U.S. patent number 3,732,426 [Application Number 05/167,373] was granted by the patent office on 1973-05-08 for x-ray source for generating an x-ray beam having selectable sectional shapes.
This patent grant is currently assigned to Nihona Denshi Kabushiki Kaisha. Invention is credited to Toshiaki Shimizu.
United States Patent |
3,732,426 |
Shimizu |
May 8, 1973 |
X-RAY SOURCE FOR GENERATING AN X-RAY BEAM HAVING SELECTABLE
SECTIONAL SHAPES
Abstract
This specification discloses an X-ray source comprising an
electron gun, an astigmator, a condenser lens and a target. The
astigmator comprises four electrodes to which a voltage is
supplied, said voltage determining the sectional shape of the
electron beam passed through the astigmator. The electron beam
passed through the astigmator is focused on the target by the
condenser lens, the resultant impingement causing an X-ray to be
generated from the target.
Inventors: |
Shimizu; Toshiaki (Setagaya-ku,
Tokyo, JA) |
Assignee: |
Nihona Denshi Kabushiki Kaisha
(Tokyo, JA)
|
Family
ID: |
13328226 |
Appl.
No.: |
05/167,373 |
Filed: |
July 30, 1971 |
Current U.S.
Class: |
250/399; 378/123;
378/138 |
Current CPC
Class: |
H01J
35/147 (20190501); H01J 29/56 (20130101); G01N
23/223 (20130101); G01N 2223/076 (20130101) |
Current International
Class: |
H01J
35/14 (20060101); H01J 35/00 (20060101); H01J
29/56 (20060101); G01N 23/223 (20060101); G01N
23/22 (20060101); H01j 037/20 () |
Field of
Search: |
;313/DIG.3,57,83
;250/90,49.5C,49.5D |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lawrence; James W.
Assistant Examiner: Dixon; Harold A.
Claims
I claim:
1. An X-ray source for generating an X-ray pattern having a
plurality of selectable sectional shapes comprising:
A. an electron gun for producing an electron beam;
B. a condenser lens comprising two coils, first, second and third
pole pieces, the polarities of said first and third pole pieces
being arranged opposite that of the second, such that the electron
beam is not substantially rotated passing through the lens;
C. means including an astigmator lens placed between said gun and
condenser lens for shaping the electron beam into at least two
distinct shapes;
D. a target on which said beam is focused by said condenser lens,
such that a shaped X-ray beam emits therefrom relating to the shape
of the electron beam impinging thereon.
2. An X-ray source according to claim 1 wherein said astigmator
comprises four electrodes connected to a power supply source.
3. An X-ray source according to claim 1 wherein said astigmator
comprises four electromagnets connected to a power supply
source.
4. An apparatus for generating an X-ray pattern having a plurality
of selectable sectional shapes comprising:
A. a vacuum chamber;
B. a nozzle, having a minute opening, said nozzle being connected
to said chamber;
C. a vacuum pump for exhausting the air entering the opening of
said nozzle;
D. an electron gun for producing an electron beam;
E. a condenser lens for focusing said beam so as to pass through
the opening of said nozzle, comprising two coils, first, second and
third pole pieces, the polarity of said first and third pole pieces
being arranged opposite that of the second such that the electron
beam is not substantially rotated; and,
F. means including an astigmator lens placed between said gun and
said lens, for varying the sectional shape of the electron beam
passed through the opening of said nozzle, such that said beam may
irradiate a specimen to generate an X-ray relating to the shape of
the electron beam.
Description
This invention relates generally to an X-ray source and more
particularly to an X-ray source capable of generating X-rays having
a plurality of sectional shapes.
In X-ray apparatus for the structural analysis of materials, it is
necessary to use various kinds of X-ray source dependent upon the
nature of the analysis being carried out. In general, the X-ray
source comprises an electron gun, a condenser lens and a target.
The electrons emanating from the gun are focused on the target by
the condenser lens. The resultant impingement causes an X-ray to be
generated from the target. However, when using an X-ray projection
pattern camera, for example, a point X-ray source is used. In this
case, the incorporated filament is of the hairpin type so as to
form a very small circular image of the electron beam on the
target. Again, when using a Laue Camera, a line X-ray source is
used. In this case, a line filament is incorporated so as to form a
long, narrow image of the electron beam on the target.
It will thus be appreciated that a number of X-ray sources are
necessary in order to cover a variety of analyses.
Briefly, according to this invention, there is provided a single
X-ray source capable of generating a multiplicity of X-rays. This
is effected by placing an electrostatic or electromagnetic
astigmator between the electron gun and the electromagnetic
condenser lens and by varying the voltage or current applied to
said astigmator so as to change the shape of the electron image on
the target according to the purpose of analysis.
Various other objects and advantages pertaining to this invention
will become more readily apparent from the following detailed
description read in conjunction with the accompanying drawings in
which:
FIG. 1 shows an embodiment of this invention in which an
electrostatic astigmator is provided;
FIG. 2 is a diagram of an electrostatic astigmator showing the
cross section of the electron beam after passing through the
astigmator;
FIG. 3 is a diagram of an electromagnetic astigmator; and,
FIG. 4 shows an apparatus for generating an X-ray according to this
invention.
Referring to FIG. 1, an electron gun 1 comprises a hairpin filament
2 and an anode 3. Filament heating current and high voltage for
energizing the anode are applied to the gun from a power supply
source (not shown) via a high tension cable 4. The accelerated
electrons pass through an electrostatic astigmator 5 comprising
four electrodes 5a, 5b, 5c and 5d, and are focused on a target 6
such as Fe or Mo by a condenser lens 7 suitably energized by a
power supply source 8. In this arrangement, a control voltage is
supplied to the astigmator 5 from a power supply source 10 (see
FIG. 2). Electrodes 5a and 5b are maintained at a positive
potential and electrodes 5c and 5d at a negative potential. Thus,
the electrons passing through the astigmator are attracted towards
electrodes 5a and 5b and repelled from electrodes 5c and 5d, a
phenomenon which causes the electron beam to become elongated as
shown by the cross section A in FIG. 2. Consequently, an electron
beam of similar shape, that is to say, long and narrow, impinges on
the target 6 forming a replica image and the resultant generated
X-ray passes through an Al or Be window 11.
By reversing the polarity of the astigmator electrodes, cross
section A becomes orientated as shown by cross section B. Further,
when the voltage applied to the four electrodes is zero, the
electron beam cross section remains unchanged and the X-ray source
functions as a point source.
In this embodiment, the condenser lens 7 comprises two coils 12 and
13 and three pole pieces 14, 15 and 16. In order to prevent the
lens from rotating the electron beam and to facilitate spot size
adjustment, the polarities of pole pieces 14 and 16 are arranged so
as to be opposite that of pole piece 15.
In the above embodiment, an electrostatic astigmator is used for
adjusting the sectional shape of the electron beam. However, it is
possible to use an electromagnetic astigmator in lieu as shown in
FIG. 3. In this case, four electromagnets 20a, 20b, 20c and 20d
replace the four electrodes 5a, 5b, 5c and 5d shown in FIG. 2. The
magnets are energized by a power supply 21 via a switch 22, in
order to produce a magnetic field, said field serving to control
the shape of the electron beam.
In the apparatus shown in FIG. 4, an electron beam irradiates a
specimen 31 placed in the atmosphere so as to cause the specimen to
generate an X-ray. The electron beam is produced by an electron gun
32 positioned in a chamber 33 which is connected to a vacuum pump
(not shown) via a tube 34. The beam passes through an electrostatic
astigmator 35, a nonrotating electromagnetic condenser lens 36 and
a nozzle 37 having a small opening 38. The air entering the nozzle
36 through the opening 38 is exhausted by a vacuum pump 40 via a
tube 39. The sectional shape of the beam is adjusted by the
astigmator 35 and then focused in the neighborhood of the opening
38 by the condenser lens 36. By so doing, it is possible to reduce
the diameter of the opening to an extent whereby the air entering
the nozzle through the opening is decreased. The electron beam
passed through the opening 38 is irradiated on the specimen 31, the
resultant impingement causing an X-ray to be generated from the
specimen. The generated X-ray is dispersed according to its
wavelength and detected by a monochromator comprising slits 41 and
42, a crystal 43 and a detector 44. As a result, the specimen is
quantitatively and qualitatively analyzed.
Having thus described the invention with the detail and
particularity as required by the Patent Laws, what is desired
protected by Letters Patent is set forth in the following
claims.
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