U.S. patent number 5,440,477 [Application Number 08/056,216] was granted by the patent office on 1995-08-08 for modular bottle-mounted gas management system.
This patent grant is currently assigned to Creative Pathways, Inc.. Invention is credited to Roderick G. Rohrberg, Timothy K. Rohrberg, Russell D. Young.
United States Patent |
5,440,477 |
Rohrberg , et al. |
August 8, 1995 |
**Please see images for:
( Certificate of Correction ) ** |
Modular bottle-mounted gas management system
Abstract
A Modular Bottle-Mounted Gas Management System (10) that
overcomes the problems encountered by previous gas cabinet
equipment is disclosed. The present invention comprises a complete
gas manifold (22) that includes computer-controlled valves,
actuators, regulators and transducers. The entire system resides
within a housing (11) that sits atop a conventional gas bottle (12)
that would normally be enclosed within a gas cabinet (25) that is
many times the volume of the Modular Bottle-Mounted Gas Management
System 10. Outside the housing (11), an upper control panel (13)
contains an LCD display (14) and a lower control panel (15) holds a
keypad control (16), a removable data pack (17), LED indicator
lights (18), and an emergency shut-off switch (19). Inside the
housing (11), a bottle neck (20) protrudes up from the gas bottle
(12) and provides a connection for a supply of gas within it to a
gas manifold (22). The gas manifold (22) is an assembly of valves,
actuators, pressure regulators, welded fittings, and transducers.
The top of the housing (11) is fitted with a process gas outlet
(21a), a vent connection (21b), a nitrogen inlet (21c), and a
bottle access cover (21d). The top portion of the hinged housing
(11) may be swung open to provide access to the gas manifold (22).
The present invention provides safe handling of toxic, corrosive,
and pyrophoric gases in a double-containment vessel. It utilizes
component-to-component welds (65) to allow for the absolute
reduction of the size of the manifold (22) while simultaneously
reducing the number of mechanical connections. This advanced design
delivers unprecedented levels of cleanliness by minimizing the
number of particulate traps within the manifold (22).
Inventors: |
Rohrberg; Roderick G.
(Torrance, CA), Young; Russell D. (Redondo Beach, CA),
Rohrberg; Timothy K. (Torrance, CA) |
Assignee: |
Creative Pathways, Inc.
(Torrance, CA)
|
Family
ID: |
24822872 |
Appl.
No.: |
08/056,216 |
Filed: |
April 30, 1993 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
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702856 |
May 20, 1991 |
|
|
|
|
Current U.S.
Class: |
700/83; 700/282;
137/588 |
Current CPC
Class: |
F17C
13/02 (20130101); F17C 13/04 (20130101); F17C
2205/0111 (20130101); F17C 2227/0114 (20130101); F17C
2221/011 (20130101); F17C 2223/0153 (20130101); F17C
2221/014 (20130101); F17C 2260/036 (20130101); F17C
2221/017 (20130101); F17C 2260/053 (20130101); F17C
2205/0341 (20130101); F17C 2205/0326 (20130101); F17C
2221/016 (20130101); F17C 2260/011 (20130101); Y02E
60/32 (20130101); F17C 2223/0123 (20130101); F17C
2205/0176 (20130101); F17C 2221/012 (20130101); Y10T
137/86332 (20150401); F17C 2250/0636 (20130101); F17C
2205/0338 (20130101); F17C 2227/044 (20130101); Y02E
60/321 (20130101); F17C 2205/0146 (20130101); F17C
2221/032 (20130101); F17C 2221/037 (20130101); F17C
2250/032 (20130101); F17C 2250/0465 (20130101); F17C
2270/0518 (20130101); F17C 2270/0745 (20130101); F17C
2250/043 (20130101); F17C 2205/0332 (20130101) |
Current International
Class: |
F17C
13/04 (20060101); F17C 13/00 (20060101); F17C
13/02 (20060101); G05B 015/00 () |
Field of
Search: |
;219/69G ;222/127,135
;364/510,509,558,141,143,569,468 ;604/246
;137/15,561,587,588,589,583-584 ;365/52 ;98/32 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Trammell; James P.
Attorney, Agent or Firm: Anglin & Giaccherini
Parent Case Text
CLAIM FOR PRIORITY
The Applicants hereby claim the benefit of priority under Sections
119 and 120 of Title 35 of the United States Code of Laws for any
and all subject matter which is commonly disclosed in the present
application and in pending patent application entitled
Bottle-Mounted Cube by Roderick G. Rohrberg et al., filed on May
20, 1991 and assigned U.S. Ser. No. 07/702,856. This is a CIP of
U.S. Ser. No. 07/702,856, now abandoned.
Claims
What is claimed is:
1. An apparatus for use in combination with a gas bottle (12)
comprising:
a housing (11); said housing being adapted to mount directly on the
top of said gas bottle (12);
said housing (11) having a gasket (144) for forming a seal between
said gas bottle (12) and said housing (11);
a gas outlet (21a); said gas outlet (21a) extending through said
housing
a gas manifold (22); said gas manifold (22) being mounted within
said housing (11);
said gas manifold (22) being capable of receiving gas directly from
said gas bottle (12);
said gas manifold (22) being capable of controlling the flow of gas
to said gas outlet (21a);
a purge gas inlet (21c) for receiving a purge gas to purge said
housing (11) and said gas manifold (22); and
a vent (21b) for venting said housing (11) and said gas manifold
(22).
2. An apparatus as recited in claim 1, further comprising: a
display (14) for monitoring the flow of said gas; said display (14)
being mounted on said housing (11).
3. An apparatus as recited in claim 1, further comprising:
a keypad control (16) for entering commands to control the flow of
said gas; said keypad control (16) being mounted on said housing
(11).
4. An apparatus as recited in claim 11, further comprising:
a computer and memory (164, 208) for automatically controlling the
flow of said gas; said computer and memory (164, 208) being coupled
to said gas manifold (22), said display (14) and said keypad
control (16).
5. An apparatus as recited in claim 1, further comprising:
a removable data pack (17) for controlling access to said computer
and memory (164, 208) and to said keypad control panel (16); said
removable data pack (17) being removably mounted in said housing
(11).
6. An apparatus as recited in claim 1, further comprising:
an emergency shut-off switch (19); said emergency shut-off switch
(19) being mounted on said housing (11).
7. An apparatus as recited in claim 1, in which said gas manifold
(22) is assembled using component-to-component welds.
8. An apparatus as recited in claim 1, in which said housing (11)
is capable of being evacuated and pressurized.
9. An apparatus as recited in claim 1 used in combination with a
Containerized Controller 228.
Description
FIELD OF THE INVENTION
The present invention is a system that provides an intelligent gas
control system. The Modular Bottle-Mounted Gas Management System is
a clean, efficient, and reliable gas management device that
provides all the features of previous gas cabinets in a
revolutionary safe and serviceable micro-miniature design.
BACKGROUND OF THE INVENTION
Many industrial processes require equipment that is capable of
automatically controlling supplies of gases and fluids. The
fabrication of integrated circuits generally includes a process
such as chemical vapor deposition in which a variety of heated
gases is introduced into a partially evacuated chamber confining a
semiconductor substrate. By carefully managing the temperature and
pressure within this enclosure, various layers of conductive,
insulative, and semiconductive materials are grown on the substrate
to create the three-dimensional circuit patterns of an integrated
circuit. All of the substances that are transported in and out of
the chamber must be constantly monitored, since the proportions of
the different reactants that constitute the vapor atmosphere
ultimately determine the physical dimensions of the transistors,
capacitors, and resistors that will collectively comprise a single,
vast electrical circuit on a tiny chip of silicon. One of the
greatest causes of failures of finished integrated circuits is
attributable to microscopic dust particles that contaminate the
workspace where the chip is manufactured. Since even one tiny
foreign body can ruin a very expensive chip, semiconductor makers
fabricate their products in a "clean room" environment that guards
against such contamination. The air which is admitted into a clean
room is first passed through an extensive filtration system that
virtually eliminates unwanted dust particles. Technicians who work
within these facilities wear special clothing and masks that
prevent the introduction of substances that would interfere with
their meticulous work. The cost of building, maintaining, and
operating this highly specialized environment is enormous.
Consequently, all the space within a clean room must be utilized as
efficiently as possible. All the equipment that is used within the
confines of the clean room should occupy as small a volume as is
practical. In addition to this critical need for miniaturization,
the chemicals employed in the vapor deposition method must be
housed and conveyed with great care. The solvents, acids, oxidizing
agents, and other substances used in the semiconductor laboratory
are often caustic or toxic. The devices that are selected to
conduct these potentially hazardous materials should be capable of
providing reliable service free from wear, corrosion, or
leakage.
In U.S. Pat. No. 4,989,160, Garrett et al. applied modular process
control hardware to rather conventional gas control devices, using
widely accepted instrumentation and control techniques. While such
methods begin to deal with some of the improvements needed in gas
management control, they have failed to address many of the design
shortcomings of gas management systems.
Gas manifolds in present systems commonly use stainless alloy
tubing and swaged fittings to supply the connections between
manifold components, such as valves, regulators, and pressure
sensors. These complex assemblies of tubing and fittings suffer
from a high parts count. The gas manifolds are large and bulky, and
the large, internal gas volume results in large purge times, with
an excess waste of costly purge gases. The large volumes of
potentially hazardous process gases to be purged create safety and
disposal problems when the process gases are purged from the
system. Tubing and fitting assemblies are also prone to leakage
from improper assembly, service, or damage during use.
Previous solutions such as those offered by Garrett et al. have
also failed to improve upon the safety, cost, and extensive
downtime for the service of manifolds or controls. These systems
are installed integrally within the large gas system containment
cabinets. When preventative maintenance, calibration or repair is
required, the system cabinet must be taken off line for a prolonged
period of time. Service personnel are then required to perform all
service tasks with the equipment in position, within the clean-room
environment. This is an inefficient environment for equipment
service, and can pose safety risks from exposure to process gases
during this service interval.
Since the entire manifold and control are integral with the
cabinet, the increased risk of contamination to the clean-room area
by these non-manufacturing service activities is unavoidable.
Should a particular gas cabinet be disabled for a prolonged period,
the only way that manufacturing can be resumed in areas that had
relied upon that gas management device is if another large and
costly gas cabinet has been installed to provide appropriate levels
of redundancy.
Previous gas cabinet systems that have been incorporated into chip
fabrication systems have served the needs of semiconductor
manufacturers adequately, but at a high cost in terms of the great
space and volumes that they occupy. The shortcomings of
conventional gas control devices has presented a major challenge to
designers in the field of industrial controls. The development of a
miniaturized, modular, safe, and clean gas management system that
provides intelligent automated control for integrated circuit
fabrication would constitute a major technological advance. The
enhanced performance that could be achieved using such an
innovative device would satisfy a long felt need within the
computer industry.
SUMMARY OF THE INVENTION
The Modular Bottle-Mounted Gas Management System disclosed and
claimed in this patent application is a miniature gas management
system that overcomes the problems encountered by previous gas
cabinet equipment. The present invention comprises a complete gas
manifold that includes computer-controlled valves, actuators,
regulators and transducers. The entire system resides within a
housing that sits atop a conventional gas bottle that would
normally be enclosed within a gas cabinet. The present invention
includes an LCD display screen that continuously presents all
current pressures within the system when it is not being cycled.
The screen gives step by step procedures and warnings of any
unsuccessful checks to the operator. The screen is coupled to LED
indicator lights for viewing the status of the system. A removable
8K-byte EEPROM data pack which stores information about the gas
control procedure is inserted in a socket in the front panel of the
housing. The data pack allows only qualified personnel to access
purge cycling and maintains a constant log of cycling operations
and operators. An emergency shut off valve is also located on the
front panel. This innovative configuration is designed for use as a
stand-alone unit or may be controlled by a link to a remote
computer.
The Modular Bottle-Mounted Gas Management System is a modular unit
that is nearly twenty times smaller than previous equipment which
is capable of performing equivalent functions. The present
invention automatically cycles and directs the flow of process and
purge gases to an industrial operation. The greatly diminished
volume of the unit reduces the amount of process gas in the system
at any given time, compared to the amounts of gas held in much
larger conventional gas cabinets. This reduction of total volume
keeps the time it takes to evacuate the system at a minimum, and
results in a much safer gas management system.
The present invention provides safe handling of toxic, corrosive,
and pyrophoric gases in a double-containment vessel. It utilizes
component-to-component welds throughout the gas manifold, which
allows for the absolute reduction of the size of the manifold while
simultaneously reducing the number of mechanical connections. This
advanced design delivers unprecedented levels of cleanliness by
minimizing the number of particulate traps within the manifold. The
invention employs a housing that affords quick and easy
installation and modification. The top portion of the Modular
Bottle-Mounted Gas Management System is hinged and swings open for
easy access, service, and trouble-shooting. This lightweight unit
is easy to transport and handle.
An on-board memory stores system variables which can be accessed by
the user. The CPU controlled system constantly monitors the status
of the gas transfer operation and also provides self-diagnostic and
leak-checking functions.
The present invention incorporates the latest miniaturized
connector technology in a package that is safe and reliable. This
invention will become the standard-bearer for sub-micron integrated
circuit technology and constitutes a major step forward in the
field of industrial controls.
An appreciation of other aims and objectives of the present
invention and a more complete and comprehensive understanding of
this invention may be achieved by studying the following
description of a preferred embodiment and by referring to the
accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1(a) and 1(b) perspective and side sectional views of the
present invention, the Modular Bottle-Mounted Gas Management
System.
FIGS. 2(a) and 2(b) present from and side views of a conventional
two bottle gas cabinet.
FIG. 3 depicts a two bottle gas cabinet with its door open,
revealing the interior gas bottles and control mechanisms, as well
as the component-to-component construction employed in the present
invention.
FIG. 4 is a detailed diagram of the gas bottles and control
hardware for a conventional gas cabinet employing the construction
methods of the present invention shown in FIG. 3.
FIG. 5 is a front view of the Modular Bottle-Mounted Gas Management
System.
FIG. 6 is a sectional side view of the present invention.
FIG. 7 is a rear view of the present invention, which reveals
details of the component-to-component welded construction employed
in the gas manifold.
FIG. 8 is a top view of the Modular Bottle-Mounted Gas Management
System.
FIG. 9 is an illustration of the control panel of the present
invention.
FIGS. 10(a) and (b) present front and side views of the stand-alone
slave computer board that controls the operation of the present
invention.
FIGS. 11(a) and (b) are block diagrams of the controller and power
supply circuits within the Modular Bottle-Mounted Gas Management
System.
FIG. 12 is an overhead view of the motherboard that is coupled to
the slave computer boards shown in. FIGS. 10(a) and (b) .
FIGS. 13(a), (b),(c) and (d) are illustrations showing an alternate
embodiment of the present invention, the Containerized
Controller.
FIGS. 14(a), (b), and (c) are top, front, and side views of the
exterior of the Containerized Controller.
FIGS. 15(a), (b), and (c) are detailed top, front, and side views
of the exterior and interior of the Containerized Controller.
FIGS. 16(a), (b) and (c) present detailed views of the regulator
mechanism used in the present invention.
FIG. 17 shows the electronic configuration of a servo regulator
circuit that is used in the present invention.
FIG. 18 is an expanded assembly view that shows how a gas bottle is
attached to the present invention.
FIG. 19 is an illustration which shows two Modular Bottle-Mounted
Gas Management Systems within a larger containment cabinet.
FIG. 20 depicts an alternate embodiment of the present invention,
the Miniature Cabinet.
FIG. 21 is a side view of the Miniature Cabinet.
FIG. 22 is a detailed front view of the Miniature Cabinet.
DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT
FIG. 1(a) is a perspective view of the Modular Bottle-Mounted Gas
Management System 10. A housing 11 is affixed to a standard gas
bottle 12. An upper control panel 13 contains an LCD display 14 and
a lower control panel 15 holds a keypad control 16, a removable
data pack 17, LED indicator lights 18, and an emergency shut-off
switch 19. Within the housing 11, a bottle neck 20 protrudes up
from the gas bottle 12 and provides a connection 20a for a supply
of gas within it to a gas manifold 22. FIG. 1(b) is a sectional
side view of the upper portion of the Modular Bottle-Mounted Gas
Management System 10, which reveals the top portion of the hinged
housing 11 swung open to provide easy access to the gas manifold 22
and to the bottle neck 20. The gas manifold 22 is an assembly of
valves, actuators, pressure regulators, welded fittings, and
transducers which are described below in great detail. The top of
the housing 11 is fitted with a process gas outlet 21a, a vent
connection 21b, a nitrogen inlet 21c, and a bottle access cover
21d.
FIGS. 2(a) and 2(b) present front and side views of a conventional
gas management system cabinet 24 which the Modular Bottle-Mounted
Gas Management System 10 replaces. In sharp contrast to the present
invention, which measures approximately eleven by ten by fourteen
inches, the conventional gas management system 24 illustrated in
FIG. 2 is roughly seven feet high, three feet wide, and over one
foot deep. The older conventional gas management system 24
comprises a cabinet housing 25, a hinged door 26, a handle 28, and
louvered inlet vents 30 which enable a constant negative pressure
to be maintained within the cabinet housing 25. A window 32 affords
a view to the hardware and gas bottles 12 contained inside the
cabinet housing 25. A conventional control panel 34 includes a
standard LCD display screen 36, an emergency stop switch 38,
control switches 40, a keypad 42, a data pack 44, and LED indicator
lights 46. An outlet vent 48 is mounted on top of the cabinet
housing 25 behind the control panel 34.
Located within this conventional gas management system 24 is a
large and complex network of valves, sensors, actuators, and
transducers, mechanically connected through a manifold system in
which to carry out the gas management functions. Construction
methods used in these conventional gas management systems 24 rely
heavily on swaged tubing assemblies between manifold components.
Such construction systems suffer from a high parts count, and
frequently have quality control problems in establishing and
preserving leak-proof seals from the swaged joints.
In the assembly of these swaged tubing assemblies, it is not
uncommon for assembly personnel to reverse internal beveled swage
rings or backing rings, or to incorrectly tighten swaged
components, or to incorrectly mix and match swaging hardware with
fittings supplied by different manufacturers. Any of these assembly
defects can cause process gas leakage from these swaged joints.
In the manufacture of intermediate tubing joints within a
conventional gas management system 24, the use of bending fixtures
and cutting jigs can introduce tolerance problems for the tubing
components. These inconsistencies in tubing can introduce alignment
problems for components in the manifold system. A "stack-up" of
tolerances across a manifold assembly employing numerous
components, tubing, and swaged fittings can lead to problems in
alignment, making leak-proof assemblies difficult to achieve in
practice.
When assembling a large, conventional manifold with numerous
components, tubing connections, and swaged fittings, the tightening
of one fitting in the assembly can affect the integrity of other
connections within the assembly. This problem can also occur later,
when the manifold is in service. Any adjustment, tightening, or
movement to the manifold can introduce leakage to portions of the
manifold assembly.
FIG. 3 reveals a view of the advanced construction techniques
employed by the present invention, as they would be implemented
within a conventional gas cabinet housing 25, shown with the
cabinet door 26 opened. Two gas bottles 12 which each have a
standard bottle neck 52 and a valve handle 54 reside within the
cabinet housing 25. An advanced gas manifold assembly 59 is located
above the gas bottles 12 within the cabinet 25.
FIG. 4 provides a detailed schematic view of the advanced gas
manifold assembly 59 installed in a conventional gas management
cabinet housing 25. The lower section of a process gas line 56
leads from the left gas bottle 12 to an upper portion of a process
gas line 58 that is connected to the gas manifold assembly 59. A
VCR-type connector 60 is connected in series to a filter 61,
another VCR-type connector 60, a MicroFit cubical welding fitting
62, a transducer 63, an excess flow valve 64, and another VCR
connector 60. A mounting plate 66 is affixed to the rear wall of
the gas cabinet housing 25 and supports the central portion of the
gas manifold assembly 59. A valve body 67 is attached to the lower
left corner of the mounting plate 66. A valve body 67 is welded
directly to a MicroFit fitting 68, using a component-to-component
weld 65. The Microfit fitting 68 is also welded directly, using
another component-to-component weld 65, to a pressure regulator 69
and to another valve body 70. The valve body 70 is welded in series
to a MicroFit fitting 71, and is coupled to a VCR connector 72,
another MicroFit fitting 73, a check valve 74, another VCR
connector 75, another MicroFit fitting 76, and a terminal purge
manifold pressure transducer 77. The MicroFit fitting 76 is also
connected to a pressure regulator 78 which is supported by a
mounting panel 79 that also bears a MicroFit fitting 80, a valve
body 82, and another MicroFit fitting 84. The MicroFit fitting 84
is coupled to a transducer 86, another MicroFit fitting 88, a VCR
connector 89, a filter 90, and a VCR connector 91 which leads to a
gas line 92 that is connected to the right gas bottle 12.
A valve body 94 is attached to the right portion of the mounting
plate 66 shown in FIG. 4. A MicroFit fitting 96 is connected to
valve 94, a transducer 98, a vent line 100, and another valve 104.
The vent line 100 passes through the housing 25 via a bulkhead
connector 102. The valve body 104 is connected through a MicroFit
fitting 106 to a transducer 108, an excess pressure relief valve
110, and a bulkhead connector 112. Fitting 106 is also coupled to a
valve body 114, another MicroFit fitting 115, a VCR connector 116,
and a process gas line 118 which leads to industrial equipment that
utilizes the process gas.
The coupling methods employed between components in the advanced
manifold assembly 59 consist primarily of welded,
component-to-component weld joints 65. This type of construction
significantly improves the integrity and minimizes the internal
volume of the advanced gas manifold assembly 59.
FIG. 5 is a partial front view of one embodiment of the Modular
Bottle-Mounted Gas Management System 10, which shows the housing 11
and the upper portion of the gas bottle 12 installed within it. The
bottle neck 20 resides above a flange 122 and terminates in a valve
stem 124. The keypad 16 is located on the upper control panel 13,
and the emergency shut-off switch 128 and a data pack 130 are
located on the lower control panel 15. The data pack 130 is a
removable cartridge which includes an 8K-byte EEPROM data pack that
stores information about the gas control procedure. The data pack
130 allows only qualified personnel to access purge cycling and
maintains a constant log of cycling operations and operators. The
housing 11 is held in place on the gas bottle 12 by supports
132.
FIG. 6 is a cut-away, side view of the Modular Bottle-Mounted Gas
Management System 10. The right portion of the figure shows the LCD
display 125 and the keypad control 126 in front of a chamber which
houses a computer motherboard 134 and a stand-alone slave PC board
136 which hold a chip 138 and a transformer 140. Below the flange
nut 120 on the bottle neck 20 of the gas bottle 12, a special nut
142 is secured over the threads 14 1. A gasket 144 maintains a
tight seal between the housing 11 and the gas bottle 12. A set of
valve bodies 146, an output line 148, actuators 150, and a
three-way valve 152 are shown schematically behind the upper
portion of the gas bottle 12.
FIG. 7 is a cut-away depiction of a rear view of the Modular
Bottle-Mounted Gas Management System 10. An arrangement of pressure
sensors 154, valve bodies 156, regulators 158, and a vacuum
generator 160 are shown in a schematic presentation, as they would
be advantageously assembled with component-to-component welds 65.
Similarly, FIG. 8 is a top view of the present invention, which
shows how the component-to-component welds 65 are used to minimize
the size of the gas manifold 22. This reduces the volume of the
process gas within the gas manifold 22, providing greater safety
and fast response time for the gas manifold.
FIG. 9 is an illustration of an alternative embodiment of the upper
and lower portions of the control panel 13 and 15. This version
includes an eight line by forty character LCD display 125, a keypad
126, an emergency stop switch 128, a data pack 130, and a set of
indicator lights 162.
FIGS. 10(a) and 10(b) portray the stand-alone slave PC board 136
inserted into the motherboard 134. A transformer 140 is depicted in
the edge-on view presented by FIG. 10(b).
FIG. 11 (a) is a block diagram of the modular gas management system
controller 164. Serial port A 166 and serial port B 168 are shown
linked to optical fiber data links 170. Parallel port A 171 is
coupled to keypad 172 and CPU 174. The CPU 174 is connected via a
data bus 176 and an address bus 178 to a display 180, 8K-byte data
pack EEPROM data pack 182, a SRAM 184, an EPROM 184, and a data
acquisition system 188. The data acquisition system 188 is also
connected to an atmospheric pressure sensor 190 and gas management
system pressure sensors 192. Parallel port B 194 is coupled to
valves 196. A third parallel port C 198 is connected to an alarm
200, a toxic gas sensor 202, an earthquake sensor 204, and counter
timers 206.
FIG. 11(b) shows a power supply block diagram 208. An emergency
stop switch 210 is connected in series to a relay 212, a line
filter 214, and a power transformer 216, which has taps for the
computer 218, the data acquisition system 220, sensors 222, and the
LCD display 224.
FIG. 12 is a top view of the layout of the stand-alone motherboard
226 comprising the line filter 214, the power transformer 216, the
CPU 174 and memory SRAM 184 and EPROM 186.
The operation of the Modular Bottle-Mounted Gas Management System
10 is controlled by a complex computer program that is stored in
memory. The CPU 174 constantly monitors the status of the gas
transfer operations, and also provides self-diagnostic and
leak-checking functions. An outline of the program which shows the
automatic action implemented by the CPU 174 for each combination of
valve states is contained in Table Two.
An alternate embodiment of the present invention, a Containerized
Controller 228, is shown in FIG. 13(a). While this embodiment
employs many of the methods of construction featured in the
bottle-mounted embodiment, the Containerized Controller 228 offers
a slightly different feature set than the Bottle Mounted Gas
Management System 10. The Containerized Controller 228 features the
component-to-component welded construction 65 between the valves,
actuators, pressure regulators, fittings and transducers that make
up the gas manifold assembly 260. The modular Containerized
Controller 228 is installed within an outer cabinet 230, and is
able to provide gas management for one or more process or purge gas
bottles located within the outer cabinet 230. This embodiment has
distinct advantages of cost, size, and integrated control over
conventional in-cabinet manifold methods. The Containerized
Controller 228 also offers greater levels of containment, in that
manifold hardware is located in a sealed outer case which is
designed to operate in either a vacuum or a pressurized manner.
In FIG. 13(a), the Containerized Controller 228 is located within
an outer cabinet 230. A process gas bottle 232 is also located
within the outer cabinet 230, and is connected to the Containerized
Controller 228 through a process gas supply line 234. A purge gas
bottle 236 is also located inside the outer cabinet 230, and is
connected to the Containerized Controller 228 through a purge gas
supply line 238. The process gas supply line 234 and the purge gas
supply line 238 use a "pig-tail" coiled construction technique to
prevent alignment problems between the gas supply lines 234 and 238
and the Containerized Controller 228 or the gas bottles 232 and
236.
Further containment is achieved on both the process gas supply line
234 and the purge gas supply line 238, using containment vessels
240. Containment is achieved between the process gas bottle 232 and
the Containerized Controller 228 by mounting a containment vessel
240 between them, which surrounds and provides containment around
the process gas supply line 234. Containment is achieved in a
similar fashion between the purge gas bottle 236 and the
Containerized Controller 228, by mounting another containment
vessel 240 between them, which surrounds and provides containment
around the purge gas supply line 238. The containment vessels 240
have an evacuation passage way 243 that allows the containment
vessels 240 to be atmospherically coupled to the Containerized
Controller 228. The containment vessels 240 can therefore be
evacuated and pressurized along with the Containerized Controller
228, through the evacuation passageway 243, thereby providing
greater safety by preventing the escape of potentially hazardous or
toxic process or purge gases.
FIG. 13(b) provides a perspective view of a containment half-shell
242. The containment vessel assembly 240 is constructed from two
matching containment half shells 242, using suitable fastening and
sealing techniques to provide a leak proof assembly.
FIGS. 13(c) and (d) reveal various embodiments of the containment
half-shell 242, and illustrate how a containment half-shell 242
would be assembled with a matching containment half-shell 242. The
resulting containment vessel assembly 240 is installed around a gas
supply line 234 or 238 between a gas bottle 232 or 236 and the
Containerized Controller 228.
Details of the Containerized Controller 228 are shown in FIGS.
14(a), 14(b), 14(c) and 14(d). FIG. 14(a) depicts a top view 244 of
the Containerized Controller 228, which includes a container base
246, upon which a container cover 248 is installed. A container
seal 250 is located between the container base 246 and container
cover 248, to allow a leak-proof seal so that the resulting
internal cavity 252 can be pressurized or evacuated. Contain
fasteners 251 are located on the container cover 248. The container
base 246 includes container mounting points 253. The materials and
construction methods of the container base 246 and the container
cover 248 are chosen for the application. FIG. 14(b) and 14(c) show
a front view 254 and a side view 256 of the Containerized
Controller 228.
FIG. 15(a) is a top sectional view 258 of the Containerized
Controller 228 which reveals details of the gas manifold 260. The
sealing surface 261 is created when the container cover 248 is
connected to the container base 246 using the container seal 250.
FIG. 15(c) provides a detailed sideview 322 of the Containerized
Controller 228.
FIG. 15(b) reveals a front sectional view 262 of the Containerized
Controller 228, from which details of the manifold 260 can be seen.
The process gas inlet 264 enters the internal cavity 252 and is
connected in series to a Microfit fitting 266, a process gas inlet
high pressure transducer 268, a high pressure process gas inlet
valve 270, and a second Microfit fitting 272. The purge gas :inlet
274 also enters the internal cavity 252 and is connected in series
a purge gas inlet 5high pressure transducer 276, a high pressure
purge gas inlet valve 278, two Microfit elbow fittings 280, a purge
gas regulator 282 coupled to a gas quality sensor 284, a purge gas
low pressure Microfit elbow fitting 286, a purge gas low pressure
transducer 288, and to a purge gas junction Microfit fitting 290.
The purge gas junction fitting 290 is connected to a cavity purge
valve 292, through which purge gas can be used to fill the internal
cavity 252. The fitting 290 is also connected to second purge
junction fitting 294. The junction fitting 294 is connected to
purge gas low pressure venturi valve 296 and to the purge gas high
pressure valve 298, which is connected in series to the second
Microfit fitting 272. The purge gas venturi valve 296 is connected
to a venturi vent junction Microfit fitting 300, to which is
attached a vacuum generator pressure transducer 302 and a cavity
evacuation valve 304. The vent junction fitting 300 is also
connected to a low pressure purge gas outlet valve 306, and to the
purge vent port 320. A process gas regulator 308 is connected to
the second Microfit fitting 272, and is also connected to a process
gas outlet Microfit junction 310. This junction 310 is connected to
the low pressure purge gas outlet valve 306, and in series to a low
pressure process gas outlet valve 312, a series of process gas
outlet elbow fittings 314, a flow controller/flow meter 316, and a
process gas outlet port bulkhead 318. The connections between the
internal components of the Containerized Controller 228 are joined
with component-to-component welds 65, which provide an extremely
safe and reliable means to avoid process or purge gas leakage from
the manifold 260. The Containerized Controller 228 provides an
additional level to containment around this manifold 260, by
providing the sealed internal cavity 252. This sealed cavity 252
can be automatically or manually evacuated and pressurized with a
blanket of purge gas, which can be evacuated and vented to allow
safe access to the manifold 260, should disassembly for inspection
or service be required.
In a conventional gas management system, containment of process and
purge gases near a standard swaged manifold assembly is only
achieved by the single level of containment offered by the cabinet
containment system. The extra degree of containment offered by the
Containerized Controller 228 provides an extra level of safety for
personnel against accidental exposure to highly toxic or caustic
gases.
FIG. 16(a) reveals an electrically driven regulator mechanism 324
which is implemented within the Containerized Controller 228 to
operate the purge gas regulator 282 and the process gas regulator
308. The regulator mechanism 324 is mounted on the purge gas
regulator 282 and the process gas regulator 308. The regulator
mechanism 324 is used to control the flow of purge gas through the
purge gas regulator 282, and to control the flow of process gas
through the process gas regulator 308.
The regulator mechanism 324 is shown as it would be connected to a
standard valve body 326 of a purge gas regulator 282 or a process
gas regulator 308. The regulator mechanism 324 consists of a sealed
bulkhead penetration 328 that mounts to the valve body 326, an
actuator 330 that is used to open and close the valve body 326, an
actuator driver 332 that moves the actuator 330, and an actuator
cover 334 that is threaded onto the bulkhead 328 to contain the
actuator driver 332 and the actuator 330. FIG. 16(b) is a detailed
cross-section of the sealed bulkhead 328. FIG. 16(c) is a side view
of the actuator 330.
FIG. 17 is a schematic depiction of a servo regulator circuit 333
that is implemented in the Containerized Controller 228 to provide
fast, automatic fail-safe control of the regulator mechanisms 324
that are used to operate the purge gas regulator 282 and the
process gas regulator 308.
FIG. 18 is an expanded assembly view 336 of the Bottle-Mounted Gas
Management System 10, which illustrates how a gas bottle 12 would
be connected or disconnected. To install a gas bottle 12, the
bottle 12 would be placed within an outer cabinet housing 25. Once
the bottle 12 is securely in place, the gasket 144 is placed around
the neck of the bottle. The Bottle-Mounted Gas Management System 10
would then be placed on top of the gas bottle 12, resting on the
module support 132. The nut 142 is then threaded onto the gas
bottle 12, thus securely attaching the gas bottle 12 to the housing
11. The flange nut 120 is then used to connect the gas bottle 12 to
the manifold 22. Once the gas bottle 12 is installed, the housing
11 can be closed, and connections to the process, purge, and vent
lines can be made through the process gas outlet connection 21a,
the vent connection 21b, and the nitrogen purge gas inlet 21c. The
cabinet housing 25 can then be closed, and the Bottle-Mounted Gas
Management System 10 can be put into service.
FIG. 19 is an illustration 338 that shows a pair of bottles 12 in a
multiple containment structure 340 that are connected to a system
employing the present Modular Bottle-Mounted Gas Management System
10. Application of this outer containment cabinet 340 provides an
increased level of containment not seen in conventional gas
management devices. As well, the light weight, Modular
Bottle-Mounted Gas Management System 10 can be moved away from the
gas bottles 12 readily when the gas bottles 12 are changed out,
thereby protecting the hardware located within the cabinet housing
25 from damage.
FIG. 20 depicts an alternative embodiment of the present invention,
a Miniature Cabinet 342 which includes a control 348, access doors
350, a stand 352, a base 354 and bottle jacks 356. FIG. 21 presents
a side view 344 of the Miniature Cabinet 342, and shows control
348, plumbing 358 and a bottle seal and inlet vent 360. FIG. 22
provides a detailed view 346 of the Miniature Cabinet 342.
The present invention may be operated as a stand-alone unit or may
be run from a remote computer. Although the specification has
described the Modular Bottle-Mounted Gas Management System as a gas
management system, it is capable of handling a wide variety of
fluids, including liquids. Table One provides a list of some of the
gases that may be regulated by the present invention.
TABLE ONE ______________________________________ TYPICAL
APPLICATIONS The five valve configuration of the gas cube allows
compati- bility with many types of gases: toxic, corrosive,
pyrophoric and inert. Following is a list of typical gas
applications: ______________________________________ SiH.sub.4
Si.sub.2 H.sub.6 N.sub.2 O AsH.sub.3 C.sub.3 F.sub.8 NH.sub.3 HCl
BCl.sub.3 BF.sub.3 PH.sub.3 SiH.sub.2 Cl.sub.2 HBr Cl.sub.2 HF
H.sub.2 GeH.sub.4 WF.sub.6 N.sub.2 B.sub.2 H.sub.6 CHCl.sub.3 Ar
NF.sub.3 SiCl.sub.4 SF.sub.6 H.sub.2 S SiCl.sub.3 He H.sub.2 Se
CH.sub.4 O.sub.2 CCl.sub.4
______________________________________
TABLE Two ______________________________________ Valves Step 0 1 2
3 4 5 6 Action ______________________________________ Panel and
Process In Purge Cycle 0 0 1 1 0 0 0 0 Operator inserts pack and
keys loa 1 0 1 1 0 0 0 0 System displays cartridge program prompts
for start or new pack 1a 0 0 0 0 0 0 1 check for N2 supply pressure
at SD 2 0 0 0 0 0 0 1 prompt operator to close bottle va 3 0 0 0 0
0 1 1 Start vacuum, hold for 2 sec If no vacuum goto lockout with
message about no vacuum 4 0 0 0 0 1 1 1 1 sec vacuum on panel 5 0 1
0 0 1 1 1 1 sec vacuum on process in line 6 1 1 0 0 0 1 1 Check for
vacuum on process in line If pressure on SB goto 2 7 1 1 0 0 1 1 1
Set loop count 8 1 1 0 0 1 1 1 Hold vacuum for 2 sec 9 1 1 0 1 1 1
1 Open N2 flow 10 1 1 0 1 0 1 1 2 sec flush with N2 11 1 1 0 0 0 1
1 Dec loop count if non zero goto 8 12 0 0 0 0 0 0 0 Do vacuum leak
check for 15 sec if pressure on SB - Process in lea if pressure on
SC - Panel leak if pressure goto lockout with an error message 13 1
1 0 1 0 0 1 Prompt operator to change process N2 flows until Sb
shows pressure - or 5 min - goto 17 14 1 1 0 0 0 0 1 check for
pressure loss, 5 psi in If loss at Sb message to re-do CGA connect
and goto 13 15 1 1 0 0 1 1 1 Vacuum system for 6 seconds 16 0 0 0 0
0 0 0 message to open gas bottle - goto 17 0 0 0 0 0 0 0 Lockout
with no bottle, set alarm and message Bottle not connected, start
to continue 18 wait for start - if start goto 13 19 1 0 0 0 0 0 0
SB sees pressure increase 20 0 0 0 0 0 0 0 SC sees pressure
increase 21 0 0 0 0 0 0 0 System back in normal operation Display
message Valves Sensors 0 Excess Flow valve SA Venturi 1 Unregulated
Process SB Unregulated process in valve in 2 Regulated Process out
SC Regulated process out valve a 3 N2 Purge valve SD Regulated N2
supply 4 Vacuum purge valve SE Unregulated N2 5 N2 Venturi valve
supply 6 Unregulated N2 valve 1 .fwdarw. Open valve 0 .fwdarw.
closed v Purge Process Out Line Cycle 0. 1 1 0 0 0 0 0 Operator
inserts pack and keys loa 1 0 0 0 0 0 0 0 System displays cartridge
program prompts for start or new pack 1a 0 0 0 0 0 0 1 check for N2
supply pressure at SD 2 0 0 0 0 0 0 0 prompt operator to close
bottle va 3 0 0 0 0 0 1 1 Start Vacuum, hold for 2 sec If no vacuum
goto lockout with message about no vacuum 4 0 0 0 0 1 1 1 1 sec
vacuum on panel 5 0 1 0 0 1 1 1 1 sec vacuum on process in line 6 1
1 0 0 0 1 1 Check for vacuum on process in lin If pressure goto 2 7
1 1 0 0 1 1 1 Set loop count 8 1 1 0 0 1 1 1 Hold vacuum for 2 sec
9 1 1 0 1 1 1 1 Open N2 flow 10 1 1 0 1 0 1 1 2 sec flush with N2
11 1 1 0 0 0 1 1 Dec loop count if non zero goto 8 12 0 0 0 0 0 0 0
Do vacuum leak check for 15 sec if pressure on Sb - Process in lea
if pressure on Sc - Panel leak if pressure goto lockout 13 1 1 0 1
0 0 1 Message 0k to disconnect gas bottl 14 1 1 0 1 0 0 1 wait for
pressure drop on Sb loop until pressure drop or reset 15 0 0 0 0 0
0 0 16 0 0 0 0 0 1 1 start vacuum 17 0 0 0 0 1 1 1 purge panel 18
set loop count 19 0 0 1 0 1 1 1 purge for 2 sec 20 0 0 1 1 1 1 1 N2
flush for 100 msec 21 0 0 1 1 0 1 1 purge for 2 sec 22 0 0 1 0 0 1
1 dec loop count if non-zero goto 19 message Press reset when ready
to purge the process out line 23 0 1 1 0 0 0 1 System under purge,
loop until res and Sc shows pressure 24 0 0 0 0 0 0 0 reset and
pressure on Sc 25 0 0 0 0 0 1 1 start vacuum 26 0 0 0 0 1 1 1 purge
panel 27 set loop count 28 0 0 1 0 1 1 1 purge for 2 sec 29 0 0 1 1
1 1 1 N2 flush for 100 msec 30 0 0 1 1 0 1 1 purge for 2 sec 31 0 0
1 0 0 1 1 dec loop count if non-zero goto 28 32 0 0 1 0 1 1 1 apply
vacuum to line for 2 sec 33 0 0 0 0 0 0 1 leak test for 15 sec if
no pressure increase on SC goto 34 send message Leak in Process out
1 press start to continue 35 wait for start - if start goto 23 36 1
1 0 1 0 0 1 Prompt operator to change process N2 flows until SB
shows pressure - or 5 min - goto 40 37 1 0 0 0 0 0 1 check for
pressure loss, 5 psi in If loss at SB msg to re-do CGA con 38 1 1 0
0 1 1 1 Vacuum system for 6 seconds 39 0 0 0 0 0 0 0 message to
open gas bottle - goto 40 0 0 0 0 0 0 0 Lockout with no bottle, set
alarm and message Bottle not connected, start to continue 41 wait
for start - if start goto 36 42 1 0 0 0 0 0 0 SB sees pressure
increase 43 1 1 0 0 0 0 0 SC sees pressure increase 44 0 1 1 0 0 0
0 System back in normal operation Display message Valves Sensors 0
Excess Flow Valve SA Venturi 1 Unregulated Process SB Unregulated
process in valve in 2 Regulated Process SC Regulated process out
valve out a 3 N2 Purge valve SD Regulated N2 supply 4 Vacuum purge
valve SE Unregulated N2 5 N2 Venturi valve supply 6 Unregulated N2
valve 1 .fwdarw. Open valve 0 .fwdarw. Closed va Panel Installation
and Purge cycle 0 0 1 1 0 0 0 0 Operator inserts pack and keys loa
1 0 1 1 0 0 0 0 System displays cartridge program prompts for start
or now pack 3 0 0 0 0 0 0 1 Check for N2 pressure on Sd if no
pressure, msg No N2 pressure wait for reset to begin again 3 0 0 1
1 0 0 1 purge Process out line with N2 4 0 0 1 0 0 0 1 System under
purge, loop until res and Sc shows pressure 5 0 0 0 0 0 0 0 reset
and pressure on Sc 6 0 0 0 0 0 1 1 start vacuum 7 0 0 0 0 1 1 1
purge panel 8 0 0 0 0 0 0 0 set loop count 9 0 0 1 0 1 1 1 purge
for 2 sec 10 0 0 1 1 1 1 1 N2 flush for 100 msec 11 0 0 1 1 0 1 1
purge for 2 sec 12 0 0 1 0 0 1 1 dec loop count if non-zero goto 9
13 0 0 1 0 1 1 1 apply vacuum to line for 2 sec 14 0 0 0 0 0 0 1
leak test for 15 sec if no leak goto 17 15 send message Leak in
Process out 1 16 press start to continue wait for start - if start
goto 4 17 1 1 0 1 0 0 1 Prompt operator to change process N2 flows
until Sb shows pressure - or 5 min - goto 20 18 1 0 0 0 0 0 1 check
for pressure loss, 5 psi in If loss at Sb msg to re-do CGA con 19 1
1 0 0 1 1 1 Vacuum system for 6 seconds 20 0 0 0 0 0 0 1 message to
open gas bottle - goto 21 0 0 0 0 0 0 1 Lockout with no bottle, set
alarm and message Bottle not connected, start to continue wait for
start - if start goto 17 23 1 0 0 0 0 0 0 SB sees pressure increase
43 1 1 0 0 0 0 0 SC sees pressure increase 44 0 1 1 0 0 0 0 System
back in normal operation 0 0 0 0 0 0 0 Display message .fwdarw.
Open valve 0 .fwdarw. Closed valve Valves Sensors 0 Excess Flow
Valve SA Venturi efv vacuumread 1 Unregulated Process SB
Unregulated process in valve in uregpi uregpiread 2 Regulated
Process SC Regulated process out valve out a
regpo regporead 3 N2 Purge valve SD Regulated N2 supply paneln2
regn2read 4 Vacuum purge valve SE Unregulated N2 supply panelvac;
uregn2read 5 N2 Venturi valve venturi 6 Unregulated N2 valve uregn2
______________________________________
CONCLUSION
Although the present invention was designed for use in the
semiconductor fabrication business, the Modular Bottle-Mounted Gas
Management System may be employed in a great number of industrial
settings. As factory engineers and technicians seek better ways to
manufacture products that require safe, reliable, and intelligent
gas management systems, they will look to the technology and
quality leaders who create innovative solutions that break through
the barriers imposed by conventional equipment. The Modular
Bottle-Mounted Gas Management System is just such an innovative
solution that will revolutionize the gas management field.
Although the present invention has been described in detail with
reference to a particular preferred embodiment, persons possessing
ordinary skill in the art to which this invention pertains will
appreciate that various modifications and enhancements may be made
without departing from the spirit and scope of the claims that
follow. The various gases and mechanical arrangements that have
been disclosed above are intended to educate the reader about one
preferred embodiment, and are not intended to constrain the limits
of the invention or the scope of the claims.
LIST OF REFERENCE NUMERALS
10 Modular Bottle-Mounted Gas Management System
11 Housing
12 Gas bottle
13 Upper control panel
14 LCD Display
15 Lower control panel
16 Keypad control
17 Data pack
18 LED indicator lights
19 Emergency shut off switch
20 Bottle neck
20a Connection
21a a Process gas outlet
21b Vent connection
21c Nitrogen inlet
21d Bottle access cover
22 Gas manifold
24 Conventional gas management system
25 Cabinet housing
26 Hinged door
28 Handle
30 Negative pressure inlet louvers
32 Window
34 Conventional control panel
36 Standard LCD display screen
38 Emergency stop switch
40 Control switches
42 Keypad
44 Data pack
46 LED indicator lights
48 Outlet vent
52 Bottle neck
54 Valve handle
56 Lower section of process gas line
58 Upper portion of process gas line
59 Advanced gas manifold assembly
60 VCR connector
61 Filter
62 MicroFit fitting
63 Transducer
64 Excess flow valve
65 Component-to-component weld
66 Mounting plate
67 Valve body
68 MicroFit fitting
69 Pressure regulator
70 Valve body
71 MicroFit fitting
72 VCR connector
73 MicroFit fitting
74 Check valve
75 VCR connector
76 MicroFit fitting
77 Purge manifold pressure transducer
78 Pressure regulator
79 Mounting panel
80 MicroFit fitting
82 Valve body
84 MicroFit fitting
86 Transducer
88 MicroFit fitting
89 VCR connector
90 Filter
91 VCR connector
92 Gas line to second bottle
94 Valve body
96 MicroFit fitting
98 Transducer
100 Vent line
102 Bulkhead connector
104 Valve body
106 MicroFit fitting
108 Transducer
110 Excess pressure relief valve
112 Bulkhead connector
114 Valve body
115 MicroFit fitting
116 VCR connector
118 Process gas line out to equipment
120 Flange nut
122 Flange
124 Valve stem
125 LCD Display
126 Keypad
128 Emergency stop switch
130 Datapack
132 Support
134 Motherboard
136 Stand-alone slave PC board
138 Chip
140 Transformer
141 Threads
142 Nut
144 Gasket
146 Valve body
148 Output line
150 Actuator
152 Three-way valve
154 Pressure sensor
156 Valve body
158 Regulator
160 Vacuum generator
162 Indicator lights
164 Block diagram for gas management system controller
166 Serial port A
168 Serial port B
170 Optical fiber data links
171 Parallel port A
172 Keypad
174 CPU
176 Data bus
178 Address bus
180 Display
182 EEPROM data pack
184 SRAM
186 EPROM
188 Data acquisition system
190 Atmospheric pressure sensor
192 Gas management system pressure sensor
194 Parallel port B
196 Valve
198 Parallel port C
200 Alarm
202 Toxic gas sensor
204 Earthquake sensor
206 Counter timers
208 Block diagram for power supplies
210 Emergency stop switch
212 Relay
214 Line filter
216 Power transformer
218 Terminal to computer
220 Terminal to data acquisition system
222 Terminal to sensors
224 Terminal to LCD display
226 Top view of stand-alone motherboard
228 Containerized Controller
230 Outer cabinet
232 Process gas bottle
234 Process gas supply line
236 Purge gas bottle
238 Purge gas supply line
240 Containment vessel
242 Containment half shell
243 Evacuation passageway
244 Top view of Containerized Controller
246 Container base
248 Container cover
250 Container seal
251 Container fasteners
252 Internal cavity
253 Container mounting point
254 Front view of Containerized Controller
256 Side view of Containerized Controller
258 Top sectional view of Containerized Controller
260 Gas Manifold
261 Sealing surface
262 Front sectional view of Containerized Controller
264 Process gas inlet
266 Microfit fitting
268 Process gas inlet high pressure transducer
270 Process gas inlet valve
272 Second Microfit fitting
274 Purge gas inlet
276 Purge gas inlet high pressure transducer
278 High pressure purge gas inlet valve
280 Microfit elbow fittings
282 Purge gas regulator
284 Gas quality sensor
286 Purge gas low pressure Microfit elbow
288 Purge gas low pressure transducer
290 Purge gas junction Microfit fitting
292 Cavity purge valve
294 Second purge junction fitting
296 Purge gas low pressure venturi valve
298 Purge gas high pressure valve
300 Venturi vent junction Microfit fitting
302 Vacuum generator pressure transducer
304 Cavity evacuation valve
306 Low pressure purge gas outlet valve
308 Process gas regulator
310 Process gas outlet Microfit junction
312 Low pressure process gas outlet valve
314 Process gas outlet elbow fittings
316 Flow controller/flow meter
318 Process gas outlet port bulkhead
320 Purge gas vent port
322 Detailed side view of Containerized Controller
324 Regulator mechanism
326 Standard valve body
328 Sealed bulkhead penetration
330 Actuator
332 Actuator driver
333 Servo regulator circuit
334 Actuator cover
336 Expanded assembly view
338 Containment illustration
340 Multiple containment structure
342 Miniature Cabinet
344 Side view of Miniature Cabinet
346 Detailed front view of Miniature Cabinet
348 Control
350 Access doors
352 Stand
354 Base
356 BTL jack
358 Plumbing
360 Bottle seal and inlet vent
* * * * *