U.S. patent number 8,351,160 [Application Number 13/106,594] was granted by the patent office on 2013-01-08 for magnetic head suspension utilizing laminate conductor connecting piezoelectric elements via first and second connecting openings in the laminate.
This patent grant is currently assigned to Suncall Corporation. Invention is credited to Yasuo Fujimoto.
United States Patent |
8,351,160 |
Fujimoto |
January 8, 2013 |
Magnetic head suspension utilizing laminate conductor connecting
piezoelectric elements via first and second connecting openings in
the laminate
Abstract
First and second piezoelectric element overlapped portions of an
insulating layer of a flexure part is formed with first and second
connecting openings, respectively. There are provided on an upper
surface of the insulating layer, first and second lower conductive
adhesive agents that electrically connect lower electrode layers of
first and second piezoelectric elements to a voltage supply wiring
through the first and second connecting openings, and a surrounding
insulative adhesive agent that is arranged so as to surround the
first and second lower conductive adhesive agents in a plan
view.
Inventors: |
Fujimoto; Yasuo (Kyoto-fu,
JP) |
Assignee: |
Suncall Corporation (Kyoto-Fu,
JP)
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Family
ID: |
45021947 |
Appl.
No.: |
13/106,594 |
Filed: |
May 12, 2011 |
Prior Publication Data
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Document
Identifier |
Publication Date |
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US 20110292550 A1 |
Dec 1, 2011 |
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Foreign Application Priority Data
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May 13, 2010 [JP] |
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2010-110806 |
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Current U.S.
Class: |
360/245.8;
310/363; 310/364; 310/365; 360/245.9; 360/294.4; 310/323.06 |
Current CPC
Class: |
G11B
5/4873 (20130101); G11B 5/486 (20130101) |
Current International
Class: |
G11B
5/55 (20060101); G11B 5/56 (20060101) |
Field of
Search: |
;360/245.8-246,264.2,294.4 ;310/323.06,363-366 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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2000-298812 |
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Oct 2000 |
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JP |
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2002-251854 |
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Sep 2002 |
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JP |
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2009-080915 |
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Apr 2009 |
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JP |
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2010-086649 |
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Apr 2010 |
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JP |
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Other References
The Notification of Reason(s) for Rejection for related Japanese
Appl. No. 2010-110806, Japanese Patent Office, mailed Apr. 27,
2012, 4 pgs. cited by other.
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Primary Examiner: Heinz; Allen
Attorney, Agent or Firm: Sterne, Kessler, Goldstein &
Fox P.L.L.C.
Claims
What is claimed is:
1. A magnetic head suspension comprising a load bending part that
generates a load for pressing a magnetic head slider toward a disk
surface, a load beam part that transmits the load to the magnetic
head slider, a supporting part that supports the load beam part via
the load bending part and is swung about a swing center directly or
indirectly by a main actuator, a flexure part that is supported by
the load beam part and the supporting part while supporting the
magnetic head slider, and paired right and left piezoelectric
elements that are attached to the supporting part so as to be
symmetrical with each other with respect to a suspension
longitudinal center line and have expansion and contraction
directions different from each other, in order to enable micro
motion of the magnetic head slider in a seek direction, wherein the
supporting part includes a proximal end section that is directly or
indirectly connected to the main actuator, a distal end section to
which the load bending part is connected, an open section that is
positioned between the proximal end section and the distal end
section in a suspension longitudinal direction, and paired right
and left connecting beams that are positioned outward of the open
section in a suspension width direction and connect the proximal
end section and the distal end section, wherein each of the paired
first and second piezoelectric elements has a piezoelectric main
body, and an upper electrode layer and a lower electrode layer that
face each other with the piezoelectric main body being interposed
between them, each of the first and second piezoelectric elements
having a distal portion and a proximal portion that are directly or
indirectly connected to the distal end section and the proximal end
section, respectively, in a state where it is at least partially
positioned within the open section in a plan view as viewed along a
direction orthogonal to the disk surface while the lower electrode
layer facing the disk surface, wherein the flexure part includes a
flexure metal plate fixed to lower surfaces of the load beam part
and the supporting part that face the disk surface, an insulating
layer laminated on a lower surface of the flexure metal plate that
faces the disk surface, and a conductor layer laminated on a lower
surface of the insulating layer that faces the disk surface,
wherein the insulating layer includes first and second
piezoelectric element overlapped portions that are positioned
within the open section and are overlapped with the first and
second piezoelectric elements, respectively, in a plan view as
viewed along the direction orthogonal to the disk surface, wherein
the conductor layer includes a signal wiring having a proximal end
capable of being electrically connected to an outside and a distal
end capable of being electrically connected to the magnetic head
slider, and a voltage supply wiring having a proximal end capable
of being electrically connected to an outside, wherein the first
and second piezoelectric element overlapped portions are formed
with first and second connecting openings, respectively, that
extend between the lower surfaces facing the disk surface and the
upper surfaces opposite from the disk surface, and wherein there
are provided, on the upper surface of the insulating layer, first
and second lower conductive adhesive agents that electrically
connect the lower electrode layers of the first and second
piezoelectric elements to the voltage supply wiring through the
first and second connecting openings, and a surrounding insulative
adhesive agent that is arranged so as to surround the first and
second lower conductive adhesive agents in a plan view.
2. A magnetic head suspension according to claim 1, wherein the
surrounding insulative adhesive agent includes first and second
surrounding insulative adhesive agents that surround the first and
second lower conductive adhesive agents in a plan view,
respectively, wherein the first surrounding insulative adhesive
agent includes a first surrounding distal-side insulative adhesive
agent and a first surrounding proximal-side insulative adhesive
agent that are disposed on a distal side and a proximal side from
the first connecting opening in the suspension longitudinal
direction, respectively, a first surrounding outer-side insulative
adhesive agent that is disposed on an outer side from the first
connecting opening in the suspension width direction and connects
the first surrounding distal-side insulative adhesive agent and the
first surrounding proximal-side insulative adhesive agent, and a
first surrounding inner-side insulative adhesive agent that is
disposed on an inner side from the first connecting opening in the
suspension width direction and connects the first surrounding
distal-side insulative adhesive agent and the first surrounding
proximal-side insulative adhesive agent, and wherein the second
surrounding insulative adhesive agent includes a second surrounding
distal-side insulative adhesive agent and a second surrounding
proximal-side insulative adhesive agent that are disposed on a
distal side and a proximal side from the second connecting opening
in the suspension longitudinal direction, respectively, a second
surrounding outer-side insulative adhesive agent that is disposed
on an outer side from the second connecting opening in the
suspension width direction and connects the second surrounding
distal-side insulative adhesive agent and the second surrounding
proximal-side insulative adhesive agent, and a second surrounding
inner-side insulative adhesive agent that is disposed on an inner
side from the second connecting opening in the suspension width
direction and connects the second surrounding distal-side
insulative adhesive agent and the second surrounding proximal-side
insulative adhesive agent.
3. A magnetic head suspension according to claim 2, wherein the
first surrounding insulative adhesive agent is disposed so as to be
overlapped with the first piezoelectric element in a plan view and
seals a gap between the first lower electrode layer and the
insulating layer in the direction orthogonal to the disk surface,
and wherein the second surrounding insulative adhesive agent is
disposed so as to be overlapped with the second piezoelectric
element in a plan view and seals a gap between the second lower
electrode layer and the insulating layer in the direction
orthogonal to the disk surface.
4. A magnetic head suspension according to claim 1, further
comprising first and second metal rings arranged on the upper
surface of the insulating layer so as to surround the first and
second connecting openings, respectively.
5. A magnetic head suspension according to claim 1, wherein the
surrounding insulative adhesive agent includes a surrounding
distal-side insulative adhesive agent and a surrounding
proximal-side insulative adhesive agent that are disposed on a
distal side and a proximal side from the first and second
connecting openings in the suspension longitudinal direction,
respectively, a surrounding first outer-side insulative adhesive
agent that is disposed on one side from the first and second
connecting openings in the suspension width direction and connects
the surrounding distal-side insulative adhesive agent and the
surrounding proximal-side insulative adhesive agent, and a
surrounding second outer-side insulative adhesive agent that is
disposed on the other side from the first and second connecting
openings in the suspension width direction and connects the
surrounding distal-side insulative adhesive agent and the
surrounding proximal-side insulative adhesive agent.
6. A magnetic head suspension according to claim 5, wherein the
surrounding distal-side insulative adhesive agent includes a
distal-side first width direction portion and a distal-side second
width direction portion that are overlapped with the first and
second piezoelectric elements in a plan view, respectively, and a
distal-side center portion that extends between the distal-side
first and second width direction portions, wherein the surrounding
proximal-side insulative adhesive agent includes a proximal-side
first width direction portion and a proximal-side second width
direction portion that are overlapped with the first and second
piezoelectric elements in a plan view, respectively, and a
proximal-side center portion that extends between the proximal-side
first and second width direction portions, wherein the surrounding
first outer-side insulative adhesive agent is overlapped with the
first piezoelectric element in a plan view, wherein the surrounding
second outer-side insulative adhesive agent is overlapped with the
second piezoelectric element in a plan view, wherein the
distal-side first width direction portion, the proximal-side first
width direction portion and the surrounding first outer-side
insulative adhesive agent close a gap between the first lower
electrode layer and the insulating layer with respect to the
direction orthogonal to the disk surface, and wherein the
distal-side second width direction portion, the proximal-side
second width direction portion and the surrounding second
outer-side insulative adhesive agent close a gap between the second
lower electrode layer and the insulating layer with respect to the
direction orthogonal to the disk surface.
7. A magnetic head suspension according to claim 6, further
comprising a sealing insulative adhesive agent with which first and
second space are filled, the first space being defined by the first
lower electrode layer, the insulating layer, the distal-side first
width direction portion, the proximal-side first width direction
portion and the surrounding first outer-side insulative adhesive
agent, the second space being defined by the second lower electrode
layer, the insulating layer, the distal-side second width direction
portion, the proximal-side second width direction portion and the
surrounding second outer-side insulative adhesive agent.
8. A magnetic head suspension according to claim 5, further
comprising a metal ring arranged on the upper surface of the
insulating layer so as to surround the first and second connecting
openings separately or integrally.
9. A magnetic head suspension according to claim 1, wherein the
distal end section is formed on the upper surface with a
distal-side cutout so as to be opened to the side opposite from the
disk surface and the proximal side in the suspension longitudinal
direction, wherein the proximal end section is formed on the upper
surface with a proximal-side cutout so as to be opened to the side
opposite from the disk surface and the distal side in the
suspension longitudinal direction, and wherein the first and second
piezoelectric elements are connected at the distal sides and the
proximal sides to the distal-side cutout and the proximal-side
cutout by fixing distal side-insulative adhesive agents,
respectively.
10. A magnetic head suspension according to claim 1, wherein the
flexure metal plate includes a load beam part-overlapped region
that is fixed to the lower surface of the load beam part while
being overlapped therewith, a supporting part-distal
side-overlapped region that is fixed to the lower surface of the
distal end section while being overlapped therewith, a load bending
part-corresponding part that is positioned between paired leaf
springs forming the load bending part in the suspension width
direction and connects the load beam part-overlapped region and the
supporting part-distal side-overlapped region, a supporting
part-proximal side-overlapped region that is fixed to the lower
surface of the proximal end section while being overlapped
therewith, a distal-side support plate forming region that extends
from the supporting part-distal side-overlapped region so as to be
positioned within the open section, and a proximal-side support
plate forming region that extends from the supporting part-proximal
side-overlapped region so as to be positioned within the open
section in a state of being away from the distal-side support plate
forming region in the suspension longitudinal direction, wherein
the distal-side support plate forming region includes a distal-side
center portion that extends from the supporting part-distal
side-overlapped region toward the proximal side in the suspension
longitudinal direction, and distal-side first and second width
direction portions that extend from the distal-side center portion
toward one side and the other side in the suspension width
direction, respectively, wherein the proximal-side support plate
forming region includes a proximal-side center portion that extends
from the supporting part-proximal side-overlapped region toward the
distal side in the suspension longitudinal direction, and
proximal-side first and second width direction portions that extend
from the proximal-side center portion toward one side and the other
side in the suspension width direction, respectively, wherein the
insulating layer includes a load beam part-corresponding region, a
load bending part-corresponding region, a supporting part-distal
side-corresponding region and a supporting part-proximal
side-corresponding region that are laminated on the lower surfaces
of the load beam part-overlapped region, the load bending
part-corresponding part, the supporting part-distal side-overlapped
region and the supporting part-proximal side-overlapped region of
the flexure metal plate, respectively, and further includes a
connecting region that is positioned within the open section so as
to connect the supporting part-distal side-corresponding region and
the supporting part-proximal side-corresponding region, wherein the
connecting region includes a distal-side support plate overlapped
portion and a proximal-side support plate overlapped portion that
are respectively laminated on the lower surfaces of the distal-side
support plate forming region and the proximal-side support plate
forming region, and the first and second piezoelectric element
overlapped portions that are positioned between the distal-side
support plate overlapped portion and the proximal-side support
plate overlapped portion in the suspension longitudinal direction,
wherein the first piezoelectric element has a distal side-end
surface and a proximal-side end surface that face a proximal
side-end surface of the distal end section and a distal side-end
surface of the proximal end section, respectively, with end surface
side-insulative adhesive agents being interposed between them, and
the lower surface of the first piezoelectric element that faces the
disk surface includes a distal side that is fixed to the
distal-side first width direction portion by a first fixing distal
side-insulative adhesive agent and a proximal side that is fixed to
the proximal-side first width direction portion by a first fixing
proximal side-insulative adhesive agent, wherein the second
piezoelectric element has a distal side-end surface and a
proximal-side end surface that face the proximal side-end surface
of the distal end section and the distal side-end surface of the
proximal end section, respectively, with the end surface
side-insulative adhesive agents being interposed between them, and
the lower surface of the second piezoelectric element that faces
the disk surface includes a distal side that is fixed to the
distal-side second width direction portion by a second fixing
distal side-insulative adhesive agent and a proximal side that is
fixed to the proximal-side second width direction portion by a
second fixing proximal side-insulative adhesive agent, wherein the
first and second fixing distal side-insulative adhesive agents
function as an insulative adhesive agent of the surrounding
insulative adhesive agent that are positioned on a distal side in
the suspension longitudinal direction from the first and second
connecting openings, and wherein the first and second fixing
proximal side-insulative adhesive agents function as an insulative
adhesive agent of the surrounding insulative adhesive agent that
are positioned on a proximal side in the suspension longitudinal
direction from the first and second connecting openings.
11. A magnetic head suspension according to claim 10, wherein there
is provided a gap between distal edges of the distal-side first and
second width direction portions and a proximal edge of the distal
end section, and wherein there is provided a gap between proximal
edges of the proximal-side first and second width direction
portions and a distal edge of the proximal end section.
12. A magnetic head suspension according to claim 10, wherein the
flexure metal plate includes a first distal-side extending piece, a
second distal-side extending piece, a first proximal-side extending
piece and a second proximal-side extending piece, the first
distal-side extending piece being disposed outward of the first
connecting opening in the suspension width direction and extending
from the distal-side support plate forming region toward the
proximal side in the suspension longitudinal direction so as to
overlap with the first piezoelectric element in a plan view, the
second distal-side extending piece being disposed outward of the
second connecting opening in the suspension width direction and
extending from the distal-side support plate forming region toward
the proximal side in the suspension longitudinal direction so as to
overlap with the second piezoelectric element in a plan view, the
first proximal-side extending piece being disposed at a
substantially same position as the first distal-side extending
piece with respect to the suspension width direction and extending
toward the distal side in the suspension longitudinal direction
from the proximal-side support plate forming region so as to
overlap with the first piezoelectric element in a plan view, the
second proximal-side extending piece being disposed at a
substantially same position as the second distal-side extending
piece with respect to the suspension width direction and extending
toward the distal side in the suspension longitudinal direction
from the proximal-side support plate forming region so as to
overlap with the second piezoelectric element in a plan view,
wherein the first distal-side extending piece and the first
proximal-side extending piece are separate from each other, and the
second distal-side extending piece and the second proximal-side
extending piece are separate from each other, and wherein an
insulative adhesive agent of the surrounding insulative adhesive
agent that is positioned outward of the first connecting opening in
the suspension width direction and extends in the suspension
longitudinal direction is provided on the upper surfaces of the
first distal-side extending piece and the first proximal-side
extending piece, and an insulative adhesive agent of the
surrounding insulative adhesive agent that is positioned outward of
the second connecting opening in the suspension width direction and
extends in the suspension longitudinal direction is provided on the
upper surfaces of the second distal-side extending piece and the
second proximal-side extending piece.
13. A magnetic head suspension according to claim 10, wherein the
flexure metal plate includes a first connecting piece and a second
connecting piece, the first connecting piece connecting the
distal-side support plate forming region and the proximal-side
support plate forming region in a state of being disposed outward
of the first connecting opening in the suspension width direction
and overlapped with the first piezoelectric element in a plan view,
the second connecting piece connecting the distal-side support
plate forming region and the proximal-side support plate forming
region in a state of being disposed outward of the second
connecting opening in the suspension width direction and overlapped
with the second piezoelectric element in a plan view, and wherein
the first and second connecting pieces are provided with elastic
portions capable of being elastically deformed in the suspension
longitudinal direction.
14. A magnetic head suspension according to claim 10, wherein the
supporting part-distal side-overlapped region and the distal-side
support plate forming region are formed with an opening that is
across the proximal edge of the distal end section, and the
supporting part-proximal side-overlapped region and the
proximal-side support plate forming region are formed with an
opening that is across the distal edge of the proximal end
section.
15. A magnetic head suspension comprising a load bending part that
generates a load for pressing a magnetic head slider toward a disk
surface, a load beam part that transmits the load to the magnetic
head slider, a supporting part that supports the load beam part via
the load bending part and is swung about a swing center directly or
indirectly by a main actuator, a flexure part that is supported by
the load beam part and the supporting part while supporting the
magnetic head slider, and paired right and left piezoelectric
elements that are attached to the supporting part so as to be
symmetrical with each other with respect to a suspension
longitudinal center line and have expansion and contraction
directions different from each other, in order to enable micro
motion of the magnetic head slider in a seek direction, wherein the
supporting part includes a proximal end section that is directly or
indirectly connected to the main actuator, a distal end section to
which the load bending part is connected, an open section that is
positioned between the proximal end section and the distal end
section in a suspension longitudinal direction, and paired right
and left connecting beams that are positioned outward of the open
section in a suspension width direction and connect the proximal
end section and the distal end section, wherein each of the paired
first and second piezoelectric elements has a piezoelectric main
body, and an upper electrode layer and a lower electrode layer that
face each other with the piezoelectric main body being interposed
between them, each of the first and second piezoelectric elements
having a distal portion and a proximal portion that are directly or
indirectly connected to the distal end section and the proximal end
section, respectively, in a state where it is at least partially
positioned within the open section in a plan view as viewed along a
direction orthogonal to the disk surface while the lower electrode
layer facing the disk surface, wherein the flexure part includes a
flexure metal plate fixed to lower surfaces of the load beam part
and the supporting part that face the disk surface, an insulating
layer laminated on a lower surface of the flexure metal plate that
faces the disk surface, and a conductor layer laminated on a lower
surface of the insulating layer that faces the disk surface,
wherein the insulating layer includes first and second
piezoelectric element overlapped portions that are positioned
within the open section and are overlapped with the first and
second piezoelectric elements, respectively, in a plan view as
viewed along the direction orthogonal to the disk surface, wherein
the conductor layer includes a signal wiring having a proximal end
capable of being electrically connected to an outside and a distal
end capable of being electrically connected to the magnetic head
slider, and a voltage supply wiring having a proximal end capable
of being electrically connected to an outside, wherein the first
and second piezoelectric element overlapped portions are formed
with first and second connecting openings, respectively, that
extend between the lower surfaces facing the disk surface and the
upper surfaces opposite from the disk surface, wherein the magnetic
head suspension further comprises a single metal ring arranged on
the upper surface of the insulating layer that is opposite from the
disk surface so as to surround the first and second connecting
openings in a plan view, wherein the lower electrode layers of the
first and second piezoelectric elements are electrically connected
to the supply voltage wiring through a lower conductive adhesive
agent provided within the metal ring on the upper surface of the
insulating layer, and wherein the magnetic head suspension further
comprises a surrounding insulative adhesive agent that is arranged
directly or indirectly on the upper surface of the insulating layer
so as to surround the metal ring in a plan view.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a magnetic head suspension for
supporting a magnetic head slider that reads and/or writes data
from and to a recording medium such as a hard disk drive.
2. Related Art
Increase in capacity of a magnetic disk device requires improvement
in accuracy for positioning a magnetic head slider on a target
track. In this regard, there has been proposed a magnetic head
suspension that enables coarse motion of a magnetic head slider in
a seek direction by a main actuator such as a voice coil motor as
well as micro motion of the magnetic head slider in the seek
direction by a piezoelectric element functioning as a sub
actuator.
For example, Japanese Unexamined Patent Application Publication No.
2009-080915 (hereinafter referred to as prior art document)
proposes a magnetic head suspension with the piezoelectric element
configured so that supply of a voltage to the piezoelectric element
is made with use of a conductor layer of a flexure part.
More specifically, the magnetic head suspension disclosed by the
prior art document includes a load bending part that generates a
load for pressing the magnetic head slider toward a disk surface, a
load beam part that transmits the load to the magnetic head slider,
a supporting part that supports the load beam part via the load
bending part and is swung about a swing center directly or
indirectly by a main actuator, a flexure part that is supported by
the load beam part and the supporting part while supporting the
magnetic head slider, and paired right and left piezoelectric
elements that are attached to the supporting part.
The supporting part is provided with a proximal end section that is
connected directly or indirectly to the main actuator, a distal end
section to which the load bending part is connected, an open
section that is positioned between the proximal end section and the
distal end section in a suspension longitudinal direction, and
paired right and left connecting beams that are positioned on both
sides of the open section in a suspension width direction and
connect the proximal end section and the distal end section.
The piezoelectric element includes a piezoelectric a piezoelectric
main body, and an upper electrode layer and a lower electrode layer
that face to each other with the piezoelectric main body being
interposed between them. The piezoelectric element has a distal end
and a proximal end fixed to the distal end section and the proximal
end section, respectively, by insulative adhesive agents, in a
state where the lower electrode layer faces the disk surface.
The flexure part includes a flexure metal plate fixed to
disk-facing surfaces of the load beam part and the supporting part
by welding or the like, an insulating layer laminated on a
disk-facing surface of the flexure metal plate, and the conductor
layer laminated on a disk-facing surface of the insulating
layer.
The conductor layer includes a signal wiring that is electrically
connected to the magnetic head slider, and a voltage supply wiring
for supplying a voltage to the piezoelectric elements.
The voltage supply wiring includes a laminated region that is
laminated on the disk-facing surface of the insulating layer and an
extending region that extends outward from the laminated region so
as to face the lower electrode layer of the piezoelectric element.
The extending region is electrically connected to the lower
electrode layer through a lower conductive adhesive agent.
The upper electrode layer of the piezoelectric element is
electrically connected through an upper conductive adhesive agent
to an upper surface (a surface positioned on an opposite side from
the disk surface) of the distal end section of the supporting part
to have a ground potential.
The conventional magnetic head suspension with the above explained
configuration is useful in that the supply of the voltage to the
piezoelectric elements can be made without any additional elements
being substantially required. However, since the lower conductive
adhesive agent is exposed outward, there is a problem that filler
particles such as Ag particles, which are included in the lower
conductive adhesive agent, are likely to fall onto the disk
surface. The filler particles, which have been fallen onto the disk
surface, may damage the disk surface and the magnetic head
slider.
SUMMARY OF THE INVENTION
The present invention has been achieved in view of the above
conventional art, and it is an object thereof to provide a magnetic
head suspension in which a lower electrode layer of each of
piezoelectric elements that is positioned on a side closer to a
disk surface is electrically connected through a lower conductive
adhesive agent to a voltage supply wiring provided at a flexure
part as a part of a conductor layer, the magnetic head suspension
capable of effectively preventing filler particles, which are
included in the lower conductive adhesive agent, from falling onto
the disk surface while having a simple structure.
In order to achieve the object, the present invention provides a
magnetic head suspension including a load bending part that
generates a load for pressing a magnetic head slider toward a disk
surface, a load beam part that transmits the load to the magnetic
head slider, a supporting part that supports the load beam part via
the load bending part and is swung about a swing center directly or
indirectly by a main actuator, a flexure part that is supported by
the load beam part and the supporting part while supporting the
magnetic head slider, and paired right and left piezoelectric
elements that are attached to the supporting part so as to be
symmetrical with each other with respect to a suspension
longitudinal center line and have expansion and contraction
directions different from each other, in order to enable micro
motion of the magnetic head slider in a seek direction, wherein the
supporting part includes a proximal end section that is directly or
indirectly connected to the main actuator, a distal end section to
which the load bending part is connected, an open section that is
positioned between the proximal end section and the distal end
section in a suspension longitudinal direction, and paired right
and left connecting beams that are positioned outward of the open
section in a suspension width direction and connect the proximal
end section and the distal end section, wherein each of the paired
first and second piezoelectric elements has a piezoelectric main
body, and an upper electrode layer and a lower electrode layer that
face each other with the piezoelectric main body being interposed
between them, each of the first and second piezoelectric elements
having a distal portion and a proximal portion that are directly or
indirectly connected to the distal end section and the proximal end
section, respectively, in a state where it is at least partially
positioned within the open section in a plan view as viewed along a
direction orthogonal to the disk surface while the lower electrode
layer facing the disk surface, wherein the flexure part includes a
flexure metal plate fixed to lower surfaces of the load beam part
and the supporting part that face the disk surface, an insulating
layer laminated on a lower surface of the flexure metal plate that
faces the disk surface, and a conductor layer laminated on a lower
surface of the insulating layer that faces the disk surface,
wherein the insulating layer includes first and second
piezoelectric element overlapped portions that are positioned
within the open section and are overlapped with the first and
second piezoelectric elements, respectively, in a plan view as
viewed along the direction orthogonal to the disk surface, wherein
the conductor layer includes a signal wiring having a proximal end
capable of being electrically connected to an outside and a distal
end capable of being electrically connected to the magnetic head
slider, and a voltage supply wiring having a proximal end capable
of being electrically connected to an outside, wherein the first
and second piezoelectric element overlapped portions are formed
with first and second connecting openings, respectively, that
extend between the lower surfaces facing the disk surface and the
upper surfaces opposite from the disk surface, and wherein there
are provided, on the upper surface of the insulating layer, first
and second lower conductive adhesive agents that electrically
connect the lower electrode layers of the first and second
piezoelectric elements to the voltage supply wiring through the
first and second connecting openings, and a surrounding insulative
adhesive agent that is arranged so as to surround the first and
second lower conductive adhesive agents in a plan view.
The magnetic head suspension according to the present invention
makes it possible to simplify a structure for supplying voltage to
the first and second piezoelectric elements, since the lower
electrode layers of the first and second piezoelectric elements are
electrically connected to the voltage supply wiring that is
integrally provided in the flexure part through the lower
conductive adhesive agents arranged on the upper surface of the
insulating layer of the flexure part.
The magnetic head suspension makes it also possible to effectively
prevent filler particles, which are included in the lower
conductive adhesive agents, from falling onto the disk surface,
since the surrounding insulative adhesive agent is arranged on the
upper surface of the insulating layer so as to surround the lower
conductive adhesive agents in a plan view.
In one embodiment, the surrounding insulative adhesive agent
includes first and second surrounding insulative adhesive agents
that surround the first and second lower conductive adhesive agents
in a plan view, respectively.
The first surrounding insulative adhesive agent includes a first
surrounding distal-side insulative adhesive agent and a first
surrounding proximal-side insulative adhesive agent that are
disposed on a distal side and a proximal side from the first
connecting opening in the suspension longitudinal direction,
respectively, a first surrounding outer-side insulative adhesive
agent that is disposed on an outer side from the first connecting
opening in the suspension width direction and connects the first
surrounding distal-side insulative adhesive agent and the first
surrounding proximal-side insulative adhesive agent, and a first
surrounding inner-side insulative adhesive agent that is disposed
on an inner side from the first connecting opening in the
suspension width direction and connects the first surrounding
distal-side insulative adhesive agent and the first surrounding
proximal-side insulative adhesive agent.
The second surrounding insulative adhesive agent includes a second
surrounding distal-side insulative adhesive agent and a second
surrounding proximal-side insulative adhesive agent that are
disposed on a distal side and a proximal side from the second
connecting opening in the suspension longitudinal direction,
respectively, a second surrounding outer-side insulative adhesive
agent that is disposed on an outer side from the second connecting
opening in the suspension width direction and connects the second
surrounding distal-side insulative adhesive agent and the second
surrounding proximal-side insulative adhesive agent, and a second
surrounding inner-side insulative adhesive agent that is disposed
on an inner side from the second connecting opening in the
suspension width direction and connects the second surrounding
distal-side insulative adhesive agent and the second surrounding
proximal-side insulative adhesive agent.
Preferably, the first surrounding insulative adhesive agent is
disposed so as to be overlapped with the first piezoelectric
element in a plan view and seals a gap between the first lower
electrode layer and the insulating layer in the direction
orthogonal to the disk surface. The second surrounding insulative
adhesive agent is disposed so as to be overlapped with the second
piezoelectric element in a plan view and seals a gap between the
second lower electrode layer and the insulating layer in the
direction orthogonal to the disk surface.
Preferably, the magnetic head suspension according to the present
invention further includes first and second metal rings arranged on
the upper surface of the insulating layer so as to surround the
first and second connecting openings, respectively.
In another embodiment, the surrounding insulative adhesive agent
includes a surrounding distal-side insulative adhesive agent and a
surrounding proximal-side insulative adhesive agent that are
disposed on a distal side and a proximal side from the first and
second connecting openings in the suspension longitudinal
direction, respectively, a surrounding first outer-side insulative
adhesive agent that is disposed on one side from the first and
second connecting openings in the suspension width direction and
connects the surrounding distal-side insulative adhesive agent and
the surrounding proximal-side insulative adhesive agent, and a
surrounding second outer-side insulative adhesive agent that is
disposed on the other side from the first and second connecting
openings in the suspension width direction and connects the
surrounding distal-side insulative adhesive agent and the
surrounding proximal-side insulative adhesive agent.
Preferably, the surrounding distal-side insulative adhesive agent
may include a distal-side first width direction portion and a
distal-side second width direction portion that are overlapped with
the first and second piezoelectric elements in a plan view,
respectively, and a distal-side center portion that extends between
the distal-side first and second width direction portions. The
surrounding proximal-side insulative adhesive agent may include a
proximal-side first width direction portion and a proximal-side
second width direction portion that are overlapped with the first
and second piezoelectric elements in a plan view, respectively, and
a proximal-side center portion that extends between the
proximal-side first and second width direction portions.
The surrounding first outer-side insulative adhesive agent is
arranged so as to overlap with the first piezoelectric element in a
plan view, and the surrounding second outer-side insulative
adhesive agent is arranged so as to overlap with the second
piezoelectric element in a plan view.
The distal-side first width direction portion, the proximal-side
first width direction portion and the surrounding first outer-side
insulative adhesive agent are configured so as to close a gap
between the first lower electrode layer and the insulating layer
with respect to the direction orthogonal to the disk surface. The
distal-side second width direction portion, the proximal-side
second width direction portion and the surrounding second
outer-side insulative adhesive agent are configured so as to close
a gap between the second lower electrode layer and the insulating
layer with respect to the direction orthogonal to the disk
surface.
In a more preferable configuration, the magnetic head suspension
according to the present invention further includes a sealing
insulative adhesive agent with which first and second space are
filled, the first space being defined by the first lower electrode
layer, the insulating layer, the distal-side first width direction
portion, the proximal-side first width direction portion and the
surrounding first outer-side insulative adhesive agent, the second
space being defined by the second lower electrode layer, the
insulating layer, the distal-side second width direction portion,
the proximal-side second width direction portion and the
surrounding second outer-side insulative adhesive agent.
The magnetic head suspension preferably further includes a metal
ring arranged on the upper surface of the insulating layer so as to
surround the first and second connecting openings separately or
integrally.
The present invention also provides a magnetic head suspension
including a load bending part that generates a load for pressing a
magnetic head slider toward a disk surface, a load beam part that
transmits the load to the magnetic head slider, a supporting part
that supports the load beam part via the load bending part and is
swung about a swing center directly or indirectly by a main
actuator, a flexure part that is supported by the load beam part
and the supporting part while supporting the magnetic head slider,
and paired right and left piezoelectric elements that are attached
to the supporting part so as to be symmetrical with each other with
respect to a suspension longitudinal center line and have expansion
and contraction directions different from each other, in order to
enable micro motion of the magnetic head slider in a seek
direction, wherein the supporting part includes a proximal end
section that is directly or indirectly connected to the main
actuator, a distal end section to which the load bending part is
connected, an open section that is positioned between the proximal
end section and the distal end section in a suspension longitudinal
direction, and paired right and left connecting beams that are
positioned outward of the open section in a suspension width
direction and connect the proximal end section and the distal end
section, wherein each of the paired first and second piezoelectric
elements has a piezoelectric main body, and an upper electrode
layer and a lower electrode layer that face each other with the
piezoelectric main body being interposed between them, each of the
first and second piezoelectric elements having a distal portion and
a proximal portion that are directly or indirectly connected to the
distal end section and the proximal end section, respectively, in a
state where it is at least partially positioned within the open
section in a plan view as viewed along a direction orthogonal to
the disk surface while the lower electrode layer facing the disk
surface, wherein the flexure part includes a flexure metal plate
fixed to lower surfaces of the load beam part and the supporting
part that face the disk surface, an insulating layer laminated on a
lower surface of the flexure metal plate that faces the disk
surface, and a conductor layer laminated on a lower surface of the
insulating layer that faces the disk surface, wherein the
insulating layer includes first and second piezoelectric element
overlapped portions that are positioned within the open section and
are overlapped with the first and second piezoelectric elements,
respectively, in a plan view as viewed along the direction
orthogonal to the disk surface, wherein the conductor layer
includes a signal wiring having a proximal end capable of being
electrically connected to an outside and a distal end capable of
being electrically connected to the magnetic head slider, and a
voltage supply wiring having a proximal end capable of being
electrically connected to an outside, wherein the first and second
piezoelectric element overlapped portions are formed with first and
second connecting openings, respectively, that extend between the
lower surfaces facing the disk surface and the upper surfaces
opposite from the disk surface, wherein the magnetic head
suspension further includes a single metal ring arranged on the
upper surface of the insulating layer that is opposite from the
disk surface so as to surround the first and second connecting
openings in a plan view, wherein the lower electrode layers of the
first and second piezoelectric elements are electrically connected
to the supply voltage wiring through a lower conductive adhesive
agent provided within the metal ring on the upper surface of the
insulating layer, and wherein the magnetic head suspension further
comprises a surrounding insulative adhesive agent that is arranged
directly or indirectly on the upper surface of the insulating layer
so as to surround the metal ring in a plan view.
In any one of the above mentioned various configurations, the
flexure metal plate may include a load beam part-overlapped region
that is fixed to the lower surface of the load bema part while
being overlapped therewith, a supporting part-distal
side-overlapped region that is fixed to the lower surface of the
distal end section while being overlapped therewith, a load bending
part-corresponding part that is positioned between paired leaf
springs forming the load bending part in the suspension width
direction and connects the load beam part-overlapped region and the
supporting part-distal side-overlapped region, a supporting
part-proximal side-overlapped region that is fixed to the lower
surface of the proximal end section while being overlapped
therewith, a distal-side support plate forming region that extends
from the supporting part-distal side-overlapped region so as to be
positioned within the open section, and a proximal-side support
plate forming region that extends from the supporting part-proximal
side-overlapped region so as to be positioned within the open
section in a state of being away from the distal-side support plate
forming region in the suspension longitudinal direction.
The distal-side support plate forming region includes a distal-side
center portion that extends from the supporting part-distal
side-overlapped region toward the proximal side in the suspension
longitudinal direction, and distal-side first and second width
direction portions that extend from the distal-side center portion
toward one side and the other side in the suspension width
direction, respectively.
The proximal-side support plate forming region includes a
proximal-side center portion that extends from the supporting
part-proximal side-overlapped region toward the distal side in the
suspension longitudinal direction, and proximal-side first and
second width direction portions that extend from the proximal-side
center portion toward one side and the other side in the suspension
width direction, respectively.
The insulating layer includes a load beam part-corresponding
region, a load bending part-corresponding region, a supporting
part-distal side-corresponding region and a supporting
part-proximal side-corresponding region that are laminated on the
lower surfaces of the load beam part-overlapped region, the load
bending part-corresponding part, the supporting part-distal
side-overlapped region and the supporting part-proximal
side-overlapped region of the flexure metal plate, respectively,
and further includes a connecting region that is positioned within
the open section so as to connect the supporting part-distal
side-corresponding region and the supporting part-proximal
side-corresponding region.
The connecting region includes a distal-side support plate
overlapped portion and a proximal-side support plate overlapped
portion that are respectively laminated on the lower surfaces of
the distal-side support plate forming region and the proximal-side
support plate forming region, and the first and second
piezoelectric element overlapped portions that are positioned
between the distal-side support plate overlapped portion and the
proximal-side support plate overlapped portion in the suspension
longitudinal direction.
The first piezoelectric element has a distal side-end surface and a
proximal-side end surface that face a proximal side-end surface of
the distal end section and a distal side-end surface of the
proximal end section, respectively, with end surface
side-insulative adhesive agents being interposed between them, and
the lower surface of the first piezoelectric element that faces the
disk surface includes a distal side that is fixed to the
distal-side first width direction portion by a first fixing distal
side-insulative adhesive agent and a proximal side that is fixed to
the proximal-side first width direction portion by a first fixing
proximal side-insulative adhesive agent.
The second piezoelectric element has a distal side-end surface and
a proximal-side end surface that face the proximal side-end surface
of the distal end section and the distal side-end surface of the
proximal end section, respectively, with the end surface
side-insulative adhesive agents being interposed between them, and
the lower surface of the second piezoelectric element that faces
the disk surface includes a distal side that is fixed to the
distal-side second width direction portion by a second fixing
distal side-insulative adhesive agent and a proximal side that is
fixed to the proximal-side second width direction portion by a
second fixing proximal side-insulative adhesive agent.
The first and second fixing distal side-insulative adhesive agents
function as an insulative adhesive agent of the surrounding
insulative adhesive agent that are positioned on a distal side in
the suspension longitudinal direction from the first and second
connecting openings.
The first and second fixing proximal side-insulative adhesive
agents function as an insulative adhesive agent of the surrounding
insulative adhesive agent that are positioned on a proximal side in
the suspension longitudinal direction from the first and second
connecting openings.
Preferably, the distal-side support plate forming region may be
arranged so that there is provided a gap between distal edges of
the distal-side first and second width direction portions and a
proximal edge of the distal end section, and the proximal-side
support plate forming region may be arranged so that there is
provided a gap between proximal edges of the proximal-side first
and second width direction portions and a distal edge of the
proximal end section.
Preferably, the flexure metal plate may include a first distal-side
extending piece, a second distal-side extending piece, a first
proximal-side extending piece and a second proximal-side extending
piece, the first distal-side extending piece being disposed outward
of the first connecting opening in the suspension width direction
and extending from the distal-side support plate forming region
toward the proximal side in the suspension longitudinal direction
so as to overlap with the first piezoelectric element in a plan
view, the second distal-side extending piece being disposed outward
of the second connecting opening in the suspension width direction
and extending from the distal-side support plate forming region
toward the proximal side in the suspension longitudinal direction
so as to overlap with the second piezoelectric element in a plan
view, the first proximal-side extending piece being disposed at a
substantially same position as the first distal-side extending
piece with respect to the suspension width direction and extending
toward the distal side in the suspension longitudinal direction
from the proximal-side support plate forming region so as to
overlap with the first piezoelectric element in a plan view, the
second proximal-side extending piece being disposed at a
substantially same position as the second distal-side extending
piece with respect to the suspension width direction and extending
toward the distal side in the suspension longitudinal direction
from the proximal-side support plate forming region so as to
overlap with the second piezoelectric element in a plan view.
The first distal-side extending piece and the first proximal-side
extending piece are separate from each other, and the second
distal-side extending piece and the second proximal-side extending
piece are separate from each other.
An insulative adhesive agent of the surrounding insulative adhesive
agent that is positioned outward of the first connecting opening in
the suspension width direction and extends in the suspension
longitudinal direction is provided on the upper surfaces of the
first distal-side extending piece and the first proximal-side
extending piece, and an insulative adhesive agent of the
surrounding insulative adhesive agent that is positioned outward of
the second connecting opening in the suspension width direction and
extends in the suspension longitudinal direction is provided on the
upper surfaces of the second distal-side extending piece and the
second proximal-side extending piece.
Preferably, the flexure metal plate may include a first connecting
piece and a second connecting piece, the first connecting piece
connecting the distal-side support plate forming region and the
proximal-side support plate forming region in a state of being
disposed outward of the first connecting opening in the suspension
width direction and overlapped with the first piezoelectric element
in a plan view, the second connecting piece connecting the
distal-side support plate forming region and the proximal-side
support plate forming region in a state of being disposed outward
of the second connecting opening in the suspension width direction
and overlapped with the second piezoelectric element in a plan
view.
The first and second connecting pieces are provided with elastic
portions capable of being elastically deformed in the suspension
longitudinal direction.
Preferably, the supporting part-distal side-overlapped region and
the distal-side support plate forming region are formed with an
opening that is across the proximal edge of the distal end section,
and the supporting part-proximal side-overlapped region and the
proximal-side support plate forming region are formed with an
opening that is across the distal edge of the proximal end
section.
In an alternative configuration to the configuration in which the
first and second piezoelectric elements are supported by use of the
flexure metal plate, it is possible that the distal end section is
formed on the upper surface with a distal-side cutout (or notch) so
as to be opened to the side opposite from the disk surface and the
proximal side in the suspension longitudinal direction, the
proximal end section is formed on the upper surface with a
proximal-side cutout (or notch) so as to be opened to the side
opposite from the disk surface and the distal side in the
suspension longitudinal direction, and the first and second
piezoelectric elements are connected at the distal sides and the
proximal sides to the distal-side cutout and the proximal-side
cutout by fixing distal side-insulative adhesive agents,
respectively.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1A is a top view of a magnetic head suspension according to a
first embodiment of the present invention.
FIG. 1B is a bottom view of the magnetic head suspension according
to the first embodiment.
FIG. 2 is a cross sectional view taken along line II-II in FIG.
1A.
FIG. 3 is a cross sectional view taken along line in FIG. 1A.
FIG. 4 is a top view of the magnetic head suspension according to
the first embodiment in a state where the first and second
piezoelectric elements have been removed.
FIG. 5 is a top view of a flexure part of the magnetic head
suspension according to the first embodiment.
FIG. 6 is a bottom view of the flexure part shown in FIG. 5.
FIG. 7 is an enlarged view of VII portion in FIG. 1B.
FIG. 8 is a top view of a magnetic head suspension according to a
second embodiment of the present invention, and shows a state where
the first and second piezoelectric elements have been removed.
FIG. 9 is a cross sectional view taken along line IX-IX in FIG.
8.
FIG. 10 is a cross sectional view taken along line X-X in FIG.
8.
FIG. 11 is a top view of a magnetic head suspension according to a
modified example of the second embodiment.
FIG. 12 is a top view of a flexure part of a magnetic head
suspension according to a third embodiment of the present
invention.
FIG. 13 is an enlarged view of XIII portion in FIG. 12.
FIG. 14 is a top view of a flexure part of a magnetic head
suspension according to a fourth embodiment of the present
invention.
FIG. 15A is a top view of a magnetic head suspension according to a
fifth embodiment of the present invention.
FIG. 15B is a bottom view of the magnetic head suspension according
to the fifth embodiment.
FIG. 16 is a cross sectional view taken along line XVI-XVI in FIG.
15A.
FIG. 17 is a cross sectional view taken along line XVII-XVII in
FIG. 15A.
FIG. 18 is a top view of the magnetic head suspension according to
the fifth embodiment in a state where the first and second
piezoelectric elements have been removed.
FIG. 19 is a top view of a flexure part of the magnetic head
suspension according to the fifth embodiment.
FIG. 20 is a bottom view of the flexure part shown in FIG. 19.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
First Embodiment
Hereinafter, one preferred embodiment of a magnetic head suspension
according to the present invention will be described, with
reference to the attached drawings.
FIGS. 1A and 1B are a top view (a plan view as viewed from a side
opposite from a disk surface), and a bottom view (a bottom plan
view as viewed from a side close to the disk surface) of a magnetic
head suspension 1A according to the present embodiment,
respectively. FIG. 1B indicates welding points (more specifically,
welding points by laser beam spot welding) with using small
circles.
As shown in FIGS. 1A and 1B, the magnetic head suspension 1A
includes a load bending part 20 that generates a load for pressing
a magnetic head slider 50 toward a disk surface, a load beam part
30 that transmits the load to the magnetic head slider 50, a
supporting part 10 that supports the load beam part 30 via the load
bending part 20 and is swung about a swing center directly or
indirectly by a main actuator, a flexure part 40 that is supported
by the load beam part 30 and the supporting part 10 while
supporting the magnetic head slider 50, and paired first and second
piezoelectric elements 60(1), 60(2) that are attached to the
supporting part 10 on right and left sides so as to be symmetrical
with each other with a suspension longitudinal center line CL as a
reference and have expansion and contraction directions different
from each other, in order to enable micro motion of the magnetic
head slider 50 in a seek direction.
The supporting part 10 is a member for supporting the load beam
part 30 through the load bending part 20 while being directly or
indirectly connected to the main actuator such as a voice coil
motor, and is therefore made to have relatively high rigidity.
In the present embodiment, the supporting part 10 is formed as a
base plate including a boss portion 15 to which a distal end of a
carriage arm (not shown) is joined by a swage processing, the
carriage arm being connected to the main actuator.
The supporting part 10 may be preferably made from, for example, a
stainless plate having a thickness of 0.1 mm to 0.8 mm.
It is of course possible to adopt as the supporting part 10 an arm
having a proximal end that is connected to the swing center of the
main actuator.
The supporting part 10 includes a proximal end section 11 that is
directly or indirectly connected to the main actuator, a distal end
section 12 to which the load bending part 20 is connected, an open
section 13 that is positioned between the proximal end section 11
and the distal end section 12 in a suspension longitudinal
direction, and paired right and left connecting beams 14 that are
positioned on both sides of the open section 13 in a suspension
width direction and connect the proximal end section 11 and the
distal end section 12.
As described above, the load beam part 30 is a member for
transmitting the load generated by the load bending part 20 to the
magnetic head slider 50, and therefore is required to have a
predetermined rigidity.
As shown in FIGS. 1A and 1B, in the present embodiment, the load
beam part 30 has a plate-like main body portion 31 and flange
portions 32 that are formed by being bent in a direction away from
the disk surface at both sides of the main body portion 31 in the
suspension width direction, and secures the rigidity thanks to the
flange portions 32.
The load beam part 30 may be made from, for example, a stainless
plate having a thickness of 0.02 mm to 0.1 mm.
Specifically, the load beam part 30 is provided, at its distal end
section, with a protrusion 33 that is so-called dimple.
The protrusion 33 is protruded by, for example, about 0.05 mm to
0.1 mm, in a direction toward the disk surface. The protrusion 33
is brought into contact with an upper surface (a surface opposite
from the disk surface) of a head-mounting region 418 of the flexure
part 40, so that the load is transmitted to the head-mounting
region 418 of the flexure part 40 through the protrusion 33.
In the present embodiment, the load beam part 30 further integrally
includes a lift tab 34 that extends from a distal end of the main
body portion 31 toward a distal end side in the suspension
longitudinal direction. The lift tab 34 is a member that engages
with a lamp provided in a magnetic disk device so as to cause the
magnetic head suspension 50 to be away from the disk surface in z
direction (a direction perpendicular to the disk surface) at the
time when the magnetic head suspension 1A is swung by the main
actuator so that the magnetic head slider 50 is positioned outward
of the disk surface in a radial direction.
The load bending part 20 has a proximal end connected to the
supporting part 10 and a distal end connected to the load beam part
30, and generates the load for pressing the magnetic head
suspension 50 toward the disk surface in accordance with its
elastic deformation.
As shown in FIGS. 1A and 1B, in the present embodiment, the load
bending part 20 includes paired right and left leaf springs 21 that
have plate surfaces facing the disk surface and are disposed away
from each other with the suspension longitudinal center line CL
being sandwiched between them.
Preferably, the paired leaf springs 21 are elastically bended in
such a direction as to cause the magnetic head suspension 50 to be
come close to the disk surface before the magnetic head suspension
1A is mounted to the magnetic disk device, and is mounted to the
magnetic disk device in a state where the paired leaf springs are
elastically bended back so as to generate the pressing load.
The load bending part 20 is made from a stainless steel plate of
0.02 mm to 0.1 mm thick, for example.
In the present embodiment, as shown in FIGS. 1A and to 1B, the load
bending part 20 is integrally formed with the load beam part
30.
More specifically, the magnetic head suspension 1A according to the
present embodiment includes a load beam part/load bending part
component that is cut out from a metal substrate so as to
integrally form the load beam part 30 and the load bending part 20.
The load beam part/load bending part component is fixed by welding
or the like to the supporting part 10 in a state where an upper
surface, which is positioned on a side opposite from the disk
surface, of a proximal side of the load beam part/load bending part
component is brought into contact with a lower surface, which faces
the disk surface, of the distal end section 12 of the supporting
part 10.
FIGS. 2 and 3 are cross sectional views taken along lines II-II and
III-III in FIG. 1A, respectively.
FIG. 4 is a top view of the magnetic head suspension 1A in a state
where the first and second piezoelectric elements 60(1), 60(2) have
been removed. It is noted that, for the purpose of easier
understanding, the first and second piezoelectric elements 60(1),
60(2) are shown with chain double-dashed line in FIG. 4.
As shown in FIGS. 2 and 3, each of the first and second
piezoelectric elements 60(1), 60(2) has a piezoelectric main body
61 made of PZT (lead zirconate titanate), and an upper electrode
layer 62U and a lower electrode layer 62L that face to each other
with the piezoelectric main body 61 being interposed between
them.
Each of the first and second piezoelectric elements 60(1), 60(2)
has a distal portion and a proximal portion that are directly or
indirectly connected to the distal end section 12 and the proximal
end section 11, respectively, so that it is at least partially
positioned within the open section 13 in a plan view as viewed
along a direction orthogonal to the disk surface in a state where
the lower electrode layer 62L faces the disk surface.
The piezoelectric main body is 0.05 mm to 0.3 mm thick, for
example, and the electrode layers 62U, 62L are each made of Ag or
Au so as to have a thickness from 0.05 .mu.m to several .mu.m.
In the present embodiment, each of the first and second
piezoelectric elements 60(1), 60(2) is connected to the supporting
section 10 with use of a distal-side support plate forming region
414 and a proximal-side support plate forming region 415, which are
mentioned below, of the flexure part 40 so that at least a part of
its distal side-end surface faces a proximal side-end surface of
the distal end section 12 and at least a part of its proximal-side
end surface faces a distal side-end surface of the proximal end
section 11.
A supporting structure for the first and second piezoelectric
elements 60(1), 60(2) is explained later.
The flexure part 40 is fixed by welding or the like to the load
beam part 30 and the supporting part 10 while supporting the
magnetic head slider 50.
In the present embodiment, the flexure part 40 integrally includes
a signal wiring 430 for sending and receiving signal to and from
the magnetic head slider 50, and a voltage supply wiring 440 for
supplying voltage to the piezoelectric elements 60(1), 60(2).
FIGS. 5 and 6 are a top view and a bottom view of the flexure part
40, respectively.
As shown in FIGS. 1B, 5 and 6, the flexure part 40 includes a
flexure metal plate 410 fixed by welding or the like to lower
surfaces of the load beam part 30 and the supporting part 10 that
face the disk surface, an insulating layer 420 laminated on a lower
surface of the flexure metal plate 410 that faces the disk surface,
and a conductor layer having the signal wiring 430 and the voltage
supply wiring 440 that are laminated on a lower surface of the
insulating layer 420 that faces the disk surface.
Preferably, the flexure part 40 may include a cover layer (not
shown) enclosing the conductor layer.
As shown in FIGS. 1B, 5 and 6, in the present embodiment, the
flexure metal plate 410 includes a load beam part-overlapped region
411, a supporting part-distal side-overlapped region 413, a load
bending part-corresponding part 412 and a supporting part-proximal
side-overlapped region 416. The load beam part-overlapped region
411 is fixed by welding or the like to the lower surface of the
load bema part 30 while being overlapped therewith. The supporting
part-distal side-overlapped region 413 is fixed by welding or the
like to the lower surface of the distal end section 12 while being
overlapped therewith between the paired leaf springs 21 in the
suspension width direction. The load bending part-corresponding
part 412 is positioned between the paired leaf springs 21 in the
suspension width direction and connects the load beam
part-overlapped region 411 and the supporting part-distal
side-overlapped, region 413 in the suspension longitudinal
direction. The supporting part-proximal side-overlapped region 416
is fixed by welding to the lower surface of the proximal end
section 11 while being overlapped therewith.
The flexure metal plate 410 further includes paired supporting
pieces 417 that extends toward the distal side from both sides of
the load beam part-overlapped region 411 in the suspension width
direction, and the head-mounting region 418 supported by the
supporting pieces 417.
The head-mounting region 418 supports the magnetic head slider 50
at its lower surface that faces the disk surface, as shown in FIG.
1B.
As described above, the protrusion 33 is brought into contact with
the upper surface of the head-mounting region 418, so that the
head-mounting region 418 could sway flexibly in a roll direction
and in a pitch direction, with the protrusion 33 functioning as a
fulcrum.
The flexure metal plate 410 has rigidity lower than that of a
member (the load beam substrate in the present embodiment) forming
the load beam part 30, so that the head-mounting region 418 could
sway in the roll direction and in the pitch direction.
The flexure metal plate 410 may be made from, for example, a
stainless plate having a thickness of 0.01 mm to 0.025 mm.
As shown in FIGS. 5 and 6, the flexure metal plate 410 is divided
into a distal side section 410a and a proximal side section 410b
that are spaced away from each other in the suspension longitudinal
direction, the distal side section 410a including the head-mounting
region 418, the paired supporting pieces 417, the load beam
part-overlapped region 411, the load bending part-corresponding
part 412 and the supporting part-distal side-overlapped region 413,
and a proximal side section 410b including the supporting
part-proximal side-overlapped region 416. The distal side section
410a and the proximal side section 410b are connected to each other
through the insulating layer 420.
The insulating layer 420 includes a load beam part-corresponding
region 421, a load bending part-corresponding 422, a supporting
part-distal side-corresponding region 423 and a supporting
part-proximal side-corresponding region 426 that are laminated on
the lower surfaces, which face the disk surface, of the load beam
part-overlapped region 411, the load bending part-corresponding
part 412, the supporting part-distal side-overlapped region 413 and
the supporting part-proximal side-overlapped region 416 of the
flexure metal plate 410, respectively. The insulating layer 420
further includes a connecting region 429 positioned within the open
section 13 so as to connect the supporting part-distal
side-corresponding region 423 and the supporting part-proximal
side-corresponding region 426.
In the preset embodiment, as described above, the first and second
piezoelectric elements 60(1), 60(2) are supported by the supporting
part 10 with use of the distal-side support plate forming region
414 and the proximal-side support plate forming region 415.
More specifically, the flexure metal plate 410 further includes the
distal-side support plate forming region 414 which extends from the
supporting part-distal side-overlapped region 413 toward the
proximal side in the suspension longitudinal direction so as to be
positioned within the open section 13 and on which distal sides of
the lower surfaces of the first and second piezoelectric elements
60(1), 60(2), and the proximal-side support plate forming region
415 which extends from the supporting part-proximal side-overlapped
region 416 toward the distal side in the suspension longitudinal
direction so as to be positioned within the open section 13 in a
state of being away from the distal-side support plate forming
region 414 in the suspension longitudinal direction and on which
proximal sides of the lower surfaces of the first and second
piezoelectric elements 60(1), 60(2).
The distal-side support plate forming region 414 and the
proximal-side support plate forming region 415 form the distal side
section 410a and the proximal side section 410b, respectively.
The connecting region 429 includes a distal-side support plate
overlapped portion 424 and a proximal-side support plate overlapped
portion 425 that are respectively laminated on the lower surfaces,
which face the disk surface, of the distal-side support plate
forming region 414 and the proximal-side support plate forming
region 415, and an extending portion 427 that connects the
distal-side support plate overlapped portion 424 and the
proximal-side support plate overlapped portion 425.
The extending portion 427 includes first and second piezoelectric
element overlapped portions 427(1), 427(2) that are overlapped with
the first and second piezoelectric elements 60(1), 60(2),
respectively, in a plan view as viewed along the direction
orthogonal to the disk surface.
As shown in FIG. 5 or the like, the distal-side support plate
forming region 414 includes a distal-side center portion 414a that
extends from the supporting part-distal side-overlapped region 413
toward the proximal side in the suspension longitudinal direction,
and distal-side first and second width direction portions 414(1),
414(2) that extend from the distal-side center portion 414a toward
one side and the other side in the suspension width direction,
respectively.
The proximal-side support plate forming region 415 includes a
proximal-side center portion 415a that extends from the supporting
part-proximal side-overlapped region 416 toward the distal side in
the suspension longitudinal direction, and proximal-side first and
second width direction portions 415(1), 415(2) that extend from the
proximal-side center portion 415a toward one side and the other
side in the suspension width direction, respectively.
As shown in FIG. 2 or the like, the first piezoelectric element
60(1) has a distal side-end surface and a proximal-side end surface
that face a proximal side-end surface of the distal end section 12
and a distal side-end surface of the proximal end section 11,
respectively, with end surface side-insulative adhesive agents 71
being interposed between them. The lower surface of the first
piezoelectric element 60(1) that faces the disk surface includes a
distal side that is fixed to the distal-side first width direction
portion 414(1) by a first fixing distal side-insulative adhesive
agent 73(1), and a proximal side that is fixed to the proximal-side
first width direction portion 415(1) by a first fixing proximal
side-insulative adhesive agent 74(1).
Similarly, the second piezoelectric element 60(2) has a distal
side-end surface and a proximal-side end surface that face the
proximal side-end surface of the distal end section 12 and the
distal side-end surface of the proximal end section 11,
respectively, with the end surface side-insulative adhesive agents
71 being interposed between them (see FIG. 7 which is mentioned
below). The lower surface of the second piezoelectric element 60(2)
that faces the disk surface includes a distal side that is fixed to
the distal-side second width direction portion 414(2) by a second
fixing distal side-insulative adhesive agent, and a proximal side
that is fixed to the proximal-side second width direction portion
415(2) by a second fixing proximal side-insulative adhesive
agent.
As shown in FIG. 6 or the like, the signal wiring 430 has a
proximal end capable of being electrically connected to an outside
and a distal end capable of being electrically connected to the
magnetic head slider 50.
The voltage supply wiring 440 has a proximal end capable of being
electrically connected to an outside and a distal end capable of
being electrically connected to the lower electrode layers 62L of
the first and second piezoelectric elements 60(1), 60(2).
More specifically, the distal end includes a first piezoelectric
element-connecting end portion 441 that is electrically connected
to the lower electrode layer 62L (hereinafter, may be referred to
as first lower electrode layer 62L(1) in some cases) of the first
electrode element 60(1), and a second piezoelectric
element-connecting end portion 442 that is electrically connected
to the lower electrode layer 62L (hereinafter, may be referred to
as first lower electrode layer 62L(2) in some cases) of the second
electrode element 60(2).
In the present embodiment, as shown in FIGS. 1B, 2, 4, 5 or the
like, the first piezoelectric element-connecting end portion 441 is
electrically connected to the first lower electrode layer 62L(1)
through a first lower conductive adhesive agent 75(1) in a state of
facing the first lower electrode layer 62L(1) of the first
piezoelectric element 60(1) through a first connecting opening
428(1) formed in the first piezoelectric element overlapped portion
427(1).
Similarly, as shown in FIGS. 1B, 4, 5 or the like, the second
piezoelectric element-connecting end portion 442 is electrically
connected to the second lower electrode layer 62L(2) through a
second lower conductive adhesive agent 75(2) in a state of facing
the second lower electrode layer 62L(2) of the second piezoelectric
element 60(2) through a second connecting opening 428(2) formed in
the second piezoelectric element overlapped portion 427(2).
Although, in the present embodiment, the distal end portion of the
single voltage supply wiring is divided into two end portions, one
of which forms the first piezoelectric element-connecting end
portion 441 and the other one of which forms the second
piezoelectric element-connecting end portion 442, it is of course
that the present invention is not limited to the configuration.
For example, it is possible to include a first voltage supply
wiring having a distal end that forms the first piezoelectric
element-connecting end portion 441 and a second voltage supply
wiring having a distal end that forms the second piezoelectric
element-connecting end portion 442, as the voltage supply wiring
400.
As shown in FIGS. 1A and 2, the upper electrode layer 62U (a first
upper electrode layer 62U(1)) of the first piezoelectric element
60(1) and the upper electrode layer 62U of the second piezoelectric
element 60(2) are electrically connected to the supporting part 10
(the distal end section in the present embodiment) through upper
conductive adhesive agents 76 to have a ground potential. The upper
conductive adhesive agent is surrounded by an insulative adhesive
agent 77.
As shown in FIGS. 2 to 4, the magnetic head suspension 1A according
to the present invention includes, in addition to the
above-mentioned components, a surrounding insulative adhesive agent
90 provided directly or indirectly on an upper surface of the
insulating layer 420 that is positioned on an opposite side from
the disk surface so as to surround the first and second lower
conductive adhesive agents 75(1), 75(2) in a plan view.
The thus configured magnetic head suspension 1A makes it possible
to supply voltage to the first and second piezoelectric elements
60(1), 60(2) through the voltage supply wiring 440 integrally
provided at the flexure part 40, and also effectively prevent the
filler particles (mainly Ag particles), which are included in the
first and second lower conductive adhesive agents 75(1), 75(2) for
electrically connecting the voltage supply wiring 440 with the
first and second piezoelectric elements 60(1), 60(2), from falling
onto the disk surface.
In the present embodiment, the surrounding insulative adhesive
agent 90 is configured to individually surround the first and
second piezoelectric elements 60(1), 60(2) in a plan view.
More specifically, as shown in FIG. 4, the surrounding insulative
adhesive agent 90 includes a first surrounding insulative adhesive
agent 90(1) that surrounds the first lower conductive adhesive
agent 75(1) in a plan view, and a second surrounding insulative
adhesive agent 90(2) that surrounds the second lower conductive
adhesive agent 75(2) in a plan view.
As shown in FIG. 4, the first surrounding insulative adhesive agent
90(1) includes a first surrounding distal-side insulative adhesive
agent 91(1) and a first surrounding proximal-side insulative
adhesive agent 92(1) that are disposed on a distal side and a
proximal side from the first connecting opening 428(1),
respectively, a first surrounding outer-side insulative adhesive
agent 93(1) that is disposed on an outer side from the first
connecting opening 428(1) in the suspension width direction and
connects the first surrounding distal-side insulative adhesive
agent 91(1) and the first surrounding proximal-side insulative
adhesive agent 92(1), and a first surrounding inner-side insulative
adhesive agent 94(1) that is disposed on an inner side from the
first connecting opening 428(1) in the suspension width direction
and connects the first surrounding distal-side insulative adhesive
agent 91(1) and the first surrounding proximal-side insulative
adhesive agent 92(1).
As shown in FIG. 4, the second surrounding insulative adhesive
agent 90(2) includes a second surrounding distal-side insulative
adhesive agent 91(2) and a second surrounding proximal-side
insulative adhesive agent 92(2) that are disposed on a distal side
and a proximal side from the second connecting opening 428(2),
respectively, a second surrounding outer-side insulative adhesive
agent 93(2) that is disposed on an outer side from the second
connecting opening 428(2) in the suspension width direction and
connects the second surrounding distal-side insulative adhesive
agent 91(1) and the first surrounding proximal-side insulative
adhesive agent 92(2), and a second surrounding inner-side
insulative adhesive agent 94(2) that is disposed on an inner side
from the second connecting opening 428(2) in the suspension width
direction and connects the second surrounding distal-side
insulative adhesive agent 91(2) and the second surrounding
proximal-side insulative adhesive agent 92(2).
In a preferable configuration, the first surrounding insulative
adhesive agent 90(1) is arranged so as to be overlapped with the
first piezoelectric element 60(1) in a plan view as shown in FIG.
4, and is formed so as to close a gap between the first lower
electrode layer 62L(1) and the insulating layer 420 with respect to
a direction orthogonal to the disk surface as shown in FIGS. 2 and
3.
Similarly, the second surrounding insulative adhesive agent 90(2)
is arranged so as to be overlapped with the second piezoelectric
element 60(2) in a plan view, and is formed so as to close a gap
between the second lower electrode layer 62L(2) and the insulating
layer 420 with respect to the direction orthogonal to the disk
surface.
According to the thus configured configuration in which the first
surrounding insulative adhesive agent 90(1) seals the first lower
conductive adhesive agent 75(1) in cooperation with the first lower
electrode layer 62L(1) and the insulating layer 420, and the second
surrounding insulative adhesive agent 90(2) seals the second lower
conductive adhesive agent 75(2) in cooperation with the second
lower electrode layer 62L(2) and the insulating layer 420, it is
possible to more stably prevent the filler particles, which are
included in the first and second lower conductive adhesive agents
75(1), 75(2), from falling onto the disk surface.
As explained above, in the present embodiment, the lower surface of
the first piezoelectric element 60(1) includes the distal side that
is fixed to the distal-side first width direction portion 414(1)
through the first fixing distal side-insulative adhesive agent
73(1), and the proximal side that is fixed to the proximal-side
first width direction portion 415(1) through the first fixing
proximal side-insulative adhesive agent 74(1).
Similarly, the lower surface of the second piezoelectric element
60(2) includes the distal side that is fixed to the distal-side
second width direction portion 414(2) through the second fixing
distal side-insulative adhesive agent 73(2), and the proximal side
that is fixed to the proximal-side second width direction portion
415(2) through the second fixing proximal side-insulative adhesive
agent 74(2).
In the configuration, the first fixing distal side-insulative
adhesive agent 73(1) and the first fixing proximal side-insulative
adhesive agent 74(1) fix the first piezoelectric element 60(1) to
the flexure substrate 410, and also function as the first
surrounding distal-side insulative adhesive agent 91(1) and the
first surrounding proximal-side insulative adhesive agent 92(1),
respectively.
Similarly, the second fixing distal side-insulative adhesive agent
73(2) and the second fixing proximal side-insulative adhesive agent
74(2) fix the second piezoelectric element 60(2) to the flexure
substrate 410, and also function as the second surrounding
distal-side insulative adhesive agent 91(2) and the second
surrounding proximal-side insulative adhesive agent 92(2),
respectively.
Accordingly, in the present embodiment, the first surrounding
outer-side insulative adhesive agent 93(1) is disposed outward of
the first connecting opening 428(1) in the suspension width
direction, and connects the first fixing distal side-insulative
adhesive agent 73(1) and the first fixing proximal side-insulative
adhesive agent 74(1) to each other. The first surrounding
inner-side insulative adhesive agent 94(1) is disposed inward of
the first connecting Opening 428(1) in the suspension width
direction, and connects the first fixing distal side-insulative
adhesive agent 73(1) and the first fixing proximal side-insulative
adhesive agent 74(1) to each other.
Similarly, the second surrounding outer-side insulative adhesive
agent 93(2) is disposed outward of the second connecting opening
428(2) in the suspension width direction, and connects the second
fixing distal side-insulative adhesive agent 73(2) and the second
fixing proximal side-insulative adhesive agent 74(2) to each other.
The second surrounding inner-side insulative adhesive agent 94(2)
is disposed inward of the second connecting opening 428(2) in the
suspension width direction, and connects the second fixing distal
side-insulative adhesive agent 73(2) and the second fixing proximal
side-insulative adhesive agent 74(2) to each other.
As explained above, in the present embodiment, the flexure metal
plate 410 is configured so that the distal side section 410a and
the proximal side section 410b are spaced away from each other in
the suspension longitudinal direction with the open section 13
being interposed between them, and the distal side section 410a and
the proximal side section 410b are connected to each other by the
extending portion 427 of the connecting region 429 of the
insulating layer 420.
The configuration makes it possible to prevent, as much as
possible, the stiffness of the flexure part 40 from disturbing the
movement of the distal end section 12 relative to the proximal end
section 11, which is caused by the expansion and contraction motion
of the paired piezoelectric elements 60(1), 60(2).
As described earlier, in the present embodiment, the flexure part
40 integrally includes the signal wiring 430 for electrically
connecting the magnetic head slider 50 with the outside.
As shown in FIG. 1B, the signal wiring 430 extends in the
suspension longitudinal direction in a state of being across the
open section 13.
In the configuration, the signal wiring 430 may be resistant
against the movement of the distal end section 12 relative to the
proximal end section 11 based on the expansion and contraction
motion of the paired piezoelectric elements 60(1), 60(2).
The magnetic head suspension 1A according to the present embodiment
has a following configuration in order to reduce the resistance as
much as possible.
FIG. 7 is an enlarged view of VII portion in FIG. 1B.
As shown in FIGS. 1B, 6 and 7, the signal wiring 430 an open
section distal portion 431, an open section proximal portion 432
and an open section central portion 435. The open section distal
portion 431 extends in the suspension longitudinal direction so as
to be across a boundary portion between the distal end section 12
and the open section 13. The open section proximal portion 432
extends in the suspension longitudinal direction so as to be across
a boundary portion between the open section 13 and the proximal end
section 11. The open section central portion 435 connects the open
section distal portion 431 and the open section proximal portion
432.
The open section distal portion 431 and the open section proximal
portion 432 extend in the suspension longitudinal direction at
center in the suspension width direction.
The open section central portion 435 includes first and second open
section central portions 435(1), 435(2) that are arranged on right
and left sides with the suspension longitudinal center line CL as a
reference. The first and second open section central portions
435(1), 435(2) are symmetrical to each other with the suspension
longitudinal center line CL as a reference to the extent
possible.
As shown in FIG. 9, the first open section central portion 435(1)
has a U-like shape in a plan view including a first distal-side
width-direction extending portion 436(1), a first proximal-side
width-direction extending portion 438(1) and a first curved portion
437(1). The first distal-side width-direction extending portion
436(1) extends from the proximal end of the open section distal
portion 431 toward one side in the suspension width direction. The
first proximal-side width-direction extending portion 438(1)
extends from the distal end of the open section proximal portion
432 toward the one side in the suspension width direction. The
first curved portion 437(1) connects the outer ends in the
suspension width direction of the first distal-side width-direction
extending portion 436(1) and the first proximal-side
width-direction extending portion 438(1), and has a shape that is
convex toward the one side in the suspension width direction in a
plan view.
The second open section central portion 435(2) has a U-like shape
in a plan view including a second distal-side width-direction
extending portion 436(2), a second proximal-side width-direction
extending portion 438(2) and a second curved portion 437(2). The
second distal-side width-direction extending portion 436(2) extends
from the proximal end of the open section distal portion 431 toward
the other side in the suspension width direction. The second
proximal-side width-direction extending portion 438(2) extends from
the distal end of the open section proximal portion 432 toward the
other side in the suspension width direction. The second curved
portion 437(2) connects the outer ends in the suspension width
direction of the second distal-side width-direction extending
portion 436(2) and the second proximal-side width-direction
extending portion 438(2), and has a shape that is convex toward the
other side in the suspension width direction in a plan view.
As explained above, the open section central portion 435 of the
signal wiring 430 that is positioned between the distal side
section 410a and the proximal side section 410b in the suspension
longitudinal direction is formed into the U-like shape in a plan
view that is convex outward in the suspension width direction. The
configuration makes it possible to weaken the stiffness of the
signal wiring 430 with respect to the suspension longitudinal
direction that is the expansion and contraction direction of the
paired piezoelectric elements 60(1), 60(2), thereby prevent as much
as possible the signal wiring 430 from becoming an obstacle to the
expansion and contraction motion of the paired piezoelectric
elements 60(1), 60(2).
As shown in FIGS. 2 and 7, in the present embodiment, the distal
end side-first width portion 414(1) and the distal end side-second
width portion 414(2) are arranged so that there is a gap between
the respective width portions 414(1), 414(2) and the distal end
section 12.
The configuration makes it possible to effectively prevent the end
surface side-insulative adhesive agents 71 as well as the first and
second fixing distal side-insulative adhesive agents 73(1), 73(2)
from entering between the supporting part-distal side-overlapped
region 413 and the distal end section 12, wherein the end surface
side-insulative adhesive agents 71 are interposed between the
respective distal side-end surfaces of the first and second
piezoelectric elements 60(1), 60(2) and the proximal side-end
surface of the distal end section 12, and the first and second
fixing distal side-insulative adhesive agents 73(1), 73(2) also
function as the first and second surrounding distal-side insulative
adhesive agents 91(1), 91(2), respectively.
More specifically, in a case where the distal-side first and second
width direction portions 414(1), 414(2) are arranged so as to be
across the proximal edge of the distal end section 12, the end
surface side-insulative adhesive agents 71 as well as the first and
second fixing distal side-insulative adhesive agents 73(1), 73(2)
may enter between the supporting part-distal side-overlapped region
413 and the distal end section 12, which are ideally in intimate
contact with each other. Both the supporting part-distal
side-overlapped region 413 and the distal end section 12, which are
ideally in intimate contact with each other, are formed by rigid
members such as SUS. Accordingly, if the insulative adhesive agents
enter between them, the filler particles may get out of the
insulative adhesive agents 71, 73(1), 73(2) the location between
them in accordance with the expansion and contraction motion of the
paired piezoelectric elements 60(1), 60(2).
On the other hand, in the present embodiment, as described above,
the distal-side first and second width direction portions 414(1),
414(2) are arranged so that there is provided the gap 18 between
the respective distal edges and the proximal edge of the distal end
section 12. Accordingly, the insulative adhesive agents 71, 73(1),
73(2) are prevented from entering into the contacted portion
between the supporting part-distal side-overlapped region 413 and
the distal end section 12, whereby the above-explained defect can
be effectively prevented.
For the same reason, in the present embodiment, as shown in FIGS. 2
and 7, the proximal-side first and second width direction portions
415(1), 415(2) are arranged so that the respective proximal edges
of the proximal-side first and second width direction portions
415(1), 415(2) are spaced away from the distal edge of the proximal
end section 11 with a gap 19 being interposed.
Preferably, as shown in FIGS. 2 to 5, there are provided first and
second metal rings 450(1), 450(2) on the upper surface of the
insulating layer 420 so as to surround the first and second
connecting openings 428(1), 428(2), respectively.
The provision of the first and second metal rings 450(1), 450(2)
makes it possible to suppress the spreading of the first and second
lower conductive adhesive agents 75(1), 75(2), thereby reliably
securing electric connections between the lower electrode layers
62L of the first and second piezoelectric elements 60(1), 60(2) and
the first and second voltage supply wirings 440(1), 440(2) by the
first and second lower conductive adhesive agents 75(1), 75(2).
Furthermore, it is effectively prevented that the first and second
lower conductive adhesive agents 75(1), 75(2) spread to run into
the first and second surrounding insulative adhesive agents 90(1),
90(2).
The first and second metal rings 450(1), 450(2) may be formed with
utilizing a metal substrate that forms the flexure metal plate
410.
More specifically, the flexure metal plate 410 is formed by
laminating the insulting layer 420 on a lower surface of the metal
substrate that faces the disk surface and then removing unnecessary
portions from the metal substrate by etching. The first and second
metal rings 450(1), 450(2) are easily formed by performing the
etching in such a manner as that the first and second metal rings
450(1), 450(2) as well as the flexure metal plate 410 remains.
Second Embodiment
Hereinafter, another embodiment of the magnetic head suspension
according to the present invention will be described, with
reference to the attached drawings.
FIG. 8 is a top view (a plan view as viewed from a side opposite
from the disk surface) of a magnetic head suspension 1B according
to the present embodiment in a state where the first and second
piezoelectric elements 60(1), 60(2) have been removed. It is noted
that, for the purpose of easier understanding, the first and second
piezoelectric elements 60(1), 60(2) are shown with chain
double-dashed line in FIG. 8.
FIGS. 9 and 10 are cross sectional views taken along lines IX-IX
and X-X in FIG. 8, respectively.
In the figures, the members same as those in the first embodiment
are denoted by the same reference numerals to omit the detailed
description thereof.
As shown in FIG. 8, the magnetic head suspension 1B according to
the present embodiment is different from the magnetic head
suspension 1A according to the first embodiment in that it includes
a single surrounding insulative adhesive agent 190 configured so as
to surround both the first and second lower conductive adhesive
agents 75(1), 75(2) in a plan view, in place of the first and
second lower conductive adhesive agents 75(1), 75(2).
More specifically, the surrounding insulative adhesive agent 190
includes a surrounding distal-side insulative adhesive agent 191
and a surrounding proximal-side insulative adhesive agent 192 that
are disposed on a distal side and a proximal side from the first
and second connecting openings 428(1), 428(2) in the suspension
longitudinal direction, respectively, a surrounding first
outer-side insulative adhesive agent 193 that is disposed on one
side from the first and second connecting openings 428(1), 428(2)
in the suspension width direction and connects the surrounding
distal-side insulative adhesive agent 191 and the surrounding
proximal-side insulative adhesive agent 192, and a surrounding
second outer-side insulative adhesive agent 194 that is disposed on
the other side from the first and second connecting openings
428(1), 428(2) in the suspension width direction and connects the
surrounding distal-side insulative adhesive agent 191 and the
surrounding proximal-side insulative adhesive agent 192.
The thus configured magnetic head suspension 1B can achieve the
same effect as the first embodiment.
In a preferable configuration, the surrounding insulative adhesive
agent 190 is arranged so as to close a gap between the respective
lower electrode layers 62L of the first and second piezoelectric
elements 60(1), 60(2) and the insulating layer 420 or the flexure
metal plate 410.
More specifically, as shown in FIGS. 8 and 9, the surrounding
distal-side insulative adhesive agent 191 includes a distal-side
first width direction portion 191(1) and a distal-side second width
direction portion 191(2) that are overlapped with the first and
second piezoelectric elements 60(1), 60(2) in a plan view,
respectively, and a distal-side center portion 191(C) extending
between the distal-side first and second width direction portions
191(1), 191(2).
As shown in FIGS. 8 and 9, the surrounding proximal-side insulative
adhesive agent 192 includes a proximal-side first width direction
portion 192(1) and a proximal-side second width direction portion
192(2) that are overlapped with the first and second piezoelectric
elements 60(1), 60(2) in a plan view, respectively, and a
proximal-side center portion 192(C) extending between the
proximal-side first and second width direction portions 192(1),
192(2).
The surrounding first outer-side insulative adhesive agent 193 is
arranged so as to be overlapped with the first piezoelectric
element 60(1) in a plan view, and the surrounding second outer-side
insulative adhesive agent 194 is arranged so as to be overlapped
with the second piezoelectric element 60(2) in a plan view.
In the configuration, the distal-side first width direction portion
191(1), the proximal-side first width direction portion 192(1) and
the surrounding first outer-side insulative adhesive agent 193 are
arranged so as to close the gap between the first lower electrode
layer 62L(1) and the insulating layer 420 with respect to the
direction orthogonal to the disk surface. Further, the distal-side
second width direction portion 191(2), the proximal-side second
width direction portion 192(2) and the surrounding second
outer-side insulative adhesive agent 194 are arranged so as to
close the gap between the second lower electrode layer 62L(2) and
the insulating layer 420 with respect to the direction orthogonal
to the disk surface.
The configuration makes it possible to prevent the filler
particles, which are included in the first and second lower
conductive adhesive agents 75(1), 75(2), from falling onto the disk
surface in a more reliable manner.
In the magnetic head suspension 1B according to the present
embodiment, in the same manner as in the magnetic head suspensions
1A according to the first embodiment, the first and second
piezoelectric elements 60(1), 60(2) has the distal ends that are
mounted on the distal-side support plate forming region 414 of the
flexure metal plate 410 and the proximal ends that are mounted on
the proximal-side support plate forming region 415.
More specifically, each of the first and second piezoelectric
elements 60(1), 60(2) has the distal side-end surface and the
proximal-side end surface that face the proximal side-end surface
of the distal end section 12 and the distal side-end surface of the
proximal end section 11, respectively, with the end surface
side-insulative adhesive agents 71 being interposed between them.
The lower surface of each of the first and second piezoelectric
elements 60(1), 60(2) that faces the disk surface includes the
distal side that is fixed to the distal-side support plate forming
region 414 by a fixing distal side-insulative adhesive agent 173,
and the proximal side that is fixed to the proximal-side support
plate forming region 415 by a fixing proximal side-insulative
adhesive agent 174.
In the configuration, the fixing distal side-insulative adhesive
agent 173 and the fixing proximal side-insulative adhesive agent
174 function as the surrounding distal-side insulative adhesive
agent 191 and the surrounding proximal-side insulative adhesive
agent 192(1), respectively.
Furthermore, as shown in FIGS. 9 and 10, in the present embodiment,
a first space defined by the first lower electrode layer 62L(1),
the insulating layer 420, the distal-side first width direction
portion 191(1), the proximal-side first width direction portion
192(1) and the surrounding first outer-side insulative adhesive
agent 193, and a second space defined by the second lower electrode
layer 62L(2), the insulating layer 420, the distal-side second
width direction portion 191(2), the proximal-side second width
direction portion 192(2) and the surrounding second outer-side
insulative adhesive agent 194 are filled with a sealing insulative
adhesive agent 85.
The configuration makes it possible to prevent the filler
particles, which are included in the first and second lower
conductive adhesive agents 75(1), 75(2), from falling onto the disk
surface in a more reliable manner, and also effectively prevent
electrochemical migration of Ag.
More specifically, usage of the magnetic head suspension 1B over
long periods of time may give rise to a phenomenon (electrochemical
migration) that a metal (mainly Ag) included in the first and
second lower surface side-conductive adhesive agents 75(1), 75(2)
is ionized (to be mainly Ag+) and moves within an insulative member
(a resin included in the first and second conductive adhesive
agents 75(1), 75(2) in this case) while growing up. The phenomenon
is activated if the ionized substance initiates a chemical reaction
with moisture in an atmosphere.
In this regard, in the present embodiment, the first and second
lower surface side-conductive adhesive agents 75(1), 75(2) are
enclosed with the sealing insulative adhesive agent 85. The
configuration makes it possible to prevent electrochemical
migration of Ag, and also prevent silver ion from growing up as
much as possible.
The magnetic head suspension 1B with the sealing insulative
adhesive agent 85 can be efficiently manufactured by a following
manufacturing method, for example.
More specifically, the manufacturing method may include a step of
connecting the load beam part 20 to the supporting part 10 through
the load bending part 20, a step of fixing the flexure part 40 to
the load beam part 30 and the supporting part 10 by fixing the
flexure metal plate 410 to the load beam part 30 and the supporting
part 10 by welding or the like, a first adhesive application step
of applying the surrounding distal-side insulative adhesive agent
191 (the fixing distal side-insulative adhesive agent 173 in the
present embodiment), the surrounding proximal-side insulative
adhesive agent 192 (the fixing proximal side-insulative adhesive
agent 174), the surrounding first outer-side insulative adhesive
agent 193 and the surrounding second outer-side insulative adhesive
agent 194, a second adhesive application step of applying the first
and second lower conductive adhesive agents 75(1), 75(2), a
piezoelectric element setting step of setting the first and second
piezoelectric elements 60(1), 60(2) at respective predetermined
positions after the first and second adhesive application steps, a
third adhesive application step of applying the end surface
side-insulative adhesive agents 71 between the respective distal
side-end surfaces of the first and second piezoelectric elements
60(1), 60(2) and the proximal side-end surface of the distal end
section 12 and also between the respective proximal-side end
surfaces of the first and second piezoelectric elements 60(1),
60(2) and the distal side-end surface of the proximal end section
11 before or after the piezoelectric element setting step, a curing
step of curing the adhesives applied by the first to third adhesive
application steps so that the first and second piezoelectric
elements 60(1), 60(2) are fixed, and a step of filling the sealing
insulative adhesive agent 85 into the first and second spaces from
the opposite side from the disk surface through the gap between the
first and second piezoelectric elements 60(1), 60(2) in the
suspension width direction.
The manufacturing method may include a fourth adhesive application
step of applying the upper surface side-conductive adhesive agents
76 so as to be across the respective upper electrode layers 62U of
the first and second piezoelectric elements 60(1), 60(2), which are
positioned on a side opposite from the disk surface, and the distal
end section 12 of the supporting part 10.
As in the magnetic head suspension 1A according to the first
embodiment, the magnetic head suspension according to the present
embodiment includes the first and second metal rings 450(1), 450(2)
provided on the upper surface of the insulating layer 420 so as to
surround the first and second connecting openings 428(1), 428(2),
respectively.
It is possible to include a single metal ring 455 in place of the
first and second metal rings 450(1), 450(2).
FIG. 11 is a top view of a magnetic head suspension 1B' with the
single metal ring 455 according to a modified example.
As shown in FIG. 11, the single metal ring 455 is arranged on the
upper surface of the insulating layer 420 so as to surround both
the first and second connecting openings 428(1), 428(2).
In this case, the first lower electrode layer 62L(1) of the first
piezoelectric element 60(1) and the second lower electrode layer
62L(2) of the second piezoelectric element 60(2) may be
electrically connected to the voltage supply wiring 440 through a
common lower conductive adhesive agent 175 provided within the
metal ring 455 on the upper surface of the insulating layer
420.
In the modified example 1B', it is enough for the voltage supply
wiring 440 to have only a single connecting end portion rather than
the two connecting end portions of the first piezoelectric
element-connecting end portion 441 and the second piezoelectric
element-connecting end portion 442, wherein the single connecting
end portion is electrically connected to both the first and second
lower electrode layers 62L(1), 62L(2) through the common lower
conductive adhesive agent 175.
The modified example 1B' makes it also possible to suppress the
spreading of the common lower conductive adhesive agent 175,
thereby reliably securing electric connections between the lower
electrode layers 62L(1), 62L(2) of the first and second
piezoelectric elements 60(1), 60(2) and the voltage supply wiring
440 by the common lower conductive adhesive agent 175. Furthermore,
it is effectively prevented that the common lower conductive
adhesive agent 175 spread to run into the surrounding insulative
adhesive agent 190.
Furthermore, in the modified example 1B', the common lower
conductive adhesive agent 175 is opened outward through the gap
between the first and second piezoelectric elements 60(1), 60(2) in
the suspension width direction. The configuration allows the common
lower conductive adhesive agent 175 to be irradiated with UV
(ultraviolet rays) and hot air through the gap, whereby a temporary
curing of the common lower conductive adhesive agent 175 can be
efficiently achieved. The temporary curing of the common lower
conductive adhesive agent 175 can effectively prevent a
disadvantage such as an unintentional deformation of the common
lower conductive adhesive agent 175 during subsequent steps.
Third Embodiment
Hereinafter, still another embodiment of the magnetic head
suspension according to the present invention will be described,
with reference to the attached drawings.
FIG. 12 is a top view (a plan view as viewed from a side opposite
from the surface) of a flexure part 40C of a magnetic head
suspension 1C according to the present embodiment.
Further, FIG. 13 is an enlarged view of XIII portion in FIG.
12.
It is noted that, for the purpose of easier understanding, the
first and second piezoelectric elements 60(1), 60(2) as well as the
supporting part 10 are shown with chain double-dashed line in FIGS.
12 and 13.
In the figures, the members same as those in the first and second
embodiments are denoted by the same reference numerals to omit the
detailed description thereof.
The magnetic head suspension 1C according to the present embodiment
is different from the magnetic head suspension 1B according to the
second embodiment mainly in that the flexure part 40 is replaced
with a flexure part 40C.
The flexure part 40C is different from the flexure part 40 in that
the flexure metal plate 410 is changed to a flexure metal plate
410C.
More specifically, as shown in FIG. 13, the flexure metal plate
410C has the same components as the flexure metal plate 410, and
further includes a first distal-side extending piece 401(1), a
second distal-side extending piece 401(1), a first proximal-side
extending piece 402(1) and a second proximal-side extending piece
402(2).
The first distal-side extending piece 401(1) is disposed outward of
the first connecting opening 428(1) in the suspension width
direction, and extends from the distal-side support plate forming
region 414 toward the proximal side in the suspension longitudinal
direction so as to overlap with the first piezoelectric element
60(1) in a plan view.
In the present embodiment, as shown FIG. 13, the first distal-side
extending piece 401(1) extends toward the proximal side in the
suspension longitudinal direction from the outer end of the
distal-side first width direction portion 414(1) in the suspension
width direction.
The second distal-side extending piece 401(2) is disposed outward
of the second connecting opening 428(2) in the suspension width
direction, and extends from the distal-side support plate forming
region 414 toward the proximal side in the suspension longitudinal
direction so as to overlap with the second piezoelectric element
60(1) in a plan view.
In the present embodiment, as shown FIG. 13, the second distal-side
extending piece 401(2) extends toward the proximal side in the
suspension longitudinal direction from the outer end of the
distal-side second width direction portion 414(2) in the suspension
width direction.
The first proximal-side extending piece 402(1) is disposed at a
substantially same position as the first distal-side extending
piece 401(1) with respect to the suspension width direction, and
extends toward the distal side in the suspension longitudinal
direction from the proximal-side support plate forming region 415
so as to overlap with the first piezoelectric element 60(1) in a
plan view.
In the present embodiment, as shown in FIG. 13, the first
proximal-side extending piece 402(1) extends toward the distal side
in the suspension longitudinal direction from the outer end of the
proximal end side-first width portion 415(1) in the suspension
width direction.
The second proximal-side extending piece 402(2) is disposed at a
substantially same position as the second distal-side extending
piece 401(2) with respect to the suspension width direction, and
extends toward the distal side in the suspension longitudinal
direction from the proximal-side support plate forming region 415
so as to overlap with the second piezoelectric element 60(2) in a
plan view.
In the present embodiment, as shown in FIG. 13, the second
proximal-side extending piece 402(2) extends toward the distal side
in the suspension longitudinal direction from the outer end of the
proximal end side-second width portion 415(2) in the suspension
width direction.
The free ends of the first distal-side extending piece 401(1) and
the first proximal-side extending piece 402(1) face each other with
being separate from each other. The free ends of the second
distal-side extending piece 401(2) and the second proximal-side
extending piece 402(2) face each other with being separate from
each other.
In the magnetic head suspension 1C with the thus configured flexure
metal plate 410C, an insulative adhesive agent (the surrounding
first outer-side insulative adhesive agent 193 in the present
embodiment) of the surrounding insulative adhesive agent 190 that
is disposed outward of the first connecting opening 428(1) in the
suspension width direction and extends in the suspension
longitudinal direction is provided on upper surfaces of the first
distal-side extending piece 401(1) and the first proximal-side
extending piece 402(1) that are opposite from the disk surface.
Similarly, an insulative adhesive agent (the surrounding second
outer-side insulative adhesive agent 194 in the present embodiment)
of the surrounding insulative adhesive agent 190 that is disposed
outward of the second connecting opening 428(2) in the suspension
width direction and extends in the suspension longitudinal
direction is provided on upper surfaces of the second distal-side
extending piece 401(2) and the second proximal-side extending piece
402(2) that are opposite from the disk surface.
According to the magnetic head suspension 1C with the
configuration, the insulative adhesive agent of the surrounding
insulative adhesive agent 190 that is disposed outward of the first
connecting opening 428(1) in the suspension width direction and
extends in the suspension longitudinal direction is enough to seal
a gap between the first distal-side extending piece 401(1) and the
first lower electrode layer 62L(1) as well as a gap between the
first proximal-side extending piece 402(1) and the first lower
electrode layer 62L(1). The insulative adhesive agent of the
surrounding insulative adhesive agent 190 that is disposed outward
of the second connecting opening 428(2) in the suspension width
direction and extends in the suspension longitudinal direction is
enough to seal a gap between the second distal-side extending piece
401(2) and the second lower electrode layer 62L(2) as well as a gap
between the second proximal-side extending piece 402(2) and the
second lower electrode layer 62L(1).
Since the first distal-side extending piece 401(1) and the first
proximal-side extending piece 402(1) are separate from each other,
and the second distal-side extending piece 401(2) and the second
proximal-side extending piece 402(2) are separate from each other,
these extending pieces are prevented from disturbing the expansion
and contraction motion of the paired piezoelectric elements 60(1),
60(2).
Furthermore, in the present embodiment, as shown in FIGS. 12 and
13, the supporting part-distal side-overlapped region 413 and the
distal-side support plate forming region 414 are formed with an
opening 460 that is across the proximal edge of the distal end
section 12.
The provision of the opening 460 can effectively prevent the end
surface side-insulative adhesive agents 71, which is interposed
between the respective distal side-end surfaces of the first and
second piezoelectric elements 60(1), 60(2) and the proximal-side
end surface of the distal end section 12, as well as the
surrounding distal-side insulative adhesive agent 191 from entering
between the supporting part-distal side-overlapped region 413 and
the distal end section 12, thereby effectively preventing a
disadvantage that the filler particles are removed from the
insulative adhesive agents 71, 190.
For the same purpose, in the present embodiment, the supporting
part-proximal side-overlapped region 416 and the proximal-side
support plate forming region 415 are formed with an opening 461
that is across the distal edge of the proximal end section 11.
Furthermore, in the present embodiment, as shown in FIG. 13, the
insulating layer 420 is formed with an opening 465 that is disposed
outward of the metal ring 465 and in the vicinity of the lower
conductive adhesive agent 175.
The opening 465 allows the lower conductive adhesive agent 175 to
be irradiated with UV (ultraviolet rays) and hot air from the lower
surface close to the disk surface.
Fourth Embodiment
Hereinafter, still another embodiment of the magnetic head
suspension according to the present invention will be described,
with reference to the attached drawings.
FIG. 14 is a top view (a plan view as viewed from a side opposite
from the surface) of a flexure part 40D of a magnetic head
suspension 1D according to the present embodiment.
In the figures, the members same as those in the first to third
embodiments are denoted by the same reference numerals to omit the
detailed description thereof:
It is noted that, for the purpose of easier understanding, the
first and second piezoelectric elements 60(1), 60(2) as well as the
supporting part 10 are shown with chain double-dashed line in FIG.
14.
The magnetic head suspension 1D according to the present embodiment
is different from the magnetic head suspension 1C according to the
third embodiment mainly in that the flexure metal plate 410D is
replaced with a flexure metal plate 410D.
More specifically, as shown in FIG. 14, the flexure metal plate
410D includes a first connecting piece 403(1) and a second
connecting piece 403(2). The first connecting piece 403(1) connects
the distal-side support plate forming region 414 and the
proximal-side support plate forming region 415 in a state of being
disposed outward of the first connecting opening 428(1) in the
suspension width direction and overlapped with the first
piezoelectric element 60(1) in a plan view. The second connecting
piece 403(2) connects the distal-side support plate forming region
414 and the proximal-side support plate forming region 415 in a
state of being disposed outward of the second connecting opening
428(2) in the suspension width direction and overlapped with the
second piezoelectric element 60(2) in a plan view.
Each of the first and second connecting pieces 403(1), 403(2) is
provided with an elastic portion capable of being elastically
deformed in the suspension longitudinal direction.
In the present embodiment, the elastic portion is formed by an
accordion-like structure including first convex portions that
project outward in the suspension width direction and second convex
portions that project inward in the suspension width direction, the
first and second convex portions being arranged alternately to each
other in the suspension longitudinal direction. Alternatively, the
elastic portion may be formed by a single convex portion that
project outward or inward in the suspension width direction.
The magnetic head suspension 1D with the thus configured flexure
metal plate 410D makes it possible to stabilize the posture of the
flexure part 40D as well as stably support the first and second
piezoelectric elements 60(1), 60(2) without disturbing the
expansion and contraction motion of the paired piezoelectric
elements 60(1), 60(2).
Preferably, in the same manner as the third embodiment, on an upper
surface of a portion of the flexure metal plate 410D that extends
in the suspension longitudinal direction between the distal-side
support plate forming region 414 and the proximal-side support
plate forming region 415, the surrounding insulative adhesive agent
190 is provided. More specifically, the insulative adhesive agent
193 (not shown in FIG. 14) of the surrounding insulative adhesive
agent 190 that is disposed outward of the first connecting opening
428(1) in the suspension width direction and extends in the
suspension longitudinal direction is provided on the upper surface
of the first connecting piece 403(1) that is opposite from the disk
surface, and the insulative adhesive agent 194 (not shown in FIG.
14) of the surrounding insulative adhesive agent 190 that is
disposed outward of the second connecting opening 428(2) in the
suspension width direction and extends in the suspension
longitudinal direction is provided on the upper surface of the
second connecting piece 403(2) that is opposite from the disk
surface.
Fifth Embodiment
Hereinafter, still another embodiment of the magnetic head
suspension according to the present invention will be described,
with reference to the attached drawings.
FIGS. 15A and 15B are a top view (a plan view as viewed from a side
opposite from the disk surface) and a bottom view (a bottom plan
view as viewed from a side close to the disk surface) of a magnetic
head suspension 1E according to the present embodiment,
respectively. FIG. 15B indicates welding points (more specifically,
welding points by laser beam spot welding) with using small
circles.
FIGS. 16 and 17 are cross sectional views taken along lines XVI-XVI
and XVII-XVII in FIG. 15A, respectively.
In the figures, the members same as those in the first to fourth
embodiments are denoted by the same reference numerals to omit the
detailed description thereof.
In the embodiments explained earlier, the respective flexure metal
plates 410, 410C, 410D of the flexure parts 40, 40C, 40D are
configured so as to support the first and second piezoelectric
elements 60(1), 60(2).
More specifically, in each of the embodiments explained earlier,
each of the first and second piezoelectric elements 60(1), 60(2)
has the lower surface that is fixed at the distal side to the
distal-side support plate forming region 414 by the fixing distal
side-insulative adhesive agents 73, 173 and is also fixed at the
proximal side to the proximal-side support plate forming region 415
by the fixing proximal side-insulative adhesive agents 74, 174, in
a state where the distal side-end surface and the proximal-side end
surface of each of the piezoelectric elements are connected to the
proximal side-end surface of the distal end section 12 and the
distal side-end surface of the proximal end section 11 by the end
surface side-insulative adhesive agents 71, respectively. The
fixing distal side-insulative adhesive agents 73, 173 and the
fixing proximal side-insulative adhesive agents 74, 174 form parts
of the surrounding insulative adhesive agents 90, 190.
On the other hand, in the present embodiment, the first and second
piezoelectric elements 60(1), 60(2) are supported substantially
only by a supporting part 10E.
More specifically, the magnetic head suspension 1E includes a
supporting part 10E and a flexure part 40E in place of the
supporting part 10 and the flexure part 40, in comparison with the
magnetic head suspension according to the first embodiment.
The supporting part 10E includes the components same as those of
the supporting part 10, and further includes a distal-side cutout
(or notch) 12a and a proximal-side cutout (or notch) 11a, as shown
in FIG. 16 or the like. The distal-side cutout 12 a is formed in
the distal end section 12 so as to be opened to the side opposite
from the disk surface and the proximal side in the suspension
longitudinal direction. The proximal-side cutout 11a is formed in
the proximal end section 11 so as to be opened to the side opposite
from the disk surface and the distal side in the suspension
longitudinal direction.
FIG. 18 is a top view of the magnetic head suspension 1E in a state
where the first and second piezoelectric elements 60(1), 60(2) have
been removed. FIG. 18 shows the first and second piezoelectric
elements 60(1), 60(2) with chain double-dashed line for the purpose
of easier understanding.
As shown in FIGS. 16 and 18, the first and second piezoelectric
elements 60(1), 60(2) are connected at the distal sides and the
proximal sides to the distal-side cutout 12a and the proximal-side
cutout 11a by fixing distal side-insulative adhesive agents 78,
respectively, as shown in FIGS. 16 and 18.
More specifically, the distal sides of the first and second
piezoelectric elements 60(1), 60(2) are connected to the
distal-side cutout 12a through the fixing distal side-insulative
adhesive agent 78 in a state where the lower surfaces of the
elements that face the disk surface face the upper surface of the
distal-side cutout 12a that faces upward and the end surfaces of
the elements that face to the distal side face an end surface of
the distal-side cutout 12a that faces to the proximal side.
The proximal sides of the first and second piezoelectric elements
60(1), 60(2) are connected to the proximal-side cutout 11a through
the fixing distal side-insulative adhesive agent 78 in a state
where the lower surfaces of the elements that face the disk surface
face the upper surface of the proximal-side cutout 11a that faces
upward and the end surfaces of the elements that face to the
proximal side face an end surface of the proximal-side cutout 11a
that faces to the distal side.
FIGS. 19 and 20 are a top view and a bottom view of the flexure
part 40E, respectively.
The flexure part 40E is different from the flexure part 40 in that
the flexure metal plate 410 is replaced by a flexure metal plate
410E.
As shown in FIGS. 19 and 20, the flexure metal plate 410E has a
configuration in which the distal-side support plate forming region
414 and the proximal-side support plate forming region 415 are
deleted from the flexure metal plate 410.
In the configuration, the surrounding insulative adhesive agent 90
are provided on the upper surface, which is opposite from the disk
surface, of the connecting region 429 of the insulating layer 420
so as to surround the first and second lower conductive adhesive
agents 75(1), 75(2) in a plan view.
In the present embodiment, the surrounding insulative adhesive
agent 90 is configured so as to have the first and second
surrounding insulative adhesive agents 90(1), 90(2) surrounding the
first and second lower conductive adhesive agents 75(1), 75(2),
respectively, as shown in FIG. 18 or the like. Alternatively, of
course, the surrounding insulative adhesive agent 90 can be
configured so as to surround both the first and second lower
conductive adhesive agents 75(1), 75(2), as in the second
embodiment.
* * * * *