U.S. patent number 3,789,470 [Application Number 05/156,930] was granted by the patent office on 1974-02-05 for method of manufacture of display device utilizing gas discharge.
This patent grant is currently assigned to Fujitsu Limited. Invention is credited to Kentaro Kiyozumi, Norihiko Nakayama, Kenichi Owaki.
United States Patent |
3,789,470 |
Owaki , et al. |
February 5, 1974 |
METHOD OF MANUFACTURE OF DISPLAY DEVICE UTILIZING GAS DISCHARGE
Abstract
Each of a pair of spaced glass insulating substrate components
has a plurality of mutually isolated conductive electrode layers on
a surface thereof. Each surface faces the other and each plurality
of electrode layers face the other. A layer of insulating material
is applied to cover the electrode layers on each surface. A
plurality of spaces are etched in a second layer of insulating
material. The second layer is positioned between and joins the
first layers of insulating material with the spaces between such
layers sealed air tight, so that ionizable gas fills the
spaces.
Inventors: |
Owaki; Kenichi (Akashi,
JA), Kiyozumi; Kentaro (Akashi, JA),
Nakayama; Norihiko (Akashi, JA) |
Assignee: |
Fujitsu Limited (Kawasaki,
JA)
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Family
ID: |
12580366 |
Appl.
No.: |
05/156,930 |
Filed: |
June 25, 1971 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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832062 |
Jun 11, 1969 |
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Foreign Application Priority Data
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Jun 12, 1968 [JA] |
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43-40428 |
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Current U.S.
Class: |
445/25; 313/586;
216/4 |
Current CPC
Class: |
H01J
11/00 (20130101) |
Current International
Class: |
H01J
17/49 (20060101); H01j 009/18 () |
Field of
Search: |
;316/19,20,17,24
;29/25.11,25.13,25.15,25.16 ;313/201,220,221 ;156/3,17
;315/169 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lanham; Charles W.
Assistant Examiner: Davie; J. W.
Attorney, Agent or Firm: Curt M. Avery et al.
Parent Case Text
This application is a Continuation-in-Part of application Ser. No.
832,062, filed June 11, 1969 for "Display Device Utilizing Gas
Discharge", now abandoned.
Claims
We claim:
1. A method of manufacture of a display device utilizing gas
discharge and having a pair of basic plates of insulating material
at least one of which is transparent, each having a primary surface
and a plurality of conductive electrode layers formed on each
primary surface and covered by an insulating layer, a portion of
insulating material being provided between the insulating layers to
form a plurality of spaces therebetween, said method comprising the
steps of forming a first layer of metal compound insulating
material covering the conductive layer on the primary surface of
each of the basic plates; forming a second layer of metal compound
insulating material on the first insulating layer of at least one
of the basic plates, the metal compound insulating material of the
second layer being susceptible to a higher etching speed than the
metal compound insulating material of the first layers in the same
etchant condition; etching the second insulating layer throughout
its thickness in a predetermined pattern to provide a plurality of
spaces therethrough; and sealing both basic plates in a condition
that the conductive layers on the primary of each of the basic
plates face each other so as to enclose ionizable gas in the spaces
formed through the second insulating layer.
Description
DESCRIPTION OF THE INVENTION
The present invention relates to a display device. More
particularly, the invention relates to a method of manufacture of a
display device utilizing gas discharge.
A neon tube type display device is well known as a display device
utilizing gas discharge. The neon tube type display device
comprises a plurality of coplanarly disposed gas discharge tubes.
Each gas discharge tube of the display device comprises a pair of
electrodes in a hermetically sealed space, hereinafter referred to
as a cell, filled with an ionizable gas such as, for example, neon,
under pressure. When a signal having a magnitude greater than a
discharge initiating voltage is applied between the electrodes of a
cell, a glow discharge is initiated.
Since the glow discharge continues during the entire period of
application of the signal, even if the applied signal is AC rather
than DC, it is very convenient that each discharge be facilely
operated for display purposes. When a number of cells are joined in
a single sheet or panel, however, in a panel type arrangement, it
becomes necessary to separate the cells not only electrically, but
also physically, in order to eliminate uncertainity of discharge
caused by non-uniformity of the discharge characteristics of the
cells. The cells are considered to be independent of each other
although they are not separated by walls.
It has been suggested that, in order to overcome the aforedescribed
disadvantage, th electrodes of each cell be provided outside the
cell in order to provide a capacitive reactance between each of the
electrodes and the envelope of the cell interposed between the
electrodes. The capacitive reactance separates the cells in a panel
from each other electrically. In such a device, a voltage having a
high frequency of several tens of megahertz is applied between the
electrodes of a cell, so that an electric field varying at high
speed is produced within the cell and ionizes the gas filling the
cell to produce a continuous discharge. The disadvantage of such a
device is that it requires signals of very high frequency and high
voltage in order to operate as desired, so that its components are
complex and of large size.
It has also been suggested that a physical structure similar to
that of the foregoing device be utilized, which has a wall charge
due to the discharge of the cell. The wall charge is an electrical
charge deposited on the inner surfaces of an envelope on the sides
of the electrodes. The advantage of this device is that the pulse
discharge may be produced by AC signals having a relatively low
frequency and a relatively low voltage.
An object of the invention is to provide a method of manufacture of
a display device utilizing gas discharge which has great mechanical
strength and low firing potential.
An object of the present invention is to provide a method of
manufacture of a display device utilizing gas discharge which is
discharged by a voltage of relatively low magnitude and
frequency.
An object of the present invention is to provide a method of
manufacture of a display device utilizing gas discharge which
comprises cell walls of smaller thickness than glass.
An object of the present invention is to provide a method of
manufacture of a display device utilizing gas discharge which
comprises cell walls of greater dielectric constant than glass.
Another object of the invention is to provide a single method of
manufacture of a display device utilizing gas discharge which has
uniform electrical characteristics.
Another object of the invention is to provide a method of
manufacture of a display device utilizing gas discharge which is
free from secular deterioration.
Another object of the present invention is to provide a method of
manufacture of a display device utilizing gas discharge which is of
simple structure, but operates with efficiency, effectiveness and
reliability.
In accordance with the invention, a method of manufacture of a
display device utilizing gas discharge and having a pair of basic
plates of insulating material at least one of which is transparent,
each having a primary surface and a plurality of conductive
electrode layers formed on each primary surface, and covered by an
insulating layer, a portion of insulating material being provided
between the insulating layers to form a plurality of spaces
therebetween, comprises forming a first layer of metal compound
insulating material covering the conductive layer on the primary
surface of each of the basic plates. A second layer of metal
compound insulating material is formed on the first insulating
layer of at least one of the basic plates. The metal compound
insulating material of the second layer is susceptible to a higher
etching speed than the metal compound insulating material of the
first layers in the same etchant condition. The second insulating
layer is etched throughout its thickness in a predetermined pattern
to provide a plurality of spaces therethrough. Both insulating
plates are sealed in a condition that the conductive layers on the
primary of each of the basic plates face each other so as to
enclose ionizable gas in the spaces formed through the second
insulating layer.
In order that the present invention may be readily carried into
effect, it will now be described with reference to the accompanying
drawings, wherein:
FIG. 1 is an exploded perspective view of an embodiment of a
display device of known type;
FIG. 2 is a sectional view, taken along the lines II -- II, of FIG.
1;
FIG. 3 is a circuit diagram illustrating the electrical equivalent
of the embodiment of FIG. 1;
FIG. 4 is a sectional view of an embodiment of the display device
manufactured by the method of the invention and corresponds to FIG.
2;
FIG. 5 is a part perspective, part sectional view, of part of
another embodiment of the display device manufactured by the method
of the invention; and
FIG. 6 is a sectional view of the embodiment of FIG. 5.
In the FIGS., the same components are identified by the same
reference numerals.
The known device of FIG. 1 has a wall charge due to the discharge
of the cell. In FIG. 1, a thin glass plate 1 has a plurality of
small holes 101, 102, 103, 104, and so on, formed therethrough in a
regular matrix-like pattern. Each of the holes 101, 102, and the
like, functions as the principal portion or envelope of a cell.
A thin glass plate 2 has a plurality of parallel, equidistantly
spaced, electrodes of equal widths 201, 202, 203 and 204 formed
thereon. The electrodes 201, 202, 203 and 204 are called X
electrodes and comprise thin strips of electrically conductive
material on the surface of the plate 2 opposite that which faces
the plate 1. The X electrodes are positioned in correspondence with
the correspondingly aligned ones of the holes through the plate
1.
A thin glass plate 3 has a plurality of parallel, equidistantly
spaced, electrodes of equal widths 301, 302, 303 and 304 formed
thereon. The electrodes 301, 302, 303 and 304 are called Y
electrodes and comprise thin strips of electrically conductive
material on the surface of the plate 3 opposite that which faces
the plate 1. The Y electrodes are perpendicular to the X electrodes
and are positioned in correspondence with the correspondingly
aligned ones of the holes through the plate 1.
The X and Y electrodes may comprise transparent conductive films
such as, for example, thin gold films or Nesa films. The three thin
glass plates 1, 2 and 3 of the display device of FIG. 1 are
positioned in the order shown and are in abutment with each other
in the manner shown in FIG. 2. Each of the holes 101, 102, and so
on, is evacuated and an ionizable gas such as, for example, helium,
neon, or a mixture of either with a small amount o nitrogen, is
sealed therein after the plates 1, 2 and 3 are hermetically sealed
together.
FIG. 2 illustrates the cells formed by the holes 101, 102, 103 and
104. Each of the holes is surrounded by glass of the plates 1, 2
and 3. A voltage is applied to each of the cells formed by the
holes 101, 102, 103 and 104 via each of the X electrodes 201, 202,
203 and 204 and the Y electrode 301.
Each of the cells, between its X and Y electrodes, functions as
three series-connected capacitors. The capacitors C1 are formed of
the capacitances between the glass plates 2 and 3 and the capacitor
C2 is formed of the capacitance of the cell.
If a specific AC voltage, divided in accordance with the capacitive
reactances of the capacitors shown in FIG. 3, is applied to the
cell 101, for example, and said voltage attains a specific
magnitude, the gas filling said cell breaks down, is ionized, and
produces a discharge and light emission. If the dimensions of the
cell are relatively small and the frequency of the applied voltage
is relatively low, charged particles produced by the discharge move
toward the cell walls of the side of either electrode of opposite
polarity and are deposited on the wall surfaces. The charges
adhering to the wall surfaces are known as wall charges. The wall
charges produce between the walls a voltage having a polarity
opposite that of the applied voltage, so that the discharge
disappears.
During the next half cycle of the applied AC voltage, the voltage
resulting from the wall charge produced by the previous discharge
is present in the cell. The voltage resulting from the wall charge
is known as the wall voltage. Therefore, when the sum of the wall
voltage and a distributed voltage due to the applied voltage
reaches a discharge magnitude, the cell discharges again. Such
discharge produces between the two wall surfaces a wall voltage
opposite in polarity to that previously produced. The later
discharge causes the earlier discharge to disappear in a short
time. The process of discharge, production of wall charge and wall
voltage and disappearance of discharge is thus repeated for each
half cycle of the applied voltage.
More particularly, the cell discharges when a voltage having a
magnitude equal to the discharge initiation magnitude is applied to
said cell from the outside. Thereafter, however, due to the
existence of the wall voltage, the cell maintains an intermittent
discharge due to the application of a voltage having a magnitude
which is less than the discharge initiation magnitude. The lower
magnitude voltage may be called a sustaining voltage. If the
continuing condition of intermittent discharge is called the ON
condition, and the inoperative condition is called the OFF
condition, a display device having a plurality of cells may be made
by the sustaining voltage to store the ON condition previously
written-in by the application of the discharge initiating voltage
from outside the cells.
In order to terminate the discharge, however, and to change
condition to the OFF condition, the applied voltage must be of
sufficiently high frequency, compared to the speed of movement of
the charge particles within the cell, to halt the production of the
wall voltage by the discharge. With the aforementioned property,
the device of FIG. 1 may be sufficiently utilized as a display
device having a memory function.
In the aforedescribed device of FIG. 1, it is desirable that the
discharge voltage of the cell be as low as possible. When the
plates 1, 2 and 3 are glass, however, it is difficult to make the
thickness of said plates equal to or less than about 0.15 mm. due
to manufacturing limits. It is therefore impossible to decrease the
magnitude of the applied voltage required for discharge to less
than 200 to 500 volts. The discharge voltage is not only related to
the thickness of the glass plates 1, 2 and 3, however, but also to
the type of gas filling the holes or spaces and the pressure of
said gas. Even when the gas and its pressure are considered, it is
difficult to provide a voltage having a magnitude less than that
mentioned. If the plates 2 and 3 are made of a material having a
large dielectric constant, the voltage of the cell may be
increased, although the applied voltage remains the same. As long
as the plates are glass, however, there is very little prospect for
improvement.
In accordance with the invention, and as shown in FIG. 4, the first
insulating layers 6 and 11 and the second insulating layer 7 are
formed of different metal compounds. The metal compound insulating
material of the second insulating layer 7 is susceptible to a
higher etching speed than the metal compound insulating material of
the first insulating layers 6 and 11.
FIG. 4 illustrates the display device manufactured by the method of
the invention. In FIG. 4, a transparent glass plate 4 has a
thickness which is sufficient to withstand normal handling in
manufacture and the difference in pressures within the cell and
without. A plurality of X electrodes are formed on a surface of the
plate 4. The X electrodes comprise thin gold films on Nesa films. A
layer 6 of silicon nitride covers the X electrodes. The layer 6 may
be formed by sputtering to a thickness of about 10 microns. The
layer 6 may be formed by any suitable process such as, for example,
evaporation or screen printing, well known in the thin film and
thick film arts, when a process other than sputtering is
required.
A plurality of spaced portions or layer segments 7 of silicon oxide
are formed on the layer 6 of silicon nitride. The spaces 8 between
adjacent spaced portions 7 of silicon oxide function as the cells.
The portions or layer segments 7 have a thickness of approximately
several microns. From a practical point of view, it is difficult to
form the silicon oxide layer segments 7 with the cells 8 formed
therebetween, from the beginning. The layer segments 7 are formed
by a photo-etching process known in the semiconductor art, as shown
in FIGS. 4 and 5.
In a known photo-etching process, silicon oxide is sputtered over
the surface of the layer 6 and forms a layer 7. A photoresistive
material is coated on the layer 7. The photo-resistive material is
irradiated by light after a mask is placed on said material in the
configuration and arrangement of the cells. The portion of the
photoresistive material corresponding to the cells is protected
from the light by the mask and is dissolved by an applied organic
solvent. The portions of the photoresistive material uncovered by
the mask are hardened by exposure to the light and remain as the
layer or portion 7.
The layer is then immersed in an etchant of hydrofluric acid and
ammonium fluoride, so that the parts of the silicon oxide which
correspond to the cells 8 are etched out. The silicon nitride layer
6 stops the progress of the etchant. When the etchant reaches the
silicon nitride layer 6, said layer is removed from said etchant
and said layer is washed with water. Since the etchant reacts much
more rapidly with the silicon oxide than with the silicon nitride,
the depth of cells 8 is generally uniform, even if there is a
difference in the speed of etchant reaction in the areas
corresponding to the different ones of said cells. The layer is
then immersed in hot sulfuric acid at 180.degree.C to remove the
exposed photoresistive film remaining on the silicon oxide layer 7.
The layer is then washed with water and dried. The cells are then
completely formed.
When the first insulating layers 6 and 11 are of aluminum oxide and
the second insulating layer 7 is of silicon oxide, the attainable
ratio of etching speeds is 1:10. This enables uniform spaces or
cells 8 to be easily formed through the silicon oxide layer 7.
The silicon oxide layer or portion 7 is covered by a glass plate 9,
similar to the glass plate 4, having Y electrodes 10 formed
thereon. The Y electrodes are transparent conductive parallel
strips of film equidistantly spaced from each other and of equal
widths. The Y electrodes 10 extend perpendicularly to the X
electrodes 5. The Y electrodes 10 are covered by a layer 11 of
silicon oxide which abuts the layer 7. The Y electrodes 10 are
formed on a surface of the glass plate 9 which faces the surface of
the glass plate 4 on which the X electrodes 5 are formed.
After the complete device is assembled, with its next-adjacent
parts in abutment with each other, and then sealed airtight from
the atmosphere or hermetically sealed, thereby sealing the cells 8,
the cells 8 are evacuated and filled with ionizable gas. Said
sealing process may be performed by any suitable means such as, for
example, the application of glass having a low melting point or
another suitable bonding agent to the peripheral areas of said
device.
The display device of the present invention is very strong in
structure and has great mechanical strength. The mechanical
strength of the device may be increased by utilizing glass plates 4
and 9 of relatively great thickness. Due to the utilization of
insulation comprising silicon compounds in the display device of
the invention, the first insulating layers may be very thin and
very narrow wall spaces may be provided for the cells, due to their
formation by sputtering. This permits the considerable decrease of
the discharge voltage and is unattainable with known types of
display device utilizing glass insulation.
Although silicon compounds are illustrated as the insulating
materials in the described embodiment of the invention, said
insulating materials may comprise aluminum oxide, titanium oxide,
tantalum oxide and barium titanate having large dielectric
constants. The insulating material may thus generally comprise
metal compounds. When compounds of titanium and tantalum having
large dielectric constants are utilized as the insulating material,
the voltage distributed and applied to the cells from the applied
voltage may be increased.
The insulating layers may be formed by the evaporating process as
well as by sputtering, and, if necessary, may be formed by a
process involving pyrolysis of metal compounds, as hereinbefore
described, or a screen printing process. The screen printing
process may be utilized to facilely form layers of greater
thickness relative to those formed by other processes, and may
therefore be utilized to advantage in forming cells having
relatively large spaces between their walls, relative to the
pressure of the gas sealed therein.
As is known in the art, the relationship between the sealed-in gas
in the cells and the discharge gap may be expressed as
Vf = f(p,d)
or Vf is a function of p and d, or Paschen's Law, wherein Vf is the
discharge voltage, p is the pressure of the gas in the cell and d
is the length of the discharge gap.
As stated herein, it is difficult to decrease the discharge voltage
in the known method by means other than a thin glass plate
comprising three thin sheets of glass. Since a thicker glass basic
plate may be utilized in the method of the invention, breakage may
be eliminated.
The discharge voltage of the display device produced by the method
of the invention depends upon the length d of the discharge gap, as
indicated in the aforedescribed relation. Accordingly, the depth of
the cell or space 8 is uniform throughout the display device. A
difference in the depth of the cells or spaces 8 results in an
erroneous address, so that the quality of the display device is
inadequate if there are differences in such depths. Cells or spaces
having uniform depth may be produced, however, by the method of the
invention, due to the differences in the speed of etching in the
different materials of the first and second layers. The resultant
display device thus has uniform electrical characteristics.
Insulating material utilized for the first insulating layers
covering the electrodes may comprise solder glass. However, ion
bombardment produces sputtering in discharge, since a large
quantity of lead oxide is present in the solder glass. This results
in the disadvantage of lead being deposited as a black coating on
the inside surfaces of the device. This effect worsens as the
discharge voltage increases with operating time, thereby shortening
the life of the display device. In accordance with our invention,
the method of manufacture produces a display device utilizing
aluminum oxide or silicon nitrate, in which there is little
likelihood of sputtering phenomena, as the first insulating layers
on the inside surfaces of the device.
The desired layers of insulation may be formed by the screen
printing process by first forming electrodes comprising transparent
conductive films on a glass substrate. A silk screen or stainless
screen having a formed pattern therein in accordance with the
dimensions, shape and arrangement of the cells is placed on the
electrodes. A roller coated with insulating paste is utilized to
print said paste in the form of the pattern. The paste pattern is
then fired and hardened. The insulating paste may comprise an
organic binder and a solvent added to the insulating metal
compounds of the aforedescribed types, and has a muddy consistency.
Chemicals, such as etchants and photoresistive materials, may be
arbitrarily selected and utilized.
FIGS. 5 and 6 illustrate another embodiment of the display device
of the invention. In the embodiment of FIGS. 5 and 6, the cells are
joined to each other and communicate with each other. This
embodiment may thus be manufactured with greater facility than the
embodiment of FIG. 4, in which the cells or spaces 8 are isolated
from each other.
In forming the embodiment of FIGS. 5 and 6, transparent conductive
film strips 5 are formed on a glass plate 4 and a silicon nitride
layer 6 is formed on the conductive strips 5. Silicon oxide layers
12, in the shape of strips, are formed on the layer 6 of silicon
nitride. The strips 12 are spaced from each other and thus form
gaps or spaces 13 between adjacent ones of said strips.
Transparent conductive film strips 5' are formed on a glass plate
4' and a silicon nitride layer 6 is formed on the conductive strips
5'. Silicon oxide layers 12', similar to the strips 12, are formed
on the layer 6' of silicon nitride perpendicularly to the strips
12. The component elements are so tightly joined that the strips 12
and 12' are mutually perpendicular (FIG. 6). Although the cells 13
are in mutual or common communication, only the parts of wide gap,
across which the X and Y electrodes mutually extend, function as
the cells. The part of narrow gap is a mere gap portion which
serves to make the pressure of the gas in the cells uniform.
In some cases, it is advantageous to utilize a thin glass plate
having holes formed therethrough, as shown in the embodiment of
FIG. 1, instead of an insulating metal compound layer, for defining
the length of the cells in the display device shown in FIGS. 4 and
6. This is due to the fact that the sputtering process, the
evaporating process and the pyrolysis of compounds process are much
too time-consuming when they are utilized to form the insulating
layer to more than a specific thickness. The screen printing method
is less time-consuming than the aforementioned three processes, but
is more time-consuming than the process which utilizes a thin glass
plate.
Although in the foregoing examples, the X and Y electrodes and the
plates supporting said electrodes are transparent, only one of
these groups of electrodes and the corresponding supporting plate
need be transparent, if it is unnecessary to observe the discharge
light of the cells from both sides of the display device. One of
the substrates or support plates may then comprise a ceramic
material and the corresponding electrodes may be formed on the
ceramic plate as metal foil.
The X and Y electrodes need not necessarily be linearly disposed
and at right angles to each other. Any suitable arrangement of
electrodes may be utilized, depending upon the purposes of the
display. The electrodes may thus extend radially, or in concentric
circles, or in other configurations.
Although in the aforedescribed embodiments of the invention the
partitions of insulating material are provided between each
adjacent pair of cells to isolate the cells or to narrow the
interconnecting path therebetween, it is possible to eliminate such
partitions in another embodiment, because the gas discharge within
the cells is not principally affected by such partitions.
While the invention has been described by means of specific
examples and in specific embodiments, we do not wish to be limited
thereto, for obvious modifications will occur to those skilled in
the art without departing from the spirit and scope of the
invention.
* * * * *