U.S. patent number 3,858,065 [Application Number 05/274,251] was granted by the patent office on 1974-12-31 for annular 3m class piezoelectric crystal transducer.
This patent grant is currently assigned to Becton Dickinson Electronics Company. Invention is credited to Howard C. Epstein.
United States Patent |
3,858,065 |
Epstein |
December 31, 1974 |
ANNULAR 3M CLASS PIEZOELECTRIC CRYSTAL TRANSDUCER
Abstract
The transducer of this invention utilizes an annular crystal of
the 3m class operated in the shear mode with the shearing surfaces
and the axis of the acceleration parallel to the Z axis of the
crystal. When the crystal is composed of lithium niobate or lithium
tantalate, the transducer has high efficiency and when the crystal
is composed of lithium niobate it operates effectively over a very
wide range of temperatures, including high temperatures above
1,000.degree.F.
Inventors: |
Epstein; Howard C. (South
Pasadena, CA) |
Assignee: |
Becton Dickinson Electronics
Company (Pasadena, CA)
|
Family
ID: |
23047439 |
Appl.
No.: |
05/274,251 |
Filed: |
July 24, 1972 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
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103036 |
Dec 31, 1970 |
|
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Current U.S.
Class: |
310/329; 310/360;
310/364; 310/369; 252/62.9R |
Current CPC
Class: |
B06B
1/0655 (20130101); G01P 15/0915 (20130101); H01L
41/1132 (20130101) |
Current International
Class: |
B06B
1/06 (20060101); G01P 15/09 (20060101); H01L
41/113 (20060101); H01v 007/02 (); H04r
017/00 () |
Field of
Search: |
;310/8,8.3,8.4,9,9.5,9.6
;252/62.9 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Journal of the Acoustical Society of America, paper by Warner, Onoe
and Coquin, Dec. 1967..
|
Primary Examiner: Miller; J. D.
Assistant Examiner: Budd; Mark O.
Attorney, Agent or Firm: Lawlor; Reed C.
Parent Case Text
This application is a continuation in part of co-pending
application Ser. No. 103,036 filed Dec. 31, 1970 now abandoned.
Claims
The invention claimed is:
1. In a transducer of the shear type in which an electrical signal
is developed across two parallel cylindrical surfaces of an annular
piezoelectric element mounted to move relatively to each other in a
direction parallel to such surfaces in response to force applied to
at least one of said surfaces in said direction and in which means
are provided for conducting such electrical signal to a utilization
device responsive thereto, the improvement wherein said annular
piezoelectric element comprises a piezoelectric crystal of the 3m
class having its Z axis parallel to said surfaces.
2. In a transducer of the shear type in which an electrical signal
is developed across two parallel cylindrical surfaces of an annular
piezoelectric element mounted to move relatively to each other in a
direction parallel to such surfaces in response to force applied to
at least one of said surfaces in said direction and in which means
are provided for conducting such electrical signal to a utilization
device responsive thereto, the improvement wherein said annular
piezoelectric element comprises a lithium niobate crystal having
its Z axis parallel to said surfaces,
and means providing communication between said crystal and an
oxygen-containing atmosphere.
3. In a transducer of the shear type in which an electrical signal
is developed across two parallel cylindrical surfaces of an annular
piezoelectric element mounted between two members which are adapted
to move relatively to each other in a direction parallel to such
surfaces in response to said relative motion of said two members
and in which means are provided for conducting such electrical
signal to a utilization device responsive thereto, the improvement
wherein said annular piezoelectric element comprises a
piezoelectric crystal of the 3m class havings its Z axis parallel
to said surfaces.
4. A transducer as defined in claim 3 comprising an accelerometer
in which one of said two members constitutes an inertial member
resiliently supported by said element from the other of said two
members and wherein said electrical signal is developed in response
to the acceleration of an object that is secured to said other of
said two members.
5. An accelerometer as defined in claim 4 wherein one of said
members has a base provided with a base surface attachable to the
surface of said accelerating object, said base surface being normal
to said Z-axis.
6. A transducer as defined in claim 3 in which said element has a
central hole therein and one of said two members extends through
said element, said two members being composed of metal.
7. A transducer as defined in claim 3 in which said element has a
central hole therein, and one of said two members extends through
said element, the other member being of annular configuration, and
wherein said two members are composed of electrically conductive
material, the parallel surfaces of said piezoelectric element being
in electrically conductive relation with said respective
members.
8. A crystal body as defined in claim 7 wherein each said coating
comprises an inner layer of electrically conductive material and an
outer layer of non-corrosive, malleable, electrically conductive
material.
9. A crystal body as defined in claim 8 wherein said inner coating
is bonded to and covers the inner parallel cylindrical surface of
said crystal and is composed of a thin layer of chromium and said
outer coating is secured to and covers the outer surface of said
inner electrode, said outer electrode being composed of a thin
layer of gold.
10. In a transducer of the shear type in which an electrical signal
is developed across two parallel cylindrical surfaces of an annular
piezoelectric element mounted between two members which are adapted
to move relatively to each other in a direction parallel to such
surfaces in response to said relative motion of said two members
and in which means are provided for conducting such electrical
signal to a utilization device responsive thereto, the improvement
wherein said annular piezoelectric element comprises lithium
niobate having its Z axis parallel to said surfaces.
11. A transducer as defined in claim 10 including means to apply a
force to at least one of said surfaces in said direction of
movement.
12. A single crystal body comprising an annular crystal of the 3m
class having two parallel cylindrical surfaces parallel to the Z
axis of said crystal.
13. A single crystal body as defined in claim 12 wherein said body
is composed of lithium niobate.
14. An article of manufacture comprising a crystal body as defined
in claim 12 wherein said cylindrical surfaces have coatings of
electrically conductive material on them.
Description
CROSS REFERENCES TO RELATED APPLICATIONS
U.S. patent application Ser. No. 50,657, filed June 29, 1970, now
Pat. No. 3,727,084 issued Apr. 10, 1973.
U.S. patent application Ser. No. 103,036, filed Dec. 31, 1970 now
abandoned.
INTRODUCTION
This invention relates to electromechanical transducers and more
particularly to an improved annular piezoelectric accelerometer
free of any substantial pyroelectric effects and substantially free
of a cross axis sensitivity. The invention also relates to such
accelerometers which have high efficiency and is adapted to be
operated over a wide range of temperatures including high
temperatures above 1,000.degree.F.
GENERAL DESCRIPTION OF THE INVENTION
The annular electromechanical tranducer of this invention makes use
of a piezoelectric crystal of the 3m class cut to having an annular
configuration with its cylindrical surfaces parallel to the Z axis.
The accelerometer has electrodes on the cylindrical surfaces and is
operated in shear mode with the shearing forces acting in a
direction parallel to the Z axis. This arrangement makes optimum
use of the characteristics of 3m crystal material when of annular
configuration. The invention is applicable to all known 3m
crystals, including lithium niobate, lithium tantalate, and natural
tourmaline. Of these materials lithium niobate is particularly
advantageous to employ because it has a high Curie temperature of
about 1,200.degree.C. Lithium niobate is also particularly
advantageous to employ because it has the highest electromechanical
coupling coefficient of the 3m crystalline materials known. For
this reason, the invention will be described with reference to an
annular accelerometer employing a crystal of the configuration
described and composed of lithium niobate.
It is known that lithium niobate in monocrystalline form is
piezoelectric and that its piezoelectric properties are preserved
at high temperatures, such as at temperatures over 1,400.degree.F.,
as well as at a low temperature, such as at temperatures of
-60.degree.F. The sensitivity of an accelerometer employing such a
material depends in part on how the crystal is cut and how it is
subjected to acceleration. The best embodiment of the invention now
known makes use of a lithium niobate crystal of annular
configuration operated in the shear mode with the axis of maximum
sensitivity parallel to the Z axis. The electrodes are located on
cylindrical surfaces parallel to the Z axis and the shearing forces
are applied in directions parallel to the Z axis. This
accelerometer not only has high sensitivity at high temperatures,
but is also substantially free of cross-axis sensitivity.
Furthermore, by taking special precautions, an accelerometer
utilizing lithium niobate is provided for operating at such high
temperatures over a long period of time.
This invention is particularly useful when employed as an
accelerometer since the annular construction of the crystal of the
best embodiment of this invention increases the stiffness of the
crystal to better resist bending. This provides an accelerometer
which has a high resonant frequency. Furthermore, the annular
construction of the inertial mass supports the crystal as a unit
even if the crystal becomes fractured. The accelerometer of this
invention may be employed in detecting and measuring vibration and
shock.
DRAWINGS
Various features of this invention are described below in
connection with the accompanying drawings wherein:
FIG. 1 is an elevational view, partly in cross-section, of an
annular accelerometer of one embodiment constructed in accordance
with this invention;
FIG. 2 is a perspective view employed to explain the invention;
and
FIG. 3 is a plan schematic view of the crystal employed in the
invention.
DETAILED DESCRIPTION
Referring to FIG. 1 there is illustrated an accelerometer 8
comprising a housing formed partly by a base 10 and a case 12
providing a cylindrical hollow cavity 14 and comprising an annular
acceleration sensing device 16 concentrically mounted on a post 18
projecting from the base 10 into the cavity 14. The accelerometer 8
is rigidly secured to an object 9 undergoing test. The base 10 has
a flat mounting surface 11 on its lower side, which surface is
normal to the acceleration axis A--A and the Z axis of the crystal.
The accelerometer is designed to have an axis A--A of maximum
sensitivity parallel to the axis of the post 18 and perpendicular
to the base 10. This maximum-sensitivity axis A--A coincides with
the optical or Z axis of the crystal as is apparent from comparing
FIG. 1 with FIG. 2. The accelerometer will be described as if
mounted to detect the component of acceleration along a vertical
axis.
The acceleration sensing unit 16 includes a piezoelectric crystal
50 that is electrically connected in such a manner that the
electrical signals generated by the crystal 50 in response to such
acceleration are combined to supply signals to a utilization device
24 in the form of a charge amplifier 20 and recorder 22. These
electrical signals are proportional to the acceleration of the
object 9 in a direction parallel to the A--A axis. They are
conventionally employed in the study of the vibratory motion of the
object 9 on which the accelerometer 8 is mounted.
The post 18 may be formed unitary with the base 10 or it may be
threadably or otherwise secured thereto or it may be fixed thereon
by brazing. The casing or case 12 is firmly secured to the base 10
by a method such as by welding. The casing is provided with a small
perforation or channel 30 to provide communication between the
cavity 14 and the external atmosphere, for a purpose to be
described hereinafter.
The post 18 is provided with a smooth circular cylindrical surface
40 that extends vertically parallel to the acceleration axis A--A.
The acceleration sensing unit 16 comprises a piezoelectric crystal
50 and an inertial mass 70. The crystal 50 is provided with two
smooth parallel concentric circular cylindrical faces or surfaces
52a and 52b (FIG. 2) which are coaxial with the Z axis of the
crystal 50. The surfaces 52a and 52b of the crystal 50 are coated
with electrodes 54a and 54b. Each electrode is formed of a thin
inner layer LI of conductive material, such as evaporated or
sputtered chromium, and a thin outer layer LO of a non-corrosive,
soft, malleable material, such as gold. One surface 52a is in
metallic contact with the cylindrical surface 40 of the post 18.
The other surface 52b is in metallic contact with the smooth inner
cylindrical surface of the inertial member 70. The two cylindrical
surfaces 52a and 52b are concentric with the acceleration axis A--A
of the accelerometer and the Z axis of the crystal. The upper and
lower surfaces of the crystal are clear, that is free of conductive
material.
The piezoelectric element 50 is annular, being in the form of a
cylindrical ring having a central bore extending therethrough. The
top and bottom walls of the element 50 are free of metallic
material so that the two electrodes 54a and 54b are insulated from
each other, thereby forming a capacitance in which the two plates
provided by the electrodes are spaced apart by the dielectric
material constituting the piezoelectric element 50. The inner and
outer faces of the crystal are cut and polished to an optical
finish and the chromium and gold coatings are thin and of uniform
thickness. Furthermore, the gold is sufficiently soft and malleable
to assure complete even contact of those faces of the crystals with
the post 18 and the inertial member 70.
Small platinum wires (not shown) are bonded to the electrodes 54a
and 54b by an electrically conductive adhesive, such as
platinum-gold paste. In the best embodiment of the invention, after
the crystal 50 is secured to post 18 and the mass 70 is secured to
crystal 50, the wire bonded to the electrode 54a has its other end
bonded with platinum-gold paste to the post 18, and the wire bonded
to electrode 54b has its other end bonded to mass 70. These wires
provide electrical communication between the crystal 50 and post 18
and between the crystal 50 and mass 70. The crystal 50 is bonded to
the post 18 and the inertial mass 70 is bonded to the crystal 50 by
a temperature-resistive, electrically insulating adhesive, such as
porcelain cement or the like. Alternatively, the mechanical and
electrical connections between the post 18 and the crystal 50 and
between the crystal 50 and the mass 70 may be produced by brazing
or the like.
The post 18 and the base 10 of the accelerometer 8 are formed of a
metal, such as Waspaloy, which expands with temperature slightly
faster than the expansion of the crystal 50. The inertial mass 70
is formed of a metal, such as Inconel, which expands less rapidly
than the expansion of the crystal 50. The accelerometer 8 is
constructed so that the crystal 50 is held firmly between the post
18 and the mass 70 at the lowest temperature range of the
accelerometer. This construction maintains the crystal 50 in a
constant state of compression throughout the entire range of
operation of the accelerometer in order to insure that the crystal
will remain in place on the post and that the inertial mass will
remain in place on the crystal at all times.
In the embodiment of the invention illustrated in FIG. 1, the
acceleration sensing unit 16 is arranged concentrically on the post
18. The inner face 52a of the crystal 50 is electrically connected
to the outer conductor 64 of the coaxial connector 60. The outer
face 52b of the piezoelectric element 50 is electrically connected
with the insulated hollow central inner conductor 62 of the cable
connector 60. The outer conductor 64 of the connector 60 is in the
form of a threaded fitting mounting the conductor 60 on the base
10. More particularly, the inner face 52a is in electrical
communication with the outer conductor 64 through the coating 54a
which is in conductive contact with the metallic post 18. The
connection of the outer face 52b with conductor 62 is effected by
electrical communication of the electrode 54b with the metallic
inertial member 70 which in turn is electrically connected to the
central conductor 62 of the connector 60 by means of a lightweight
flexible electrical connector 80.
In the best embodiment of this invention known, the piezoelectric
element 50 is in the form of a single lithium niobate crystal cut
with its top and bottom parallel faces parallel to a Z plane that
is perpendicular to the Z axis of the crystal. (FIG. 2).
In this embodiment of the invention, the crystal is oriented in the
accelerometer with the positive Z axis towards the base 10, as
shown in FIG. 2. The positive portion of the other axes of this
right-hand coordinate system are shown in FIGS. 2 and 3.
It has been determined, experimentally, that the accelerometer of
this invention employing a crystal of the 3m type, generates an
output signal which is proportional to the component of
acceleration parallel to the Z axis and is insensitive to
components of acceleration in directions perpendicular to the Z
axis. The accelerometer is also free of pryroelectric effects.
These phenomena may be explained as follows.
Lithium niobate crystals are of the crystal class that have
symmetry properties belonging to the 3m group. As illustrated in
FIG. 2, such a crystal has three mirror planes M that extend in
directions parallel to the Z, or optical, axis. These planes
intersect in pairs parallel to the optical or Z axis and they are
separated by dihedral angles of 120.degree.. The mirror planes are
shown as if they originate in a common axis Z--Z. In fact, of
course, the planes extend indefinitely so that each plane
intersects the angle between each of the other two planes, thus
accounting for the 120.degree. separation between the planes.
Because of the 3-fold symmetry, each mirror plane M may be
considered to include a corresponding Y axis, which is
perpendicular to the Z axis. Furthermore, the X axis with respect
to each plane of symmetry lies in a direction perpendicular to both
the Y axis and the Z axis. Stated differently, an X axis is
perpendicular to each corresponding mirror plane M.
A 3m crystal is characterized by eight piezoelectric coefficients
of which four are mutually independent, as illustrated in the
following matrix:
TABLE I
__________________________________________________________________________
STRESS MODE
__________________________________________________________________________
1 2 3 4 5 6 Output Compression Axis Shear Axis
__________________________________________________________________________
Mode X Y Z X Y Z
__________________________________________________________________________
1. "X" 0 0 0 0 d.sub.15 d.sub.16 = -2d.sub.22 2. "Y" d.sub.21 = -
d.sub.22 d.sub.22 0 d.sub.24 = d.sub.15 0 0 3. "Z" d.sub.31
d.sub.32 = d.sub.31 d.sub.33 0 0 0
__________________________________________________________________________
where the various piezoelectric coefficients d.sub.ij have the
values given in Table II.
TABLE II ______________________________________ LiNbO.sub.3
LiTaO.sub.3 Tourmaline ______________________________________
d.sub.15 68. 26. 3.7 d.sub.22 21. 8. -0.3 d.sub.31 -1. -3. 0.3
d.sub.33 6. 9. 1.9 ______________________________________
In the foregoing table, the values of the piezoelectric
coefficients are given in units of picocoulombs per Newton (pC/N)
for lithium niobate, lithium tantalate, and tourmaline.
In these tables, the first subscript of the term d.sub.ij, refers
to an electrode face of the crystal, and the second subscript
refers to the type and direction of stress. The numbers 1, 2, and 3
represent compressive stress in the X, Y, and Z directions
respectively, and the numbers 4, 5, 6 represent shear moments about
the X, Y, and Z axes respectively.
For purposes of explanation, the annular crystal can be thought of
as divided in small segments as indicated in FIG. 3. If these
imaginary segments are small enough, the circular walls become
almost straight and each segment approximates a series of small
cubes. The piezoelectric coefficients discussed above apply to
cubes and these coefficients can be employed to explain the annular
crystal's response to forces due to acceleration.
In FIG. 3 the Y-axis of the crystal passes through the center of
segments R and L.
When the accelerometer is accelerated upward parallel to the Z--Z
axis, there is an upward force on the crystal's inside diameter and
a downward force on the crystal's outside diameter. For the segment
R, this produces a positive shear couple about the X-axis and for
the segment L, this produces a negative shear couple about the
X-axis.
d.sub.24 is the coefficient employed to determine the charge on the
segments R and L. A positive charge is produced on the positive Y
surface 52b of segment R and a negative charge is produced on the
negative Y surface 52a of segment R. A negative charge is produced
on the positive Y surface 52a of segment L and a positive charge is
produced on the negative Y surface 52b of segment L.
The surfaces 52a of segments R and L are in electrical
communication through electrode 54a so that their negative charges
are added together. Similarly, the 52b surfaces of the segments R
and L are electrically connected by electrode 54b so that their
positive charges are added together.
Segments located at positions 90.degree. from the R and L segments
operate similarly except that the d.sub.25 coefficient is employed
to determine the charge, instead of the d.sub.24 coefficient. The
d.sub.24 and d.sub.25 coefficients are numerically equal.
Charges on segment pairs at other locations in the crystal are
determined by employing components of both the d.sub.24 and
d.sub.25 coefficients. All of the 52a surfaces of the individual
segments are electrically connected together and all of the 52b
segments of the individual segments are electrically connected
together. Therefore, the transducer is sensitive to acceleration in
a direction parallel to the Z--Z axis, with the sensitivity
determined by the d.sub.24 and d.sub.25 coefficients.
Acceleration in the negative Y direction parallel to the Y axis
causes tensile stresses, or tension, in the segment R. d.sub.22 is
the coefficient employed to determine the charge on the R segment.
A charge is produced on the surface 52b and an opposite charge is
produced on the surface 52a of the R segment.
Because of the 3-fold rotation symmetry of the crystal, there are
two axes Y1 and Y2, each with a segment similar to the R segment
discussed above. These segments are labeled R1 and R2 in FIG. 3.
Because of the annular symmetry of design of the crystal, segments
R1 and R2 will be subjected to compression forces due to the
acceleration of the crystal in the negative Y direction parallel to
the Y axis. But the magnitude of the forces along the respective Y1
and Y2 axes of segments R1 and R2 are each one-half the total force
applied to the segment R. -d.sub.22 is the coefficient employed to
determine the charges on the segments R1 and R2 when they are
subjected to compression.
Therefore, when the crystal is subjected to acceleration in a
negative Y direction parallel to the Y-axis, charges produced on
the 52a and 52b surfaces of R1 and R2 have the opposite sign of
charges produced on the 52a and 52b surfaces respectively of the R
segment and the charges produced on segments R1 and R2 combine to
cancel the charges produced on the R segment. The net result is no
sensitivity to acceleration in a direction parallel to the Y
axis.
In a somewhat similar manner, it can also be shown that there is no
sensitivity to acceleration in any other direction perpendicular to
the Z axis.
The pyroelectric axis of lithium niobate is the Z axis. Temperature
changes will produce charges due to primary and secondary
pyroelectric effects on the Z faces of the crystal. But since, in
this embodiment of the invention, there is no electric
communication with the Z faces, the transducer is not sensitive to
the primary pyroelectric effect. Also, there is no sensitivity to
uniform thermal expansion of the annular parts of the
accelerometer. This is because segment pairs, such as are
illustrated in FIG. 3, produce opposite charges when subjected to
such stresses, and, since the segments are in electrical
communication, these charges cancel.
When the accelerometer of FIG. 1 is accelerated in a direction
parallel to the Z axis, a charge is generated between the
electrodes 54a and 54b that is proportional to the acceleration,
and when the accelerometer is accelerated in some other direction,
a charge is generated proportional to the component of acceleration
along the Z axis.
Special precautions are taken to provide for long life of these
accelerometers employing lithium niobate when they are used at high
temperatures and low pressures, or in the presence of slightly
reducing atmospheres. Such precautions are important because, as is
well known, lithium niobate tends to be reduced, that is, lose its
oxygen, when exposed to an atmosphere in which the partial pressure
of oxygen is low. The rate of reduction increases with the
temperature. Such reduction results in removal of some of the
oxygen from the crystal, thereby reducing the electrical
resistivity of the crystal. Such reduction is retarded, if not
entirely prevented, by providing a perforation 30 in the wall of
the case 12 to provide a channel for ingress of oxygen from the
outer atmosphere into the cavity within the case.
In Table III some additional important properties of the various
members of the 3m class mentioned, namely, lithium niobate, lithium
tantalate, and tourmaline, are set forth.
TABLE III
__________________________________________________________________________
CRYSTAL LiNbO.sub.3 LiTaO.sub.3 Natural Tourmaline
__________________________________________________________________________
Dielectric Const. 84 51 6.3 Coefficient of Thermal Expansion Axial
2 5.7 9.3 .times. 10.sup..sup.-6 /.degree.C Radial 16.7 21 7.7
.times. 10.sup..sup.-6 /.degree.C Curie Temp. 1210.degree.C
610.degree.C None Shear Modulus (N/M.sup.2) 6 9.6 -- .times.
10.sup.10 N/M.sup.2 Resistivity 5 .times. 10.sup.8 2 .times.
10.sup.5 (ohm - cm) at 400.degree.C at 575.degree.C Variable
Specific Gravity 4.6 7.4 3.0 Soluble in H.sub.2 O No No No
Sensitivity to Primary Pyroelectric Effects None None None
Sensitivity to Transverse Forces None None None Electromechanical
Coupling Coefficient Highest Intermediate Lowest (K.sub.15) (0.45)
(0.31) --
__________________________________________________________________________
In this table, the dielectric constant is the value in the radial
direction divided by the dielectric constant of free space and the
shear modulus is the stress divided by the strain about the X
axis.
Examination of Table III shows that lithium niobate preserves its
piezoelectric properties to the highest temperatures and also the
highest electromechanical coupling coefficient.
This invention has been described with reference to an annular
accelerometer because of the particular usefulness of the invention
in such accelerometers. However, this invention may also be
employed in other types of force actuated transducers, such as
pressure transducers.
It is thus seen that this invention provides an accelerometer which
may be employed for a prolonged period at high temperatures; and
when employing lithium niobate in the form shown, the invention
provides an accelerometer which is capable of use at high
temperatures for prolonged periods; and in particular provides such
an accelerometer of high sensitivity. Though the accelerometer of
this invention is particularly suitable for use at high
temperatures, because of the fact that the crystal material
possesses high electromechanical efficiency (ratio of electrical
power generated to the mechanical power applied to the crystal), it
is also advantageous to employ the accelerometers at low
temperatures.
* * * * *