U.S. patent number 3,775,630 [Application Number 05/272,809] was granted by the patent office on 1973-11-27 for electron gun device of field emission type.
This patent grant is currently assigned to Hitachi, Ltd.. Invention is credited to Tsutomu Komoda, Yoshihisa Minamikawa.
United States Patent |
3,775,630 |
Minamikawa , et al. |
November 27, 1973 |
ELECTRON GUN DEVICE OF FIELD EMISSION TYPE
Abstract
An electron gun device of the field emission type comprising an
electron emitting cathode tip, a filament for heating the cathode
tip, an anode, and a charged particle emitting electrode, in which
charged particles are emitted from the electrode and bombard the
anode surface to outgas the anode.
Inventors: |
Minamikawa; Yoshihisa (Katsuta,
JA), Komoda; Tsutomu (Katsuta, JA) |
Assignee: |
Hitachi, Ltd. (Tokyo,
JA)
|
Family
ID: |
12935051 |
Appl.
No.: |
05/272,809 |
Filed: |
July 18, 1972 |
Foreign Application Priority Data
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|
|
|
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Jul 19, 1971 [JA] |
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46/53159 |
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Current U.S.
Class: |
250/493.1;
313/305; 313/336; 315/382 |
Current CPC
Class: |
H01J
3/021 (20130101) |
Current International
Class: |
H01J
3/02 (20060101); H01J 3/00 (20060101); H01j
001/42 () |
Field of
Search: |
;313/82R,305,336,341,DIG.1 ;315/31R |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lake; Roy
Assistant Examiner: Grimm; Siegfried H.
Claims
We claim:
1. In an electron gun device of the field emission type including a
cathode tip of a needle shape, a filament for heating said cathode
tip, an anode, and means for applying an electric voltage between
said cathode tip and said anode to establish an electric field
therebetween which causes electrons to be emitted from said cathode
tip toward said anode, the improvement comprising means for
emitting a beam of charged particles toward the surface of said
anode, means for supporting said charged particle emission means,
and power source means for supplying a required power to said
charged particle emitting means.
2. An electron gun device according to claim 1, wherein said
charged particle emitting means includes an electrode for emitting
electrons.
3. An electron gun device according to claim 2, further comprising
a voltage source connected between said electrode and said anode
for applying accelerating voltage for electrons emitted from said
electrode therebetween.
4. An electron gun device according to claim 3, wherein said
supporting means is so constructed as to support said electrode and
said filament.
Description
BACKGROUND OF THE IVENTION
1. FIELD OF THE INVENTION
This invention relates to an improvement in the anode heating
system of a field emission type electron gun device and more
particularly to a field emission type electron gun device in which
the anode is outgassed by a beam of charged particles.
2. DESCRIPTION OF THE PRIOR ART
A conventional electron gun device of the field emission type is
shown in FIG. 1 in cross-sectional view. A flashing filament 1 is
arranged to heat a cathode tip of a needle shape 2 for improving
the electron emission efficiency. The cathode tip of needle shape 2
has a sharpened head and is fixed to the flashing filament 1. An
anode is indicated by numeral 3. Electrons 4 are emitted from the
top end of the cathode tip 2 by applying a high voltage between the
cathode tip 2 and the anode 3 from a high voltage source (not
shown). A part of the electrons 5 transmits through an aperture 6
of the anode 3 and is introduced into the lower part of the device,
and will be referred to as effective electrons. A support 7
supports the flashing filament 1. An infrared lamp 8 is supported
by a support 9 and heats the anode 3. The lamp 8 is supplied power
from a source 10. It is required for emitting electrons from the
cathode tip 2 that the inside of the device is maintained at an
ultra high vacuum in the order of 1 .times. 10.sup. .sup.-10 Torr
and that a high electric field in the order of 3 to 6 .times.
10.sup.7 V/cm is applied to the top end of the cathode tip 2. Among
the electrons emitted from the tip 2 by said intense field, those
except the effective electrons bombard the anode 3. If there are
absorbed gas molecules on said anode, the absorbed gas molecules
are released and ionized by said electrons 4. The ions thus
generated are attractively accelerated to the cathode tip 2 by said
intense field and strike the tip 2 with high speeds. Thus, the
sharpened top end of the cathode tip is damaged and rounded by said
ions. Thereby, the electric field around the top end is weakened
and the electron emission efficiency decreases. To avoid the
collison of such ions, an infrared lamp 8 has been conventionally
provided near the anode 3 and preliminarily excited to heat the
anode 3 to remove absorbed gas molecules. Alternatively, it has
also been employed for heating the anode 3 that a current is
directly allowed to flow through the anode 3. In these cases, an
infrared lamp of large capacity or a large current is necessary for
this heating since the heat capacity of a field emission type
electron gun device is large.
As is described above, such methods have been employed in
conventional field emission type electron gun device for preventing
the damage of an electron source due to the collision of ions
generated by the ionization of gas molecules absorbed on the anode,
as exciting an infrared lamp provided near the anode or allowing a
conduction current to flow through the anode itself so as to remove
the absorbed gas molecules in the anode surface. But such
conventional methods have a drawback in that an infrared lamp or a
power source used for the above purpose should have a large
capacity of 1 to 3 kw since the heat capacity of a field emission
type electron gun device is large.
SUMMARY OF THE INVENTION
An object of this invention is to provide in an electron gun device
of the field emission type including a cathode tip of needle shape,
a filament for heating said cathode tip, an anode, and means for
applying an electric voltage between said cathode tip and said
anode to establish an electric field therebetween which causes
electrons to be emitted from said cathode tip toward said anode, an
improvement comprising means for emitting a beam of charged
particles toward the surface of said anode, means for supporting
said charged particle emission means, and power source means for
supplying a heating current to said charged particle emission
means.
According to an embodiment of this invention, there is provided a
field emission type electron gun device of an excellent electron
emission efficiency and stable operation in which the electron
source is prevented from being damaged with only a small heating
power by heating the anode with charged particles emitted from a
charged particle emitting electrode. An embodiment comprises an
electron source, an anode, and a charged particle emitting
electrode, in which charged particles emitted from said charged
particle emitting electrode are accelerated by the electric voltage
applied between the anode and said electrode and heat said anode by
the collision.
BRIEF DESCRIPTION OF THE DRAWING
FIG. 1 is a cross-sectional view of a conventional electron gun
device of the field emission type.
FIG. 2 is a cross-sectional view of an embodiment of an electron
gun device of the field emission type according to the
invention.
FIG. 3 is a cross-sectional view of another embodiment of an
electron gun device of the field emission type according to the
invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Now, the invention will be described on the preferred embodiments
referring to the accompanying drawings. An embodiment of a field
emission type electron gun device according to the invention is
shown in FIG. 2, in which in place of the infrared lamp 8 of the
conventional device shown in FIG. 1 a hot cathode such as a thermal
electron emitting filament 11 is mounted on a supporting member 9
opposing to the anode 3. A current is supplied from a souce 10 to
said hot cathode to heat the cathode. At the same time, a negative
voltage V is applied between the anode 3 and the hot cathode 11 by
a d.c. source 12. Thus, the portion of the anode 3 which is to be
bombarded by electrons 4 is locally heated by electrons emitted
from said hot cathode 11 and accelerated by the voltage V to
exhaust the gas absorbed on the anode 3.
FIG. 3 shows another embodiment in which a thermal electron
emitting filament 11 is mounted unitarily to the same base 13 as
the flashing filament 1 to enhance the replacement of the thermal
electron emitting filament 11 in case of a cut of the filament 11.
According to this method, a thermal electron emitting filament can
be provided for each flashing filament or tip portion even in case
of a field emission type electron gun device having a plurality of
flashing filaments or tips. Thereby the aforementioned effects can
also be obtained in such a case. In the above embodiments, a hot
cathode is used as the charged particle emitting electrode, but an
ion source may also be employed in place of said hot cathode to
obtain similar effects.
As has been described above, according to the field emission type
electron gun device of this invention, the anode surface can be
effectively and locally heated by charged particles. Thereby, the
total dimension of a device can be reduced and also gas molecules
absorbed on the anode can be preliminarily and effectively removed.
Therefore, the number of ions colliding with the tip decreases,
hence the lifetime of the tip is elongated and simultaneously the
stability of the field emission of electrons is improved.
* * * * *