U.S. patent number 3,835,246 [Application Number 05/324,798] was granted by the patent office on 1974-09-10 for television display system for electromagnetic beam apparatus.
This patent grant is currently assigned to Siemens Aktiengesellschaft. Invention is credited to Georg Dollmeier, Karl-Heinz Muller, Volker Rindfleisch, Moriz Von Rauch, Dieter Willasch.
United States Patent |
3,835,246 |
Muller , et al. |
September 10, 1974 |
TELEVISION DISPLAY SYSTEM FOR ELECTROMAGNETIC BEAM APPARATUS
Abstract
An electromagnetic particle beam device, such as an electron
microscope, includes a fluorescent screen mounted in the focal
plane of the beam for providing a direct image a television camera
arranged behind a window in the flourescent screen separately picks
up and enlarges the part of the image which falls in the area of
the window to permit simultaneous viewing of an overall picture and
an electronically enlarged section of the picture.
Inventors: |
Muller; Karl-Heinz (Berlin,
DT), Rindfleisch; Volker (Berlin, DT), Von
Rauch; Moriz (Berlin, DT), Willasch; Dieter
(Berlin, DT), Dollmeier; Georg (Berlin,
DT) |
Assignee: |
Siemens Aktiengesellschaft
(Munich, DT)
|
Family
ID: |
5834691 |
Appl.
No.: |
05/324,798 |
Filed: |
January 18, 1973 |
Foreign Application Priority Data
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|
|
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Jan 28, 1972 [DT] |
|
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2204654 |
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Current U.S.
Class: |
348/80;
250/311 |
Current CPC
Class: |
H01J
37/224 (20130101) |
Current International
Class: |
H01J
37/22 (20060101); H01j 037/26 (); H04n
007/18 () |
Field of
Search: |
;178/6.8,7.2
;250/311 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Britton; Howard W.
Attorney, Agent or Firm: Kenyon & Kenyon Reilly Carr
& Chapin
Claims
We claim:
1. In apparatus of the type having a vacuum chamber and means for
generating a beam of electromagnetic particles, for directing the
beam at a specimen in the chamber, and for projecting the beam from
the specimen, an improved image display system comprising:
a first screen located within the chamber in the path of the
projected beam, the screen including material responsive to the
beam particles for producing an optical image of the specimen, the
material being distributed throughout the area of the screen except
for a window section which passes a portion of the projected beam
through the screen;
a television camera positioned behind the screen in the path of the
passed portion of the projected beam for picking up the portion of
the projected image that falls within the area of the window;
and
a television monitor connected to the television camera for
displaying the image portion picked up by the camera.
2. The apparatus of claim 1 further comprising:
a first window located in one wall of the vacuum chamber to permit
direct viewing of the first screen and
a second window located in a wall of the vacuum chamber within the
field of view through the first window, the television monitor
being positioned outside the chamber with its viewing screen
adjacent to the second window to permit simultaneous viewing of the
overall picture on the first screen and the portion of the picture
delineated by the window on the television monitor.
3. The apparatus of claim 1 wherein the first television camera
includes an entrance aperture having a layer of material responsive
to the beam particles for producing an optical image of the portion
of the projected image that falls within the area of the
window.
4. The apparatus of claim 3 wherein the area of the entrance
aperture of the first television camera is larger than the area of
the layer of material responsive to the beam particles for
producing an optical image, and the display system further
comprises a mirror positioned to reflect the overall image produced
on the first screen toward the area of the entrance area that is
not covered by the layer of material.
Description
BACKGROUND OF THE INVENTION
This invention relates to display systems for electromagnetic beam
apparatus such as electron microscopes.
When investigating objects by means of electromagnetic particle
beam apparatus, for instance, an electron microscope, one is
interested on the one hand, in studying the object to the most
detailed extent possible, but with increasing magnification, the
total area of the object that can be observed becomes smaller. If
one wishes to observe both the details and the area surrounding
them, it is necessary to use changing magnification. One way to do
this is to make and evaluate photographic pictures, which entails a
relatively large expenditure of labor and time.
SUMMARY OF THE INVENTION
The present invention facilitates the investigation of objects at
different magnifications using electromagnetic particle ray
apparatus, particularly an electron microscope, which has a
fluorescent screen for making the picture projected by the particle
ray visible, as well as an arrangement for viewing the picture by
means of a television camera and a television monitor. According to
the invention, the fluorescent screen has a window, and the
television camera is arranged in the beam path behind the window
for picking up the part of the picture that passes through the
window. This permits simultaneous viewing of an overall picture and
an electronically enlarged section of the picture.
In specific embodiments of the invention, the overall picture and
the enlarged section of the picture both can be presented to the
use on television monitors arranged for convenient viewing by
providing a separate television camera to pick up the picture
projected on the fluorescent screen. In addition, an observation
window can be provided in the wall of the vacuum chamber of the
apparatus to allow viewing the fluorescent screen directly, thus
avoiding any image degradation by the television transmission.
The picture projected on the fluorescent screen can be imaged by
means of a light-optical lens system on the entrance plane of a
television camera. In one embodiment, the television camera for
transmitting the enlarged section of the picture can be used by
arranging the ray paths of the overall picture and the picture
section so that the overall picture and the enlarged section each
occupy one-half of the entrance area of the camera. The advantages
of this arrangement are that only one transmission channel is
required and that the overall and the section picture appear on a
monitor side by side. Of course, the overall picture can also be
fed to the previously mentioned separate television camera, so that
the overall picture and the enlarged sectional picture appear on
separate monitors. In either case, the area corresponding to the
enlarged section (i.e., the window of the fluorescent screen)
appears dark in the overall picture.
At least one mirror may be arranged between the fluorescent screen
and the light-optical lens system for directing the overall picture
either out of the vacuum chamber into a television camera or within
the vacuum chamber toward the television camera which is common for
the overall picture and the enlarged sectional picture. It may be
advantageous for the arrangement of the light-optical lens system
and the mirrors to use a fluorescent screen which is
light-transparent (transmission-type fluorescent screen), but the
mirror and lens system can also be used to pick up and pass on the
picture projected on a reflection-type fluorescent screen. In the
latter case, the fluorescent screen is preferably arranged at an
angle to the axis of the corpuscular beam to obtain a more
favorable ray path.
Although the television monitor for reproducing the enlarged
sectional picture may be situated either directly next to the
corpuscular-ray apparatus or at any remote location, in one
embodiment of the invention the picture screen of the monitor is
located behind a second observation window in the direction of view
through the first observation window described above for viewing
the fluorescent screen. The overall picture and the enlarged
sectional picture are thereby presented in close physical
relationship for convenient viewing by looking directly at or into
the vacuum chamber of the apparatus. For this embodiment of the
invention the fluorescent screen is preferably hinged for rotation
in the direction of the first observation window to provide a more
favorable viewing angle or to pass the particle beam to a
photographic recording device mounted behind the fluorescent
screen.
In any of the above embodiments of the invention an additional
small fluorescent screen can be provided for closing the window of
the fluorescent screen on which the overall picture is produced so
that the entire picture can be viewed without the darkened section
caused by the window.
Particularly in conjunction with the embodiment of the invention
having two observation windows, it is desirable to provide a device
for indicating the scale of magnification arranged between the
second observation window and the fluorescent screen in such a
manner that it is always in the observer's field of view.
The invention will be explained more fully below with reference to
the following figures.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 shows an embodiment of an electron microscope with two
mirrors and one television camera.
FIG. 2 shows another embodiment having one mirror and two
television cameras.
FIG. 3 shows an embodiment similar to FIG. 2, in which the mirror
is located in front of the fluorescent screen.
FIG. 4 shows a further embodiment with two observation windows and
one television camera.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
FIG. 1 is a schematic drawing of an electron microscope 1 in cross
section. An electron beam 8 is generated by means of a cathode 2
and an anode cylinder 3 powered by a high-voltage source, not
shown. A magnetic condenser lens 4 focuses the beam on an object 5
which is then magnified by a magnetic objective lens 6 and imaged
by a projection lens 7 on a fluorescent screen 10. In the following
discussion, this image will be called the overall picture.
The fluorescent screen 10 has a window 12 through which can pass a
portion 9 of the electron beam representing a section of the
overall picture. The sectional beam 9 is directed toward a
television camera 13, which is equipped with an image intensifier
14 and fiber optics 15 having about half of its entrance area
provided with a fluorescent layer 16. This half of the entrance
area corresponds to the projection area of beam 9. The remaining
area 22 of the entrance end of fiber optics 15 is available for the
overall picture, which is transmitted to the television camera 13
in the following manner.
Fluorescent screen 10 is arranged at an angle to the axis of beam 8
and is a transmission-type fluorescent screen (i.e.,
light-transparent). A first mirror 17 located behind screen 10
reflects the image which is visible on the lower side of the
fluorescent screen approximately perpendicularly to the axis of the
electron beam. A second mirror 18 picks up the picture and deflects
it again approximately parallel to the direction of beam 9. The
overall picture is then imaged on the area 20 of the fiber optics
15 by a light-optical lens system 21.
Picture signals are therefore available at television camera 13 for
the overall picture as well as for the sectional picture. The
picture signals are fed to a television monitor 23 via suitable
amplifiers, not shown; the monitor shows the overall picture 24 and
the sectional picture 25, which appears as a dark area 26 in the
overall picture 24.
In the embodiment of FIG. 2 the parts arranged above the projection
lens are omitted, and parts which correspond to those of FIG. 1 are
labelled with the same reference symbols.
As in FIG. 1, a beam 8 produces an overall picture on fluorescent
screen 10, while a portion 9 passes through window 12 and furnishes
a sectional picture. However, in this embodiment the entire
entrance area of television camera 13 is available for this
sectional picture. Accordingly, fiber optics 15 is fully covered
with a fluorescent layer 16', and monitor 23 shows a sectional
picture 25' on the entire area of the picture screen.
In contrast to the embodiment of FIG. 1, a light-optical lens
system 21' is arranged in a wall 27 of the vacuum chamber of the
electron microscope. The overall picture reflected by mirror 17 is
therefore transmitted out of the vacuum chamber to a second
television camera 30 with an image intensifier 31 and fiber optics
32. The picture signals are amplified and fed to a second monitor
33, which shows the overall picture 24' on the entire picture
screen, the sectional picture again appearing as a dark area
26'.
An observation window 28 is arranged in wall 27 for direct viewing
of fluorescent screen 10. This same arrangement can be provided
also in the other illustrated embodiments if desired.
The embodiments of FIGS. 1 and 2 have transmission-type fluorescent
screens, the mirrors being arranged behind the screen, as seen in
the direction of the beam. Referring to FIG. 3, a reflection-type
fluorescent screen 16' can also be used in conjunction with a
mirror 17' arranged in front of the screen, as seen in the
direction of the beam. The arrangement of television cameras 13 and
30 and monitors 23 and 33 essentially corresponds with that in FIG.
2.
In FIG. 4 shows still another embodiment of the invention in an
electron microscope having a vacuum chamber housing 40, shown
partially in cross section, with a projection lens 41. The electron
beam 42 is directed toward a fluorescent screen 43 which is hinged
for rotation about an axis 44. The fluorescent screen 43 can be
observed directly through a first observation window 45 in one side
of housing 40. A second observation window 46 is set in the
opposite side of housing 40 with a television monitor 47 mounted
behind the second window. The observation windows 45 and 46 are
arranged so that an observer, whose eye is indicated at 50, can
view the fluorescent screen 43 as well as the picture screen of the
monitor 47.
The enlarged sectional picture which appears on the picture screen
of the monitor 47 is obtained by a television camera 51 located in
the path of electron beam 42 behind a window 52 in fluorescent
screen 43. An observer can therefore perceive simultaneously the
overall picture on fluorescent screen 43 and an enlarged section on
the picture screen of monitor 47.
If desired, a photographic recording device consisting of supply
and storage magazines for photographic plates with a transport
device for selectively placing the plates into the beam path can be
mounted behind the fluorescent screen in a known manner to permit
photographic records to be made by swinging the hinged screen out
of the way.
As an additional feature, window 52 of fluorescent screen 43 can be
closed by a second fluorescent screen 54 to permit viewing the
entire picture directly without the cutout section caused by the
window. In FIG. 4, fluorescent screen 54 is arranged behind
fluorescent screen 43, but the same effect can be obtained if the
additional fluorescent screen 54 is arranged in front of or is
inserted directly into the window. For any of these arrangements,
conventional mechanical devices, not shown, can be provided for
removably placing fluorescent screen 54 in the area of window 52.
As mentioned previously, the additional fluorescent screen can also
be used in the previously described embodiments.
A further feature of the embodiment of FIG. 4 is a device 53, for
indicating the scale of magnification of either or both pictures,
arranged between the second observation window 46 and fluorescent
screen 43 to be in the field of view defined by the first
observation window 45. The indicating device can have luminous
dials which give the scale of magnification as a numerical value.
Alternatively, the indicating device can be mounted outside the
vacuum chamber, for instance, in such a manner that it can be read
through the observation window 46.
For magnified viewing of fluorescent screen 43, a magnifying glass
55 is further indicated in FIG. 4. This magnifying glass may be
mounted in a fixed position or removably or in such a manner that
it can be directed onto any point of the fluorescent screen as
required. The screen can be swung up partially, as shown by the
dashed lines, so that it is perpendicular to the line of sight from
the magnifying glass to provide sharp focus for the overall
picture.
* * * * *