U.S. patent number 6,108,466 [Application Number 09/154,797] was granted by the patent office on 2000-08-22 for micro-machined optical switch with tapered ends.
This patent grant is currently assigned to Lucent Technologies. Invention is credited to Vladimir A. Aksyuk, David J. Bishop, C. Randy Giles.
United States Patent |
6,108,466 |
Aksyuk , et al. |
August 22, 2000 |
Micro-machined optical switch with tapered ends
Abstract
One-by-three and two-by-two optical switches comprising optical
waveguides or fibers with tapered ends that utilize
electrostatically-driven actuators are disclosed. Tapering of the
fiber ends allow the ends to be positioned in close proximity to
one another to yield an optical switch with low insertion loss. In
one embodiment the optical switch comprises: (1) four optical
waveguides each having a tapered end comprising two tapered edges
and disposed on a support such that each tapered edge of each
waveguide is in opposed and near-abutting relation with a tapered
edge of another optical waveguide, said near abutment defining a
space between each pair of opposes tapered edges; (2) a first
electromechanical actuator operable to move at least a first
optical device into and out of a path of an optical signal
travelling between two of the waveguides, wherein the first optical
device moves in the space between a first pair of opposed tapered
edges; and (3) a second electromechanical actuator operable to move
at least a second optical device into and out of the path of the
optical signal, wherein the second optical device moves in the
space between a second pair of opposed tapered edges, wherein one
tapered edge of the first pair and one tapered edge of the second
pair are common to one of the optical waveguides.
Inventors: |
Aksyuk; Vladimir A.
(Piscataway, NJ), Bishop; David J. (Summit, NJ), Giles;
C. Randy (Whippany, NJ) |
Assignee: |
Lucent Technologies (Murray
Hill, NJ)
|
Family
ID: |
22552831 |
Appl.
No.: |
09/154,797 |
Filed: |
September 17, 1998 |
Current U.S.
Class: |
385/19; 385/15;
385/16; 385/20; 385/21; 385/24 |
Current CPC
Class: |
G02B
6/122 (20130101); G02B 6/262 (20130101); G02B
6/3514 (20130101); G02B 6/3818 (20130101); G02B
6/3546 (20130101); G02B 6/357 (20130101); G02B
6/3532 (20130101) |
Current International
Class: |
G02B
6/35 (20060101); G02B 6/26 (20060101); G02B
6/122 (20060101); G02B 6/38 (20060101); G02B
006/26 () |
Field of
Search: |
;385/15,16,17,18,19,20,21,22,24,47 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
|
|
|
|
|
|
|
56-24304 |
|
Mar 1981 |
|
JP |
|
56-74204 |
|
Jun 1981 |
|
JP |
|
Primary Examiner: Healy; Brian
Claims
What is claimed is:
1. An optical switch comprising:
four optical waveguides each having a tapered end comprising two
tapered edges and disposed on a support such that each tapered edge
of each waveguide is in opposed and near-abutting relation with a
tapered edge of another optical waveguide, said near abutment
defining a space between each pair of opposed tapered edges;
a first electromechanical actuator operable to move at least a
first optical device into and out of a path of an optical signal
travelling between two of the waveguides, wherein the first optical
device moves in the space between a first pair of opposed tapered
edges; and
a second electromechanical actuator operable to move at least a
second optical device into and out of the path of the optical
signal, wherein the second optical device moves in the space
between a second pair of opposed tapered edges, wherein
one tapered edge of the first pair and one tapered edge of the
second pair are common to one of the optical waveguides.
2. The optical switch of claim 1 wherein the tapered ends of two of
the four waveguides are in opposed relation and define a first gap
therebetween, and the tapered ends of the other two of the four
waveguides are in opposed relation and define a second gap
therebetween, and further wherein the first gap and the second gap
are substantially equal.
3. The optical switch of claim 1 wherein the first and second
electromechanical actuators and the four waveguides are disposed on
a first surface of the support.
4. The optical switch of claim 1 wherein the first actuator
comprises:
a movable conductive plate;
a fixed conductive plate, the fixed and movable plates suitably
placed to support an electrostatic charge therebetween operable to
cause the movable conductive plate to move towards the fixed
conductive plate; and
a linkage in mechanical communication with the movable plate and
the first optical device, wherein,
the linkage moves when the movable conductive plate moves, said
linkage movement causing the optical device to move from a first
unactuated position to a second actuated position.
5. The optical switch of claim 4 wherein the optical device moves
in a plane substantially parallel to a first surface of the
support.
6. The optical switch of claim 4 wherein the optical device moves
in a plane substantially orthogonal to a first surface of the
support.
7. The optical switch of claim 4 wherein the first unactuated
position of the optical device is out of the path of the optical
signal, and the second actuated position in the optical device is
in the path of the optical signal.
8. The optical switch of claim 4 wherein the first unactuated
position of the optical device is in the path of the optical
signal, and the second actuated position of the optical device is
out of the path of the optical signal.
9. An optical switch comprising:
four optical waveguides each having a tapered end comprising two
tapered edges and disposed on a support such that each tapered edge
of each waveguide is in opposed and near-abutting abutting relation
with a tapered edge of another optical waveguide, said near
abutment defining a space between each pair of opposes tapered
edges;
a first electromechanical actuator operable to move a first optical
device into and out of a path of a first optical signal travelling
between two of the waveguides and operable to move a second optical
device into and out of a path of a second optical signal traveling
between the other two optical waveguides, wherein the first and
second optical devices move in the space between a first pair of
opposed tapered edges; and
a second electromechanical actuator operable to move a third
optical device into and out of the path of the first optical signal
and operable to move a fourth optical device into and out of the
path of the second optical signal, wherein the third and fourth
optical devices move in the space between a second pair of opposed
tapered edges, wherein
one tapered edge of the first pair and one tapered edge of the
second pair are common to one of the optical waveguides.
10. The optical switch of claim 9 wherein the tapered ends of two
of the four waveguides are in opposed relation and define a first
gap therebetween, and the tapered ends of the other two of the four
waveguides are in opposed relation and define a second gap
therebetween, and further wherein the first gap and the second gap
are substantially equal.
11. The optical switch of claim 9 further comprising two optical
device supports, wherein the first and second optical devices are
disposed on opposite sides of the one optical device support and
the third and fourth optical devices are disposed on opposite sides
of the other optical device support.
12. The optical switch of claim 9 wherein the first and second
electromechanical actuators and the four waveguides are disposed on
a first surface of the support.
13. The optical switch of claim 9 wherein the first actuator
comprises:
a movable conductive plate;
a fixed conductive plate, the fixed and movable plates suitably
spaced to support an electrostatic charge therebetween operable to
cause the movable conductive plate to move towards the fixed
conductive plate; and
a linkage in mechanical communication with the movable plate and
the first optical device, wherein,
the linkage moves when the movable conductive plate moves, said
linkage movement causing the optical device to move from a first
unactuated position to a second actuated position.
14. The optical switch of claim 13, wherein the optical device
moves in a plane substantially parallel to a first surface of the
support.
15. The optical switch of claim 13, wherein the optical device
moves in a plane substantially orthogonal to a first surface of the
support.
16. The optical switch of claim 13 wherein the optical devices in
the first unactuated position are out of the path of the optical
signal, and the optical devices in the second actuated position are
in the path of the optical signal.
17. The optical switch actuator of claim 13 wherein the optical
devices in the first unactuated position are in the path of the
optical signal, and the optical devices in the second actuated
position are out of the path of the optical signal.
Description
FIELD OF THE INVENTION
The present invention relates to an optical switch in general, and,
more particularly, to a micro-machined optical switch.
BACKGROUND OF THE INVENTION
Electronically controlled micro-machined optical switches can be
used to interrupt or redirect light output from an optical fiber.
Such switches can be used in a variety of different applications in
an optical communications system. For example, a low insertion loss
optical switch with a high contrast ratio could be connected to
optical fibers to allow a variety of adaptive, reconfigurable
networks to be designed and constructed. Such switch would be used
to direct light from a source fiber to different destination
fibers. In the absence of additional focusing elements, the
insertion loss of such a switch increases as the number of source
and destination fibers increase. Such an increase in insertion loss
is due to geometric constraints associated with standard optical
fiber construction.
As an illustration of the above-described problem, consider an
arrangement of four optical fibers, wherein the fibers are arranged
end-to-end in pairs, with a gap between each pair of fiber ends.
The two arrangements of paired fibers are disposed orthogonally to
one another (and in the same plane) such that a gap between the
fiber ends of both pairs overlap. In other words, the fibers are
arranged at 0 degrees, 90 degrees, 180 degrees and 270 degrees.
Since fibers are typically cleaved such that a flat or slightly
angled face results, the ends of the above-described arrangement of
fibers must be spaced from one another by at least one fiber
diameter. Because a fiber typically consists of an optically active
core having a cladding (required for support and to prevent
undesired loss of light) of substantially larger diameter than such
core, a gap of even one fiber diameter can represent a distance
greatly exceeding the diameter of the core. Such a gap of one fiber
diameter often results in an unacceptably high insertion loss due
to the finite divergence of the optical signal. As such, the art
would benefit from a low-insertion-loss arrangement of a
micro-machined optical switch having at least four optical
fibers.
SUMMARY OF THE INVENTION
One-by-three and two-by-two optical switches comprising optical
waveguides or fibers with tapered ends that utilize electrically
controlled actuators are disclosed. In some embodiments, the
actuators are electrostatically driven. A one-by-three optical
switch comprises one source fiber for transmitting an optical
signal and three destination fibers for receiving the optical
signal. A two-by-two optical switch comprises two source fibers for
transmitting two optical signals and two destination fibers for
receiving the two optical signals. Optical devices placed in an
optical path between the various fibers direct the signals to
appropriate destination fibers.
The fiber ends are advantageously tapered allowing such ends to be
positioned suitably close to one another thereby yielding an
optical switch with low insertion loss. Yet, sufficient spacing is
provided between fiber ends to permit optical devices to move into
and out of an optical path between such fiber ends. Linkages
mechanically connect the optical devices to actuators. The
disclosed actuators can move the optical devices into and out of
the optical path by imparting either a vertical or horizontal
motion to the optical devices.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 depicts a schematic diagram of a one-by-three optical switch
with tapered fiber ends.
FIG. 2 depicts details of a tapered fiber end for use in
conjunction with the present optical switch.
FIG. 3 depicts tapered fiber ends that are adapted for reducing
back reflections.
FIG. 4 depicts geometric details of tapered fiber ends for use in
conjunction with the present optical switches.
FIG. 5a depicts a conceptual drawing of a one-by-three optical
switch of the present invention, showing an optical signal crossing
the switch along a first optical path.
FIG. 5b depicts a conceptual drawing of the one-by-three optical
switch of FIG. 5a, but showing the optical signal contacting a
first optical device and being diverted from the first optical
path.
FIG. 5c depicts a conceptual drawing of the one-by-three optical
switch of FIG. 5a, showing the optical signal contacting a second
optical device and
being diverted from the first optical path.
FIG. 6 depicts a schematic diagram of the two-by-two optical switch
with tapered fiber ends.
FIG. 7a depicts a conceptual drawing of the two-by-two optical
switch of FIG. 6, wherein a first optical signal crosses the switch
between a first pair of opposed waveguides and a second optical
signal crosses the switch between a second pair of opposed
waveguides.
FIG. 7b depicts a conceptual drawing of the two-by-two optical
switch having adjacent source waveguides, wherein the paths of two
optical signals are changed via contact with a first pair of
optical devices.
FIG. 7c depicts a conceptual drawing of the two-by-two optical
switch having opposed source waveguides, wherein the paths of two
optical signals are changed via contact with a second pair of
optical devices.
FIG. 8a depicts a schematic diagram of an in-plane actuator for the
one-by-three and the two-by-two optical switches.
FIG. 8b depicts a schematic diagram of the springs of the in-plane
actuator in an actuated state.
FIG. 9 depicts a schematic diagram of an out-of-plane actuator for
the one-by-three and the two-by-two optical switches.
DETAILED DESCRIPTION
FIG. 1 depicts an optical switch 100 in accordance with an
illustrated embodiment of the present invention. Optical switch 100
includes four waveguides 130, 140, 150 and 160, and two signal
directors 102 and 112 that are linked to respective actuators 108
and 118. Linkage 106 links signal director 102 and actuator 108,
and linkage 116 links signal director 112 and actuator 118.
Actuators 108 and 118 are operable to move respective signal
directors 102 and 112 in to and out of the paths of optical signals
(not shown) propagating between the various waveguides in region
110. In the embodiment depicted in FIG. 1, the actuators move
signal directors 102 and 112 along "in-plane" paths in a
reciprocating-like manner as shown by respective vectors 120 and
122. In other embodiments, the actuators move the signal directors
along an "out-of-plane" path, which, in FIG. 1, would move the
signal directors "out-of-the-page." Further description of
actuators suitable for providing the required functionality is
described later in this specification.
Once positioned in the path of an optical signal by an actuator,
signal director 102 or 112 is operable to alter the path of that
optical signal. Signal directors 102 and 112 comprise structures
suitable for affecting the path of an optical signal. The optical
signal may be reflected, in whole or in part, or may be optically
altered. Several non-limiting examples of such structures include
dielectric mirrors, reflective (e.g., metalized) surfaces,
dielectric filters, modulators, polarizers, attenuators and devices
having a nonlinear optical response such as frequency doublers.
The four waveguides 130, 140, 150 and 160 are depicted as optical
fibers in FIG. 1. For convenience, such waveguides will hereinafter
be referred to as "optical fibers" or "fibers" in the Detailed
Description, it being understood that in other embodiments, other
optical transmission media are used. The fibers are arranged in
opposed pairs, such that core end faces 138 and 158 of respective
fibers 130 and 150 "face" one another, as do core end faces 148 and
168 of respective fibers 140 and 160.
Each of the four optical fibers is similarly configured. Selecting
optical fiber 130 as an example, said optical fiber 130 includes a
core 131, cladding 132 and, advantageously, a tapered end 134.
Tapered end 134 is depicted in FIG. 1 by "slanted" lines or tapered
edges 136 and 137 in cladding 132, which slant towards core end
face 138 of core 131. Similarly, optical fibers 140, 150 and 160
include respective cores 141, 151 and 161, claddings 142, 152 and
162, and tapered ends 144, 154 and 164. One method for forming such
tapered edges is to heat an end of an optical fiber with a laser
while rotating the fiber about its lengthwise axis. It will of
course be appreciated that tapered end 134, when considered in
3-dimensions, is more properly visualized as the frustum of a cone
and that tapered edges 136 and 137 are simply a representation of a
portion of the surface of said frustum.
Fibers, such as fibers 140-160, possessing such a tapered end can
be disposed closer to one another than is possible with normally
cleaved fibers. Free-space path length between such fibers is
therefore reduced resulting in decreased insertion loss. Moreover,
the tapered edges of such tapered ends facilitate passage of
actuator linkages (e.g., linkages 106 and 116) between adjacent
fibers. For example, tapered edge 136 of optical fiber 130 and
tapered edge 147 of optical fiber 140 are in near-abutting
relation, but spaced far enough apart to allow for passage of
linkage 106 therebetween.
The tapered edges are advantageously configured to provide equal
distances between the end faces of the cores of opposed fibers. For
example, the distance between core end faces 138 and 158 (fibers
130 and 150) is desirously substantially equal to the distance
between core end faces 148 and 168. Such substantially equidistant
spacing is achieved by an appropriate fiber geometry. Referring to
FIG. 2, which depicts a representative fiber (fiber 150) from FIG.
1, angle .beta. subtended between a tapered edge 157 or 158 and an
adjacent lengthwise outer edge of a fiber should be in a range of
about 130 to about 140 degrees. As described in more detail later
in this specification, the angle .beta. may vary about the
circumference of the tapered end.
In illustrative optical switch 100 depicted in FIG. 1, the core end
faces of opposed fibers, such as fibers 130 and 150, are parallel
to one another and orthogonal to an optical signal (not shown)
passing from one of such fibers to the other fiber. Such an
arrangement may result in "back reflection," wherein a portion of
the optical signal incident on a core end face, such as core end
face 158, is reflected back to core end face 138. Back reflection
may also result within a single fiber, wherein a portion of the
optical signal is reflected back into an optical core, such as
optical core 131, as the optical signal exits a core end face, such
as core end face 138. Such back reflections undesirably increase
insertion losses. Back reflections may be reduced or eliminated by
changing the configuration of the core end faces.
FIG. 3 depicts illustrative optical switch 300 in accordance with
the present teachings, which is physically adapted to reduce back
reflections. The portion of optical switch 300 illustrated in FIG.
3 shows tapered ends 334, 344, 354 and 364 of fibers 330-360, with
"slanted" core end faces 338, 348, 358 and 368. Such "slanting"
reduces back reflections.
Optical signal S1 is refracted as it exits optical core 331 and is
refracted again as it enters optical core 351 of fiber 350. The
amount of refraction, or "bending," is defined by Snell's Law of
Refraction, which is given by:
where:
n.sub.1 is the refractive index of the optical core;
n.sub.2 is the refractive index of the media into which the signal
enters;
.theta. is the angle of incidence; and
.alpha. is the angle of refraction.
Assuming that the media is air, which has an index of refraction of
approximately one, Snell's Law reduces to:
Referring now to FIG. 4, in one embodiment, core end face 438 is
slanted about 8.degree. with respect to a "flat" face (i.e., a face
that is orthogonal to signal S1) to reduce back reflection. Thus,
the angle of incidence .theta. equals 8.degree.. Assuming a
refractive index of about 1.46 for optical core 431, the angle of
refraction .alpha. is about 12.degree..
To account for the angled core end face of fiber 430 and the
refraction of signal S1, optical axis 3--3 of destination fiber 450
must be offset from optical axis 4--4 of source fiber 430 by a
distance, d. The distance d is given by:
where:
D is a distance between the centers of the optical cores of the
source and destination fiber.
The distance, D, is set to be as small as possible to reduce
insertion losses due to the finite divergence of the optical signal
while allowing access for the signal directors between optical
fibers. Thus, if D equals 20 microns and .theta. is 8.degree., then
offset d is equal to about 1.7 microns.
Rather than "slanting" the core end face, in other embodiments,
other geometries are used for reducing back reflection, including,
for example, a rounded core end face. As will be appreciated by
those skilled in the art, such a rounded end face may better serve
a waveguide that does not exhibit the significant, well-defined
changes in refractive index characteristic of the core/cladding
arrangement of an optical fiber.
The operation of the present optical switch is now described with
reference to FIGS. 5a-5c and 7a-7c. In those Figures, waveguide
detail (e.g., tapering, etc.) and actuator detail is omitted for
clarity of illustration.
In a first embodiment illustrated in FIGS. 5a-5c, the present
optical switch functions as a 1.times.3 switch. In such a switch, a
signal, such as signal S2, is sourced from a single fiber, and is
delivered to any one of three destination fibers. In the embodiment
depicted in FIGS. 5a-5c, the source fiber is fiber 540. FIG. 5a
depicts optical signal S2 traveling unimpeded along optical axis
A--A from source fiber 540 to a first destination fiber 560.
Optical signal S2 crosses the switch to fiber 560 because neither
of signal directors 502 and 512 have been moved into the signal
path defined by optical axis A--A.
In FIG. 5b, signal director 502 is introduced into the path of
signal S2 via the action of linked actuator 508. Signal director
502 intercepts optical signal S2 and directs at least a portion of
that signal to fiber 550 along optical axis B--B. In FIG. 5c, after
signal director 502 is removed from the optical path via the action
of linked actuator 508, signal director 512 is moved into said
signal path via linked actuator 518. Signal director 512 intercepts
optical signal S2 and directs at least a portion of said signal S2
to fiber 530 along optical axis B--B.
Thus, signal S2 can be directed to any one of the three destination
fibers 530, 550 or 560. Fiber 560 is accessed by keeping both
signal directors out of the path of signal S2; fiber 550 is
accessed by introducing signal director 502 into the signal path;
and fiber 530 is accessed by introducing signal director 512 into
the path of signal S2. Optical switch 100 depicted in FIG. 1
suitably functions as a 1.times.3 switch. By adding an additional
two signal directors, such a switch can function as a 2.times.2
switch. In a 2.times.2 switch, two optical signals that are
sourced, one each, from two source fibers, can be directed to
either one of two destination fibers. FIG. 6 depicts an
illustrative embodiment of such a 2.times.2 switch. Switch 600
includes four signal directors; signal directors 602 and 604 are
disposed on opposite sides of linkage 606, and signal directors 612
and 614 are disposed on opposite sides of linkage 616. Actuator 608
drives linkage 606 and actuator 618 drives linkage 616. Switch 600
is otherwise identical in structure to switch 100, including four
fibers 630, 640, 650 and 660, each having respective tapered ends
634, 644, 654 and 664.
The operation of optical switch 600 is described in conjunction
with FIGS. 7a-7c. FIG. 7a depicts optical signal S3 traveling
unimpeded along optical axis B--B from source fiber 730 to a
destination fiber 750 and optical signal S4 traveling unimpeded
along optical axis A--A from source fiber 740 to destination fiber
760. Optical signals S3 and S4 cross switch 600 because the signal
directors are out of the optical paths of the signals.
In FIG. 7b, signal directors 702 and 704 are introduced into the
paths of signals S4 and S3, respectively. Signal director 702
intercepts signal S4 and redirects at least a portion of it from
its original path, which was towards fiber 760, to a new path along
optical axis B--B towards fiber 750. Signal director 704 intercepts
signal S3 and redirects at least a portion of it from its original
path, which was towards fiber 750, to a new path along optical axis
A--A towards fiber 760.
In the illustrative examples depicted in FIGS. 7a and 7b, signals
S3 and S4 are sourced from fibers 730 and 740. It should be
understood that signal directors 702 and 704 can be used for
redirecting signals sourced from other pairs of fibers, as well. In
particular, signal directors 702 and 704 can be used for
redirecting signals from the following fiber pairs: fibers 730 and
740; fibers 740 and 760; fibers 730 and 750; and fibers 750 and
760. When signals are sourced from fibers 740 and 750, only signal
director 702 is required for redirecting both signals. When signals
are sourced from fibers 730 and 760, only signal director 704 is
required for redirecting both signals.
In FIG. 7c, signal directors 702 and 704 have been removed from the
paths of optical signals S4 and S3, and signal directors 712 and
714 are introduced therein. Signal S4 is sourced from fiber 740 and
signal S3 is sourced from fiber 760. Signal director 712 intercepts
signal S4 and redirects at least a portion of it from its original
path, which was towards fiber 760, to a new path along optical axis
B--B towards fiber 730. Signal director 714 intercepts signal S3
and redirects at least a portion of it from its original path,
which was towards fiber 740, to a new path along optical axis B--B
towards fiber 750.
In addition to redirecting signals sourced from fibers 740 and 760,
signal directors 712 and 714 can be used for redirecting signals
from the following fiber pairs: fibers 740 and 750; fibers 730 and
750; and fibers 730 and 760. When signals are sourced from fibers
730 and 740, only signal director 712 is required for redirecting
both signals S3 and S4. Similarly, when signals are sourced from
fibers 750 and 760, only signal director 714 is required for
redirecting both signals.
The structure and operation of several illustrative examples of
optical switches in accordance with the present teachings have been
described above. A detailed description of the structure, operation
and fabrication of actuators suitable for moving the signal
directors into and out of the path of the optical signals is now
presented.
FIG. 8a depicts a first illustrative embodiment of actuator 800
suitable for use as actuators 108 and 118 depicted in FIG. 1,
actuators 508 and 518 depicted in FIGS. 5a-5c, actuators 608 and
618 depicted in FIG. 6, and actuators 708 and 718 depicted in FIGS.
7a-7c. A second embodiment of actuator 900 suitable for use as such
above-mentioned actuators is depicted in FIG. 9. For the purposes
of simplicity and clarity only two waveguides, one actuator and one
linkage are depicted in FIGS. 8a and 9.
Referring to FIG. 8a, actuator 800 comprises several hinged plates.
Forming such hinged plates is known in the art. See, Pister et al.,
"Mircofabricated Hinges," vol. 33, Sensors and Actuators A, pp.
249-56, 1992. See also assignee's co-pending patent applications
MICRO MACHINED OPTICAL SWITCH, filed May 15, 1997 as Ser. No.
08/856,569; and METHODS AND APPARATUS FOR MAKING A MICRODEVICE,
filed May 15, 1997 as Ser. No. 08/056,565, both of which
applications are incorporated by reference herein.
Illustrative actuator 800 of FIG. 8a is configured to provide
"in-plane" switching, and illustrative actuator 900 of FIG. 9 is
configured to provide "out-of-plane" switching. As used herein, the
terms "in-plane", horizontal, "out-of-plane" and vertical reference
a direction or location relative to the surface of the support upon
which the optical switch resides. For example, in-plane or
horizontal movement refers to movement in a direction parallel to
the surface of the support.
"In-plane" actuator 800 of FIG. 8a has a fixed electrode 870 and a
movable electrode 871 that are spaced from one another. Fixed
electrode 870 is preferably hinged (hinges not shown) to support
872, and a support plate (not shown) is used to support fixed
electrode 870 in an upright or out-of-plane position. Fixed
electrode 870 is connected to a controlled voltage source (not
shown) via a conductor (not shown). Fixed electrode
870 and movable electrode 871 are suitably spaced so that upon
application of voltage via the controlled voltage source, an
electrostatic attraction is developed between the electrodes
sufficient to cause movable electrode 871 to swing towards fixed
electrode 870.
Movable electrode 871 is suspended by suspension means 873, which
are shown as hinges, from cross member 874 of frame 875. The
suspension means 873 is suitably configured to allow movable
electrode 871 swing towards fixed electrode 870. Frame 875 is
hinged to support 872 by hinges (not shown) and secured in an
out-of-plane position by supports (not shown).
In the embodiment shown in FIG. 8a, a linkage 876 consists of a
hinged sled 877 and an optical device support 878 which is hinged
to sled 877 via hinges 879. Optical device support 878 includes a
projection 880 upon which optical device 804 is disposed. Optical
support device 878 is fixed in an upright, out-of-plane position as
required for it to project between optical waveguides 830 and 840
by support means (not shown), and, optionally by gluing hinges
879.
As formed, hinged plates, such as optical device support 878, lie
flat on or near the surface of the substrate. Thus, assembling a
structure from such plates requires rotating them about their
hinges, out of the plane of the substrate. Typically, some of the
hinged plates will be rotated by ninety degrees and others by a
lesser amount. See assignee's co-pending patent application
SELF-ASSEMBLING MICRO-MECHANICAL DEVICE, filed Dec. 22, 1977 as
Ser. No. 08/997,175, incorporated by reference herein.
Sled 877 consists of a first member 881 that is linked or attached
to movable electrode 871 and a second member 882 to which optical
device support 878 is attached. First and second members 881 and
882 are interconnected via hinge 883, which functions as an
out-of-plane decoulper. In other words, hinge 883 allows first
member 881 to move, in an out-of-plane direction, independently of
second member 882. This ensures that movement of optical device 804
into and out of the optical path is not affected by any
out-of-plane component of motion imparted to first member 881 as a
result of the motion of movable electrode 871 as it swings towards
and away from fixed electrode 870.
Projection 880 of optical device support 878 is situated in space
869 between optical fibers 830 and 840. As depicted in FIG. 8a,
optical fibers 830 and 840 are disposed on support 872. It should
be appreciated, however, that optical fibers 830 and 840 may be
disposed on a support different than support 872. When actuator 800
is actuated (i.e., voltage is applied), movable electrode 871 is
drawn towards fixed electrode 870. As a result, sled 877 moves away
from the intersection of axes A--A and B--B coinciding with the
optical path defined by optical cores 831 and 841 (i.e., the sled
moves towards the left in FIG. 8a).
A structure suitable for providing a restoring force, such as
springs 884, are attached to edges 885 and 886 of second member 882
and attached to substrate 872 at spring ends 887. In the actuated
state springs 884 are deformed as depicted in FIG. 8b. Once the
actuating voltage is removed, springs 884 provides a restoring
force or bias to return sled 877 to its unactuated position, as
depicted in FIG. 8a. In such a state, movable electrode 871 hangs
substantially vertically along axis C--C. It can be seen that as
actuator 800 goes from the actuated state to the unactuated state,
sled 877 will move toward the intersection of axes A--A and B--B.
The spacing between electrodes 870 and 871 is set so that in the
unactuated state optical device 804 does not intersect the optical
path and in the actuated state optical device 804 does intersect
the optical path.
It should be appreciated that the optical switch can be configured
so that optical device 804 is at a first position (in the optical
path) when actuator 800 is unactuated, and at a second position
(out of the optical path) when actuator 800 is actuated, or vice
versa. As depicted in FIG. 8a, notch 888 can be positioned at the
first position when actuator 800 is unactuated to position optical
device 804 at the second position. It should also be appreciated
that actuator 800 must impart sufficient in-plane motion to optical
device 804 to allow another optical device, which is situated on
another linkage, to move into the optical path when optical device
804 is out of the optical path.
In the illustrative embodiment of the present invention for the
two-by-two optical switch 600, the optical devices actuated by one
of the actuators will typically be within the optical path while
the optical devices of the other actuator will typically be out of
the optical path. Also, one of the actuators is typically in its
actuated state while the other actuator is in the unactuated state.
It should be appreciated, however, that the optical switch can be
configured to permit synchronous actuation of the two
actuators.
The in-plane actuator 800 of FIG. 8a is not limited to the use of a
single fixed electrode and a single movable electrode. Multiple
fixed and movable electrodes may be configured as interdigitated
fixed and movable teeth members. An actuator with such
interdigitated fixed and movable teeth members is often referred to
as a "comb" drive and is ell known in the art.
FIG. 9 depicts of out-of-plane actuator 900, linkage 989 and
optical device 904. Optical fibers 930 and 940 are disposed on
support 972. It should be appreciated, however, that optical fibers
930 and 940 may be disposed on another support different from
support 972. Linkage 989 mechanically links or interconnects
actuator 900 to optical device 904. In an unactuated state, linkage
989 is situated substantially parallel to surface 972a and passes
through gap 890 between optical waveguides 930 and 940. Linkage 989
and optical device 904 are positioned relative to waveguides 930
and 940 so that optical device 904 is movable between a first
position that is in the path of an optical signal traveling between
optical waveguides 930 and 940 and a second position that is out of
the optical path between optical waveguides 930 and 940.
Actuator 900 imparts a vertical or out-of-plane motion to linkage
989, and optical device 904 therefore moves in a substantially
"up-and-down" or vertically reciprocating motion into and out of
the optical path. It should be appreciated that the optical switch
can be configured so that optical device 904 is at a first position
(in the optical path) when actuator 900 is actuated, and at a
second position (out of the optical path) when actuator 900 is not
actuated, or vice versa. It should also be appreciated that
actuator 900 must impart sufficient vertical motion to optical
device 904 to allow another optical device, which is situated on
another linkage, to move into the optical path when optical device
904 is out of the optical path.
Actuator 900 includes two conductive surfaces or electrodes:
movable plate electrode 992 and fixed electrode 991. Movable plate
electrode 992 is suspended by a flexible support (not shown) over
fixed electrode 991 that is disposed on surface 972a of substrate
972. Movable plate electrode 992 may be fabricated from doped
polysilicon or other conductive materials. Fixed electrode 991 may
be fabricated from doped polysilicon or other conductive materials,
or alternatively, substrate 972 may be suitably doped to render a
region thereof conductive to function as fixed electrode 991.
Linkage 989 includes beam 993 disposed on a fulcrum 994. Fulcrum
994 is fixed to substrate surface 972a, and divides beam 993 into a
first part 993a and a second part 993b. Beam 993 underlies a
portion of movable plate electrode 992 at beam end 993c. Beam end
993c is mechanically connected (connection not shown) or
mechanically engaged to such portion of movable plate electrode
992. A flexible suspension means (not shown) may be used to secure
beam 993 to substrate surface 972a.
In one embodiment, optical device support 995 is attached to beam
993 near beam end 996. Optical device support 995 includes a
projection 997 upon which optical device 904 is disposed. In some
embodiments optical device support 995 is hinged to beam 993 via
hinges 998 and held by supports (not shown) in an upright
out-of-plane position as required for it to project between
waveguides 930 and 940.
Electrodes 992 and 991 of plate actuator 900 are in electrical
contact with a voltage source (not shown). When a voltage is
applied across plate actuator 900, an electrostatic attraction is
developed between movable plate electrode 992 and fixed electrode
991. Such attraction causes movable electrode 992 to move
downwardly towards fixed electrode 991. As movable electrode 992
moves downwardly, first part 993a of beam 993 is forced downwardly
towards substrate surface 972a. Due to the presence of fulcrum 994,
second part 993b of beam 993 moves upwardly as first part 993a
moves downwardly, in the manner of a "seesaw" or "teeter." By
suitably selecting the distance between fulcrum 994 and optical
device 904, the optical device is caused to move into, and out of,
the optical path defined by fiber cores 931 and 941 as a function
of the oscillatory motion of plate electrodes 992 and 991.
Additionally, by suitably positioning fulcrum 994 near fixed
electrode 991 and by suitably setting the relative length of first
part 993a to second part 993b, the optical device is lifted
sufficiently away from the optical path to permit a second optical
device, driven by a second actuator, to move into and out of the
optical path.
In the embodiment pictured in FIG. 9, the optical device moves out
of the optical path as bias is applied. It will be appreciated that
in other embodiments, the optical switch can be configured so the
optical device moves into the optical path when bias is applied.
Plate electrodes 991 and 992, hinges and various support plates
comprising the out-of-plane optical switch can be fabricated and
assembled as described for the `in-plane` optical switch.
Although FIGS. 8a and 9 depict a single optical device, it will be
clear to those skilled in the art that the two optical devices can
be fixed on opposite surfaces of the optical device support. In
such a manner the aforedescribed in-plane and out-of-plane
actuators can be use for 2.times.2 optical switches.
It is to be understood that the above-described embodiments are
merely illustrative of the invention and that many variations may
be devised by those skilled in the art without departing from the
scope of the invention. It is therefore intended that such
variations be included within the scope of the following claims and
their equivalents.
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