U.S. patent number 3,861,733 [Application Number 05/362,634] was granted by the patent office on 1975-01-21 for silicon semi-conductor wafer constraint.
This patent grant is currently assigned to Allied Chemical Corporation. Invention is credited to John E. Vander Mey.
United States Patent |
3,861,733 |
Vander Mey |
January 21, 1975 |
SILICON SEMI-CONDUCTOR WAFER CONSTRAINT
Abstract
A handle and retainer for engagement with a carrier for an
article, said handle and retainer comprising at least two legs,
means for changing the distance between the lower portion of said
legs, means for engaging and disengaging the carrier which engaging
and disengaging means operates upon the change in distance between
the lower portion of the legs and at least one retaining bar for
retaining the article in the carrier, which retaining bar is
connected by one end to one of the legs, the other end of said
retaining bar being unsecured.
Inventors: |
Vander Mey; John E. (Stirling,
NJ) |
Assignee: |
Allied Chemical Corporation
(New York, NY)
|
Family
ID: |
23426897 |
Appl.
No.: |
05/362,634 |
Filed: |
May 21, 1973 |
Current U.S.
Class: |
294/33; 220/760;
294/16; 294/158; 294/166; 220/770; 294/99.1; 294/164; 206/832 |
Current CPC
Class: |
B65G
7/12 (20130101); B08B 11/02 (20130101); Y10S
206/832 (20130101) |
Current International
Class: |
B65G
7/00 (20060101); B65G 7/12 (20060101); B08B
11/00 (20060101); B08B 11/02 (20060101); A47j
045/07 () |
Field of
Search: |
;294/99R,16,33,274,28,86H,1R,3,31,22,87R ;206/1R,328 ;220/94R
;224/46T,46R,48R |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Blunk; Evon C.
Assistant Examiner: Nase; Jeffrey V.
Attorney, Agent or Firm: Dunn; Michael L. Friedenson; Jay
P.
Claims
What is claimed is:
1. A handle and retainer for engagement with a carrier for an
article, said handle and retainer comprising at least two legs,
means for changing the distance between the lower portion of said
legs, means for engaging and disengaging the carrier which engaging
and disengaging means operates upon the change in distance between
the lower portion of the legs and at least one retaining bar for
retaining the article in the carrier, which retaining bar is
connected by one end to one of the legs, the other end of said
retaining bar being unsecured.
2. The handle and retainer as claimed in claim 1 wherein said means
for changing the distance between the lower portion of said legs
comprises a fulcrum bar and a flexible bar connecting the upper
portions of said legs, said flexible bar and said fulcrum bar not
being directly connected, so that application of a force to the
central portion of said flexible bar in a direction substantially
parallel to the longitudinal axis of said legs causes a bending of
the flexible bar thus changing the distance between said legs where
said legs are connected to said flexible bar relative to the
distance between said legs where said legs are connected to said
fulcrum bar, which change in relative distance causes a change in
the distance between the lower portions of said legs thus operating
said engaging and disengaging means.
3. The handle and retainer in claim 2 wherein said handle is
provided with two retaining bars one end of a first said retaining
bars being connected to one of said legs and one end of the second
of said retaining bars being connected to the other of said legs
the remaining ends of said retaining bars being unsecured.
4. The handle and retainer claimed in claim 2 wherein two cross
bars are provided, one of which is secured to one of said legs and
the other of which is secured to the other of said legs, a
plurality of retaining bars each of which is secured at one end to
one of said cross bars, each of said retaining bars being unsecured
at its other end.
5. The handle and retainer claimed in claim 2 wherein the flexible
bar, the fulcrum bar and the retaining bar have a diamond-shaped
cross section.
6. The handle and retainer claimed in claim 5 wherein the longest
radial axis of the diamond-shaped cross section of the flexible bar
is in a direction perpendicular to the direction of force applied
to the flexible bar.
7. The handle and retainer claimed in claim 6 wherein the longest
radial axis of the retaining bar is oriented in a direction giving
maximum rigidity for retaining the article in the carrier.
8. The handle and retainer claimed in claim 3 wherein the unsecured
ends of the retaining bars are tapered.
Description
BACKGROUND OF THE INVENTION
This invention relates to an apparatus for retaining articles in a
carrier while the carrier is immersed in a liquid.
Numerous methods for retaining articles in a carrier while the
carrier is immersed in liquid may occur to one skilled in the art
such as placing a weight upon the articles or confining the
articles by means of a plate which rests upon the carrier. Upon
further consideration however it becomes apparent that when it is
desirable to contact the articles with the liquid in which they are
immersed from all directions and particularly when the articles are
to be sprayed with a liquid in a prior or subsequent operation that
solid weights and retaining devices would restrict the flow of
liquid to the article.
Perforating the weight or retaining device assists in permitting
the liquid to pass through the retaining device to the article
however the flow of liquid to the article is still unacceptably
hindered.
In addition the use of weights or perforated holding devices
requires that the weights or holding devices be stored in a
convenient location for application to the carrier for the article.
Both the requirement of storing the retainer and the requirement of
applying the retainer to the carrier in a separate step cause
inconvenience and consumes time of an operator prior to immersion
of the article into the liquid.
In addition the weighted retainer whether solid or perforated can
be jarred from the carrier thus permitting the articles to float
from the carrier causing inconvenience and loss of production time
in recovering the articles. In addition loss of the articles from
the carrier to the liquid may cause irreparable damage to the
article through prolonged contact with the liquid or through
physical contact with the container for the liquid.
When the article is lost from the carrier to the liquid, prolonged
contact with the liquid may result, in that, the specific time
period during which the article is contacted with the liquid is
normally controlled by removing the carrier for the articles from
the liquid after elapse of the specific time period.
The carrier is generally removed from the liquid by means of a
handle which is attached to the carrier. An example of an
acceptable prior art handle for removing the carrier from the
liquid comprises two substantially parallel legs, the upper portion
of each leg being connected together by a fulcrum bar and by a
flexible bar removed from and not connected directly to the fulcrum
bar. Each of the legs between the fulcrum bar and the flexible bar
are rigid so that application of a force to the central portion of
the flexible bar in a direction parallel to the longitudinal axis
of the legs causes a bending of the flexible bar thus changing the
distance between the legs where the legs are connected to the
flexible bar relative to the distance between the legs where the
legs are connected to the fulcrum bar. The change in relative
distance causes a change in the distance between the lower portion
of each of the legs which lower portions of the legs are provided
with a means for engaging and disengaging the carrier. The engaging
and disengaging means operates upon the change in distance between
the lower portion of the legs. Thus the carrier may be simply
engaged by the handle by applying pressure to the central portion
of the flexible bar causing an increase in distance between the
lower portion of the legs of the handle. The lower portion of the
legs of the handle are then permitted to stradle the carrier so
that when the pressure upon the flexible bar is released the
distance between the lower portion of the legs decreases causing
the engaging and disengaging means to engage the carrier. The
carrier may then be removed from the liquid by lifting the
handle.
BRIEF DESCRIPTION OF THE INVENTION
In accordance with this invention a handle and retainer is provided
for retaining articles to be washed in an open topped carrier. A
retaining bar is attached to a handle which can be easily locked
upon or removed from the carrier. The handle and retainer for
engagement with the carrier comprises two legs and means for
changing the distance between the lower portion of the legs. The
lower portion of each of the legs is provided with means for
engaging and disengaging the carrier which engaging and disengaging
means operates upon the change in distance between the lower
portion of the legs. The handle is provided with at least one
retaining bar connected by one end to one of the legs, the other
end of the retaining bar being unsecured i.e. removable in relation
to the other leg. The retaining bar extends over an access opening
in the carrier and has a small diameter or radial axis relative to
the size of the access opening in the carrier. The retaining bar
retains the article in the carrier when the handle is engaged with
the carrier. More than one retaining bar may be connected to the
handle in accordance with this invention. For example the handle
may be provided with two retaining bars, a first of which is
connected to one leg of the handle and the second of which is
attached to the other leg of the handle. The handle may be provided
with one or more cross bars to which the retaining bars are
attached.
In addition it has been discovered that when the handle and
retaining bar is formed with a diamond-shaped cross section the
handle and retaining bar readily drips dry thus preventing removal
of liquid from the container holding the liquid. Removal of liquid
from the container by the handle and retaining bar is to be avoided
since such liquid removal can result in inefficiency due to the
loss of such liquid which has to be replaced and since removed
liquid which clings to the handle and retaining bar can result in a
source of contamination of the article.
The handle and retainer described above for retaining articles in
an open topped carrier permits a handle and retainer to be
simultaneously and easily engaged with and permits the handle and
retainer to be easily removed from the carrier in a simple one step
operation. The handle and retainer is of simple construction, and
securely retains the article in the carrier.
In addition the handle and retainer of the invention permits
washing through the retainer with a minimum of interference by the
retainer since the retaining bar has a small radial axis relative
to the size of the access opening in the carrier.
When the combined retainer and handle of the invention is used, the
requirement for separate storage of carrier handles and retainers
such as weights is eliminated and the step of separate application
of the retainer to the carrier is not required.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is an elevational view of the handle and two retaining bars
connected with a carrier.
FIG. 2 is a top view of the handle and retaining bars connected to
the carrier as shown in FIG. 1.
FIG. 3 is an end elevational view of the handle and retaining bars
connected with the carrier shown in FIG. 1.
FIG. 4 is a side elevational view of the handle and retaining bars
showing how application of pressure to the flexible portion of the
handle permits removal of the handle and retaining bars from the
carrier.
FIG. 5 is a cross sectional elevational view taken on lines 5--5 of
FIG. 2.
FIG. 6 is a cross sectional elevational end view taken on lines
6--6 of FIG. 5.
FIG. 6b is a cross sectional end view taken on lines 6b--6b of FIG.
5.
FIG. 7 is a cross sectional end view showing a handle having
retaining bars connected at one end to a cross bar which handle is
engaged with a carrier having dual compartments.
DETAILED DESCRIPTION OF THE INVENTION
"Handle" as used herein is any means which can be engaged with a
carrier for holding, lifting or moving the carrier. The legs of the
handle are any projections of suitable strength for lifting the
carrier and of suitable chemical and corrosion resistance to be
partially immersed in the particular liquid with which the article
is contacted. The handle for the carrier to which the retainer is
attached is a handle which can readily be engaged and disengaged
with the carrier.
"Carrier" as used herein is any means having an access opening for
holding an article, which means is dependent upon the weight of the
article to prevent the article from being removed from or escaping
through the access opening. The access opening is an opening in the
carrier which permits an article to enter and leave the
carrier.
The engaging and disengaging means is any suitable means for
engaging and disengaging the carrier upon a change in distance
between the lower portion of the legs, the engaging means
preferably operating upon reducing the distance between the lower
portions of the legs and the disengaging means preferably operating
upon increasing the distance between the lower portions of the
legs. The engaging and disengaging means in the preferred
embodiment are hooks which are attached to and may be integral with
the lower portions of the legs, which hooks are adapted to fit into
holes or slots in the end walls of the carrier to securely hold the
carrier. The lower portions of the legs can be separated by a
sufficient distance to permit the hooks to pass around the
sidewalls of the carrier. The distance between the legs can then be
reduced so that the hooks engage the slots in the sidewalls of the
carrier. The means for changing the distance between the lower
portions (the portions below the center) of the legs may be any
suitable means for moving the lower portions of the legs relative
to each other and is preferably a means for pivoting or partially
rotating the lower portion of one of the legs relative to the lower
portion of the other of the legs.
"Retainer" as used herein is any means for preventing an article
from leaving the carrier through the access opening and in the
preferred embodiment is a retaining bar. The retaining bar is a bar
of any suitable cross section and of sufficient length to extend
over the access opening far enough to prevent escape or removal of
an article from the carrier through the access opening.
The article to be contacted with the liquid may be of any size and
shape such as a silicon semi-conductor wafer and the purposes for
contacting the article may vary widely. It may be desirable for
example to wash the article with the liquid, to etch the article
with the liquid or to coat the article with the liquid.
In the preferred embodiment of the invention the handle and
retainer comprises two legs. The upper portions of each leg are
connected together by a fulcrum bar and by a flexible bar removed
from and not connected directly to the fulcrum bar. The flexible
bar is made of any material which will return to its original shape
after being bowed and may be made of plastic or steel. The fulcrum
bar is preferably, though not necessarily rigid with respect to the
flexible bar and may be made of a completely rigid material or may
be made of a material which will return to its original shape after
being bowed. The terminal ends of the fulcrum bar are made of a
flexible material which permits the angle between the legs and the
fulcrum bar to change as the distances between the upper portions
of the legs and between the lower portions of the legs change. Each
of the legs are rigid between the fulcrum bar and the flexible bar,
so that application of a force to the central portion of the
flexible bar in a direction substantially parallel to the
longitudinal axis of the legs causes a bending of the flexible bar
thus changing the distance between the legs where the legs are
connected to the flexible bar relative to the distance between the
legs where the legs are connected to the fulcrum bar. This change
in relative distance causes a change in the distance between the
lower portion of each of the legs. The fulcrum bar may for
convenience be used as a grip so that a force can be more easily
applied to the flexible bar.
When the fulcrum bar is flexible and is used as a grip the pressure
applied by the grip will cause the fulcrum bar to bend or bow
causing a change in distance between the legs where the fulcrum bar
is connected with the legs; therefore, for most efficient operation
when a flexible fulcrum bar is used the fulcrum bar is provided
with a biasing bow which will cause a force applied by a hand grip
to change the distance between the legs where the fulcrum bar is
connected with the legs in a direction opposite the direction in
which the distance between the legs is changed where the flexible
bar is connected with the legs.
The lower portion of each of the legs is provided with means for
engaging and disengaging the carrier which engaging and disengaging
means operates upon the change in distance between the lower
portion of the legs.
Referring now to the drawings as best seen in FIG. 6b the cross
sections of the flexible bar 17b, fulcrum bar 18b and retaining bar
19b preferably have a diamond-shape so that liquid is not retained
on either the flexible bar, fulcrum bar or retaining bar. In a
preferred embodiment of the invention the longest radial axis 33 of
the diamond shaped cross section of the flexible bar extends
perpendicularly to the force 35 applied to the flexible bar so that
flexibility is retained while the longest radial axis 36 of the
fulcrum bar extends in the same direction as the force 35 applied
to the flexible bar so that the rigidity of the fulcrum bar is
retained. The retaining bar has its longest radial axis 32 in a
direction which provides the most rigidity in preventing articles
from leaving the carrier.
As seen in FIGS. 1 through 6 handle and retainer 11 in the
preferred embodiment is provided for securely engaging carrier 12
which is adapted to hold an article 10. Handle and retainer 11 as
best seen in FIGS. 1, 4 and 5 is provided with substantially
parallel legs 13 and 14 which are reinforced for increased rigidity
by flanges 15 and 16. The upper portions of legs 13 and 14 are
connected to each other by flexible bar 17 and fulcrum bar 18.
Retaining bars 19 and 20 are connected at one of each of their ends
to parallel legs 13 and 14 respectively and are preferably provided
with tapers 19' and 20' to permit overlap when the handle and
retainer is engaged with the carrier.
Legs 13 and 14 are provided with hooks 21 and 22 respectively
proximate their lowermost portions, which hooks are adapted to
engage holes 23 and 24 in end walls 25 and 26 respectively of
carrier 12. Carrier 12 may be of any suitable size or shape for
holding an article 10 to be immersed in a liquid and as shown in
the drawings may be provided with grooves 27 in sidewalls 28 and 29
of carrier 12 when article 10 is in the shape of a wafer or
disc.
As best seen in FIG. 4 the distance between the lower portions of
legs 13 and 14, and between hooks 21 and 22 may be increased by
applying a force to the central portion of flexible bar 17 causing
flexible bar 17 to bow. Bowing flexible bar 17 causes a reduction
in distance between legs 13 and 14 where flexible bar 17 is
connected to the legs. The reduction in distance between the legs
above fulcrum bar 18 causes the distance between the lower portions
of legs 13 and 14 to increase thus permitting the lower portions of
legs 13 and 14 to pass over end walls 25 and 26 of carrier 12.
Releasing the pressure on flexible bar 17 permits flexible bar 17
to return to its original shape thus causing the distance between
legs 13 and 14 to increase which causes the distance between the
lower portions of legs 13 and 14 to decrease. The decrease in
distance between the lower portions of legs 13 and 14 permits hooks
21 and 22 to securely engage holes 23 and 24.
As best seen in FIGS. 1 and 5 when handle and retainer 11 is
engaged with carrier 12, retaining bars 19 and 20 prevent article
10 from escaping through the access opening in the top of carrier
12 when carrier 12 and article 10 are immersed in a liquid.
Handle and retainer 11 may be easily removed from carrier 12 simply
by applying a force to the central portion of flexible bar 17 to
create a bow in flexible bar 17. Hooks 21 and 22 then become
disengaged from holes 23 and 24 in end walls 25 and 26 of carrier
12 permitting handle and retainer 11 to be lifted away from carrier
12 and permitting article 10 to be removed from carrier 12.
FIG. 7 shows an alternative embodiment of the handle and retainer
11a wherein a cross bar 30a is attached to and may be integral with
leg 13a and a plurality of retaining bars 19a are provided which
are attached to cross bar 30a. The alternative embodiment of the
handle and retainer is suitable for retaining articles 10a in a
carrier 12a which has a plurality of compartments defined by
sidewalls 28a and 29a. The alternative embodiment of the handle is
also provided with a flexible bar 17a and a fulcrum bar 18a and
operates in the same way as the first embodiment of the handle
previously discussed.
* * * * *