U.S. patent number 3,801,877 [Application Number 05/289,257] was granted by the patent office on 1974-04-02 for apparatus for producing a region free from interfering magnetic fields.
This patent grant is currently assigned to Institut Dr. Friedrich Forster. Invention is credited to Alfons Griese, Alfons A. Kalisch, Hans G. Luz.
United States Patent |
3,801,877 |
Griese , et al. |
April 2, 1974 |
**Please see images for:
( Certificate of Correction ) ** |
APPARATUS FOR PRODUCING A REGION FREE FROM INTERFERING MAGNETIC
FIELDS
Abstract
Magnetic field generating coils are arranged at opposite sides
of a region to be made free of interference magnetic fields along
each of the three coordinate axes. A set of field sensing probes or
transducers are also provided along the respective axes with
compensation coils to prevent interaction with the field generating
coils arranged along the other axes. As a further aspect, undesired
interaction of the probes with control circuits of other equipment
or devices being used in the region free from interference fields
is suppressed by installing at each of the probe locations one or
more compensating coils for nullifying the effect of these fields
on the probes. Optionally, control amplifiers may be manually
adjusted to compensate for fixed fields generated by other
equipment being used in the region.
Inventors: |
Griese; Alfons (Rommelsbach,
DT), Kalisch; Alfons A. (Reutlingen, DT),
Luz; Hans G. (Reutlingen, DT) |
Assignee: |
Institut Dr. Friedrich Forster
(Prufgeratebau, Reutlingen, DT)
|
Family
ID: |
23110731 |
Appl.
No.: |
05/289,257 |
Filed: |
September 15, 1972 |
Current U.S.
Class: |
361/146 |
Current CPC
Class: |
H01F
7/204 (20130101) |
Current International
Class: |
H01F
7/20 (20060101); H01f 013/00 () |
Field of
Search: |
;317/123,157.5 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Hix; L. T.
Attorney, Agent or Firm: Netter, Esq.; George J.
Claims
What is claimed is:
1. Apparatus for producing a space free from magnetic interference
fields within which space systems sensitive to interference fields
are located, such as electron microscopes, spectroscopes, and the
like, comprising:
probe means responsive to magnetic fields being located in the
space to be free from interference fields for receiving the sum
total of all the magnetic fields existing at the probe means
location, said probe means generating electric signals generally
proportional to the ambient magnetic field;
means connected with said probe means for generating an electric
current as a function of the sum total of all the magnetic fields
received by the probe means; and
coil means powered by the electric current for producing further
electric fields in directions and of respective magnitudes such
that the sum total of all the magnetic fields existing at the probe
means location is substantially zero.
2. Apparatus as in claim 1, in which the probe means are located in
the immediate vicinity of the systems sensitive to interference
fields.
3. Apparatus as in claim 1, in which the probe means are arranged
to sense magnetic fields preferentially along the directions of an
orthogonal set of coordinates and the coil means are arranged so
that magnetic fields generated thereby are directed along the
field-sensitive directions of the probe means.
4. Apparatus as in claim 1, in which interaction of the coil means
with the probe means is suppressed by the provision of compensating
winding means on said probe means, and means providing a current to
said compensating winding means of such polarity and magnitude as
to cancel out the interaction.
5. Apparatus as in claim 1, in which interactions of fields
produced by said systems sensitive to interference fields with the
probe means are suppressed by compensating winding means wound on
said probe means, and further means are provided for directing an
electric current through said compensating winding means of such
magnitude and polarity as to counteract the systems generated
fields.
6. Apparatus for eliminating interference magnetic fields from a
prescribed region in which field generating equipment is operated,
comprising:
first, second and third coil means arranged along the respective x,
y and z orthogonal axes of said region;
first, second and third magnetic field probe means located within
said prescribed region and each respectively arranged to sense
magnetic fields along one of the orthogonal axes of said
region;
individual processing circuits connected to said probe means for
providing electric signals substantially proportional to the
magnetic fields sensed by the associated probe means; and
separate amplifying means interconnecting each processing circuit
and the associated coil means for powering said coil means to
produce a magnetic field in said region cancelling interference
fields sensed by the probe means.
7. Apparatus as in claim 6, in which each probe means is provided
with compensating winding means, and an individually selectively
variable source of electric power is connected to each said
compensating winding means for cancelling out in each probe means
the effect of fields generated by the coil means located in the
other coordinate axes.
8. Apparatus as in claim 6, in which each probe means is provided
with compensating winding means, and an individually selectively
variable source of electric power is connected to each said
compensating winding means for cancelling out in each probe means
the effects of fields produced by said field generating
equipment.
9. Apparatus as in claim 6, in which there are provided first and
second compensating windings on each probe means, and individual
selectively adjustable electric power sources connected to each
compensating winding the adjustment of which effectively cancels
out for each probe means both the field effect of coil means in the
other coordinate axes and that of the field generating
equipment.
10. Apparatus as in claim 6, in which individual selectively
variable electric power source means are connected to each
amplifying means, individual adjustment of which compensates for
relatively constant interference fields.
11. Apparatus as in claim 6, in which capacitor means interconnect
each processing circuit with its associated amplifying means so
that current changes in the coil means are only produced on changes
in magnetic fields sensed by the probe means.
Description
FIELD OF THE INVENTION
The present invention relates generally to apparatus for producing
within a given region an environment free from interference
magnetic fields originating from external sources, and, more
particularly, to such apparatus for producing such a magnetic field
free region within which magnetically sensitive devices may be
operated.
There are many electrical apparatus having a high sensitivity to
ambient magnetic fields and which, if not compensated for in some
manner, severely influence the apparatus operation. For example,
modern electron microscopes have a very high resolution which under
ideal conditions can approach the theoretical limit of 2.3
Angstroms where by ideal conditions is meant that the region within
which the electron microscope is operated is substantially free
from all interfering externally generated magnetic fields, even the
magnetic field of the earth. The importance of this will be
appreciated when it is noted that magnetic fields as low as 0.5-1
millioersteds produce detectable deflections in the electron beam
of an electron microscope. With such apparatus constant
interference fields will only produce a displacement of the image
and can be compensated for as long as the relative orientation of
the interference field and the microscope are maintained unchanged.
However, a more serious problem is created when the interference
field is alternating, in that it will affect image definition and
in that way the ultimate resolution obtainable by the
microscope.
Moreover, it has been found that considerable distortion in color
is obtained in color television tubes when the electron beam is
shifted by even a very small amount, and, for this reason, those
involved in research and development of such picture tubes require
areas within which to work with the tubes that are free from
external magnetic fields. Similarly, spectroscopes must be free
from interference fields for optimal performance.
One method of suppressing interference fields for relatively large
enclosures in the past has been by shielding the regions against
external fields. This was done by enclosing the area with several
layers of a material such as mu-metal or some other highly
conductive metal. However, although this approach is satisfactory
for many situations, the cost can be objectionably high,
particularly where the shielded region is relatively large.
Another known technique for achieving a field-free region is to
arrange individual field generating coils, such as Helmholtz coils,
in the X, Y and Z coordinates encompassing the region. In addition,
separate field sensing probes are arranged along the same X, Y and
Z coordinates for detecting the presence of interfering magnetic
fields and controlling associated power circuits to the field
generating coils for producing a field counter to the interference
field. That is, the apparatus in accordance with this technique
senses the presence of an interfering magnetic field and an
oppositely directed field of the same magnitude is generated
thereby bringing the resultant field within the controlled region
to zero.
Although the counter field technique just described is
satisfactory, it has several serious drawbacks. First of all, the
field sensing probes must be located sufficiently far from the
monitored region to prevent interaction with the compensating coils
on the probes. That is, the probes are not measuring the field
within the magnetic free region alone, but a larger space that
includes the region. Moreover, although a remote location of the
sensors can be tolerated for relatively homogeneous interference
fields, such as the magnetic field of the earth, this may not be
possible where the fields are generated by such things as motors,
generators, or electric current conducting lines, for example.
Moreover, to operate satisfactorily, it is necessary that the probe
signals and associated circuitry driving the compensating coils be
very stable since any change in amplification of any one of the
probe channels could result in a severe unbalance in the system.
Finally, if the space or region to be maintained interference free
is to be monitored continuously, it is necessary in the practice of
this technique that special probes be installed within the space or
region, which is a disadvantage.
It is, therefore, a primary object and aim of the present invention
to provide apparatus for establishing a region or working space
that is free from interfering magnetic fields, all of which is
obtained inexpensively and reliably.
A further object is the provision of apparatus for producing a
magnetic field free region having field counteracting means
producing a resultant zero field within the region even where the
operational characteristics of the various apparatus component
elements vary within broad limits.
Another object is the provision of apparatus for producing a field
free region as in the above objects in which monitoring of
interference fields within the region can be accomplished
relatively easily and inexpensively.
A still further object is the provision of apparatus for creating a
region free from interfering magnetic fields in which field sensors
include compensation coils to obviate interaction with
counter-field generating coils.
In the practice of the present invention, magnetic field generating
coils are provided, arranged at opposite sides of the region to be
made free of magnetic field and along each of the three coordinate
axes. A set of field sensing probes or transducers are provided
having compensation coils to prevent interaction with the field
generating coils arranged along other axes.
As a further aspect, undesired interaction of the probes with
control circuits of other equipment or devices being used in the
region free from interference fields is suppressed by installing at
each of the probe locations one or more compensating coils which
nullifies the effect of these fields on the probes.
In yet another aspect of the invention, means are provided for
manually biasing control amplifiers to compensate for fixed fields
generated by other equipment being used in the region.
DESCRIPTION OF THE DRAWINGS
FIG. 1 shows in schematic form the apparatus of the present
invention illustrated particularly for the elimination of
interfering magnetic fields in a region including an electron
microscope.
FIG. 2 discloses a system similar to FIG. 1 including a modified
probe.
FIG. 3 depicts a means for producing dynamic control for either of
the versions of FIGS. 1 or 2.
DESCRIPTION OF PREFERRED EMBODIMENTS
Turning now to the drawings and particularly FIG. 1, there is
depicted in schematic form the circuit apparatus and coil
arrangement of the subject invention for providing a region
substantially completely free from interfering, externally
generated magnetic fields. More particularly, the region is seen to
include, for illustrative purposes only, in its central portion an
electron microscope vacuum cylinder 10 and a substantial volume
immediately adjacent thereto. The region being monitored and
treated by the apparatus to be described is encompassed by a
three-dimensional set of Helmholtz coils 11, including pairs of
coils 12, 13, 14, 15, 16 and 17, each pair aligned in one of the X,
Y and Z coordinate directions. That is, with reference to the
coordinate axes diagram, the coils 12 and 13, when energized will
provide a field parallel to the X-axis, coils 14 and 15 parallel to
the Y-axis, and coils 16 and 17 parallel to the Z-axis.
In addition, a set of X, Y and Z oriented magnetic field sensing
probes 18, 19 and 20 are located within the region to be maintained
free from interference fields and closely adjacent the cylinder 10.
Preferably, each of the probes 18-20 can include a magnetometer,
e.g., a flux-gate magnetometer which generates a signal of value
related to the strength of the magnetic field existing in the
direction of the respective probe axis. Signals from each of the
probes 18-20 are connected via leads 21, 22 and 23, respectively,
to processing circuits 24, 25 and 26 for producing signals
generally proportional to the probe signals The processing circuits
are connected to driving amplifiers 27, 28 and 29, the outputs of
which are fed over leads 30, 31 and 32, to the pairs of Helmholtz
coils for generating fields within the region opposite to that
detected by the probes. For simplicity of illustration, the
Helmholtz coils 12-17 have been shown as comprising a single turn,
however, it is to be understood that in a practical embodiment of
the invention, such coils will usually each comprise a considerably
larger number of windings.
The term Helmholtz, as applied to the various magnetic field
generating coils of this invention, refers to the fact that the
coils of each pair, i.e., 12 and 13 for the X-axis, are maintained
spaced at a distance substantially equal to the effective radius of
the coils. It can be shown that with such an arrangement the
magnetic field so generated is highly uniform throughout the space
between the coils.
Referring to the output from amplifier 27, for example, the leads
30 are seen to provide energizing power to each of Helmholtz coils
12 and 13 such that the magnetic field generated therein will have
a resultant field in a single direction normal to the planes of the
two fields and parallel to the X-axis. In a similar manner, closed
loop energization of the field generating coils for the Y- and Z-
axes is also available. It can be shown that if the probes are
maintained relatively close to the cylinder 10, the magnetic field
sensed by the probes will be substantially the same as that in the
vacuum cylinder 10.
Each of the pairs of the field generating coils, its associated
processing circuit and driver amplifier, form a closed loop system.
Using the X system as an illustration, if no interfering field is
present, and thus none sensed by the X probe 18, no signal is
applied to the processing circuit 24 or to the amplifier 27, so
that the X-axis Helmholtz coils 12 and 13 will not be energized. On
the other hand, when an interference magnetic field is detected by
the X probe 18, a signal of polarity corresponding to the direction
of the interference field will be applied to the processing
circuitry 24, which will produce at the output lines 30 of the
amplifier 27 a driving current applied to the Helmholtz coils 12
and 13 of such magnitude and in such direction as to direct a
magnetic field in the region of the vacuum cylinder 10 opposite to
that of the interference field. Specifically, the resultant of the
interference field with that generated by coils 12 and 13
responsive thereto, is ideally zero. Operation for the other axes
is the same. In the usual case, an interference field will not be
directed exactly along any of the orthogonal axes, but rather at an
angle thereto such that more than one probe is affected by the
respective interference field component.
It is important to note that changes in sensitivity of the probes,
amplification of the driver amplifiers, or field generating coil
efficiency have practically no influence on the resultant operation
of the described apparatus. There must, however, be sufficient
overall sensitivity and amplification in each of the closed loops
to provide counteraction for the lowest magnitude of interference
field that can adversely affect operation of other equipment in the
work region.
Although operation of the FIG. 1 embodiment is generally
satisfactory, certain difficulties are encountered in practical
operation. First of all, the magnetic field generating coils of one
coordinate axis may produce component fields in the probes of the
other coordinate axes, mainly because an accurate arrangement of
the probes cannot always be practically achieved. Also, when the
probes are located outside the region of uniform magnetic field of
the Helmholtz coils, the problem is accentuated.
Another problem arises from the fact that equipment operating
within the region being maintained free from interfering fields,
such as an electron microscope for example, frequently generates a
magnetic field of its own which is sensed by the probes and
interpreted thereby as an interference field resulting in a further
counteracting field being generated in the manner already
described. For example, typically, an electron microscope will
produce a magnetic field which at the outer surface of the vacuum
cylinder may attain a magnitude as great as 10 oersteds.
Accordingly, special measures must be taken when such equipment is
operated within the work region to obviate an erroneous counter
field being generated resulting from the detection of the equipment
generated field. A particularly effective technique for this
purpose and the one described herein, is the introduction of
compensating windings onto the probes.
Turning now to FIG. 2 of the drawings, probes 33, 34 and 35 for
monitoring the field condition in a given region, are assumed
oriented as in the FIG. 1 arrangement to detect fields parallel to
the X-axis, Y-axis and Z-axis, respectively. As before,
conventional electric connections are provided from these probes to
processing circuits 36, 37 and 38, the modulation of which are
individually controlled in a conventional manner by adjustment of
the devices 39, 40 and 41. The output of each of the processing
circuits 36-38 is fed via leads 42, 43 and 44 to power or driver
amplifiers 45, 46 and 47, which amplifiers, as in the first
described embodiment, generate currents functionally related to the
magnetic fields interacting with the respective probes 33-35.
Current from the amplifiers 45-47 is directed along leads 48, 49
and 50 to drive the X, Y and Z field generating coils 51, 52 and
53, the latter being shown schematically as a single turn each. One
lead of each of paired leads 48-50 includes a serially arranged
resistor 54, 55 and 56. The voltage drops produced in the resistors
54-56 by driving currents are applied across compensating windings
wound on the probes for each of the other two coordinate axes. That
is, the voltage drop across resistor 54 (which is in the X-axis
circuit) is applied through a variable resistor 57 to a
compensating winding 58 on the X probe, and also via a further
variable resistor 59 to a compensating winding 60 on the Z probe
35. Similarly, the voltage across resistor 55 in the circuit to the
Y coil is applied through variable resistor 61 to a compensating
winding 62 on the Z probe, as well as through a variable resistor
63 to a compensating winding 64 on the X probe. Finally, voltage
developed across resistor 56 by current powering the Z coils is
applied under control of the variable resistor 65 to a compensating
winding 66 on the X probe and via a variable resistor 67 to a
compensating winding 68 on the Y probe.
Three other compensation windings for the X, Y and Z probes,
respectively, are identified by the numerals 69, 70 and 71, and
which are fed by current from the field current of the equipment
being used, such as the field current of the magnetic lense system
of an electron microscope 72, for example. Threshold adjustment for
the windings 69-71 is under the individual control of variable
resistors 73, 74 and 75, specific adjustment of which will be
described.
Operation of the apparatus depicted in FIG. 2 is generally the same
as that in the embodiment of FIG. 1 already described, except that
compensation of stray field components detected by the probes from
operation of the different coils is achieved. Initially the three
separate closed circuits for the X, Y and Z coils are temporarily
disconnected at the lines 42, 43 and 44. Also, at this time, the
lens systems of the electron microscope 72 is turned off and only
one of the sets of Helmholtz coils is maintained in operation, the
X coil 51, for example. A prescribed amount of current is caused to
flow in the X coil 51 and the devices 40 and 41 are referred to to
determine if stray field effect is produced in either the Y or Z
probes as a result of the X field generation. Assuming that there
is such an interaction, then proper adjustment of variable
resistors 57 and 59 as well as insuring correct polarity by the
reversing connections to the terminals 76 and 77 if needed, will
zero the readings in the devices 40 and 41 whereby all effect of
the X coil field on the Y and Z probes is counteracted. This same
procedure is followed with respect to the other probes by
sequential energization of the Y and Z coils. By this technique
which can be referred to as "cross compensation," all effect of
components from the X, Y and Z coil magnetic fields on the probes
is eliminated.
For compensating or counteracting any fixed field generated by the
electron microscope 72, the leads 42-44 are temporarily
disconnected as before. When the electron microscope is switched
on, the devices 39-41 will experience a deviation from zero as a
result of the field produced by the microscope lens system. Zeroing
of the devices 39-41 is accomplished by individual adjustment of
the variable resistors 73, 74 and 75, and, where needed, reversal
of connection at terminals 78-80 to produce the correct polarity
for required compensation.
After initial calibration or compensation for stray fields from the
Helmholtz coils and from the equipment being used in the field-free
region (electron microscope), the leads 42, 43 and 44 are again
connected as shown in FIG. 2. The apparatus is now ready for
general use to counteract the effect of interference magnetic
fields generated by sources located externally of the region
encompassed by the Helmholtz coils.
In certain circumstances it may be possible to avoid interaction of
the probes with fields generated by the electron microscope by
locating the probes where the effect of the electron microscope's
field is minimal.
Another version of the invention for removing the influence of
relatively constant fields produced by equipment such as an
electron microscope, is that shown in FIG. 3. As illustrated there,
coupling capacitors 81, 82 and 83 are serially arranged,
respectively, between the processing circuits 36-38 and their
associated driver amplifiers 45-47. In addition, the input of each
amplifier 45-47 is connected via a manually adjustable slidewire
contact of a resistance potentiometer arranged across a D. C.
source: potentiometer 84, amplifier 45; potentiometer 85, amplifier
46; and potentiometer 86, amplifier 47. The remainder of circuit
apparatus can be the same as in FIG. 2.
Manual compensation for the field produced by the electron
microscope or other such equipment in the FIG. 3 embodiment is
effected by manually adjusting each of the slide-wire contacts of
the potentiometers 84-86 until zero is indicated on each of the
devices 39-41. After zeroing in this manner, the apparatus of the
invention is now fully compensated for all constant magnetic fields
existing at the location of the probes which, although it has been
assumed are generated by the electron microscope or other
equipment, can in actuality be any constant field such as, for
example, the magnetic field of the earth. The capacitors 81-83 in
conjunction with the input resistance of the respective amplifiers
45-47 form a time constant as is well known in the electronic arts.
It is advisable that the value of these capacitors be chosen in
order that the lower frequency limit be in the range 0.1 Hz, which
will exclude slower changes of magnetic field from being balanced
out by the system. However, since the measuring time required for
most electron microscope operation is usually below 10 seconds, a
frequency limit approximating the lower frequency limit specified
above is most feasible, while changes of magnetic field at a higher
rate which could impair resolution of the electron microscope will,
on the other hand, be satisfactorily controlled.
* * * * *