U.S. patent number 3,901,770 [Application Number 05/436,513] was granted by the patent office on 1975-08-26 for method for the production of microscopically small metal or metal alloy structures.
This patent grant is currently assigned to Siemens Aktiengesellschaft. Invention is credited to Burkhard Littwin.
United States Patent |
3,901,770 |
Littwin |
August 26, 1975 |
Method for the production of microscopically small metal or metal
alloy structures
Abstract
This invention deals with the deposition of a microscopically
small metal or metal alloy structure in which a relatively thin
metal or metal alloy such as a nickel-iron alloy is vapor deposited
upon a carrier after which a photoresist layer is applied over the
thin layer. Channels in the form desired in the ultimate pattern
are then produced using the conventional photographic technique, to
leave the desired pattern exposed in the previously deposited thin
layer. A thin layer of gold is then applied to the exposed layer
and a thicker metal or metal alloy layer is then galvanically
deposited on the gold layer. The remaining photoresist layer is
then removed, followed by the removal of the remaining thin layer
of metal or metal alloy. The process may also include the
deposition of a thin layer of gold over the thicker layer of
alloy.
Inventors: |
Littwin; Burkhard (Munich,
DT) |
Assignee: |
Siemens Aktiengesellschaft
(Berlin & Munich, DT)
|
Family
ID: |
5870491 |
Appl.
No.: |
05/436,513 |
Filed: |
January 25, 1974 |
Foreign Application Priority Data
|
|
|
|
|
Jan 31, 1973 [DT] |
|
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2304685 |
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Current U.S.
Class: |
205/118; 205/186;
216/108; 216/48; 257/E21.535 |
Current CPC
Class: |
H05K
3/067 (20130101); H01F 41/34 (20130101); G11C
19/08 (20130101); H05K 1/09 (20130101); H05K
3/108 (20130101); H01L 23/522 (20130101); H01B
5/14 (20130101); H01L 21/707 (20130101); H05K
2203/0723 (20130101); H01L 2924/0002 (20130101); H05K
1/0306 (20130101); H05K 2203/073 (20130101); H05K
3/062 (20130101); H01L 2924/09701 (20130101); H05K
3/388 (20130101); H01L 2924/0002 (20130101); H01L
2924/00 (20130101) |
Current International
Class: |
H01F
41/34 (20060101); H01F 41/00 (20060101); H01L
21/70 (20060101); G11C 19/08 (20060101); H01B
5/14 (20060101); G11C 19/00 (20060101); H01L
23/522 (20060101); H01L 23/52 (20060101); H05K
3/06 (20060101); H05K 1/09 (20060101); H05K
3/38 (20060101); H05K 3/10 (20060101); H05K
1/03 (20060101); C23b 005/48 () |
Field of
Search: |
;204/15 ;117/212
;156/8,18 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Plating, May 1969 pgs. 505-510..
|
Primary Examiner: Tufariello; T. M.
Attorney, Agent or Firm: Hill, Gross, Simpson, Van Santen,
Steadman, Chiara & Simpson
Claims
I claim as my invention:
1. A method for the production of microscopically small metal or
metal alloy structures comprising vapor depositing a thin
continuous layer of metal or metal alloy on a substrate, applying a
photoresist layer over the thus deposited layer, forming channels
in said photoresist layer corresponding to the desired pattern
thereby exposing said continuous layer in the channels,
galvanically depositing a thin gold layer on the exposed portions
of said layer, galvanically depositing a thicker metal or metal
alloy on said thin gold layer, removing the remaining photoresist
layer, treating the remaining thin metal or metal alloy to replace
the metal or metal alloy layer with a gold layer, and etching away
the last-named gold layer.
2. The method of claim 1 in which said metal is a nickel-iron
alloy.
3. The method of claim 1 in which said thin continuous layer of
metal or metal alloy has a thickness of about 100 to 500
Angstroms.
4. The method of claim 1 in which the second layer of gold has a
thickness of several hundred Angstroms.
5. A method for the production of microscopically small metal
structures which comprises vapor depositing a thin continuous layer
of a nickel-iron alloy onto a substrate, applying a photoresist
layer over the thus deposited layer, forming channels in said
photoresist layer corresponding to the desired pattern thereby
exposing said continous layer in said channels, galvanically
depositing a first thin layer of gold over the exposed portions of
said layer, galvanically depositing a thicker layer of nickel-iron
alloy over said first thin layer of gold, removing the remaining
photoresist layer, treating the remaining structure in a slightly
acid gold bath to replace said thin nickel-iron layer with a gold
layer, and etching away the last-named gold layer.
6. The method of claim 5 in which the gold etching is carried out
by means of a dilute potassium cyanide solution.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention is in the field of producing microscopically small
metal or metal alloy structures by successive deposition of a thin
metal layer, followed by a gold layer, and a relatively thick metal
or metal alloy layer. The conditions are such that the lateral
erosion of the structure is minimized.
2. Description of the Prior Art
Microscopically small metal or metal alloy structures are required,
for example, in the production of manipulation patterns for
cylindrical magnetic domains and for the micro-wiring of integrated
circuits. If the required line width of these structures, such as
occur in the aforementioned manipulation patterns amounts to
approximately 3 to 20 microns, it has proven to be extremely
difficult when using the photo-etching method to keep the
sub-etching, that is, the lateral erosion of the structure
sufficiently small in the zone of the structure protected by the
photo lacquers. In order to avoide these difficulties, a number of
other prior art methods have been used heretofore such as
described, for example, in "AIP Conference Proceedings" No. 5,
1971, page 215 in "Appl. Phys. Letter" Vol. 17, page 328 (1970) and
in the "Journal Appl. Phys.", Vol. 42, page 1,362 (1971).
This invention is directed to a relatively simplified method for
preventing sub-etching of the structures when using the
conventional photo lacquer techniques in the production of
microscopically small metal or metal alloy structures.
SUMMARY OF THE INVENTION
In the process of the present invention, a thin continuous metal or
metal alloy layer vapor deposited on a carrier such as a glass
carrier. A photo lacquer layer is applied onto the metal or metal
alloy layer and channels corresponding to the desired metal or
metal alloy structure are formed in the photo lacquer layer in the
usual manner, that is, by exposing the lacquer to a light source
through a mask having the desired pattern formed therein and then
removing the exposed portions by means of a suitable solvent,
leaving the unexposed photoresist layer. The removal of the exposed
channels of the photoresist material exposes the underlying thin
continuous layer in these areas. A thin gold layer is galvanically
deposited on the exposed metal or metal alloy layer. Next, a
thicker deposit of the same metal or metal alloy is galvanically
deposited onto the gold layer. The remaining photo lacquer layer is
then removed, followed by the removal of the originally deposited
thin metal or metal alloy layer.
The method of the present invention can be carried out without
significant difficulty. The edge sharpness of the structures which
result is quite precise. The dimensions of the structures are not
significantly affected by etching treatments. In addition, small
non-homogenities in the photo lacquer which can otherwise lead to
an unwanted etching of the layers do not interfere. It is possible
by means of the method of the present invention to produce
structures with close dimensional tolerances, having dimensions on
the order of 5 to 20 microns, and to produce structures
reproducibly in conformity to the mask in the required layer
thicknesses. The uniform thickness and edge sharpness of the
structures are insured primarily by the thin gold layer.
The preferred method according to the present invention is suitable
for the production of manipulation patterns for cylindrical
magnetic domains, utilizing a magnetostriction-free nickel-iron
alloy such as an alloy containing about 79 to 83 weight percent
nickel, and 21 to 17 weight percent iron. This nickel-iron alloy is
vapor deposited onto a substrate such as glass to a thickness of
approximately 100 to 500 Angstroms and, more preferably, to a
thickness of about 300 Angstroms.
The photoresist layer is then applied and exposed through a mask
and developed photographically to provide the configuration of
channels desired in the final product. The exposed portions of the
photoresist layer are removed by a suitable solvent in accordance
with the usual photo mask technique. Following this, a thin gold
layer measuring several hundred Angstroms in thickness (200-800)
and preferably 600 Anstroms is deposited over the thin nickel-iron
alloy. Next, a relatively thick nickel-iron layer measuring several
thousand Angstroms in thickness, usually about 10,000 Anstroms in
thickness, is galvanically deposited over the exposed portions of
the gold layer. A second thin gold layer is then preferably
galvanically deposited onto the thicker nickel-iron layer, the gold
layer acting as a protective layer during the subsequent etching
away of the thin nickel-iron layer. The gold is preferably
galvanically deposited on the iron-nickel layer to a thickness of
several hundred Angstroms, usually about 600 Angstroms.
For the removal of the non-reinforced thin nickel-iron layer, it is
advisable and preferred to immerse the carriers processed in the
manner described above when freed from the residual photo lacquer
layer in a slightly acid gold bath, for instance Autronex C1 bath
of Sel-Rex International containing 8 grams gold/liter and having a
pH of 3.5, whereby the nickel-iron thin layer is removed and
replaced by a correspondingly thin gold layer which can be easily
etched by means of conventional gold etching means. An exchange
reaction takes place in the bath which is caused by the potential
differences occuring between the nickel-iron and the gold layers,
whereby the nickel-iron goes into solution and is replaced by an
equivalent amount of gold. The entire nickel-iron layer, usually
200 to 300 angstroms thick, is dissolved in a few minutes and is
replaced by a gold layer of comparable dimensions. Without
affecting the galvanically applied nickel-iron layer, the gold
layer can be etched away be means of a suitable gold etching means
such as a dilute potassium cyanide solution with a concentration of
about 20 grams KCN/liter H.sub.2 O to 120 grams KCN/liter H.sub.2
O, for example, 60 grams KCN/Liter H.sub.2 O.
Presently used nickel-iron etching solutions such as solutions of
ferric chloride attack the galvanically reinforced nickel-iron
layer and also the thicker nickel-iron layer to a substantial
extent when the 200 to 300 Angstrom thick nickel-iron layer is
being removed. In the gold bath according to the present invention,
however, only the 200 to 300 Angstrom nickel-iron layer is removed
from the thicker nickel-iron layer.
BRIEF DESCRIPTION OF THE DRAWINGS
A further description of the present invention will be made in
connection with the attached drawings in which:
FIG. 1 is a greatly enlarged view illustrating the structure after
the channels have been formed by the photographic process;
FIG. 2 illustrates the structure after the deposition of the two
gold layers and the intermediate metal alloy layer; and
FIG. 3 is a view of the structure after removal of the residual
photoresist layer.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
A nickel-iron layer 2 which is approximately 200 to 300 Angstroms
thick is vapor deposited upon a carrier 1 composed of glass,
ceramic or other insulating material. A photo lacquer layer 3 is
applied onto the nickel-iron layer 2. Channels 7 having the
configuration of the desired nickel-iron structure are then
provided in the usual way by exposing the surface to the light
through a suitable mask and removing the exposed areas in which the
channels are to appear, leaving the underlying nickel-iron layer 2
exposed in those areas.
In the next step of the procedure, a gold layer 4 measuring several
hundred Angstroms in thickness, and usually around 600 Angstroms is
galvanically deposited on the exposed nickel-iron layer 2, using an
suitable commercial gold bath. Subsequently, a relatively thick
nickel-iron layer 5, whose thickness is measured in thousands of
Angstrom units, preferably about 10,000 Angstrom units galvanically
deposited over the pre-deposited gold layer 4. Next, a second gold
layer 6 serving as a protective layer, and measuring several
hundred Angstrom units in thickness, usually about 600 Angstroms,
is galvanically deposited on the relatively thick nickel-iron layer
5.
The remaining photo lacquer layer 3 is subsequently dissolved as
illustrated in FIG. 3 and the structure thus produced is placed
into a slightly acid gold bath, whereby after a few minutes the
entire non-reinforced nickel-iron layer 2 of approximately 300
Angstroms in thickness, is removed and replaced by a
correspondingly thick gold layer. This gold layer can be easily
etched away by a gold etching means such as a dilute potassium
cyanide solution. The removal of the unreinforced nickel-iron layer
in certain areas by means of the exchange reaction in the gold bath
and the subsequent gold etching is particularly desirable in the
manufacture of signal detectors for cylindrical magnetic
domains.
It should be evident that various modifications can be made to the
described embodiments without departing from the scope of the
present invention.
* * * * *