U.S. patent number 3,882,319 [Application Number 05/408,897] was granted by the patent office on 1975-05-06 for automatic melt level control for growth of semiconductor crystals.
This patent grant is currently assigned to Motorola, Inc.. Invention is credited to Donald R. Clement, Carl A. Helber, Larry D. Mason.
United States Patent |
3,882,319 |
Clement , et al. |
May 6, 1975 |
Automatic melt level control for growth of semiconductor
crystals
Abstract
Apparatus for controlling the melt level in a Czochralski
crystal pulling method is disclosed. The melt level control has a
feedback loop including level sensing means which controls a lift
motor for moving the melt containing crucible up or down as called
for. The melt level is sensed by alternately transmitting two
pulsed beams, or rays, of narrow band visible red light radiation
to the melt level surface and measuring the radiation level in the
reflected pulse rays after transmission through a lens system. When
the melt level is correct the magnitudes of the reflected pulses
are equal and no control signal results. When the melt level falls,
the magnitudes of the reflected pulses change and a difference
signal in one direction is generated causing the crucible to rise.
When the melt level rises, the magnitudes of the reflected pulses
change and a difference signal in the opposite direction is
generated causing the crucible to fall. The red light radiation
preferably has a wavelength of 6500 A plus or minus 50 A.
Inventors: |
Clement; Donald R. (Scottsdale,
AZ), Mason; Larry D. (Phoenix, AZ), Helber; Carl A.
(Scottsdale, AZ) |
Assignee: |
Motorola, Inc. (Chicago,
IL)
|
Family
ID: |
23618220 |
Appl.
No.: |
05/408,897 |
Filed: |
October 23, 1973 |
Current U.S.
Class: |
117/202; 23/301;
250/574; 250/577; 117/936; 117/932 |
Current CPC
Class: |
C30B
15/30 (20130101); C30B 15/22 (20130101); Y10T
117/1008 (20150115) |
Current International
Class: |
C30B
15/20 (20060101); C30B 15/30 (20060101); C30B
15/22 (20060101); G01n 021/26 () |
Field of
Search: |
;250/222,221,215,574,577
;23/31SP,273SP ;356/159,161 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Stolwein; Walter
Attorney, Agent or Firm: Rauner; Vincent J. Olsen; Henry
T.
Claims
What is claimed is:
1. Apparatus for pulling solid crystals from a melt wherein the
level of said melt is maintained constant during the time that the
crystal is being pulled comprising:
a container for said melt;
motor means for raising and lowering said container;
source means for transmitting, at one angle to the vertical, a red
radiation beam having a wavelength of approximately 6500A to the
level surface of said melt;
sensor means for receiving the reflection of said radiation
beam;
said sensor means being disposed at the same angle to the vertical
as said source beam;
said sensor means including means for detecting changes in said
reflected radiation beams caused by corresponding changes in said
melt level; and
means controlled by said detecting means for effecting energization
of said motor means to raise and lower, respectively, said
container.
2. Apparatus according to claim 1 wherein the angle between said
source beam and said reflected beam is approximately
45.degree..
3. Apparatus according to claim 2 wherein one of said source means
and said sensor means includes a narrow bandpass red filter.
4. Apparatus according to claim 2 wherein each of said source means
and said sensor means includes a narrow bandpass red filter.
5. Apparatus according to claim 3 wherein said bandpass filter
transmits at approximately 6500 A .+-. 50 A.
6. Apparatus for pulling solid crystals from a melt wherein the
level of said melt is maintained constant during the time that the
crystal is being pulled comprising:
a container for said melt;
motor means for raising and lowering said container;
first source means for transmitting, at one angle to the vertical,
a first radiation beam to the level surface of said melt;
second source means for transmitting, at another angle to the
vertical, a second radiation beam to the level of said melt;
sensor means for receiving the reflections of said first and said
second radiation beams;
said sensor means being disposed at an angle to the vertical to
encompass the reflections of said first and said second radiation
beams;
said sensor means including means responsive to changes in said
first and second reflected radiation beams caused by corresponding
changes in said melt level; and
means controlled by said responsive means for effecting
energization of said motor means to raise and lower, respectively,
said container.
7. Apparatus according to claim 6 wherein said radiation is red
light radiation.
8. Apparatus according to claim 7 wherein said red radiation has a
wavelength of approximately 6500 A.
9. Apparatus according to claim 7 wherein one of said first and
second source means includes a narrow bandpass red filter.
10. Apparatus according to claim 7 wherein each of said source
means and said sensor means includes a narrow bandpass red
filter.
11. Apparatus according to claim 9 wherein said bandpass filters
transmit at approximately 6500 A units .+-. 50 A.
12. Apparatus according to claim 7 wherein said sensor means is
responsive to the sum of the reflected radiation received from said
first and said second radiation beams.
13. Apparatus according to claim 6 wherein the angle between said
first and said second source beams and said reflected beams is
approximately 45.degree..
14. Apparatus for pulling solid crystals from a melt wherein the
level of said melt is maintained constant during the time that the
crystal is being pulled comprising:
a container for said melt;
motor means for raising and lowering said container;
first red source means for transmitting, at one angle to the
vertical, a first radiation beam to the level surface of said
melt;
second red source means for transmitting, at another angle to the
vertical, a second radiation beam to the level surface of said
melt;
sensor means for receiving the sum of the reflections of said first
and said second radiation beams;
said sensor means being disposed at an angle to the vertical to
encompass the reflections of said first and said second radiation
beams;
means for alternately energizing said first and said second source
means at a high frequency rate;
means for focusing each of said first and said second radiation
beams on the same spot at a designated melt level;
said sensor means including means responsive to changes in said
first and said second reflected radiation beams caused by
corresponding changes in said melt level; and
means controlled by said responsive means for effecting
energization of said motor means to raise and lower, respectively,
said container.
15. Apparatus according to claim 12 wherein said sensor means
includes focusing means whereby the reflected beam from one of said
first and said second radiation beams is greater in magnitude than
that of said another reflected beam when said melt level is below a
predetermined value, and whereby the reflected beam from said one
of said first and said second radiation beams is lesser in
magnitude than that of said another reflected beam when said melt
level is above said predetermined value.
16. Apparatus according to claim 15 including a high frequency
oscillator for energizing said first and said second radiation
sources and for controlling the demodulation of the signals
received by said sensor means.
Description
BACKGROUND OF THE INVENTION
This application is related to application Ser. No. 494,438, filed
Aug. 5, 1974, in the names of Donald R. Clement, Larry D. Mason and
Carl A Helber, entitled Automatic Crystal Diameter Control For
Growth of Semiconductor Crystals and assigned to the same assignee
as the subject application.
This invention relates to apparatus for growing semiconductor
crystals, such as, for example, silicon or germanium crystals, by
the Czochralski method, more particularly to apparatus for
maintaining the melt level at a constant height while the crystal
is being pulled, and it is an object of the invention to provide
improved apparatus of this nature.
The Czochralski method of crystal growing is well known and various
schemes are available in the prior art for maintaining the melt
level constant, or essentially so, during the crystal pulling, or
growing, process. Such melt level control schemes, whether of the
open loop, or closed loop variety, have not been satisfactory
bacause of their complexity and their inability to produce crystals
of a quality desired.
It is a further object of the invention to provide an improved melt
level control of the character indicated which is simple in form,
accurate in operation and achieves higher quality crystals for
example crystals having better thermal stability and more
consistent and repeatable crystal diameter.
SUMMARY OF THE INVENTION
According to one form of the invention, there is provided apparatus
for pulling solid crystals from a melt wherein the level of said
melt is maintained constant during the time that the crystal is
being pulled comprising: a container for said melt; motor means for
raising and lowering said container, source means for transmitting,
at one angle to the vertical, a radiation beam to the level surface
of said melt; sensor means for receiving the reflection of said
radiation beam; said sensor means being disposed at the same angle
to the vertical as said source beam; said sensor means including
means for detecting changes in said reflected radiation beams
caused by corresponding changes in said melt level; and means
controlled by said detecting means for effecting energization of
said motor means to raise and lower, respectively, said
container.
In carrying out the invention according to another form, there is
provided apparatus for pulling solid crystals from a melt wherein
the level of said melt is maintained constant during the time that
the crystal is being pulled comprising: a container for said melt;
motor means for raising and lowering said container; first source
means for transmitting, at one angle to the vertical, a first
radiation beam to the level surface of said melt; second source
means for transmitting, at another angle to the vertical, a second
radiation beam to the level of said melt; sensor means for
receiving the reflections of said first and said second radiation
beams; said sensor means being disposed at an angle to the vertical
to encompass the reflections of said first and said second
radiation beams; said sensor means including means responsive to
changes in said first and second reflected radiation beams caused
by corresponding changes in said melt level; and means controlled
by said responsive means for effecting energization of said motor
means to raise and lower, respectively, said container.
In either form of the invention narrow band visible red radiation
is preferred. Such radiation being of the wavelength of
approximately 6500 A .+-. 50 A.
BRIEF DESCRIPTION OF THE DRAWINGS
For a more complete understanding of the invention reference should
be had to the drawings in which FIG. 1 is a somewhat diagrammatic
representation, partially in section, of apparatus and system
embodying the invention.
FIG. 2 is a top view of the apparatus shown in FIG. 1;
FIG. 3 is a circuit diagram and schematic representation of the
apparatus according to the invention and
FIGS. 4A, 4B and 4C are diagrammatic representations showing three
stages in the operation of the invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring to the drawings there is shown apparatus 10 for pulling a
crystal 11 from a melt 12. For example, the crystal may be silicon,
germanium or other.
The apparatus 10 may comprise a more or less cylindrical chamber 13
of usual form and construction including a main body portion 14, a
base 15 and a covering dome 16. The interior of the chamber 13 may
be filled with any desired atmosphere. Interiorally of the chamber
13 there is a crucible 17 made of quartz, for example, supported on
a shaft 18 which projects through the base 15 and is connected to a
gear box 19. The gear box is associated with a drive motor 21
whereby the crucible 17, through the shaft 18, is rotated and the
height of the crucible 17 may be raised or lowered so as to
maintain the surface 22 of the melt constant throughout the crystal
pulling operation as will be more fully explained.
Surrounding the crucible 17 is a heater 23 which conveniently may
be electrical and of any well known form. Atop the dome 16 there is
a shaft guide member 24 through which projects the shaft 25 for
supporting the seed crystal 26. The shaft 25 is attached to a gear
box 27 which is associated with a seed pull motor 28. The motor 28,
through the gear box 27, acts to lift or pull the shaft 25 whereby
the seed crystal 26 is pulled away from the surface 22 of melt 12
and, in so doing, forms a necked-down portion 29, a shoulder 31 and
ultimately the crystal 11 at its final diameter.
Also associated with the dome 16 are observation windows 32 and
33.
Directly opposite each other but displaced laterally from a
diametrical line are two windows 34 and 35 through which visible
red radiation is transmitted and received respectively. Red
radiation is generated in the transmitter or source 36 which
comprises two red sources 37 and 38 from which red radiation beams
39 and 41 are transmitted and aimed at a spot 42 on the surface 22
of the melt 12. Beams 43 and 44 of red radiation reflected,
respectively, from beams 39 and 41 are transmitted through window
35 to the sensor, or receiver, 45. Visible red radiation is used in
order to distinguish the transmitted light from the infrared and
other radiation coming from the hot silicon surface.
The transmitted beams 39 and 41 pass through a water cooled
infrared filter 46 and the reflected beams 43 and 44 pass through a
water cooled infrared filter 47. The red sources in the transmitter
37 are energized through conductors 48 and 49 extending from the
melt level control 50 and the pick up signals received by the
sensor 45 are transmitted by way of conductor 51 to the melt level
control 50. The melt level control transmits the appropriate signal
over conductor 52 to the motor control 53 from which control
signals pass over conductor 54 to the motor 21. The latter control
signals effect energization of the motor so that it causes the
crucible 17 to be raised or lowered as will be more fully
explained.
Referring to FIG. 2 there is shown in a top view, somewhat
diagrammatically, the wall 14 of the chamber 13 the red transmitter
36 and the red sensor or receiver 45. The transmitted rays 39 and
41 are shown directed to the spot 42 and the reflected rays 43 and
44 are shown received by the sensor 45.
Referring to FIGS. 3, 4A, 4B and 4C, the additional structure and
operation of the invention may be understood. In these figures the
same reference characters are used for the corresponding parts.
The melt level control 50 as shown in FIG. 1 comprises the
oscillator 55, the modulator 56, tuned AC amplifier 57, the
demodulator 58, the amplifier 59 and the interconnecting conductors
61, 62, 63, 64 and 65.
The oscillator 55 generates a relatively high frequency square wave
signal for example a signal of 1KHz which is transmitted over
conductor 61 to modulator 56. The modulator 56 is essentially a
high frequency switch which first energizes one red source 37 and
then the other red source 38. That is to say the red sources 37 and
38 are alternately on and off. In effect the high state of the wave
66 may be considered to energize the source 37 and the low state of
the same wave may be considered as energizing the other infrared
source 38. The red sources 37 and 38 may be for example light
emitting diodes shown as 37 and 38 in FIG. 4A. The source 37, as
shown in FIG. 4A may include a lens 37A for directing the beam 39
to the spot 42. Similarly the source 38 may include a lens 38A for
directing the beam 41 to the spot 42. The transmitted beam 39
reflects from spot 42 as reflected beam 43 and the transmitted beam
41 reflects from the spot 42 as reflected beam 44 as has been
described in connection with FIG. 1.
The sensor 45 may be any well known sensitive device such for
example as a photodiode, or photocell shown as 45 in FIG. 4A. The
sensor 45 includes a lens 45A which has sufficient diameter to pick
up both the reflected rays 43 and 44.
The energy in beams 43 and 44 after transmission through lens 45A
and impinging upon the photosensitive element 45 is amplified in
the tuned AC amplifier 57 and conducted over conductor 63 to
demodulator 58 which may be of conventional form and develops a
signal or voltage level, for example, in capacitor 67. When the
level of the melt 22 is correct the charge, or voltage, on
capacitor 67 will have a particular value which is representative
of the proper value of melt level whereupon no signal is
transmitted over conductor 54 and the motor 21 remains stationary.
As the melt level increases, for example, the charge on capacitor
67 will increase thereby causing a signal to be transmitted over
conductor 64 to amplifier 59 and over conductor 65 to motor control
53 whereby the motor 21 is caused to lower the crucible 17 and thus
the melt level value. If, on the other hand, the melt level should
decrease the charge on capacitor 67 will decrease whereby a
decreased, or different, signal is conducted over conductor 64 to
amplifier 59 and to the motor control 53 thereby causing the motor
to turn in the reverse direction to increase the height of the
crucible 17 and thus the height of the melt level.
In FIG. 4A the melt level 22 is shown at the desired position or
value but the surface of the melt is shown as consisting of a
series of sine waves or ripples 22A. Experience shows that in
crystal pulling apparatus of the nature under consideration, the
surface of the liquid silicon, germanium, or the like, has ripples
moving through it virtually all of the time. These ripples are of
relatively low frequency for example 5 cycles per second but
nevertheless they enter into the consideration going to control of
the melt level. The frequency generated by oscillator 55 of 1KHz is
sufficiently high that the ripples 22A are insignificant in the
operation of the apparatus. There will be sufficient number of
cycles in the transmission of the infrared radiation so that it can
be considered that the rays will impinge at the same spot on the
ripples as they move. This can be the top but choosing this spot
for explanation is a matter of convenience inasmuch as the
invention may be explained by having the spot 42 at the trough of
the ripple or along the sides.
When the level 22 is at the proper point, as shown in FIG. 4A, the
reflected ray 44 is on one side of the geometrical center of the
lens 45A and the reflected ray 43 is on the opposite side of the
geometrical center of the lens 45A by the same amount. Thus the
radiant energy falling on the sensor 45 is equal insofar as rays 43
and 44 are concerned. The square wave signal 66 generated by
oscillator 55, in passing over conductor 62 to the modulator 58,
causes the energy received by sensor 45 in response to the infrared
radiation beam 39 for example to add to the charge in capacitor 67
and on the next half cycle, when the beam 41 is energized, the
demodulator causes the energy picked up to be subtracted from the
charge in capacitor 67. Thus the capacitor 67 received alternately
charging and discharging pulses depending on the half waves of the
oscillator 55. Hence, if the melt level 22 is at the point desired,
the alternate pulses of charge received by the capacitor 67 are
equal in value and thus the average value of the charge on the
capacitor 67 remains the same. Consequently no signal is generated
by the motor control 53 and the crucible 17 remains at its proper
level.
It may be observed that the angle of ray 44 with respect to the
vertical is the same as the angle of the transmitted ray 41.
Correspondingly the angle of reflected ray 43 is at the same angle
to the vertical as the transmitted ray 39. The angle between rays
41 and 44 is approximately 45.degree. and the angle between rays 39
and 43 is slightly larger because of the displacement between the
sensors 37 and 38 but the difference in angle is small, so that for
all practical purposes it may be considered that the angle between
rays 39 and 43 is also 45.degree.. This is by way of example only
as will be understood since the angles may be made of any value
desired to meet the particular conditions of operation for a
particular piece of apparatus.
Referring to FIG. 4B there is shown a condition wherein the level
of the melt in crucible 17 has changed from the correct value 22 to
a lower value 22B. Under this condition the transmitted ray 41
reflecting as reflected ray 44 impinges upon the lens 45A adjacent
the center thereof although on the opposite side of the center as
compared with FIG. 4A. The transmitted ray 39 reflects as ray 43
and impinges upon the lens 45 adjacent the right hand edge thereof.
Under this condition it will be evident that the amount of energy
in reflected ray 43 impinging upon the sensor 45 will be
substantially less than that coming from the reflected ray 44.
In the case of FIG. 4B the pulse of charge added to capacitor 67,
as caused by the reflected ray 44 is greater than the charge added
to capacitor 67 by virtue of the reflected beam 43. Over a period
of several cycles the charge accumulation in the capacitor 67 is
positive or increasing because the positive pulse added thereto
exceeds the negative pulse. Thus, a positive signal is generated by
the demodulator 58 and, after amplification by the amplifier 59, is
transmitted to the motor control 53 and ultimately to the motor 21.
This causes the crucible 17 to be lifted to bring the level 22B up
to the level 22.
In FIG. 4C the condition is illustrated wherein the original level
22 is shown at the proper point but the melt level in the crucible
has risen to a level 22C which is higher than that desired. The
transmitted ray 39 impinging on melt level surface 22C, reflects as
ray 43 and impinges on the lens 45A adjacent its center. Similarly
the transmitted ray 41 impinging on the melt level surface 22C
reflects as ray 44 and impinges on the lens 45A adjacent its left
hand edge. In the sequence of operations as described for the
preceding FIGS. 4A and 4B and now applicable to FIG. 4C, it will be
observed that the reflected ray 44 being adjacent the outer edge of
lens 45A causes the sensor 45 to pick up less radiant energy, and
causes a smaller pulse of charge to be added to that in capacitor
67. The reflected ray 43 coming from transmitted ray 39 and
impinging upon lens 45 adjacent its center causes a larger pulse of
charge to be subtracted from the charge in capacitor 67. Thus with
each complete cycle of both beams 39 and 41 being energized the
charge in capacitor 67 decreases because a larger pulse of charge
is subtracted on each half cycle than is added to it on the
corresponding opposite half cycle. The average net charge on
capacitor decreasing, a decreased voltage signal is transmitted
over conductor 64 to amplifier 59 to motor control 53 and thus
ultimately to the motor 21 over conductor 54. The decreased signal
causes the motor to run in the reverse direction, thereby lowering
the crucible 17 and the melt level 22C until it reaches the melt
level 22, the desired value. At this point the elements of charge
added to and subtracted from the charge on capacitor 67 on
alternate half cycles of the oscillator wave are the same.
The system described is a feedback or closed loop system in that
the melt level control is automatically adjusted by the motor 21
and its control 53 in response to melt level whenever the melt
level changes.
The light emitting diodes 37 and 38 may emit red light in the
region of 5000 A units to 10,000 A, but for preferred results the
wavelength of 6500 A is used. The filter 46 is a very narrow
bandpass filter designed to pass the frequency of 6500 A units with
a band width of plus or minus 50 A. The filter 46 may comprise two
relatively thin quartz plates with a centimeter of water in
between. The edges of the quartz plates of course are sealed to
retain the water therein. Such a quartz filter reduces the long
wave infrared radiation to protect itself and the sensing apparatus
from the heat which would be generated if all of the longer wave
infrared radiation were transmitted.
The infrared filter 47 is of the same construction as 46.
The photocell or red sensor 45 can be of any well known form for
this purpose. Two photocells in place of one may be used instead of
one in the same circuit arrangement but such a circuit tends to
have higher noise level response. Improved results are obtained by
using a single photocell and improved electronic circuitry.
* * * * *