U.S. patent number 6,870,306 [Application Number 10/343,705] was granted by the patent office on 2005-03-22 for overlapping type piezoelectric stator, overlapping type piezoelectric actuator and applications thereof.
This patent grant is currently assigned to Ecchandes Inc.. Invention is credited to Yoshiaki Ajioka.
United States Patent |
6,870,306 |
Ajioka |
March 22, 2005 |
Overlapping type piezoelectric stator, overlapping type
piezoelectric actuator and applications thereof
Abstract
Piezoelectric elements (1) are overlapping on a stator (11) in
the same direction as shown in FIG. 3. Since a fixed end (6) of a
piezoelectric element (1) is fixed to a foundation (4), an open end
(7) of the piezoelectric element (1) elongates in the direction
opposite to the foundation (4) when a voltage is applied to the
piezoelectric element (1). When a drive device (12) generates a
saw-tooth wave shown in FIG. 4(a), the piezoelectric element (1)
rapidly elongates or slowly shrinks. A slider (21) then moves while
being flicked away by the piezoelectric element (1). On the other
hand, since piezoelectric element (1) rapidly shrinks or slowly
elongates in the case of FIG. 4(b), a slider (21) moves while being
pulled in by the piezoelectric element (1). Because of
piezoelectric elements (1) arranged in a circle as shown in FIG.
13, a stator (11) can rotate a circular rotor (31) and a spherical
rotor (35).
Inventors: |
Ajioka; Yoshiaki (Gamagori,
JP) |
Assignee: |
Ecchandes Inc. (Aichi,
JP)
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Family
ID: |
27481526 |
Appl.
No.: |
10/343,705 |
Filed: |
February 3, 2003 |
PCT
Filed: |
August 08, 2001 |
PCT No.: |
PCT/JP01/06806 |
371(c)(1),(2),(4) Date: |
February 03, 2003 |
PCT
Pub. No.: |
WO02/15378 |
PCT
Pub. Date: |
February 21, 2002 |
Foreign Application Priority Data
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Aug 11, 2000 [JP] |
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2000-243635 |
Dec 19, 2000 [JP] |
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2000-384883 |
Mar 30, 2001 [JP] |
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2001-98801 |
Jun 29, 2001 [JP] |
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2001-198080 |
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Current U.S.
Class: |
310/367; 310/311;
310/328 |
Current CPC
Class: |
H02N
2/025 (20130101); H02N 2/108 (20130101); H02N
2/101 (20130101); H02N 2/028 (20130101) |
Current International
Class: |
H01L
41/09 (20060101); H01L 041/083 (); H02N
002/04 () |
Field of
Search: |
;310/311,328,367,368 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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2570223 |
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Mar 1986 |
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FR |
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52-29192 |
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Mar 1977 |
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JP |
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5996881 |
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Jun 1984 |
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JP |
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6026476 |
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Feb 1985 |
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JP |
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60174078 |
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Sep 1985 |
|
JP |
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61167591 |
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Jul 1986 |
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JP |
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62228392 |
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Oct 1987 |
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JP |
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63268479 |
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Nov 1988 |
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JP |
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3203571 |
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Sep 1991 |
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JP |
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3-203571 |
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Sep 1991 |
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JP |
|
3235676 |
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Oct 1991 |
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JP |
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3-235676 |
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Oct 1991 |
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JP |
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4144819 |
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May 1992 |
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JP |
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5105291 |
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Apr 1993 |
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JP |
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5122961 |
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May 1993 |
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JP |
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5168195 |
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Jul 1993 |
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JP |
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875421 |
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Mar 1996 |
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JP |
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8182354 |
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Jul 1996 |
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JP |
|
934409 |
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Feb 1997 |
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JP |
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10336983 |
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Dec 1998 |
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JP |
|
1118459 |
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Jan 1999 |
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JP |
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2002-150585 |
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May 2002 |
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JP |
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2002150585 |
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May 2002 |
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JP |
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9634701 |
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Nov 1996 |
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WO |
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Other References
Toshiro Higuchi, et al.; "Precise Positioner Utilizing Rapid
Deformations of a Piezoelectric Element", JSPE, vol. 54, No. 11,
pp. 2107-2112, 1988. .
Karl F. Bohringer, et al ; "Computational Methods for Design and
Control of MEMS Micromanipulator Arrays", IEEE Computational
Science & Engineering, pp. 17-29, Jan.-Mar., 1997..
|
Primary Examiner: Dougherty; Thomas M.
Attorney, Agent or Firm: Antonelli, Terry, Stout &
Kraus, LLP
Claims
What is claimed is:
1. An overlapping type piezoelectric stator comprising: a plurality
of piezoelectric elements; and a foundation, wherein each
piezoelectric element is formed in a thin film, a surface and a
back of said piezoelectric element are each equipped with an
electrode, respectively, and each piezoelectric element is folded
up in a right-angled direction to an extension direction, wherein,
in each of said piezoelectric elements folded up, predetermined
parts of both sides are insulated by insulators, wherein, in
attaching said piezoelectric elements to said foundation, said
piezoelectric elements are arranged along said foundation in turn,
said piezoelectric elements are overlapping, at least one of said
electrodes on both sides of each piezoelectric element touches an
electrode of an adjacent piezoelectric element, and an end of each
piezoelectric element is fixed to said foundation, and wherein
voltage is applied to electrodes of at least one of said
piezoelectric elements arranged in turn.
2. An overlapping type piezoelectric stator comprising: a plurality
of piezoelectric elements; and a foundation, wherein each
piezoelectric element is formed in a thin film, and a surface and a
back of said piezoelectric element are equipped with an electrode,
respectively, wherein, in each of said piezoelectric elements
folded up, predetermined parts of both sides are insulated by
insulators, a part of said electrode on said back and a part of
said electrode on said surface are covered by at least one tunica
electrode, and a part of said electrode on said back and a part of
said surface are covered by said at least one tunica electrode,
wherein, in attaching said piezoelectric elements to said
foundation, said piezoelectric elements are arranged along said
foundation in turn, said piezoelectric elements are overlapping, at
least one of said electrodes on said surface and back of each
piezoelectric element touches an electrode of an adjacent
piezoelectric element via a plurality of said at least one tunica
electrodes, and an end of each piezoelectric element is fixed to
said foundation, and wherein voltage is applied to said electrodes
of at least one of said piezoelectric elements arranged in
turn.
3. An overlapping type piezoelectric stator according to claim 1,
or 2, wherein, for each of said piezoelectric elements, resistance
is reduced by connecting said electrode on said surface, said
electrode on said back and a tunica electrode of said piezoelectric
element with said electrode on said back, said electrode on said
surface and a tunica electrode of an adjacent piezoelectric
element, respectively, via at least one lead or at least on
conductive sponge.
4. An overlapping type piezoelectric stator according to claim 3,
wherein said foundation can be transformed.
5. An overlapping type piezoelectric stator according to claim 4,
wherein said piezoelectric elements are arranged circularly, a
spacer is inserted between electrodes in a head piezoelectric
element and an end piezoelectric element of said overlapping type
piezoelectric stator, two sides of said spacer touching said
electrode in said head piezoelectric element and said electrode in
said end piezoelectric element are equipped with electrodes,
respectively, and said voltage is applied to said electrode in said
head piezoelectric element and said electrode in said end
piezoelectric element, via said electrodes of said two sides of
said spacer.
6. An overlapping type piezoelectric stator according to claim 1,
wherein said piezoelectric elements are arranged circularly.
7. An overlapping type piezoelectric stator according to claim 1,
wherein at least one of said electrodes of said surface and back of
each piezoelectric element has a skid at an end opposite to an end
fixed on said foundation.
8. An overlapping type piezoelectric stator according to claim 1,
wherein, in each electrode of each piezoelectric element, a ceiling
plate is attached to an end opposite to an end fixed on said
foundation.
9. An overlapping type piezoelectric stator according to claim 1,
wherein, even when said foundation is curved, a plurality of said
piezoelectric elements are pressed down by at least one guide rail
arranged along an extension direction, by fixing both sides of said
guide rail on said foundation by attachment of said guide rail.
10. A multi-degree-of-freedom overlapping type piezoelectric stator
comprising: a plurality of said overlapping type piezoelectric
stators according to claim 5, wherein a first overlapping type
piezoelectric stator of said overlapping type piezoelectric stators
includes piezoelectric elements which are arranged circularly,
wherein a plurality of second overlapping type piezoelectric
stators of said overlapping piezoelectric stator each includes
piezoelectric elements which are arranged linearly, wherein said
first overlapping type piezoelectric stator and said second
overlapping type piezoelectric stators are arranged on a plane,
said second overlapping type piezoelectric stators surround said
first overlapping type piezoelectric stator, and wherein said first
overlapping type piezoelectric stator and said second overlapping
type piezoelectric stators operate independently.
11. A multi-degree-of-freedom overlapping type piezoelectric stator
according to claim 10, wherein a convex and a concave are used
instead of said plane.
12. An overlapping type piezoelectric actuator comprising: a
multi-degree-of-freedom overlapping type piezoelectric stator
according to claim 10 and at least one drive device, wherein a
slider touching said piezoelectric elements of each of said
overlapping type piezoelectric stators moves by said drive device
generating a saw-tooth wave as said voltage.
13. An overlapping type piezoelectric actuator according to claim
12, wherein a contact surface of said slider touching said
piezoelectric elements of each of said overlapping type
piezoelectric stators is trenched, or projections are attached to a
contact surface.
14. An overlapping type piezoelectric actuator comprising: a
plurality of overlapping type piezoelectric stators according to
claim 5; and a plurality of drive devices, wherein said overlapping
type piezoelectric stators surround a spherical rotor, and said
drive devices generate a saw-tooth wave as said voltage, and
wherein said spherical rotor touching said piezoelectric elements
of said overlapping type piezoelectric stators rotates with multi
degrees of freedom.
15. An overlapping type piezoelectric actuator drive method for an
overlapping type piezoelectric actuator according to claim 12,
wherein one of said at least one drive device applies a same
voltage to all overlapping type piezoelectric stators.
16. An overlapping type piezoelectric actuator drive method for an
overlapping type piezoelectric actuator according to claim 12,
wherein all overlapping type piezoelectric stators are classified
into a same number of sets as a number of said at least one drive
device, each of said at least one drive device generates one of
said voltages whose phases are different from each other, and each
drive device applies a voltage to one of a set of overlapping type
piezoelectric stators which are different from each other.
17. An overlapping type piezoelectric actuator drive method for an
overlapping type piezoelectric actuator according to claim 12,
wherein at least one drive device applies said voltage to at least
one set of overlapping type piezoelectric stators by classifying
all overlapping type piezoelectric stators into a plurality of
sets, attaching a switch to each of said drive devices, and
selecting at least one set of overlapping type piezoelectric
stators by said switch.
18. An overlapping type piezoelectric actuator according to claim
12, wherein said piezoelectric elements of at least two overlapping
type piezoelectric stators overlap in a same direction.
19. An overlapping type piezoelectric actuator according to claim
12, wherein said piezoelectric elements of at least two overlapping
type piezoelectric stators overlap in an opposite direction.
20. An overlapping type piezoelectric actuator according to claim
12, wherein for two of said overlapping type piezoelectric stators,
and one or two drive devices, said slider moves between
piezoelectric elements of said two overlapping type piezoelectric
stators, by arranging said piezoelectric elements of said two
overlapping type piezoelectric stators face to face.
Description
FIELD OF THE INVENTION
The present invention relates to a piezoelectric actuator using
some piezoelectric elements formed in the plate or the thin film,
which transfers an object in terms of friction power and inertia by
arranging their extension directions on a foundation as they
overlap, where one end of each of them is fixed to the foundation
and another end is elongated and shrinked in the extension
direction.
BACKGROUND OF THE INVENTION
Since a piezoelectric motor (Published Unexamined Japanese Patent
Application No. S52-29192) directly converting flexible movement of
a piezoelectric element into impelling force of a slider and a
rotor was developed, many ultrasonic actuators generating bending
wave of a stator (for example, refer to Published Unexamined
Japanese Patent Application No. S59-96881, Published Unexamined
Japanese Patent Application No. S60-174078) have been developed,
mainly using flexible movement of the piezoelectric element pasted
up on the stator. Some multi-degree-of-freedom ultrasonic motor
rotating a spherical rotor by some stators (refer to Published
Unexamined Japanese Patent Application No. S62-228392, Published
Unexamined Japanese Patent Application No. H9-34409, Published
Unexamined Japanese Patent Application No. H11-18459) also have
been developed. The ultrasonic actuators, however, have three major
problems. The first is the low conversion efficiency of energy
because flexible movement of the piezoelectric element must convert
into the bending wave after converting it into vibration in the
direction of polarization. The second is the low transfer
efficiency of the friction power because a contact area between a
stator and a slider or a rotor is small. The third is a complex
drive device because sine waves with at least two phases are
required for driving the ultrasonic actuators. Although an
ultrasonic actuator possible to be drived by a single-phase wave is
also developed, because of a good structure of a stator (a
principle of operation of ultrasonic actuator, [online]. Seiko
Instruments Inc., 2000. [retrieved on 2000 Jul. 30]. Retrieved from
the Internet: <URL:http://www.sii.co.jp/wd/new_page.sub.--
4.htm>), the stator must be processed according to arrangement
of piezoelectric elements. Moreover, this actuator is not suitable
for applications where high torque is desired, because a contact
area between a stator and a slider or a rotor is extremely
small.
In addition, as a method converting flexible movement of a
piezoelectric element into linear movement, piezoelectric impact
mechanism directly generating friction power from the flexible
movement of the piezoelectric element (for example, refer to
Higuchi, Watanabe, Kudoh, "Precise Positioner Utilizing Rapid
Deformations of a Piezoelectric Element", JSPE, Vol. 54, No. 11,
pp.2107-2112, 1988; Higuchi, Yamagata, "Precise Positioning
Mechanism Utilizing Rapid Deformations of Piezoelectric Elements
(2nd Report) --Motion Characteristics with Enhanced Friction--",
JSPE, Vol.58, No.10, pp.1759-1764, 1992) has also been developed.
The piezoelectric impact mechanism can avoid the above third
problem because it can move an object to any of two directions by
applying a single-phase saw-tooth wave to the piezoelectric
element. Furthermore, since the piezoelectric impact mechanism
employs the flexible movement of the piezoelectric element as
impelling force of a moving object, it is useful for solving the
above first problem, but it has three more problems as follows:
First, the piezoelectric element must be the hard quality of the
cylindrical material because it must connect two objects and flip
them off according to the flexible movement. Therefore, a material
usable practically for the piezoelectric element is restricted to
piezoelectric ceramics like PZT (Lead Zirconate Titanate). Second,
many piezoelectric elements must be stacked, and moreover high
voltage must be applied to them because they must vibrate two heavy
objects, maintaining their intensity. Third, stress generated by
the piezoelectric elements is applied to two objects in the
opposite directions, respectively, because the piezoelectric
elements move with the two objects, repeating their flexible
movement. As a result, the stress of both objects are offset, and
then the conversion efficiency of energy becomes low. Thus, the
piezoelectric impact mechanism can not be used instead of the
conventional actuators, although it is suitable for application
desiring minute movement like a micromachine.
Now, as understanding from the piezoelectric impact mechanism, some
piezoelectric elements can generate big stress collectively, by
stacking them. Moreover, the stress can flip off an object in a
case of using a single-phase saw-tooth wave. The hard piezoelectric
elements are used to flip off the object in the piezoelectric
impact mechanism, but the piezoelectric elements can be soft if
they can flip off the object without applying their stress to the
object directly. That is, any of a plate and a thin film are
sufficient as the piezoelectric elements. As a result, voltage
applied to the piezoelectric elements can be made low. Moreover,
the stress can be converted into impelling force of the object
efficiently, because the stress can move the object in one
direction if the piezoelectric elements do not move with the
object.
Considering these facts, suppose that a plurality of piezoelectric
elements formed in the plate or the thin film are arranged as they
overlap, the end of each piezoelectric element is fixed on a
foundation, and a saw-tooth wave is applied to them. An object can
be flipped off by friction power generated between the
piezoelectric elements and itself. Thus, the above first and third
problems come to be solved. In addition, the friction between the
piezoelectric elements and the object increase by attaching
unevenness to contact surface between them. Thus, the above second
problem comes to be solved.
By the way, many kinds of small actuators have been recently
developed besides an ultrasonic motor. A vibrator is listed as a
major application using these actuators (for example, refer to
Published Unexamined Japanese Patent Application No. H5-168195,
Published Unexamined Japanese Patent Application No. H10-336983).
However, when vibrators using a coil are carried in a cellular
phone with the remarkable formation of the small lightweight, and
so on, they have some problems because of their weight, thickness,
and moreover generating lines of magnetic force. For another
example, a table moving an object has been developed, where some
actuators using a piezoelectric element and a thermoelectric
element are arranged on a plane (for example, refer to Karl, F.
Bohringer, Bruce R. Donald, Noel C. MacDonald, "Computational
methods for design and control of MEMS Micromanipulator Arrays",
IEEE Computational Science & Engineering, pp. 17-29,
January-March, 1997). However, the piezoelectric element and the
thermoelectric element can not generate a force enough for moving a
small object around us because they are researched as a
micromachine.
Considering these facts, a small lightweight vibrator comes to be
made by manufacturing an actuator using a thin and light
piezoelectric element. In addition, some actuators, in which many
piezoelectric elements are overlapping, comes to move a small
object around us, by arranging them on a plate.
In the present invention described in claims, flexible movement of
a plurality of piezoelectric elements are directly converted into
movement of a stator and a rotor, by arranging the piezoelectric
elements formed in the plate or the thin film as they overlap, and
moreover, fixing the end of each piezoelectric element on a
foundation. In addition, unevenness which makes to increase
friction power between the piezoelectric element and the stator or
the rotor is developed. Furthermore, a drive device is simplified
by applying a saw-tooth wave to the piezoelectric element.
SUMMARY OF THE INVENTION
The invention described in claim 1 is an overlapping type
piezoelectric stator comprising a plurality of piezoelectric
elements and a foundation, wherein each said piezoelectric element
is formed in a plate or a thin film; and a surface and a back of
each said piezoelectric element are equipped with an electrode,
respectively; wherein, in attaching all said piezoelectric elements
to said foundation, all said piezoelectric elements are arranged
along said foundation in turn; all said piezoelectric elements are
overlapping; at least one of said electrodes on both sides of each
said piezoelectric element touches said electrode of an adjacent
said piezoelectric element; and an end of each said piezoelectric
element is fixed to said foundation; wherein voltage is applied to
said electrodes in a head and an end of all said piezoelectric
elements arranged in turn. Suppose that said piezoelectric element
is elongated in the direction of a plane of said plate and said
thin film, polarization is carried out in the thickness direction
of said plate and said thin film. A surface electrode and a back
electrode are pasted up on said surface and said back of said
piezoelectric element, or said electrodes are deposited. By using
conductive polimer, in particular, not only friction coefficient of
said piezoelectric element becomes large, but also said surface
electrode and said back electrode can pass electricity easily even
though said piezoelectric element was curved. Form of said
foundation may be not only like a line and a polygonal line but
also like a curve. In attaching said piezoelectric elements to said
foundation, first, extension directions of all said piezoelectric
elements are arranged. Next, all said piezoelectric elements are
arranged along said foundation as said end of each said
piezoelectric element crossing said extension direction touches
said foundation. Next, all said piezoelectric elements overlap in
turn. Finally, said end of each said piezoelectric element is fixed
on said foundation by adhesives, pins and so on. Suppose that said
piezoelectric elements overlap, said surface electrode and said
back electrode of each said piezoelectric element touch said
surface electrode and said back electrode of the adjacent said
piezoelectric elements, respectively. Suppose therefore that said
voltage is applied to said surface electrode in said head and said
back electrode in said end, all said piezoelectric elements are
elongated and shrinked in the said extension direction, and then
generate stress. Similarly, suppose that said voltage is applied to
said back electrode in said head and said surface electrode in said
end, all said piezoelectric elements are elongated and shrinked in
the said extension direction, and then generate stress. The present
invention thus can apply friction power to an object touching said
piezoelectric elements. Suppose that a saw-tooth wave is used as
said voltage, stresses of said piezoelectric element in extending
and constracting are different. The present invention therefore can
move said object by the difference of said friction powers. Since
the present invention can generate said big stress of said
piezoelectric element even though piezoelectric charge coefficient
of said piezoelectric element is small, and it operates in a single
phase, many problems on a piezoelectric actuator are solved very
well.
The invention described in claim 2 is an overlapping type
piezoelectric stator comprising a plurality of piezoelectric
elements and a foundation, wherein each said piezoelectric element
is formed in a thin film; a surface and a back of each said
piezoelectric element are equipped with an electrode, respectively;
and each said piezoelectric element is folded up in a right-angled
direction to extension direction; wherein, in each of all said
piezoelectric elements folded up, predetermined parts of both sides
are insulated by insulators, wherein, in attaching all said
piezoelectric elements to said foundation, all said piezoelectric
elements are arranged along said foundation in turn; all said
piezoelectric elements are overlapping; at least one of said
electrodes on both sides of each said piezoelectric element touches
said electrode of an adjacent said piezoelectric element; and an
end of each said piezoelectric element is fixed to said foundation;
wherein voltage is applied to said electrodes of at least one of
all said piezoelectric elements arranged in turn. Suppose that said
piezoelectric element is elongated in the direction of a plane of
said thin film, polarization is carried out in the thickness
direction of said thin film. A surface electrode and a back
electrode are pasted up on said surface and said back of said
piezoelectric element, or said electrodes are deposited. By using
conductive polimer, in particular, not only friction coefficient of
said piezoelectric element becomes large, but also said surface
electrode and said back electrode can pass electricity easily even
though said piezoelectric element was curved. Said thin film of
said piezoelectric element is folded up in the said right-angled
direction to the said extension direction as it becomes sigmoid.
Insulated paint and insulated materials are used as said insulator,
and in parallel to the said extension direction, said insulated
paint is applied to said predetermined parts in said both sides of
said piezoelectric element folded up, or said insulated materials
are attached to it. Therefore, when said piezoelectric elements
folded up overlap, said insulated paint and said insulated
materials can prevent making a short circuit between said surface
electrode and said back electrode of said piezoelectric element.
Form of said foundation may be not only like a line and a polygonal
line but also like a curve. In attaching said piezoelectric
elements to said foundation, first, extension directions of all
said piezoelectric elements are arranged. Next, all said
piezoelectric elements are arranged along said foundation as said
end of each said piezoelectric element crossing said extension
direction touches said foundation. Next, all said piezoelectric
elements overlap in turn. Finally, said end of each said
piezoelectric element is fixed on said foundation by adhesives,
pins and so on. Suppose that said piezoelectric elements overlap,
said surface electrodes and said back electrodes of two adjacent
said piezoelectric elements touch the same side, respectively.
Suppose therefore that said voltage is applied to said surface
electrode and said back electrode of any said piezoelectric
element, all said piezoelectric elements are elongated and shrinked
in the said extension direction, and then generate stress. Of
course, even though said voltage is applied to said surface
electrode of one of said piezoelectric elements and said back
electrode of another said piezoelectric element, all said
piezoelectric elements are elongated and shrinked in the said
extension direction, and then generate stress. The present
invention thus can apply friction power to an object touching said
piezoelectric elements. Suppose that a saw-tooth wave is used as
said voltage, stresses of said piezoelectric element in extending
and constracting are different. The present invention therefore can
move said object by the difference of said friction powers. Since
the present invention can generate said big stress of said
piezoelectric element even though piezoelectric charge coefficient
of said piezoelectric element is small, and it operates in a single
phase, many problems on a piezoelectric actuator are solved very
well.
The invention described in claim 3 is an overlapping type
piezoelectric stator comprising a plurality of piezoelectric
elements and a foundation, wherein each said piezoelectric element
is formed in a thin film; and a surface and a back of each said
piezoelectric element are equipped with an electrode, respectively;
wherein, in each of all said piezoelectric elements folded up,
predetermined parts of both sides are insulated by insulators; a
part of said electrode on said back and a part of said electrode on
said surface are covered by at least one tunica electrode; and a
part of said electrode on said back and a part of said surface are
covered by at least one said tunica electrode; wherein, in
attaching all said piezoelectric elements to said foundation, all
said piezoelectric elements are arranged along said foundation in
turn; all said piezoelectric elements are overlapping; at least one
of said electrodes on both sides of each said piezoelectric element
touches said electrode of an adjacent said piezoelectric element
via a plurality of said tunica electrodes; and an end of each said
piezoelectric element is fixed to said foundation; wherein voltage
is applied to said electrodes of at least one of all said
piezoelectric elements arranged in turn. Suppose that said
piezoelectric element is elongated in the direction of a plane of
said thin film, polarization is carried out in the thickness
direction of said thin film. A surface electrode and a back
electrode are pasted up on said surface and said back of said
piezoelectric element, or said electrodes are deposited. By using
conductive polimer, in particular, not only friction coefficient of
said piezoelectric element becomes large, but also said surface
electrode and said back electrode can pass electricity easily even
though said piezoelectric element was curved. Insulated paint and
insulated materials are used as said insulator, and said insulated
paint is applied to said part in said both sides of said
piezoelectric element or said insulated materials are attached to
it. Therefore, at least one said tunica electrode can prevent
making a short circuit between said surface electrode and said back
electrode of said piezoelectric element. At least one said tunica
electrode is stuck to said surface electrode by pressure, or pasted
up to said surface electrode by conductive adhesives. Moreover, it
is stuck to said back electrode insulated, or pasted up to said
back electrode by adhesives. Similarly, at least one said tunica
electrode is stuck to said back electrode by pressure, or pasted up
to said back electrode by conductive adhesives. Moreover, it is
stuck to said surface electrode insulated, or pasted up to said
surface electrode by adhesives. Form of said foundation may be not
only like a line and a polygonal line but also like a curve. In
attaching said piezoelectric elements to said foundation, first,
extension directions of all said piezoelectric elements are
arranged. Next, all said piezoelectric elements are arranged along
said foundation as said end of each said piezoelectric element
crossing said extension direction touches said foundation. Next,
all said piezoelectric elements overlap in turn. Finally, said end
of each said piezoelectric element is fixed on said foundation by
adhesives, pins and so on. Suppose that said piezoelectric elements
overlap, said surface electrodes and said back electrodes of two
adjacent said piezoelectric elements touch the same side,
respectively, via a plurality of said tunica electrodes. Suppose
therefore that said voltage is applied to said surface electrode
and said back electrode of any said piezoelectric element, all said
piezoelectric elements are elongated and shrinked in the said
extension direction, and then generate stress. Of course, even
though said voltage is applied to said surface electrode of one of
said piezoelectric elements and said back electrode of another said
piezoelectric element, all said piezoelectric elements are
elongated and shrinked in the said extension direction, and then
generate stress. The present invention thus can apply friction
power to an object touching said piezoelectric elements. Suppose
that a saw-tooth wave is used as said voltage, stresses of said
piezoelectric element in extending and constracting are different.
The present invention therefore can move said object by the
difference of said friction powers. Since the present invention can
generate said big stress of said piezoelectric element even though
piezoelectric charge coefficient of said piezoelectric element is
small, and it operates in a single phase, many problems on a
piezoelectric actuator are solved very well.
The invention described in claim 4 is an overlapping type
piezoelectric stator according to any one of claim 1, 2 or 3,
wherein, for each of a plurality of said piezoelectric elements,
resistance is reduced by connecting said surface electrode, said
back electrode and said tunica electrode of said piezoelectric
element with said back electrode, said surface electrode and said
tunica electrode of adjacent said piezoelectric elements,
respectively, via at least one lead or at least one conductive
sponge. In the present invention, said lead and said conductive
sponge are pasted up or stuck by pressure to said surface
electrodes, said back electrodes and said tunica electrodes of the
adjacent said piezoelectric elements each other, respectively.
Since at least one said lead and at least one said conductive
sponge can be transformed easily, a plurality of said piezoelectric
elements are not transformed even though said foundation was
transformed. Since the present invention can make said resistance
between said surface electrode and said back electrode of the
adjacent said piezoelectric elements smaller than contact
resistance, many problems on a piezoelectric actuator are solved
very well.
The invention described in claim 5 is an overlapping type
piezoelectric stator according to claim 4, wherein said foundation
can be transformed. In the present invention, said foundation can
be transformed in the shape of a line, a polygonal line and a curve
like a curved rule. Since a crevice between said surface electrode
and said back electrode of the adjacent said piezoelectric elements
is not fixed, a plurality of said piezoelectric elements do not
bend and break. Since the present invention can make said
foundation transform according to applications, many problems on a
piezoelectric actuator are solved very well.
The invention described in claim 6 is an overlapping type
piezoelectric stator according to claim 1, 4 or 5, wherein all said
piezoelectric elements are arranged circularly; a spacer is
inserted between said electrodes in said head and said end of said
piezoelectric elements of said overlapping type piezoelectric
stator; two sides of said spacer touching said electrode in said
head and said electrode in said end are equipped with electrodes,
respectively; and said voltage is applied to said electrode in said
head and said electrode in said end, via two said electrodes of
said spacer. Said piezoelectric elements are arranged circularly,
and a circular rotor and a spherical rotor, which are a slider,
touch said piezoelectric elements. Said spacer consists of
insulators, and it is put between said electrodes for said spacer.
A saw-tooth wave, which is said voltage, is applied to said
piezoelectric elements via two said electrodes of said spacer.
Since the present invention can rotate said circular rotor and said
spherical rotor, many problems on a piezoelectric motor are solved
very well.
The invention described in claim 7 is an overlapping type
piezoelectric stator according to any one of claims 2 to 5, wherein
all said piezoelectric elements are arranged circularly. Said
piezoelectric elements are arranged circularly, and a circular
rotor and a spherical rotor, which are a slider, touch said
piezoelectric elements. A saw-tooth wave, which is said voltage, is
applied to all said piezoelectric elements via two said electrodes
of at least one said piezoelectric element. Since the present
invention can rotate said circular rotor and said spherical rotor,
many problems on a piezoelectric motor are solved very well.
The invention described in claim 8 is an overlapping type
piezoelectric stator according to any one of claims 1 to 7, wherein
at least one of said electrodes of at least one said piezoelectric
element has skid at an end opposite to said end fixed on said
foundation. The present invention can make friction power to an
object touching said surface electrodes and said back electrodes of
said piezoelectric elements large, by pasting up said skid whose
friction coefficient is large to said opposite ends of said surface
electrodes and said back electrodes of said piezoelectric elements.
Section of said skid is a polygon or a half-ellipse. In addition,
said skid is pasted up to a part of said surface electrodes and
said back electrodes of said piezoelectric elements, which touches
said object, as it becomes right-angled to the extension direction
of said piezoelectric element. Since the present invention can
generate large friction power even though friction coefficient of
said surface electrode and said back electrode of said
piezoelectric element is small, many problems on materials of said
surface electrode and said back electrode are solved very well.
The invention described in claim 9 is an overlapping type
piezoelectric stator according to any one of claims 1 to 7,
wherein, in each said electrode of said piezoelectric elements, a
ceiling plate is attached to an end opposite to said end fixed on
said foundation. The present invention can change friction
coefficient between said surface electrode and said back electrode
of said piezoelectric element and an object, by pasting up said
ceiling plate to said opposite end of said surface electrodes and
said back electrodes of said piezoelectric elements. Moreover, it
can protect that said object enters a crevice between said
piezoelectric element and the adjacent said piezoelectric element.
Said ceiling plate is an insulator like a plastic or metal by which
the leather film was carried out. Said ceiling plate is even or
bent. When said ceiling plate is folded up, in particular, an area
at which said ceiling plate touches to said object is small.
Friction power applied to said object therefore becomes small.
Furthremore, even though said foundation is formed like said
polygonal line and said curve, said ceiling plate does not bend.
Since the present invention can prevent wear of said surface
electrode and said back electrode of said piezoelectric element,
many problems on materials of said surface electrode and said back
electrode are solved very well.
The invention described in claim 10 is an overlapping type
piezoelectric stator according to any one of claims 1 to 9,
wherein, even in a case that said foundation is curved, a plurality
of said piezoelectric elements are pressed down by at least one
guide rail arranged along said extension direction, by fixing both
sides of said guide rail on said foundation by attachment of said
guide rail. Said guide rail is made from a plate and a bar made by
soft insulators like a plastic or metal by which the leather film
was carried out. Since said both ends of said guide rail are fixed
on said foundation by said attachment for said guide rail, said
guide rail presses down said piezoelectric elements to said
foundation, by curving said guide rail together. Therefore, a
surface electrode and a back electrode of said piezoelectric
element can make contact resistance between said back electrode and
said surface electrode of the adjacent piezoelectric elements
small, respectively. Of course, in a case that said piezoelectric
element is folded up, or that said piezoelectric element is covered
by said tunica electrode, a surface electrode and a back electrode
of said piezoelectric element can make contact resistance between
said surface electrode and said back electrode of the adjacent
piezoelectric elements small, respectively. Moreover, said guide
rail can prevent that said open ends of said piezoelectric elements
separate from said foundation because said foundation curves. Since
said overlapping type piezoelectric stator can move a curved slider
in the present invention, many problems on form of said slider are
solved very well.
The invention described in claim 11 is a multi-degree-of-freedom
overlapping type piezoelectric stator comprising: a first
overlapping type piezoelectric stator according to any one of
claims 6 to 10, all of whose said piezoelectric elements are
arranged circularly; and a plurality of second overlapping type
piezoelectric stators according to at least one of claims 1 to 5, 8
to 10, all of whose said piezoelectric elements are arranged
linearly; wherein first said overlapping type piezoelectric stator
and second said overlapping type piezoelectric stators are arranged
on a plane, second said overlapping type piezoelectric stators
surround first said overlapping type piezoelectric stator; first
said overlapping type piezoelectric stator and all of second said
overlapping type piezoelectric stators operate independently. On
said plane, suppose that second said overlapping type piezoelectric
stator like a line is arranged as forming a square in top view of
said plane around first said overlapping type piezoelectric stator
like a circle. The present invention can move an object vertically
and horizontally, and rotate said object. Since the present
invention can realize a multi-degree-of-freedom overlapping type
piezoelectric actuator with easy structure, and moreover said
multi-degree-of-freedom overlapping type piezoelectric actuator is
controlled very simply, many problems on said
multi-degree-of-freedom overlapping type piezoelectric actuator are
solved very well.
The invention described in claim 12 is a multi-degree-of-freedom
overlapping type piezoelectric stator according to claim 11,
wherein a convex and a concave are used instead of said plane. On
said concave or said convex whose curvature is constant, suppose
that second said overlapping type piezoelectric stator like an arc
is arranged as forming a square in top view of said concave and
said convex around first said overlapping type piezoelectric stator
like a circle. The present invention can rotate said object whose
contact area touches said concave and said convex on three axes. In
addition, suppose that at least one point of said contact area of
said object touches at least one said piezoelectric element. Said
object can be moved in any direction, even though curvature of said
concave or said convex is not constant. Since the present invention
can realize a multi-degree-of-freedom overlapping type
piezoelectric actuator with easy structure, and moreover said
multi-degree-of-freedom overlapping type piezoelectric actuator is
controlled very simply, many problems on said
multi-degree-of-freedom overlapping type piezoelectric actuator are
solved very well.
The invention described in claim 13 is an overlapping type
piezoelectric actuator comprising at least one overlapping type
piezoelectric stator or multi-degree-of-freedom overlapping type
piezoelectric stator according to any one of claims 1 to 12, and at
least one drive device, wherein a slider touching said
piezoelectric elements of said overlapping type piezoelectric
stator moves, by said drive device's generating a saw-tooth wave as
said voltage. Suppose that said drive device applies said saw-tooth
wave to said piezoelectric element, said piezoelectric element
generates different stresses during being elongated and shrinked.
That is, in a case that said piezoelectric element is elongated and
shrinked, friction powers that said piezoelectric element applies
to said slider are also different. The present invention can move
said slider because of difference of said friction powers. Of
course, suppose that said piezoelectric elements apply said
friction powers whose directions are opposite each other to at
least two points of said slider, said slider can also rotate. In a
case that said slider which is like a circle rotates on only one
axis, said slider becomes a circular rotor. Since said
piezoelectric element overlaps in the present invention, length of
an overlapped part is appended to length of said piezoelectric
element in the extension direction. Therefore, since the present
invention can generate big said stress of said piezoelectric
element even though piezoelectric charge coefficient of said
piezoelectric element is small, and operate with a single phase,
many problems on a piezoelectric actuator are solved very well.
The invention described in claim 14 is an overlapping type
piezoelectric actuator according to claim 13, wherein a contact
surface of said slider touching said piezoelectric elements of said
overlapping type piezoelectric stator is trenched, or projections
are attached to said contact surface. The present invention can
make friction power applied to said contact area large, by
trenching in the shape of a V charactor at said contact area of
said slider or attaching polygonal projections to it. Since the
present invention can generate large said friction power even
though friction coefficients of said surface electrode and said
back electrode of said piezoelectric element are small, many
problems on materials of said surface electrode and said back
electrode are solved very well.
The invention described in claim 15 is an overlapping type
piezoelectric actuator comprising a plurality of overlapping type
piezoelectric stators according to any one of claims 6 to 10, and a
plurality of drive devices, wherein all said overlapping type
piezoelectric stators surround said spherical rotor; and said drive
devices generate a saw-tooth wave as said voltage, wherein said
spherical rotor touching said piezoelectric elements of said
overlapping type piezoelectric stators rotates with multi degrees
of freedom. Suppose that said spherical rotor is put between two
opposite said overlapping type piezoelectric stators, said
spherical rotor can rotate on an axis. Suppose that said spherical
rotor is surrounded by four said overlapping type piezoelectric
stators in the shape of a squre, said spherical rotor can rotate on
two axes. Suppose that said spherical rotor is put between six said
overlapping type piezoelectric stators, intersecting from three
directions perpendicularly, said spherical rotor can rotate on
three axes. Suppose that said spherical rotor is surrounded by
three said overlapping type piezoelectric stators in the shape of a
triangle, said spherical rotor can rotate on three axes. Since the
present invention can realize a multi-degree-of-freedom motor with
easy structure, many problems on said multi-degree-of-freedom motor
are solved very well.
The invention described in claim 16 is an overlapping type
piezoelectric actuator drive method for an overlapping type
piezoelectric actuator according to claim 13 or 14, wherein one
said drive device applies same said voltage to all said overlapping
type piezoelectric stators. Said overlapping type piezoelectric
stators are prepared in the present invention. Since said drive
device applies the same said saw-tooth wave to all said overlapping
type piezoelectric stators, all said piezoelectric elements
generate stresses simultaneously. Since the present invention can
apply large friction power to said slider, by adding together said
stresses generated by all said piezoelectric elements, many
problems on said friction power of said overlapping type stator are
solved very well.
The invention described in claim 17 is an overlapping type
piezoelectric actuator drive method for an overlapping type
piezoelectric actuator according to claim 13 or 14, wherein all
said overlapping type piezoelectric stators are classified into a
same number of sets as a number of said drive devices; each said
drive device generates one of said voltages whose phases are
different each other; each said drive device applies said voltage
to one of said sets of said overlapping type piezoelectric stators
which are different each other. Said overlapping type piezoelectric
stators are prepared in the present invention. Suppose that each
said drive device generates a saw-tooth wave, and phases of these
said saw-tooth waves have shifted at a fixed rate, all said
overlapping type piezoelectric stators generate said stress in turn
without pausing. Since the present invention can apply uniformly
and effectively friction power to said slider touching said
piezoelectric elements, many problems on said friction power of
said overlapping type stator are solved very well.
The invention described in claim 18 is an overlapping type
piezoelectric actuator drive method for an overlapping type
piezoelectric actuator according to claim 13 or 14, wherein at
least one said drive device applies said voltage to at least one
set of said overlapping type piezoelectric stators by classifying
all said overlapping type piezoelectric stators into a plurality of
sets; attaching a switch to each of all said drive devices; and
selecting at least one set of said overlapping type piezoelectric
stators by said switch. Said overlapping type piezoelectric stators
are prepared in the present invention. Moreover, said switches
whose number is the same as the number of said drive devices are
prepared in the present invention, and they are connected one to
one. Suppose that said drive devices generate said saw-tooth waves,
and these said saw-tooth waves are applied to at least one set of
said overlapping type piezoelectric stators by said switches, the
present invention can apply friction power to only a part of said
slider touching said piezoelectric elements. In addition, the
present invention can apply said saw-tooth waves to only said
piezoelectric elements touching said slider. The present invention
therefore can reduce electric power consumed by said overlapping
type piezoelectric stator. Thus, many problems on said friction
power and said electric power of said overlapping type stator are
solved very well.
The invention described in claim 19 is an overlapping type
piezoelectric actuator according to claim 13 or 14, wherein said
piezoelectric elements of at least two said overlapping type
piezoelectric stators overlap in a same direction. Said overlapping
type piezoelectric stators are prepared in the present invention.
Suppose that all said piezoelectric elements of at least two said
overlapping type piezoelectric stators are arranged in the same
said direction of their overlapping, the present invention can
arrange the direction of stresses generated by said piezoelectric
elements. Since the present invention can apply large friction
power to said slider, by uniting directions of said stresses
generated by said piezoelectric elements, many problems on said
friction power of said overlapping type stator are solved very
well.
The invention described in claim 20 is an overlapping type
piezoelectric actuator according to claim 13 or 14, wherein said
piezoelectric elements of at least two said overlapping type
piezoelectric stators overlap in an opposite direction. Said
overlapping type piezoelectric stators are prepared in the present
invention. Suppose that all said piezoelectric elements of at least
two said overlapping type piezoelectric stators are arranged in
said directions of their overlapping opposite each other, the
present invention can arrange stresses generated by said
piezoelectric elements in two said directions of their overlapping.
Since the present invention can apply uniform friction power to
said slider, in spite of said directions of said stresses generated
by said piezoelectric elements, many problems on said friction
power of said overlapping type stator are solved very well.
The invention described in claim 21 is an overlapping type
piezoelectric actuator according to claim 13 or 14 comprising two
said overlapping type piezoelectric stators, and one or two said
drive devices, wherein said slider moves between said piezoelectric
elements of two said overlapping type piezoelectric stators, by
arranging said piezoelectric elements of two said overlapping type
piezoelectric stators face to face. In the present invention,
suppose that said slider is put between two said overlapping type
piezoelectric stators, said slider receives friction power from
said piezoelectric elements of these two said overlapping type
piezoelectric stators. Moreover, said piezoelectric elements can
apply easily said friction power to said slider. Of course, it is
similar even though said slider is a circular rotor. Said extension
directions of said piezoelectric elements of two said overlapping
type piezoelectric stators may be the same, opposite or make any
angle. In a case that said extension directions of said
piezoelectric elements of two said overlapping type piezoelectric
stators are the same, suppose that these said piezoelectric
elements of said overlapping type piezoelectric stators input the
same said saw-tooth wave from said drive device. Said slider
receives said friction power in the same direction from these said
piezoelectric elements of said overlapping type piezoelectric
stators. In a case that said extension directions of said
piezoelectric elements of two said overlapping type piezoelectric
stators are opposite each other, suppose that said piezoelectric
elements of these said overlapping type piezoelectric stators input
the opposite said saw-tooth waves, which are positive and negative,
from said drive device. Said slider receives said friction power in
the same direction from these said piezoelectric elements of said
overlapping type piezoelectric stators. Here, said extension
directions of said piezoelectric elements of these said overlapping
type piezoelectric stators are opposite each other. If performance
of these said overlapping type piezoelectric stators is the same,
said slider can move uniformly in any direction. In a case that
said extension directions of said piezoelectric elements of two
said overlapping type piezoelectric stators make a right angle,
suppose that said piezoelectric elements of these said overlapping
type piezoelectric stators input two different said saw-tooth waves
from two said drive device, respectively. Said slider can move
horizontally in any direction, between these said piezoelectric
elements of said overlapping type piezoelectric stators. In the
present invention, since said slider receives said friction power
from said piezoelectric elements of two said overlapping type
piezoelectric stators, said slider can move smoothly. Thus, many
problems on movement of said slider are solved very well.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is an explanation view for a piezoelectric element extended
in one axis.
FIG. 2 is an explanation view in a case that a piezoelectric
element put between two electrodes is fixed by adhesives on a
foundation.
FIG. 3 is an explanation view for a stator which has some
piezoelectric elements turning to the same direction are arranged
on a foundation as they overlap.
FIG. 4 is an explanation view for two saw-tooth waves generated by
a drive device.
FIG. 5 is an explanation view in a case that a stator moves an
object to right-hand side.
FIG. 6 is an explanation view for a stator which has some
piezoelectric elements turning to the same direction are arranged
on a foundation as their surface electrodes are overlapped
horizontally.
FIG. 7 is an explanation view in a case that a friction coefficient
between a surface electrode of a piezoelectric element and a slider
is large.
FIG. 8 is an explanation view in a case that a friction coefficient
between a surface electrode of a piezoelectric element and a slider
is small.
FIG. 9 is an explanation view for a piezoelectric element
sigmoidally folded up.
FIG. 10 is an explanation view for a stator whose piezoelectric
elements sigmoidally folded up are arranged on a founcation,
turning to the same direction, as their surface electrodes are
overlapped horizontally.
FIG. 11 is an explanation view in a case that a surface electrode
and a back electrode are covered, crossing both sides of a
piezoelectric element.
FIG. 12 is an explanation view for a stator, some surface
electrodes and back electrodes of whose piezoelectric elements
turning to the same direction are connected by conductive
sponges.
FIG. 13 is an explanation view for a stator whose piezoelectric
elements are arranged circularly.
FIG. 14 is an explanation view in a case that a stator rotates a
circular rotor.
FIG. 15 is an explanation view for a stator whose sigmoid
piezoelectric elements are arranged circularly.
FIG. 16 is an explanation view in a case that a stator rotates a
spherical rotor.
FIG. 17 is an explanation view in a case that a spherical rotor are
put between two stators.
FIG. 18 is an explanation view in a case that a spherical rotor are
surrounded by four stators in the shape of a square.
FIG. 19 is an explanation view in a case that a spherical rotor are
surrounded by six stators, intersecting perpendicularly.
FIG. 20 is an explanation view in a case that a spherical rotor are
surrounded by three stators in the shape of a triangle.
FIG. 21 is an explanation view for a stator which can move a
circular rotor vertically and horizontally, and rotate it.
FIG. 22 is an explanation view for a stator which can rotate a
spherical rotor in three degrees of freedom.
FIG. 23 is an explanation view in a case that a stator rotates a
spherical rotor in three degrees of freedom.
FIG. 24 is an explanation view in a case that two stators rotate a
spherical rotor in three degrees of freedom.
FIG. 25 is an explanation view in a case that some skids are
attached in a piezoelectric element.
FIG. 26 is an explanation view in a case that some skids on the
isosceles triangle attached in a piezoelectric element move an
object to right-hand side.
FIG. 27 is an explanation view in a case that some skids on the
right triangle attached in a piezoelectric element move an object
to right-hand side.
FIG. 28 is an explanation view in a case that some skids on the
right triangle attached in a piezoelectric element move an object
with a slot to right-hand side.
FIG. 29 is an explanation view in a case that a ceiling plate is
attached in some piezoelectric elements.
FIG. 30 is an explanation view for an overlapping type
piezoelectric stator with guide rails.
FIG. 31 is an explanation view in a case that an overlapping type
piezoelectric stator with guide rails curves.
FIG. 32 is an explanation view in a case that a slider moves along
an overlapping type piezoelectric stator, which is curving.
FIG. 33 is an explanation view in a case that a drive device gives
the same saw-tooth wave to all stators.
FIG. 34 is an explanation view in a case that two drive device give
the different phases of saw-tooth waves to two set of stators.
FIG. 35 is an explanation view in a case that a drive device gives
the same saw-tooth wave to either of two set of stators.
FIG. 36 is an explanation view in a case that some stators turning
to the same direction are arranged in parallel.
FIG. 37 is an explanation view in a case that some stators turning
to the same direction are arranged in series.
FIG. 38 is an explanation view in a case that some stators turning
to the opposite direction by turns are arranged in parallel.
FIG. 39 is an explanation view in a case that some stators turning
to the opposite direction by turns are arranged in series.
FIG. 40 is an explanation view for a sheet conveyance equipment in
which two overlapping type piezoelectric stators face each other as
a slider is put between them.
FIG. 41 is an explanation view for a sheet conveyance equipment in
which two opposite overlapping type piezoelectric stators are
arranged as their extension directions become opposite.
FIG. 42 is an explanation view for a cylinder whose stators are
rounded in cylinder form.
FIG. 43 is an explanation view for a thin vibrator consisting of an
overlapping type piezoelectric actuator with an arc rotor.
FIG. 44 is an explanation view for a thin vibrator consisting of an
overlapping type piezoelectric actuator in whose circular rotor an
arc weight is attached.
FIG. 45 is an explanation view for a table which can move an object
vertically and horizontally, and rotate it.
FIG. 46 is an explanation view for a three-degree-of-freedom joint
using an overlapping type piezoelectric actuator.
FIG. 47 is an explanation view for a three-degree-of-freedom joint
using an overlapping type piezoelectric actuator, whose spherical
rotor is held by some bearing balls.
FIG. 48 is an explanation view for a three-degree-of-freedom joint
using a cylinder and an overlapping type piezoelectric
actuator.
FIG. 49 is an explanation view for a three-degree-of-freedom joint
using two arc cylinder and an overlapping type piezoelectric
actuator.
FIG. 50 is an explanation view for a three-degree-of-freedom moving
camera using an overlapping type piezoelectric actuator.
FIG. 51 is an explanation view for a three-degree-of-freedom moving
camera using an overlapping type piezoelectric actuator, whose
spherical rotor is held by some bearing balls.
FIG. 52 is an explanation view for a three-degree-of-freedom moving
camera using an overlapping type piezoelectric actuator, whose
spherical rotor is protected by a transparent cover.
FIG. 53 is an explanation view for a three-degree-of-freedom moving
mirror using an overlapping type piezoelectric actuator.
FIG. 54 is an explanation view for a three-degree-of-freedom moving
mirror using an overlapping type piezoelectric actuator, whose
semispherical rotor is held by some bearing balls.
FIG. 55 is an explanation view for a sheet conveyance equipment
which picks out every stacked sheet from a tray.
FIG. 56 is an explanation view for a printing head conveyance
equipment moving a printing head.
DETAILED DESCRIPTION
It is described below about some enforcement forms of an
overlapping type piezoelectric actuator using a stator 11 in this
invention. With reference to the drawings, then, I explain the
enforcement forms.
First, as shown in FIG. 1, the polarization of a piezoelectric
element 1 formed in the plate or the thin film is carried out in
the direction of polarization (refer to an arrow in FIG. 1), by
extending it in the extension direction, along one axis. Since the
piezoelectric element 1 extended along one axis is anisotropic, the
piezoelectric element 1 is elongated in the extension direction and
seldom elongated in the transverse direction when an electric field
is applied to it in the direction opposite to its direction of
polarization. In order to apply the electric field to the
piezoelectric element 1, the piezoelectric element 1 must have two
electrodes in its both sides. When the piezoelectric element 1 is a
piezoelectric ceramic like PZT (Lead Zirconate Titanate), metal can
be stuck by adhesives 5. On the other hand, when the piezoelectric
element 1 is a piezoelectric polymer like PVDF (Polyvinylidene
Fluoride Plastics), metal like aluminum and nickel can be deposited
(for example, KF Piezofilm made by Kureha Chemical Industry Co.,
Ltd.).
Next, in a case that a fixed end 6 of a piezoelectric element 1 is
fixed by adhesives 5 on a foundation 4, as shown in FIG. 2, an open
end 7 facing with the fixed end 6 is elongated and shrinked in the
extension direction if voltage is applied to its surface electrode
2 and back electrode 3. Therefore, the open end 7 can generate
stress proportional to expansion and contraction.
As shown in FIG. 3, then, suppose that some piezoelectric elements
1 overlap on a foundation 4 as domino effect, the invention
described in claim 1 is a stator 11 possible to generate a large
force in the direction in which the piezoelectric elements 1
overlap. Note that, in this invention, this stator 11 is called an
overlapping type piezoelectric stator, because these piezoelectric
elements 1 overlap on the foundation 4 as domino effect. The form
of the foundation 4 is not always linear, and may be arbitrary
curves. A surface electrode 2 and a back electrode 3 of two
adjacent piezoelectric elements 1 touch each other because of
weight of the piezoelectric elements 1 and adhesive strength of
adhesives 5. If a drive device 12, therefore, applies voltage to a
surface electrode 2 of the head of piezoelectrode elements 1 and a
back electrode 3 of the end of piezoelectrode elements 1, electric
fields in the same direction are applied to all piezoelectric
elements 1 of the stator 11.
Now, a drive device 12 generates a saw-tooth wave like FIG. 4,
where an analog circuit generating the saw-tooth wave is
well-known. It is described here about operation of a stator 11 in
a case that the drive device 12 generates the saw-tooth wave like
FIG. 4(a), referring to FIG. 5.
As shown in FIG. 5(a), a slider 21 has stopped when the drive
device 12 does not apply voltage to the stator 11. Note that the
slider 21 is held by friction power between a surface electrode 2
and itself.
As shown in FIG. 5(b), suppose that the drive device 12 raises
voltage rapidly. Since the piezoelectric elements 1 are also
elongated in the extension direction rapidly, big stress is
generated by their open ends 7. After the slider 21 is flipped off
by the friction power between the surface electrode 2 and itself,
the slider 21 moves in the extension direction, according to
inertia.
As shown in FIG. 5(c), the slider 21 moves in the extension
direction, according to inertia even though variance of voltage of
the drive device 12 once stops.
As shown in FIG. 5(d), suppose that the drive device 12 lowers
voltage gradually. Since the piezoelectric elements 1 are also
shrinked in the extension direction gradually, only small stress is
generated by their open ends 7. The slider 21, therefore, is pulled
back slightly by the friction power between the surface electrode 2
and itself.
As shown in FIG. 5(e), when voltage of the drive device 12 returns
again, length of the piezoelectric element 1 also returns, and then
the slider 21 stops.
FIG. 5 shows the operation of the stator 11 in a case that the
drive device 12 generates the saw-tooth wave in FIG. 4(a), but the
slider 21 moves in the opposite direction when the drive device 12
generates a saw-tooth wave in FIG. 4(b). Moreover, suppose that the
stator 11 is made into vertical contrary. When the ground, instead
of the slider 21, touches the surface electrode 2, the stator 11
can be moved in the direction opposite to the friction power.
By the way, Suppose that the piezoelectric element 1 shown in FIG.
3 is cut along the extension direction as its length becomes longer
than FIG. 3. As shown in FIG. 6, a surface electrode 2 and a back
electrode 3 of two adjacent piezoelectric elements 1 touch each
other widely. In this case, as shown in FIG. 7(a) to FIG. 7(e), a
stator 11 can move a slider 21, similarly to FIG. 5. However, when
dynamic friction coefficient between the surface electrode 2 of the
piezoelectric element 1 and the slider 21 is large, inertia of the
slider 21 is more denied by the friction power between the surface
electrode 2 and itself, as a contact area between the surface
electrode 2 and the slider 21 becomes large. Therefore, the stator
11 can not move the slider 21 as shown in FIG. 7(a) to FIG. 7(e).
On the other hand, in a case that the dynamic friction coefficient
between the surface electrode 2 and the slider 21 is small enough,
the piezoelectric element 1 can apply friction power, which is
represented by the difference of dynamic friction coefficienct and
static friction coefficient between the surface electrode 2 and the
slider 21, to the slider 21, where the drive device 12 must
elongate and shrink the piezoelectric element 1 rapidly, by making
frequency of a saw-tooth wave high. It is described here about
operation of the stator 11 in a case that the drive device 12
generates the saw-tooth wave shown in FIG. 4(a), referring to FIG.
8.
As shown in FIG. 8(a), a slider 21 has stopped when the drive
device 12 does not apply voltage to the stator 11. Note that the
slider 21 is held by friction power between a surface electrode 2
and itself.
As shown in FIG. 8(b), suppose that the drive device 12 raises
voltage rapidly. Since the piezoelectric elements 1 are also
elongated in the extension direction rapidly, big stress is
generated by their open ends 7. Since dynamic friction coefficient
between the slider 21 and the surface electrode 2 is small enough,
the slider 21 slides on the surface electrode 2. That is, the
slider 21 has been stopped by inertia.
As shown in FIG. 8(c), the slider 21 has been stood still,
according to inertia even though variance of voltage of the drive
device 12 once stops.
As shown in FIG. 8(d), suppose that the drive device 12 lowers
voltage gradually. Since the piezoelectric elements 1 are also
shrinked in the extension direction gradually, only small stress is
generated by their open ends 7. The slider 21, therefore, is pulled
back slightly by the friction power between the surface electrode 2
and itself.
As shown in FIG. 8(e), when voltage of the drive device 12 returns
again, length of the piezoelectric element 1 also returns, and then
the slider 21 stops.
FIG. 8 shows the operation of the stator 11 in a case that the
drive device 12 generates the saw-tooth wave in FIG. 4(a), but the
slider 21 moves in the opposite direction when the drive device 12
generates a saw-tooth wave in FIG. 4(b). Moreover, suppose that the
stator 11 is made into vertical contrary. When the ground, instead
of the slider 21, touches the surface electrode 2, the stator 11
can be moved in the same direction to the friction power. Note that
the present invention includes a stator 11 whose piezoelectric
elements 1 overlap more than two times even though FIG. 8 shows
that the piezoelectric elements 1 overlap twice. The more the
duplicating degree of the piezoelectric elements 1 becomes, the
longer they can be cut in the extension direction. Therefore, the
piezoelectric elements 1 can generate more stress.
Now, as is clear by FIG. 3 and FIG. 6, the more the number of
overlapping piezoelectric elements 1 becomes, the more voltage the
drive device 12 must generate, even though it applies constant
voltage to the piezoelectric elements 1. However, suppose that
character of all piezoelectric elements 1 is the same, voltage
applied to the piezoelectric elements 1 is also the same. If
surface electrodes 2 and back electrodes 3 of all piezoelectric
elements 1 on a stator 11 shown in FIG. 3 and FIG. 6 pass
electricity, respectively, the same voltage can be applied to all
of the piezoelectric elements 1. The drive device 12, thus, only
have to generate voltage applied to one piezoelectric element 1. It
is explained here about a method using a piezoelectric element 1
which are sigmoidally folded up.
As shown in FIG. 9, the invention described in claim 2 is a stator
11 which uses some piezoelectric elements 1 sigmoidally folded up.
In a case that the piezoelectric element 1 is a thin film like PVDF
(Polyvinylidene Fluoride Plastics), the piezoelectric element 1 is
bent by two place along the extension direction, as shown in FIG.
9(a). In order for the piezoelectric element 1 folded up not to be
opened, the inner side of the piezoelectric element 1 turned up is
fixed by adhesives 5 at a suitable interval. Note that the reason
why the adhesives 5 are adhered at a interval is for the adhesives
5 not to prevent expansion and contraction of the piezoelectric
element 1 in the extension direction, when voltage is applied to
the piezoelectric element 1. Generally speaking, it is enough for
the piezoelectric element 1 to be adhered by the adhesives 5 at two
points, that is, a fixed end 6 and an open end 7, but it may be
adhered by the adhesives 5 at the center of the fixed end 6 and the
open end 7 if necessary. Of course, arbitrary places can be
adhered. As shown in FIG. 9(b), moreover, intensity of the
piezoelectric element 1 can be maintained along the extension
direction if the piezoelectric element 1 is folded up even times.
Therefore, when a thin film like PVDF (Polyvinylidene Fluoride
Plastics) is used as a piezoelectric element 1 on the stator 11
shown in FIG. 3, the thin film can be folded up many times, as
shown in FIG. 9(b).
By the way, as shown in FIG. 3, suppose that some piezoelectric
elements 1 like FIG. 9(a) and FIG. 9(b) overlaps in turn on a
foundation 4. In each of the piezoelectric elements 1 sigmoidally
folded up, a surface electrode 2 and a back electrode 3 make a
short circuit via a surface electrode 2 and a back electrode 3 of
the adjacent piezoelectric element 1. As shown in FIG. 9(c),
however, suppose that an insulated domain 10 is prepared at a
center of this piezoelectric element 1, and insulated paint is
applied to the insulated domain 10 or an insulator is pasted on it.
In each of all piezoelectric elements 1 sigmoidally folded up, a
surface electrode 2 touches only a surface electrode 2 of the
adjacent piezoelectric element 1, and moreover, a back electrode 3
touches only a back electrode 3 of the adjacent piezoelectric
element 1, as shown in FIG. 10. That is, the surface electrodes 2
and the back electrodes 3 do not make a short circuit between a
piezoelectric element 1 sigmoidally folded up and the adjacent
piezoelectric element 1. Furthermore, in a case that an end of a
transverse side of a piezoelectric element 1 is bent slightly, as
shown in FIG. 9(d), not only it becomes easy to apply insulated
paint to an insulated domain 10, but also a surface electrode 2 and
a back electrode 3 of the adjacent piezoelectric element 1 can
easily touch the corresponding electrodes, respectively, in a
stator 11 shown in FIG. 10.
As shown in FIG. 11(a) and FIG. 11(b), the invention described in
claim 3 is a stator 11 which uses some piezoelectric elements 1
covered by tunica electrodes 18. A surface electrode 2 and a back
electrode 3 of a piezoelectric element 1 have an insulated domain
10, respectively, and these insulated domain 10 are insulated by
insulated paint and insulated materials. Note that a surface
electrode 2 not including in the insulated domain 10 and the
insulated domain 10 of the back electrode 3 is covered by the
tunica electrode 18. The tunica electrode 18 is stuck by pressure
to the piezoelectric element 1 or fixed by adhesives 5 to it, where
conductive adhesives 5 are used to fix the surface electrode 2 and
the tunica electrode 18. Similarly, a back electrode 3 not
including in the insulated domain 10 and the insulated domain 10 of
the surface electrode 2 is also covered by the tunica electrode
18.
Moreover, as shown in FIG. 12, the invention described in claim 4
is a stator 11, where a surface electrode 2 and a back electrode 3
of any two adjacent piezoelectric elements 1 are connected by a
leading wire or a conductive sponge 17. Similarly, they are also
connected in a case that some tunica electrodes 18 cover the
piezoelectric elements 1. Therefore, resistance between the surface
electrode 2 and the back electrode 3 becomes less than contact
resistance. Suppose moreover that the leading wire connects between
the surface electrode 2 and the back electrode 3, a foundation 4 of
the stator 11 can be easily transformed because the leading wire is
elongated or shrinked. Note that some piezoelectric elements 1 of
the stator 11 do not shift and roll up, by using some leading
wires. On the other hand, suppose that a conductive sponge 17
connects between the surface electrode 2 and the back electrode 3,
some piezoelectric elements 1 can touch a slider 21 easily because
the conductive sponge 17 becomes a buffer agent. Note that some
piezoelectric elements 1 of the stator 11 do not shift and roll up,
by using some conductive sponges 17. For example, as shown in FIG.
12(a), suppose that the conductive sponge 17 passes electricity
between a surface electrode 2 and a back electrode 3 of these
piezoelectric elements 1 even though the adjacent piezoelectric
elements 1 touch each other via a small domain. Resistance between
the surface electrode 2 and the back electrode 3 becomes less than
contact resistance. In addition, the piezoelectric elements 1 do
not roll up against friction power between them and the slider 21
because the conductive sponge 17 prevents the surface electrode 2
and the back electrode 3 separating. Moreover, as shown in FIG.
12(b), suppose that the adjacent piezoelectric elements 1 overlap
via a large domain. Each of the piezoelectric elements 1 can apply
suitable friction power to the slider 21, regardless of a position
and a weight of the slider 21, because a large conductive sponge 17
can be used at this domain.
Now, as shown in FIG. 13(a), the invention described in claim 6 is
a stator 11 which has a circular foundation 4, along which some
piezoelectric elements 1 are arranged regularly. Note that a spacer
9 is inserted between the head of piezoelectric elements 1 and the
end of piezoelectric elements 1. The spacer 9 is an insulator, and
has a surface electrode 2 and a back electrode 3 on its both sides,
respectively, as shown in FIG. 13(b). Therefore, the surface
electrode 2 of the spacer 9 touches the back electrode 3 of a
piezoelectric element 1, and the back electrode 3 of the spacer 9
touches the surface electrode 2 of a piezoelectric element 1. When
a drive device 12 applies a saw-tooth wave to the back electrode 3
and the surface electrode 2 of the spacer 9, all piezoelectric
elements 1 can be elongated and shrinked along a circle of the
foundation 4. As shown in FIG. 14, suppose that a circular rotor 31
having an axis of rotation 32 is put on some piezoelectric elements
1 attached to the circular foundation 4, these piezoelectric
elements 1 can rotate the circular rotor 31 clockwisely and
counter-clockwisely, centering on the axis of rotation 32.
On the other hand, as shown in FIG. 15, the invention described in
claim 7 is a stator 11 which has a circular foundation 4, along
which some piezoelectric elements 1 are arranged regularly. Note
that surface electrodes 2 and back electrodes 3 of all
piezoelectric elements 1 pass electricity, respectively. Therefore,
this stator 11 does not need a spacer 9 (refer to FIG. 13(a)). When
a drive device 12 applies a saw-tooth wave to a back electrode 3
and a surface electrode 2, all piezoelectric elements 1 can be
elongated and shrinked along a circle of the foundation 4. Of
course, in a case of using these piezoelectric elements 1, a
circular rotor 31 can also rotate as shown in FIG. 14.
As shown in FIG. 16, suppose now that some piezoelectric elements 1
are arranged in an inner side of a foundation 4 as they touch a
surface of a spherical rotor 35, the piezoelectric elements 1 can
rotate the spherical rotor 35. The invention described in claim 15
is, therefore, an overlapping type piezoelectric actuator which can
rotate a spherical rotor 35 with one or more degrees of freedom, by
attaching such two or more circular stators 11 to the spherical
rotor 35.
For example, as shown in FIG. 17, suppose that a spherical rotor 35
is put between two opposite circular stators 11, the spherical
rotor 35 rotates on an axis crossing two center points of the two
circular stators 11.
Moreover, as shown in FIG. 18, suppose that four circular stators
11 are divided into two sets, and a spherical rotor 35 is put
between two opposite circular stators 11 of each set, the spherical
rotor 35 rotates on two axes crossing two center points of the two
circular stators 11 of each set. In a case of using two drive
device 12 according to FIG. 34, the overlapping type piezoelectric
actuator becomes a motor with two degrees of freedom.
In addtion, as shown in FIG. 19, suppose that six circular stators
11 are divided into three sets, and a spherical rotor 35 is put
between two opposite circular stators 11 of each set, the spherical
rotor 35 rotates on three axes crossing two center points of the
two circular stators 11 of each set. In a case of using three drive
device 12, the overlapping type piezoelectric actuator becomes a
motor with three degrees of freedom.
Finally, as shown in FIG. 20, suppose that a spherical rotor 35 is
put between three circular stators 11 which make a triangle, the
spherical rotor 35 rotates on three axes crossing three center
points of the three circular stators 11, respectively. In a case of
using three drive device 12, the overlapping type piezoelectric
actuator becomes a motor with three degrees of freedom.
Note that a circular stator 11 can rotate not only a spherical
rotor 35 but also many kinds of solid of revolution like a
hemisphere rotor and a cone rotor, even though FIG. 16 and so on
show the cases that the circular stator 11 rotates the spherical
rotor 35. An axis of rotation 32 (refer to FIG. 14) is not required
in these overlapping type piezoelectric actuator, if a slider 21
and a stator 11 is designed suitably.
Now, the invention described in claim 11 is a stator 11 consisting
of four stators 11 corresponding to the invention described in
claim 1 and a stator 11 corresponding to the invention described in
claim 6, which can move a slider 21 vertically and horizontally on
a plane, and moreover rotate it clockwisely and
counter-clockwisely. In addition, the invention described in claim
11 is a stator 11 consisting of four stators 11 corresponding to
the invention described in claim 2 and a stator 11 corresponding to
the invention described in claim 7, which can move a slider 21
vertically and horizontally on a plane, and moreover rotate it
clockwisely and counter-clockwisely. FIG. 21 shows an example of a
stator 11 using some piezoelectric elements 1 sigmoidally folded
up. Note that two stator 11 described in claim 6 and claim 7,
respectively, can rotate a slider 21 efficiently and make its
control easy, while the slider 21 can be rotated clockwisely and
counter-clockwisely by using only the stators described in claim 1
and claim 2, respectively.
As shown in FIG. 22 and FIG. 23, the invention described in claim
12 is a stator 11 whose foundation 4 is processed into concave as
its piezoelectric elements 1 uniformly touch a spherical rotor 35
or an object with a convex whose curvature is equal to the
spherical rotor 35. FIG. 22(a) shows a top view of the stator 11,
and FIG. 22(b) shows its sectional view in a case of cutting at a
center. As is clear by FIG. 22(b), a circular stator 11 rotates an
object like a spherical rotor 35, where an axis of the circular
stator 11 is a vertical line crossing its center point. On the
other hand, for two set of opposite arc stators 11, each set
rotates the object like a spherical rotor 35, where an axis of the
set is crossing a center point of an arc formed by the opposite
stators 11. In addition, as shown in FIG. 24, suppose that two
stators 11 described in claim 12 are arranged as a spherical rotor
35 is put between them, the spherical rotor 35 can be rotated more
smoothly.
Note that a rotor can rotate with three degrees of freedom
similarly even though a stator 11 has a convex and the rotor has a
concave, while FIG. 23 and FIG. 24 show two cases of using a
spherical rotor 35.
Although it was described in the above about piezoelectric elements
1 directly touching a slider 21 and a spherical rotor 35 in stators
11 described in claim 1 and claim 2, the piezoelectric elements 1
may not be able to apply suitably friction power to the slider 21
and the spherical rotor 35 because friction coefficient of a
surface electrode 2 and a back electrode 3 of the piezoelectric
element 1 varies sharply according to materials used as the surface
electrode 2 and the back electrode 3. It is explained here about a
method that a piezoelectric element 1 applies suitable friction
power to a slider 21, in a case that a surface electrode 2 and a
back electrode 3 of the piezoelectric element 1 have some skids 8.
Note that it is also similar for some piezoelectric elements 1 to
rotate a spherical rotor 35, as shown in FIG. 16.
As shown in FIG. 25, a piezoelectric element 1 can have some skids
8 on a surface electrode 2 from its open end 7. The elasticity like
a rubber or the ease of processing like a plastic is suitable for
quality of the skids 8. In addition, the skids 8 can be deleted
from the surface electrode 2, by cutting or etching of the thick
surface electrode 2. Of course, the skids 8 can be formed into the
surface electrode 2 by processing technique like welding and
soldering. Polygon and semiellipse are suitable for form of a
section of the skid 8. If some skids 8 are arranged as their
sequence intersects perpendicularly for the extension direction,
effect of the skids 8 is high. Suppose that such piezoelectric
elements 1 are used, a stator 11 of the invention described in
claim 8 can be manufactured. With reference to the drawings, then,
I explain about operation of a stator 11 in a case that a section
of a skid 8 is a triangle.
Suppose first that a drive device 12 generates a saw-tooth wave
shown in FIG. 4(a).
In a case that a surface electrode 2 of a piezoelectric element 1
has been stopped, as shown in FIG. 26(a), a slider 21 is held by
friction power between skids 8 and itself.
When the surface electrode 2 of the piezoelectric element 1 moves
to the right rapidly, as shown in FIG. 26(b), the skids 8 bends
because of inertia of the slider 21. After that, the slider 21 is
flipped off by the friction power between the skids 8 and
itself.
When the surface electrode 2 of the piezoelectric element 1 once
stopped, as shown in FIG. 26(c), the slider 21 sharply moves to the
right because of inertia of the slider 21.
When the surface electrode 2 of the piezoelectric element 1 moves
to the left slowly, as shown in FIG. 26(d), the slider 21 moves to
the left together with the skids 8.
As shown in FIG. 26(e), suppose that the surface electrode 2 of the
piezoelectric element 1 returns. As a result, the slider 21 had
moved to the right.
As shown in FIG. 26, suppose that a section of the skid 8 is an
isosceles triangle, the slider 21 moves similary even though it
moves to any of the left and the right. However, in a case that the
slider 21 only has to move in the either direction of both sides,
the section of the skid 8 is not always the isosceles triangle. It
is described here about a case that the section of the skid 8 is a
right triangle.
As shown in FIG. 27(a), a slider 21 is held by friction power
between skids 8 and itself.
When the surface electrode 2 of the piezoelectric element 1 moves
to the right rapidly, as shown in FIG. 27(b), the skids 8 bends
more because of inertia of the slider 21. After that, the slider 21
is flipped off by the friction power of the skids 8.
When the surface electrode 2 of the piezoelectric element 1 once
stopped, as shown in FIG. 27(c), the slider 21 moves to the right
more sharply because of inertia of the slider 21.
When the surface electrode 2 of the piezoelectric element 1 moves
to the left slowly, as shown in FIG. 27(d), the slider 21 seldom
moves because of the small friction power of the skids 8.
As shown in FIG. 27(e), suppose that the surface electrode 2 of the
piezoelectric element 1 returns. As a result, the slider 21 had
moved to the right more sharply.
Moreover, suppose that the slider 21 is trenched or some
projections are attached to it. Since the skids 8 can get into gear
to these slots and projections, the skids 8 can conduct stress of
the piezoelectric element 1 to the slider 21, converting the stress
into friction power effciently. For example, as shown in FIG. 28,
suppose that a slider with slots 22 has some slots whose shape is
like a V character. In a case of FIG. 28(b), the skids 8 can
conduct the stress to the slider with slots 22 directly, getting
into gear to it. They, therefore, can flip off the slider with
slots 22 to the right more sharply than skids 8 of FIG. 27(b).
FIG. 25 shows such a piezoelectric element 1 as it has some skids 8
on a surface electrode 2. However, in a case of a piezoelectric
element 1 sigmoidally folded up (refer to FIG. 9), some skids 8 can
be attached to a contact surface of the piezoelectric element 1
touching a slider 21.
By the way, it is very troublesome for us to past up some skids 8
to a surface electrode 2 of each piezoelectric element 1. Instead
of pasting up the skids 8 to the surface electrode 2 of each
piezoelectric element 1, therefore, suppose that a ceiling plate 14
(refer to FIG. 29) is pasted up to all surface electrodes 2 of
piezoelectric elements 1. Then, a stator 11 can be manufactured
easily. It is described here about a stator 11 with a ceiling plate
14.
As shown in FIG. 29(a), the invention described in claim 9 is a
stator 11 which has a ceiling plate 14, where the ceiling plate 14
is pasted up by adhesives 5 to all surface electrodes 2 of
piezoelectric elements 1. Since the ceiling plate 14 is an
insulator like a plastic or metal by which the leather film was
carried out, all surface electrodes 2 do not make a short circuit.
Since quality of the ceiling plate 14 may be anything if it is an
insulator, friction coefficient between the ceiling plate 14 and a
slider 21 can be set freely, according to quality of the slider 21.
If the friction coefficient between the ceiling plate 14 and the
slider 21 is large, the stator 11 moves the slider 21 like FIG. 5
and FIG. 7. Otherwise, the stator 11 moves the slider 21 like FIG.
8. Even though the slider 21 moves in the direction opposite to the
extension direction of the piezoelectric elements 1, as is clear by
FIG. 29(a), the slider 21 is not caught in the piezoelectric
elements 1. Moreover, as shown in FIG. 29(b), a bent ceiling plate
14 can be used. In this case, friction power applied to the slider
21 can be made small because a contact area between the ceiling
plate 14 and the slider 21 is extremely small. In addition,
intervals of open ends 7 of the piezoelectric elements 1 are not
restrainded by the ceiling plate 14, because of bending the ceiling
plate 14. Therefore, a foundation 4 can be bent freely.
Although it was described in the above about a stator 11 whose
foundation 4 is fixed, and a stator 11 whose foundation 4 is bent
horizontally against piezoelectric elements 1, the foundation 4 can
be bent vertically against the piezoelectric elements 1 (refer to
FIG. 30). However, there is a problem that the piezoelectric
elements 1 get turned up from the foundation 4. It is explained
here about a stator 11 having some guide rails 15 which press down
the piezoelectric elements 1.
As shown in FIG. 30, the invention described in claim 10 is a
stator 11 which has some guide rails 15 along the extension
direction of piezoelectric elements 1. Note that the guide rail 15
is a plate or a bar made by an insulator like a plastic or metal by
which the leather film was carried out, and it is soft enough. In a
case of FIG. 30(a), a guide rail 15 is arranged at the center of
piezoelectric elements 1. A contact area between the piezoelectric
elements 1 and the guide rail 15 is small. When the piezoelectric
elements 1 are elongated and shrinked, threfore, load resistance by
friction between the guide rail 15 and itself is also small. Note
that a slider 21 must touch either one of two surface electrodes 2
of the piexoelectric elements 1, which is divided by the guide rail
15, or it must straddle the guide rail 15, because the guide rail
15 is located in the center of the piezoelectric elements 1. In
addition, both sides of the piezoelectric element 1 may be bent. In
a case of FIG. 30(b), two guide rails 15 are arranged at both ends
of the piezoelectric elements 1. A contact area between the
piezoelectric elements 1 and the guide rails 15 becomes twice than
one in a case of using one guide rail 15. When the piezoelectric
elements 1 are elongated and shrinked, threfore, load resistance by
friction between the guide rails 15 and itself also becomes large.
However, there are no fear of the piezoelectric elements 1 getting
turned up. In both cases, the slider 21 does not climb over the
guide rails 15 if the slider 21 moves as shown in FIG. 5, FIG. 7
and FIG. 8. Therefore, the guide rails 15 play a role of moving the
slider 21 along the extension direction. Moreover, supose that a
ceiling plate 14 is arranged between two guide rails 15 shown in
FIG. 30(b), as shown in FIG. 30(c). Even though a foundation 4 is
bent, the slider 21 is not caught in the piezoelectric elements 1.
Since the ceiling plate 14 is not also restrainded by the guide
rails 15, the ceiling plate 14 can vibrate enough. Finally, the
guide rails 15 can also press down the piezoelectric elements 1
arranged circularly. For example, in a case of using four guide
rails 15, these guide rails 15 are arranged as shown in FIG.
30(d).
Now, as shown in FIG. 31(a), both ends of a guide rail 15 are
attached to a foundation 4 by two attachments of guide rail 16.
Suppose that the guide rail 15 presses down the piezoelectric
elemetns 1, a surface electrode 2 and a back electrode 3 of the
piezoelectric element 1 strongly contact to a back electrode 3 and
a surface electrode 2 of the adjacent piezoelectric elements 1,
respectively, without weight of a slider 21. A drive device 12
therefore certainly applies a saw-tooth wave to all of the
piezoelectric elements 1 on a stator 11. Moreover, suppose that the
slider 21 curves as shown in FIG. 31(b). The surface electrode 2
and the back electrode 3 of the piezoelectric element 1 can contact
strongly to the back electrode 3 and the surface electrode 2 of the
adjacent piezoelectric elements 1, respectively, without each
piezoelectric element 1 getting turned up. As shown in FIG. 32,
thus, the stator 11 can move even a slider 21 whose bottom is
curving. Of course, the stator 11 can become round like a drum.
Therefore, the slider 21 can rotate around the stator 11.
It has been described in the above about the relation between a
drive device 12 generating a saw-tooth wave and a stator 11 moving
a slider 21. The relation mainly showed that the stator 11 moves
the slider 21 in one direction. However, if only one stator 11 is
used, it is difficult for the stator 11 to apply large friction
power to the slider 21, and moreover it becomes easy to produce
unevenness in operation of the stator 11. Referring to a case of
using a stator 11 shown in FIG. 3, it is explained here about the
relation of wiring between a drive device 12 and the stator 11.
Note that it is also similar for some piezoelectric elements 1 to
rotate a spherical rotor 35, as shown in FIG. 16.
As shown in FIG. 33, the invention described in claim 16 is an
overlapping type piezoelectric actuator whose stators 11 are
connected in parallel. A drive device 12, therefore, can apply the
same saw-tooth wave to all of the stators 11. That is, all
piezoelectric elements 1 of the stators 11 can be elongated and
shrinked simultaneously. These stators 11 then can apply large
friction power to a slider 21 at the same timing.
As shown in FIG. 34, the invention described in claim 17 is an
overlapping type piezoelectric actuator which has two overlapping
type piezoelectric actuators like FIG. 33, where two drive devices
12 generate two saw-tooth waves whose phases shift 180 degrees.
When either one of two set of piezoelectric elements 1 is shrinked,
another set of the piezoelectric elements 1 is elongated. Stress
generated by the shrinked piezoelectric elements 1, therefore, is
seldom conducted to a slider 21. FIG. 34 shows that all stators 11
are divided into two sets. If the number of drive devices 12 and
the number of sets of stators 11 increase, the stators 11 can
generate stress without intermission. The stators 11 therefore can
move a slider 21 smoothly. Note that phases of some saw-tooth waves
generated by some drive device 12 shift at a fixed rate, according
to the number of the drive device 12.
As shown in FIG. 35, the invention described in claim 18 is an
overlapping type piezoelectric actuator whose stators 11 are
divided into two sets, where a drive device 12 applies a saw-tooth
wave to either one set by a switch 13. Since either one set of
piezoelectric elements 1 generates stress, only a half of all
stators 11 can apply friction power to a slider 21. FIG. 35 shows
that all stators 11 are divided into two sets. Suppose here that
all stators 11 are divided into many sets. The stators 11 can also
apply friction power only a part of the slider 21 by switching the
switch 13 in order to apply the saw-tooth wave to some selected
sets. Of course, the stators 11 can also change delicately the
magnitude of the friction power applied to the slider 21. In a case
of moving the slider 21 finely, thus, the overlapping type
piezoelectric actuator is effective.
Note that some stators 11 shown in FIG. 33, FIG. 34 and FIG. 35 are
assumed to flip off a slider 21 in the extension direction. Of
course, however, even a stator 11 shown in FIG. 6 can move a slider
21, where the slider 21 is moved in the opposite direction.
It has been described in the above about a driving method of some
stators 11. It is explained here about arrangement of some stators
11 shown in FIG. 33, FIG. 34 and FIG. 35, where some arrows shown
in FIG. 36, FIG. 37, FIG. 38 and FIG. 39 represent the extension
direction of piezoelectric elements 1.
The invention described in claim 19 is an overlapping type
piezoelectric actuator which is arranged as shown in FIG. 36 and
FIG. 37. Suppose here that some stators 11 are wired as shown in
FIG. 33. Since all piezoelectric elements 1 generate stress in the
same direction simultaneously, the overlapping type piezoelectric
actuator can add together friction powers of all stators 11.
Suppose also that some stators 11 are wired as shown in FIG. 34.
Since some piezoelectric elements 1 of two sets of stators 11
generate stress in the same direction by turns, the overlapping
type piezoelectric actuator can move a slider 21 smoothly.
The invention described in claim 20 is an overlapping type
piezoelectric actuator which is arranged as shown in FIG. 38 and
FIG. 39. As is clear by FIG. 3, it can not necessarily be said that
friction power applied to a slider 21 in a case that a
piezoelectric element 1 is elongated coincidence with friction
power applied to the slider 21 in a case that the piezoelectric
element 1 is shrinked, even though the piezoelectric element 1
generates the same stress during being elongated and shrinked. In a
case that the length of piezoelectric element 1 in the extension
direction is long, and moreover a contact area with some skids 8 is
large, these two friction powers are the almost same, but such
condition can not always be satisfied in any use. Suppose that some
stators 11 having the same number of piezoelectric elements 1 are
arranged as shown in FIG. 35. Since the piezoelectric elements 1 in
two sets of stators 11 generate stress in the opposite direction by
turns, the overlapping type piezoelectric actuator can move the
slider 21 by the same friction power in each direction.
Note that some stators 11 shown in FIG. 36, FIG. 37, FIG. 38 and
FIG. 39 are linear. Of course, similarly to FIG. 37 and FIG. 39,
some stators 11 are arranged on the same circle. In addition,
similarly to FIG. 36 and FIG. 38, some stators 11 are arranged on
the same circle. Furthermore, as shown in FIG. 33, FIG. 34 and FIG.
35, a drive device 12 can apply some saw-tooth waves with suitable
phases to these stators 11 if needed. Similarly to FIG. 14 and FIG.
16, the stators 11 can rotate a circular rotor 31 and a spherical
rotor 35. The circular rotor 31 and the spherical rotor 35
therefore can output arbitrary torque, respectively, according to
the number of the stators 11 and performance of the drive device
12.
By the way, instead of arranging some stators 11 on the same plane,
suppose that two stators 11 are stacked as piezoelectric elements 1
face each other, as shown in FIG. 40, and these stators 11 are
fixed by some spacers 9. A slider 21 can receive friction powers
from the upper and lower sides. The invention described in claim 21
is an overlapping type piezoelectric actuator whose two stators 11
are arranged as a slider 21 is put between them, as shown in FIG.
41. Note that an angle, which is made by extension directions of
piezoelectric elements 1 in some sliders 21 each other, may be
within 0 degree to 180 degrees. In a case of FIG. 41(a), an angle,
which is made by extension directions of piezoelectric elements 1
in two sliders 21, is 180 degrees. Suppose here that a positive
voltage and a negative voltage shown in FIG. 4 are applied by drive
devices 12 to stators 11. The piezoelectric elements 1 in the
stators 11 can apply friction power to a slider 21 in the same
direction. In addition, since extension directions of the
piezoelectric elements 1 in these stators 11 are opposite, the
slider 21 can move equally to any direction if performances of
these stators 11 are equal. Of course, in a case that an angle,
which is made by extension directions of piezoelectric elements 1
in two sliders 21, is 0 degree, the slider 21 can receive strong
friction power along the extension direction. Moreover, suppose
that at least one guide rail 15 is attached to each of two
foundations 4, respectively, as shown in FIG. 41(b). Even before a
slide 21 is put between some piezoelectric elements 1 fixed on
these foundations 4, the piezoelectric elements 1 fixed on the
upper foundation 4 do not separate from the foundation 4. In
addition, the slider 21 can be inserted smoothly between some
piezoelectric elements 1 fixed on these foundations 4, by curving
both sides of them.
It has been described in the above about stators 11, a slider 21, a
circular rotor 31 and a drive device 12 of which an overlapping
type piezoelectric actuator consists, and arrangement and wiring of
the stators 11. Referring to the drawings, it is explained here
about some applications of an overlapping type piezoelectric
actuator.
Suppose that a foundation 4 on which some wide piezoelectric
elements 1 shown in FIG. 42(b) are fixed is rounded cylindrically
as shown in FIG. 42(a), where the foundation 4 is made from a soft
material like a rubber or a synthetic resin. A cylinder using an
overlapping type piezoelectric actuator can reciprocate a pillar
slider 23 inside a cylindrical foundation 4. Note that a drive
device 12 and wiring are omitted in FIG. 42 (refer to FIG. 33, FIG.
34 and FIG. 35). Each piezoelectric element 1 fixed on the
cylindrical foundation 4 is not fixed to the adjacent piezoelectric
elements 1. Therefore, if all piezoelectric elements 1 are fixed on
the foundation 4 as the piezoelectric elements 1 have a margin
around them, the cylindrical slider 21 can be transformed freely.
Note that a wide stator 11 can consist of some stators 11, by
combining these stators 11 as shown in FIG. 36 and FIG. 38, while
FIG. 42(b) shows a wide foundation 4. Here, width of all
piezoelectric elements 1 fixed on the foundations 4 of some stators
11 constructing this stator 11 is narrow. If some piezoelectric
elements 1 shown in FIG. 42(b) are used, the piezoelectric elements
1 can curve greatly. If these foundations 4 are, thus, rounded
cylindrically, a cylinder consisting of the foundations 4 and a
pillar slider 23 becomes more flexible. In a case that the pillar
slider 23 is made by a strong but soft material like a wire and a
glass fiber, and the cylinder is transformed freely, the cylinder
can reciprocate the pillar slider 23 even though the cylinder is
curved.
As shown in FIG. 43, a vibrator using an overlapping type
piezoelectric actuator is the same as an overlapping type
piezoelectric actuator like FIG. 14, a part of whose circular rotor
32 is cut off. Note that a stator 11 rotating a circular rotor 31
on low voltage is adopted in FIG. 43 because some surface
electrodes 2 and some back electrodes 3 of adjacent piezoelectric
elements 1 are arranged on a foundation 4 as not making a short
circuit by an insulated domain 10, as shown in FIG. 15. In
addition, a drive device 12 and wiring are omitted in FIG. 43
(refer to FIG. 33, FIG. 34 and FIG. 35). The circular rotor 31 cut
off becomes an arc rotor 33 whose circumference is within 1 degree
to 359 degree. Since a gravity center of the arc rotor 33 does not
coincide with a center of an axis of rotation 32, the arc rotor 33
rotates vibrating. Since structure of the invention is very simple,
and the invention does not need any coil and any brush, a maker can
make a thin and light vibrator. However, some piezoelectric
elements 1 do not touch the arc rotor 33 because the invention uses
the arc rotor 33. Therefore, the shorter the circumference of the
arc rotor 33 becomes, the worse the vibrator rotates the arc rotor
33. Suppoes then that a weight 34 is put on the circular rotor 31
as shown in FIG. 44. The vibrator using the overlapping type
piezoelectric actuator can rotate the circular rotor 31
effectively. Note that a drive device 12 and wiring are omitted in
FIG. 44 (refer to FIG. 33, FIG. 34 and FIG. 35). It is hoped that
form of the weight 34 is like a fan, in order for variation of
loads for all piezoelectric elements 1 to become as small as
possible.
As shown in FIG. 45, a moving table using stators 11 is arranged
some three degree-of-freedom stators 11 like FIG. 21 on a plane. At
least three drive devices 12 apply saw-tooth waves to all stators
11, by combining wiring shown in FIG. 33, FIG. 34 and FIG. 35
suitably. Note that the drive devices 12 and the wiring are omitted
in FIG. 45. If a slider 21 is put on the invention, the slider 21
can move vertically and horizontally, and moreover it can rotate
clockwisely and counter-clockwisely at any place.
As shown in FIG. 46, a joint using a multi-degree-of-freedom
piezoelectric actuator is based on a multi-degree-of-freedom
piezoelectric actuator in FIG. 16, to whose spherical rotor 35 and
foundation 4 some (now two) props 49 are attached, where the
spherical rotor 35 is held by a support stator 46 as it does not
separate. Note that a drive device 12 and wiring are omitted in
FIG. 46 (refer to FIG. 33, FIG. 34 and FIG. 35). Suppose that a
contact area between the support stator 46 and the foundation 4 of
a stator 11 is processed as the support stator 46 can be inserted
in the foundation 4, otherwise a screw is shaved in the contact
area between the support stator 46 and the foundation 4. The
support stator 46, then, is fixed on the foundation 4. Since a
maker of the joint can remove the support stator 46 from the
foundation 4, he can exchange easily some parts of the joint and
repair the joint.
Suppose that some bearing balls 47 embedded in a support stator 46
hold a spherical rotor 35 as shown in FIG. 47. A joint using a
multi-degree-of-freedom piezoelectric actuator suppresses vibration
of the spherical rotor 35, and moreover the bearing balls 47 can
stick the spherical rotor 35 to piezoelectric elements 1 of stators
11. In a case that some (now two) props 49 are attached to the
spherical rotor 35 and the foundation 4, the spherical rotor 35 can
separate easily from the stators 11 because a gravity center of the
spherical rotor 35 is different from the center point of the
spherical rotor 35. Suppose here that the bearing balls 47 are
embedded in the support stator 46. The bearing balls 47 can support
the spherical rotor 35 and friction coefficient between the support
stator 46 and the spherical rotor 35 can be omitted.
By the way, in two joints shown in FIG. 46 and FIG. 47, since only
piezoelectric elements 1 attached to a foundation 4 hold a
spherical rotor 35 by friction power, the spherical rotor 35 may
rotate easily by external power. The joints, therefore, are not
suitable for applications desiring large torque like a knee joint
of a robot. As shown in FIG. 48, a joint using a
multi-degree-of-freedom piezoelectric actuator and an overlapping
type piezoelectric actuator can reinforce required torque, by
having an overlapping type piezoelectric cylinder. Two bearings 37
are attached to a foundation 4 and a pillar slider 23 of the
cylinder, respectively, and moreover a props 49 is attached to each
bearing 37. In addition, these props 49 are attached each prop 49
of the joint, respectively. In a case that commercial ball bearings
are used as the bearing 37, and the foundation 4 of the cylinder is
attached to an outer wheel of the bearing 37, a prop 49 is attached
to an inner wheel. On the other hand, in a case that the foundation
4 of the cylinder is attached to the inner wheel of the bearing 37,
the prop 49 is attached to the outer wheel of the bearing 37. It is
also similar in a case of the pillar slider 23 of the cylinder. The
cylinder can be elongated and shrinked in spite of an angle which
is made by the props 49 of the joint, by using these bearings 37.
Here, when a transformable material is used as the foundation 4 and
the pillar slider 23 of the cylinder, the joint can operate
flexibly. When the foundation 4 and the pillar slider 23 of the
cylinder has been formed in the shape of an arc for a center of the
spherical rotor 35 of the joint, the pillar slider 23 of the
cylinder can move smoothly inside the foundation 4 of the cylinder.
Suppose here that some (now two) cylinders are arranged as they
face each other on a concentric circle, as shown in FIG. 49. A
contact area between the pillar sliders 23 of these cylinders and
some piezoelectric elements 1 attached to the foundations 4 of the
cylinders is almost constant, in spite of an angle which some (now
two) props 49 of the joint make. Therefore, friction powers and
stresses generated by the cylinders are also constant,
respectively.
Note that, of course, some commercial universal joints may be used
instead of the bearings 37, while some bearings 37 are used in FIG.
48 and FIG. 49. A joint using the universal joints can work more
widely than one using some bearings 37.
Now, as shown in FIG. 50, a moving camera using a
multi-degree-of-freedom piezoelectric actuator is based on a
multi-degree-of-freedom piezoelectric actuator shown in FIG. 16,
where an image sensor with lens 41 is embedded in a spherical rotor
35, and the spherical rotor 35 is held by a support stator 46 as it
does not separate. Some signal lines 44 of the image sensor with
lens 41 are taken out from an outlet 43 opened on the spherical
rotor 35, and are pulled out through a hole for wiring 45 opened at
a center of a foundation 4. In particular, as shown in FIG. 50,
suppose that a moving camera using a multi-degree-of-freedom
piezoelectric actuator is designed as the outlet 43 is opened at a
point where an axis of light of a lens crosses with a surface of
the spherical rotor 35. Note that the axis of light of a lens of
the image sensor with lens 41 passes through a center point of the
spherical rotor 35. In this case, the moving camera has the widest
operation area. Note that a drive device 12 and wiring are omitted
in FIG. 50 (refer to FIG. 33, FIG. 34 and FIG. 35). Suppose that a
contact area between the support stator 46 and a foundation 4 of a
stator 11 is processed as the support stator 46 can be inserted in
the foundation 4, otherwise a screw is shaved in the contact area
between the support stator 46 and the foundation 4. The support
stator 46 is then fixed on the foundation 4. Since a maker of the
moving camera can remove the support stator 46 from the foundation
4, he can exchange easily some parts of the moving camera and
repair the moving camera.
Suppose that some bearing balls 47 embedded in a support stator 46
hold a spherical rotor 35 as shown in FIG. 51. A moving camera
using a multi-degree-of-freedom piezoelectric actuator suppresses
vibration of the spherical rotor 35, and moreover the bearing balls
47 can stick the spherical rotor 35 to piezoelectric elements 1 of
stators 11. In a case that an image sensor with lens 41 is embedded
in the spherical rotor 35, the spherical rotor 35 can separate
easily from the stators 11 because a gravity center of the
spherical rotor 35 is different from the center point of the
spherical rotor 35. Suppose here that the bearing balls 47 are
embedded in the support stator 46. The bearing balls 47 can support
the spherical rotor 35 and friction coefficient between the support
stator 46 and the spherical rotor 35 can be omitted.
As shown in FIG. 52, a moving camera using a
multi-degree-of-freedom piezoelectric actuator has a support stator
46 to which a transparent cover 48 is pasted up. The transparent
cover 48 is made by forming glass, acrylics or reinforced plastic
and so on. Since few crevices are vacant between a spherical rotor
35 and the support stator 46, dusts, garbages and moisture invade
between the crevices. Therefore, rotation of the spherical rotor 35
is disturbed, or surface electrodes 2 (refer to FIG. 1) and back
electrodes 3 (refer to FIG. 1) of piezoelectric elements 1 rust.
Since the transparent cover 48 is attached to the support stator
46, however, the transparent cover 48 can prevent the dusts, the
garbages and the moisture permeating. In addition, the transparent
cover 48 can be exchanged easily together with the support stator
46 even when the transparent cover 48 got damaged.
As shown in FIG. 53, a moving mirror using a
multi-degree-of-freedom piezoelectric actuator is based on a
multi-degree-of-freedom piezoelectric actuator shown in FIG. 16,
where a mirror 50 is attached to a semispherical rotor 36 which is
a spherical rotor 35, a part of which was cut off or transformed,
and the semispherical rotor 36 is held by a support stator 46 as it
does not separate. Note that a drive device 12 and wiring are
omitted in FIG. 53 (refer to FIG. 33, FIG. 34 and FIG. 35). Suppose
that a contact area between the support stator 46 and a foundation
4 of a stator 11 is processed as the support stator 46 can be
inserted in the foundation 4, otherwise a screw is shaved in the
contact area between the support stator 46 and the foundation 4.
The support stator 46 is then fixed on the foundation 4. Since a
maker of the moving mirror can remove the support stator 46 from
the foundation 4, he can exchange easily some parts of the moving
mirror and repair the moving mirror.
Suppose that some bearing balls 47 embedded in a support stator 46
hold a semispherical rotor 36 as shown in FIG. 54. A moving mirror
using a multi-degree-of-freedom piezoelectric actuator suppresses
vibration of the semispherical rotor 36, and moreover the bearing
balls 47 can stick the semispherical rotor 36 to piezoelectric
elements 1 of stators 11. In a case that a mirror 50 is attached to
the semispherical rotor 36, the semispherical rotor 36 can separate
easily from the stators 11 because a gravity center of the
semispherical rotor 36 is different from the center point of the
semispherical rotor 36. Suppose here that the bearing balls 47 are
embedded in the support stator 46. The bearing balls 47 can support
the semispherical rotor 36 and friction coefficient between the
support stator 46 and the semispherical rotor 36 can be
omitted.
As shown in FIG. 55, a sheet conveyance equipment using an
overlapping type piezoelectric actuator picks out every sheet 55
stacked on a splashes board 52 from a tray 51. Note that guide
rails 15 and a drive device 12 are omitted in FIG. 55. In a case of
FIG. 55(a), the stacked sheets 55 touch some piezoelectric elements
1 because some springs 53 push up the splashes board 52. All
piezoelectric elements 1 arranged on a foundation 4 are divided
into two groups by a spacer 9 having a surface electrode 2 (refer
to FIG. 13(b)) and a back electrode 3 (refer to FIG. 13(b)).
Suppose that a group of piezoelectric elements 1 among all
piezoelectric elements 1, which are touching the sheets 55, pushes
out a top of the stacked sheet 55 from the tray 51. Suppose
moreover that another group of piezoelectric elements 1 among all
piezoelectric elements 1, which are fixed on the curving foundation
4, rolls up the sheet 55 taken out along a guidance board 54. The
sheet 55 therefore becomes inside-out. Since all of the
piezoelectric elements 1 are divided into two groups and each group
works separately, the sheet conveyance equipment picks out only one
sheet 55 at a time from a tray 51. On the other hand, in a case of
FIG. 55(b), piezoelectric elements 1 arranged on a reverse stator
11 are divided into two groups by a spacer 9 having a surface
electrode 2 and a back electrode 3. Since the tray 51 is arranged
aslant, a group of stators 11 touching the sheets 55 among all
stators 11 pulls out a top of the stacked sheets 55 from the tray
51. The pulled sheet 55 is guided by a guidance board 54 between
two opposite stators 11. Moreover, these stators 11 pull out the
sheet 55 from the tray 51 after putting the sheet 55 between
themselves. Since the piezoelectric elements 1 of the reverse
stator 11 are divided into two groups, and each group works
separately, the sheet conveyance equipment picks out only one sheet
55 at a time from the tray 51.
As shown in FIG. 56(a), a printing head conveyance equipment using
an overlapping type piezoelectric actuator reciprocates a head
carrier 62 to which a printing head 61 is attached. Note that a
drive device 12 is omitted in FIG. 56(a). Suppose that unevenness
is attached to a surface where the head carrier 62 touches a rail
for head 63, corrsponding to the rail for head 63. Even though some
piezoelectric elements 1 move the head carrier 62, the head carrier
62 can reciprocate along the rail for head 63. In a case of FIG.
56(a), two foundations 4 are used, and moreover extension
directions of some piezoelectric elements 1 fixed on the
foundations 4 are opposite each other. If performances of all
piezoelectric elements 1 on the foundations 4 are the same, thus,
the head carrier 62 can move equally in any direction. Since the
piezoelectric elements 1 and the head carrier 62 are separated,
moreover, wiring from the drive device 12 to the piezoelectric
elements 1 is carried out easily. Since the head carrier 61 passes
between the two foundations 4, the head carrier 61 can print in any
of directions perpendicular to the head carrier 62.
On the other hand, as shown in FIG. 56(b), in a printing head
conveyance equipment using an overlapping type piezoelectric
actuator, foundations 4 are attached to a head carrier 62. Note
that a drive device 12 and rails for head 63 are omitted in FIG.
56(b). Suppose that some rails for head 63 are set up as some
piezoelectric elements 1 fixed on the foundations 4 touch a body of
the printing head conveyance equipment, the head carrier 62 can
reciprocate along the rails for head 63. Of course, the head
carrier 62 can move equally in any direction because extension
directions of the piezoelectric elements 1 fixed on two foundations
4 are opposite each other. Since the foundations 4 are attached to
the head carrier 62, moreover, the piezoelectric elements 1 can
move the head carrier 62 in spite of moving distance of the head
carrier 62. In a case of FIG. 56(b), a printing head 61 is embedded
in a center of the head carrier 62. The printing head 61 therefore
can print in any of directions perpendicular to the head carrier
62.
While the invention has been shown by example, it should be
understood, however, that the description herein of specific
embodiments is not intended to limit the invention to the
particular forms disclosed, but on the contrary, the invention is
to cover all modifications equivalents, and alternative falling
within the spirit and scope of the invention as defined by the
appended claims.
Industrial Applicability
As suggested by claim 1 to claim 4, a summation of all areas of
surface electrodes 2 of piezoelectric elements 1 becomes more than
a summation of areas of piezoelectric elements 1 touching a slider
21. Therefore, piezoelectric elements 1 of the present invention
can generate more distortion than some piezoelectric elements 1 of
the conventional ultrasonic actuators, even though piezoelectric
charge coefficients of the piezoelectric elements 1 are the same.
In short, a stator 11 using the present invention can generate
large friction power easily even though it uses piezoelectric
elements 1 which are not used because of small piezoelectric charge
coefficient. Thus, a user of the present invention can use many
types of piezoelectric elements 1, according to his purpose and
applications. In addition, the stator 11 using the present
invention does not need any metal stators 11, while the
conventional ultrasonic actuator amplifies distortion of
piezoelectric elements 1, using a metal stator 11 whose form is
like a comb. Moreover, the stator 11 using the present invention
operates by a single-phase saw-tooth wave, while the conventional
ultrasonic actuator needs two sets of piezoelectric elements 1
which are arranged by turns, where double-phase drive voltages are
applied to the piezoelectric elements 1, respectively. Thus, a
maker of the present invention can manufacture the stator 11 more
easily than the conventional ultrasonic actuator. Suppose
furthermore that the stator 11 is made upside-down, it can be used
as a power of a micromachine running on the ground. In addition,
the piezoelectric elements 1 can apply friction power to fluid in
terms of viscosity, because the fluid has the viscosity. The
present invention, therefore, can also use the fluid instead of a
slider 21.
As suggested by claim 2 to claim 3, a drive device 12 can apply a
low voltage to a stator 11 because all surface electrodes 2 and all
back electrodes 3 of piezoelectric elements 1 in the stator 11 pass
electricity, respectively. A maker of the present invention,
therefore, can manufacture the drive device 12 more easily than the
conventional ultrasonic actuators, and he can use a stator 11 using
the present invention for some equipments not suitable for
generating high voltage like a cellular phone.
As suggested by claim 5, a stator 11 can move a slider 21 in any
direction because a foundation 4 can be transformed freely. In
addition, the foundation 4 can be transformed while the stator 11
moves the slider 21. A designer of a production line in a factory,
therefore, can use a stator 11 using the present invention for
distribution of parts and so on.
As suggested by claim 6 to claim 7, a stator 11 can rotate a
circular rotor 31 because some piezoelectric elements 1 are
arranged in the shape of a cirlce and an arc. Suppose moreover that
the piezoelectric elements 1 are fixed on a circular foundation 4
as their surfaces touch a spherical rotor 35, the stator 11 can
rotate the spherical rotor 35. Since a stator 11 of the present
invention can convert vibration of piezoelectric elements 1 into
friction power more effectively than a stator 11 of the
conventional ultrasonic motor, the present invention can realize a
efficient piezoelectric motor.
As suggested by claim 8, skids 8 increase friction coefficient of
surface electrodes 2 and back electrodes 3. Since it is hard coming
to slide the surface electrodes 2 and the back electrodes 3 in a
case that piezoelectric element 1 are shrinked rapidly, a stator 11
can generate large friction power. In addition, the piezoelectric
elements 1 can apply friction power to fluid in terms of viscosity,
because the fluid has the viscosity. The present invention,
therefore, can also use the fluid instead of a slider 21. In
particular, since a contact area between the skids 8 and the fluid
is large, by making height of the skids 8 high, the skids 8 can
apply large impelling force to the fluid.
As suggested by claim 9, surface electrodes 2 and back electrodes 3
of piezoelectric elements 1 are not worn out by a slider 21 because
a ceiling plate 14 touches the slider 21. A designer of an
overlapping type piezoelectric actuator, therefore, can select
materials of the surface electrodes 2 and the back electrodes 3
freely. Moreover, since the ceiling plate 14 is an insulator, the
surface electrodes 2 and the back electrodes 3 do not make a short
circuit because of a material of the slider 21. The designer of the
overlapping type piezoelectric actuator, therefore, can also use a
metal for the slider 21. Furthermore, since a ceiling plate 14 only
has to be attached to all piezoelectric elements 1, a maker of the
overlapping type piezoelectric actuator can manufacture the
overlapping type piezoelectric actuator more easily than one in a
case that some skids 8 are pasted up to a surface electrode 2 and a
back electrode 3 of each piezoelectric element 1. In addition, the
slider 21 is not caught in the piezoelectric elements 1 even though
the slider 21 moves in the direction opposite to the extension
direction of the piezoelectric elements 1. The overlapping type
piezoelectric actuator, therefore, can convey a thin sheet 55 like
a paper as the slider 21 in the direction opposite to the extension
direction of the piezoelectric elements 1.
As suggested by claim 10, suppose that a guide rail 15 presses down
some piezoelectric elemetns 1. A surface electrode 2 and a back
electrode 3 of the piezoelectric element 1 strongly contact to a
back electrode 3 and a surface electrode 2 of the adjacent
piezoelectric elements 1, respectively, without opening the
intervals of the piezoelectric elements 1, even though a foundation
4 was curved. That is, the piezoelectric elements 1 can be
elongated and shrinked even though the foundation 4 was curved. A
stator 11, therefore, can move an arc slider 21, by rounding the
foundation 4 like a drum. In addition, the stator 11 can also move
a soft slider 21 like a paper, while bending or rounding it.
Suppose moreover that an interval of guide rails 15 is united with
breadth of the slider 21, the stator 11 can move the slider 21
along the guide rails 15.
As suggested by claim 11, a multi-degree-of-freedom overlapping
type piezoelectric stator can move some objects to all around,
respectively, and can only rotate them. That is, the present
invention can control movement of the objects finely. In addition,
the present invention can be used as power of a micromachine, by
carrying the present invention in the micromachine.
As suggested by claim 12, a multi-degree-of-freedom overlapping
type pizeoelectric stator can rotate finely not only a ball but
also objects whose surface is like a convex lens and a concave lens
with three degrees of freedom. In short, since the present
invention can change direction of a reflector freely, a laser
equipment can adjust an angle of reflected light easily, by
carrying the present invention in the laser equipment. In an
overlapping type piezoelectric actuator, moreover, suppose that two
stators 11 face each other as a spherical rotor 35 and an object
like an iron array are put between them. For each stator 11, the
spherical rotor 35 and the object can be rotated smoothly with
three degrees of freedom. Similarly, in a case that two stators 11
face each other as an object having two concave surfaces like a
sphere is put between them, the object can rotate smoothly with
three degrees of freedom, for each stator 11. In particular,
suppose that two foundations 4 of stators 11 are drawn by an
elastic body like rubber, a designer of a robot can use these
overlapping type piezoelectric actuators for a joint of the robot.
The joint can change an angle flexibly, corresponding to external
power, while the conventional robot joint using a motor and gears
can not do. The joint is therefore hard to do harm to man.
As suggested by claim 13, a drive device 12 becomes simple because
the drive device 12 only has to generate a saw-tooth wave. A maker
of an overlapping type piezoelectric actuator, therefore, can
manufacture the drive device 12 easily.
As suggested by claim 14, a slot and a projection increase friction
coefficient of a slider 21 and a circular rotor 31. When
piezoelectric elements 1 are shrinked rapidly, it is hard coming to
slide the slider 21 and the circular rotor 31. A stator 11
therefore can generate large friction power.
As suggested by claim 15, a user of the present invention can
realize a small multi-degree-of-freedom ultrasonic motor because
the present invention can make a stator 11 smaller than a stator 11
of the conventional multi-degree-of-freedom ultrasonic motor. In
addition, since the present invention can make a contact area
between the stator 11 and a spherical rotor 35 smaller than the
conventional multi-degree-of-freedom ultrasonic motor, it can make
frictional resistance between the stator 11 and the spherical rotor
35 small for rotation in the direction which crosses the stator 11.
Thus, the present invention can reduce the amount of energy
consumption.
As suggested by claim 16 and claim 17, the number of stators 11
described in claim 1 and claim 8 can be changed easily. A user of
the present invention therefore can heighten stress by increasing
an area of surfaces of piezoelectric elements 1 if needed.
As suggested by claim 18, ones generating stress really among some
stators 11 described in claim 1 and claim 8 can be selected. A user
of the present invention therefore can apply friction power to a
specific part of a slider 21 if needed. Thus, the user of the
present invention can control the slider 21 finely.
As suggested by claim 19 and claim 20, in a case that a designer of
an overlapping type piezoelectric actuator must apply stress to an
irregular slider 21, a user of the present invention can
manufacture a stator 11 more easily than one who makes a foundation
4 according to unevenness of the slider 21, and who arranges
piezoelectric elements 1 on the slider 21. In addition, each
piezoelectric element 1 can apply stress equally to the slider 21.
For example, suppose that some stators 11 are arranged along the
moving direction of a piston. The user of the present invention can
easily manufacture an overlapping type piezoelectric actuator like
a cylinder. Suppose moreover that claim 18 and claim 20 are
combined. Since the stators 11 generate the almost same stress
toward both direction, a drive device 12 does not have to adjust
voltage, waveform and frequency. The present invention therefore
makes control of the overlapping type piezoelectric actuator
easy.
As suggested by claim 21, suppose that a slider 21 is put between
two stators 11, these stators 11 force the slider 21 on
piezoelectric elements 1 of the mutual stator 11. In short, since
the slider 21 can receive friction power enough from these stators
11, the slider 21 can move easily. Suppose here that an overlapping
type piezoelectric actuator is made as the slider 21 is put between
two stators 11. Even though the slider 21 is such a light object as
a paper, the overlapping type piezoelectric actuator can move the
slider 21 easily. Suppose moreover that an overlapping type
piezoelectric actuator is made as the circular rotor 31 is put
between two stators 11, the overlapping type piezoelectric actuator
can generate strong torque.
As suggested by a cylinder using an overlapping type piezoelectric
actuator, suppose that a pillar slider 23 and a stator 11 bend
flexibly, the stator 11 can make the pillar slider 23 to go back
and forth even though the pillar slider 23 is on a winding place.
In a case of embedding the cylinder in a tube like a catheter,
then, the stator 11 can send out a minute object to a head from an
end of the cylinder. Suppose moreover that the cylinder, to an end
of whose pillar slider 23 an instrument is attached, is attached to
the head of the catheter. The catheter can control receipts and
payments of the instrument finely according to directions from the
outside via a drive device 12.
As suggested by a vibrator using an overlapping type piezoelectric
actuator, the vibrator can be made very thinly because the vibrator
consists of stacks of a foundation 4, some piezoelectric elements 1
and a circular rotor 31, and moreover a weight 34 if needed. In
addition, since a magnet is not required in the present invention,
and surface electrodes 2 and back electrodes 3 of the piezoelectric
elements 1 and electric wires are a metal, a designer of the
present invention can reduce weight of the vibrator, by using
materials like a plastic for the foundation 4, the circular rotor
31 and the weight 34.
As suggested by a moving table using some stators 11, a
multi-degree-of-freedom overlapping type piezoelectric stator can
move some objects to all around, respectively, and can only rotate
them, on the moving table. Since the present invention can control
movement of the objects finely, it can be used as a driving source
of a microfactory. In addition, the present invention can be used
as a driving source of a micromachine, by carrying the present
invention in the micromachine.
As suggested by a joint using a multi-degree-of-freedom
piezoelectric actuator, control mechanism and a control device of a
joint using a multi-degree-of-freedom overlapping type
piezoelectric actuator becomes easier than ones of a joint using an
ultrasonic motor. Moreover, since a multi-degree-of-freedom
overlapping type piezoelectric stator covers only a half surface of
a spherical rotor 35 in the present invention, a domain which the
joint can operate within is wide. Design of the joint thus becomes
easy. Since the present invention is light but does not require
electric power for maintaining a fixed angle, and can operate
finely, the present invention is useful for a joint of a finger and
an arm of a robot, and so on.
As suggested by a joint using a multi-degree-of-freedom
piezoelectric actuator and an overlapping type piezoelectric
actuator, not only at least one cylinder forces torque which a
spherical rotor 35 of the joint outputs, but also an angle which
props 49 of the joint make is maintained by friction power
generated by these cylinders. In a case that external power is
applied to the joint, thus, the joint can change easily the angle
which the props 49 make, and moreover can maintain the angle. Since
the present invention is light but does not require electric power
for maintaining a fixed angle, and can generate large torque, the
present invention is useful for a joint of a leg of a robot, and so
on.
As suggested by a moving camera using a multi-degree-of-freedom
piezoelectric actuator, control mechanism and a control device of a
moving camera using a multi-degree-of-freedom overlapping type
piezoelectric actuator becomes easier than ones of a moving camera
using an ultrasonic motor. Moreover, since a
multi-degree-of-freedom overlapping type piezoelectric stator
covers only a half surface of a spherical rotor 35 in the present
invention, a domain which the moving camera can operate within is
wide. Design of the joint thus becomes easy.
As suggested by a moving camera using a multi-degree-of-freedom
piezoelectric actuator, an application domain of the moving camera
is large since a foreign substance does not enter between a
spherical rotor 35 and a support stator 46. In particular, in a
case of carrying the moving camera in an object whose use place is
unspecified and whose handling is not limited like a cellular phone
and a pet robot, it is easy for the foreign substance to enter in
movable portion of the moving camera. The foreign substance
therefore causes the failure of the moving camera. By using the
present invention, however, dust and moisture do not enter between
the spherical rotor 35 and the support stator 46. Moreover, since a
transparent cover 48 protects a lens, it is hard coming to attach a
crack to the lens. Even though the crack is attached to the
transparent cover 48, the transparent cover 48 can be exchanged
together with the support stator 46. The moving camera thus can be
repaired more cheaply than repair in a case of exchanging the
spherical rotor 35 embedding an image sensor with lens 41.
As suggested by a moving mirror using a multi-degree-of-freedom
piezoelectric actuator, control mechanism and a control device of a
moving mirror using a multi-degree-of-freedom overlapping type
piezoelectric actuator becomes easier than ones of a moving mirror
using an ultrasonic motor. Moreover, since a
multi-degree-of-freedom overlapping type piezoelectric stator
covers only a half surface of a spherical rotor 35 in the present
invention, a domain which the moving mirror can operate within is
wide. Design of the joint thus becomes easy. Since the present
invention is light but does not require electric power for
maintaining a fixed angle, and can operate finely, the present
invention is useful for a side mirror and a back mirror of a car,
and so on.
As suggested by a sheet conveyance equipment using an overlapping
type piezoelectric actuator, the sheet conveyance equipment can be
used as a sheet feeder of a printer and a scanner, because some
stators 11 can pick out every stacked sheet 55 from a tray 51. In
particular, many present printers and scanners pick up every paper
from a tray 51, using many parts like a motor, a gear and a roller.
By using an overlapping type piezoelectric actuator, however, the
number of parts of the sheet feeder decreases. In addition, the
amount of energy consumption of the sheet feeder becomes low, and
the sheet feeder stops being able to break down easily. A maker of
a printer and a scanner then can manufacture the printer and the
scanner cheaply. Moreover if the present invention is used, a
designer of the printer and the scanner can design a mobile printer
and a mobile scanner required as they are small and light, and
consume only few energy.
As suggested by a printing head conveyance equipment using an
overlapping type piezoelectric actuator, stators 11 can reciprocate
a printing head 61. In particular, many present printers
reciprocate a printing head 61, using many parts like a motor, a
gear and a roller. By using an overlapping type piezoelectric
actuator, however, the number of parts of the printer decreases. In
addition, the amount of energy consumption of the printer becomes
low, and the printer stops being able to break down easily. A maker
of a printer then can manufacture the printer cheaply. Moreover if
the present invention is used, a designer of the printer can design
a mobile printer required as it is small and light, and consumes
only few energy.
* * * * *
References