U.S. patent number 3,750,056 [Application Number 05/233,649] was granted by the patent office on 1973-07-31 for acoustic surface-wave filters and methods of manufacture therefor.
This patent grant is currently assigned to Zenith Radio Corporation. Invention is credited to Sundaram Subramanian.
United States Patent |
3,750,056 |
Subramanian |
July 31, 1973 |
ACOUSTIC SURFACE-WAVE FILTERS AND METHODS OF MANUFACTURE
THEREFOR
Abstract
A surface-wave filter has a wave-propagating medium of
ferroelectric material that exhibits a rate of change of
surface-wave velocity which increases with increasing degree of
poling more rapidly than its surface-wave coupling factor increases
as the poling level is raised. The ultimate transducer interaction
efficiency is a function of the coupling factor. Moreover, the
material is poled in an amount that effects a desired surface-wave
velocity while, at the same time, producing a surface-wave coupling
factor that is significantly less than that corresponding to an
optimum value with respect to transducer interaction efficiency.
Completing the structure, an input transducer serves to launch
acoustic surface waves and an output transducer responds to those
waves by developing an output signal.
Inventors: |
Subramanian; Sundaram
(Evanston, IL) |
Assignee: |
Zenith Radio Corporation
(Chicago, IL)
|
Family
ID: |
22878123 |
Appl.
No.: |
05/233,649 |
Filed: |
March 10, 1972 |
Current U.S.
Class: |
333/193;
310/313R; 310/313A; 29/25.35; 310/358 |
Current CPC
Class: |
H03H
3/10 (20130101); Y10T 29/42 (20150115) |
Current International
Class: |
H03H
3/00 (20060101); H03H 3/10 (20060101); H03h
009/14 (); H01v 007/02 (); B65d 063/08 () |
Field of
Search: |
;29/25.35 ;252/62.9
;310/9.7,9.8 ;317/262 ;333/72,3R |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
"Ultrasonic Transducer Materials" by Mattiat, pp. 82-86 &
100-111, Plenum Press, 1971. .
"Piezoelectric Ceramics" by Jaffee, Cook, and Jaffee, Chapter 7,
pp. 135-183, Academic Press, 1971..
|
Primary Examiner: Rolinec; Rudolph V.
Assistant Examiner: Jaeger; Hugh D.
Claims
I claim:
1. In the method of making a surface-wave filter having a poled
wave propagating medium, exhibiting surface-wave velocity and
interaction efficiency characteristics varying as functions of its
surface-wave coupling factor, and an invariant coupling factor
varying as a function of the poling of said medium, an input
transducer responsive to input signals for launching acoustic
surface waves along said medium and an output transducer responsive
to said acoustic waves for developing an output signal, the steps
comprising:
selecting as said medium a ferroelectric material exhibiting a rate
of change of said surface-wave velocity that increases with
increasing degree of poling more rapidly than said surface-wave
coupling factor increases with said increasing degree of
poling;
subjecting said material to a controlled degree of temperature;
and applying across said temperature-subjected material an electric
poling field having a strength and persisting for a time interval
sufficient to obtain a desired stabilized surface-wave velocity at
a value of surface-wave coupling factor which is significantly less
than that corresponding to maximum transducer interaction
efficiency, and an invariant coupling factor of approximately
0.5.
2. A method as defined in claim 1 in which said controlled degree
of temperature is higher than any temperature to which said
material subsequently is subjected during completion of said
filter.
3. A surface wave filter comprising:
a wave-propagating medium of ferroelectric material exhibiting a
rate of change of surface-wave velocity that increases with
increasing degree of poling more rapidly than its surface-wave
coupling factor increases with said increasing degree of poling,
the transducer interaction efficiency of said material being
proportional to said surface-wave coupling factor, the degree of
poling of said material being represented by its invariant coupling
factor, said material being poled in an amount effecting a desired
surface-wave coupling factor significantly less than that
corresponding to the maximum value of said transducer interaction
efficiency and at an invariant coupling factor of less than
0.5;
an input transducer disposed on a surface of said medium near one
end thereof and responsive to input signals for launching acoustic
surface-waves along said surface;
and an output transducer disposed on said surface near the other
end thereof and responsive to said acoustic waves for developing an
output signal.
Description
BACKGROUND OF THE INVENTION
The present invention pertains to surface-wave filters. More
particularly, it relates to surface-wave filters which may be mass
produced with good control of ultimate characteristics and to
methods for achieving such control.
It is known that an electrode array composed of a pair of
interleaved combs of conducting teeth may be coupled to a
piezoelectric medium to launch or respond to acoustic surface
waves. Such a device, with its small size, is particularly useful
in conjunction with solid-state functional integrated circuitry
where signal selectivity is desired. A number of different versions
of these devices, together with various modifications and
adjustments thereof, are described and others are cross-referenced
in United States Letters Patent 3,582,840 issued June 1, 1971 and
assigned to the same assignee as the present invention.
A salient characteristic of surface-wave filters is the sharp
selectivity that may be obtained. Moreover, the particular
selectivity pattern and center frequency may be tailored more or
less as desired by means of appropriate engineering design.
Consequently, the filters represent an attractive component for use
in such systems as the intermediate-frequency stages of radio and
television receivers where a particular bandpass characteristic is
necessary. These devices are capable of eliminating the need for
the critical and usually much larger and more cumbersome components
such as wound coils.
Of course, use in such apparatus as radio and television receivers
necessitates adaptability to mass production. In turn this
necessitates a high degree of reproducibility. Even in the case of
laboratory production, however, surface-wave filters have been
found to exhibit significant variations from one unit to the
next.
It is, therefore, a general object of the present invention to
provide a new and improved method of manufacturing surface-wave
filters that at least reduces such variations during
production.
A corresponding object of the present invention is to provide a new
and improved surface-wave filter that enables mass production with
a higher degree of reproducibility.
A specific object of the present invention is to produce
surface-wave filters that exhibit a reduced variation in the center
frequency as between successive filters turned out during
manufacture.
The invention thus relates to methods of making surface-wave
filters and to the filters themselves. Each filter has a poled
wave-propagating medium, an input transducer which responds to
input signals and launches acoustic surface waves along the medium
together with an output transducer which is responsive to those
acoustic waves for developing an output signal. Selected as the
propagating medium is a ferroelectric material that exhibits a rate
of change of surface-wave velocity which increases with increasing
degree of poling more rapidly than its surface-wave coupling factor
increases with the same increasing degree of poling. The
transducers exhibit an ultimate efficiency that is a function of
the surface-wave coupling factor. During poling, the material is
subjected to a controlled degree of temperature. The poling itself
is accomplished by applying across the material an electric poling
field that has a strength and persists for a time interval which is
selected to obtain a desired surface-wave velocity. Concomitantly,
a surface-wave coupling factor is obtained which is significantly
less than that which would correspond to optimum ultimate
transducer efficiency.
The features of the present invention which are believed to be
novel are set forth with particularity in the appended claims. The
invention, together with further objects and advantages thereof,
may best be understood by reference to the following description
taken in connection with the accompanying drawings, in the several
figures of which like reference numerals identify like elements and
in which:
FIG. 1 is a partly schematic plan view of a now known acoustic-wave
filter;
FIG. 2 is a plot which exhibits a desired bandpass characteristic
of the intermediate frequency stages of a color television
receiver;
FIG. 3 includes a pair of related plots that depict correlation
between surface-wave velocity and surface-wave coupling factor as
against degree of poling in a surface-wave filter;
FIG. 4 is a plot of the phase angle .phi. vs frequency obtained by
measuring the driving point impedance of a surface-wave filter as a
function of frequency;
FIGS. 5a, 5b and 5c are plots which represent a function of the
degree of poling of a surface-wave filter as a result of time,
temperature and field strength; and
FIGS. 6a and 6b are plots which represent the effect of
temperature, to which the filter may be subjected after poling has
been accomplished, on surface-wave velocity and surface-wave
coupling factor.
As is now known, surface-wave filters may take a variety of forms.
A simple and yet typical form is shown in FIG. 1. Thus, an input
signal source 10 is connected across an electrode array 12 which is
mechanically coupled to a piezoelectric acoustic-wave-propagating
medium or substrate 13 to constitute therewith an input transducer.
An output electrode array 14 also is mechanically coupled to
substrate 13 to constitute therewith an output transducer.
Electrode arrays 12 and 14 are each constructed of two interleaved
comb-type electrodes of a conductive material, such as gold or
aluminum, which may be vacuum deposited on the smoothly lapped and
polished planar upper surface of substrate 13. The piezoelectric
material is one, such as lead zirconate titanate (PZT), that
propagates acoustic surface waves.
In operation, direct piezoelectric surface-wave transduction is
accomplished by input transducer 12. Periodic electric fields are
produced across the comb array when a signal from source 10 is
applied to the electrodes. These fields cause perturbations or
deformations of the surface of substrate 13 by piezoelectric
action. Efficient generation of surface waves occurs when the
strain components produced by the electric fields in the
piezoelectric substrate substantially match the strain components
associated with the surface-wave mode. These mechanical
perturbations travel along the surface of substrate 13 as
generalized surface waves representative of the input signal.
Source 10 might represent the intermediate-frequency output signal
from a television receiver tuner. That signal is converted by
transducer 12 into acoustic waves. Those surface waves are then
transmitted along the substrate to output transducer 14 where they
are converted to an electric signal for transmission to a load 15
connected across the two interleaved combs in output transducer 14.
In this example, load 15 represents a subsequent video or audio
stage of the receiver. Utilizing PZT as the substrate material in
the example, the teeth of both transducers 12 and 14 are each about
twelve microns wide and are separated by a center-to-center spacing
of 24 microns for the application of an intermediate-frequency
signal in the standard 40 megahertz range. The spacing between
transducer 12 and transducer 14 is on the order of 80 mils and the
width of the wavefront is approximately 0.1 inch.
The potential developed between any given pair of successive teeth
in electrode array 12 produces two waves traveling along the
surface of substrate 13, in opposing directions, perpendicular to
the teeth for the illustrative case of a ceramic which is poled
perpendicular to the surface. When the center-to-center distance
between the teeth is one-half of the acoustic wavelength of the
wave at the desired input signal frequency (the so-called center
frequency), relative maxima of the output waves are produced by
piezoelectric transduction in transducer 12. For increased
selectivity, additional electrode teeth are added to the comb
patterns of transducers 12 and 14. Further modifications and
adjustments are described and others are cross-referenced in the
aforementioned Letters Patent for the purpose of particularly
shaping the response presented by the filter to the transmitted
signal. Techniques are also there mentioned for attenuating or
advantageously making use of the one of the two surface waves that
travels to the left from transducer 12 in FIG. 1. It will suffice
for purposes of understanding the present invention to consider
only the acoustic surface waves that travel to the right from
transducer 12 in the direction toward transducer 14.
FIG. 2 depicts a typical bandpass characteristic for a television
receiver intermediate frequency amplifier. It will be observed to
include the need for well defined comparatively deep traps
particularly at the frequencies of the associated and adjacent
sound. These are for the purpose of precluding the appearance of
sound caused interference in the reproduced picture. Additionally,
proper picture or video fidelity requires accurate shaping of the
main response lobe relative to the picture carrier and the color
subcarrier. The aforementioned Letters Patent describes in detail
various techniques in the practical design of surface-wave filters
intended for use in such an application. For present purposes, it
is sufficient to note that it is necessary to assign to each
transducer a selected and fixed center frequency of maximum
response. To that end, as previously indicated, the inter-tooth
spacing of the interleaved combs is chosen to be one-half the
wavelength in the propagating material of the acoustic surface
waves. The acoustic wavelength in the medium is, in turn, a
function of the surface-wave velocity.
Also necessarily of interest in the design of a surface-wave filter
in such an application is the insertion loss encountered by its
inclusion in a system. Of course, as indicated initial
consideration is the desirability of minimizing the amount of
insertion loss, since any such loss normally has to be overcome by
the inclusion in the system of an equivalent amount of compensating
amplification. Accordingly, it is customary to seek ultimate
maximum efficiency of transducer interaction. That is, a maximum is
sought in the surface-wave coupling factor k.sub.s. At least
generally, the surface-wave coupling factor is a function of the
degree to which the substrate is poled. Consequently, the situation
indicates the use of as high a poling field strength as can be
obtained without electrical breakdown across the material.
In practice, it is found that the rate of change of surface-wave
velocity increases with an increased degree of poling. Similarly,
the surface-wave coupling factor also increases with an increased
degree of poling. However, the rate of change of surface-wave
velocity with such an increase is more rapid than that of the
surface-wave coupling factor. With a very high degree of poling,
the change of surface-wave velocity with any change in degree of
poling is substantial. Consequently, even small changes in poling
level during manufacture can result in significant changes in
surface-wave velocity. With the intertooth spacing of the
transducers already fixed as a matter of design, this variation in
surface-wave velocity leads to a difference in the actual center
frequencies as between any one transducer and other supposedly
identical transducers. The end result is errors in placement of the
different carrier frequencies and trap positions on the overall
frequency-response characteristic. Even with very careful control
of the poling level, it has been found that a spread of .+-. 2
percent may be expected in the ultimate center frequencies of a
succession of filters.
In accordance with the present invention, the applied electric
poling field is caused to have a strength and to persist for a time
interval selected in view of the temperature so as to obtain the
desired surface-wave velocity while, at the same time, obtaining a
surface-wave coupling factor that is significantly less than that
corresponding to ultimate maximum transducer interaction
efficiency. Because the surface-wave velocity increases with
increased poling more rapidly than the concomitant increase in
surface-wave coupling factor, the approach herein contemplated
results in attaining a surface-wave velocity at a poling level
where there is a significantly less change in surface-wave velocity
for any deviation in poling degree. Consequently, enhanced
reproducibility of result, as between successively produced
filters, is achieved at the expense of some reduction in
surface-wave coupling factor.
By way of further explanation, the velocity of surface waves
propagating in the basal plane of a ferroelectric material, such as
those of the PZT-type, depends upon density, four elastic
constants, three piezoelectric constants and two dielectric
constants. All of these different constants are dependent upon the
degree of poling of the material. As discussed in "Variation of
Electroelastic Constants of Polycrystalline Lead Titanate Zirconate
with Thoroughness of Poling," J.A.S.A., Vol. 36, No. 3, pp.
515-520, March 1964, by D. Berlincourt, the variation of the
elastoelectric constants can be measured as a function of the
invariant coupling factor k.sub.i3. This invariant coupling factor
is the highest piezoelectric coupling factor obtainable for a given
electric field and certain specified elastic stress conditions.
Invariant coupling factor k.sub.i3 serves as a measure of the
degree of poling.
Using PZT-5 as a material for example, the elastic constants
decrease from 5 to 11 percent as between an unpoled and a fully
poled condition. The dielectric constants decrease by 31 and 47
percent for the same change. Two of the piezoelectric constants
gradually increase with degree of poling while the other decreases
after an initial small increase. The end result of these different
variations as the poling is changed is the establishment of a
definite relationship between the surface-wave velocity V.sub.s and
the degree of poling as shown in the upper trace of FIG. 3. Thus,
the surface-wave velocity varies from 1662 meters/second for
unpoled material to 2085 meters/second for a substantially fully
poled material, a variation of approximately 25 percent. As already
indicated, the rate of change of the surface-wave velocity
increases as the degree of poling, represented by the invariant
coupling factor k.sub.i3, is increased. For materials of a
particular symmetry, the surface-wave velocity curves for both a
free surface and a metallized surface may be calculated utilizing
the set of equations derived by C--C. Tseng in his Doctoral
Dissertation published at the University of California, Berkeley,
in 1966. The solid line curve in the upper portion of FIG. 3
represents the result of such a calculation for a free surface. On
the other hand, the dashed-line curve represents actual
experimentally measured values of that surface-wave velocity.
The lower trace in FIG. 3 depicts the change in surface-wave
coupling factor as the degree of poling is increased. In this case,
the rate of change is almost constant, increasing to a maximum
value for the surface-wave coupling factor k.sub.s of about 0.23.
From the difference .DELTA. V.sub.s between the surface-wave
velocity on a free surface and that on a metallized surface, the
surface-wave coupling factor k.sub.s may be directly calculated.
Again in the lower portion of FIG. 3, the solid line trace
represents the calculated determination while the dashed line
depicts the values as measured experimentally.
Intrinsic coupling factor k.sub.i3 may be calculated directly from
measurements of the radial coupling factor, the thickness coupling
factor and the low- and high-frequency dielectric constants. By
measuring the driving point impedance of the resulting transducer
as a function of frequency, the apparent surface-wave velocity and
the surface-wave coupling factor may be calculated. FIG. 4 is a
plot of the phase angle .phi. as determined by such measurement of
the driving point impedance. It will be observed that the total
phase angle is a function not only of the surface-wave development
but also of the bulk mode, series and dielectric losses,
.phi..sub.l, .phi..sub.s and .phi..sub.d, respectively. Thus a
complete determination necessitates allowing for the existence of
the latter losses. The surface-wave response curve represented by
.phi..sub.A is typical, exhibiting a main lobe A between a pair of
minor lobes separated by nulls B and C respectively. That is, the
response is basically a sin x/x function.
As indicated, it is contemplated herein to trade a certain amount
of surface-wave coupling factor in order to obtain improved
reproducibility of surface-wave velocity which, in turn, yields
improved reproducibility of center frequency. Returning to FIG. 3,
it will be observed that .DELTA.V.sub.s /.DELTA.k.sub.i3 decreases
as the value of the invariant coupling factor k.sub.i3, or the
poling level, is decreased. Consequently, the degree to which the
material is poled preferably is selected to have an ultimate value
of approximately 0.5 as represented by the invariant coupling
factor k.sub.i3. Accordingly, poling is accomplished to a level at
which the velocity curve in the upper portion of FIG. 3 is much
flatter than would be the case if maximum surface-wave coupling
factor were to be sought.
Poling the material to the desired value of the invariant coupling
factor is a function of time, field strength and temperature as
illustrated in FIGS. 5a-5c. The particular values there represented
were determined experimentally utilizing Honeywell S* ceramic
ferroelectric material. However, analogous characteristics will be
exhibited by other piezoelectric ceramics. Moreover, the ordinate
in each of these three figures as measured in this case was the
thickness coupling factor k.sub.t. However, the changes in the
surface-wave coupling factor and surface-wave velocity in the
material are a function of the thickness coupling factor, which, in
turn, is a function of the invariant coupling factor k.sub.i3.
Particularly with reference to FIG. 5a it will be seen that, for a
field strength of 100 volts/mil and at a temperature of
100.degree.C., the poling level achieved remains relatively
constant after the first few minutes. With reference to FIG. 5b,
wherein the same field strength is applied and the time interval is
30 minutes, it will be observed that the degree of poling, as
represented again by the thickness coupling factor k.sub.t,
increases fairly consistently as the temperature is elevated.
Finally, FIG. 5c depicts the degree of poling obtained with
increase in field strength and at a time interval of thirty
minutes. In this case, two results are shown, one at 26.degree.C.
and another at 100.degree.C. Thus, at the much lower temperature,
the degree of poling continues to increase as the field strength is
raised. At a very high temperature, however, an actually decreased
degree of poling is obtained as the field strength is
increased.
The curves of FIGS. 5a-5c thus reveal that considerable flexibility
is offered in choosing the actual poling conditions to be employed
in any given manufacturing operation. Whatever the actual time,
temperature and field strength characteristics for a particular
material, the combination of those variables is selected so as to
achieve an ultimate degree of poling level that corresponds
approximately to an invariant coupling factor of 0.5 or a flatter
part of the curve which relates the characteristic of surface-wave
velocity as against degree of poling.
Whatever the precise degree of poling attained, it is also
necessary to insure that subsequent manufacturing operations do not
serve to change the desired degree of poling. Usually, the actual
transducer electrodes and all connecting leads are deposited
subsequent to the poling operation. Finally, the entire device is
encapsulated in a hermetically sealed package. These subsequent
operations may involve subjecting the poled ferroelectric material
to a temperature of the order of 200.degree.C. It is important to
see that such thermal shock does not serve to depole the material
and thus lower the surface-wave velocity. Accordingly, the material
selected should be one which does not experience any significant
degree of depoling at whatever temperature levels are established
during the subsequent manufacturing steps.
FIGS. 6a and 6b depict the effect of temperature in terms of change
in surface-wave velocity V.sub.s and surface-wave coupling factor
k.sub.s for four different typical present-day ferroelectric
ceramic materials. It is clear from an examination of FIGS. 6a and
FIG. 6b that PZT-5 or PZT-6 constitute the better choices for use
in any case where the manufacturing techniques require that the
poled substrate be subjected to any significant temperature level
during subsequent manufacturing steps.
It is necessary to recognize that the different curves presented in
the drawings and the particular values discussed in the above
description are but examples. Substantial quantitative change in
the different characteristics may be expected as between a variety
of ferroelectric materials. In a particular case, the surface-wave
velocity and surface-wave coupling factors are determined as a
function of the degree of poling, and a specified poling level is
then selected so as to correspond with a portion of the velocity
curve which is reasonably flat. Controlling the temperature during
poling, the poling time and the field strength are then selected so
as to achieve the desired degree of poling. As a result, the
variation from one unit to another in the surface-wave velocity
during mass production is reduced. In turn, this results in
improved consistency of transducer center frequency as between
successively produced units.
While particular embodiments of the invention have been shown and
described, it will be obvious to those skilled in the art that
changes and modifications may be made without departing from the
invention in its broader aspects and, therefore, the aim in the
appended claims is to cover all such changes and modifications as
fall within the true spirit and scope of the invention.
* * * * *