various components of an exemplary manual electrochemical
fabrication system 32 are shown in FIGS. 3A-3C. The system 32
consists of several subsystems 34, 36, 38, and 40. The substrate
holding subsystem 34 is depicted in the upper portions of each of
FIGS. 3A-3C and includes several components: (1) a carrier 48, (2)
a metal substrate 6 onto which the layers are deposited, and (3) a
linear slide 42 capable of moving the substrate 6 up and down
relative to the carrier 48 in response to drive force from actuator
44. Subsystem 34 also includes an indicator 46 for measuring
differences in vertical position of the substrate which may be used
in setting or determining layer thicknesses and/or deposition
thicknesses. The subsystem 34 further includes feet 68 for carrier
48 which can be precisely mounted on subsystem 36.
The CC mask subsystem 36 shown in the lower portion of FIG. 3A
includes several components: (1) a CC mask 8 that is actually made
up of a number of CC masks (i.e. submasks) that share a common
support/anode 12, (2) precision X-stage 54, (3) precision Y-stage
56, (4) frame 72 on which the feet 68 of subsystem 34 can mount,
and (5) a tank 58 for containing the electrolyte 16. Subsystems 34
and 36 also include appropriate electrical connections (not shown)
for connecting to an appropriate power source (not shown) for
driving the CC masking process.
The blanket deposition subsystem 38 is shown in the lower portion
of FIG. 3B and includes several components: (1) an anode 62, (2) an
electrolyte tank 64 for holding plating solution 66, and (3) frame
74 on which feet 68 of subsystem 34 may sit. Subsystem 38 also
includes appropriate electrical connections (not shown) for
connecting the anode to an appropriate power supply (not shown) for
driving the blanket deposition process.
The planarization subsystem 40 is shown in the lower portion of
FIG. 3C and includes a lapping plate 52 and associated motion and
control systems (not shown) for planarizing the depositions.
In addition to teaching the use of CC masks for electrodeposition
purposes, the '630 patent also teaches that the CC masks may be
placed against a substrate with the polarity of the voltage
reversed and material may thereby be selectively removed from the
substrate. It indicates that such removal processes can be used to
selectively etch, engrave, and polish a substrate, e.g., a
plaque.
The '630 patent further indicates that the electroplating methods
and articles disclosed therein allow fabrication of devices from
thin layers of materials such as, e.g., metals, polymers, ceramics,
and semiconductor materials. It further indicates that although the
electroplating embodiments described therein have been described
with respect to the use of two metals, a variety of materials,
e.g., polymers, ceramics and semiconductor materials, and any
number of metals can be deposited either by the electroplating
methods therein, or in separate processes that occur throughout the
electroplating method. It indicates that a thin plating base can be
deposited, e.g., by sputtering, over a deposit that is
insufficiently conductive (e.g., an insulating layer) so as to
enable subsequent electroplating. It also indicates that multiple
support materials (i.e. sacrificial materials) can be included in
the electroplated element allowing selective removal of the support
materials.
The '630 patent additionally teaches that the electroplating
methods disclosed therein can be used to manufacture elements
having complex microstructure and close tolerances between parts.
An example is given with the aid of FIGS. 14A-14E of that patent.
In the example, elements having parts that fit with close
tolerances, e.g., having gaps between about 1-5 um, including
electroplating the parts of the device in an unassembled,
preferably pre-aligned, state and once fabricated. In such
embodiments, the individual parts can be moved into operational
relation with each other or they can simply fall together. Once
together the separate parts may be retained by clips or the
like.
Another method for forming microstructures from electroplated
metals (i.e. using electrochemical fabrication techniques) is
taught in U.S. Pat. No. 5,190,637 to Henry Guckel, entitled
"Formation of Microstructures by Multiple Level Deep X-ray
Lithography with Sacrificial Metal layers". This patent teaches the
formation of metal structure utilizing through mask exposures. A
first layer of a primary metal is electroplated onto an exposed
plating base to fill a void in a photoresist (the photoresist
forming a through mask having a desired pattern of openings), the
photoresist is then removed and a secondary metal is electroplated
over the first layer and over the plating base. The exposed surface
of the secondary metal is then machined down to a height which
exposes the first metal to produce a flat uniform surface extending
across both the primary and secondary metals. Formation of a second
layer may then begin by applying a photoresist over the first layer
and patterning it (i.e. to form a second through mask) and then
repeating the process that was used to produce the first layer to
produce a second layer of desired configuration. The process is
repeated until the entire structure is formed and the secondary
metal is removed by etching. The photoresist is formed over the
plating base or previous layer by casting and patterning of the
photoresist (i.e. voids formed in the photoresist) are formed by
exposure of the photoresist through a patterned mask via X-rays or
UV radiation and development of the exposed or unexposed areas.
The '637 patent teaches the locating of a plating base onto a
substrate in preparation for electroplating materials onto the
substrate. The plating base is indicated as typically involving the
use of a sputtered film of an adhesive metal, such as chromium or
titanium, and then a sputtered film of the metal that is to be
plated. It is also taught that the plating base may be applied over
an initial layer of sacrificial material (i.e. a layer or coating
of a single material) on the substrate so that the structure and
substrate may be detached if desired. In such cases after formation
of the structure the sacrificial material forming part of each
layer of the structure may be removed along the initial sacrificial
layer to free the structure. Substrate materials mentioned in the
'637 patent include silicon, glass, metals, and silicon with
protected semiconductor devices. A specific example of a plating
base includes about 150 angstroms of titanium and about 300
angstroms of nickel, both of which are sputtered at a temperature
of 160.degree. C. In another example it is indicated that the
plating base may consist of 150 angstroms of titanium and 150
angstroms of nickel where both are applied by sputtering.
Electrochemical Fabrication provides the ability to form prototypes
and commercial quantities of miniature objects, parts, structures,
devices, and the like at reasonable costs and in reasonable times.
In fact, Electrochemical Fabrication is an enabler for the
formation of many structures that were hitherto impossible to
produce. Electrochemical Fabrication opens the spectrum for new
designs and products in many industrial fields. Even though
Electrochemical Fabrication offers this new capability and it is
understood that Electrochemical Fabrication techniques can be
combined with designs and structures known within various fields to
produce new structures, certain uses for Electrochemical
Fabrication provide designs, structures, capabilities and/or
features not known or obvious in view of the state of the art.
A need exists in various fields for miniature devices having
improved characteristics, reduced fabrication times, reduced
fabrication costs, simplified fabrication processes, greater
versatility in device design, improved selection of materials,
improved material properties, more cost effective and less risky
production of such devices, and/or more independence between
geometric configuration and the selected fabrication process.
SUMMARY OF THE INVENTION
It is an object of some embodiments of the invention to provide
improved micro-scale or meso-scale hydraulic or pneumatic devices
that include miniature bearing and race elements.
It is an object of some embodiments of the invention to provide
improved micro-scale or meso-scale hydraulic or pneumatic turbine
devices.
It is an object of some embodiments of the invention to provide
improved micro-scale or meso-scale hydraulic or pneumatic tools
that may be used in medical applications and particularly in
medical applications where the tools are located at the distal end
of a larger device which traverses a torturous path and which may
supply rotary or other movement without the need for movement of
pull wires or push tubes or the like and without the need for
locating electrical motors at the distal end of the device.
It is an object of some embodiments of the invention to provide
improved methods for fabricating micro-scale or meso-scale
devices.
Other objects and advantages of various embodiments of the
invention will be apparent to those of skill in the art upon review
of the teachings herein. The various embodiments of the invention,
set forth explicitly herein or otherwise ascertained from the
teachings herein, may address one or more of the above objects
alone or in combination, or alternatively may address some other
object ascertained from the teachings herein. It is not necessarily
intended that all objects be addressed by any single aspect of the
invention even though that may be the case with regard to some
aspects.
A first aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least a portion of the stator and the rotor are formed
using a multi-layer, multi-material electrochemical fabrication
process.
Numerous variations of the first aspect of the invention are
possible and may include for example the following features: (1)
use of the device in a medical procedure; (2) use of the device in
a minimally invasive medical procedure; (3) the passage is
configured to cause fluid flow from the stator to the rotor to be
from one or more radial positions that are further from the
rotational axis while fluid flow from the rotor will begin at one
or more radial positions that are closer to the rotational axis;
(4) the passage is configured to cause fluid flow from the stator
to the rotor to be from one or more radial positions that are
closer to the rotational axis while fluid flow from the rotor will
begin at one or more radial positions that are further from the
rotational axis; (5) at least one bearing element is located within
a slot in the rotor and against a substantially planar surface or
the stator; (6) at least one bearing element is located within a
slot in the stator and against a substantially planar surface or
the rotor; (7) the rotor includes at least one opening for loading
bearing elements into desired positions between the rotor and the
stator wherein the rotor additionally includes a catch that holds
the bearing elements in between the rotor and stator after loading;
(8) the rotor comprises a cutting blade; (9) the rotor comprises a
blending tool; (9) the stator includes at least one opening for
loading bearing elements into desired positions between the rotor
and the stator wherein the stator additionally includes a catch
that holds the bearing elements in between the rotor and stator
after loading; (10) the passage is configured to cause fluid flow
from the stator to the rotor to be from one or more radial
positions that are closer to the rotational axis while fluid flow
from the rotor will begin at one or more radial positions that are
further from the rotational axis; (11) the rotor additionally
comprises a coupling element that is capable of accepting different
tools which are turned by the device. (12) the rotor additionally
comprises a fixed tool.
A second aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least a portion of the stator and the rotor are formed
using a multi-layer, multi-material electrochemical fabrication
process, wherein the rotor includes plurality of blades which are
moved by the fluid flow.
Another variation of the first aspect of the invention includes at
least a portion of the bearing elements being formed using a
multi-layer, multi-material electrochemical fabrication process
while a further variation includes the stator bearing surface
having protrusions and indentations, wherein the rotor includes a
rotor bearing surface having protrusions and indentations, and
wherein the bearing elements comprise outer surface protrusions and
indentations and wherein during formation, at least some
protrusions on the stator bearing surface and on the rotor bearing
surface align with indentations on the outer surface of the bearing
elements and wherein at least some indentations on the rotor
bearing surface and on the stator bearing surface align with
protrusions on the outer surface of the bearing elements, such that
gaps between the bearing elements and the rotor and stator bearing
surfaces on any given layers are larger than a minimum feature size
but wherein on at least adjacent layers, gaps are substantially
less than the minimum feature size.
Numerous variations of the second aspect of the invention are
possible and may include for example the following features: (1)
the bearing elements are balls; (2) the bearing elements are
cylindrical rollers. (3) the device is a turbine and wherein fluid
just before striking a blades is in a first direction and wherein
after striking the blade continued fluid flow is in a substantially
different direction and wherein a direction of fluid flow just
before striking a blade may be perpendicular to the axis of
rotation and after striking the blade the direction of fluid flow
may be substantially axial; (4) the stator includes a manifold for
directing fluid flow on to the blades from a plurality of
locations; or (5) the stator includes a manifold for directing
fluid flow on to the blades from a plurality of locations and each
of the plurality of locations have orientation for directing a flow
of fluid and wherein one of the following condition may be met: (i)
the plurality of blades of the rotor are spaced with a uniform
spacing angular spacing around the axis of rotation and wherein a
spacing of the plurality of locations is different from the uniform
spacing of the blades, or (ii) at least one of the plurality of
locations has a different relative radial orientation than that of
another location of the plurality of locations.
A third aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least a portion of the stator and the rotor are formed
using a multi-layer, multi-material electrochemical fabrication
process, wherein the rotor includes plurality of blades which are
moved by the fluid flow, wherein the bearing elements are
positioned around the axis of rotation at one or more bearing
heights while the blades are positioned around the axis of rotation
at one or more blade heights.
Numerous variations of the third aspect of the invention are
possible and may include for example the following features: (1)
one or more bearing heights are two or more bearing heights and
they are located above and below the one or more blade heights; (2)
one or more blade heights are two or more blade heights and they
are located above and below the one or more bearing heights; or (3)
the one or more bearing heights and the one or more blade heights
share a common height.
A fourth aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least a portion of the stator and the rotor are formed
using a multi-layer, multi-material electrochemical fabrication
process, wherein the rotor includes plurality of blades which are
moved by the fluid flow, wherein the bearing elements are
positioned around the axis of rotation at one or more bearing
heights while the blades are positioned around the axis of rotation
at one or more blade heights.
A fifth aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least a portion of the stator and the rotor are formed
using a multi-layer, multi-material electrochemical fabrication
process, wherein the rotor includes plurality of blades which are
moved by the fluid flow, wherein at least one bearing element is
located within a slot in the rotor and a slot in the stator.
Numerous variations of the fifth aspect of the invention are
possible and may include for example the following features: (1)
the slot in the rotor faces radially outward and the slot in the
stator faces radially inward; (2) the slot in the rotor faces
radially inward and the slot in the stator faces radially outward;
(3) the slot in the rotor faces axially upward and the slot in the
stator faces radially downward; or (4) at least two rotor slots and
at least two stator slots exist wherein the two rotor slots face in
opposite directions and the two stator slots face in opposite
directions.
A sixth aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least a portion of the stator and the rotor are formed
using a multi-layer, multi-material electrochemical fabrication
process, wherein the rotor includes plurality of blades which are
moved by the fluid flow, wherein the stator includes at least one
opening for loading bearing elements into desired positions between
the rotor and the stator wherein the stator additionally includes a
stator bearing surface of desired configuration along which the
bearing elements move, wherein the device additionally includes a
plug having a plug bearing surface of desired configuration which
is matched to that of the desired configuration of stator bearing
surface, wherein upon loading the bearings and inserting and fixing
the plug to the stator, the plug bearing surface and the stator
bearing surface provide for smooth movement of the bearing
elements.
Numerous variations of the sixth aspect of the invention are
possible and may include for example the following features: (1)
neither the stator bearing surface nor the plug bearing surface are
planar; (2) the stator or plug includes a stop feature that ensures
that the plug and stator are located in desired relative positions
once assembled; (3) the stator or plug further comprises a locking
mechanism for holding the stator and plug together; or (4) the
stator and plug are held together by a bonding agent after being
inserted into desired relative positions.
A seventh aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least a portion of the stator and the rotor are formed
using a multi-layer, multi-material electrochemical fabrication
process, wherein the rotor includes plurality of blades which are
moved by the fluid flow, wherein the rotor includes at least one
opening for loading bearing elements into desired positions between
the rotor and the stator wherein the rotor additionally includes a
rotor bearing surface of desired configuration along which the
bearing elements move, wherein the device additionally includes a
plug having a plug bearing surface of desired configuration which
is matched to that of the desired configuration of rotor bearing
surface, wherein upon loading the bearings and inserting and fixing
the plug to the rotor, the plug bearing surface and the rotor
bearing surface provide for smooth movement of the bearing
elements.
Numerous variations of the seventh aspect of the invention are
possible and may include for example the following features: (1)
neither the rotor bearing surface nor the plug bearing surface are
planar; (2) the rotor or plug includes a stop feature that ensures
that the plug and stator are located in desired relative positions
once assembled; (3) the rotor or plug further comprises a locking
mechanism for holding the rotor and plug together; or (4) the rotor
and plug are held together by a bonding agent after being inserted
into desired relative positions.
An eighth aspect of the invention provides a device capable of
converting a flow of a driving fluid into rotational mechanical
motion, comprising: (a) a stator; (b) a rotor capable of rotational
motion relative to the stator, wherein the rotational motion occurs
about a rotational axis; (c) spacings formed between a lower axial
facing surface of the rotor and an upper axial facing surface of
the stator, and between an upper axial facing surface of the rotor
and a lower axial facing surface of the stator; and between radial
facing surfaces of the stator and the rotor; (d) an inlet in said
stator for receiving a driving fluid and an outlet in said stator
for removing the driving fluid; (e) one or more channels for
carrying a bearing fluid to the said spacings such that the bearing
fluid may provide a hydrostatic bearing effect; and wherein at
least a portion of each of the stator, the rotor, the spacings, and
the one or more channels are formed using a multi-layer,
multi-material electrochemical fabrication process.
A ninth aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis; (c) a plurality of bearing elements positioned
between the rotor and stator to hold the rotor and the stator in
desired relative positions; (d) an inlet in said stator for
receiving a fluid and an outlet in said stator for removing fluid;
wherein at least portions of the stator and the rotor are formed
from multiple layers of deposited materials while in assembled
positions relative to one another.
A tenth aspect of the invention provides a device capable of
converting a flow of a fluid into rotational mechanical motion,
comprising: (a) a stator comprising a stator bearing surface
including a plurality of protrusions extending in a radial
direction separated by recesses that are indented relative to
adjacent protrusions; (b) a rotor capable of rotational motion
relative to the stator, wherein the rotational motion occurs about
a rotational axis and wherein the rotor comprises a rotor bearing
surface including a plurality of protrusions extending in a radial
direction separated by recesses that are indented relative to
adjacent protrusions; (c) a plurality of bearing elements
positioned between the rotor and stator to hold the rotor and the
stator in desired relative positions and wherein the bearing
elements comprise an outer surface including a plurality of
protrusions separated by recesses that are indented relative to
adjacent protrusions; (d) an inlet in said stator for receiving a
fluid and an outlet in said stator for removing fluid; wherein
during formation, at least some protrusions on the stator bearing
surface and on the rotor bearing surface align with indentations on
the outer surface of the bearing elements and wherein at least some
indentations on the rotor bearing surface and on the stator bearing
surface align with protrusions on the outer surface of the bearing
elements, such that gaps between the bearing elements and the rotor
and stator surface on any given layer are larger than a minimum
feature size but wherein on at least some adjacent layers, gaps are
substantially less than the minimum feature size.
An eleventh aspect of the invention provides a millimeter scale or
microscale hydraulic or pneumatically actuated device, including:
(a) a device body including an inlet for receiving a fluid flow and
a passage for directing the fluid flow along a desired path through
the body; (b) an actuation mechanism functionally connected to the
fluid flow path which undergoes a desired mechanical movement in
response to fluid flow in the passage; and (c) one or more ball
bearings loaded into one or more openings in one or more components
and which optionally may become trapped within desired locations in
the component(s) when components of the device are maintained
within a working range of the device.
A twelfth aspect of the invention provides a method for fabricating
a rotary device, comprising: (a) forming at least a portion of a
stator and a rotor from a plurality of adhered layers of material
wherein the stator comprises a stator bearing surface, wherein the
rotor comprises a rotor bearing surface, and wherein the forming of
each layer of material comprises, (i) depositing of at least a
first material; (II) depositing of at least a second material; and
(iii) planarizing the first and second materials to a common level;
(b) removing of at least a portion of the first or second material
after formation of the plurality of layers; (c) supplying a
plurality of bearing elements; (d) inserting the bearing elements
into an opening between the stator bearing surface and the rotor
bearing surface.
Numerous variations of the twelfth aspect of the invention are
possible and may, for example, include the following features: (1)
the bearing elements are inserted after formation of the stator and
rotor are completed; (2) forming of the at least one additional
layer to complete formation of the stator and the rotor, after
inserting the bearing elements, wherein the forming of the at least
one additional layer comprises: (i) deposition of at least a first
material; (ii) deposition of at least a second material; and (iii)
planarizing the first and second materials to a common level; and
(f) removing of at least a portion of the first or second material
after formation of the at least one additional layer; (3) the
stator and the rotor are formed in substantially assembled
positions relative to each other; or (4) the stator and the rotor
are formed separately from one another and are thereafter inserted
into assembled positions and bearing elements are inserted; or (5)
the forming of the plurality of adhered layers comprises forming
lower portions of the stator and rotor in assembled positions
forming upper portions of the stator and rotor in assembled
positions but laterally spaced from the lower portions and upside
down relative to the lower portions and wherein the method
additionally includes removing sacrificial material from inside a
gap region on the lower portions intended to receive bearing
elements and a gap region on the upper portions intended to
receiving bearing elements, applying bearing elements into at least
one of the gap region in the lower portion or in the upper portion
and then bringing a mating surface of the lower portion and a
mating surface of the upper portion into desired relative positions
and affixing the lower portions and upper portions together (e.g.
via use of a bonding material or via one or more catches formed
along with one or both of the lower portion and the upper
portion).
A thirteenth aspect of the invention provides a method for
fabricating a rotary device, comprising: (a) forming at least a
portion of a stator, a rotor, and a plurality of bearing elements
from a plurality of adhered layers of material wherein the stator
comprises a stator bearing surface including a plurality of
protrusions separated by indentations, wherein the rotor comprises
a rotor bearing surface including a plurality of protrusions
separated by indentations, and wherein the bearing elements
comprise an outer surface including a plurality of protrusions
separated by indentations, and wherein the forming of each layer of
material comprises: (i) deposition of at least a first material;
(ii) deposition of at least a second material; and (iii)
planarizing the first and second materials to a common level; (b)
removing of at least a portion of the first or second material
after formation of the plurality of layers; and (c) supplying a
plurality of bearing elements, and wherein during formation, at
least some protrusions on the stator bearing surface and on the
rotor bearing surface align with indentations on the outer surface
of the bearing elements and wherein at least some indentations on
the rotor bearing surface and on the stator bearing surface align
with protrusions on the outer surface of the bearing elements, such
that gaps between the bearing elements and the rotor and stator
surface on any given layer are larger than a minimum feature size
but wherein on at least some adjacent layers, gaps are
substantially less than the minimum feature size.
A fourteenth aspect of the invention provides a method for
fabricating a rotary device, comprising: (a) forming at least a
portion of a stator and a rotor from a plurality of adhered layers,
each comprising at least one sacrificial material and at least one
structural material, including forming: (1) an inlet for receiving
a driving fluid, (2) an outlet, (3) a passage connecting the inlet
and outlet together along which the driving fluid may flow to cause
movement of the rotor relative to the stator; (4) spacings between
a lower axial facing surface of the rotor and an upper axial facing
surface of the stator, and between an upper axial facing surface of
the rotor and a lower axial facing surface of the stator; and
between radial facing surfaces of the stator and the rotor, and
forming one or more channels for carrying a bearing fluid to the
spacings such that bearing fluid may provide a hydrostatic bearing
effect during operation of the device; and wherein the forming of
each multi-material layer comprises: (i) deposition of at least a
first material; (ii) deposition of at least a second material; and
(iii) planarizing the first and second materials to a common level;
and (b) removing of at least a portion of the first or second
material after formation of the plurality of layers.
A fifteenth aspect of the invention provides a minimally invasive
medical procedure for providing a diagnostic, preventive, or
therapeutic treatment to a body of a patient (i.e. a medically
useful procedure), comprising: (a) inserting a lumen, having a
distal and proximal end into the body of a patient such that the
proximal end remains outside the body of the patient while the
distal end is located in proximity to a desired location within the
body of the patient; (b) inserting a device into the lumen to
provide the diagnostic, preventive, or therapeutic treatment to a
desired site within the body of the patient; (c) while at the
desired site, operating the device to provide or aid in the
provision of the diagnostic or therapeutic treatment wherein the
device of one of the first through eleventh aspects of the
invention or wherein the device is fabricated by one of the twelfth
through fourteenth aspects of the invention.
Numerous variations of the fifteenth aspect of the invention exist
and may, for example, include the following features: (1) the
desired location is located at the end of a torturous path that is
traversed to locate the device at the desired location wherein a
rotary motion of the rotor relative to the stator occur via a fluid
flow; (2) the procedure comprises a thrombectomy procedure; (3) the
procedure comprises an atherectomy procedure; (3) the procedure
comprises an ultrasound procedure; or (4) the procedure comprises a
dental procedure for at least one of (a) removing decayed tooth
material, (b) debriding and cleaning, (c) in preparation for cavity
filling, or (4) in performing a root canal obturation.
Other aspects of the invention will be understood by those of skill
in the art upon review of the teachings herein. Other aspects of
the invention may involve combinations of the above noted aspects
of the invention. These other aspects of the invention may provide
various combinations of the aspects presented above as well as
provide other configurations, structures, functional relationships,
and processes that have not been specifically set forth above.
BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1A-1C schematically depict side views of various stages of a
CC mask plating process, while FIGS. 1D-G schematically depict a
side views of various stages of a CC mask plating process using a
different type of CC mask.
FIGS. 2A-2F schematically depict side views of various stages of an
electrochemical fabrication process as applied to the formation of
a particular structure where a sacrificial material is selectively
deposited while a structural material is blanket deposited.
FIGS. 3A-3C schematically depict side views of various example
subassemblies that may be used in manually implementing the
electrochemical fabrication method depicted in FIGS. 2A-2F.
FIGS. 4A-4F schematically depict the formation of a first layer of
a structure using adhered mask plating where the blanket deposition
of a second material overlays both the openings between deposition
locations of a first material and the first material itself
FIG. 4G depicts the completion of formation of the first layer
resulting from planarizing the deposited materials to a desired
level.
FIGS. 4H and 4I respectively depict the state of the process after
formation of the multiple layers of the structure and after release
of the structure from the sacrificial material.
FIG. 5 provides a perspective view of a turbine according to a
first embodiment of the invention which has a circular saw blade
integrated with the rotor of the turbine.
FIG. 6 provides a perspective view of the same device as FIG. 5 but
from the fluid inlet and outlet side.
FIG. 7 provides a similar perspective to that of FIG. 6 but further
includes a cut-away of the turbine housing or stator.
FIG. 8 provides a perspective cut away view of the bottom of the
housing such that the channel connecting the fluid inlet to its
respective outlet can be seen.
FIG. 9 provides a perspective view of the rotor so that the
interior ball bearing race may be seen along with the rotor
blades.
FIG. 10 provides a perspective view of the turbine with the plug
inserted.
FIG. 11 provides a perspective cross sectional view of the assembly
that includes a view of the plug showing its bearing race
surface.
FIGS. 12 and 13 provide perspective view of a turbine device
according to a second embodiment of the invention that includes an
alternative mechanism for retaining the ball bearings.
FIG. 14 provides a perspective view of an example turbine according
to a third embodiment where hydrostatic or hydrodynamic fluid
bearings are used to constrain the position of the rotor relative
to the stator.
FIGS. 15A-15H illustrate various states in a method of embedding
balls during fabrication of a turbine according to a fourth
embodiment of the invention.
FIGS. 16A-1 to FIG. 16F illustrate various states in a method of
embedding balls during fabrication of a turbine according to a
fifth embodiment of the invention.
FIGS. 17A and 7B provide top and bottom perspective views of a
turbine of a sixth embodiment of the invention which is similar to
that of the embodiment of FIGS. 5-11 with the exception that the
cutting tool is replaced by a coupling that can accept different
tools while FIG. 17C provides a cut perspective view of the turbine
of FIGS. 17A and 17B prior to the loading of ball bearing into the
bearing race.
FIGS. 18A and 18B provide top and bottom perspective views of a
turbine according to a seventh embodiment of the invention which is
similar to that of FIGS. 17A and 17B with the exception that
instead of being configured to take inlet fluid from the outside
(larger radius) and directing it radially inward, the device is
configured to take inlet fluid from the central portion of the axis
of the device and to direct it radially outward (i.e. toward
regions radially further from the axis of the device while FIG. 18C
provides a perspective cut view of the device of FIGS. 18A and 18B
and FIG. 18D provide a perspective cut view through the fluid flow
channels of the stator.
FIGS. 19A-19D provide various views of a blender tool, as an
example of a tool according to an eighth embodiment of the
invention, that is capable of being used with the turbine of FIGS.
17A-17C.
FIGS. 19E-19G provide various view of the blender of FIGS. 19A-19D
along with the turbine of FIGS. 17A-17C.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
Electrochemical Fabrication in General
FIGS. 1A-1G, 2A-2F, and 3A-3C illustrate various features of one
form of electrochemical fabrication. Other electrochemical
fabrication techniques are set forth in the '630 patent referenced
above, in the various previously incorporated publications, in
various other patents and patent applications incorporated herein
by reference. Still others may be derived from combinations of
various approaches described in these publications, patents, and
applications, or are otherwise known or ascertainable by those of
skill in the art from the teachings set forth herein. All of these
techniques may be combined with those of the various embodiments of
various aspects of the invention to yield enhanced embodiments.
Still other embodiments may be derived from combinations of the
various embodiments explicitly set forth herein.
FIGS. 4A-4I illustrate various stages in the formation of a single
layer of a multi-layer fabrication process where a second metal is
deposited on a first metal as well as in openings in the first
metal so that the first and second metal form part of the layer. In
FIG. 4A a side view of a substrate 82 is shown, onto which
patternable photoresist 84 is cast as shown in FIG. 4B. In FIG. 4C,
a pattern of resist is shown that results from the curing,
exposing, and developing of the resist. The patterning of the
photoresist 84 results in openings or apertures 92(a)-92(c)
extending from a surface 86 of the photoresist through the
thickness of the photoresist to surface 88 of the substrate 82. In
FIG. 4D a metal 94 (e.g. nickel) is shown as having been
electroplated into the openings 92(a)-92(c). In FIG. 4E the
photoresist has been removed (i.e. chemically stripped) from the
substrate to expose regions of the substrate 82 which are not
covered with the first metal 94. In FIG. 4F a second metal 96 (e.g.
silver) is shown as having been blanket electroplated over the
entire exposed portions of the substrate 82 (which is conductive)
and over the first metal 94 (which is also conductive). FIG. 4G
depicts the completed first layer of the structure which has
resulted from the planarization of the first and second metals down
to a height that exposes the first metal and sets a thickness for
the first layer. In FIG. 4H the result of repeating the process
steps shown in FIGS. 4B-4G several times to form a multi-layer
structure are shown where each layer consists of two materials. For
most applications, one of these materials is removed as shown in
FIG. 4I to yield a desired 3-D structure 98 (e.g. component or
device).
Various embodiments of various aspects of the invention are
directed to formation of three-dimensional structures from
materials some of which may be electrodeposited or electroless
deposited. Some of these structures may be formed form a single
build level formed from one or more deposited materials while
others are formed from a plurality of build layers each including
at least two materials (e.g. two or more layers, more preferably
five or more layers, and most preferably ten or more layers). In
some embodiments, layer thicknesses may be as small as one micron
or as large as fifty microns. In other embodiments, thinner layers
may be used while in other embodiments, thicker layers may be used.
In some embodiments structures having features positioned with
micron level precision and minimum features size on the order of
tens of microns are to be formed. In other embodiments structures
with less precise feature placement and/or larger minimum features
may be formed. In still other embodiments, higher precision and
smaller minimum feature sizes may be desirable.
The various embodiments, alternatives, and techniques disclosed
herein may form multi-layer structures using a single patterning
technique on all layers or using different patterning techniques on
different layers. For example, Various embodiments of the invention
may perform selective patterning operations using conformable
contact masks and masking operations (i.e. operations that use
masks which are contacted to but not adhered to a substrate),
proximity masks and masking operations (i.e. operations that use
masks that at least partially selectively shield a substrate by
their proximity to the substrate even if contact is not made),
non-conformable masks and masking operations (i.e. masks and
operations based on masks whose contact surfaces are not
significantly conformable), and/or adhered masks and masking
operations (masks and operations that use masks that are adhered to
a substrate onto which selective deposition or etching is to occur
as opposed to only being contacted to it). Conformable contact
masks, proximity masks, and non-conformable contact masks share the
property that they are preformed and brought to, or in proximity
to, a surface which is to be treated (i.e. the exposed portions of
the surface are to be treated). These masks can generally be
removed without damaging the mask or the surface that received
treatment to which they were contacted, or located in proximity to.
Adhered masks are generally formed on the surface to be treated
(i.e. the portion of that surface that is to be masked) and bonded
to that surface such that they cannot be separated from that
surface without being completely destroyed damaged beyond any point
of reuse. Adhered masks may be formed in a number of ways including
(1) by application of a photoresist, selective exposure of the
photoresist, and then development of the photoresist, (2) selective
transfer of pre-patterned masking material, and/or (3) direct
formation of masks from computer controlled depositions of
material.
Patterning operations may be used in selectively depositing
material and/or may be used in the selective etching of material.
Selectively etched regions may be selectively filled in or filled
in via blanket deposition, or the like, with a different desired
material. In some embodiments, the layer-by-layer build up may
involve the simultaneous formation of portions of multiple layers.
In some embodiments, depositions made in association with some
layer levels may result in depositions to regions associated with
other layer levels (i.e. regions that lie within the top and bottom
boundary levels that define a different layer's geometric
configuration). Such use of selective etching and interlaced
material deposition in association with multiple layers is
described in U.S. patent application Ser. No. 10/434,519, by
Smalley, and entitled "Methods of and Apparatus for
Electrochemically Fabricating Structures Via Interlaced Layers or
Via Selective Etching and Filling of Voids layer elements" which is
hereby incorporated herein by reference as if set forth in
full.
Temporary substrates on which structures may be formed may be of
the sacrificial-type (i.e. destroyed or damaged during separation
of deposited materials to the extent they can not be reused),
non-sacrificial-type (i.e. not destroyed or excessively damaged,
i.e. not damaged to the extent they may not be reused, e.g. with a
sacrificial or release layer located between the substrate and the
initial layers of a structure that is formed). Non-sacrificial
substrates may be considered reusable, with little or no rework
(e.g. replanarizing one or more selected surfaces or applying a
release layer, and the like) though they may or may not be reused
for a variety of reasons.
DEFINITIONS
This section of the specification is intended to set forth
definitions for a number of specific terms that may be useful in
describing the subject matter of the various embodiments of the
invention. It is believed that the meanings of most if not all of
these terms is clear from their general use in the specification
but they are set forth hereinafter to remove any ambiguity that may
exist. It is intended that these definitions be used in
understanding the scope and limits of any claims that use these
specific terms. As far as interpretation of the claims of this
patent disclosure are concerned, it is intended that these
definitions take presence over any contradictory definitions or
allusions found in any materials which are incorporated herein by
reference.
"Build" as used herein refers, as a verb, to the process of
building a desired structure or plurality of structures from a
plurality of applied or deposited materials which are stacked and
adhered upon application or deposition or, as a noun, to the
physical structure or structures formed from such a process.
Depending on the context in which the term is used, such physical
structures may include a desired structure embedded within a
sacrificial material or may include only desired physical
structures which may be separated from one another or may require
dicing and/or slicing to cause separation.
"Build axis" or "build orientation" is the axis or orientation that
is substantially perpendicular to substantially planar levels of
deposited or applied materials that are used in building up a
structure. The planar levels of deposited or applied materials may
be or may not be completely planar but are substantially so in that
the overall extent of their cross-sectional dimensions are
significantly greater than the height of any individual deposit or
application of material (e.g. 100, 500, 1000, 5000, or more times
greater). The planar nature of the deposited or applied materials
may come about from use of a process that leads to planar deposits
or it may result from a planarization process (e.g. a process that
includes mechanical abrasion, e.g. lapping, fly cutting, grinding,
or the like) that is used to remove material regions of excess
height. Unless explicitly noted otherwise, "vertical" as used
herein refers to the build axis or nominal build axis (if the
layers are not stacking with perfect registration) while
"horizontal" refers to a direction within the plane of the layers
(i.e. the plane that is substantially perpendicular to the build
axis).
"Build layer" or "layer of structure" as used herein does not refer
to a deposit of a specific material but instead refers to a region
of a build located between a lower boundary level and an upper
boundary level which generally defines a single cross-section of a
structure being formed or structures which are being formed in
parallel. Depending on the details of the actual process used to
form the structure, build layers are generally formed on and
adhered to previously formed build layers. In some processes the
boundaries between build layers are defined by planarization
operations which result in successive build layers being formed on
substantially planar upper surfaces of previously formed build
layers. In some embodiments, the substantially planar upper surface
of the preceding build layer may be textured to improve adhesion
between the layers. In other build processes, openings may exist in
or be formed in the upper surface of a previous but only partially
formed build layers such that the openings in the previous build
layers are filled with materials deposited in association with
current build layers which will cause interlacing of build layers
and material deposits. Such interlacing is described in U.S. patent
application Ser. No. 10/434,519. This referenced application is
incorporated herein by reference as if set forth in full. In most
embodiments, a build layer includes at least one primary structural
material and at least one primary sacrificial material. However, in
some embodiments, two or more primary structural materials may used
without a primary sacrificial material (e.g. when one primary
structural material is a dielectric and the other is a conductive
material). In some embodiments, build layers are distinguishable
from each other by the source of the data that is used to yield
patterns of the deposits, applications, and/or etchings of material
that form the respective build layers. For example, data
descriptive of a structure to be formed which is derived from data
extracted from different vertical levels of a data representation
of the structure define different build layers of the structure.
The vertical separation of successive pairs of such descriptive
data may define the thickness of build layers associated with the
data. As used herein, at times, "build layer" may be loosely
referred simply as "layer". In many embodiments, deposition
thickness of primary structural or sacrificial materials (i.e. the
thickness of any particular material after it is deposited) is
generally greater than the layer thickness and a net deposit
thickness is set via one or more planarization processes which may
include, for example, mechanical abrasion (e.g. lapping, fly
cutting, polishing, and the like) and/or chemical etching (e.g.
using selective or non-selective etchants). The lower boundary and
upper boundary for a build layer may be set and defined in
different ways. From a design point of view they may be set based
on a desired vertical resolution of the structure (which may vary
with height). From a data manipulation point of view, the vertical
layer boundaries may be defined as the vertical levels at which
data descriptive of the structure is processed or the layer
thickness may be defined as the height separating successive levels
of cross-sectional data that dictate how the structure will be
formed. From a fabrication point of view, depending on the exact
fabrication process used, the upper and lower layer boundaries may
be defined in a variety of different ways. For example by
planarization levels or effective planarization levels (e.g.
lapping levels, fly cutting levels, chemical mechanical polishing
levels, mechanical polishing levels, vertical positions of
structural and/or sacrificial materials after relatively uniform
etch back following a mechanical or chemical mechanical
planarization process). For example, by levels at which process
steps or operations are repeated. At levels at which, at least
theoretically, lateral extends of structural material can be
changed to define new cross-sectional features of a structure.
"Layer thickness" is the height along the build axis between a
lower boundary of a build layer and an upper boundary of that build
layer.
"Planarization" is a process that tends to remove materials, above
a desired plane, in a substantially non-selective manner such that
all deposited materials are brought to a substantially common
height or desired level (e.g. within 20%, 10%, 5%, or even 1% of a
desired layer boundary level). For example, lapping removes
material in a substantially non-selective manner though some amount
of recession one material or another may occur (e.g. copper may
recess relative to nickel). Planarization may occur primarily via
mechanical means, e.g. lapping, grinding, fly cutting, milling,
sanding, abrasive polishing, frictionally induced melting, other
machining operations, or the like (i.e. mechanical planarization).
Mechanical planarization maybe followed or proceeded by thermally
induced planarization (.e.g. melting) or chemically induced
planarization (e.g. etching). Planarization may occur primarily via
a chemical and/or electrical means (e.g. chemical etching,
electrochemical etching, or the like). Planarization may occur via
a simultaneous combination of mechanical and chemical etching (e.g.
chemical mechanical polishing (CMP)).
"Structural material" as used herein refers to a material that
remains part of the structure when put into use.
"Supplemental structural material" as used herein refers to a
material that forms part of the structure when the structure is put
to use but is not added as part of the build layers but instead is
added to a plurality of layers simultaneously (e.g. via one or more
coating operations that applies the material, selectively or in a
blanket fashion, to a one or more surfaces of a desired build
structure that has been released from a sacrificial material.
"Primary structural material" as used herein is a structural
material that forms part of a given build layer and which is
typically deposited or applied during the formation of that build
layer and which makes up more than 20% of the structural material
volume of the given build layer. In some embodiments, the primary
structural material may be the same on each of a plurality of build
layers or it may be different on different build layers. In some
embodiments, a given primary structural material may be formed from
two or more materials by the alloying or diffusion of two or more
materials to form a single material.
"Secondary structural material" as used herein is a structural
material that forms part of a given build layer and is typically
deposited or applied during the formation of the given build layer
but is not a primary structural material as it individually
accounts for only a small volume of the structural material
associated with the given layer. A secondary structural material
will account for less than 20% of the volume of the structural
material associated with the given layer. In some preferred
embodiments, each secondary structural material may account for
less than 10%, 5%, or even 2% of the volume of the structural
material associated with the given layer. Examples of secondary
structural materials may include seed layer materials, adhesion
layer materials, barrier layer materials (e.g. diffusion barrier
material), and the like. These secondary structural materials are
typically applied to form coatings having thicknesses less than 2
microns, 1 micron, 0.5 microns, or even 0.2 microns). The coatings
may be applied in a conformal or directional manner (e.g. via CVD,
PVD, electroless deposition, or the like). Such coatings may be
applied in a blanket manner or in a selective manner. Such coatings
may be applied in a planar manner (e.g. over previously planarized
layers of material) as taught in U.S. patent application Ser. No.
10/607,931. In other embodiments, such coatings may be applied in a
non-planar manner, for example, in openings in and over a patterned
masking material that has been applied to previously planarized
layers of material as taught in U.S. patent application Ser. No.
10/841,383. These referenced applications are incorporated herein
by reference as if set forth in full herein.
"Functional structural material" as used herein is a structural
material that would have been removed as a sacrificial material but
for its actual or effective encapsulation by other structural
materials. Effective encapsulation refers, for example, to the
inability of an etchant to attack the functional structural
material due to inaccessibility that results from a very small area
of exposure and/or due to an elongated or tortuous exposure path.
For example, large (10,000 .mu.m.sup.2) but thin (e.g. less than
0.5 microns) regions of sacrificial copper sandwiched between
deposits of nickel may define regions of functional structural
material depending on ability of a release etchant to remove the
sandwiched copper.
"Sacrificial material" is material that forms part of a build layer
but is not a structural material. Sacrificial material on a given
build layer is separated from structural material on that build
layer after formation of that build layer is completed and more
generally is removed from a plurality of layers after completion of
the formation of the plurality of layers during a "release" process
that removes the bulk of the sacrificial material or materials. In
general sacrificial material is located on a build layer during the
formation of one, two, or more subsequent build layers and is
thereafter removed in a manner that does not lead to a planarized
surface. Materials that are applied primarily for masking purposes,
i.e. to allow subsequent selective deposition or etching of a
material, e.g. photoresist that is used in forming a build layer
but does not form part of the build layer) or that exist as part of
a build for less than one or two complete build layer formation
cycles are not considered sacrificial materials as the term is used
herein but instead shall be referred as masking materials or as
temporary materials. These separation processes are sometimes
referred to as a release process and may or may not involve the
separation of structural material from a build substrate. In many
embodiments, sacrificial material within a given build layer is not
removed until all build layers making up the three-dimensional
structure have been formed. Of course sacrificial material may be,
and typically is, removed from above the upper level of a current
build layer during planarization operations during the formation of
the current build layer. Sacrificial material is typically removed
via a chemical etching operation but in some embodiments may be
removed via a melting operation or electrochemical etching
operation. In typical structures, the removal of the sacrificial
material (i.e. release of the structural material from the
sacrificial material) does not result in planarized surfaces but
instead results in surfaces that are dictated by the boundaries of
structural materials located on each build layer. Sacrificial
materials are typically distinct from structural materials by
having different properties therefrom (e.g. chemical etchability,
hardness, melting point, etc.) but in some cases, as noted
previously, what would have been a sacrificial material may become
a structural material by its actual or effective encapsulation by
other structural materials. Similarly, structural materials may be
used to form sacrificial structures that are separated from a
desired structure during a release process via the sacrificial
structures being only attached to sacrificial material or
potentially by dissolution of the sacrificial structures themselves
using a process that is insufficient to reach structural material
that is intended to form part of a desired structure. It should be
understood that in some embodiments, small amounts of structural
material may be removed, after or during release of sacrificial
material. Such small amounts of structural material may have been
inadvertently formed due to imperfections in the fabrication
process or may result from the proper application of the process
but may result in features that are less than optimal (e.g. layers
with stairs steps in regions where smooth sloped surfaces are
desired. In such cases the volume of structural material removed is
typically minuscule compared to the amount that is retained and
thus such removal is ignored when labeling materials as sacrificial
or structural. Sacrificial materials are typically removed by a
dissolution process, or the like, that destroys the geometric
configuration of the sacrificial material as it existed on the
build layers. In many embodiments, the sacrificial material is a
conductive material such as a metal. As will be discussed
hereafter, masking materials though typically sacrificial in nature
are not termed sacrificial materials herein unless they meet the
required definition of sacrificial material.
"Supplemental sacrificial material" as used herein refers to a
material that does not form part of the structure when the
structure is put to use and is not added as part of the build
layers but instead is added to a plurality of layers simultaneously
(e.g. via one or more coating operations that applies the material,
selectively or in a blanket fashion, to a one or more surfaces of a
desired build structure that has been released from an initial
sacrificial material. This supplemental sacrificial material will
remain in place for a period of time and/or during the performance
of certain post layer formation operations, e.g. to protect the
structure that was released from a primary sacrificial material,
but will be removed prior to putting the structure to use.
"Primary sacrificial material" as used herein is a sacrificial
material that is located on a given build layer and which is
typically deposited or applied during the formation of that build
layer and which makes up more than 20% of the sacrificial material
volume of the given build layer. In some embodiments, the primary
sacrificial material may be the same on each of a plurality of
build layers or may be different on different build layers. In some
embodiments, a given primary sacrificial material may be formed
from two or more materials by the alloying or diffusion of two or
more materials to form a single material.
"Secondary sacrificial material" as used herein is a sacrificial
material that is located on a given build layer and is typically
deposited or applied during the formation of the build layer but is
not a primary sacrificial materials as it individually accounts for
only a small volume of the sacrificial material associated with the
given layer. A secondary sacrificial material will account for less
than 20% of the volume of the sacrificial material associated with
the given layer. In some preferred embodiments, each secondary
sacrificial material may account for less than 10%, 5%, or even 2%
of the volume of the sacrificial material associated with the given
layer. Examples of secondary structural materials may include seed
layer materials, adhesion layer materials, barrier layer materials
(e.g. diffusion barrier material), and the like. These secondary
sacrificial materials are typically applied to form coatings having
thicknesses less than 2 microns, 1 micron, 0.5 microns, or even 0.2
microns). The coatings may be applied in a conformal or directional
manner (e.g. via CVD, PVD, electroless deposition, or the like).
Such coatings may be applied in a blanket manner or in a selective
manner. Such coatings may be applied in a planar manner (e.g. over
previously planarized layers of material) as taught in U.S. patent
application Ser. No. 10/607,931. In other embodiments, such
coatings may be applied in a non-planar manner, for example, in
openings in and over a patterned masking material that has been
applied to previously planarized layers of material as taught in
U.S. patent application Ser. No. 10/841,383. These referenced
applications are incorporated herein by reference as if set forth
in full herein.
"Adhesion layer", "seed layer", "barrier layer", and the like refer
to coatings of material that are thin in comparison to the layer
thickness and thus generally form secondary structural material
portions or sacrificial material portions of some layers. Such
coatings may be applied uniformly over a previously formed build
layer, they may be applied over a portion of a previously formed
build layer and over patterned structural or sacrificial material
existing on a current (i.e. partially formed) build layer so that a
non-planar seed layer results, or they may be selectively applied
to only certain locations on a previously formed build layer. In
the event such coatings are non-selectively applied, selected
portions may be removed (1) prior to depositing either a
sacrificial material or structural material as part of a current
layer or (2) prior to beginning formation of the next layer or they
may remain in place through the layer build up process and then
etched away after formation of a plurality of build layers.
"Masking material" is a material that may be used as a tool in the
process of forming a build layer but does not form part of that
build layer. Masking material is typically a photopolymer or
photoresist material or other material that may be readily
patterned. Masking material is typically a dielectric. Masking
material, though typically sacrificial in nature, is not a
sacrificial material as the term is used herein. Masking material
is typically applied to a surface during the formation of a build
layer for the purpose of allowing selective deposition, etching, or
other treatment and is removed either during the process of forming
that build layer or immediately after the formation of that build
layer.
"Multilayer structures" are structures formed from multiple build
layers of deposited or applied materials.
"Multilayer three-dimensional (or 3D or 3-D) structures" are
Multilayer Structures that meet at least one of two criteria: (1)
the structural material portion of at least two layers of which one
has structural material portions that do not overlap structural
material portions of the other.
"Complex multilayer three-dimensional (or 3D or 3-D) structures"
are multilayer three-dimensional structures formed from at least
three layers where a line may be defined that hypothetically
extends vertically through at least some portion of the build
layers of the structure will extend from structural material
through sacrificial material and back through structural material
or will extend from sacrificial material through structural
material and back through sacrificial material (these might be
termed vertically complex multilayer three-dimensional structures).
Alternatively, complex multilayer three-dimensional structures may
be defined as multilayer three-dimensional structures formed from
at least two layers where a line may be defined that hypothetically
extends horizontally through at least some portion of a build layer
of the structure that will extend from structural material through
sacrificial material and back through structural material or will
extend from sacrificial material through structural material and
back through sacrificial material (these might be termed
horizontally complex multilayer three-dimensional structures).
Worded another way, in complex multilayer three-dimensional
structures, a vertically or horizontally extending hypothetical
line will extend from one or structural material or void (when the
sacrificial material is removed) to the other of void or structural
material and then back to structural material or void as the line
is traversed along at least a portion of the line.
"Moderately complex multilayer three-dimensional (or 3D or 3-D)
structures are complex multilayer 3D structures for which the
alternating of void and structure or structure and void not only
exists along one of a vertically or horizontally extending line but
along lines extending both vertically and horizontally.
"Highly complex multilayer (or 3D or 3-D) structures are complex
multilayer 3D structures for which the
structure-to-void-to-structure or void-to-structure-to-void
alternating occurs once along the line but occurs a plurality of
times along a definable horizontally or vertically extending
line.
"Up-facing feature" is an element dictated by the cross-sectional
data for a given build layer "n" and a next build layer "n+1" that
is to be formed from a given material that exists on the build
layer "n" but does not exist on the immediately succeeding build
layer "n+1". For convenience the term "up-facing feature" will
apply to such features regardless of the build orientation.
"Down-facing feature" is an element dictated by the cross-sectional
data for a given build layer "n" and a preceding build layer "n-1"
that is to be formed from a given material that exists on build
layer "n" but does not exist on the immediately preceding build
layer "n-1". As with up-facing features, the term "down-facing
feature" shall apply to such features regardless of the actual
build orientation.
"Continuing region" is the portion of a given build layer "n" that
is dictated by the cross-sectional data for the given build layer
"n", a next build layer "n+1" and a preceding build layer "n-1"
that is neither up-facing nor down-facing for the build layer
"n".
"Minimum feature size" refers to a necessary or desirable spacing
between structural material elements on a given layer that are to
remain distinct in the final device configuration. If the minimum
feature size is not maintained on a given layer, the fabrication
process may result in structural material inadvertently bridging
the two structural elements due to masking material failure or
failure to appropriately fill voids with sacrificial material
during formation of the given layer such that during formation of a
subsequent layer structural material inadvertently fills the void.
More care during fabrication can lead to a reduction in minimum
feature size or a willingness to accept greater losses in
productivity can result in a decrease in the minimum feature size.
However, during fabrication for a given set of process parameters,
inspection diligence, and yield (successful level of production) a
minimum design feature size is set in one way or another. The above
described minimum feature size may more appropriately be termed
minimum feature size of sacrificial material regions. Conversely a
minimum feature size for structure material regions (minimum width
or length of structural material elements) may be specified.
Depending on the fabrication method and order of deposition of
structural material and sacrificial material, the two types of
minimum feature sizes may be different. In practice, for example,
using electrochemical fabrication methods and described herein, the
minimum features size on a given layer may be roughly set to a
value that approximates the layer thickness used to form the layer
and it may be considered the same for both structural and
sacrificial material widths and lengths. In some more rigorously
implemented processes, examination regiments, and rework
requirements, it may be set to an amount that is 80%, 50%, or even
30% of the layer thickness. Other values or methods of setting
minimum feature sizes may be set.
Minimally Invasive Surgery or Procedures:
Various devices set forth in the embodiments of the invention may
be used in the performance of medical procedures and particularly
in the performance of procedures where very small tools are needed.
Such procedures include various minimally invasive procedures where
access to a desired working location in the body of a patient
occurs via one or more lumens inserted through the skin or through
a body cavity where tools, materials, and observations devices are
inserted via the lumen(s). In some such procedures access to a
desired location may be along a tortuous path. As used herein
"tortuous path" refers to a path taken by the lumen which has turns
or other obstacles which are numerous and/or sharp such a that a
controlled and reliable manipulation of a tool or device at the
distal end of the lumen via push tubes, pull wires, rotating
cables, or the like, to achieve desired functions from
manipulations at the proximal end of the lumen(s) is not achievable
or at least not readily achievable by operators (surgeons,
interventionalists, etc.) having reasonable skills and within
reasonable or desirable time constraints and within reasonable risk
limits.
Miniature Hydraulic and Pneumatic Rotary Devices:
Embodiments of the present invention provide hydraulic and/or
pneumatic devices that may be used in different medical
applications as well as in non-medical applications. Some
embodiments of the invention are directed to miniature turbine
devices that can be made to rotate by application of a fluid flow
so as to provide rotational motive force on a small scale. By
actuating the turbine of these embodiments with a fluid, the motive
force can be delivered to locations that are difficult to access by
other techniques. For example, an endoscopic application that uses
a catheter for situating a medical tool through a tortuous path
would be well served by such a device. A system that relies on
spinning a wire inside the sheath of a catheter may be incapable of
contending with a very tortuous path due to, e.g., increased
friction on the drive wire. A fluid based system would have no such
limitations. Even a tool at the distal end of such a device that is
capable of converting back and forth linear motion of a wire may
have difficulty reaching desired rotational velocities. Such
devices may also be of particular use when the diameter or length
of a distal tool makes it impractical to include an electrical
motor of sufficient torque or rotational velocity.
It is envisioned that such devices may have numerous uses,
including, for example: (1) Thrombectomy devices: e.g., a turbine
could drive a propeller or similar structure which could pull a
thrombus into it and macerate it and/or which could create a vacuum
that extracts the thrombus; (2) Atherectomy devices: for
conventional directional coronary atherectomy (DCA), atherectomy of
the kind performed by the FoxHollow SilverHawk or by the Boston
Scientific Rotablator; (3) Intravascular ultrasound: spinning an
ultrasound transducer at the distal end of the catheter. A similar
application is optical coherence tomography (OCT) catheters where
an optical element is spun. (4). Dental: Removing decayed tooth
material, debriding and cleaning, in preparation for cavity
filling, root canal obturation, etc. (5). Cardiac: Removing
undesirable material such as extraneous muscle from the heart,
calcium from heart valves, etc. (6). Powering mechanisms (e.g.,
walking mechanisms which produce a `gait` or rolling wheels) which
can pull a guidewire through a hollow body structure, in lieu of
pushing it. (7). Self contained power sources when combined with a
small compressed gas canister and a valve (e.g. by a membrane that
is punctured when needed). (8). Optical beam choppers (9) Optical
scanners (for imaging, etc.) (10) Cutting tools, regardless of
specific application, where miniature saw blades, drill bits or end
mill bits could provide useful service in small and/or hard to
reach locations. (12). More generally, turbines of the embodiments
of the present invention may be used to drive any device that
requires a spinning motive force or one that could convert a
spinning motive force to the desired mode of motion. (13). The
turbines may be used to drive a mixing element for fluid mixing.
(14). The turbines may be used to create vibration by building them
along with (or attaching them to) an eccentric mass. Vibration may
be used to tunnel through chronic total occlusions, perform
lithotripsy on kidney, ureteral, and gallstones, and for other
purposes. (15). Pairs of turbines may be used to form
self-contained systems with only an electrical connection (e.g, an
IVUS catheter). Such systems may incorporate a small motor at the
proximal end driving one turbine-like device which is used as a
pump, with a turbine at the distal end that is driven by the flow
of liquid (e.g., saline). The pump and turbine can be connected by
a catheter with at least two lumens, allowing fluid to move
distally and then return. (16). The turbines may be used as
miniature flow meters or velocity sensors by allowing fluid flow to
rotate the turbine in conjunction with one or more sensors that
detect the movement of the rotor blades or of one or more elements
that rotate along with the turbine. Such detection may occur
optically, magnetically, resistively or the like.
FIG. 5 provides a perspective view of a turbine 100 according to a
first embodiment of the invention. From this perspective, the
housing of the turbine, or stator 102, and the cutting blade 152
may be seen. The cutting blade includes holes 154 which may help
provide path-ways for etching away sacrificial material when the
device is formed by one of the multi-layer, multi-material
fabrications processes as taught herein. One or more such holes may
also be used in combination with an appropriate sensor to provide
feedback on angular rotation or rotational velocity during testing
or operation of the device.
FIG. 6 provides a perspective view of the same device as FIG. 5 but
from the fluid inlet and outlet side. In this figure the housing
102 and cutting blade 152 can still be seen but additionally the
central fluid exit port 107 may be seen along with the fluid inlet
ports 103 and turbine blades 155.
FIG. 7 provides a similar perspective to that of FIG. 6 but further
includes a cut-away of the turbine housing or stator 102. This view
allows the ball bearings 182 and the bearing races (i.e. rotor
bearing surface and stator bearing surface to be seen along with a
clearer view of the turbine blades 155. The races appear stepped
due to the nature of the multi-layer, multiple material fabrication
process that is assumed to be used in the formation of these
portions of this device. There is also an indication of the fluid
flow direction 106 toward the turbine blades. There are five inlets
103 in this embodiment (four can be seen in FIG. 7). The entire
center aperture acts as an outlet 107 in this embodiment and it may
be connected to a lumen of other tube for conveying the fluid away
from the device site. There are also seven turbine blades shown in
this embodiment. In this embodiment, the number of inlets differs
from the number of turbine blades such that there is always a fluid
flow that impinges on a turbine blade to cause a motive force. In
other embodiments, the number of blades and inlets may be the same.
In some alternatives, each inlet 103 may direct its flow of fluid
into one or more stator exits 105 (i.e. ports that direct the fluid
onto the rotor blades). In some alternatives the jetting directions
from each exit port may have the same orientation with respect to
the instantaneous radial direction while in other embodiments the
orientations may be different. These variations may help ensure
that the force distribution over a complete rotation is as uniform
as possible. FIG. 7 also shows the direction of fluid as it is
jetted out of the stator exit ports 105 to impinge on the turbine
blade 155 by flow 106 after which the flow direction is axially
downward out of the device as shown by arrow 156. In some
variations of this embodiment the stator and the rotor may be
formed separately along with other components and pairing marks
such as those indicated by reference number 161 may be used to
ensure proper elements are assembled together. In other embodiments
they may be formed in substantially preassembled positions.
FIG. 8 provides a perspective cut away view of the bottom of the
housing such that the channel 104 connecting the fluid inlet 103 to
its respective outlet 105 can be seen. In this embodiment, the
fluid is redirected from the inlet 103 to outlet 105 such that it
impinges on the blades with a tangential velocity component. This
turbine relies on impulse from the incoming fluid to drive the
rotor. The pressure of the driving fluid does not change. It would
also be possible to modify this design to what is known as a
reaction turbine where the fluid pressure changes in the process of
extracting energy from the fluid and driving the rotor. This type
of turbine would more closely resemble the Francis turbine which is
classically used for power generation.
FIG. 9 provides a perspective view of the rotor 150 so that the
interior ball bearing race 158 may be seen along with the rotor
blades 155. These blades 155 are designed to extract the kinetic
energy in the fluid flow while redirecting the fluid where it can
exit from the center aperture of the turbine.
In addition to the various alternatives noted above a number of
additional alternatives to this first embodiment are possible. For
example the number of bearings, inlets, and turbine blades could be
different. The shapes of the blade may be varied (e.g. to provide
enhanced tangential thrust or even axial thrust. The blades may not
be fully mounted to a base plate but instead may be created to
provide some amount of compliant deflection under heavy loading
conditions to provide an improved operational characteristic or
overload protection. For example, the blade may be compliantly
deflected to reduce flow by gaps which could improve efficiency or
could increase gaps to provide reduced variation in rotational
speed with changes in flow rate. In still other embodiments, a pair
of turbines could be located on either side of the tool to provide
increased driving power and more balanced tool operation. In still
other embodiments a tool could be located on either side of the
turbine blades with or without an additional set ball bearings and
bearing races.
In this embodiment the turbine is built as a number of separate
elements and then assembled. The separate parts of the turbine
include the stator, the rotor which includes the saw blade, a plug,
and a number of balls. The various parts of the turbine may be
formed by the various multi-layer, multi-material build processes
set forth herein or some of the parts, e.g. the balls, may be
formed by other processes. The balls may be formed by one of the
processes set forth herein potential in combination with one or
more discontinuity reduction processes that smooth out the stair
steps that typically accompany a multi-layer fabrication process.
In the present embodiment, the ball bearings are added after the
fabrication of the other parts is complete and they serve to
constrain the rotor and stator relative to each other. Once the
balls are inserted into the bearing cavity, they are constrained
from coming back out by use of a plug that is fabricated with the
stator (see FIG. 10). In the present embodiment the plug has a
bearing race that matches the stator and it or the stator may have
stops or other features that ensure proper positioning of the plug
once it is inserted. The plug 112 is affixed to the stator 102 once
it is located properly. The locking of the plug into place may
occur by use of an adhesive, solder, epoxy, one or more mechanical
catches or rings that may be formed along with the other parts.
FIG. 10 provides a perspective view of the turbine with the plug
112 inserted. FIG. 11 provides a perspective cross sectional view
of the assembly that includes a view of the plug 112 showing its
bearing race surface 118 along with the bearing race surface 158 of
the rotor and bearing race surface 108 of the stator 102.
In some alternative embodiments, the ball bearings and associated
races may be replaced with cylindrical bearings, needle bearings,
or other bearing elements, with or without spacing elements and
with appropriate race configurations. These bearing may be inserted
and locked into place during an assembly process after fabrication
of the other components.
In still other alternative embodiments, the turbine and its various
components may be fabricated in an assembled state. Such
embodiments may include the use of ball bearings, cylindrical
roller bearings, needle bearings, tapered roller bearings, thrust
bearing, or the like. In such embodiments, special care may be
taken to allow precision fitting of the bearing and race surfaces
without violating minimum feature size rules that may exist as a
result of the formation method chosen for fabricating the device.
Examples of such "special" fabrication methods are provided in
previously referenced U.S. Patent Application Nos. 60/943,817;
11/441,578; 10/949,744; and 12/139,445. In some such alternative
embodiments, an axial shifting may be used to load the preassembled
device from an as fabricated state to an operational state. Such
shifting may result in a tightening of bearing to race gaps. Such
shifting may occur prior to or as part of the initial configuration
of the device or it may occur each time the device is operated. For
example, the drive fluid may be directed at the blades such that it
not only strikes the blades with a tangential component (and a
radial component) but also with an axial component such that the
rotor is provided with an axial component of force that can cause
it to not only rotate radially but also be moved to a more optimal
axial position. In some alternative embodiments interference
bearing or bushing may be provided without need for layer shifting
after formation of the devices. In still further embodiments, layer
portions including interference bearing or bushing elements may be
intentionally formed with excess stress so that slight distortions
in layer positions occur after release of structure and so that
more than edge to edge contact and stabilization occurs.
In some alternative embodiments, such as those that undergo slight
shifting in the axially direction, fluid bearings may be used,
either of the hydrostatic or hydrodynamic type to axially and
radially constrain the rotor relative to the stator (see, for
example, FIG. 14).
In this first embodiment of the turbine, the drive fluid enters the
periphery of the back side of the device through the stator inlets
103, leaves the stator outlets 105 and flows 106 around the
periphery of the back side to strike the rotor blades 155 and then
is forced out 156 along the center of the backside. Thus the inlet
103 and outlet 107 are coaxial. In alternative embodiments, other
inlet-outlet configurations are possible, e.g. the inlet may be on
the proximal side of the device while the outlet may be on the
distal side of the device. In various embodiments, the spent fluid
may be recaptured or simply released.
FIGS. 12 and 13 provide perspective views of a turbine device 200
according to a second embodiment of the invention that includes an
alternative mechanism 234 for retaining the ball bearings 214. In
this second embodiment, instead of using a plug, a leaf spring 233
is provided that includes a tab 234. When in its neutral position,
the tab will prevent the ball bearings from coming out of the
housing. The leaf spring allows the tab to be moved away from the
neutral position for ball bearing insertion and removal.
FIG. 14 provides a perspective view of an example turbine 300
according to a third embodiment where hydrostatic or hydrodynamic
vertical or axial facing fluid bearings 362 and radial facing
bearings 364 are used to constrain the position of the rotor
relative to the stator. In this embodiment some of the fluid flow
is diverted from the flow used to drive the turbine and is used to
create a hydrostatic bearings in both the axial and radial
directions. One advantage of this design is the absence or
minimization of any moving mechanical parts. In the embodiment
illustrated in FIG. 14, device 300 includes housing or stator 302
and rotor 350 along with inlets 303 and outlet 307, stator passages
304 and stator outlets 305, turbine blades 355 and fluid channels
360 and ports 361 for supplying fluid to bearings 362 and 364.
In the various embodiments set forth herein, fabrication using one
of the multi-layer, multi-material methods requires that special
attention be given to the location of release holes or the like so
that removal of sacrificial material (i.e. one of the multiple
materials) can be readily achieved. This is particularly true in
the case of the small channel sizes associated with the use of
hydrostatic or hydrodynamic fluid bearings. In some alternative
embodiments devices may be formed with larger gaps that are made
smaller by shifting of components, and potentially locking
components in place, after release of sacrificial material In still
other alternative embodiments, holes may be made larger and then
sealing techniques such as those set forth in U.S. patent
application Ser. No. 10/434,103 may be used. This patent
application is incorporated herein by reference as if set forth in
full herein.
In some alternative embodiments, instead of the interior of the
device forming the rotor and the exterior forming the stator these
roles may be reversed as will be discussed hereinafter with regard
to FIGS. 18A-18D.
In some alternative embodiments, the fluid may be pneumatic instead
of hydraulic (e.g. air, nitrogen, argon, or the like instead of
water, saline, or the like). Such alternatives may even use
combustible materials along with a combustion source to increase
pressure and thus increased velocity or torque achievable by the
device. Such devices may present issues for medical applications
but may be well suited for non-medical applications.
The device of the first embodiment, was fabricated and successfully
tested using compressed air. As fabricated the turbine used 300 um
diameter ball bearings and the overall diameter of the device was
1200 um. Of course with smaller bearings, smaller diameter and
shorter devices could be fabricated.
FIGS. 15A-15H illustrate various states in a method of embedding
balls 482 during fabrication of a turbine according to a fourth
embodiment of the invention (the turbine is built upside-down as
shown, though it doesn't have to be). In this design the inner and
outside races are fabricated with vertical walls, at least from
their mid-points up since curved walls would prevent inserting the
balls from above. FIG. 15A shows the state of the process after
formation of a plurality of multi-material layers has occurred such
that structural material 421 and sacrificial material 422 have been
deposited to form a portion of a rotor and stator. FIG. 15B depicts
the state of the process after deposition and patterning of a mask
material (e.g. photoresist) so as to block those portions of
sacrificial material not located between stator bearing and rotor
bearing surfaces. FIG. 15C shows the state of the process after
sacrificial material has been removed to create gaps 424 between
rotor bearing and stator bearing surfaces (i.e. between the bearing
races) while FIG. 15D shows the state of the process after loading
bearings 482. An important part of the process is that the holes
that the bearing are loaded into are deep enough to allow continued
formation of multi-material layers along with planarization
operations. FIG. 15E shows the state of the process after
depositing additional sacrificial material while FIG. 15F shows the
state of the process after planarization of the structural material
and newly deposited sacrificial material. FIG. 15G shows the state
of the process after formation of a number of additional layers, of
sacrificial material 432 and structural material 431 which may be
different form sacrificial material 422 and structural material
421, so as to complete the multi-layer multi-material build up
process. FIG. 15H shows the state of the process after etching away
sacrificial material leaving behind the turbine including rotor 450
and stator 402 formed of structural materials 421 and 431 and
loaded with ball bearings 482. The main elements of this process
are: (1) form a partially completed device from a plurality of
adhered layers, (2) remove sacrificial material from portions of
one or more layers and insert bearings, (3) continue formation of
additional layers to complete formation of the device, and (4)
release the device including embedded bearings from sacrificial
material.
Of course numerous variations of this embodiment and process are
possible. For example, bearings may be loaded at multiple levels
after multiple intermediate etching operations have occurred. Other
types of bearings may be incorporated. Multiple structural
materials or sacrificial materials may be used during the formation
of any particular layer
FIGS. 16A-1 to 16F illustrate various states in a method of
embedding balls during fabrication of a turbine according to a
fifth embodiment of the invention. FIGS. 16A-1 and 16A-2 show and
initial state of the process where a device has been partially
formed in two halves one of which is upside down relative to the
other. The left side shows the lower half of the device while the
right side shows the upper half. According this embodiment, the
device is formed using a multi-material, multi-component
electrochemical fabrication process such that the two half elements
are formed of a sacrificial material 522 and 522' and a structural
material 521 and 521'. FIGS. 16B-1 and 16B-2 show the state of the
process for the two half structures after depositing and patterning
a masking material 523 and 523' (e.g. a photoresist) so as to allow
selective removal of sacrificial material from portions of the half
structures (e.g. from portions where ball bearings will need to be
inserted). FIGS. 16C-1 and 16C-2 show the state of the process
after removal of the sacrificial material to create gaps 524 and
524' in ball bearing placement locations, gaps 525 in alignment
feature holes and protrusions 525' which will eventually be fitted
into gaps 525. FIGS. 16D-1 and 16D-2 show the state of the process
after bearings 582 have been loaded and adhesive 527' has been
located on selective mating surfaces in the half structure of FIGS.
16D-2. FIG. 16E shows the state of the process after the right half
has been flipped over and placed on the left half (e.g. via
alignment elements 525 and 525') and the two halves bonded via
adhesive 527'. FIG. 6F shows the state of the process after the
device including rotor 550, stator 502, and bearing 582 have been
released from substrates 520 and 520' and from the sacrificial
material(s).
As with the previous embodiment, numerous variations of the process
of FIGS. 16A-16F are possible and will be apparent to one of skill
in the art upon review of the teachings set forth herein.
FIGS. 17A and 7B provide top and bottom perspective views of a
turbine 600 similar to that of the embodiment of FIGS. 5-11 with
the exception that the cutting tool is replaced by a coupling
element 684 that can accept different tools. The device includes
housing or stator 602 along with inlet holes 603 and outlet 607,
bearing hole plug 612, rotor 650 holding blades 655. FIG. 17C
provides a cut perspective view of the turbine of FIGS. 17A and 17B
prior to the loading of ball bearing into the bearing races.
FIGS. 18A and 18B provide top and bottom perspective views of a
turbine 700 similar to that of FIGS. 17A and 17B with the exception
that instead of being configured to take inlet fluid from the
outside (larger radius) and directing it radially inward, the
device is configured to take inlet fluid from the central portion
of the axis of the device 703 and directing it through passages 704
radially outward toward blades 755 (i.e. toward regions radially
further from the axis of the device). FIG. 18C provides a
perspective cut view of the device of FIGS. 18A and 18B while FIG.
18D provides a sectional view of the a portion of the rotor 750 and
of the stator 702 so that passage 704 connecting inlet 703 with
outlet 705 can be seen.
FIGS. 19A-19D provides various views of a blender tool, as an
example of a tool, that is capable of being used with the turbines
of FIGS. 17A-17C. The blender is configured so that housing 802 is
mounted to a stator of a turbine like that of FIGS. 17A-17C wherein
rotor 850 can be made to spin when driven by a turbine or the like.
Housing 802 includes inlet 803 and outlet 807 while the rotor
includes conical steps 876 which directs blended material outward
through outlets 807. Rotor includes upper blades 872 having
downward slopping surfaces 874 for pulling material deeper into the
blender blades 855.
FIGS. 19E-19F provide various views of the blender device 800 of
the eighth embodiment along with a turbine 600 of the sixth
embodiment of the invention.
The bearings and races and bearing-race loading methods discussed
herein may be used in non-turbine applications, such as (1)
micro-motors and rotary actuators, (2) linear (e.g., recirculating
ball) stages, (3) stabilization of the axes of IVUS and OCT
catheters during rotation (to obtain a more accurate imaging), and
(4) to reduce friction between drive cables and catheters for
various devices that are driven using a proximal source of
power.
In some variations of the embodiments presented above of the
turbine devices, or similar structures, may serve as a
centrifugal-type pumps. Such pumps can be driven by a motor, by a
rotating drive cable, or by a turbine (e.g., one liquid can be used
to pump another, without mixing).
In some variations of the embodiments presented above, gearing,
etc. may be provided (e.g., co-fabricated with the turbine) to
reduce or increase speed or torque.
In some variations of the embodiments presented above, the turbines
may be used to produce a variable, near-static torque if the rotor
is equipped with magnets and produces Eddy currents in a nearby
conducting disk (or alternatively, the disk can be spun by the
turbine rotor): as speed increases, so will torque.
Further Comments and Conclusions
The devices of the present application can be combined with various
features of the devices taught in a number of additional patent
applications, filed by Microfabrica, related to medical devices, to
derive new and improved embodiments. These applications include:
U.S. patent application Ser. No. 12/134,188, filed Jun. 5, 2008,
directed to micro umbrella devices, expansion devices and chain
mail devices for use in medical applications; U.S. patent
application Ser. No. 12/138,404, filed Jun. 12, 2008, directed to
coil delivery devices for use in medical applications; U.S. patent
application Ser. No. 12/138,395, filed Jun. 12, 2008, directed to
biopsy devices; U.S. patent application Ser. No. 12/138,336, filed
Jun. 12, 2008, directed to micro-scale ratcheting devices for use
in medical applications; 12/139,445, filed Jun. 13, 2008, directed
to hydraulic and pneumatic devices; and 12/140,243, filed Jun. 16,
2008, directed to microreamers. Each of these applications is
incorporated herein by reference as if set forth in full
herein.
Structural or sacrificial dielectric materials may be incorporated
into embodiments of the present invention in a variety of different
ways. Such materials may form a third material or higher deposited
material on selected layers or may form one of the first two
materials deposited on some layers. Additional teachings concerning
the formation of structures on dielectric substrates and/or the
formation of structures that incorporate dielectric materials into
the formation process and possibility into the final structures as
formed are set forth in a number of patent applications filed Dec.
31, 2003. The first of these filings is U.S. Patent Application No.
60/534,184 which is entitled "Electrochemical Fabrication Methods
Incorporating Dielectric Materials and/or Using Dielectric
Substrates". The second of these filings is U.S. Patent Application
No. 60/533,932, which is entitled "Electrochemical Fabrication
Methods Using Dielectric Substrates". The third of these filings is
U.S. Patent Application No. 60/534,157, which is entitled
"Electrochemical Fabrication Methods Incorporating Dielectric
Materials". The fourth of these filings is U.S. Patent Application
No. 60/533,891, which is entitled "Methods for Electrochemically
Fabricating Structures Incorporating Dielectric Sheets and/or Seed
layers That Are Partially Removed Via Planarization". A fifth such
filing is U.S. Patent Application No. 60/533,895, which is entitled
"Electrochemical Fabrication Method for Producing Multi-layer
Three-Dimensional Structures on a Porous Dielectric". Additional
patent filings that provide teachings concerning incorporation of
dielectrics into the EFAB process include U.S. patent application
Ser. No. 11/139,262, filed May 26, 2005 by Lockard, et al., and
which is entitled "Methods for Electrochemically Fabricating
Structures Using Adhered Masks, Incorporating Dielectric Sheets,
and/or Seed Layers that are Partially Removed Via Planarization";
and U.S. patent application Ser. No. 11/029,216, filed Jan. 3, 2005
by Cohen, et al., and which is entitled "Electrochemical
Fabrication Methods Incorporating Dielectric Materials and/or Using
Dielectric Substrates". These patent filings are each hereby
incorporated herein by reference as if set forth in full
herein.
Some embodiments may employ diffusion bonding or the like to
enhance adhesion between successive layers of material. Various
teachings concerning the use of diffusion bonding in
electrochemical fabrication processes are set forth in U.S. patent
application Ser. No. 10/841,384 which was filed May 7, 2004 by
Cohen et al. which is entitled "Method of Electrochemically
Fabricating Multilayer Structures Having Improved Interlayer
Adhesion" and which is hereby incorporated herein by reference as
if set forth in full.
Some embodiments may incorporate elements taught in conjunction
with other medical devices as set forth in various U.S. patent
applications filed by the owner of the present application and/or
may benefit from combined use with these other medical devices:
Some of these alternative devices have been described in the
following previously filed patent applications: (1) U.S. patent
application Ser. No. 11/478,934, by Cohen et al., and entitled
"Electrochemical Fabrication Processes Incorporating Non-Platable
Materials and/or Metals that are Difficult to Plate On"; (2) U.S.
patent application Ser. No. 11/582,049, by Cohen, and entitled
"Discrete or Continuous Tissue Capture Device and Method for
Making"; (3) U.S. patent application Ser. No. 11/625,807, by Cohen,
and entitled "Microdevices for Tissue Approximation and Retention,
Methods for Using, and Methods for Making"; (4) U.S. patent
application Ser. No. 11/696,722, by Cohen, and entitled "Biopsy
Devices, Methods for Using, and Methods for Making"; (5) U.S.
patent application Ser. No. 11/734,273, by Cohen, and entitled
"Thrombectomy Devices and Methods for Making"; (6) U.S. Patent
Application No. 60/942,200, by Cohen, and entitled "Micro-Umbrella
Devices for Use in Medical Applications and Methods for Making Such
Devices"; and (7) U.S. patent application Ser. No. 11/444,999, by
Cohen, and entitled "Microtools and Methods for Fabricating Such
Tools". Each of these applications is incorporated herein by
reference as if set forth in full herein.
Though the embodiments explicitly set forth herein have considered
multi-material layers to be formed one after another. In some
embodiments, it is possible to form structures on a layer-by-layer
basis but to deviate from a strict planar layer on planar layer
build up process in favor of a process that interlaces material
between the layers. Such alternative build processes are disclosed
in U.S. application Ser. No. 10/434,519, filed on May 7, 2003,
entitled Methods of and Apparatus for Electrochemically Fabricating
Structures Via Interlaced Layers or Via Selective Etching and
Filling of Voids. The techniques disclosed in this referenced
application may be combined with the techniques and alternatives
set forth explicitly herein to derive additional alternative
embodiments. In particular, the structural features are still
defined on a planar-layer-by-planar-layer basis but material
associated with some layers is formed along with material for other
layers such that interlacing of deposited material occurs. Such
interlacing may lead to reduced structural distortion during
formation or improved interlayer adhesion. This patent application
is herein incorporated by reference as if set forth in full.
The patent applications and patents set forth below are hereby
incorporated by reference herein as if set forth in full. The
teachings in these incorporated applications can be combined with
the teachings of the instant application in many ways: For example,
enhanced methods of producing structures may be derived from some
combinations of teachings, enhanced structures may be obtainable,
enhanced apparatus may be derived, and the like.
TABLE-US-00001 U.S. patent application Ser. No., Filing Date US App
Pub No, Pub Date Inventor, Title 09/493,496 - Cohen, "Method For
Electrochemical Fabrication" Jan. 28, 2000 10/677,556 - Cohen,
"Monolithic Structures Including Alignment Oct. 1, 2003 and/or
Retention Fixtures for Accepting Components" 10/830,262 - Cohen,
"Methods of Reducing Interlayer Apr. 21, 2004 Discontinuities in
Electrochemically Fabricated Three-Dimensional Structures"
10/697,597 - Lockard, "EFAB Methods and Apparatus Including Dec.
20, 2002 Spray Metal or Powder Coating Processes" 10/841,100 -
Cohen, "Electrochemical Fabrication Methods May 7, 2004 Including
Use of Surface Treatments to Reduce Overplating and/or
Planarization During Formation of Multi-layer Three-Dimensional
Structures" 10/387,958 - Cohen, "Electrochemical Fabrication Method
and Mar. 13, 2003 Application for Producing Three-Dimensional
2003-022168A - Structures Having Improved Surface Finish" Dec. 4,
2003 10/434,294 - Zhang, "Electrochemical Fabrication Methods With
May 7, 2003 Enhanced Post Deposition Processing" 2004-0065550A -
Apr. 8, 2004 10/434,315 - Bang, "Methods of and Apparatus for
Molding May 7, 2003 Structures Using Sacrificial Metal Patterns"
2003-0234179 A - Dec. 25, 2003 10/434,103 - Cohen,
"Electrochemically Fabricated Hermetically May 7, 2004 Sealed
Microstructures and Methods of and Apparatus 2004-0020782A - for
Producing Such Structures" Feb. 5, 2004 10/841,006 - Thompson,
"Electrochemically Fabricated Structures May 7, 2004 Having
Dielectric or Active Bases and Methods of and Apparatus for
Producing Such Structures" 10/841,347 - Cohen, "Multi-step Release
Method for May 7, 2004 Electrochemically Fabricated Structures"
60/534,183 - Cohen, "Method and Apparatus for Maintaining Dec. 31,
2003 Parallelism of Layers and/or Achieving Desired Thicknesses of
Layers During the Electrochemical Fabrication of Structures"
11/733,195 - Kumar, "Methods of Forming Three-Dimensional Apr. 9,
2007 Structures Having Reduced Stress and/or Curvature" 11/506,586
- Cohen, "Mesoscale and Microscale Device Aug. 8, 2006 Fabrication
Methods Using Split Structures and Alignment Elements" 10/949,744 -
Lockard, "Three-Dimensional Structures Having Sep. 24, 2004 Feature
Sizes Smaller Than a Minimum Feature Size and Methods for
Fabricating"
Though various portions of this specification have been provided
with headers, it is not intended that the headers be used to limit
the application of teachings found in one portion of the
specification from applying to other portions of the specification.
For example, it should be understood that alternatives acknowledged
in association with one embodiment, are intended to apply to all
embodiments to the extent that the features of the different
embodiments make such application functional and do not otherwise
contradict or remove all benefits of the adopted embodiment.
Various other embodiments of the present invention exist. Some of
these embodiments may be based on a combination of the teachings
herein with various teachings incorporated herein by reference.
In view of the teachings herein, many further embodiments,
alternatives in design and uses of the embodiments of the instant
invention will be apparent to those of skill in the art. As such,
it is not intended that the invention be limited to the particular
illustrative embodiments, alternatives, and uses described above
but instead that it be solely limited by the claims presented
hereafter.
* * * * *