U.S. patent number 3,786,332 [Application Number 04/808,619] was granted by the patent office on 1974-01-15 for micro positioning apparatus.
This patent grant is currently assigned to Compagnie Francaise Thomson Houston-Hotchkiss Brandt. Invention is credited to Georges Hepner, Michel Lacombat, Raymond Marcy.
United States Patent |
3,786,332 |
Hepner , et al. |
January 15, 1974 |
MICRO POSITIONING APPARATUS
Abstract
A workpiece is positioned in the order of tenths of microns, or
less, with respect to a fixed assembly, with automatic
stabilization of coordinates by apparatus having a solid base with
two movable carriages, displacable each in a different orthogonal
direction, which drive a reference block bearing the piece to be
positioned. To compensate for malpositioning a correction means is
provided consisting of an assembly of at least three concentric
frames, the first one (C1) being fixed on the upper carriage and
the other two being coupled to each other by resilient means and
position transducers, such as piezoelectric ceramic or
megnetostrictive elements. The transducer displaces the
corresponding frame along a direction where no resilient means are
present. Displacement is measured by four interferometers whose
beams illuminate reflecting faces of the reference blocks and
fringes; or photoelectric microscopes aimed for instance at an
engraved marking on the block of some tens microns wide are
used.
Inventors: |
Hepner; Georges
(Neuilly-sur-Seine, FR), Lacombat; Michel
(Savigny-sur-Orge, FR), Marcy; Raymond (Paris,
FR) |
Assignee: |
Compagnie Francaise Thomson
Houston-Hotchkiss Brandt (Paris, FR)
|
Family
ID: |
25199281 |
Appl.
No.: |
04/808,619 |
Filed: |
March 19, 1969 |
Current U.S.
Class: |
318/577; 318/640;
409/80; 356/508 |
Current CPC
Class: |
G01B
9/02019 (20130101); G01B 9/02021 (20130101); G01B
9/02027 (20130101); Y10T 409/300896 (20150115) |
Current International
Class: |
G01B
9/02 (20060101); G01b 009/02 () |
Field of
Search: |
;356/106,110,112,172
;33/1M,18A ;90/13.99 ;318/577,640 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Other References
Jarrell, R. F., et al., "Some New Advances in Grating Ruling,
Replication and Testing," Applied Optics, Vol. 3, No. 11, November
1964, p. 1251-1262..
|
Primary Examiner: Wibert; Ronald L.
Assistant Examiner: Major; J.
Attorney, Agent or Firm: Frishauf; Stephen H.
Claims
What we claim is:
1. In a positioning apparatus for accurately positioning a piece
(P) with respect to a fixed assembly and automatic stabilization of
its coordinates having a base (Z);
movable carriage means (V, W) located on said base;
a reference block (A, C3) carrying the piece (P) to be
positioned;
means (11-14) disposed to detect, with respect to said base, any
deviation of position of said reference block (A) with respect to a
pre-selected initial position of said reference block and
generating error voltages upon such deviation;
said positioning apparatus comprising
correction means (C) disposed on said carriage means (V, W) and
supporting said reference block (A), said correction means
comprising a pair of frames (C2, C3) of different sizes, the inner
frame (C3) being smaller and located concentrically within the
outer frame (C2);
first resilient coupling means (L2, L2) interposed between and
interconnecting the inner (C3) and the outer (C2) of said frames at
opposite sides thereof for resisting relative motion between said
frames in a first direction, and maintaining alignment in said
first direction while permitting deflection in a direction
transverse to said first direction, the first resilient means
having their respective terminal ends fixed to respective
frames;
second resilient coupling means (L1, L1) interposed between and
interconnecting the outer of said frames (C2), and said base at
opposite sides of said outer frame for resisting relative motion
between said outer frame and said base (C1; Z) in the transverse
direction, while permitting deflection in said first direction, the
second resilient means (L1, L1) having one end fixed to said outer
one of said frames and the other to said base;
first position transducer means (Y1, Y2) interposed between said
concentric frames (C2, C3) and acting in said transverse
direction;
second position transducer means (X1, X2) interposed between said
outer frame (C2) and the base (C1; Z) and acting in said first
direction;
said reference block (A; C3) being supported by said inner
frame;
said deviation detection and error signal generating means being
interconnected with said first and second transducer means and
controlling said transducer means to effect resilient deformation
of the respective resilient means to position the inner frame, and
with it, said reference block, to reduce the deviation to zero.
2. Apparatus according to claim 1, comprising further means to
compensate for rotational movement, said further means
comprising
a third frame (C4);
third resilient deflection means coupling said inner frame (C3) and
said third frame, said third frame supporting said reference (A)
carrying said piece (P) to be positioned with accuracy;
third position transducer means acting on said third resilient
deflection means to slightly rotate said third frame with respect
to said inner frame, and thus with respect to said base upon being
energized to compensate for spurious rotation of said reference
block.
3. Positioning apparatus according to claim 1 wherein the position
detection means provided to detect any deviation of said reference
block from its preselected initial position comprises optical means
consisting of a monochromatic source of light, interferometer means
(I1-I4) illuminated by said source reflecting on corresponding
faces of said reference block; and receiving means to receive
information carried by said optical means and to derive therefrom
data related to said deviation of said reference block.
4. Positioning apparatus according to claim 1 wherein said
receiving means comprises photoreceiver means, logical means, said
logical latter means being responsive and connected to the output
from said photo receiving means and controlling a reversible
counter to derive data related to the direction of said deviation
of said reference block; and
comparator means to compare said data with reference data
corresponding to said preselected position of said reference block,
said logic means being responsive to the drift of the fringes
produced by said interferometer means.
5. Positioning apparatus according to claim 1 wherein said
transducer means are piezoelectric ceramics; means biasing the
piezoelectric ceramics to balance the respective positions of the
frames in the absence of any correcting signal, said ceramics being
disposed so as to move the frame to which they are coupled in a
direction different from that controllable by said resilient means
and independently therefrom, said ceramics receiving said error
voltages.
6. Positioning apparatus according to claim 1 wherein the inner
frame comprises a rotatable plate (T);
a stand (C5 - FIG. 5) bearing the rotation axis of the rotatable
plate (T);
a piece (P) to be accurately positioned having an axis of
revolution;
crossed carriage means mounted on said plate (T) for pre-adjusting
the position of said piece (P) with respect to said plate (T);
mechanical comparator means (N) mounted on said stand (C5), to
sense, concurrently while said plate (T) is rotating about its
axis, a part of the peripheral outline of said piece (P);
and optical means to accurately position said piece (P) controlling
and connected to said transducer means, whereby to bring into
coincidence the axis of said plate (T) with the axis of said
revolution piece (P).
7. Positioning apparatus according to claim 1 wherein said
transducer means are magnetostrictive elements.
8. Positioning apparatus according to claim 3 wherein said
reference block has orthogonal mirror faces, operating as moving
mirrors of the associated interferometer means.
9. Positioning apparatus according to claim 4 wherein the logic
means includes a reversible counter;
and means are provided distinguishing between the two possible
directions of count and along which said reference block may be
moved with respect to a reference axis, said distinguishing means
controlling said reversible counter.
10. Apparatus according to claim 3 comprising piezoelectric ceramic
transducer means, the reference mirrors of said interferometer
means being respectively mounted on said piezoelectric ceramic
transducer means;
and potentiometer means connected to and controlling said
piezoelectric ceramic transducer means to provide for fine
adjustment thereof.
11. Apparatus according to claim 1 comprising potentiometer means
connected to and coupled to said transducer means controlling the
resilient coupling means to said frames to provide for fine
adjustment of the position of said frames.
12. Apparatus according to claim 1 further comprising
photoelectronic microscopes (D1, D2, D3) located on said base to
determine, accurately, the initial position of said reference
block;
and engraved markings of about 10 microns width on said reference
block, said microscopes being aimed at said engraved markings.
13. Apparatus according to claim 12 comprising reference lines
formed on said base, said reference lines extending in orthogonal
directions and forming reference lines for said photoelectric
microscopes and for reference mirrors of an interferometer;
said carraige means being movable in said orthogonal directions.
Description
The present invention relates to a positioning apparatus intended
to accurately position a part with automatic stabilization of its
coordinates. It especially concerns devices that, while controlling
a slow displacement of the said part along one of its coordinates,
provide for automatic stabilization of the other coordinates by
means of an opto-electric regulating loop. These cartesian and/or
polar coordinates are determined with regard to a reference system
a mobile element of which supports the part to be positioned.
Such apparatus are used for instance for the photographical
reproduction of several consecutive views on a same photosensitive
surface, the position of the said views having to be located with a
very high accuracy with reference to the picture taking system. The
displacement of the photographical plate is usually carried out
along two orthogonal coordinates by means of a mechanical system of
crossed carriages provided with high accuracy screw-jack controls.
Such a system however does not allow an accuracy better than one
micron. Furthermore that accuracy varies with time owing to wear of
control components generating backlash, and also with unequal
thermal expansion of the different parts of the structure. On the
other hand, it is very difficult to maintain one of the coordinates
constant in the cartesian plane while the other is varied, for a
parasitic rotation of one of the carriages is always likely to take
place.
To remedy these shortcomings the present invention has for one
object the design of an accurate positioning device of a piece with
automatic stabilization of its coordinates.
Subject matter of the invention, the positioning device consists of
at least three concentric frames (C1, C2, C3) coupled two by two
along different coordinates by flexion blades (L1, L2). Between
them are pressed together biased piezoelectric ceramic transducers
(X1, X2, Y1, Y2) placed along the coordinate not occupied by the
blades (L1, L2), the inner frame (C3) supporting a reference block
(A) on which is placed the part (P) to be located, position
transducers (L, M, S, F, E) solid with said block (A) providing
comparator circuits with voltages whose difference with regard to
those previously chosen is applied as an error voltage to the
corresponding groups of ceramic transducers (X1, X2 or Y1, Y2).
Further, crossed carriages (V - W) are provided on the base of the
device, to drive the reference block along either of two orthogonal
directions.
Characteristics as well as features of the present invention will
be better understood from the following description, of a
non-restrictive example with reference to the accompanying drawings
in which
- FIG. 1 shows a general perspective view of an apparatus according
to the invention;
- FIG. 2 is a view from underneath of a particular embodiment of
the mechanical part of the device of FIG. 1;
- FIG. 3 is a block diagram of the optical locating system;
- FIG. 4 shows the diagram of a complete particular embodiment of
the positioning apparatus;
- FIG. 5 is a view from above of a variant of carrying out and use
of the positioning apparatus.
As the position of a part related to a system may vary with the
time for instance because of small temperature variations of the
ambient, or also because of its displacement along one of its
coordinates, the said displacement generally being accompanied by
parasitic rotations, a very accurate permanent localization of the
said part is achieved according to the present invention, and the
results obtained are then used by means of a stabilizing loop
allowing the correction of the fixed coordinates of the part in a
way maintaining them equal to a previously chosen mean value, with
an accuracy better than one-tenth of one micron.
To this end a device is used such as that represented on FIG. 1.
This device comprises a correcting system C, controlled by
piezoelectric ceramic transducers and fixed on the upper carriage
of for instance two crossed carriages V - W placed one above the
other on the base Z of the equipment and intended to displace the
optical block A by translation along two orthogonal directions
respectively.
The displacements of this latter with regard to the base Z are
measured by four interferometers I1, I2, I3, I4 whose beams
illuminate the reflecting faces A1 and A2 of block A. The
deviations with regard to the ideal displacement of block A produce
error voltages that, when applied to the ceramic transducers of
correction device C, result in the reduction of the amplitude of
these shortcomings.
FIG. 2 is a top plan view of a particular structure of the
mechanical part of correction device C. This mechanical part
comprises three concentrical frames C1, C2, C3 made mutually solid
by means of resilient blades L1, L2. These frames are preferably
made of a low thermal expansion coefficient metal such as invar for
instance. Piezoelectric ceramics X1, X2, Y1, Y2 are placed on the
inner faces of these frames on both sides of the corresponding
concentric frame, their axes being the mediatrices of the sides of
the said frames comprising resilient blades such as L1 and L2. The
contact between these transducers and the outer face of the
corresponding concentrical frame is made for instance by means of a
metallic ball B clasped between the said face and that of the
transducer. This arrangement thus controls the displacement of the
frame C3 with regard to frame C1, and thus with the base Z of the
equipment, either along direction X, or along direction Y. These
displacements are carried out independently from one another, in
one direction or in the other. The property of piezoelectric
ceramics to expand or to contract with respect to a mean expansion
upon application of an electric signal is well known and need not
be emphasized here.
If there is no control signal, the same bias voltage is applied to
both ceramics and it produces the same expansion of the said
ceramics. This force thus avoids backlash of the mechanical
assembly of two frames one in the other. The control signal applied
to either of both groups of ceramics is such that it brings about
an increase of expansion for one of the two ceramics of this group,
and a reduction of the expansion of the other, causing the
displacement of the inner frame regarding the reference frame C1. A
control signal applied to the group X1, X2 thus involves a
displacement along the X-axis of frame C2, and so indirectly of
frame C3, while such a signal acting on group Y1, Y2 produces a
displacement along the Y-axis of the said frame C3. It is easy to
understand that this arrangement permits correction of the
positions along X and Y at any time using as control signals for
the ceramic transducers the error voltages produced by comparing
the continuously accomplished measurements of the coordinates and
the previously chosen mean values. Thus an automatic stabilization
of one or the other coordinate X or Y, or both, is obtained.
Further, inaccuracies that may result from vibrations of frequency
comprised in the frequency band of the correcting device are
avoided.
To correct the position errors owing to possible spurious rotations
of part P, the latter is placed upon a reference block A placed on
a stand C4 suspended within frame C3 by means of resilient blades
L3. Ceramic transducers R, acting upon these blades L3 through
balls B, allow slight rotation of support C4 regarding frame C3,
and thus regarding reference frame C1. These ceramic transducers R
are controlled by the error signal arising from the comparision of
two simultaneous measurements along the same coordinate, carried
out close to each extremity of a same side of reference block
A.
Thus, having placed part P to be positioned upon reference block A,
for instance by means of fixed marks on the said block A, the
latter is first roughly positioned on support C4, for instance by
means of the mechanical crossed carriages system V, W of FIG. 1.
This positioning is carried out with respect to the base Z of the
equipment supporting the coordinate measurement system. The yield
of the comparison of these measurements with the previously chosen
mean values in then applied as an electric control signal to the
correcting ceramic transducers X1, X2, Y1, Y2, R, a bias voltage
being on the other hand applied continuously to the latter ones,
thus defining a mean operating point. The corrections thus
accomplished are checked continuously resulting in a coordinate
stabilization. These corrections being mutually independant, a
displacement of part P and block A can be carried out along one of
the coordinates while maintaining the other fixed.
Thus, the joint action of piezoelectric transducers X1, X2, Y1, Y2,
R introduces very fine mutually independant corrections along axes
X and Y and/or to rotation.
In a particular embodiment of the device, the coordinate measuring
system is an optical system based on laser interferometry. A basic
diagram of this system is represented on FIG. 3. A laser L,
preferably of the stabilized monomode type, simultaneously
illuminates four Michelson interferometers through three partially
reflecting mirrors M1, M2, M3 and two opaque mirrors M4 and M5.
Each of these interferometers comprises a fixed-flat mirror F, a
mobile-flat mirror composed of one of the faces A1 or A2 of
reference block A, and a partially reflecting mirror S. Reference
block A advantageously is an optical element whose reflecting faces
A1 and A2 have a very good flatness, the 90 degree angle formed by
these cases being defined with an accuracy better than .+-. 0.5 arc
second.
When, because of the movement of the crossed carriages, reference
block A moves along axis X or Y with respect to stand C4, hence to
the base Z whereon the optical system is fixed, the two
interferometers directed along the displacement direction transmit
to the corresponding receiving systems E a light intensity
sinusoidally varying with the displacement.
Receiving systems E comprise for instance photoelectric receivers
followed by circuits capable of discriminating between the
direction of the movement. In such circuits, a reversible counter
determines the accurate position of part P, independently of the
successive backward and forward movements of reference block A,
with an absolute precision better than 0.3 micron. Conventional
circuits not represented here then compare the measured values with
the predetermined values. The resulting error signals are then
applied to the piezoelectric transducers in order to accomplish a
simultaneous position correction. In the application of these
devices to the photographic production technique of microcircuit
masks where a same image is impressed upon a photographic plate
along lines and columns, the impression of a line of images may be
accomplished for instance by stabilizing the column coordinate and
also correcting the parasitic rotations while guiding the plate
displacement along the said line, the displacement measurements
accomplished being usable for displacement speed regulation along
this line.
FIG. 4 represents a detailed diagram of a particular embodiment of
a device according to the invention. The optical part of this
realization is practically the same as that above described with
reference to FIG. 3, reference mirrors F1, F2, F3, F4 in this
instance being fixed upon piezoelectric transducers K1, K2, K3, K4
controlled by means of potentiometers P5, P6, P7, P8.
The correction device C under which are placed crossed plates W and
V comprises three groups of concentric parts C1, C2, C3. These
parts can be suspended one regarding the other by flexion blades
L1, L2 and displaced by piezoelectric transducers X1, X2, Y1, Y2,
each comprising two electrically independent stacked transducers,
springs T.sub.x and T.sub.y being used to support frames C1, C2 C3
against the said transducers.
At the beginning of the operating process, block A is brought by
means of plates V - W to the proximity of the position of origin
defined for instance by three photoelectric microscopes D1, D2, D3.
These microscopes can locate the position of an engarved mark some
tens of microwide, with an accuracy of between some microns to some
hundredths of micron according to the sensitivity of the equipment.
The feed accuracy of the screws of plates V, W should allow in a
first time to position block A with regard to the microscopes
within a few microns. The position of origin can then be defined
within less than 0.1 micron by means of piezoelectric transducers
X1, X2, y1, Y2 controlled by potentiometers P1, P2, P3, P4. This
ultimate operation is accomplished with the maximum sensitivity of
the microscopes corresponding to an accuracy of some hundredths of
one micron.
The position of origin of block A once defined, potentiometers P5,
P6, P7, P8 are adjusted in order to displace very finely reference
mirrors F1, F2, F3, F4 and observe on voltmeters U1, U2, U3, U4 the
corresponding shifting of interference fringes. If the displacement
of block A is then to be made along X, switches J.sub.x are thrown
over from position 1 to 2 in order to apply the amplified output
voltage of receivers R1 and R2 to transducers Y1 and Y2.
During this displacement, the translation or rotation deviations
referred to the ideal displacement along X result at the output of
receivers R1, R2 in a slight shifting of the fringe part
corresponding to a positive or negative error voltage with regard
to zero. Amplified by elements Q1 and Q2, this error voltage is
applied to transducers Y1 and Y2 in order to correct these
shortcomings and reduce its amplitude in a proportion equal to the
regulation rate of the system.
During this constant Y-displacement, a second receiver R6 connected
with receiver R5 of interferometer I4 allows according to a known
measurement process the displacement along X by totalizing the
number of passing interference fringes. For this purpose, a logic
circuit B.sub.2 for discrimination between the directions of the
movement controls a reversible counter G2 which adds or subtracts
the finges provided by R5 according to the displacement of block 1
along X in one direction or the other. The result of this
measurement can be displayed on a direct view display device
E.sub.x.
When during the displacement along X the value read on E.sub.x is
sufficiently near to the desired value, plate V is stopped, and the
ceramic transducers controlled by P3 and P4 proceed to the fine
position adjustment. In this case, voltmeters U5 and u4 allow
indeed near the zero of the last fringe to define a whole number of
fringes with a fractionnary excess whose precision is of the order
of magnitude of only some hundredths of a micron.
The same procedure is also applied to carry out a given
displacement along Y, X being constant. The original position of
block A can also be located by means of only two microscopes
locating the position of marks engraved on the upper horizontal
face of the block. But in this instance, the microscopes are
mounted vertically above the block and may be difficult to
integrate into a general system.
Some minor modifications excepted, these devices may also be used
for other applications such as the position marking of a body of
revolution revolving around its axis. A device according to the
present invention and adapted to this application is represented on
FIG. 5. This device can moreover be used to measure the
deformations of a revolving body using a technique called
holographic interferometry and consisting of comparing the body to
be examined with its hologram. The accurate positioning of this
body P is tantamount to making coincide its axis of revolution O
with the rotation axis of plate T it is placed onto, and to correct
the errors inherent to the unavoidable shortcomings of said plate
T.
The mechanical part of the device of FIG. 5 is obtained starting
from that of FIG. 2 by replacing the assembly formed by frame C3,
stand C4 and ceramic transducers R with a stand C5 supporting the
rotation axis of plate T. The carraiges V, W are hidden in the view
of FIG. 5A mechanical system with crossed carriages 100 and 200
mounted on plate T allows a first centering with a mechanical
comparator N mounted on stand C5 by exploring a narrow region of
the periphery of part P while plate T is rotating. This first
centering is achieved with a precision of about a few microns. A
precision better than one tenth of a micron is obtained by using
additionally displacement transducers such as two Michelson
interferometers illuminated by a same laser source L. The movable
mirror of these interferometers, arranged one along the X, and the
other along the y axis, is formed by the point whereon the laser
beam impinges in the so-called reference area of the part to be
examined, the said area being reflecting. Two lenses H converge the
laser beam on the same point of rotation axis O of part P, this
convergence being obtained strictly by means of a conventional
laser beam centring apparatus momentarily substituted for part P to
be studied.
During measurement, voltages collected by photoelectric receivers G
and corresponding to impinging point displacements of the optical
beams on the body P to be studied, are applied to the corresponding
piezoelectric transducers so as to automatically compensate for
parasitic displacements along axes X and Y. The fixed mirrors F of
the used interferometers are advantageously assembled on
piezoelectric ceramic transducers K, thus allowing to adjust their
position during the initial setting so as to be always centred on
an interference finge on the body P to be studied, whatever be its
diameter at the impinging point.
Devices have thus been described permitting a very accurate
positioning of parts, as well as an automatic stabilization of this
positioning, the absolute precision obtained being less than one
tenth of one micron. It is understood that such a precision can
however only be obtained if the influence of external perturbations
is sufficiently weak. These devices are especially convenient for
instance for the realization of microcircuit masks, as well as for
the measurement of deformations of a revolution body rotating
around its axis. The present description being only given as a
non-restrictive example, the invention involves all the variants of
realization, and especially those using position sensing systems
other than systems founded upon laser interferometry.
In that respect and without departing from the principles of the
invention, variants of realization may be designed which use other
means than that described for presetting the initial position of
the reference block A. In the above disclosure, photoelectric
microscopes have been mentioned which were aimed at a special
marking on the block. These microscopes can be replaced by other
means such as capacitive or reactive sensors, the sensor and the
reference block forming for instance a capacitor which is varied as
the reference block is moved with respect to the sensor. A sensor
consisting of a cluster of optical fibres can also be used, part of
this cluster guiding a light beam to the corresponding face of the
reference block whereas another part of the cluster of fibres is
connected to optical receivers receiving the reflected light from
said face of the block reference. A displacement of the block
results in a modification of the received light intensity which
modification is a function of the spacing between the block and the
sensor.
Such an alteration of the reflected light by the reference block
can also be sensed by a microscope set so as to have the aimed
surface of the block reference in its focal plane. If the reference
block is moved, the assembly consisting of the microscope and the
block is no longer set and the intensity of the reflected light is
varied as a function of the slight displacement of the block.
Another means can also be used to sense this displacement of the
block from its preselected initial position. The assembly of the
block and of an interferometer is illuminated with white light,
that is with a non-monochromatic light, i.e. exhibiting a wide
spectrum, and produces so called white fringes which are detected
and whose position is a function of the displacement of the block
constituting the movable mirror of the interferometric system.
The positioning system has been described as far as the
measurements and the corrections are made in a plane. But obviously
the invention is not limited to such a case and its principles
apply also if the measurements and corrections are made with
respect to the three axes of the cartesian coordinate system for
instance. It is only sufficient to provide a fourth frame which
supports the reference block A and for that frame, for instance,
the transducer means operates along the z coordinate whereas the
resilient blades operate along the x or y axis. Two interferometers
should also be added which receive the light reflected for instance
by the third face of the reference block perpendicular to this z
axis, e.g. for instance, here, the upper surface of the block.
In the description, the resilient blades are mentioned as flexion
blades. These blades can also be torsion blades.
In the description also, the displacements contemplated are
independant translations along either the x or y axis at a time. It
is possible to consider more complex movements produced by a
simultaneous displacement along the x and y axes.
In the above disclosure, a complete description of an
interferometer, and also a complete description of the transducers
used, which are piezoelectric ceramics or magnetostrictive elements
as well, have not been given, since they are known. A mention of a
barium titanate actuator for correcting an angular error in the
mirror parallelism in an interferometric system is given in the
"Journal of Research of the National Bureau of Standards -- C --
Engineering and Instrumentation -- Vol 65C, No. 2 April--June 1961"
"An Automatic Fringe Counting Interferometer for Use in the
Calibration of Line Scales" by Herbert D. Cook and Louis A.
Marzetta.
* * * * *