U.S. patent number 3,799,653 [Application Number 05/354,433] was granted by the patent office on 1974-03-26 for multi-layer anti-reflection coating.
This patent grant is currently assigned to Bippon Kogaku K.K.. Invention is credited to Hideo Ikeda.
United States Patent |
3,799,653 |
Ikeda |
March 26, 1974 |
MULTI-LAYER ANTI-REFLECTION COATING
Abstract
A non-absorbing, substantially colorless, multi-layer
anti-reflection coating for use on a substrate having an index of
refraction of 1.43 to 2.00 comprises a first layer of a low-index
filming material deposited on the substrate and having a thickness
less than .lambda./4, a second layer of a high-index filming
material deposited on the first layer and having a thickness of
less than .lambda./4, a third layer of a low-index filming material
deposited on the second layer and having a thickness approximately
between 5 .lambda./16 and 7.lambda./16, a fourth layer of a
high-index filming material deposited on the third layer and having
a thickness of less than .lambda./4, a fifth layer of a low-index
filming material deposited on the fourth layer and having a
thickness of less than .lambda./4, a sixth layer of a high-index
filming material deposited on the fifth layer and having a
thickness of more than .lambda./2, and a seventh layer of a
low-index filming material deposited on the sixth layer and having
a thickness of .lambda./4, wherein .lambda. is a selected
wavelength of near ultraviolet range to near infrared range.
Inventors: |
Ikeda; Hideo (Kamakura,
JA) |
Assignee: |
Bippon Kogaku K.K. (Tokyo,
JA)
|
Family
ID: |
12624779 |
Appl.
No.: |
05/354,433 |
Filed: |
April 25, 1973 |
Foreign Application Priority Data
|
|
|
|
|
Apr 26, 1972 [JA] |
|
|
47-42031 |
|
Current U.S.
Class: |
359/588 |
Current CPC
Class: |
G02B
1/115 (20130101) |
Current International
Class: |
G02B
1/11 (20060101); G02B 1/10 (20060101); G02b
005/28 () |
Field of
Search: |
;350/1,163-166
;117/33.3 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Young et al., Applied Optics, Vol. 5, No. 1, January, 1966, pp.
77-80..
|
Primary Examiner: Stern; Ronald J.
Attorney, Agent or Firm: Shapiro and Shapiro
Claims
I claim:
1. A non-absorbing, substantially colorless, multi-layer
anti-reflection coating for use on a substrate having an index of
refraction of 1.43 to 2.00 comprising:
a first layer of a low-index filming material deposited on the
substrate and having a thickness of less than .lambda./4;
a second layer of a high-index filming material deposited on said
first layer and having a thickness of less than .lambda./4;
a third layer of a low-index filming material deposited on said
second layer and having a thickness approximately between 5
.lambda./16 and 7 .lambda./16;
a fourth layer of a high-index filming material deposited on said
third layer and having a thickness of less than .lambda./4;
a fifth layer of a low-index filming material deposited on said
fourth layer and having a thickness of less than .lambda./4;
a sixth layer of a high-index filming material deposited on said
fifth layer and having a thickness of more than .lambda./2; and
a seventh layer of a low-index filming material deposited on said
sixth layer and having a thickness of approximate .lambda./4;
wherein .lambda. is a selected wavelength of near ultraviolet range
to near infrared range.
2. A coating according to claim 1, wherein the high-index filming
material is one of ZrO.sub.2, TiO.sub.2, Nd.sub.2 O.sub.3,
CeO.sub.2, TaO.sub.3, Ti.sub.2 O.sub.3, Pr.sub.6 O.sub.11, Ta.sub.2
O.sub.3.sup.. Pr.sub.6 O.sub.11 and InO, and the low-index filming
material is one of MgF.sub.2, SiO.sub.2, Na.sub.3 AlF.sub.6 and
LiF.
3. A coating according to claim 1, wherein the low-index filming
materials of said first, third, fifth and seventh layers are
identical and the high-index filming materials of said second,
fourth and sixth layers are identical.
4. A coating according to claim 3, wherein the low-index filming
material is MgF.sub.2 and the high-index filming material is
ZrO.sub.2.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to an anti-reflection coating comprising
seven thin layers.
2. Description of the Prior Art
It is known from German Pat. No. 742,463 (1943), for example, that
a multi-layer coating comprising in combination two or three
different stable materials deposited into thin layers of less than
.lambda./4 in thickness, where .lambda. is the wavelength of light,
can be equivalently expressed as a single-layer coating having a
value of refractive index between the maximum and the minimum
refractive index of the deposited materials and within the range
over which the refractive indices of the existing filming materials
vary with the variation in the wavelength of light, if the
wavelength range is represented by the concept of wave number range
(1-.sigma., 1+.sigma.), where .sigma. = .lambda..sub.s /.lambda.
for the standard wavelength .lambda..sub.s (usually 5500A).
Especially, it was taught by L. I. Epstein that a multi-layer
coating of symmetrical construction can be replaced by a
single-layer coating of equivalent refractive index according to
the theory of equivalent coating.
Such a property may be applied to a three-layer coating of the
construction substrate - .lambda. /4 - .lambda./2 - .lambda. /4 -
medium. If the layer adjacent the substrate is replaced by a
three-layer coating of equivalent refractive index and the
refractive index of the substrate-adjacent layer of the new
three-layer is selected to be the most suitable one for the
substrate, then there may be provided an anti-reflection coating
which will never be affected by the refractive index of the
substrate. This is disclosed in U.S. Pat. No. 3,432,225 (1969) and
U.S. Pat. No. 3,565,509 (1971).
Nowadays, with the diversified usages of photographic lenses, the
developments of optical instruments, the adaptation of
photosensitive materials for a wider band and the specialized
usages of such photosensitive materials, it has become essential to
reduce the reflection factor over a wide range from near
ultraviolet to near infrared. In order to provide an
anti-reflection coating with such a property, it would be
insufficient to express the refractive index of each layer in a
three-layer coating of the form substrate - .lambda./4 - .lambda./2
- .lambda./4 - medium simply by using the concept of alternate
layers, inasmuch as variations in the refractive indices of the
existing filming materials with respect to wavelength must at least
be taken into consideration. An anti-reflection coating will now be
considered in terms of its properties as a multi-layer coating,
with the construction of such coating regarded as a fundamental
periodic layer. For the convenience of description, the wavelength
range from a non-transmissive band to the next non-transmissive
band is referred to as the periodic width of the fundamental
periodic layer.
Here it is assumed that the uppermost layer of the fundamental
periodic layer which is adjacent the medium is composed of a
filming material having a lowest possible refractive index, such as
magnesium fluoride (MgF.sub.2), lithium fluoride (LiF) or cryolite
(Na.sub.3 AlF.sub.6), and that an intermediate layer adjacent the
uppermost layer is composed of a filming material such as zirconium
oxide (ZrO.sub.2), titanium oxide (TiO.sub.2) or scandium oxide
(Sc.sub.2 O.sub.3).
Generally, the periodic width of the fundamental periodic layer may
be improved by increasing the thickness of such layer. With this
method, however, performance is superior for perpendicular incident
rays but inferior for oblique incident rays. That is, the angular
characteristic is deteriorated.
In this case, the periodic width of the fundamental periodic layer
could be increased by slightly increasing the thickness of the
layer if the refractive index whose wave number range (1-.sigma.,
1+.sigma.) is in the vicinity of .sigma. = 0.3 - 0.35 could be
greatly increased or decreased with respect to the refractive index
in the center range (the "center" means that wave number equals
1).
SUMMARY OF THE INVENTION
The present invention aims at improving the anti-reflection coating
of the conventional type of the form substrate -.lambda./4 -
.lambda./2 - .lambda./4 - medium to increase the periodic band
width of the fundamental periodic layer.
According to the present invention, there is provided a
non-absorbing, substantially colorless, multi-layer anti-reflection
coating for use on a substrate having an index of refraction of
1.43 to 2.00 which comprises a first layer of a low-index filming
material deposited on the substrate and having a thickness of less
than .lambda./4, a second layer of a high-index filming material
deposited on the first layer and having a thickness of less than
.lambda./4, a third layer of a low-index filming material deposited
on the second layer and having a thickness approximately between
5.lambda./16 and 7.lambda./16, a fourth layer of a high-index
filming material deposited on the third layer and having a
thickness of less than .lambda./4, a fifth layer of a low-index
filming material deposited on the fourth layer and having a
thickness of less than .lambda./4, a sixth layer of a high-index
filming material deposited on the fifth layer and having a
thickness of more than .lambda./2, and a seventh layer of a
low-index filming material deposited on the sixth layer and having
a thickness of .lambda./4, wherein .lambda. is a selected
wavelength of near ultraviolet range to near infrared range.
The high-index filming material may be one of ZrO.sub.2, TiO.sub.2,
Nd.sub.2 O.sub.3, CeO.sub.2, TaO.sub.3, Ti.sub.2 O.sub.3, Pr.sub.6
O.sub.11, Ta.sub.2 O.sub.3.sup.. Pr.sub.6 O.sub.11 and InO.sub.2,
and the low-index filming material is one of MgF.sub.2, SiO.sub.2,
Na.sub.3 AlF.sub.6 and LiF. The low-index filming materials of the
first, third, fifth and seventh layers are identical and the
high-index filming materials of the second, fourth and sixth layers
are identical.
The low-index filming material may preferably be MgF.sub.2, and the
high-index filming material may preferably be ZrO.sub.2.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention will become fully apparent from the following
detailed description thereof taken in conjunction with the
accompanying drawings, in which:
FIG. 1 is a diagram showing the manner in which may be provided for
the wave number 0.7 by substituting for the substrate-adjacent
layer in a conventional three-layer coating of the form substrate -
.lambda./4 - .lambda./2 - .lambda./4 - medium;
FIG. 2 is a similar diagram for the wave number 1.3;
FIG. 3 is a diagram showing the manner in which improvement may be
provided for the wave number 0.7 by substituting for the
intermediate layer in said three-layer coating;
FIG. 4 is a similar diagram for the wave number 1.3;
FIG. 5 is a graph illustrating the spectral characteristics
provided by a five-layer coating of the form substrate - .lambda./4
- .lambda./4 - .lambda./4 - .lambda./2 - .lambda./4 - medium and
having the numerical data as given in Table I; and
FIG. 6 is a graph illustrating the spectral characteristics
provided by a seven-layer coating of the present invention having
the numerical data as given in Table II.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
The principles underlying the present invention will first be
described in detail.
When the refractive index of the uppermost layer adjacent the
medium in a coating of the conventional type substrate - .lambda./4
- .lambda./2 - .lambda./4 - medium is considered to be limited to
physico-chemically stable materials such as MgF.sub.2, LiF,
cryolite, etc., the intermediate layer has nothing to do with the
overall reflection factor in the center wavelength range, that is,
the intermediate layer becomes an "absent-layer," and therefore the
refractive index of the substrate-adjacent layer can be determined
by determining the residual reflection factor to be left in the
center wavelength range and by determining the refractive index of
the substrate.
Further, the refractive index of the intermediate layer, which has
so far been irrelevant, can be readily obtained by determining the
refractive index of the substrate-adjacent layer determined by the
center wavelength range; by determining the refractive index of the
uppermost layer adjacent the medium; and by determining the
residual reflection factor allowed in the marginal wavelength
range. This is disclosed in detail by French Pat. No. 1,005,866
(1952).
In order to further enhance the anti-reflection effect of the
anti-reflection coating of the described type which is determined
by the above-described method, there are the following two
alternative methods typically in the case of the reflection factor
for the wave number range of (0.7, 1.3) (.sigma. = 0.3).
1. To replace the substrate-adjacent layer by a layer of a higher
refractive index than that of the intermediate layer and having a
thickness of .lambda./4 + m.lambda./2, where m=1, 2, 3 and so
on.
2. To replace the intermediate layer by a layer of a lower
refractive index than that of the uppermost layer adjacent the
medium and having a thickness of .lambda./2 + m.lambda. , where
m=1, 2, 3 and so on.
The implementation of these two methods will be discussed with
reference to FIGS. 1 to 4.
In these figures, the coating employs the basic form substrate -
.lambda./4 - .lambda./2 - .lambda./4 - medium in which the
refractive indices are 1.4, 2.0 and 1.52 for the uppermost layer,
the intermediate layer and the substrate, respectively. The
refractive index of the substrate is herein assumed to be 1.52 but
the refractive index may be less than 1.52.
FIG. 1 shows the implementation of the method (2) for the wave
number 0.7; FIG. 2 shows the implementation of the method (2) for
the wave number 1.3; FIG. 3 shows the implementation of the method
(1) for the wave number 0.7; and FIG. 4 shows the implementation of
the method (1) for the wave number 1.3.
In these figures, reflection is represented according to the vector
expression.
The circle centered at the base point 0 of the vector represents
the range within which the reflection factor R is within 0.3%. In
other words, if the end of the composite vector lies within such
circle, the overall reflection is within 0.3%. Referring to FIG. 1,
the vectors designated by .alpha. show a case where the refractive
index of the substrate-adjacent layer in the three-layer coating is
varied, and the ends of those vectors are passed by a dashed line
p. The vector designated by .beta. shows a case where improvements
have been made by assuming 3 .lambda./2 and order of 1.5 (1.50 -
1.59) for the thickness and refractive index of the intermediate
layer, respectively. Similarly, in FIG. 2, the solid line vectors
commencing at 0 represent the conventional anti-reflection coating
of the form substrate - .lambda./4 - .lambda./2 - .lambda./4 -
medium. The dashed line p shows a case where the refractive index
of the substrate-adjacent layer is varied, and it is seen in this
case that the residual reflection factor R' is much greater than
0.3%. The vector designated by .beta. shows a case where the
refractive index of the intermediate layer is varied, and in this
case the residual reflection factor R.sub.opt is approximately
0.3%. Also similarly, in FIG. 3, the dotted line s shows a case
where the substrate-adjacent layer has a refractive index of
approximately 2.5 and a thickness of 3 .lambda./4. This is also the
case with FIG. 4. In both of FIGS. 3 and 4, the residual reflection
factor R.sub.opt can be made approximately 0.3%.
Although the two methods are available as described above, it will
be seen that the improvement provided by the method (1) is
preferable in view of the possible deterioration of the angular
characteristic resulting from the increase in the thickness of the
coating.
When, according to the method (1), the reflection in the center
range is eliminated in a coating of the form substrate -
3.lambda./4 - .lambda./2 - .lambda./4 - medium, there is
established the relation as suggested by A.F. Turner:
n.sub.3.sup.2 = n.sub.1.sup.2 n.sub.s (1),
where n.sub.1 is the refractive index of the uppermost layer,
n.sub.3 is that of the substrate-adjacent layer and n.sub.s is that
of the substrate.
Where some residual reflection factor R is left in the center
range, the equation (1) will become:
(1-.sqroot.R/1+.sqroot.R) n.sub.3.sup.2 = n.sub.1.sup.2 n.sub.s
(1'),
which determines the refractive index of the substrate-adjacent
layer in the center range. If, for example, the refractive indices
of the substrate, the uppermost layer and the intermediate layer
are 1.52, 1.39 and 2.0, respectively, then it will be seen that the
lowermost layer has a refractive index of 2.5 and a thickness of
3.lambda./4 in the marginal range of wave number (0.7, 1.3) and has
a refractive index of 1.67 and a thickness of 3.lambda./4 in the
center range.
In a coating of the form substrate - .lambda./4 - .lambda./2 -
.lambda./4 - medium, this means that the .lambda./4 layer adjacent
the substrate may be replaced by a layer of the above-described
refractive index and a thickness of 3.lambda./4.
Nevertheless, among the existing filming materials which are
physico-chemically stable, there can be found no material whose
refractive index is greatly variable with the great wavelength
variation as shown in the foregoing example (such as a material
having a refractive index of 1.67 in the center range and a
refractive index of 2.5 in the marginal range).
On the other hand, in the case previously described, it is
theoretically possible to satisfy the required great variation of
the refractive index for the wavelength by utilizing the great
variation in the equivalent refractive index expressed according to
the theory of equivalent coating introduced by Herpin and in the
equivalent refractive index expressed by the non-transmissive band.
In such case, the fact that the refractive indices in the visible
marginal range and in the near ultraviolet and near infrared ranges
are variable with respect to the refractive index in the center
wavelength range must be taken into account, and it is desirable
that the spectral characteristics represented by the equivalent
thickness and the equivalent refractive index should have a
symmetrical property about the center wavelength in the wavelength
range. This means that an assembly must be formed by a symmetrical
coating having a thickness substantially equivalent to p .lambda./4
where p is an integer.
From such a theory, it is possible to satisfy the above-described
property by a construction employing a combination of layers of p
.lambda./4 where p is an integer and to overcome the limitations
existing in the conventional form substrate - .lambda./4 -
.lambda./2 - .lambda./4 - medium.
Generally, however, it is not so simple to find the filming
materials whose refractive indices are suitable as the respective
layer required to provide said construction.
Such a problem may be satisfied by a method which will be described
hereinafter. By introducing a characteristic matrix IM which
expresses the electric and magnetic fields in the interior of the
coating in terms of the matrix, the electric field in the
multi-layer coating may be expressed by the product of the
characteristic matrices in the respective layers forming the
coating. The nature of such characteristic matrices makes the
refractive index symmetrical to some extent, but a multi-layer
coating which is symmetrical about its thickness can be replaced by
a certain equivalent single-layer coating within a range which
satisfies the relation given below. If suffixes a, b and c are used
to represent the substrate-adjacent layer, the intermediate layer
and the medium-adjacent layer in an ordinary three-layer coating,
then ##SPC1##
where g.sub.k = 2 .pi. n.sub.k d.sub.k /.lambda..sub.s .sup..
.lambda..sub.s /.lambda.,
where k represents a, b or c, n.sub.k is the refractive index,
d.sub.k is the thickness of the coating, and j is the imaginary
number unit (.sqroot.-1).
If there is a very little difference between the magnitudes of
n.sub.a and n.sub.c, the following rewriting may be possible:
n.sub.a = n.sub.c (1 + .DELTA.n/n.sub.c)
If the .DELTA. n/n.sub.c is of the order of 0.05, ##SPC2##
This may further be simplified as follows, by multiplying the
respective matrices by each other: ##SPC3##
where
H * = 2.pi. N*D*/.lambda..sub.s .sup.. .lambda..sub.s /.lambda.
If N is the equivalent refractive index of the symmetrical
three-layer coating,
N* .apprxeq. N(1 + .DELTA.n/n.sub.c) (4)
where the sign .apprxeq. means approximately equal to. Such N* is
referred to as the pseudo-equivalent refractive index of a
pseudo-symmetrical three-layer coating. Further, let ND be the
equivalent thickness of the three-layer coating and N*D* be the
pseudo-equivalent thickness of the pseudo-symmetrical three-layer
coating. Then, there is established the relation:
N*D* .apprxeq. ND (5)
these relations mean that the degree of freedom can be increased in
the combination of the limited existing filming materials which are
physico-chemically stable. It will thus be seen that, even in one
and the same filming material, the degree of freedom of the
expression of the equivalent refractive index can be increased by
utilizing the difference in refractive index arising from the
control of such factors as the degree of vacuum and temperature. As
is apparent especially from formula (4) above, it can be uniformly
increased or decreased by .DELTA.n/n.sub.c .times. 100(%) for the
respective wavelengths. In the marginal wavelength range as shown
in FIGS. 3 and 4, the refractive index greatly different from that
in the center wavelength range can determine the construction of a
three-layer coating which satisfies the required conditions by
relating it with the non-transmissive band in such marginal
wavelength range. In the symmetrical three-layer coating forming a
3.lambda./4 layer, let n.sub.u and n.sub.v be the refractive
indices of the substrate-adjacent layer and the next layer and
d.sub.u and d.sub.v be the thickness of three layers, respectively.
Then, under the condition that
{2n.sub.u d.sub.u + n.sub.v d.sub.v = 3.lambda./4
n.sub.u d.sub.u = n.sub.v d.sub.v
there is obtained and equation:
.vertline.cos g.sub.H .vertline. = n.sub.u /(n.sub.u + n.sub.v)
(6),
where g.sub.H = 2.pi.(n.sub.u d.sub.v
/.lambda..sub.s)(.lambda..sub.s /.lambda..sub.H),
where .lambda..sub.s /.lambda..sub.H = .sigma. and .lambda..sub.H
represents a wavelength in the wavelength range given as
1.25<.sigma. and 0.7>.sigma.. Thus, g.sub.H shows the
relation between n.sub.u and n.sub.v by equation (6). Meanwhile,
the value of the ideal refractive index of the substrate-adjacent
layer is obtained by the equation (1'), considering the residual
reflective index R within the center wavelength range. The
equivalent refractive index N to the ideal refractive index may be
expressed, as follows:
N=n.sub.u .sqroot.[n.sub.u n.sub.v sin Zg.sub.u cos g.sub.v +
(n.sub.v.sup.2 cos.sup.2 g.sub.u - n.sub.u.sup.2 sin.sup.2 g.sub.u)
sin g.sub.v /n.sub. u n.sub.v sin Zg.sub.u cos g.sub.v +
(n.sub.u.sup.2 cos.sup.2 g.sub.u - n.sub.v.sup.2 sin.sup.2 g.sub.u)
sin g.sub.v ] (6')
The values of n.sub.u and n.sub.v are determined from the above two
relations (6) and (6') or from the relation (6), (6') and (4).
There is thus provided a five-layer anti-reflection coating of the
form substrate - .lambda./4 - .lambda./4 - .lambda./4 - .lambda./2
- .lambda./4 - medium, which is a wide-band anti-reflection coating
effective for a wider range than the conventional three-layer
anti-reflection coating of the form substrate - .lambda./4 -
.lambda./2 - .lambda./4 - medium.
Some examples of the numerical data are given in the Table I below,
where n.sub.A represents the refractive index of the medium (air),
and n.sub.1 to n.sub.5 represent the refractive indices of the
successive layers beginning with the uppermost or first layer, and
n.sub.s represents the refractive index of the substrate.
Table I
a b medium n.sub.A = 1.0 n.sub.A = 1.0 .lambda./4 n.sub.1 = 1.39
n.sub.1 = 1.39 .lambda./2 n.sub.2 = 2.0 n.sub.2 = 2.1 .lambda./4
n.sub.3 = 1.62 n.sub.3 = 1.54 .lambda./4 n.sub.4 = 1.58 n.sub.4 =
1.39 .lambda./4 n.sub.5 = 1.64 n.sub.5 = 1.58 substrate n.sub.s =
1.58 n.sub.s = 1.74
The spectral characteristics provided thereby are illustrated in
FIG. 5 in which the ordinate is the refractive index and the
abscissa is wave length. The above forms the basic form of the
present invention.
However, such basic form would encounter the problems which will be
described hereinafter. Firstly, there are not always to be found
filming materials required to provide the most suitable
construction for several different refractive indices of the
substrate. Moreover, even if such combination was selected, the use
of four to five different filming materials would raise
inconveniences in practice and also, it would be difficult to
maintain a sufficient physico-chemical stability in these filming
materials.
To overcome such difficulties, a combination of only two stable
filming materials may be used by utilizing the fact that such
combination can express any desired refractive index between the
values of the refractive indices of the two materials.
According to the present invention, once the equivalent refractive
index and equivalent thickness of the symmetrical coating are
determined by the theory of equivalent coating, the thickness of
the respective thin layers are primarily determined by that
equivalent thickness so that no more room is left to consider the
dispersion of the refractive index. However, the variation in the
refractive index can be brought into consideration by introducing
the asymmetry with respect to the thickness. For example, in the
case of a three-layer coating of (n.sub.a,n.sub. a
d.sub.a)(n.sub.b,n.sub. b d.sub.b)(n.sub.(,n.sub. c d.sub.c), where
n.sub.a d.sub.a, etc. are optical thicknesses, asymmetry may be
introduced with the aid of a variation .DELTA.d which is derived
from the relation that d.sub.a =d.sub.c .+-..DELTA.d. Of course,
.DELTA.d=0 means the provision of a symmetrical coating.
From this fact, it follows that the aforesaid basic form of
five-layer coating can be expressed in terms of a seven-layer type
of coating by using two different types of physico-chemically
stable materials.
An example of this will be shown below.
A five-layer coating of the form substrate - .lambda./4,n.sub.1 -
.lambda./4, n.sub.2 - .lambda./4,n.sub.3 - .lambda./2,n.sub.4 -
.lambda./4,n.sub.5 - medium may be made into a nine-layer coating
by substituting a symmetrical three-layer coating for the
substrate-adjacent layer (.lambda./4,n.sub.1 layer) and the third
layer (.lambda./4,n.sub.3 layer), respectively. If the refractive
index alone is considered with the thickness neglected, such
nine-layer coating may be expressed as: substrate -n.sub.11
-n.sub.12 -n.sub.13 -n.sub.2 -n.sub.31 -n.sub.32 - n.sub.33 -
n.sub.4 - n.sub.5 - medium. Here, by establishing the relations
that n.sub.11 =n.sub.13 =n.sub.2 =n.sub.32 =n.sub.5 and n.sub.12
=n.sub.31 =n.sub.33 =n.sub.4 and by substituting single layers for
the two third and fourth layers (n.sub.13 and n.sub.2) and the two
seventh and eighth layers (n.sub.33 and n.sub.4) respectively, the
nine-layer coating may be made into a seven-layer coating.
Such seven-layer coating can be realized by employing a low-index
material such as magnesium fluoride (MgF.sub.2), lithium fluoride
(LiF), silicon oxide (SiO.sub.2) or cryolite and a high-index
material such as titanium oxide (TiO.sub.2), zirconium, tantalum
oxide (TaO.sub.3), indium oxide (InO.sub.2) or the like.
According to the present invention, each thickness of the first to
seventh successive layers beginning with the uppermost medium
adjacent layer ranges as follows: ##SPC4##
Table II below shows numerical data where ZrO.sub.2 (refractive
index 2.0) is employed as the high-index material and MgF.sub.2
(refractive index 1.39) as the low-index material. In Table II, the
thicknesses are all expressed in the unit of standard wavelength
(.lambda..sub.s), and the first to seventh layers mean the
successive layers beginning with the uppermost layer. The spectral
characteristics provided by the combination as shown in Table II
are illustrated in FIG. 6.
When a combination of other materials is desired it can readily be
provided by expressing the equivalent refractive indices by the use
of other materials according to the relation shown in Table II.
Also, since the thicknesses of the respective layers for the
various types of substrate shown in Table II are linearly
correlated with one another, it will be apparent that the same
result can be achieved not only for a substrate of optical glass
but also for a substrate of single crystal such as CaF.sub.2, MgO
or the like or for a substrate of any other refractive index.
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