U.S. patent number 3,758,199 [Application Number 05/200,672] was granted by the patent office on 1973-09-11 for piezoelectrically actuated light deflector.
This patent grant is currently assigned to Sperry Rand Corporation. Invention is credited to James B. Thaxter.
United States Patent |
3,758,199 |
Thaxter |
September 11, 1973 |
PIEZOELECTRICALLY ACTUATED LIGHT DEFLECTOR
Abstract
A piezoelectrically actuated type light deflector comprising a
pair of piezoelectric transducers rigidly cantilevered at one end
from a support member and articulately connected at the other end
to a mirror. Electrodes affixed to the transducers provide for
application of electrical signals in a manner to utilize an
extensional mode of the transducers in which one transducer
elongates and the other contracts, or conversely, so as to rotate
the mirror about an axis passing therethrough and thereby produce
deflection of a light beam impinging on the mirror.
Inventors: |
Thaxter; James B. (Townsend,
MA) |
Assignee: |
Sperry Rand Corporation (New
York, NY)
|
Family
ID: |
22742682 |
Appl.
No.: |
05/200,672 |
Filed: |
November 22, 1971 |
Current U.S.
Class: |
359/224.1 |
Current CPC
Class: |
G02B
26/0816 (20130101) |
Current International
Class: |
G02B
26/08 (20060101); G02f 001/34 () |
Field of
Search: |
;350/285,299,6 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
|
|
|
|
|
|
|
252,387 |
|
Dec 1926 |
|
GB |
|
553,988 |
|
Jun 1943 |
|
GB |
|
Other References
J M. Fleischer "Piezoelectric Deflector" IBM Tech. Discl. Bul. Vol.
13, No. 6, 11/70 pp. 1648-1649..
|
Primary Examiner: Wibert; Ronald L.
Assistant Examiner: Godwin; Paul K.
Claims
I claim:
1. A light deflector of the piezoelectrically actuated reflector
type comprising
first and second light reflectors having respective height and
width dimensions,
a pair of piezoelectric strips having substantially greater length
than thickness extending generally parallel to one another
lengthwise and each articulately connected at one end in spaced
apart relation along the height dimension of the first reflector
and connected at the other end spaced apart relation along the
height dimension of the second reflector,
means for fixedly supporting the reflector-strip structure at a
point with respect to which the strips can extend and contract in
response to an electrical drive signal applied thereto, and
electrode means connected to the strips for receiving the applied
signal to produce extension of one strip and contraction of the
other in accordance with the spontaneous polarization of the strips
and the magnitude and polarity of tha applied signal whereby each
reflector rotates about a respective axis passing therethrough
oriented transversely of the length of the strips and parallel to
the width dimensions of said reflectors, for deflecting a light
beam reflected from one reflector to the other.
2. The apparatus of claim 1 including means for applying a bias
voltage to the strips to establish a predetermined quiescent
polarization therein oriented transverse to the strip length
whereby repeatability of reflector rotation is obtained in response
to a drive signal of given amplitude applied to the strips for
increasing the polarization of one strip to cause elongation
thereof and decreasing the polarization of the other strip to cause
contraction thereof.
3. The apparatus of claim 1 wherein the length to thickness ratio
of the strips is on the order of ten to one or more.
4. The apparatus of claim 3 wherein the light reflectors have
height in the direction of the spacing between the strips and
thickness lengthwise of the strips proportioned so that the height
to thickness ratio of each reflector is at least equal to the
length to thickness ratio of the strips, and the strips are
connected to the reflectors along the height dimension thereof at
points corresponding to the nodes of the lowest order flexural
vibration mode which could occur along the height dimension of a
free reflector whereby motion associated with said flexural mode is
inhibited.
5. The apparatus of claim 4 including means for applying a bias
voltage to the strips to establish a predetermined quiescent
polarization therein oriented transverse to the strip length
whereby repeatability of reflector rotation is obtained in response
to a drive signal of given amplitude applied to the strips for
increasing the polarization of one strip to cause elongation
thereof and decreasing the polarization of the other strip to cause
contraction thereof.
6. The apparatus of claim 3 including an additional pair of
piezoelectric strips having a length to thickness ratio on the
order of ten to one or more extending generally parallel to one
another lengthwise in spaced apart relation with the ends thereof
articulately connected to the reflectors and disposed in side by
side relation with said pair of piezoelectric strips, and wherein
the light reflectors have width in the direction of the side by
side disposition of the strips and thickness lengthwise of the
strips proportioned so that the width to thickness ratio of each
reflector is at least equal to the length to thickness ratio of the
strips, and the strips are connected to the reflectors along the
width dimension thereof at points corresponding to the nodes of the
lowest even order free torsional vibration mode which could occur
along the width dimension of a free reflector whereby said
torsional mode is inhibited.
7. The apparatus of claim 6 including means for applying a bias
voltage to the strips to establish a predetermined quiescent
polarization therein oriented transverse to the strip length
whereby repeatability of reflector rotation is obtained in response
to a drive signal of given amplitude applied to the strips for
increasing the polarization of one strip to cause elongation
thereof and decreasing the polarization of the other strip to cause
contraction thereof.
8. A light deflector of the piezoelectrically actuated reflector
type comprising
a pair of piezoelectric strips having a length to thicknss ratio on
the order of ten to one or more extending generally parallel to one
another lengthwise in spaced apart relation,
a light reflector having height in the direction of the spacing
between the strips and thickness lengthwise of the strips
proportioned so that the reflector height to thickness ratio is at
least equal to the length to thickness ratio of the strips, and
articulately connected to one end of the strips at points along the
height dimension of the reflector corresponding to the nodes of the
lowest order flexural vibration mode which could occur along the
height dimension of a free reflector whereby motion associated with
said flexural mode is inhibited, and means for fixedly supporting
the reflector-strip structure at a point with respect to which the
strips can extend and contract in response to an electrical drive
signal applied thereto
electrode means connected to the strips for receiving an applied
drive signal to produce extension of one strip and contraction of
the other in accordance with the spontaneous polarization of the
strips and the magnitude and polarity of the applied signal whereby
the reflector rotates about an axis passing therethrough oriented
transversely of the length of the strips for deflecting a light
beam incident on the reflector.
9. The apparatus of claim 8 including means for applying a bias
voltage to the strips to establish a predetermined quiescent
polarization therein oriented transverse to the strip length
whereby repeatability of reflector rotation is obtained in response
to a drive signal of given amplitude applied to the strips for
increasing the polarization of one strip to cause elongation
thereof and decreasing the polarization of the other strip to cause
contraction thereof.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to electromechanical light deflector
apparatus of the type including a piezoelectrically actuated mirror
for reflecting incident light in different directions in accordance
with an electrical drive signal applied to a pair of piezoelectric
transducers.
2. Description of the Prior Art
A variety of electrically operated devices utilizing electrooptic,
acousto-optic and piezoelectric techniques have been extensively
investigated in the prior art pursuant to the development of light
deflectors for general scanning and random access purposes as
required, for instance, for optical memory addressing. Each type of
deflector is characterized by certain advantageous features while
simultaneously being limited in one or more respects. Electro-optic
devices, for example, constructed with presently known suitable
materials require extremely high voltage excitation involving
thousands of watts of reactive power. Drive requirements are not as
stringent in the case of acousto-optic devices, but nevertheless
usually cause serious heat dissipation problems. Another
characteristic of acousto-optic deflectors which is objectionable
in some applications is the beam distortion that occurs while the
beam is deflecting from one location to another. In an
acousto-optic device, deflection is produced by deflection of a
light beam transmitted through a compressional wave established in
an optically transparent acoustic line. As a result, the resultant
deflection is determined in accordance with the frequency of the
acoustic wave and, consequently, during the interval immediately
after a frequency change is introduced to alter the beam deflection
angle, the deflector apparatus contains acoustic wavelengths
corresponding to both the previous and the new beam positions.
Hence, all of the wavelengths present in the aperture at any
instant act to diffract the beam and thus cause a transient
distortion. Electro-optic and acousto-optic light deflectors also
produce considerable insertion loss resulting from the high
absorption attendant to electro-optic materials and the poor
diffraction efficiency experienced with acousto-optic elements.
Piezoelectric deflectors, on the other hand, are inherently low
insertion loss devices by virtue of operating on the principal of
reflection rather than transmission as in the case of the
electro-optic and acousto-optic deflectors. In addition,
considerably less power excitation is required and heat losses are
significantly diminished. Piezoelectric deflectors also offer
substantial benefit with regard to fabrication complexity, cost,
and size; factors which presently preclude general acceptance and
use of light deflectors. The well known piezo-electric light
deflector of the prior art comprises a pair of piezoelectric
transducers constructed in the form of thin elongated strips
rigidly affixed at one end in cantilever fashion from a supporting
block and secured together along their length. Upon application of
an appropriate excitation signal, one strip lengthens while the
other shortens thereby resulting in bending of the composite
structure relative to the support block so as to deflect a mirror
mounted on the free end of the piezoelectric strips.
Two fundamental parameters which must be considered in the design
of a practical light deflector are the number of resolvable beam
positions and the bandwidth or access time to a given position.
Aside from the previously discussed parameters of complexity, cost,
insertion loss, etc., the performance of a light deflector can best
be described in terms of a speed-capacity product. Capacity is
defined as the number of distinguishable diffraction limited or
resolvable beam positions which can be addressed. Speed relates to
how rapidly the beam can be directed to any one of the addressable
positions, or the number of positions the deflector can address per
unit time. Unfortunately, the piezoelectric bender apparatus of the
prior art has a very slow operating speed compared to electro-optic
and acousto-optic deflectors and because of this limitation is
rendered unsuitable for many applications. The piezoelectric
deflector constructed according to the principles of the present
invention, however, is capable of substantially higher speed
operation and therefore overcomes the primary limitations of the
prior art piezoelectric bender configuration. Moreover, the high
speed operation is achieved without degradation of resolution or
reduction in deflection angle, that is, diffraction limited
resolution is retained, thereby providing a significantly higher
speed-capacity product than is attainable with a bender apparatus
for applied voltages of equivalent magnitude.
SUMMARY OF THE INVENTION
The piezoelectric deflector of the present invention operates on an
extender principal as opposed to the bender mode of operation
employed in the prior art piezoelectric deflector. The invention
deflector comprises a pair of strip piezoelectric transducers,
which in a single mirror embodiment, are secured at one end in
cantilever fashion from a support block as in the prior art device.
The transducers, however, are not secured to one another along
their length as in the prior art devices but instead are free to
move longitudinally with respect to one another. In addition, the
mirror is not rigidly secured to the free end of the transducers
but rather is articulately connected, as by hinges, to enable
pivotal motion of the mirror relative to the transducers. As a
consequence of this arrangement, the applied excitation rather than
producing a bending action of the transducers instead causes
extension of one and contraction of the other for the purpose of
rotating the mirror about an axis passing through the mirror plane.
This unique arrangement of the transducers and articulated
connection to the mirror enables operation at speeds orders of
magnitudes higher than is achievable with the prior art bender
configuration without degradation of capacity or any of the other
previously mentioned characteristics.
The speed limitation of the bender configuration arises from the
relatively low resonant frequency associated with the bending mode.
The resonant frequency of the extensional mode, on the other hand,
is considerably higher and since the lowest frequency resonant mode
of the transducer, that is excited by the drive signal and also
causes mirror rotation, determines the highest frequency at which
the deflector will operate, a substantial increase in speed is
obtained, for a given operating voltage and position capacity, by
utilizing the extensional mode as compared to the bending mode.
Another embodiment of the invention incorporates two mirrors, one
at each end of the piezoelectric transducers, for increased angular
deflection at the optical beam. The principle of operation of this
two-mirror embodiment is based on extensional mode vibration of the
piezoelectric transducers in the same manner as for the single
mirror embodiment.
An additional feature of the invention pertains to the placement of
the transducers along the mirror in a manner to inhibit torsional
motion thereof as will be understood more fully from the subsequent
detailed description.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a perspective view of a single mirror piezoelectrically
actuated light deflector constructed according to the principles of
the present invention.
FIG. 1a illustrates flexural mirror motion which can occur in the
case of a thin mirror used in the embodiment of FIG. 1.
FIG. 2 is an electrical schematic illustrating the manner of
energizing the embodiment of FIG. 1.
FIG. 3 is a perspective illustration of an alternative embodiment
of the invention incorporating two mirrors for deflecting a beam
through larger angles.
FIG. 3a illustrates torsional mirror motion which can occur in the
case of a thin mirror used in the embodiment of FIG. 3.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring to FIG. 1, a light deflector apparatus of the present
invention comprises strip piezoelectric transducers 10 and 11 of
poled ceramic or suitable crystalline material rigidly secured at
one end by epoxy cement to insulator block 12 which may be
constructed of PZT ceramic. Mirror 13 is articulately connected as
by hinges 14 to enable pivotal motion of mirror 13 relative to the
piezoelectric transducers about axis 15 passing through the plane
of the mirror. Connection of the hinges to the mirror and
transducers may also be made by epoxy cementing. Alternatively, the
transducers may be epoxy cemented directly to the mirror without
any intervening hinge components, the epoxy connections serving in
this case as elastic hinges to enable pivotal motion of the mirror
relative to the transducers. A plate 16 of thermally conductive
material is secured to the block 12 and disposed in sliding
engagement between the piezoelectric strips to function both as an
electrode coupled to the top and bottom of strips 10 and 11
respectively and as a heat sink for power dissipated in the
piezoceramic members. It is to be understood, however, that
satisfactory operation of the deflector can generally be achieved
without the use of the heat sink, in which case individual
electrodes can be affixed to the top and bottom of strips 10 and
11. Additional electrodes 17 and 18 connect respectively to the
bottom and top of strips 10 and 11 for application of an electric
potential thereacross by way of leads 21a, a, b and c connected to
the respective electrodes.
Upon application of an electric potential one of the piezoelectric
strips extends along its length between block 12 and mirror 13
while simultaneously the other piezoelectric strip contracts, in
accordance with the spontaneous polarization of the piezoelectric
strips and the polarity of the applied potential. The illustrated
embodiment depicts a situation in which the upper strip has
lengthened and the lower strip has shortened whereby the mirror is
rotated clockwise about axis 15 through an angle .theta..sub.m.
This action causes the incident light beam L to be deflected along
path 22 which is angularly displaced by an angle .theta..sub.l
=2.theta..sub.m from the undeviated path 23 corresponding to the
quiescent position of the mirror.
The electrical schematic of FIG. 2 shows the manner of biasing and
driving the piezoelectric transducers 10 and 11 connected to the
mirror 13. For simplicity of illustration, the support block which
rigidly holds the ends of the transducers remote from the mirror is
not shown in this figure. In addition, the heat sink/electrode
member has been replaced by individual electrodes 17' and 18'
affixed to the top and bottom surfaces of transducers 10 and 11,
respectively. Batteries B1 and B2 are poled and serially connected
so as to polarize the transducers parallel to their thickness
dimension (t) as indicated by the arrows designated P. The
alternating current signal source (S.sub.s) then operates on
alternate half cycles to tend to de-polarize one of the transducers
while simultaneously further polarizing the other. Thus, at the
instant when the top terminal of the signal source has a relative
positive polarity, transducer 10 is further polarized causing it to
contract whereas transducer 11 is de-poled somewhat, depending on
the relative amplitude of the bias and signal voltages, causing it
to elongate. On the next half cycle a converse action occurs
whereupon transducer 10 elongates while transducer 11 contracts
with the result that mirror 13 alternately tilts back and forth
about axis 15 causing a repetitive vertical scanning motion of the
light beam L incident on the mirror surface, the extremities of the
light beam deflection being represented by lines 22.sub.l and
22.sub.u. It should be understood that the initial poling direction
of the transducers, up or down, is immaterial. The essential
requirement is that the signal source must operate to increase the
polarization of one of the transducers and decrease the
polarization of the other but without completely de-polarizing
either transducer or actually reversing the polarization.
Consequently, the signal voltage amplitude should be held to a
level less than that of the battery voltages.
At this point consider the frequency response, that is the speed
limit capability of the extensional mode piezoelectric light
deflector. As previously explained, the resonant frequency of the
extensional mode is considerably higher than that associated with
the bending mode and thus higher frequency or faster speed
operation is attainable with an extender configuration. In general,
the upper frequency limit of the extender will be determined by the
lowest longitudinal resonant frequency of the transducer and this
will increase as the length (l) of the transducer decreases; but
for other reasons which will be explained subsequently, it is
advisable to increase the length (l) to thickness (t) ratio of the
transducers thus necessitating a compromise in accordance with the
requirements of various applications. It must be recognized,
however, that the mirror thickness (t.sub.M) also enters into a
determination of the operational speed. FIG. 1a illustrates the
even and odd first order vibrational modes which may occur in a
free mirror in the vertical direction along the height (h)
dimension as viewed from the side in the direction of arrow 25 in
FIG. 1. When the mirror thickness is approximately the same as or
less than the mirror height, the frequency of these flexural mirror
vibrations are likely to be less than the frequency of the
longitudinal transducer vibrations and thus impose the upper limit
on the operational speed of the deflector. The even order modes are
inhibited as a consequence of the upper and lower transducers
operating 180.degree. out of phase. The lowest frequency odd order
mode is also inhibited in accordance with the present invention by
connecting the transducers to the mirror at the nodal points N of
the mirror vibration for this mode.
Placement of the transducers relative to the mirror in a manner to
preclude certain mirror vibrational modes is determined in
accordance with the reciprocal theorem of mechanics. In general
this theorem states that when a force is applied at a first point
of a mechanical system and the resultant displacement measured at
some other point, subsequent application of the force to the other
point will produce a corresponding displacement at the first point.
Now since the mirror does not move at the nodal points of the
vibrational modes, the application of a force to the mirror at
those points will not produce displacement of this mode
configuration at any other points along the mirror.
On the other hand, where the mirror thickness is equal to or
greater than the mirror height, the frequency of the mirror flexure
vibrations become substantially higher than the extensional
vibration modes of the transducer and are therefore immaterial with
regard to a determination of the maximum deflector speed. The use
of a thin, lightweight mirror in conjunction with a judicious
placement of the transducers, however, enhances the overall
deflector performance. Typical constraints on relative dimensional
sizes of the various components comprising the extensional mode
deflector to achieve a substantial improvement in speed-capacity
product compared to the bender configuration of the prior art
generally stipulates a transducer length at least about 10 times
greater than the transducer thickness and a mirror thickness
approximately equal to or greater than the thickness of the
transducer.
The speed (S) of the deflector is defined as the rapidity with
which the mirror/transducer system can switch a light beam from one
point to another without overshoot or without other spurious
vibrations being introduced into the mechanical system and is taken
as the reciprocal of the switching time T.sub.S which is related to
the mechanical bandwidth of the transducer system by the
equation
S=1/T.sub.S = 2 .pi. f.sub.r (1)
where f.sub.r refers to the lowest frequency mechanical resonance
of the transducer/mirror system excited by the driving signal and
which results in rotational movement of the mirror about the axis
15.
The number of resolvable positions obtainable by the deflector in
one plane of deflection is called the linear capacity (N.sub.L).
This quantity can be determined by considering the diffraction from
an aperture, which in this case is the mirror. A circular mirror of
diameter (d) illuminated by light of wavelength (.lambda.) has a
diffraction limited angle of beam spread .theta..sub.d =.lambda./d.
If the maximum angle of deflection is .theta..sub.D then the linear
capacity
N.sub.L = .theta..sub.D /.theta..sub.d = 2.theta..sub.M d/.lambda.
(2)
where .theta..sub.M is the maximum mirror deflection. Combining
equations 1 and 2 provides a linear speed capacity product
SN.sub.L = 4.pi..theta..sub.M df.sub.r /.lambda. (3)
For this product to be large, both f.sub.r and .theta..sub.M d must
be large, but these conditions cannot be independently satisfied
inasmuch as the resonant frequency f.sub.r is inversely related to
the linear dimensions d and .theta..sub.M. These facts imply a
limiting value of the speed capacity product for a given deflector
geometry.
An analysis of a bender type deflector considered as a cantilevered
bending beam with a load (the mirror) at the free end leads to a
mathematical expression for the speed of the bender configuration
as follows:
S.sub.B = 2 .pi.f.sub.rB = K.sub.1 V.sub.l t/l.sup.2 (4)
where K.sub.1 is a constant related to the lowest frequency bending
mode, V.sub.l is the velocity of a compressional sound wave in the
material measured in the direction of its length and l and t are
the length and thickness of the transducer as previously indicated.
The linear capacity, that is the number of resolvable positions to
which the beam can be directed, is determined for the bender
configuration to be
N.sub.LB = K.sub.2 lV/.lambda.t (5)
where again l and t are the length and thickness of the transducer,
.lambda. is the light wavelength, V is the applied voltage and
K.sub.2 is a constant related to the diameter of the mirror
relative to its thickness and the piezoelectric coefficient
applicable to a ceramic transducer polarized parallel to its
thickness dimension. By combining equations 4 and 5 it is seen that
the speed capacity product of the bender configuration is
(SN.sub.L).sub.B = (K.sub.1 K.sub.2 /.lambda.) .sup.. (V/t) .sup..
(t/l) (6)
In the case of an extender type deflector, assuming that the mirror
vibrational modes are of no consequence, and that the extensional
modes of the transducers determine the frequency response of the
deflector, the speed can be represented mathematically as
S.sub.E = 2 .pi.f.sub.rE = (.pi. V.sub.l)/(2 l) (7)
and likewise the capacity N.sub.E can be represented as
N.sub.LE = K.sub.3 /.lambda. .sup.. lV/t (8)
whereupon the speed capacity product becomes
(SN.sub.L).sub.E = (K.sub.3 V.sub.l V)/(2 .lambda.t) (9)
From equations (5) and (8) it is seen that both the bender and
extender type apparatus have approximately the same linear capacity
for devices of comparable goemetry and size. These equations also
indicate that lower voltage operation is achieved, for a given
linear capacity, if the ratio of l to t is made large. In many
applications, both a low operating voltage and large capacity will
be desired in which case l/t can be made as large as speed
considerations permit. A determination of the ratio of speed of the
extender device to that of the bender obtained by combining
equations 4 and 7 yields
(S.sub.E)/(S.sub.B) .apprxeq. l/t (10)
It is therefore seen that the large l to t ratio necessary for low
voltage operation also improves the relative speed advantage of the
extender configuration.
FIG. 3 depicts an alternate embodiment of the invention in which a
pair of mirrors are articulately secured, as by epoxy cementing, to
the respective ends of transducers 10a, 10b, 11a, and 11b and a
support point is provided at any convenient point such as at the
bottom of the mirrors 13', 13" by means of a flexible rubber-like
support or somewhere between the mirrors, for instance at the
center point of the lower transducers 10a, 10b by epoxy cementing
to a support plate 12'. For simplicity of illustration, the
electrodes associated with the transducers have not been shown in
the figure but it will be appreciated that the manner of electrode
connection and excitation of each pair of transducers 10a, 11a and
10b, 11b may be the same as explained with respect to the
previously described embodiment. The points of attachment of the
transducers 10a and 10b to the support plate provide a reaction
point about which the transducers are free to extend and contract
for the purpose of rotating the mirrors about their respective axes
15', 15". For the case where both pairs of transducers 10a, 11a and
10b, 11b are poled as shown in FIG. 2, namely vertically upward
parallel to the thickness dimension, an applied alternating current
signal will alternately cause extension and contraction of the
lower transducers 10a and 10b and likewise for the upper
transducers 11a and 11b except for a phase shift of 180.degree.
relative to the lower transducers, thereby causing the mirrors to
oscillate back and forth about their respective axes.
It will be noted that the transducers are connected to the upper
and lower edges of the mirrors in this embodiment. This is not
essential but is done merely to allow more space for passage of the
light beam L' which is deflected as a consequence of multiple
reflection from the interior surface of the mirrors. As a
consequence of this construction, the degree of mirror rotation per
unit of applied voltage is not as large as in the FIG. 1 embodiment
where the transducers were located closer to the mirror rotational
axis; but the overall beam deflection is nevertheless greater by
virtue of the multiple reflections.
Again as in the case of the FIG. 1 embodiment, the possibility of
mirror vibrations must be considered as a factor which may limit
the frequency response of the deflector. In this instance, since
the transducers are connected to the mirror edges, the mirror
thickness t is selected to be sufficient with respect to its height
(h) to assure that the vibrational modes extending vertically
between the lower and upper transducers are of substantially higher
frequency than the transducer extensional mode vibrations. However,
since the mirror width (W.sub.M) is greater than its height, there
is a likelihood of vibrational modes developing along the width
dimension. Looking down on the mirror edges in the direction of
arrows 25' 25", the odd and even order torsional vibrational modes
that can occur in a free mirror would be as shown in FIG. 3a.
Excitation of the odd modes is inhibited inasmuch as the two top
transducers operate in phase and likewise for the two bottom
transducers. The even order modes, however, remain to be contended
with. These modes can be inhibited as explained with reference to
the FIG. 1 embodiment by judicious placement of the transducers
relative to the mirror. The first order even mode, for instance, is
inhibited by locating the center line of the transducers at the
nodes of this vibrational mode which in this case are located about
one-quarter of the mirror width from the edges of the mirrors, that
is X = W.sub.M /4 as shown in FIG. 3. Hence, the lowest frequency
vibrational mode which is able to develop is the second order even
torsional mode which is about three times the frequency of the
first order even mode. Thus, by appropriate positioning of the
transducers relative to the mirrors it can be assured that the
frequency limit of the device is determined by the transducer
dimensions irrespective of the tendency for first order mirror
vibrational modes to develop. The other characteristics of the
deflector concerning speed, capacity, the speed-capacity product,
length of the mirrors relative to their thickness and the
desirability of increasing the length to thickness ratio of the
transducers in the interest of achieving lower voltage operation
and greater capacity are all applicable as explained with reference
to the prior embodiment.
While the invention has been described in its preferred
embodiments, it is to be understood that the words which have been
used are words of description rather than limitation and that
changes within the purview of the appended claims may be made
without departing from the true scope and spirit of the invention
in its broader aspects.
* * * * *