U.S. patent number 3,849,124 [Application Number 05/166,220] was granted by the patent office on 1974-11-19 for capacitor powder.
This patent grant is currently assigned to Norton Company. Invention is credited to Gerard J. Villani.
United States Patent |
3,849,124 |
Villani |
* November 19, 1974 |
CAPACITOR POWDER
Abstract
Powder for making electric capacitor or the like comprising a
ternary niobium-zirconium-titanium alloy. The alloy is selected as
to composition and treated to produce and retain the beta
(body-centered-cubic) phase. The resultant product affords high
capacitor stability and low leakage approaching the characteristics
of the more expensive tantalum at a capacitance cost comparable to
or better than that of niobium.
Inventors: |
Villani; Gerard J. (Needham,
MA) |
Assignee: |
Norton Company (Worcester,
MA)
|
[*] Notice: |
The portion of the term of this patent
subsequent to August 10, 1988 has been disclaimed. |
Family
ID: |
26862070 |
Appl.
No.: |
05/166,220 |
Filed: |
July 26, 1971 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
|
882482 |
Dec 5, 1969 |
3597664 |
Aug 3, 1971 |
|
|
Current U.S.
Class: |
420/422; 75/359;
420/417; 420/426 |
Current CPC
Class: |
C22C
16/00 (20130101); H01G 9/042 (20130101) |
Current International
Class: |
C22C
16/00 (20060101); C22c 015/00 () |
Field of
Search: |
;75/.5BB,.5R,134N,174,177,175.5 ;317/230 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
fiz. Metal Metalloved 23, No. 1, pages 28-36, 1967..
|
Primary Examiner: Lovell; Charles N.
Attorney, Agent or Firm: Hayes; Oliver W.
Parent Case Text
This application is a continuation-in-part of U.S. application,
Ser. No. 882,482, filed Dec. 5, 1969 now U.S. Pat. No. 3,597,664
issued Aug. 3, 1971.
Claims
I claim:
1. A powdered material of niobium-zirconium-titanium ternary alloy,
in form suitable for manufacture into an electrolytic capacitor
anode, the alloy having an essentially homogeneous crystal
structure of a single body centered cubic alloy phase wherein the
elements of the alloy are present in atomic percentages of
from:
20 to 40% for niobium
30 to 60% for zirconium
20 to 40% for titanium.
2. The material of claim 1 wherein the niobium and titanium are
present in the alloy in substantially equal atomic amounts.
3. The material of claim 2 having a Fisher Average Particle
Diameter of less than 6 microns.
4. The material of claim 3 wherein the elements of the alloy are
found throughout the material in essentially the atomic proportions
of:
50% zirconium
25% niobium
25% titanium.
5. The material of claim 2 wherein the elements of the alloy are
found throughout the material in essentially the atomic proportions
of:
50% zirconium
25% niobium
25% titanium.
6. A capacitor grade powder for use in manufacturing solid
electrolytic capacitor sintered, porous anodes anodizable to 200
volts and affording high thermal stability and low leakage and
dissipation factor, consistent with high capacitance,
comprising
single phase body-centered-cubic crystal structure
niobium-zirconium-titanium ternary alloy throughout the powder
mass, the elements of the alloy being present in essentially
homogeneous atomic percentages and within the respective ranges
of:
20-80% for niobium,
20-80% for zirconium,
20-80% for titanium,
throughout the powder mass.
Description
This invention relates to electric capacitors, particularly
electrolytic capacitors and materials used in making them.
BACKGROUND
High performance capacitors are utilized in a wide variety of
radio, television, computer, telephone and other electric circuits.
The principal high performance material in the present state of the
art is tantalum. It is a high temperature, highly corrosion
resistant metal capable of forming a highly stable oxide film, of
high dielectric constant, at its surface which serves as the
capacitor dielectric.
With the current increased demand for tantalum and relative
scarcity of world sources for tantalum ore, the need for a
substitute has been of great importance to users of high
performance capacitors. The more abundant, less expensive, metal
aluminum is a possible substitute. But it cannot be formed into
porous slug type of capacitors as readily as tantalum. Furthermore,
aluminum oxide has low dielectric constant giving about one-third
the capacitance of tantalum on an equivalent volume basis. Another
obvious candidate as a tantalum substitute is niobium. Niobium
oxide has a higher dielectric constant than tantalum and niobium
metal can be produced at less cost. Niobium powders can also be
utilized to produce porous slugs for electrolytic wet and dry
capacitors. The U.S. Government and leading capacitor and materials
manufacturers have therefore devoted intense research effort to
niobium and its alloys (and also to titanium and zirconium alloys)
to provide a tantalum substitute. The results of these efforts are
reported in articles or reports located at:
A. Journal of the Electrochemical Society: vol. 108, pp. 343, 750,
1,023; vol. 100, p. 69; vol. 110, p. 1,277; vol. 111, p. 1,331;
vol. 113, pp. 100, 1,048 (see also vol. 114, p. 145)
B. Journal of Electrochemical Technology: vol. 1, p. 93; vol. 2
C. Government Contract Reports: AD618055, AD431898
d. U.S. Pat. Nos. 3,126,503; 3,278,344; 3,321,677
(niobium-zirconium-titanium alloys) 3,203,793
E. Canadian Pat. No. 709,982
None of the work has produced a tantalum substitute which is in
wide use at the present time although some of the resultant
products were in commercial use for a time.
It has been apparent from the above published work that wet and
solid electrolytic niobium capacitors are not as good as tantalum
electrolytic capacitors in respect of leakage, capacitance and
dissipation stability, especially at elevated temperatures.
Niobium can nevertheless be used for low capacitance-voltage
ratings and alloyed with tantalum for use at higher
capacitance-voltage ratings but cannot provide the desired
substitute for tantalum for substantially all purposes, including
cost.
OBJECT
It is the object of the present invention to solve the problem of
providing a substitute capacitor material satisfying the purposes
of the substantially unsuccessful development campaign of the prior
art.
GENERAL DESCRIPTION
As in the prior art, the inventive effort is focussed on the
material which comprises the principal electrode of the capacitor
(generally anode) and forms a surface oxide which serves as
capacitor dielectric.
First, if it is assumed that high leakage and low breakdown
voltages of niobium (in the absence of gross impurities) are a
result of damage inflicted by locally high temperatures and
currents, it would be necessary to reduce these and this is
possible through alloying niobium with a metal which forms a more
refractory oxide. Young's book, Anodic Oxide Films (Academic Press,
1961) indicates an inverse relationship between dielectric constant
and ionic conduction of anodic oxide films. A condition for
alloying agent candidates is that the alloying agent must have a
solid solubility in niobium -- which is true of the Group IVB, VB,
VIB refractory metals. Zirconium gives the optimum balance of cost,
stability of oxide, solubility. An alloy of Niobium -- 50 atomic
percent zirconium when fabricated to a sheet form anode and
incorporated in a capacitor (anodized in 0.01 percent phosphoric
acid to 200 volts at 25.degree.C) has good leakage and exhibits a
change in capacitance on heating to 300.degree.C in air for 30
minutes of less than 10 percent, whereas a niobium capacitor
changes by 100 percent.
However, it was discovered that when porous anodes are made from a
powder form alloy of niobium-50 zirconium, they will not anodize
above 100 volts and that they exhibit high leakage. Difficulty was
also encountered in anodizing in that the alloy did not anodize
well in aqueous electrolytes and organic electrolytes were too
viscous for use in a porous structure.
Photomicrographs of Nb-50 AT. % Zr anodes revealed a two phase
metallurgical structure of Zr and Nb rich compositions within the
porous anode, apparently resulting from the high oxygen contents
and high surface area inherently obtained in powdered materials --
both of which tend to promote instability of a single phase, high
temperature structure. It was then conceived to stabilize the beta
phase as a new approach to the problem and utilize a third alloy
addition for this purpose.
Titanium was chosen because it forms a larger solid solution range
with niobium than does zirconium and also lowers the beta and alpha
transitions of niobium-zirconium so that the high temperature beta
phase could be retained by rapid cooling to lower temperatures.
Titanium was also intended to render the overall alloy more readily
anodized in aqueous solutions.
It has been found, surprisingly, that the best alloys for porous
capacitor anode purposes are formed when the niobium and titanium
are present in the alloy in substantially equal atomic amounts, and
with a greater portion of zirconium than niobium or titanium. It is
also necessary to avoid the titanium-rich and zirconium-rich
portions of the ternary alloy system. Some niobium-zirconium rich
portions of the ternary alloy must also be avoided. For these
reasons, it is important to maintain a single, crystalline
structure of controllable composition.
Some care in material processing, as described below, is a
necessary adjunct to material selection in order to achieve the
beta, single phase crystalline structure in the product.
Other objects, features and advantages will in part be obvious from
this disclosure and will in part be set forth hereinafter in this
disclosure in the following specific description which is set forth
with reference to the accompanying drawings in which:
BRIEF DESCRIPTION OF THE DRAWING
FIGS. 1-5 are microphotographs of sectioned anodes made of
compositions and including, by contrast, FIGS. 1A-1C showing anodes
of other compositions,
FIGS. 6-7 are schematic cross-section views of capacitors utilizing
the invention, and
FIG. 8 is a ternary phase diagram of the niobium-zirconium-titanium
system showing data points used in the examples. FIG. 9 represents
the DC leakage over the entire ternary phase diagram, and FIG. 10
represents the thermal stability of capacitance over the entire
ternary phase diagram.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
Since the anodic film is formed from the alloy, the film's
properties are dependent upon the alloy composition. Alloys rich in
niobium, titanium, or zirconium do not form coherent or thermally
stable anodic films. Alloys containing 20 to 60% Nb, Zr, or Ti are
better, but they tend to decompose into two or three crystalline
forms with an accompanying change in chemical composition towards
the niobium, zirconium, and titanium rich portion of the ternary
system, with resulting poor anodic film properties. For these
reasons, it is important that the alloy remain as a single,
crystalline structure of constant composition, preferably a single
solid solution, beta (body centered cubic) phase. Complete beta
phase, solid solution only occurs at temperatures above about
1,000.degree.C. It is therefore necessary to homogenize this alloy
above this temperature and cool it with sufficient rapidity to
retain the high temperature, beta phase structure. Some
compositions, notably the Nb-Zr rich regions, are highly unstable
and rapidly form second phases on cooling, The addition of titanium
not only lowers the phase transition temperature but extends the
solid solubility range and readily promotes the retention of the
high temperature beta phase during cooling.
It can be seen from the tables in the Examples below that most of
the alloy compositions can produce 200-volt anodic films, useful as
capacitor devices. preferred alloy compositions are characterized
by low leakage and a low capacitance change (.DELTA.C) on thermal
treatment. These alloys would be useful for elevated temperature
use. They normally contain 20-40% Nb, 30-60% Zr, and 20-40% Ti.
Best results occur when the niobium and titanium are in
substantially equal atomic concentrations (within 10 percent of the
total).
From life test data of porous anode, solid electrolyte capacitors
in Table 5, it is obvious that essentially all of the compositions
and essentially the whole system (i.e., 20-80% Nb, 20-80% Zr,
20-80% Ti) are capable of being fabricated into useful capacitors.
However, some compositions, namely those stated above, give low
leakage and good stability and are to be preferred over the
others.
FIG. 1 is a cross-section photomicrograph of
niobium-zirconium-titanium alloy of the composition corresponding
to data point 15 in Example 2, in sintered powder form. The
magnification of the photo is 800 times. FIGS. 1A-1C show (at 800
times also) niobium-50 percent zirconium powder sintered at
1,300.degree., 1,400.degree. and 1,500.degree.C respectively.
FIGS. 2, 3, 4, 5 show sectioned capacitor anodes of atomic
compositions and powder sizes as follows:
FIG. Composition (Nb-Zr-Ti) Starting Powder Size
______________________________________ 2 30 - 40 - 30 -325 mesh + 5
microns 3 30 - 40 - 30 -60 mesh + 325 mesh 4 20 - 60 - 20 -325 mesh
+ 5 microns 5 20 - 60 - 20 -60 mesh + 325 mesh
______________________________________
All magnifications are 100 times in FIGS. 2-5.
The niobium-zirconium-titanium alloys shown in FIGS. 1-5 have no
second phase. A precipitated second phase is quite apparent in
FIGS. 1A, 1B, 1C. In general, a deleterious second phase, if
produced, will be visible at 100 times optical magnification and
can be regarded as undesired if observed at as low as 100 times
magnification.
The production of the requisite single phase crystalline structure
can be accomplished (a) in-situ in the electrode (during capacitor
production or prior to capacitor production) or (b) in the
production of starting materials to be used later in electrode
production. In either case what is involved is raising the alloy
composition material to a high enough temperature as in sintering
powder or annealing sheet to produce, as a homogenous solid
solution, the single Beta phase high temperature modification of
the alloy structure and to bring it to equilibrium, then cooling
with sufficient rapidity to maintain the Beta structure essentially
free of any second phase observable at 800 times magnification.
A typical cooling schedule for purposes of the invention would be
from 1,300.degree. to 300.degree.C in 20 minutes and could be
achieved by continuous movement of parts from a furnace to a
cooling zone, as by a conveyor belt.
FIGS. 6-7 show two examples of capacitors utilizing the present
invention. Each of the capacitors comprises an anode 10 with a
dielectric comprising at least in part a dielectric oxide film on
the surface of the anode material. The capacitors also comprise a
cathode electrode 20. Leads 12, 22 are attached to anode 10 and
cathode 22 respectively. In FIG. 6, the anode has the form of a
sintered powder slug and the capacitor is of the electrolytic type
with wet or solid electrolyte 21 impregnating the anode and
extending to the cathode. FIG. 6 also shows conventional capacitor
packaging elements as a seal 30 and plastic encapsulant 32. The
anode 10 in the FIG. 7 capacitor is a rolled foil or a film
sputtered from a sputtering target and includes a dielectric oxide
film 11 on the anode surface.
The invention can also be utilized in non-polar capacitors, as well
as the polar capacitors of FIGS. 6-7, and in other electrical,
chemical and electrochemical devices requiring the significant
characteristics of a tantalum substitute material as described
herein.
FIG. 8 is a ternary diagram showing the various data points
refereed to in the examples below. The percentages on the three
sides of the diagram are atomic percentages.
The compositions indicated are based on proportions of starting
materials used. At any given location in a powder or other product
produced from the starting materials by melting together, the
composition may vary due to the known metallurgical phenomenon of
coring as the melt is cooled. Generally, the compositional
differences found along the material on a microscopic scale are
acceptable. However it is preferable to minimize compositional
variation due to coring during ingot solidification and this can be
accomplished by homogenization heat treatment applied either as an
additional step immediately after melting and cooling the alloy
and/or in the course of the fabrication steps (e.g., sintering
powder or annealing foil), as noted above.
It is preferred and distinctly advantageous to select alloy
compositions of substantially of atomic proportions:
niobium -- 20-40% zirconium -- 30-60% titanium -- 20-40%
with ) equal atomic proportions of niobium and titanium,
particularly where (1) fine powders (6 microns Fisher Average
Particle Diameter - F.A.P.D. or less) are produced, (2) where high
oxygen impurity levels are in the material, (30 where hydrogen
addition processing is used as an aid to pulverizing.
An alloy composition of essentially (within plus or minus 5
percent) the following atomic proportions:
50% zirconium
25% niobium
25% titanium
(data point 9 in FIG. 8) has been found to be distinctly
advantageous for fine powder production and retain a single beta
phase composition under processing conditions which produced
multiphase crystal structure in powder of alloy composition
corresponding to data points 15 and 16 and was fabricated into
solid electrolytic capacitors along with (and under identical
conditions with) powder of alloy compositions 6 and 16 and produced
superior capacitors with respect thereto in terms of affording an
economic tantalum capacitor substitute.
While any of several methods of alloy powder production are
feasible (including co-reduction of their mixed halides) it is
preferred and distinctly advantageous to obtain the three alloy
components -- Nb, Zr, Ti -- in elemental form, melt them together
and cool to form an alloy ingot, hydride the ingot to embrittle it,
pulverize the hydrided ingot and dehydride the powder so formed by
heating.
The dehydriding can be done on the powder, per se, or in
conjunction with sintering the powder to an anode compact, the
former being preferred.
Melting, hydriding, pulverizing and dehydriding tends to produce a
highly agglomerated alloy powder, which is advantageous for
compacting and tends to retain high capacitance consistent with low
leakage produced by cleansing impurities in the various melting,
heating and gas purging steps. The agglomerated particles contain
individual fine powder particles in the range of 18 microns or less
with the agglomerates per se being plus 325 mesh, minus 60
mesh.
The practice and relative value of the invention is illustrated by
the following non-limiting examples (including some specimens
outside the invention scope):
EXAMPLE 1
Several alloys of nominal compositions listed in Tables 1-3 below
were made by arc melting 50-100 gram alloy buttons in argon
atmosphere using a non-consumable tungsten electrode. The buttoms
were formed from niobium chips and crystal bar zirconium and
titanium with raw material specification as in Example 2 (below).
Each alloy button was melted four times and then heated to about 80
percent of the melting point and held at that temperature for 2
hours. The buttons were then sliced with a diamond wheel saw. One
slice of each button was chemically analyzed and the remainder were
cold rolled from three-sixteenths inch to a thickness of about
0.015 inch. The rolled sheets were cut into panels, degreased,
chemically polished, rinsed and annealed above 1,000.degree.C at
about 80 percent of their respective melting points for 30 minutes
in a vacuum of about 10.sup.-.sup.5 torr. The panels were anodized
at 1 ma cm.sup.2 of surface in 0.01% H.sub.3 PO.sub.4 (at
25.degree.C in one test and at 92.degree.C in a second test) to 200
volts and held for 30 minutes. The anodized panels were rinsed and
dried and electrically tested in a wet cell (1% H.sub.3 PO.sub.4
electrolyte) as formed and again after a later heat treatment of
300.degree.C for 30 minutes in air.
The results are shown in Table 1 for 25.degree.C anodization and in
Table 2 for 92.degree.C anodization where DCL is D.C. leakage in
microamperes per square centimeter of anode surface tested, DF is
dissipation factor (percent), C is capacitance in microfarads (uf)
or millimicrofarads (muf) per square centimeter of tested anode
surface and .DELTA.C is capacitance change (percent) due to heat
treatment.
(Cap. after - Cap. before/Cap. before .times. 100)
Microstructure of the heat treated buttons was examined. In general
the structures were equiaxed with sub-grain boundaries and
dislocation etch pits reminiscent of a strained body-centered-cubic
phase quenched from a high temperature. There was no evidence of
second phase transformation except in data points 19 and 21; these
had fine precipitated structures within the equiaxed structure.
The data points in Tables 1-2 are grouped from lowest leakage to
highest leakage. Table 3 shows a further series of experimental
results indicating reproducibility of the Table 2 data.
TABLE I
__________________________________________________________________________
DATA NOMINAL COMPOSITION Cap. POINT Nb-Zr-Ti (At. %) DCL DF
muf/cm.sup.2 .DELTA. C%
__________________________________________________________________________
24 25-25-50 <.02 1.6 56 70 9 25-50-25 <.02 1.7 52 30 23
10-25-65 .02 1.8 53 36 7 20-40-40 .02 2.0 52 81 12 20-60-20 .02 2.1
59 9.3 11 30-60-10 .04 1.7 44 3.9 14 20-20-60 .03 2.0 55 88 15
40-20-40 .05 1.9 56 86 6 30-40-30 .05 1.7 55 74 2 33.3-33.3-33.3
.11 2.0 55 6.7 17 30-10-60 .08 4.5 61 86 25 45-10-45 .12 3.6 101
152 8 35-50-15 .30 1.4 35 1.2 18 60-10-30 .33 2.4 64 128 16
60-20-20 .53 3.1 59 78 10 10-60-30 .58 2.3 50 29 13 15-50-35 .63
2.6 48 61 1 75-15-10 1.6 7.6 -- -- 5 40-40-20 3.3 4.6 -- -- 3
60-30-10 4.5 6.8 -- -- 22 10-60-30 17 5.8 -- -- 20 10-40-50 46 7.2
-- -- Niobium .06 2.5 78 72 Tantalum <.02 2.1 68 3.0
__________________________________________________________________________
TABLE II
__________________________________________________________________________
DATA NOMINAL COMPOSITION Cap. .DELTA. C POINT Nb-Zr-Ti (At. %) DCL
DF muf/cm.sup.2 %
__________________________________________________________________________
9 25-50-25 .02 1.2 54 0.3 12 20-60-20 .02 1.5 54 39 13 15-50-35 .02
1.7 49 38 2 33-33-33 .02 1.5 41 74 6 30-40-30 .02 2.1 45 0.7 22
10-60-30 .02 2.2 54 88 10 10-60-30 .06 2.5 56 31 24 25-25-50 .14
2.2 44 30 5 40-40-20 .09 1.5 34 0.5 16 60-20-20 .04 1.6 48 94 15
40-20-40 .09 1.5 36 110 1 75-15-10 .06 3.4 56 105 25 45-10-45 .13
3.1 81 181 18 60-10-30 .33 1.7 56 172 17 30-10-60 2.1 2.2 47 91 11
30-60-10 7.4 4.4 -- -- 7 20-40-40 9.5 7.5 -- -- 3 60-30-10 22 5.0
-- -- 14 20-20-60 37 11.2 -- -- 23 10-25-65 High 5.7 -- -- 8
35-50-15 High 10 -- -- 20 10-40-50 High 13 -- -- Tantalum .02 1.6
54 2.2 Niobium High (will not anodize) -- 19 10-10-80 -- -- -- --
21 10-80-10 -- -- -- --
__________________________________________________________________________
TABLE III
__________________________________________________________________________
DATA NOMINAL COMPOSITION Cap. POINT Nb-Zr-Ti (At. %) DCL DF
muf/cm.sup.2 .DELTA. C
__________________________________________________________________________
2-1 33.3-33.3-33.3 <.02 1.5 41 74 2-2 33.3-33.3-33.3 .02 1.6 46
96 2-3 33.3-33.3-33.3 .02 1.6 45 120 2-4 33.3-33.3-33.3 .03 1.8 48
44 2-5 33.3-33.3-33.3 .02 1.8 43 50 5-1 40-40-20 .09 1.5 34 0.5 5-2
40-40-20 .17 1.3 36 0.0 5-3 40-40-20 .04 1.4 36 1.0 6-1 30-40-30
.02 2.1 45 0.7 6-2 30-40-30 .02 2.1 50 29 6-3 30-40-30 .02 2.0 49
1.3 7-1 20-40-40 9.5 -- -- -- 7-2 20-40-40 12 -- -- -- 7-3 20-40-40
5.8 -- -- -- 9-1 25-50-25 <.02 1.2 54 0.3 9-2 25-50-25 .02 1.9
52 7.8 9-3 25-50-25 <.02 1.4 54 8.2 10-1 10-60-30 .06 2.5 56 31
10-2 10-60-30 .06 2.1 48 194 10-3 10-60-30 .02 2.0 54 152 22-1
10-60-30 .02 2.2 54 88 22-2 .03 2.3 50 90 12-1 20-60-20 <.02 1.5
54 39 12-2 20-60-20 <.02 1.5 56 40 12-3 20-60-20 .02 1.6 56 41
15-1 40-20-40 .09 1.5 36 110 15-2 40-20-40 .08 1.6 46 14 15-3
40-20-40 .04 1.6 46 44 16-1 60-20-20 .04 1.6 48 94 16-2 60-20-20
.02 1.8 42 107 16-3 60-20-20 .16 2.2 39 118 24-1 25-25-50 .14 2.2
44 30 24-2 25-25-50 .29 2.3 44 198 24-3 25-25-50 5.7 -- -- --
__________________________________________________________________________
EXAMPLE 2
Several alloy buttons were formed by melting together niobium,
zirconium and titanium with the following purities:
Nb (machining chips) 99.94% Zr (crystal bar) 99.91% Ti (crystal
bar) 99.94%
The nominal compositions of the alloys are given in Table 4. The
buttons were hydrided, ground to powder and dehydrided. The powders
in varying size cuts were sintered above 1,000.degree.C into porous
compacts of approximately 1 gram each, cooled and anodized in 0.01%
H.sub.3 PO.sub.4 electrolyte at 92.degree.C temperature with a
current density of 63 ma per anode to a formation voltage for 2
hours. As a control, niobium anodes were similarly formed at
25.degree.C at current density of 50 ma per anode.
The anodized compacts were impregnated with manganese nitrate and
pyrolyzed to form manganese dioxide electrolyte. The pyrolysis
temperature was 275.degree.C for 8 minutes. Three impregnation dips
followed by pyrolysis were used. Dip time was 3 minutes. After
MnO.sub.2 impregnation, the anode (anodic oxide film) was reformed
at 2 volts/minute in the 0.01% H.sub.3 PO.sub.4 at 92.degree.C to
break-down. The reformation break-down is given in Table 4 as
V.sub.R.
Similar capacitor samples were reformed to 35 volts. A
counter-electrode was added and the devices were tested at 20 volts
for capacitance and leakage. The results are given in Table 4.
TABLE 4
__________________________________________________________________________
NOMINAL ATOMIC % *POWDER L/C DATA COMPOSITION SIZE/SINTER V.sub.R
CAP. .mu. amp. POINT (Nb-Zr-Ti) TEMP (.degree.C) (VOLTS) (.mu.fd.)
.mu.fd.
__________________________________________________________________________
2-1 33-33-33 F/1100 40 23.3 .39 2-2 33-33-33 F/1200 40 16.5 .07 2-3
33-33-33 F/1300 40 12.4 .51 2-4 33-33-33 C/1300 40 5.3 .26 5
40-40-40 F/1300 65 11.7 .22 6-1 30-40-30 F/1100 47 12.0 .17 6-2
30-40-30 C/1200 47 5.4 2.3 6-3 30-40-30 C/1300 52 4.8 .35 6-4
30-40-30 C/1100 18.0 .08 9-1 25-50-25 F/1200 40 8.6 .14 9-2
25-50-25 F/1200 63 8.9 .06 9-3 25-50-25 C/1300 38 4.4 .11 9-4
25-50-25 C/1300 65 4.4 .05 12-1 20-60-20 F/1100 80 7.8 .06 12-2
20-60-20 C/1200 62 4.5 .13 12-3 20-60-20 C/1300 62 4.5 .13 13
15-50-25 F/1100 63 14.2 .09 15-1 40-20-40 F/1100 55 11.2 2.0 15-2
40-20-40 C/1200 58 9.9 1.6 15-3 40-20-40 C/1300 42 4.7 2.5 16-1
60-20-20 F/1300 56 15.4 16-2 60-20-20 C/1400 58 5.8 1.1 22 10-60-30
F/1100 65 13.1 .31 24 25-25-50 F/1200 67 11.5 .65 CONTROL 100-0-0
A/2050 85** 15.3 .10
__________________________________________________________________________
* F cut is -325 mesh +5 micron, C cut is -100 mesh + 325 mesh, A
cut is -140 mesh +5 microns F.A.P.D. ** 25.degree.C Test for
100-0-0, 85.degree. for others
Solid capacitor samples of compositions noted in Table 5 and -325
mesh powder size were put through life tests of 200 to 1,000 hours
and resultant life test data 15 charted in Table 5. In the life
tests, leakage currents capacitance and dissipation factor are
measured at 25.degree.C. Then the temperature is raised to
85.degree.C and the capacitors retested. Temperature is held at
85.degree.C for an extended period, the capacitors retested and
then the temperature is dropped to 25.degree.C for retest. Initial
(I) and final (F) values of these parameters are shown in Table 5.
In some instances the "final" value at high temperature is a median
or average value. ##SPC1##
EXAMPLE 3
Solid electrolytic capacitors were prepared as in Example 2 using
the alloy compositions identified as 6, 12 and 16 in Table 5.
Specific anode sintering and dielectric oxide formation conditions
are given in Table 6A.
These capacitors were tested for electrical properties at room
temperatures and then life tested at 85.degree.C under 20 volts
bias for 1,000 hours. The results are given in Table 6B.
The results were in agreement with those tabulated in Table 5
except that composition 16 had improved leakage behavior. However,
the alloy also exhibited capacity instability.
The life testing acted as a "burn-in" for capacitors, tending to
stabilize them, for better performance in future life testing and
would be a desirable step for capacitor production.
TABLE 6 A ______________________________________ ANODE PROCESSING
______________________________________ Green Sinter No. Weight (gm)
Density (g/cc) Temp.degree.C Time
______________________________________ 6 .734 3.90 1100 1/2 hr. 12
.722 3.80 1100 1/2 hr. 16 .823 4.34 1300 1/2 hr.
______________________________________
FORMATION
Electrolyte: 0.01% H.sub.3 PO.sub.4 at 92.degree.C.
Current Density: 63 ma/anode.
Formation Voltage: 200 Volts.
Hold Time at Voltage: 2 Hours.
TABLE 6B
__________________________________________________________________________
COMPOSITION LIFE TEST TEMP L C L/C DF NUMBER HOURS (.degree.C)
(.mu.a/anode, med.) (.mu.f/anode, avg.) (.mu.a/.mu.f) (%)
__________________________________________________________________________
6 0 25 .50 7.6 .066 6.1 0 85 2.4 9.2 .26 8.2 100 85 .94 8.4 .11 7.8
250 85 .92 8.2 .11 6.9 500 85 .96 7.8 .12 6.0 750 85 1.20 7.8 .15
6.2 1,000 85 1.30 7.7 .17 6.1 25 .37 7.1 .052 4.2 12 0 25 1.1 10.1
.11 8.8 0 85 9.2 12.2 .75 8.6 100 85 4.3 10.9 .39 9.9 250 85 4.7
10.9 .43 10.2 500 85 6.1 10.3 .59 9.1 750 85 6.4 10.3 .62 8.7 1,000
85 6.6 10.3 .64 8.4 25 .92 9.0 .10 6.5 16 0 25 .63 17.4 .036 11.8 0
85 3.6 23.1 .16 10.5 100 85 3.2 20.6 .16 11.9 250 85 3.0 19.5 .15
9.3 500 85 3.9 18.1 .22 7.3 750 85 4.0 17.6 .23 7.3 1,000 85 4.3
17.4 .25 6.8 25 .66 15.5 .043 8.8
__________________________________________________________________________
EXAMPLE 4
Solid electrolytic capacitors were prepared using the alloy
compositions identified as data points 6, 9, 15, 16 and elemental
tantalum and elemental niobium as controls in the conditions given
in Tables 7 and 8 (including Tables 7-1 (a), (b), (c) and Table
8-1) for powder preparation and capacitor formation, respectively.
The capacitors were life tested under the conditions shown in Table
9A and with the results shown in Tables 9B-9D.
Table 7 -- Powder Preparation
1. Melt together, to form a solid alloy ingot, Nb, Zr, Ti with
commercial purities shown in Table 7-1(a) to produce an ingot with
purities shown in Table 7-1(b).
2. Hydride ingot by heating in a hydrogen atmosphere at
700.degree.C for about an hour or until hydrogen pick-up becomes
very slow and cool to 600.degree.C and repeat again at 500, 400,
300 and then cool to ambient.
3. Process ingot to powder by crushing to -10 mesh, then ball
milling to produce powder.
4. Screen powder to final desired size distribution by mechanical
or fluid classification technique.
5. Dehydride by heating powder to 700.degree.C in a chamber under
subatmospheric pressure, coming up to temperature slowly to avoid
an excessive rate of hydrogen evolution which would create an
explosion hazard, holding at 700.degree.C until hydrogen content is
reduced to less than 500 parts per million.
6. Cool and then passivate by slowly admitting air to the powder
before opening up the chamber.
7. The lightly sintered cake resulting from (4)-(6) is lightly
crushed to pass a 60 mesh/inch screen (A.S.T.M.). The resultant
product is an agglomerated powder with individual particles in the
range of 4-18 microns. Some 75 percent of the material are in
agglomerate form with a size of between plus 325 mesh and minus 60
mesh. The powdered material as a whole has a Fisher Average
Particle Diameter of 5-6 microns. The powders have the purity shown
in Table 7-1(c). ##SPC2##
Table 8 -- Capacitor Preparation
1. Press powder using 8 percent by weight camphor addition to
achieve a green compact of green density (Dg) as shown in Table
8-1.
2. Sinter for 30 minutes to temperatures shown in Table 8-1 to
densities shown in Table 8-1 producing anodes having the sintered
density (Ds) and carbon impurity content shown in Table 8-1.
3. Anodize (form) alloy in 0.1% H.sub.3 PO.sub.4 at 92.degree.C to
80 volts at 120 milliamperes per anode. Similarly anodize niobium
control at 25.degree.C.
3a. Perform wet cell testing as shown in Table 8-1, measuring or
calculating from measurements leakage, (in microamperes), leakage
to capacitance ratio (microamperes per microfarad), capacitance,
specific capacitance by weight and volume (microfarad-volts per
gram and cubic centimeter, respectively), dissipation factor and
equivalent series resistance. Alloy powder of data point 15 had
very high leakage (in excess of 1 milliamp).
4. Impregnate and pyrolyze by (a) dipping for 3 minutes in 12%
concentration of manganese nitrate solution, pyrolyzing for 8
minutes at 275.degree.C, and repeat this process two more times,
then reforming to 35 volts; (b) dipping again in 25 percent
manganese nitrate for 3 minutes, pyrolyzing for 8 minutes at
275.degree.C, and repeat this process two more times, then
reforming to 35 volts; (c) dipping again in 50 percent manganese
nitrate for 3 minutes, pyrolyzing for 8 minutes at 275.degree.C,
and repeat this process two more times, then reforming to 30 volts.
Alloy powder of data point 15 could not be reformed because of high
leakage and therefore could not be processed to solid capacitor
form, except with great difficulty.
5. Apply counterelectrode (cathode) by coating with colloidal
graphite, overcoating with silver paint, attaching a conductor with
conductive epoxy, and encapsulating in non-conducting epoxy
resin.
Table 8-1
__________________________________________________________________________
Porous Anode and Wet Cell Test Data
__________________________________________________________________________
Alloy (Element) 30 min. Identi- Anode Dp Ts Ds Carbon L L/C CV/g
CV/cc DF ESR fication Wt(gm) (g/cc) (.degree.C) (g/cc) (ppm)
(.mu.a) (.mu.a/.mu.F) C (.mu.f-V/g) (.mu.f-V/cc) (%) (Ohms)
__________________________________________________________________________
NZT 6* (1) .710 3.2 1100 4.4 480 39.0 0.81 48.4 5,440 1,236 55
15.07 (2) .710 3.2 1050 4.4 610 78.9 1.1 71.7 8,080 1,836 53 9.81
NZT 9* (1) .691 3.0 1000 3.8 164 104.0 1.7 62.1 7,190 1,892 52
11.11 (2) .691 3.0 1000 3.7 2200 144.4 2.2 65.6 7,600 2,054 48 9.71
(3) .691 3.0 1000 3.7 500 129.2 1.7 76.0 8,800 2,378 53 21.60 NZT
16* (1) .776 3.5 1200 3.8 270 92.0 0.81 114.0 11,750 3,092 71.5
8.32 (2) .776 3.5 1300 -- 655 164.0 1.9 85.8 8,840 -- 58.5 --
(Niobium) .920 3.9 1600 5.6 152 9.9 .12 86.0 7,480 1,336 73.5 11.34
(Tantalum) 1.84 8.0 1850 9.1 -- 1.1 0.013 82.5 3,590 395 55 8.85
__________________________________________________________________________
* See Table 7-1
Table 9A - Life Test Procedures
Test for leakage, capacitance and dissipation factor at 25.degree.C
initially. Heat to 85.degree.C and retest. Hold at temperature for
about 600 hours and then retest. Cool to 25.degree.C and retest.
Detailed test procedures were in accordance with Example 3
procedures and MILSPEC MIL-C-39003.
The samples were pre-aged at 15 volts bias at 85.degree.C through a
prior test for 410 hours prior to the tests reported here. The
samples were biased to 20 volts for these tests using a bias
circuit with a series resistance of 10-15 ohms.
Table 9B ______________________________________ Leakage (.mu.a)
______________________________________ Test Hours 0 hr. 590 hrs.
Temp. 25.degree.C 85.degree.C 85.degree.C 25.degree.C
______________________________________ NZT-6 (1) 5.6 12.4 40.1 7.0
(2) 17.0 47.6 94.6 19.5 NZT-9 (1) 2.5 14.0 10.5 2.5 (2) 1.9 14.8
18.4 2.5 (3) 1.5 7.8 10.0 2.0 NZT-16 (1) 32.5 200 432 65.6 (2) 47.0
167 343 58.7 Niobium 13.1 76.9 186 144 Tantalum 0.88 3.7 3.3 0.79
______________________________________
Table 9C ______________________________________ Capacitance (.mu.f)
______________________________________ Test Hours 0 hr. 590 hrs.
Temp. 25.degree.C 85.degree.C 85.degree.C 25.degree.C
______________________________________ NZT-6 (1) 34.0 44.0 39.0
31.6 (2) 50.0 62.0 56.0 47.0 NZT-9 (1) 36.1 46.0 42.0 35.0 (2) 32.1
46.0 41.0 31.0 (3) 38.1 61.1 45.6 36.0 NZT-16 (1) 83.0 102.0 94.0
80.0 (2) 56.0 53.0 58.0 52.0 Niobium 83.4 89.0 86.1 72.0 Tantalum
88.0 94.0 94.0 87.0 ______________________________________
Table 9D ______________________________________ Dissipation Factor
- DF(%) ______________________________________ Test hours 0 hr. 590
hrs. Temp. 25.degree.C 85.degree.C 85.degree.C 25.degree.C
______________________________________ NZT-6 (1) 14.5 26.5 17.0
15.0 (2) 13.0 22.5 14.0 16.5 NZT-9 (1) 13.0 23.0 16.0 18.0 (2) 12.0
25.0 19.0 14.0 (3) 9.0 20.5 12.0 5.0 NZT-16 (1) 19.0 31.5 18.5 12.5
(2) 12.0 17.5 8.5 6.0 Niobium 65.0 51.0 64.0 65.0 Tantalum 12.0
12.0 12.5 11.5 ______________________________________
It is seen from Table 9B that niobium and alloy composition NZT-16
increased substantially in leakage under test conditions, while
NZT-6 and NZT-9 did not increase. NZT-9 had the lowest leakage
approaching tantalum. Table 9C shows fairly stable capacitance and
DF for all samples tested. Data external to this table (e.g.,
leakage data) makes clear that the niobium capacitance and DF would
run away upon further life testing. There is some likelihood of
runaway for NZT-16 as well, but the likelihood is less certain.
EXAMPLE 5
Niobium, zirconium, titanium alloy powders of compositions
corresponding to data points 2, 5, 6, 9, 12, 13, 15, 16, 22, 24 of
FIG. 8 were prepared and sintered as anodes. These powders were in
a size range of -325 mesh, plus 5 microns (nominally 10 microns
Fisher Average Particle Diameter). X-ray diffraction analysis was
made of the powders per se, and also of samples made by crushing
the anodes, to detect crystal structure (including lattice
parameter) of the phases present in the material. The results are
shown in Table 10A. The procedure was repeated for fine powders
(nominally 4 microns F.A.P.D.) with varying levels of oxygen
contamination and the resultant data are shown in Table 10B. Table
10B also shows sintering temperature.
Table 10A
__________________________________________________________________________
X-Ray Analysis of Nominal 10 Micron F.A.P.D. Nb-Zr-Ti Alloys:
Crystalline Structure (and Lattice Parameter)
__________________________________________________________________________
Annealed Powder Sintered Anode Data Composition Major Second Major
Second Point At.% Nb-Zr-Ti Phase Phase Phase Phase
__________________________________________________________________________
2 33.3-33.3-33.3 BCC(3.39) none BCC(3.40) none 5 40 -40 -20
BCC(3.49) BCC(3.32) BCC(3.42) none 6 30 -40 -30 BCC(3.42) none
BCC(3.48) none 9 25 -50 -25 -- -- BCC(3.45) none 12 20 -60 -20
BCC(3.47) none BCC(3.42) none 13 15 -50 -35 -- -- BCC(3.46) none 15
40 -20 -40 BCC(3.35) none BCC(3.36) none 16 60 -20 -20 BCC(3.35)
none -- -- 22 10 -60 -30 BCC(3.48) HCP BCC(3.48) none 24 25 -25 -50
BCC(3.37) none BCC(3.38) none
__________________________________________________________________________
Table 10B
__________________________________________________________________________
X-Ray Analysis of Nominal 4 Micron F.A.P.D. Nb-Zr-Ti Alloys:
Crystalline Structure (and Lattice Parameter(s))
__________________________________________________________________________
Data Oxygen- Sinter Sintered Anode Point (Sample) ppm
Temp.-.degree.C Major Phase Second Phase
__________________________________________________________________________
6 8800 1100 BCC(Ao:3.41) none* 9 (1) ca. 6000 1000 BCC(3.45) none
(2) 9400 1100 BCC(3.45) none* 15 14,400 1100 BCC(3.34) BCC(3.45)*
16 (1) ca 6000 1000 BCC(3.34) HCP (Ao: 3.23, Co: 5. 10 (2) 6300
1100 BCC(3.33) HCP (Ao: 3.21, Co: 5. 12)
__________________________________________________________________________
*excepting contaminants, such as zirconium oxynitride and
oxycarbide.
Bcc: body centered cubic (Ao reported)
Hcp: hexagonal close packed (Ao, Co reported)
Although the 10 micron size powders of alloys (data points) 5 and
22 in Table 10A had second phases in powder form, they became
single phase materials in the course of sintering (which was
carried out at or above 1,000.degree.C for 30 minutes). But the
fine powder alloy (data point) 15 with high oxygen content and slow
cooling in Table 10B had a double beta (body-centered-cubic) phase
in anode form. Data point 16 also had a second phase -- an HCP
structure.
EXAMPLE 6
An extensive number of Nb-Zr-Ti alloy compositions were prepared by
sputtering thin films onto glass slides, anodizing the metal film
to 200 volts, testing heating to 300.degree.C for one-half hour and
testing again in the same manner as Example 1. The results are
shown in FIG. 9 which represents the DC leakage and FIG. 10 which
shows the thermal stability of capacitance over the entire ternary
phase diagram.
The results show that good anodic film properties (<10
.mu.a/cm.sup.2 at 140 V DC) extend over a wide range of
compositions beginning in the central region of the Nb-Zr binary,
through the central region of the Nb-Zr-Ti ternary and extending
toward the central region of the Zr-Ti binary. The region of high
thermal stability of capacitance is more localized near the center
of the Nb-Zr-Ti ternary with a narrow path extending toward the
central portion of the Zr-Ti binary and another narrow extension
toward the Zr corner of the ternary, representing equal portions of
niobium and titanium with increasing zirconium concentration.
While the results of sputtered film do not represent the
cyrstalline structures found in the bulk alloy such as annealed
sheet or powder or sintered porous anodes, they do show the effects
of chemical composition on the electrical properties of alloy
anodic films. For example, while the central portions of the
ternary and the Nb-Zr and Nb-Ti binaries displayed good DC leakage,
the same composition cannot be retained in bulk form because of
phase separation accompanied by compositional changes, unless an
extremely rapid quench of the high temperature modification of the
single BCC structure is used. Retention of the single BCC structure
is more easily accomplished in the bulk when the alloy composition
is removed from the Nb-Zr and Zr-Ti binary lines by about 10 atomic
percent. The trends shown by data afford approximations of what
will occur in bulk form.
While the present invention has been described with reference to
the particular embodiments thereof, it will be understood from the
above disclosure by those skilled in the art that numerous
modifications may be made without actually departing from the scope
of the invention. For instance, the invention contemplates the
ternary Nb-Zr-Ti alloy present alone or as part of a larger alloy
(or mixture) system of film-forming metals. Where the niobium is
substituted in any amount by tantalum and/or zirconium and/or
titanium is substituted in any amount by hafnium where these
substitutions are chemically similar to the components of the
Nb-Zr-Ti ternary. Less similar elements, such as vanadium,
molybdenum and tungsten, may be added up to 20 atomic percent of
the total system without severe degradation. Dissimilar elements,
such as iron, chromium and nickel, may be tolerated by as much as
1-5 percent. More dissimilar elements, such as noble metals,
alkali, and alkaline metals, etc., may be considered as true
impurities and should be less than 1 percent.
In its broadest aspects, the invention comprises a
niobium-zirconium-titanium ternary alloy of powder form suitable
for making capacitor anode or the like with the characteristic that
it is capable of forming or retaining an essentially homogeneous
crystal structure of a single phase although it is preferred and
distinctly advantageous that:
a. the single phase should be a beta (body-centered-cubic) phase,
which is more practicably attainable consistent with capacitor
powder preparation conditions, and/or
b. that the powder, per se, shall have single phase structure.
The powder is suitable for manufacturing into capacitor anodes
whether in single powder form, agglomerated form, pre-pressed or
pre-sintered preliminary compact form, or in the form of final
sintered anode compacts which can be re-crushed and remanufactured.
Therefore the appended claims are intended to cover all such
equivalents or variations as come within the true spirit of the
invention.
* * * * *