U.S. patent number 3,715,625 [Application Number 05/105,880] was granted by the patent office on 1973-02-06 for plasma generator.
Invention is credited to Kenneth W. Ehlers.
United States Patent |
3,715,625 |
Ehlers |
February 6, 1973 |
PLASMA GENERATOR
Abstract
An apparatus for generation of dense ion-electron plasma. Ions
are accelerated from an ion source of the apparatus through an
electron emitting filament thereof. Electrons from the rear of the
filament are abstracted to the positive ions and the combination
forms a moving plasma with ions and electrons of equal velocity,
the plasma forming a concentrated beam utilized for striking a
desired target.
Inventors: |
Ehlers; Kenneth W. (Alamo,
CA) |
Family
ID: |
22308284 |
Appl.
No.: |
05/105,880 |
Filed: |
January 12, 1971 |
Current U.S.
Class: |
361/230;
315/111.21 |
Current CPC
Class: |
H05H
1/24 (20130101); H05H 1/54 (20130101); H05H
1/48 (20130101) |
Current International
Class: |
H05H
1/24 (20060101); H01j 001/20 () |
Field of
Search: |
;317/3,4 ;315/111 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Miller; J. D.
Assistant Examiner: Moose, Jr.; Harry E.
Claims
What I claim is:
1. A plasma generator comprising: a conductive cylinder-like means,
means for creating an axial magnetic field centrally through said
cylinder-like means, means for maintaining said cylinder-like means
at a positive electrical potential, electron emitting filament
means maintained at a negative potential positioned at one end of
said cylinder-like means, means for heating said filament means,
cold cathode means maintained at a negative potential positioned at
the opposite end of said cylinder-like means, and means for
supplying to said cylinder-like means a gas to be ionized, whereby
ions are attracted toward said filament due to the negative
potential thereof and pass through said filament means due to the
magnetic field and create a positive space charge which causes
electrons from said filament means to flow in the same direction
and at the same velocity as the ions thereby producing a narrow,
concentrated plasma beam.
2. The plasma generator defined in claim 1, in combination with a
target means maintained at a negative potential, said target means
being positioned in spaced relationship with respect to said
filament means.
3. The plasma generator defined in claim 1, wherein said axial
magnetic field creating means comprises a magnet means, coil means
wrapped about at least one portion of said magnetic means, and
power supply means operatively connected to said coil means.
4. The plasma generator defined in claim 3, wherein said magnet
means comprises a pair of end pieces and a pair of interconnecting
pole pieces, said coil means being wrapped around at least one of
said pole pieces; said cylinder-like means, said filament means,
and said cold cathode means being positioned intermediate said end
piece and said pole pieces of said magnet means.
5. The plasma generator defined in claim 4, wherein said gas supply
means includes a gas supply source, and conduit means connected at
one end thereof to said gas supply source and with the opposite end
thereof extending through one of said end pieces of said magnetic
means and through said cold cathode means so as to direct gas to be
ionized into said cylinder-like means at the portion thereof
adjacent said cold cathode means.
6. The plasma generator defined in claim 1, wherein said
cylinder-like means is at a positive potential of about 200
volts.
7. The plasma generator defined in claim 1, wherein said gas supply
means supplies hydrogen gas to said cylinder-like means.
Description
BACKGROUND OF THE INVENTION
The invention described herein was made in the course of, or under,
Contract No. W-7405-ENG-48, with the United States Atomic Energy
Commission.
This invention is directed to a plasma source, and more
particularly to an ion-electron generator from which an energetic
plasma may be obtained.
Ion sources, such as the Phillips Ion Gauge are known in the art.
In such conventional ion sources free electrons are constrained by
electric and magnetic fields to circulate in a chamber and ionize a
gas. Also, in such conventional ion beams, the mutual repulsion
between ions causes the beam to separate and disperse so that only
a few ions remain to strike the target.
SUMMARY OF THE INVENTION
The invention is an electron-ion source from which an energetic
plasma may be obtained. Also, the inventive device provides a very
advantageous ion source in that a very high ion current can be
obtained without "blow-up", that is, mutual charge repulsion
between the ions is cancelled by the charge of the electrons. Thus,
the present device may function as a low-energy, high-current ion
source with a high density ion beam.
The means for creating the ions and electrons in the present
invention is similar to that used in conventional ion sources.
However, in the present device, the ions are withdrawn from the
chamber through spaces between heated electron emitting filaments.
The space charge of the ions causes electrons to follow the emitted
ions, forming a plasma in which the electrons and ions have equal
velocity. No appreciable local fields exist within the plasma and
improved plasma stability is obtained.
Therefore, it is an object of this invention to provide an
electron-ion plasma generator.
A further object of the invention is to provide a plasma generator
which produces a plasma in which the ions and electrons are all
moving at the same velocity so that local instabilities within the
plasma are minimized.
Another object of the invention is to provide a device which may
function as a low-energy, high-current ion source with a high
density ion beam.
Another object of the invention is to provide a plasma generator
wherein the electrons cancel the space charge so that the ions do
not repel and separate, thereby producing a narrow, concentrated
beam of plasma wherein the ions and electrons are moving at the
same velocity.
Other objects of the invention, not specifically set forth above,
will become readily apparent from the following description and
accompanying drawing.
BRIEF DESCRIPTION OF THE DRAWING
The single FIGURE illustrates an embodiment of the inventive plasma
generator.
DESCRIPTION OF THE INVENTION
As pointed out above the invention is directed to a generator for
producing a plasma in which the ions and electrons are all moving
at the same velocity so that local instabilities within the plasma
are minimized. Also, the device provides a very advantageous ion
source in that a very high ion current can be obtained without
"blow-up", that is, mutual charge repulsion between the ions is
cancelled by the charge of the electrons. Thus, the inventive
generator, in addition to producing a narrow, concentrated plasma
beam, may function as a low-energy, high-current ion source with a
high density ion beam.
Referring now to the drawing, a magnet 11 provides an axial
magnetic field, indicated at 12, which passes through the central
portion of a conductive cylinder 13. The magnet 11, for example,
may be constructed of iron, with the cylinder 13 made of stainless
steel. A heated filament 14, at negative potential and made of
tungsten, for example, is positioned at one end of cylinder 13 and
emits electrons, which are attracted into the cylinder 13 by a
positive potential applied thereto by a power supply 15, power
supply 15 being for example at 200 volts. Filament 14 is heated by
a power supply 16 via leads 17 and 18, lead 18 being connected to
ground. The axial magnetic field 12 is created by a coil 19 wrapped
around one pole 20 of magnet 11 and connected to a power supply 21,
the other pole 22 of magnet 11 being wrapped with a coil 19' and
connected as indicated to power supply 21 such that the coils are
in phase to produce the axially-directed magnetic field 12. The
axially-directed magnetic field 12 keeps the electrons from
reaching the cylinder 13 so that the electrons emitted by filament
14 oscillate axially along magnetic field lines. Gas, such as
hydrogen, from a supply 23 passes through a tube or conduit 24 and
is introduced into cylinder 13 wherein it is ionized. The gas
supply tube 24 extends through the end piece of magnet 11 and
terminates in a cold cathode 25 which is connected to ground and at
negative potential. While not shown, a collar or insulating sleeve
may be positioned about cold cathode 25 and the associated end of
cylinder 13 to prevent leakage of the hydrogen gas therefrom. When
the hydrogen gas is ionized in cylinder 13, the ions are attracted
toward either the relatively negative cold cathode 25 and are lost,
or toward the heated filament 14. The magnetic field 12 keeps most
of the ions from striking the filament 14 so that the ions pass by
the filament to a target 26 within an energy dependent upon the
difference in the potentials on the filament 14 and cylinder 13.
Target 26 may be constructed of carbon and is held at a negative
200 volt potential, for example, via connection with a power supply
27. The ions that pass the filament 14 create a positive space
charge which causes electrons from the filament to also flow toward
the target along with ions. Thus a plasma beam, indicated at 28, is
formed. Tests have shown that the positive space charge is almost
completely cancelled by the electrons. The various potentials set
forth above are typical, and with -200 volts on the target 26, only
ions will strike. The target 26 may be of any type and construction
or it can be removed and the plasma beam 28 utilized for various
applications.
It has thus been shown that while in conventional ion beams, the
mutual repulsion between ions causes the beam to separate and
disperse so that only a few ions remain to strike the target, with
the inventive device the electrons cancel the space charge so that
the ions do not repel and separate. Thus, as described above and
illustrated in the drawing, nearly all the ions passing through the
filament 14 stay in the narrow, concentrated plasma beam 28 and
will strike the target 26. Accordingly, the present invention
provides an ion-electron generator or source capable of producing
an energetic plasma, thereby substantially advancing the state of
the art.
The inventive generator may be utilized for various applications.
For example, it may be used as a low energy ion source to provide,
for instance, surface treatment of various materials by sputtering.
Since the emitted beam is electrically neutral, it can be used to
propel an ion rocket in space.
While a particular embodiment of the invention has been illustrated
and described, modifications and changes will become apparent to
those skilled in the art, and it is intended to cover in the
appended claims all such modifications and changes as come within
the spirit and scope of the invention.
* * * * *