U.S. patent number 3,852,133 [Application Number 05/380,846] was granted by the patent office on 1974-12-03 for method of manufacturing x-ray image intensifier input phosphor screen.
This patent grant is currently assigned to General Electric Company. Invention is credited to John M. Houston.
United States Patent |
3,852,133 |
Houston |
December 3, 1974 |
METHOD OF MANUFACTURING X-RAY IMAGE INTENSIFIER INPUT PHOSPHOR
SCREEN
Abstract
A waffle-like light-reflective surface on a substrate member has
slightly protruding ribs of the waffle pattern coated with a
light-absorbing material. The ribs absorb low-angle rearward
traveling light photons generated in a transparent phosphor layer
formed on the waffle surface and thereby reduce degradation of
X-ray image resolution and contrast whereas the floor of the
wafffle pattern reflects the light photons traveling rearward more
normal to the floor surface, back through the phosphor layer to the
photocathode of the X-ray image intensifier tube. The method of
fabricating the phosphor screen includes the intermediate step of
forming a rubber replica of a metal master of the waffle surface
from which a silicone resin replica is developed. The silicone
resin replica is metal coated to provide the light reflective
surface and the ribs are blackened to be light-absorbing.
Inventors: |
Houston; John M. (Schenectady,
NY) |
Assignee: |
General Electric Company
(Schenectady, NY)
|
Family
ID: |
26943800 |
Appl.
No.: |
05/380,846 |
Filed: |
July 19, 1973 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
|
254065 |
May 17, 1972 |
3673438 |
|
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Current U.S.
Class: |
264/129; 156/230;
156/280; 156/285; 156/286; 264/219; 428/142; 428/690; 428/691;
430/139; 430/321; 216/33; 216/25 |
Current CPC
Class: |
H01J
29/385 (20130101); Y10T 428/24364 (20150115) |
Current International
Class: |
H01J
29/38 (20060101); H01J 29/10 (20060101); C23f
001/02 (); H01j 031/49 () |
Field of
Search: |
;156/3,7,8,18,230,280,285,286 ;250/213R,483
;117/33.5C,33.5CP,69,124 ;96/36.1 ;264/219 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Powell; William A.
Attorney, Agent or Firm: Moucha; Louis A. Cohen; Joseph T.
Squillaro; Jerome C.
Parent Case Text
This is a division of application Ser. No. 254,065, filed May 17,
1972, now U.S. Pat. No. 3,673,438.
Claims
What I claim as new and desire to secure by Letters Patent of the
United States is:
1. A method for manufacturing an improved X-ray image intensitifer
input phosphor screen comprising the steps of
forming a waffle-like surface along the concave-shaped major side
of a face plate of an X-ray image intensifier tube wherein the
waffle-like surface has light-reflective floor portions and
rib-like projections extending outward therefrom,
coating the rib-like projections with a light-absorbing
material,
depositing a phosphor layer on the waffle-like surface to a
thickness wherein the phosphor layer extends substantially beyond
the ends of the rib-like projections, and
depositing a thin uniform coating of a photoemitter material on the
outer surface of the phosphor layer.
2. The method set forth in claim 1 wherein the step of coating the
rib-like projections with a light-absorbing material consists of
evaporating carbon obliquely on the waffle-like surface to thereby
blacken only the rib-like projections.
3. The method set forth in claim 1 wherein
the step of forming the waffle-like surface comprises
fastening a metal screen to a light-reflective surface on the
concave-shaped major side of the face plate to thereby obtain the
rib-like projections.
4. The method set forth in claim 1 wherein
the steps of forming the waffle-like surface and coating the
rib-like projections comprises
fastening a blackened metal screen to a light-reflective surface on
the concave-shaped major side of the face plate to thereby obtain
the light-absorbing coated rib-like projections.
5. The method set forth in claim 1 wherein
the step of forming the waffle-like surface comprises an
intermediate step of forming a silicone rubber replica from which
the waffle-like surface is formed.
6. The method set forth in claim 5 wherein the step of forming the
silicone rubber replica comprises the steps of
photoetching a thin metal sheet to produce an array of small holes
therein forming a mesh,
positioning the sheet of metal mesh upon a heavy planar
substrate,
diffusion bonding the sheet of metal mesh to the planar substrate
to obtain an array of rib-like projections and thereby forming a
metal master,
coating the metal master with liquid silicone rubber,
placing the rubber coated metal master in a vacuum chamber for
pumping away all air bubbles to insure the silicone rubber contacts
all the crevices of the metal master,
curing the silicone rubber to form an elastic solid rubber replica
having rib-like indentations along one side thereof corresponding
to the rib-like projections of the waffle-like surface, and
removing the rubber replica from the metal master.
7. The method set forth in claim 6 and further comprising the steps
of
coating the rib-indented side of the rubber replica with a silicone
resin,
positioning the silicone coated rubber replica upon the
concave-shaped major side of the face plate,
drawing a vacuum between the silicone coated rubber replica and
face plate to thereby force the silicone coated rubber replica
against the face plate,
baking the resin-coated rubber replica and face plate assembly to
harden the silicone resin and cause adherence of the silicone resin
to the face plate, and
peeling the rubber replica from the silicone resin whereby a
silicone resin replica of the metal master is in adherence on the
face plate to thereby form the waffle-like surface.
8. The method set forth in claim 7 and further comprising the step
of
coating the waffle-like surface with a highly light-reflective
material prior to coating the rib-like projections with the
light-absorbing material to thereby obtain the light-reflective
floor portions.
9. The method set forth in claim 1 wherein
the step of forming the waffle-like surface comprises
etching the convex-shaped major side of the face plate to thereby
produce a jagged, irregular surface wherein the peaks of the
irregular surface form the rib-like projections, and
the step of coating the rib-like projections comprises
coating the peaks of the irregular surface with the light-absorbing
material.
10. The method set forth in claim 9 and further comprising the step
of
depositing a light-reflective material on the irregular surface
prior to the peaks being coated with the light-absorbing material.
Description
My invention relates to an X-ray image intensifier tube, and in
particular, to the phosphor screen structure at the input end of
the tube and method of manufacture thereof.
The X-ray image intensifier tube is especially useful in the
medical field for obtaining brighter X-ray images, particularly the
images of body organs which generally are of low contrast.
Conventional X-ray image intensifiers employ in the input end
thereof a uniform layer of a dense high atomic number phosphor for
absorbing the incident X-rays which have traversed through a
patient's body. The X-ray photon is absorbed in the phosphor layer
and light photons in the order of 1,000 light photons for each
X-ray photon are generated in the phosphor layer and emitted in all
directions from the point of X-ray photon absorption. A thin
photoemitting coating deposited on the surface of the phosphor
layer emits photoelectrons in response to light photons incident
thereon. The photoelectrons are accelerated and electron-optically
focussed onto a second phosphor screen at the output end of the
image intensifier resulting in a brighter image than at the input
phosphor screen.
The thickness of the phosphor layer in conventional image
intensifiers is typically 5 to 12 mils and is a compromise between
a thick layer necessary for high X-ray absorption and a thin layer
necessary for high image resolution (a 12 mil thick layer yields a
resolution of 40 to 50 line pairs per inch), resolution and local
image contrast being degraded due to lateral and rearward light
scattering within the phosphor layer. Obviously, it would be highly
desirable to reduce degradation of resolution and contrast due to
lateral light scattering, and in particular that due to the
low-angle rearward light scattering and thereby obtain increased
resolution and contrast with a conventional thickness phosphor
layer in the input end of the X-ray image intensifier tube, or
alternatively, to employ a thicker phosphor layer to thereby
increase the X-ray absorption (and thus the sensitivity) with less
loss in resolution and local contrast than occurs in conventional
image intensifiers.
Therefore, one of the principal objects of my invention is to
provide a new and improved X-Ray image intensifier tube having an
input phosphor screen which simultaneously can achieve both high
X-ray absorption and high image resolution and contrast, and the
method of manufacture thereof.
Another object of my invention is to provide a relatively thick
input phosphor screen with means to substantially reduce
degradation of resolution and contrast due to low-angle, rearward
light scattering in the phosphor and the method of manufacture
thereof.
A further object of my invention is to provide a low cost
fabrication process for manufacturing the improved input phosphor
screen.
Briefly stated, and in accordance with my invention, I provide an
X-ray image intensifier input phosphor screen wherein a phosphor
layer is deposited on a waffle-like light-reflective surface of a
substrate member wherein slightly protruding ribs of the
waffle-pattern are coated with a light-absorbing material. The rib
height is much less than the phosphor layer thickness and the
projected area of the ribs is much less than the area of the floor
portion of the waffle pattern. The other side of the substrate
member is bonded to the X-ray image intensifier tube face plate
which may be formed of glass or a low atomic number metal such as
aluminum. The outer surface of the phosphor layer, spaced from the
substrate member, is smooth and substantially parallel to the major
surface of the face plate and a thin film of a photoemitter
material is deposited thereon. The reflective floor surface of the
substrate member reflects the high angle (more nearly normal)
portion of the rearward traveling light photons in the phosphor
layer to thereby deliver more useful light to the photoemitter
material while the slightly protruding ribs absorb the low angle
(more nearly lateral) portion of the rearward traveling light
photons to thereby substantially reduce degradation of the image
resolution and contrast due to low-angle rearward scattering of
light in the phosphor layer.
My X-ray image intensifier input phosphor screen is fabricated by
the following method. A sheet of metal mesh is formed by
photoetching a thin metal sheet to produce an array of small holes
therethrough wherein the hole width is much greater than the width
of the walls separating adjacent holes. The photoetched sheet is
then diffusion bonded to a heavy planar metal substrate to thereby
obtain a waffle-like surface wherein the slightly protruding wall
projections define the ribs of the waffle pattern. This metal
substrate having a waffle-like surface is used as a master from
which silicone rubber replicas are made. Each silicone rubber
replica has the rib indentation surface thereof coated with a
silicone resin and such coated surface is drawn toward the concave
side of the X-ray image intensifier face plate. Upon hardening of
the silicone resin, the silicone rubber replica is removed, and the
concave-shaped resin structure has the rib-like projections of the
metal master and is adhered to the face plate. The waffle surface
of the resin replica is then coated with a light-reflective
material such as aluminum, and a black light-absorbing material is
deposited only on the ribs of the waffle surface. A layer of
transparent phosphor material is then deposited on the
waffle-surface of thickness much greater than the rib height and
forms a smooth outer surface upon which a thin uniform coating of a
photoemitter material is deposited to form the photocathode of the
X-ray image intensifier tube.
The features of my invention which I desire to protect herein are
pointed out with particularity in the appended claims. The
invention itself, however, both as to its organization and method
of operation together with further objects and advantages thereof
may best be understood by reference to the following description
taken in connection with the accompanying drawings wherein like
parts in each of the several figures are identified by the same
reference character, and wherein:
FIG. 1a is an elevation sectional view of a conventional X-ray
image intensifier tube;
FIGS. 1b and 1c are elevation sectional views of two conventional
phosphor screens utilized in FIG. 1a, but to a larger scale;
FIGS. 2a and 2b are top views of two geometries of an array of
small holes photoetched in a metal sheet to form a waffle-like
surface on a metallic substrate utilized in fabricating a master in
accordance with my invention;
FIG. 3 is an elevation sectional view of the photoetched metal
sheet shown in FIGS. 2a, 2b bonded to the metallic substrate, but
to a larger scale;
FIG. 4 is an elevation sectional view, to the same scale as FIG.
1a, of a silicone rubber replica of the master illustrated
partially in FIG. 3, retained on the X-ray image intensifier tube
face plate, and a silicone resin coating on the rubber replica;
FIG. 5 is an elevation sectional view of the silicone resin replica
subsequently formed on the face plate in FIG. 4, and also shows a
light-reflective material coated on a first part of the resin
replica, and the silicone rubber replica being peeled from the
resin replica;
FIG. 6 is an elevation sectional view, to the same scale as FIGS.
1a, 4, 5 of a first means for coating the ribs of the resin replica
with a light-absorbing material;
FIG. 7 is an elevation sectional view, to the same scale as FIGS.
1b, 1c after phosphor and photoemitter coatings are deposited on
the coated resin replica;
FIG. 8 is an elevation sectional view of a second means for
obtaining the light-absorbing ribs; and
FIG. 9 is an elevation sectional view of a third means for
obtaining the light-absorbing ribs.
Referring now in particular to FIG. 1a, there is shown a
conventional X-ray image intensifier tube comprised of a glass
envelope 10 having an input end (face plate) 10a which has a
uniform phosphor layer 11 of thickness in the range of 0.005 to
0.012 inch deposited on the inner surface thereof. The phosphor may
be zinc cadmium sulfide or cesium iodide as typical materials onto
which a thin film 12 of photoemitter material is deposited of
thickness of approximately 100 Angstroms. The photoelectrons
emitted by the photoemitter coating 12 are focussed by electrode
13a maintained at a potential of several hundred volts and are
accelerated to approximately 25 kilovolts by means of electrode 13b
(connected to a suitable D.C. voltage source) at the output end of
the image intensifier tube, the electrodes being suitably shaped to
provide electron-optical focussing of the accelerated
photoelectrons onto a second uniform phosphor screen (layer) 14
deposited on the inner surface of the glass envelope at the output
end 10b thereof. The image appearing on the second phosphor screen
14 is a brighter version of the image on the first phosphor screen
11 and can be viewed directly by the physician or be subjected to
further processing. The paths of two photoelectrons between the
photoemitter coating 12 and the second phosphor screen 14 are
indicated by dashed line and arrowheads. As stated hereinabove, the
thickness of the input phosphor screen 11 in conventional X-ray
image intensifier tubes is a compromise between a thick screen for
high X-ray absorption and thin screen for high resolution which is
determined primarily by lateral and low-angle rearward light
scatter in the phosphor.
FIG. 1b illustrates a first approach conventionally utilized for
obtaining improved performance from the input phosphor screen. In
this case, the inner surface of face plate 10a is coated with a
suitable material to provide a light-reflective surface 16 to all
of the rearward traveling light photons in the phosphor layer and
thereby deliver more light to the photoemitter layer 12. However,
as shown in FIG. 1b, the low angle portion of the rearward directed
light photons deliver (scattered) light to the photoemitter layer
12 which degrades image resolution and local image contrast. This
degradation of image resolution and contrast due to low-angle
rearward light scatter is avoided by a second approach illustrated
in FIG. 1c wherein the face plate inner surface is coated with a
suitable material to provide a light-absorbing surface 17 to all of
the rearward traveling light photons. However, this second approach
results in the loss of one half the light generated in the phosphor
and thereby decreases the sensitivity by an equal amount.
My invention provides a new and improved high resolution X-ray
image intensifier input phosphor screen which is adapted to absorb
only the low-angle portion of the rearward traveling light photons
while reflecting the high-angle (more nearly normal to the surface)
portion thereof to thereby deliver more useful light to the
photoemitter layer (i.e., improve sensitivity) without any
substantial loss in resolution. These desirable characteristics are
obtained by the use of a waffle-like surface formed on the inner
surface of the face plate wherein the floor portions of the waffle
pattern are light-reflective to the high-angle portion of the
rearward traveling light photons in the phosphor layer, and
slightly protruding ribs of the waffle pattern are light-absorbing
to the low-angle portion thereof. My invention thus permits the use
of a thicker phosphor screen for achieving higher X-ray absorption
with substantially less attendant degradation of resolution and
local contrast than is obtained in conventional image intensifiers,
or a phosphor screen of conventional thickness but with a
significantly higher resolution and local contrast. The waffle-like
surface is readily achieved by fabrication processes to be
described hereinafter.
The fabrication process is initiated by selecting a sheet of metal
suitable for photoetching such as nickel or stainless steel in the
order of 1 to 2 mils thick. An identical pattern (array) of holes
is then photoetched through the metal sheet, the etched holes in
the metal mesh sheet preferably having a square or hexagonal shape
as illustrated in FIGS. 2a and 2b, respectively, with a typical
center-to-center hole spacing of at least 4 mils and separation
(wall thickness) of approximately 1 to 2 mils as indicated on the
drawing. The holes are of equal size and equally spaced from each
other and form an array of identical rows and columns of holes to
maximize the hole area in the mesh. Other shape holes, such as
triangular or circular could be used, however, such shaped holes
produce less open area in the mesh.
Upon completion of the photoetching step, the sheet 30 of metal
mesh is positioned on a heavy planar substrate 31 of the same metal
as the mesh and is subsequently diffusion bonded thereto. The
approximately 1 to 2 mil thick metal mesh 30 is diffusion bonded by
bolting the photoetched sheet between two massive planes of metal,
the upper one of which is thinly coated with an oxide such as MgO
to prevent sticking, and this assembly is heated to a suitable
temperature (e.g., approximately 1,000.degree.C when bonding nickel
or stainless steel) in a hydrogen atmosphere or vacuum to
accomplish the diffusion bonding. The diffusion bonding results in
a "waffle-like" structure shown in FIG. 3 wherein the slightly
projecting walls 32, 33, 34 from the surface of substrate 31 are
rectangular in the section taken vertically through the projecting
walls although it should be obvious that the ribs may be rounded
off at the top in some applications. The wall projections will
hereinafter be referred to as the ribs of the waffle surface to
indicate the relatively small protrusion thereof, the floor portion
of the waffle surface having an area relative to the projected area
of the rib portion in the ratio of 2 to 1 or greater and being in
accordance with the above-described hole spacing and hole
separation in the etched metal sheet. Even more important is the
rib height-to-spacing ratio which determines the "cut-off" point
for the low-angle rearward light radiation absorption, and is
approximately 1 to 4 for a cut-off angle of 14.degree.. Obviously,
increasing the rib height-to-spacing ratio will decrease the
cut-off angle, resulting in greater absorption of the rearward
traveling light photons and therefore less reflection thereof to
the photoemitter layer. It is obvious that the diffusion bonding
step results in a master substrate structure provided with a
plurality of identical ribs wherein FIG. 2a or FIG. 2b represent
the top view of the waffle surface shown in elevation sectional
view in FIG. 3. The ribs 32, 33, 34 of the waffle surface can be
thinned to less than 1 mil thickness by a chemical etching process
if a larger ratio of floor portion to rib area is required by the
particular application. Alternatively, the master substrate
structure can be formed by directly photoetching the heavy planar
substrate 31 to obtain the desired waffle surface, i.e., without
using any additional metal sheet 30.
A phosphor material could be deposited on the waffle-like surface
of the metal master structure in FIG. 3 to form a phosphor screen,
however, the process hereinabove described is relatively expensive
and in accordance with my invention, I fabricate many inexpensive
silicone resin replicas of such original master whereby the cost
per X-ray intensifier tube will be small. Also, at some stage in
the process it is necessary to sag the planar surface of substrate
31, that is, to obtain it in a concave-shape conforming to the
shape of the face plate 10a of the image intensifier tube.
In order to replicate the master illustrated in FIG. 3, an
intermediate step of making one or more silicone rubber replicas is
utilized. The silicone rubber replica is fabricated by vacuum
impregnation wherein the master is covered with a layer of liquid
silicone rubber (e.g., General Electric RTV-11) to which a small
amount of a suitable curing catalyst has been added. The coated
master is then placed in a vacuum chamber for a few minutes in
order to pump away all air bubbles and insure that the silicone
rubber contacts all the crevices of the master. The rubber is then
allowed to cure for an appropriate period, e.g., 24 hours, in order
to form an elastic, rubbery solid. The silicone rubber replica is
approximately 50 mils thick in order to remain somewhat flexible so
that it can be subsequently easily removed by peeling from the
silicone resin replica to be described hereinafter.
Referring now to FIG. 4, the rib-indented side 45a of the silicone
rubber replica 45 is substantially uniformly coated with a silicone
resin 46. The face plate 10a of the image intensifier tube is then
placed over the rubber replica 45, positioned in its proper
orientation, and the two margins 45b, c along the rib-indented side
45a of the rubber replica are suitably retained against
corresponding planar margins of the concave face plate 10a. The
entire assembly is then placed within a chamber wherein a vacuum is
drawn between the rubber replica toward the concave face plate (as
shown in part) to produce a silicone resin replica 46 of the FIG. 3
master waffle-like surface except that the resin replica 46 is
curved into the concave shape of the image intensifier tube face
plate 10a rather than being planar. The resin-coated rubber replica
and face plate assembly is then baked at approximately 250.degree.C
to harden the silicone resin.
Upon hardening of the silicone resin, the silicone rubber replica
45 is removed therefrom by peeling it from the resin replica 46 as
shown in FIG. 5, and the resin replica and face plate assembly is
additionally air baked and then vacuum baked to outgas and cure the
silicone resin. The rubber replica may be reused to form additional
resin replicas. A possible problem may occur in peeling the rubber
replica off the silicone resin replica if the two replicas tend to
stick together. This sticking effect can be minimized, if it
occurs, by treating the surface of the rubber replica with a
"parting agent" such as a thin film of silicone oil. The face plate
10a is fabricated of glass or a low atomic number metal such as
aluminum.
After the final silicone resin baking step, the resulting structure
consists of the silicone resin replica 46 adhered to the concave
side of the image intensifier face plate 10a as illustrated in FIG.
5 wherein the slight rib projections of the silicone resin replica
46 extend normal to the surface of face plate 10a. The thickness of
the floor portion of the resin replica is not critical and is
generally in a range of 0 to 3 mils. The whole waffle surface is
then coated with a light-reflective material such as evaporated
aluminum to obtain a relatively highly light reflective surface 50.
The light-reflective coating is of thickness in the range of 100 to
2,000 Angstroms (A) and typically may be in the order of 1,000 A.
Alternatively, only the floor portions of the waffle surface are
coated with the light-reflective material, and the ribs are
incidentally and only partially coated in the process of coating
the floor portions.
After the light-reflective material is deposited on the waffle
surface, a relatively highly light-absorbing material such as
carbon is evaporated obliquely on the waffle surface substrate
member so as to blacken only the protruding ribs thereof. FIG. 6
illustrates a first means for accomplishing the rib-blackening
process wherein the face plate 10a is supported and rotated
relatively rapidly about a central vertical axis by means of
rotatable vertical shaft 60 while an evaporation source 61 of
suitable black matter retained in a suitable container 62 slowly
pivots about the center of curvature of face plate 10a by means of
pivot arm 63. Container 62 is an open-ended hollow chamber
connected to the free end of pivot arm 63. The shape of container
62 is not critical but requires a suitable opening for the black
matter to be emitted at the desired low angle. Container 62 is
oriented relative to the surface generated by the ends of the ribs
such that the angle at which the evaporated black matter exits from
the open end of container 62 remains constant while pivot arm 63
swings back and forth diametrically across such surface in slightly
spaced apart relationship therefrom. By this process of source 61
pivoting slowly back and forth across the rotating waffle surface,
all sides of the rib projections are thinly coated with the
light-absorbing material to a thickness in the range of 100 to
2,000 A. The feature of obtaining blackening only on the rib
projections and not on the floor portions of the waffle surface
(which are light-reflecting) is accomplished by selection of a
small enough angle of container 62 relative to the surface defined
by the rib ends, as well as by the proper spacing of adjacent ribs
for a particular height thereof. A change in any of such parameters
can generally be compensated for by a change in the angle of
container 62. Thus, a closer spacing of the ribs would generally
require an increase in the angle of container 62 in order to obtain
blackening of the entire surfaces of the ribs.
After the ribs of the waffle surface have been made
light-absorbing, a suitable phosphor material is deposited on the
waffle surface using conventional techniques to form a uniform
phosphor layer 62 which extends beyond the ends of the rib
projections of the silicone resin replica 46 to a thickness greater
than twice the rib height. The phosphor 65 can be any transparent
phosphor such as evaporated cesium iodide (CsI). Evaporation of the
CsI from vertically above the resin replica 46 may result in the
outer surface of the phosphor layer 65 having a slight undulating
form due to the projecting ribs of the resin replica, however, such
undulations are generally not so severe as to upset either the
electron-optics or the formation, and, or surface resistivity of
the photocathode (to be described hereinafter). If desired, or
necessary, such undulations may be readily smoothed out. The
phosphor layer 61 is approximately 12 mils thick as one typical
example, and obviously can be made thicker if higher X-ray
absorption is desired.
Referring now to FIG. 7, a thin uniform coating of a suitable
photoemitter material 70 is deposited on the smooth surface of the
phosphor layer 65 during the evacuation of the image intensifier
tube to form the photocathode of such image intensifier tube. The
photoemitter material may be of the common types known as S-20 (a
compound of antimony, cesium, sodium and potassium) or S-11 (a
compound of cesium, antimony and oxygen) as two typical examples
and is a very thin coating in the order of 100 Angstroms. If
desired, an isolating layer of transparent alumina, as one example,
may be deposited between the phosphor 65 and photoemitter 70 layers
in order to isolate the alkali metal of the photoemitter material
from the phosphor, however, such isolating layer is not essential
to the successful operation of my input phosphor screen.
The rib projections of the silicone resin replica 46 extend in a
normal direction through less than 50% of the phosphor layer 65
thickness, and as shown in FIG. 7, typically extend through
approximately 20 percent of the phosphor layer. The effect of the
relatively highly light-absorbing rib projections is to absorb the
low angle (more nearly lateral) portion of the rearward traveling
light photons to thereby substantially reduce degradation of image
resolution and especially local image contrast due to such
low-angle rearward scattering of light in the phosphor layer 65
while the relatively highly light-reflecting floor portions of the
waffle surface reflect the high-angle (more nearly normal) portion
to thereby deliver more useful light to photocathode 70 and hence
increase the tube sensitivity. The reflection and absorption of the
rearward traveling light photons is depicted by the arrows in FIG.
7.
Obviously, the metal master can be made with more sheets of the
metal mesh to thereby obtain a silicone resin replica having rib
projections of greater height whereby a thicker phosphor layer 65
can be utilized for increased X-ray absorption, and thus increased
sensitivity, while still maintaining the height of the ribs at less
than the prescribed one half of the phosphor layer thickness.
FIG. 8 illustrates a second means for obtaining the light-absorbing
ribs. In this second embodiment, a waffle-like surface is formed on
the light-reflective surface (which can be the inner surface of an
aluminum face plate 10a, or a light-reflective coating 50 on the
inner surface of a nonreflective face plate) by fastening a
preferably blackened metal screen 80 to the light-reflective
surface. Screen 80 may be woven, as illustrated, in the manner of a
window screen, from approximately 1 mil wire and having a pitch of
5 to 10 mils, that is, the dimensions and spacing of the ribs can
be made the same as in the first embodiment. The screen 80 can be
fabricated of aluminum or other low atomic number metal such as
iron, titanium or nickel. The metal screen 80 is fastened to the
light-reflective surface by a conventional process appropriate to
the particular metals involved, and as one typical example, can be
adhesively bonded thereto by means of a silicone resin.
Alternatively, an unblackened metal screen can be first fastened to
the light-reflective surface, and the screen then blackened by
oblique evaporation of the black material as in the first
embodiment shown in FIG. 6. The blackened metal screen, besides
absorbing low-angle rearward traveling light photons in the
phosphor layer 65, also aids in holding the evaporated phosphor
layer on the light-reflecting substrate face plate 10a while the
reflective surface reflects the high-angle rearward traveling light
photons.
FIG. 9 illustrates a third means for obtaining the light-absorbing
ribs. In this third embodiment, the inner surface of the face plate
10a is etched to produce the illustrated jagged, irregular (waffle)
surface 90. The size of the irregularity need not be large, and can
be as small as a fraction of a mil, peak-to-peak. If the face plate
10a is aluminum, the light-absorbing ribs are completed by oblique
evaporation of the black material on the peaks 91 of the
irregularities as in FIG. 6. If the face plate is glass or another
nonreflective material, a coating of a light-reflective material
such as aluminum is deposited on the irregular surface prior to the
oblique evaporation of the black material on the peaks. The
blackened peaks absorb the low-angle rearward traveling light
photons while the unblackened portions of the irregularities
reflect the high-angle rearward traveling light photons.
From the foregoing description, it is apparent that my invention
attains the objectives set forth and makes available a new and
improved X-ray image intensifier tube which has an input phosphor
screen that simultaneously achieves both high X-ray absorption (and
thus high sensitivity) and high image resolution and contrast as
well as providing methods of manufacturing such input phosphor
screen. The method of manufacturing the input phosphor screen is a
low cost fabrication process due to the use of a silicone rubber
replica which permits fabrication of many inexpensive silicone
resin replicas of the original master in a first method of
manufacture, the second and third described methods also being low
cost. The light-absorbing ribs of the waffle surface, which are an
important aspect of my invention, can be adjusted as to the
height-to-spacing ratio thereof in the formation of the ribs and
thereby the "cut-off" point for the low-angle rearward light
radiation can be set at any desired angle. As a typical range, it
would generally be desired to absorb the light photons which travel
rearward at angles up to approximately 15.degree. from the plane in
the phosphor layer parallel to the face plate, and containing the
point at which an incident X-ray photon generates the light
photons. The combination of the light-absorbing ribs and
light-reflecting floor portions of the waffle surface provides an
input phosphor screen which avoids the compromise in conventional
X-ray image intensifier tubes between high X-ray absorption and
high image resolution. Having described three specific embodiments
of my waffle surface, it will be apparent to those skilled in the
art that such waffle-like surface which constitutes the essence of
my invention may take other forms than that specifically
illustrated and described above, and the ribs may be blackened by
other methods. Also, the support for the input phosphor screen,
herein described as the face plate, may be slightly spaced from the
input window of the tube glass envelope. Thus, it is to be
understood that changes may be made in the particular embodiment of
my invention as described which are within the full intended scope
of the invention as defined by the appended claims.
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