U.S. patent number 3,858,547 [Application Number 05/424,659] was granted by the patent office on 1975-01-07 for coating machine having an adjustable rotation system.
Invention is credited to Nils H. Bergfelt.
United States Patent |
3,858,547 |
Bergfelt |
January 7, 1975 |
COATING MACHINE HAVING AN ADJUSTABLE ROTATION SYSTEM
Abstract
Coating machine having a vacuum chamber with at least one
coating source disposed in the chamber. A plurality of spindle
assemblies are mounted in the chamber with each of the spindle
assemblies having a rotatable spindle. A substrate holder is
carried by each spindle and is adapted to carry a substrate in such
a manner that it is adapted to receive coating material from the
coating source. Means is provided for rotating the spindle
assemblies about the source. Means is also provided for rotating
the spindles about their own axes at the same time they are being
rotated about the source. Means is provided to permit adjustment of
the spacing of the spindle assemblies from the center of rotation
about the source. In addition, means is provided to permit
adjustment of the angle of the spindle with respect to the coating
source to thereby adjust the angle of incidence of the vapor
coating stream with respect to the substrates carried by the
spindles.
Inventors: |
Bergfelt; Nils H. (Santa Rosa,
CA) |
Family
ID: |
23683405 |
Appl.
No.: |
05/424,659 |
Filed: |
December 14, 1973 |
Current U.S.
Class: |
118/730; 269/57;
118/53 |
Current CPC
Class: |
C23C
14/505 (20130101) |
Current International
Class: |
C23C
14/50 (20060101); C23c 013/08 () |
Field of
Search: |
;118/49-49.5,53
;117/107.1 ;269/57 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Kaplan; Morris
Attorney, Agent or Firm: Flehr, Hohbach, Test, Albritton
& Herbert
Claims
I claim:
1. In a coating machine having an adjustable double rotation
system, a vacuum chamber, at least one coating source disposed in
the vacuum chamber, a plurality of spindle assemblies mounted in
the chamber and each having a rotatable spindle, a substrate holder
carried by each spindle and adapted to receive at least one
substrate which can receive coating material from the coating
source, means for orbiting the spindle assemblies about the coating
source, means for rotating the spindles about their own axes of
rotation during the time that they are being rotated about the
source and means for adjusting the spacing of the spindle
assemblies substantially along the radial extent toward and away
from the axis of rotation of the spindle assemblies about the
source, said means for adjusting including a shaft extending
radially of the chamber and drive means slidably mounted on said
shaft and driving said spindle and means in the chamber for driving
said shaft.
2. A machine as in claim 1 together with means for adjusting the
angle of the spindle with respect to the position of the coating
source.
3. A machine as in claim 1 wherein said means for rotating the
spindles of the spindle assemblies about their own axes includes a
bevel gear mounted on the spindle and bevel gear means for driving
the bevel gear on the spindle.
4. A machine as in claim 3 wherein said bevel gear means includes
bevel gears having abutting circumferential surfaces which are
inclined at angles with respect to each other.
5. A machine as in claim 1 wherein said drive means includes
gearing means.
6. A machine as in claim 5 wherein said means within said chamber
includes a planetary gear mounted on said shaft and a stationary
sun gear having its axis coincident with the axis of rotation for
the spindle assemblies about the source and engaging the gear
mounted on the shaft.
7. A machine as in claim 5 together with a stem mounted in said
chamber, a housing rotatably mounted on said stem, means carried by
said housing for supporting said shafts in a generally horizontal
position and means for rotating said housing.
8. In a coating chamber having an adjustable double rotation
system, a vacuum chamber, at least one coating source disposed in
the vacuum chamber, a stem mounted in the vacuum chamber, a housing
rotatably mounted on the stem, a plurality of radially extending
spoke assemblies mounted on said housing, bearing means carried by
said spoke assemblies, a generally horizontal shaft mounted in each
of the bearing assemblies, a planetary gear carried by the shaft, a
stationary sun gear disposed within the chamber and engaging the
planetary gear, means for causing rotation of said housing about
said stem and to cause rotation of said spoke assemblies and the
shafts carried thereby about the axis of said stem so that said
shaft is rotated about its axis, a drive member slidably mounted on
said shaft, spindle carrier means associated with said drive member
and movable longitudinally of the shaft with said drive member, a
spindle assembly, means mounting said spindle assembly on said
spindle carrier, said spindle assembly including a spindle
rotatably mounted therein and driven means adapted to engage the
drive member and engaging the spindle for causing rotation of the
spindle as the drive member is rotated upon rotation of said shaft,
said spindle being adapted to carry a substrate holder for carrying
substrates which are to be coated with material emanating from the
coating source.
9. A machine as in claim 8 together with means for retaining said
spindle carrier means in predetermined positions extending
longitudinally of the shaft.
10. A machine as in claim 9 together with means for pivotally
mounting said spindle assembly on said spindle carrier means
whereby the angle of the spindle with respect to the source can be
adjusted.
11. A machine as in claim 10 wherein the angle can be varied from
vertical to 32.degree. from the vertical.
12. A machine as in claim 8 wherein said drive member is in the
form of a bevel gear having teeth with abutting circumferential
surfaces inclined at an angle with respect to each other.
13. A machine as in claim 10 wherein said means for adjusting the
angle of the spindle assembly includes a member secured to the
spindle carrier means to hold the spindle assembly in the desired
angular position.
14. A machine as in claim 13 together with additional means for
locking said spindle assembly in the desired angular position.
Description
BACKGROUND OF THE INVENTION
In U.S. Pat. No. 3,128,205, there is provided a coating machine
which has a double rotation system. However, this system utilizes a
friction drive in which slippage may occur. In addition, no means
is provided for varying the spacing of the substrate holders from
the axis of rotation of the substrate holders about the source. For
this reason, it is often very difficult to obtain maximum
utilization of the space within the vacuum chamber. There is,
therefore, a need for a coating machine which has new and improved
double rotation system.
SUMMARY OF THE INVENTION AND OBJECTS
The coating machine having an adjustable double rotation system
consists of a vacuum chamber with at least one coating source
disposed in the vacuum chamber. A plurality of spindle assemblies
are mounted in the chamber. Each has a rotatable spindle which is
adapted to carry a substrate holder carrying substrates which are
adapted to receive coating material from the coating source. Means
is provided for rotating the spindle assemblies about the coating
source. Means is also provided for rotating the spindles of the
spindle assemblies about their own axes of rotation during the time
that they are being rotated about the source. Means is provided for
adjusting the positions of the spindle assemblies radially with
respect to the axis of rotation of the spindle assemblies about the
source. Means is also provided for adjusting the angles of the
spindles with respect to the coating source.
In general, it is an object of the present invention to provide a
coating machine with a double rotation system which is
adjustable.
Another object of the invention is to provide a coating machine of
the above character having spindle assemblies in which the
positions of the spindle assemblies can be adjusted along a radius
with respect to the axis of rotation of the spindle assemblies
about the source.
Another object of the invention is to provide a coating machine of
the above character in which the radial adjustments of the spindle
assemblies can be readily carried out.
Another object of the invention is to provide a machine of the
above character in which the spindle assemblies have spindles which
are rotated about their own axes and which are adjustable in angle
with respect to the source.
Another object of the invention is to provide a coating machine of
the above character in which a positive drive without danger of
slippage is provided.
Another object of the invention is to provide a coating machine of
the above character in which maximum usage is made of the space
above the coating source for coating substrates.
Another object of the invention is to provide a coating machine of
the above character in which particularly novel driving means is
provided for causing the rotation of the system.
Another object of the invention is to provide a coating machine of
the above character in which various arrangements of spindle
assemblies can be provided.
Additional objects and features of the invention will appear from
the following description in which the preferred embodiment is set
forth in detail in conjunction with the accompanying drawing.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a cross-sectional view of a coating machine incorporating
the present invention.
FIG. 2 is an enlarged cross-sectional view showing a portion of the
double rotation system incorporating the present invention.
FIG. 3 is a cross-sectional view taken along the line 3--3 of FIG.
2.
FIG. 4 is a cross-sectional view taken along the line 4--4 of FIG.
2.
FIG. 5 is a cross-sectional view taken along the line 5--5 of FIG.
2.
DESCRIPTION OF PREFERRED EMBODIMENT
The coating machine having an adjustable double rotation system
shown in the drawings consists of a large coating chamber or
housing 11 which can be of any desired shape as, for example,
cylindrical, which is provided with a cylindrical side wall 12, a
planar top wall 13 and a planar bottom wall 14. The top wall 13 and
the bottom wall 14 are parallel with respect to each other. A
bottom plate 16 is secured to the bottom wall 14 by suitable means
such as bolts (not shown). Suitable O-ring sealing means 17 of a
conventional type is provided for forming a vacuum-tight seal
between the bottom wall 14 and the bottom base plate 16. It can be
seen that the chamber or housing 12 provides a large enclosed
chamber 19 which is adapted to be evacuated by large vacuum pumps
(not shown) to provide the desired degree of vacuum.
Means of a conventional type is provided within the chamber for
evaporating coating materials of various types. Thus, there is
schematically shown a resistance heated boat 21 and an electron gun
22. By way of example, twelve resistance heated boats 21 can be
provided on the bottom plate 16 and two electron guns 22 spaced in
a 12 inch circle can be carried by the base plate 16. This makes it
possible to utilize a great many different coating materials in the
vacuum chamber for depositing very complicated coatings.
A top plate 26 covers a large opening 27 provided in the top wall
13. It is secured to the top wall 13 by suitable means such as
bolts (not shown). Suitable O-ring sealing means 28 is provided for
establishing a vacuum-tight seal between the top plate 26 and the
top wall 13. The coating chamber thus far described is
conventional.
The adjustable double rotation system 31 consists of a large
centrally disposed stem 32 which extends through a hole 33 provided
in the top plate 26. The stem 32 is provided with a radially
extending flange 34 at its upper end which is secured to the top
plate 26 by suitable means such as bolts 36. O-ring sealing means
37 is mounted between the flange 34 and the top plate 26. A
circular transfer plate 39 is secured to the bottom end of the stem
32 by cap screws 41.
A chip changer assembly 42 for monitoring the vapor stream from the
source is provided. The assembly 42 is secured to the transfer
plate 39 by cap screws 43. The chip changer assembly 42 is
conventional and is somewhat similar to the chip changer assembly
described in U.S. Pat. No. 3,387,742. Means is provided for causing
operation of the chip changer assembly and consists of a shaft 46
which has its lower extremity secured to the chip changer assembly
42 and which is coaxially disposed within the stem 32. The shaft 46
extends through a vacuum feed-through provided with bearings (not
shown). This shaft 46 carries a pulley (not shown) which is driven
by a belt (also not shown).
A centrally disposed bearing housing 51 is provided in the chamber
19 and is rotatably mounted upon the stem 32 by upper and lower
ball bearing assemblies 52 and 53. Bearing assembly retaining rings
54 and 56 are provided and are secured to opposite ends of the
housing 51 by cap screws 57. Upper and lower rings 58 and 59 are
secured to the housing 51 by cap screws 61. A spoke assembly 62 is
secured to the upper and lower rings 58 and 59 by suitable means
such as welding. By way of example, six arms or spokes 63 spaced
60.degree. apart form a part of the spoke assembly 62. A large
annular plate or mounting ring 64 is secured to the lower outer
extremities of the spokes 63 by bolts 65 extending through
horizontal flange portions 63a of the spokes 63.
Means is provided for rotating the housing 51 carrying the spoke
assembly 62 for rotation about the stem 32 and consists of a ring
gear 66 secured to the top of the housing by cap screws 67. The
ring gear is driven by a spur gear 68 mounted on a shaft 69. The
shaft 69 is rotatably mounted in a vacuum feed-through 71 provided
in the top plate 26. A pulley 72 is mounted on the upper end of the
shaft 69 and is driven by a belt 73. The belt 73 is driven by a
pulley 74 mounted on the shaft 76 of an electric 77. The motor 77
is carried by a bracket 78 mounted on the upper wall 13. It can be
readily seen that the motor 17 will cause rotation of the shaft 69
which will, in turn, cause rotation of the housing 51 about the
stem 32.
A plurality of spindle traverse adjustment housing assemblies 79
are secured to the mounting ring 64 by cap screws 87 extending
through a plate 86 forming part of each of the assemblies 79. Inner
and outer bearing blocks 88 and 89 are secured to opposite ends of
the plate 86 by cap screws 91. Ball bearing assemblies 92 are
mounted within the inner and outer bearing blocks 88 and 89. The
bearing assembly 92 is retained within the bearing block 88 by a
retaining ring 93. The other bearing assembly 92 is retained in the
bearing block 89 by retaining ring 94. An elongate shaft 96 is
mounted in the bearing assemblies 92 for rotation about the
longitudinaly axis of the shaft. The shaft 96, as shown in FIG. 3,
is square in cross-section for a purpose hereinafter described.
A planetary bevel gear 97 is secured to the end of the shaft 96
extending through the bearing assembly 92 carried by the bearing
block 88. Suitable means such as a key (not shown) is provided so
that when the planetary gear 97 is rotated, the shaft 96 is rotated
therewith. A retaining ring 98 is mounted on the shaft 96 for
retaining the planetary gear 97 on the shaft 96. The planetary
bevel gear 97 engages a large stationary sun gear 99 which is
secured by cap screws 101 to the transfer plate 39. It can be seen
that when the spoke assembly 62 is rotated the bevel gear 97 is
forced to rotate by the stationary sun gear 99.
Each of the assemblies 79 include a drive gear 106 which is
slidably mounted on the square shaft 96 of the spindle assembly.
The drive gear 106 is provided with a large hub 107 upon which
there are mounted two closely spaced ball bearing assemblies 108.
The drive gear 106 is provided with gear teeth which are formed on
two bevels 109 and 111 which are at an exterior angle of
approximately 148.degree. with respect to each other. The ball
bearing assemblies 108 carrying the hub 107 are mounted in a
bearing housing 112 and are retained therein by a retaining ring
113. Since the ball bearing assemblies 108 are locked within the
bearing housing 112, the drive gear 106 will always be rotating
along the axis of the shaft 96. The two bearing assemblies 108
prevent rocking of the drive gear 106 on the shaft 96. It can be
seen that the hub 107 of the drive gear 106 rests against the inner
race of the inner ball bearing assembly 108.
A spindle carrier assembly 114 is mounted on each of the housing
assemblies 79 and is comprised of a pair of spaced parallel
generally L-shaped side plates 116 which are secured to the bearing
housing 112 by cap screws 115. Each of the side plates 116 is
provided with a cut-out 117 extending vertically through the upper
end thereof which accomodates the drive gear 106. A pair of spaced
support bars or plates 118 are secured to the side plates 116 by
cap screws 121. A can be seen from FIG. 3, the support bars 118
extend over spaced parallel rails or plates 119 forming a part of
the housing assembly 79 and are adapted to ride upon the top
surfaces thereof for sliding movement longitudinally of the rails.
The rails 119 are mounted by cap screws 112 on the bearing blocks
88 and 89.
Each of the rails 119 is provided with two spaced parallel rows of
threaded holes 123 which are spaced apart in a direction extending
longitudinally of the rails 119 a suitable distance as, for
example, 2 inches between holes. Four cap screws 124 are threaded
into four of the holes 123 and are adapted to be threaded into the
threaded holes 125 provided in the side plate 116. Thus, as can be
seen by removing the four screws from each of the side plates, it
is possible to shift the side plates longitudinally of the rails by
2 inch increments. The drive gear 106 will also slide along the
square shaft 96 and will be driven by the square shaft in any
position to which the side plates 116 are moved.
A spindle assembly 126 is carried by the side plates 116 of each
spindle traverse adjustment housing assemblies 79 and consists of a
cylindrical housing 126 which has a shaft 128 rotatably mounted
therein by a pair of spaced bearing assemblies (not shown). As is
well known to those skilled in the art, substrate holders 129 are
adapted to be secured to the shaft 128 so they are rotated with the
shaft. The substrates are adapted to be secured to the substrate
holders. The substrate holders can be of any conventional type as,
for example, parabolic, circular and flat.
A bevel gear 131 is mounted on the other end of the shaft 128 and
is adapted to engage the drive gear 106. The housing 126 is
supported by a clamping body 132 consisting of two parts 133 and
134 which are fastened together about the housing 126 by screws
136. A pair of spaced parallel legs or arms 137 are secured to the
part 133 by suitable means such as welding and extend upwardly at
an angle which is substantially parallel to the axis of rotation of
the shaft 128. The upper extremities of the arms 137 are pivotally
mounted between the side plates 116 and are secured thereto by
dowel pins 138 so as to permit swinging movement of the spindle
assembly 126 with axis of swing movement being coincident with the
point of contact of the gears 106 and 131.
Means is provided for locking the spindle assembly 126 in a
predetermined angular position and consists of cap screws 141 which
are threaded into the part 133. The cap screws 141 extend through
arcuate slots 142 provided in the side plates 116. The center of
the arc is the axis of rotation provided by the dowel pins 138.
Washers 143 are carried by the cap screws 141 and are adapted to
engage the side plates 116. It can be seen that by tightening the
cap screws 141, the spindle assemblies 126 can be held in the
desired angular position.
In order to facilitate pivotal movement of the spindle assemblies
126, an eye bolt 46 is provided which is seated in a groove 147
provided in the part 133 of the clamping body 132. A roll pin 148
is mounted in a hole 149 provided in the body and extends through
the eye bolt 146 to retain the eye bolt within the groove 147. The
eye bolt 147 extends through a hole 151 provided in a cross bar
152. The cross bar 152 is secured to the side plates 116 by
suitable means such as welding. A washer 153 is provided on the eye
bolt and engages the cross bar 152 and is held in place by a nut
154. From the arrangement shown, it can be seen that the eye bolt
146 will carry most of the load of the spindle assembly 126 even
when a relatively heavy substrate holder is mounted thereon. When
it is desired to change the angle of the spindle assembly 63, it is
merely necessary to loosen the nut 154 and the cap screws 141 to
permit the spindle assembly to be moved toward the vertical.
Conversely, when it is desired to move the spindle assembly further
away from the vertical, the nut 154 is tightened on the eye bolt to
pull the spindle assembly toward the greater angle from the
vertical. As soon as this has been accomplished, the cap screws 141
can be tightened.
Operation of the coating machine having an adjustable double
rotation system may now be briefly described as follows. Let it be
assumed that the substrate holders 129 have been filled with
substrate and that the chamber 19 has been evacuated to the desired
degree and that it is desired to begin a coating operation. The
double rotation system is placed in operation by energizing the
motor 77 which causes rotation of the spur gear 68 and the spur
gear 68 causes rotation of the ring gear 66 which, in turn, causes
rotation of the stem 32 and the plurality of radially extending
spider or spoke assemblies 62 which are carried thereby. The
carrying plates 86 rotate with the spoke assemblies and carry the
spindle assemblies 126. As this occurs, the planetary bevel gear 97
is caused to rotate by engagement with the stationary sun gear 99.
Rotation of the gear 97 causes rotation of the shaft 96. Rotation
of the shaft 96 causes rotation of the bevel gear 106. Rotation of
the bevel gear 106 causes rotation of the beveled crown gear 131.
This causes rotation of the spindle 128 and the substrate holder
129 carried thereby. Thus, it can be seen that a double rotation
system is provided in that the substrates carried by the substrate
holders 129 are rotated about an axis which is coincident with the
axis of rotation for the stem 32. In addition, they are rotated
about an axis which is coincident with the axis of the spindle
128.
An important feature of the present invention is that the distance
from the centerline of the axis of rotation for the stem 32 and the
spindle assemblies 126 can be adjusted. This can be accomplished by
moving the side plates 116 and the bearing housing 112 secured
thereto longitudinally of the rails 103 in a direction which is
longitudinal of the axis of the shaft 96. As explained previously,
this is accomplished by removing the four cap screws 124 from each
of the side plates 116. When this is done, the side plates 116 and
the spindle assembly 126 are supported by the side plate 118. This
ensures that it will not be necessary for the shaft 96 to support
all the weight of the spindle assembly 126 and the substrate
holders carried thereby. As soon as the cap screws 124 have been
removed, the side plates and the spindle assembly 126 may be moved
in increments along the axis of the shaft 96 as determined by the
positioning of the holes 103 and then secured in a desired position
by the cap screws 124. It can be seen that it is possible to
radially adjust the position of the spindle assembly 126 within the
chamber 19 as determined by the length of the shaft 96 and the
spacing between the bearing blocks 88 and 89. In all positions of
the spindle assembly 126 double rotation of the substrates will
still be provided.
In addition with the present invention, it is possible to adjust
the angle of the substrates with respect to the sources from which
the materials are being evaporated by tilting of the spindle shaft
128. As explained previously, this can be accomplished by loosening
the cap screws 141 and then using the nut 154 to position the
spindle assembly 128 to the desired angle and then re-tightening
the cap screws 141 to hold the spindle in this predetermined
angular position. The crown spur gear 131 and the bevel gear 106
have been designed in such a manner that the spindle 128 will be
positively driven through a substantial variation in angle of the
axis of the shaft 128. By way of example, an angle ranging from the
vertical to 32.degree. from the vertical can be readily
accomplished with the mechanism hereinbefore described while still
obtaining a positive driving relationship between the bevel gear
106 and the beveled crown gear 131. This is made possible because
of the two bevels 109 and 111 provided on the gear 106.
By way of example, in one embodiment of the present invention, 12
inches of travel is permitted for the bevel gear 106 longitudinally
of the shaft 96 thus making it possible to change the center
distance from the spindle 128 to the center of the sun gear 99 from
20 inches through 32 inches.
From the adjustments hereinbefore described, it can be seen that
the radius of rotation can be varied as well as the angle of
rotation for the substrates. Varying of the radius of rotation is
advantageous because when coating certain types of substrates as,
for example, small substrates, it is possible to utilize different
radiuses so that it is possible to place a great many more spindle
assemblies in the machine to thereby obtain a much greater capacity
for the machine. The machine is also advantageous in that it makes
it possible to cover substrates which heretofore have been
difficult to coat satisfactorily. This can be accomplished by
changing the radius and also by tilting of the spindle axis toward
or away from the coating source to obtain the coating desired.
By way of example, if it is desired to coat three large substrates,
they can be placed 120.degree. apart. In such a case, a substrate
as large as 37 inches can be coated in a coating machine of this
type and size. If twelve of the spoke assemblies and spindle
assemblies are placed within the coating machine, then it is
possible to coat 10 or 11 inch diameter substrates and to almost
completely fill the circle with substrates.
Any combination of spoke assemblies and spindle assemblies can be
utilized, for example, combinations can be worked out utilizing 10
spokes, five spokes, four spokes or even eight spokes. Substrate
holders of various sizes also can be utilized ranging from 37
inches down to 10 inches or less.
It is apparent from the foregoing that there has been provided a
coating machine having an adjustable rotation system which has many
advantageous features. It is constructed in such a way that the
angle of the substrate holder with respect to the source can be
readily varied. In addition, the radius of rotation about the
sources also can be readily adjusted. The system is designed in
such a manner that the desired amount of stability is retained. A
positive drive is provided so that there is no undesirable
slippage. The system is also designed in such a manner that
substantially the entire area which is covered by the coating
streams from the coating sources will be filled with substrate
holders and substrates carried thereby to make possible maximum
utilization of the space within the vacuum chamber and also to
obtain the desired coating angle or angle of incidence for the
vapor stream for the substrates being coated.
* * * * *