U.S. patent number 3,853,740 [Application Number 05/348,018] was granted by the patent office on 1974-12-10 for target changer for sputtering by ionic bombardment.
This patent grant is currently assigned to Balzer Patent-Und Beteiligungs-Aktiengesellschaft. Invention is credited to Anton Kunz.
United States Patent |
3,853,740 |
Kunz |
December 10, 1974 |
TARGET CHANGER FOR SPUTTERING BY IONIC BOMBARDMENT
Abstract
A target changer for positioning targets which are to be
subjected to electronic sputtering by ionic bombardment comprises a
movable support for carrying the target with a cover mounted on the
support by electrical insulation means and which comprises an ion
shielding electrode which is capable of being charged with a
positive potential relative to the target.
Inventors: |
Kunz; Anton (Triesenberg,
FL) |
Assignee: |
Balzer Patent-Und
Beteiligungs-Aktiengesellschaft (Balzers, Furstentum,
FL)
|
Family
ID: |
4423556 |
Appl.
No.: |
05/348,018 |
Filed: |
April 5, 1973 |
Foreign Application Priority Data
|
|
|
|
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Nov 23, 1972 [CH] |
|
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17202/72 |
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Current U.S.
Class: |
204/298.12;
204/192.11; 204/192.12; 204/192.32; 204/298.11; 204/298.26 |
Current CPC
Class: |
C23C
14/3407 (20130101); H01L 21/68778 (20130101); H01L
21/68764 (20130101); H01L 21/68771 (20130101) |
Current International
Class: |
H01L
21/67 (20060101); H01L 21/687 (20060101); C23C
14/34 (20060101); C23c 015/00 () |
Field of
Search: |
;204/298,192 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Mack; John H.
Assistant Examiner: Langel; Wayne A.
Attorney, Agent or Firm: McGlew & Tuttle
Claims
What is claimed is:
1. A target changer for positioning targets which are to be
subjected to cathode sputtering by ions, comprising a movable
support for carrying a target, a cover comprising an ion shielding
electrode, means adapted to supply a positive potential to said
cover relative to the target said cover overlying said support but
exposing at least a portion of the target thereon, electrical
insulation means supporting said cover on said support, and
mounting means for supporting said support for movement.
2. A target changer according to claim 1, wherein said movable
support comprises a rotary table, means for rotating said table and
a voltage lead connected to said cover.
3. A target changer according to claim 2, including a housing with
an upper part surrounding said table and said cover and a lower
skirt portion, an insulating ring disposed between said upper part
of said housing and said lower skirt portion and rotatably
supporting said table for movement, and a high voltage terminal
connected to said rotary table and the target thereon.
4. A target changer according to claim 1, wherein said movable
support is a rotatable turntable.
5. A target changer according to claim 1, wherein said movable
support comprises a rotatable drum.
6. A target changer according to claim 1, including a fixed mask
mounted over said cover having an opening for exposing a particular
target.
7. A target changer for sputtering by means of ions, comprising a
rotatable support for several targets, a cover overlying said
support and provided with at least one opening for exposing a
target to sputtering, said cover being an ion-shielding electrode
movable with said support, but electrically insulated therefrom and
including means adapted to apply a positive potential thereto
relative to said targets.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates in general to apparatus for exposing
substances to sputtering by ionic bombardment and, in particular,
to a new and useful target changer for positioning targets which
are to be subjected to electronic sputtering by ions.
2. Description of the Prior Art
Many devices are known for sputtering substances by ionic
bombardment. In general, they comprise a working chamber capable of
being evacuated in which an ion beam generated by an ionic source
and concentrated to a greater or lesser degree is directed against
the surface of a substance to be sputtered, called a target. The
particles of the sputtered substance, in general precipitate on
so-called substrate, i.e., a glass plate which is intended to be
coated wtith a corresponding layer. When it is intended to sputter
different substances several different targets composed of
respective materials were necessary. In order to have the
possibility of submitting these targets to sputtering
consecutively, so-called target changers have been used. Such
changers usually include a rotatable support, for example a
turntable or a drum on which a plurality of targets are arranged
and in each case one of them is brought into the path of the
sputtering ion beam. In order to protect the other targets against
undesired simultaneous sputtering while the particular target is
being acted upon, a fixed mask is commonly used which has an
aperture for exposing the respective target to sputtering.
The known target changers have the disadvantage that during the
changing, the sputtering ion beams of the accelerating voltage must
be cut off in order to prevent an undesirable sputtering of the
changer parts such as the parts supporting the target, for example,
which during the change are temporarily below the exposure opening
and could, therefore, be exposed to the action of the ion beam. The
necessity for repeated switching off and on, however, affects the
reliability of operation of the device. In addition, in certain
industrial production processes, for example in the multilayer
coating processes with twenty or more layers, the switching time of
several seconds needed for the operation of the usual high voltage
supply devices is a great economical cost. A longer interruption of
the coating process may also bring technological disadvantages
insofar as the substrate and the targets may become covered in the
interruption time by molecules of the residual gas. This would
result in a deterioration of the quality of the product, for
example causing a poor adhesion of the applied layers or change the
electrical or optical properties of the layers. On the other hand,
high speed, high voltage switches which would be necessary to
diminish the disadvantages in the switching operation are very
expensive.
SUMMARY OF THE INVENTION
The present invention provides a device for changing targets which
are to be sputtered by ionic bombardment and which is constructed
as a mobile support of a plurality of targets and includes a fixed
mask having an aperture for exposing a target to be sputtered so
that it does not have the disadvantages of the prior art. The
target changer is constructed with a cover designed as an ion
shielding electrode which is connected to and moves with the
movable support but is electrically insulated from the support and
capable of being charged to a potential which is positive with
respect to the target. The result of such a construction is that
the targets can be changed without cutting off the operational
voltage. In addition, because the cover moves with the target, a
sputtering of the supporting parts particularly the target support
itself, is avoided. The construction is such that only the targets
themselves can be sputtered as long as they remain within the range
of the ion beam action. On the other hand, a sputtering of the
cover is not possible because during the operation the cover is
provided with a positive potential equal or approximately equal to
the anode potential so that relative to positive ions the cover
acts as a shielding electrode. The simplest arrangement is to
connect the cover electrically with the anode and to apply the
anode potential thereto. It is also possible, however, to insulate
the cover electrically from the other parts of the device so that
during operation within a short time the positively charged ions
initially striking the cover charge the cover positively until it
reaches a potential sufficient to shield away the positive
ions.
Another advantage of the device constructed in accordance with the
invention, is that it may be designed to permit a continuous
transition from the sputtering of a first target to the sputtering
of a second target and thereby produce, for example coatings with a
smooth change of components from layer to layer in a direction
perpendicular to the surface. Because of the fact that during the
target change the high voltage need not be cut off, the sputtering
with the device according to the invention is particularly suited
for automatic sputtering units producing thin coatings.
Accordingly it is an object of the invention to provide a target
changer for positioning targets which are to be subjected to
electronic sputtering by ions which comprises a movable support for
carrying a target and with a cover overlaying the support but
exposing a portion of the target thereon and insulated from the
support, and wherein the cover comprises an ion shielding electrode
capable of being charged with a positive potential relative to the
target.
A further object of the invention is to provide a target changer
for positioning targets for electronic sputtering by ions which is
simple in design, rugged in construction and economical to
manufacture.
For an understanding of the principles of the invention, reference
is made to the following description of typical embodiments thereof
as illustrated in the accompanying drawing.
BRIEF DESCRIPTION OF THE DRAWINGS
In the Drawings
FIG. 1a is a partial elevational and partial sectional view of a
target changer constructed in accordance with the invention and
taken along the line A-O-B of FIG. 1b;
FIG. 1b is a top plan view of the target changer shown in FIG.
1a;
FIG. 2 is a view similar to FIG. 1b of another embodiment of the
invention; and
FIG. 3 is a view similar to FIG. 1b of still another embodiment of
the invention.
GENERAL DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring to the drawings in particular, the invention embodied
therein in FIGS. 1a and 1b comprises a target changer for use in
sputtering objects by ionic bombardment. The ionic bombardment is
produced by a beam of positively charged ions indicated at 1 which
is incident on a target 11 which is supported on a carrier or
rotary support 7.
In accordance with the invention, the target changer includes a
cover 2 which is supported on the carrier 7 by means of electrical
insulators 3 which hold the cover in spaced location above the
carrier surface and secure it to the carrier for movement
therewith. A feature of the construction is that the cover is
capable of being charged with a positive potential relative to the
target 11 which is to be subjected to sputtering to produce ionic
bombardment. For this purpose the cover 2 is connected to a voltage
lead 4 which is brought to a positive potential relative to the
support 7 and the targets which are carried thereby. In the
embodiment shown the support 7 carries four separate targets
11,12,13 and 14 which are connected to a high voltage lead 5.
In the construction shown, the support 7 forms a turntable which is
rotated by a shaft 8 driving through a gear 9 which drives a gear
50 affixed to the turntable support 7. The turntable is supported
for rotation on an insulator ring 6.
A fixed mask 10 which has an aperture 16 is advantageously located
above the cover 2 and the aperture 16 is located to expose the
respective target which is to be sputtered in a particular
operation. In FIG. 1b it is shown that four targets 11,12,13 and 14
can be arranged on the turntable so that in each case only one of
them is aligned with the aperture 16 of the mask 10. In this way
only one target is sputtered at a time. The fixed mask 10 is needed
particularly when sputtering is effected under higher gas
pressures, for example, in a cathode sputtering unit only when
there is a danger that the other targets arranged on the rotary
support might be sputtered at the same time as the one which is
exposed. It is also recommendable to use the fixed mask 10 in order
to avoid any risk during the operation that particles of the
bombarded target reach and thereby contaminate the surface of
another target because of the straying of the residual gas present
in the sputtering chamber.
As shown in FIG. 1a the turntable 7 is supported in a protective
housing 15 which comprises an upper part 15a and a lower part 15b
with the insulator ring 6 held therebetween at flanged extensions
of the upper and lower parts. The housing provides a support for
the voltage leads 4 and 5 as shown.
In the arrangement shown in FIG. 2, targets 11 to 14 are arranged
in respect to an aperture 16 of a mask 10 so that two targets 11
and 12 are partially exposed in the case where it is desired to
simultaneously sputter two different targets. The ratio of the two
sputtered portions of the targets is determined by the surface
ratio of the two target surfaces which are in the exposed position
below the aperture 16. By appropriately positioning the turntable,
there is the possibility to adjust to any desired surface
ratio.
In the arrangement shown in FIG. 3 an annular target 17 can be
sputtered continuously when it is rotated uniformly or gradually
about the ring axis. In choosing the right dimensions of the
exposure aperture 16, it is possible on the one hand, to provide a
source of sputtered particles having a relative small surface which
is desired in some cases for optico-geometrical reasons in order to
cover substrates with thin layers; and on the other hand, to obtain
a long operational time without target renewal because the annular
target represents a large reserve of the substance to be sputtered.
The annular target may also be provided for a simultaneous
sputtering of two different substances in any desired mixture
ratio. If, for example, a portion of the annular target within the
dotted circle 20, indicated in FIG. 3, consists of a first
substance and the rest of the annular surface of another substance,
any desired ratio of the portions to be sputtered which comprises
different substances may be adjusted as is evident by the
respective positioning of the annular target with respect to the
aperture 16. It would also be possible to provide different
segments of the ring half or quarter segments, for example, which
contain different substances and thus to obtain a possibility of
changing from the sputtering of one substance to the sputtering of
another.
In the examples represented, a turntable such as the turntable
carrier 7 is provided as the rotary support of the targets.
However, it is evident that instead of a turntable, a drum
supporting the targets may be provided or even a slide, which may
be moved together with the cover which is capable of being charged
to a positive potential. The arrangement may be operated with or
without a mask 10 as the requirements dictate so that only the
desired targets are submitted to sputtering.
The target changer of the invention can be used in any known
arrangements for sputtering but ionic bombardment, for example in
the known cathodic sputtering units. Its utilization has been
proved particular in so-called triode sputtering units where the
surface to be sputtered is placed in an electric arc discharge
between a hot cathode and an anode and the sputtering ions are
attracted from the plasma of the arc column by means of a negative
high voltage applied to the targets. The fixed mask of the target
changer according to the invention, can serve as an anode for the
low voltage discharge while the rotating cover can be connected to
the anode or kept at a floating potential (electrically insulated
from all of the other parts) and thus be charged by itself
positively during the operation.
While specific embodiments of the invention have been shown and
described in detail to illustrate the application of the principles
of the invention, it will be understood that the invention may be
embodied otherwise without departing from such principles.
* * * * *